CN102237818B - Tower-like ultrasonic motor with asymmetrical structure and asymmetrical modes thereof as well as electric excitation mode of asymmetrical modes - Google Patents
Tower-like ultrasonic motor with asymmetrical structure and asymmetrical modes thereof as well as electric excitation mode of asymmetrical modes Download PDFInfo
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Abstract
The invention provides a tower-like ultrasonic motor with an asymmetrical structure and asymmetrical modes thereof as well as an electric excitation mode of the asymmetrical modes, belonging to ultrasonic motors. The tower-like ultrasonic motor comprises a stator and a linear guide rail, wherein the guide rail is pressed on a driving foot of the stator by pre-pressure; the stator is tower-like and comprises two piezoelectric vibrators with the different lengths, wherein the two piezoelectric vibrators form an included angle; each piezoelectric vibrator comprises a back-end cover, a piezoelectric ceramic, an electrode plate and a front-end cover in sequence; the front-end cover and the back-end cover are compressed and fixed by compression bolts; the upper end parts of the front-end covers of the two piezoelectric vibrators are integrated to form a driving foot by a flexible hinge with a suddenly-diminished sectional area; the stator is provided with the two asymmetrical working modes; when any asymmetrical working mode is excited, motion trails of material points on the surface of the driving foot of the stator are in a skew line; and the direction of dip of the skew line is changed with changes of the working modes so as to push the forward and reverse motions of the guide rail. The ultrasonic motor is large in thrust, wide in driving frequency band and reliable in work.
Description
Technical field:
The approximate turriform ultrasound electric machine of unsymmetric structure of the present invention and asymmetric mode and electric excitation mode belong to the ultrasound electric machine field.
Background technology:
Ultrasound electric machine is to utilize the inverse piezoelectric effect of piezoelectric ceramic and the new type power output device of ultrasonic vibration.Wherein, the rectilinear motion ultrasound electric machine belongs to a kind of of ultrasound electric machine.Compare with the traditional electrical magneto, ultrasound electric machine has low-speed and large-torque, and transient state is corresponding fast, the positioning accuracy height, control characteristic is good, does not produce also advantage such as not affected by magnetic fields of magnetic field, drive in precision, medicine equipment, fields such as Aero-Space have a wide range of applications.
Find through the literature search to existing approximate turriform ultrasound electric machine, Kurosawa etc. are at " Ieee transactions on ultrasonics, ferroelectrics, and frequency control " (1998 the 45th volume the 5th phase the 1188-1195 page) " Transducer for High Speed and Large Thrust Ultrasonic Linear Motor Using Two Sandwich-Type Vibrators " of delivering, this article has carried out labor to a kind of movement mechanism of single-driving foot V-arrangement high thrust linear type ultrasound motor of symmetrical structure, this motor utilizes the symmetry-antisymmetric vibration mode of two quadratures shown in Figure 2, stator is driven on the particle that drives foot on foot and the guide rail contact-making surface produce elliptic motion, promote the mover rectilinear motion.Find again in the retrieval, " design and the experimental study of high speed high thrust linear type ultrasound motor " that Li Yubao etc. deliver " Proceedings of the CSEE " (rolling up the 49-53 page of the 33rd phase in 2008 the 28th), this article has carried out labor to a kind of movement mechanism of double-driving foot butterfly high thrust linear type ultrasound motor of symmetrical structure, this motor also is symmetry-antisymmetric vibration mode of utilizing two quadratures, stator is driven on the particle that drives foot on foot and the guide rail contact-making surface produce elliptic motion, promote the mover rectilinear motion.
All by exciting the mode of oscillation of two quadratures simultaneously, the particle of stator produces elliptic motion to the linear type ultrasound motor that proposes in above-mentioned two pieces of documents on stator and guide rail contact-making surface, promotes guide rail movement.There is following deficiency in this:
1. to excite the mode of oscillation of two quadratures simultaneously, require two quadratures operation mode have a close resonance frequency;
2. because theoretical calculating and actual manufacturing tolerance, the contact of rotor when adding machine operation, the variation of temperature and load causes the resonance frequency of two quadrature operation modes that to a certain degree difference is arranged;
3. under the alternating signal excitation of single-frequency, because the resonance frequency of two quadrature operation modes has difference to a certain degree, cause two quadrature operation modes not ejected to greatest extent simultaneously, influenced operational efficiency and the performance of motor, made that also the drivable frequency domain of motor is narrower.
One of way of head it off is the motivational techniques that adopt single mode to drive.The motivational techniques that adopt single mode to drive have the following advantages: the frequency invariance problem that does not have the composite mode ultrasound electric machine; Drivable frequency domain is wideer; The operational efficiency of motor is higher; Anti-interference power is strong during work; Can simplify driving power, be easy to realize the miniaturization of power supply and integrated.
The literature search of the ultrasound electric machine through existing single mode is driven is found, " the two-way standing wave type linear ultrasonic motor " that Qian Xiaohua etc. deliver in " small and special electric machine " (2007 the 8th phase the 28-30 page), this article has proposed the rectangular plate type linear type ultrasound motor that a kind of single mode drives, and this motor has B3 and two operation modes of B4 (simultaneously a mode participation job can only be arranged).When B3 mode is worked, produce the skew lines motion that is tilted to the right on stator and the guide rail contact-making surface on the particle of stator, the mover positive movement; When B4 mode is worked, produce the skew lines motion that is tilted to the left on stator and the guide rail contact-making surface on the particle of stator, the mover counter motion.Its deficiency is: the clip position of stator is not placed near node, nodel line or the nodal section of operation mode, and this clamping that can cause stator is to the influence of operation mode and energy loss is increased; Half piezoelectric patches is only arranged in work during machine operation, this is unfavorable for improving the mechanical output performance of motor; In order to take into account forward and reverse motion, the position of motor-driven foot is not at the amplitude maximum, and the vibrational energy utilance is not high.
Summary of the invention:
The present invention is directed to the deficiencies in the prior art, propose that a kind of single mode drives, can realize forward and reverse motion, simple in structure, big power output, thrust-weight ratio is big, exciting efficiency is high, vibrational energy utilance height, the fast approximate turriform ultrasound electric machine of unsymmetric structure and asymmetric mode and the electric excitation mode of response speed.
Unsymmetric structure of the present invention is similar to the turriform ultrasound electric machine, constituted by stator and mover, wherein mover is a straight line guide rail, and stator is by first piezoelectric vibrator and second piezoelectric vibrator and drive sufficient the composition, and described guide rail is being pressed under the effect of precompression on the stator driving foot; It is characterized in that: described first piezoelectric vibrator and second piezoelectric vibrator are asymmetric, and namely first piezoelectric vibrator is different with the second piezoelectric vibrator length, and wherein the length of first piezoelectric vibrator is L1, and the length of second piezoelectric vibrator is L2, L1〉L2.
Unsymmetric structure of the present invention is similar to the turriform ultrasound electric machine, it is characterized in that: said stator is V-type or U-shaped.
Unsymmetric structure of the present invention is similar to the turriform ultrasound electric machine, it is characterized in that: above-mentioned piezoelectric vibrator is piezoelectric ceramic piece bolt matable or piezoelectric ceramic piece adhesive type.
Two nonsymmetrical vibration mode that the approximate turriform ultrasound electric machine of unsymmetric structure of the present invention is used, it is characterized in that, two nonsymmetrical vibration mode are respectively the first nonsymmetrical vibration mode and the second nonsymmetrical vibration mode, wherein the resonance frequency of the first nonsymmetrical vibration mode is, the resonance frequency of the second nonsymmetrical vibration mode is.The vibration shape characteristics of the first nonsymmetrical vibration mode are: length is that first piezoelectric vibrator of L1 is the local buckling complex vibration, and length is that second piezoelectric vibrator of L2 is local curved shaking.The vibration shape characteristics of the second nonsymmetrical vibration mode are: length is that first piezoelectric vibrator of L1 is local curved shaking, and length is that second piezoelectric vibrator of L2 is the local buckling complex vibration.
The electric excitation mode of the asymmetric mode of the approximate turriform ultrasound electric machine of unsymmetric structure of the present invention is characterized in that: establishing guide rail is positive direction to the direction of motion of second piezoelectric vibrator, and guide rail be opposite direction to the direction of motion of first piezoelectric vibrator; When the first piezoelectric vibrator pumping signal and the identical pumping signal of second piezoelectric vibrator pumping signal input, and driving frequency is positioned near the resonance frequency of the first nonsymmetrical vibration mode, the first nonsymmetrical vibration mode of stator will be excited, make that driving sufficient end face particle motion trace is the linear reciprocating motion that tilts to positive direction, thereby promote guide rail along positive movement; When the first piezoelectric vibrator pumping signal and the identical pumping signal of second piezoelectric vibrator pumping signal input, and driving frequency is positioned near the resonance frequency of the second nonsymmetrical vibration mode, the second nonsymmetrical vibration mode of stator will be excited, make that driving sufficient end face particle motion trace is the linear reciprocating motion that tilts in the other direction, thereby promote guide rail along counter motion.
Compare with background technology, the innovation part of the approximate turriform ultrasound electric machine of unsymmetric structure of the present invention and asymmetric mode and electric excitation mode is:
1. the single-driving foot V-arrangement high thrust linear type ultrasound motor of the symmetrical structure that proposes at " Transducer for High Speed and Large Thrust Ultrasonic Linear Motor Using Two Sandwich-Type Vibrators " literary composition with Kurosawa etc. is compared, the single-driving foot V-arrangement high thrust linear type ultrasound motor of the symmetrical structure of propositions such as Kurosawa utilizes two quadratures and the close symmetry-antisymmetric vibration mode of resonance frequency, stator is driven on the particle that drives foot on foot and the guide rail contact-making surface produce elliptic motion, promote the mover rectilinear motion.And the single mode that the approximate turriform ultrasound electric machine of unsymmetric structure utilizes two resonance frequencys to differ bigger is carried out work, stator is driven drive the reciprocal skew lines motion that produces on the sufficient particle with respect to guide rail, the forward and reverse rectilinear motion of promotion mover on foot and the guide rail contact-making surface.
2. compare at double-driving foot butterfly high thrust linear type ultrasound motor that " design and experimental study of high speed high thrust linear type ultrasound motor " literary composition proposes with Li Yubao etc., the double-driving foot butterfly high thrust linear type ultrasound motor of the symmetrical structure of propositions such as Li Yubao utilizes two quadratures and the close symmetry-antisymmetric vibration mode of resonance frequency, stator is driven on the particle that drives foot on foot and the guide rail contact-making surface produce elliptic motion, promote the mover rectilinear motion.And the single mode that the approximate turriform ultrasound electric machine of unsymmetric structure utilizes two resonance frequencys to differ bigger is carried out work, stator is driven drive the reciprocal skew lines motion that produces on the sufficient particle with respect to guide rail, the forward and reverse rectilinear motion of promotion mover on foot and the guide rail contact-making surface.
3. compare with the rectangular plate type linear type ultrasound motor that single mode that Qian Xiaohua etc. proposes at " two-way standing wave type linear ultrasonic motor " drives, the clip position of the stator of the rectangular plate type linear type ultrasound motor that single mode drives is not placed near node, nodel line or the nodal section of operation mode, and this clamping that can cause stator is to the influence of operation mode and energy loss is increased; In order to take into account forward and reverse motion, its position that drives foot is not at the amplitude maximum, and the vibrational energy utilance is not high.And the clip position of the approximate turriform ultrasound electric machine of unsymmetric structure is placed near the operation mode nodel line, and this influence to operation mode is little and energy loss is reduced; Whole piezoelectric patches participation work during machine operation are conducive to improve the mechanical output performance of motor; It drives sufficient position at operation mode amplitude maximum simultaneously, vibrational energy utilance height.
4. unsymmetric structure of the present invention is similar to turriform ultrasound electric machine and asymmetric mode and electric excitation mode, and its maximum innovative point is: (1) structure innovation.First piezoelectric vibrator of the approximate turriform ultrasound electric machine stator of unsymmetric structure and the length of second piezoelectric vibrator are unequal, the symmetry that the resonance frequency that this unsymmetric structure makes the operation mode of stator be had by symmetrical structure is close-antisymmetric vibration mode (Fig. 2) is dissimilated as two resonance frequencys and differs bigger asymmetric operation mode (Fig. 3), and further makes motor be suitable for the single mode driving; (2) operation mode innovation.The approximate turriform ultrasound electric machine stator design of unsymmetric structure has the asymmetric operation mode of two different resonant frequencies, when making stator with any one mode work wherein, the movement locus that stator drives the surperficial particle of foot is a skew lines, and the incline direction of skew lines changes with the change of operation mode, thereby promotes the forward and reverse motion of guide rail.
Description of drawings:
Fig. 1. unsymmetric structure is similar to turriform ultrasound electric machine stator structure schematic diagram;
Fig. 2. symmetrical structure V-arrangement linear ultrasonic motor stator operation mode schematic diagram;
Fig. 3. unsymmetric structure is similar to turriform ultrasound electric machine stator operation mode schematic diagram;
Fig. 4. polarization layout and the electric excitation mode schematic diagram of the approximate turriform ultrasound electric machine stator piezoelectric ceramic of unsymmetric structure;
Fig. 5. Fig. 6. unsymmetric structure is similar to turriform ultrasound electric machine operation principle schematic diagram;
Fig. 7. the structural representation of approximate second embodiment of turriform ultrasound electric machine (U-shaped structure and piezoelectric ceramic bolt matable) of unsymmetric structure;
Fig. 8. polarization layout and the electric excitation mode schematic diagram of the piezoelectric ceramic of approximate second embodiment of turriform ultrasound electric machine (U-shaped structure and piezoelectric ceramic bolt matable) of unsymmetric structure;
Fig. 9. the structural representation of approximate the 3rd embodiment of turriform ultrasound electric machine (V-structure and piezoelectric ceramic adhesive type) of unsymmetric structure;
Figure 10. polarization layout and the electric excitation mode schematic diagram of the piezoelectric ceramic of approximate the 3rd embodiment of turriform ultrasound electric machine (V-structure and piezoelectric ceramic adhesive type) of unsymmetric structure;
Figure 11. the structural representation of approximate the 4th embodiment of turriform ultrasound electric machine (U-shaped structure and piezoelectric ceramic adhesive type) of unsymmetric structure;
Figure 12. polarization layout and the electric excitation mode schematic diagram of the piezoelectric ceramic of approximate the 4th embodiment of turriform ultrasound electric machine (U-shaped structure and piezoelectric ceramic adhesive type) of unsymmetric structure;
Number in the figure title: 1 first piezoelectric vibrator; 2 first rear end caps; 3 first hold-down bolts; 4 piezoelectric ceramic; 5 electrode slices; 6 second piezoelectric vibrators; 7 second rear end caps; 8 second hold-down bolts; 9 front end housings; 10 flexible hinges; 11 drive foot; 12 line slideways; The symmetric vibration Mode Shape of 13 symmetrical structure stators; The antisymmetric vibration Mode Shape of 14 symmetrical structure stators; The first nonsymmetrical vibration Mode Shape of 15 unsymmetric structure stators; The second nonsymmetrical vibration Mode Shape of 16 unsymmetric structure stators; 17 piezoelectric ceramic polarised directions; 18 ground connection; 19 first piezoelectric vibrator pumping signals; 20 second piezoelectric vibrator pumping signals; 21 unsymmetric structure stators are operated in and drive sufficient end face particle motion trace under the first nonsymmetrical vibration mode; 22 unsymmetric structure stators are operated in the first nonsymmetrical vibration mode lower guideway direction of motion; 23 unsymmetric structure stators are operated in and drive sufficient end face particle motion trace under the second nonsymmetrical vibration mode; 24 unsymmetric structure stators are operated in the second nonsymmetrical vibration mode lower guideway direction of motion; 25 stator metallic elastic bodies; 26 stick on the piezoelectric ceramic piece on the stator metallic elastic body.
Embodiment:
The approximate turriform ultrasound electric machine of a kind of unsymmetric structure and asymmetric mode and electric excitation mode are made of stator and mover as shown in Figure 1, and wherein mover is a straight line guide rail 12.Be characterized in: under the effect of precompression, guide rail 12 is pressed in stator and drives on the foot 11.Stator comprises that length is first piezoelectric vibrator 1 of L1 and second piezoelectric vibrator 6, the wherein L1 that length is L2〉L2; First piezoelectric vibrator 1 comprises first rear end cap 2, piezoelectric ceramic 4 and electrode slice 5, front end housing 9 successively, and front end housing 9 and first rear end cap 2 are fixed by first hold-down bolt 3; Second piezoelectric vibrator 6 comprises second rear end cap 7, piezoelectric ceramic 4 and electrode slice 5, front end housing 9 successively, and front end housing 9 and second rear end cap 7 are fixed by second hold-down bolt 8; Wherein piezoelectric ceramic 4 places between front end housing 9 and first rear end cap 2 or second rear end cap 7, and electrode slice 5 places between per two piezoelectric ceramic 4; The flexible hinge 10 that the front end housing upper end of two piezoelectric vibrators diminishes suddenly by sectional area combines as a whole to form and drives foot 11; Above-mentioned flexible hinge 10 is realized by near 3 holes of processing driving foot 11 at stator; Above-mentioned first piezoelectric vibrator 1 and second piezoelectric vibrator 6 have angle, whole V-arrangement or U-shaped structure for approximate turriform.
Two asymmetric operation modes of the approximate turriform ultrasound electric machine stator of a kind of unsymmetric structure as shown in Figure 3.When the physical dimension of the approximate turriform ultrasound electric machine stator of unsymmetric structure is determined, can calculate resonance frequency and the Mode Shape of two asymmetric operation modes by finite element software ADINA.The resonance frequency of the first nonsymmetrical vibration mode 15 of the unsymmetric structure stator shown in Fig. 3 (a) is, the resonance frequency of the second nonsymmetrical vibration mode 16 of the unsymmetric structure stator shown in Fig. 3 (b) is.The vibration shape characteristics of the first nonsymmetrical vibration mode 15 are: length is that first piezoelectric vibrator 1 of L1 is the local buckling complex vibration, length is that second piezoelectric vibrator 6 of L2 is local curved shaking, and makes that the movement locus that drives foot 11 end face particles is the linear reciprocating motion that tilts to second piezoelectric vibrator, 6 directions; The vibration shape characteristics of the second nonsymmetrical vibration mode 16 are: length is that first piezoelectric vibrator 1 of L1 is local curved shaking, length is that second piezoelectric vibrator 6 of L2 is the local buckling complex vibration, makes that the movement locus that drives foot 11 end face particles is the linear reciprocating motion that tilts to first piezoelectric vibrator, 1 direction.
The polarization layout of the approximate turriform ultrasound electric machine stator piezoelectric ceramic of a kind of unsymmetric structure and electric excitation mode are as shown in Figure 4.Stator has four groups of totally eight piezoelectric ceramic, and between front end housing 9 and first rear end cap 2 or second rear end cap 7, every group comprises the opposite piezoelectric ceramic of a pair of polarised direction.The direction of arrow 17 is the polarised direction of piezoelectric ceramic, and piezoelectric ceramic polarizes along thickness direction, utilizes contrary piezoelectric d
33Effect excites the vibration of stator.Electrode slice is laid in the centre of every group of piezoelectric ceramic, is used for the external first piezoelectric vibrator pumping signal 19 or the second piezoelectric vibrator pumping signal 20; Electrode slice is laid in the both sides of every group of piezoelectric ceramic, is used for outer signal ground 18.When the first piezoelectric vibrator pumping signal 19 pumping signal identical with the input of the second piezoelectric vibrator pumping signal 20, and driving frequency is positioned near the resonance frequency of the first nonsymmetrical vibration mode 15, will excite the first nonsymmetrical vibration mode 15 of stator; When the first piezoelectric vibrator pumping signal 19 pumping signal identical with the input of the second piezoelectric vibrator pumping signal 20, and driving frequency is positioned near the resonance frequency of the second nonsymmetrical vibration mode 16, will excite the second nonsymmetrical vibration mode 16 of stator.
The operation principle of the approximate tower-shaped linear ultrasonic motor of a kind of unsymmetric structure and nonsymmetrical vibration mode as shown in Figure 5 and Figure 6.If guide rail is positive direction to the direction of motion of second piezoelectric vibrator 6, guide rail is in the other direction to the direction of motion of first piezoelectric vibrator 1; When stator works in the first nonsymmetrical vibration mode 15, make that driving sufficient end face particle motion trace 21 is the linear reciprocating motion that tilts to positive direction, moves along forward 22 thereby promote guide rail; When stator works in the second nonsymmetrical vibration mode 16, make that driving sufficient end face particle motion trace 23 is the linear reciprocating motion that tilts in the other direction, moves along reverse 24 thereby promote guide rail.
Principles of structural design:
1. first piezoelectric vibrator 1 of stator and being uneven in length of first piezoelectric vibrator 6.The length of first piezoelectric vibrator 1 is L1, and the length of first piezoelectric vibrator 6 is L2, wherein L1〉L2;
2. the size of flexible hinge 10 thinnest parts is suitable.The size of flexible hinge 10 thinnest parts directly influences longitudinal vibration amplitude and the intensity of stator.Therefore, the size of flexible hinge 10 thinnest parts will be taken into account the needs of stator longitudinal vibration amplitude and intensity.
3. make piezoelectric ceramic 4 place the front portion of nodal plane, such layout can make vibrational energy to greatest extent to driving foot 7 radiation.
Claims (5)
1. a unsymmetric structure is similar to the turriform ultrasound electric machine, constituted by stator and mover, wherein mover is a straight line guide rail (12), stator is by first piezoelectric vibrator (1) and second piezoelectric vibrator (6) and drive foot (11) and forms, and described guide rail (12) drives enough on (11) being pressed in stator under the effect of precompression; It is characterized in that: described first piezoelectric vibrator (1) and second piezoelectric vibrator (6) are asymmetric, namely first piezoelectric vibrator (1) is different with second piezoelectric vibrator (6) length, wherein the length of first piezoelectric vibrator (1) is L1, and the length of second piezoelectric vibrator (6) is L2, L1＞L2.
2. unsymmetric structure according to claim 1 is similar to the turriform ultrasound electric machine, and it is characterized in that: said stator is V-type or U-shaped.
3. unsymmetric structure according to claim 1 is similar to the turriform ultrasound electric machine, and it is characterized in that: above-mentioned piezoelectric vibrator is piezoelectric ceramic piece bolt matable or piezoelectric ceramic piece adhesive type.
4. unsymmetric structure according to claim 1 is similar to the nonsymmetrical vibration mode of turriform ultrasound electric machine, it is characterized in that: have two nonsymmetrical vibration mode to be respectively the first nonsymmetrical vibration mode (15) and the second nonsymmetrical vibration mode (16), wherein the resonance frequency of the first nonsymmetrical vibration mode (15) is ω
1, the resonance frequency of the second nonsymmetrical vibration mode (16) is ω
2, ω
1＜ω
2The vibration shape characteristics of the first nonsymmetrical vibration mode (15) are: length is that first piezoelectric vibrator (1) of L1 is the local buckling complex vibration, and length is that second piezoelectric vibrator (6) of L2 is local curved shaking; The vibration shape characteristics of the second nonsymmetrical vibration mode (16) are: length is that first piezoelectric vibrator (1) of L1 is local curved shaking, and length is that second piezoelectric vibrator (6) of L2 is the local buckling complex vibration.
5. utilize the electric excitation mode of the described nonsymmetrical vibration mode of claim 4, it is characterized in that: establishing guide rail is positive direction to the direction of motion of second piezoelectric vibrator (6), and guide rail is in the other direction to the direction of motion of first piezoelectric vibrator (1); As the first piezoelectric vibrator pumping signal (19) and the identical pumping signal E of the second piezoelectric vibrator pumping signal (20) input
1=Vsin (ω t), and driving frequency ω is positioned at the resonance frequency ω of the first nonsymmetrical vibration mode (15)
1Near, will excite the first nonsymmetrical vibration mode (15) of stator, make that driving sufficient end face particle motion trace is the linear reciprocating motion that tilts to positive direction, thereby promote guide rail along positive movement; As the first piezoelectric vibrator pumping signal (19) and the identical pumping signal E of the second piezoelectric vibrator pumping signal (20) input
2=Vsin (ω t), and driving frequency ω is positioned at the resonance frequency ω of the second nonsymmetrical vibration mode (16)
2Near, will excite the second nonsymmetrical vibration mode (16) of stator, make that driving sufficient end face particle motion trace is the linear reciprocating motion that tilts in the other direction, thereby promote guide rail along counter motion.
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| CN103825492B (en) * | 2013-05-15 | 2016-12-28 | 南京航空航天大学 | A kind of piezoelectricity motor |
| CN106026765B (en) * | 2016-06-06 | 2017-09-22 | 长春工业大学 | Asymmetric rhombus enlarger piezoelectricity stick-slip linear electric motors and its motivational techniques |
| CN110768570B (en) * | 2019-04-08 | 2022-09-27 | 浙江师范大学 | Micro-nano stepping piezoelectric driving device |
| CN112271954A (en) * | 2020-11-13 | 2021-01-26 | 上海工程技术大学 | Symmetrically-arranged double-foot driving linear ultrasonic motor |
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| JP2003284364A (en) * | 2002-03-22 | 2003-10-03 | Korea Advanced Inst Of Sci Technol | Piezoelectric linear ultrasonic motor |
| CN101262182A (en) * | 2008-04-15 | 2008-09-10 | 华南农业大学 | Compound vibrator line ultrasonic electromotor |
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| JP2003284364A (en) * | 2002-03-22 | 2003-10-03 | Korea Advanced Inst Of Sci Technol | Piezoelectric linear ultrasonic motor |
| CN101262182A (en) * | 2008-04-15 | 2008-09-10 | 华南农业大学 | Compound vibrator line ultrasonic electromotor |
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