CN203406798U - Single-drive footplate-shaped piezoelectric motor driven in single-mode and antifriction way - Google Patents
Single-drive footplate-shaped piezoelectric motor driven in single-mode and antifriction way Download PDFInfo
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- CN203406798U CN203406798U CN201320511631.0U CN201320511631U CN203406798U CN 203406798 U CN203406798 U CN 203406798U CN 201320511631 U CN201320511631 U CN 201320511631U CN 203406798 U CN203406798 U CN 203406798U
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Abstract
A single-drive footplate-shaped piezoelectric motor driven in a single-mode and antifriction way belongs to the field of piezoelectric motors. The motor is composed of a plate-shaped stator and a linear guide rail. The guide rail is pressed on a drive foot of the plate-shaped stator by pre-pressure. The stator is overally plate-shaped and comprises an oscillator body and a single-drive foot, wherein the oscillator body made of piezoelectric ceramic material is cuboid and is provided with three polarization partitions, and the single-drive foot made of wear-resistant material is integrated as a whole with the oscillator body through adhering or welding or sintering. The motor is designed to have two working modes: a resonant working mode and a non-resonant working mode. When the motor is in the resonant working mode, the stator works under single-mode drive of an oblique straight line trajectory and antifriction drive to push the guide rail to move forwardly and reversely; and when the motor is in the non-resonant working mode, the stator works under forced-vibration and antifriction drive to push the guide rail to move forwardly and reversely. Compared with an existing piezoelectric motor, the output power of the piezoelectric motor can be effectively increased, and the piezoelectric motor has a wide driving frequency band and works reliably.
Description
technical field:
The single-driving foot plate shape piezoelectric motor that single mode of the present utility model antifriction drive, belongs to piezoelectric motor field.
background technology:
Piezoelectric motor is the new type power output device that utilizes the inverse piezoelectric effect of piezoelectric ceramic to carry out work.Wherein, linear piezoelectric motor belongs to a kind of of piezoelectric motor.Compare with traditional electrical magneto, piezoelectric motor has low-speed and large-torque, and transient response is fast, positioning precision is high, and control characteristic is good, does not produce the also advantage such as not affected by magnetic fields of magnetic field, in precision, drive, medicine equipment, the fields such as Aero-Space have a wide range of applications.
Through the literature search of existing single-driving foot plate shape piezoelectric motor is found, patentee is that the United States Patent (USP) " Piezoelectric adjusting element " that Physik-Instrumente (PI) and the patent No. are 6765335B2 is described a kind of single-driving foot plate shape piezoelectric motor and multiple enforcement structure thereof in detail.Through retrieval, find again, Oleksiy Vyshnevskyy, Sergej Kovalev and Wladimir Wischnewskiy are at " Ieee transactions on ultrasonics, ferroelectrics, and frequency control " (the 52nd volume o. 11th was the 2047-2053 page in 2005) " A Novel of delivering, Single-Mode Piezoceramic Plate Actuator for Ultrasonic Linear Motors ", the document has successfully been manufactured experimently a kind of enforcement structure of above-mentioned Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor, and provided by experiment the performance data of Physik-Instrumente (PI) the single-driving foot plate shape piezoelectric motor of this enforcement structure.The Physik-Instrumente of this enforcement structure (PI) single-driving foot plate shape piezoelectric motor has following characteristic feature: the stator integral body of motor is plate shape, comprises oscillator main body and single-driving foot two parts; The oscillator main body wherein consisting of piezoceramic material is cuboid, has two polarization subregions on it; The single-driving foot consisting of high-abrasive material is integrated with oscillator body junction by bonding; This single-driving foot plate shape piezoelectric motor is operated in resonance state, under single mode drives, the movement locus of the surperficial particle of stator driving foot is skew lines, because skew lines movement locus can be regarded the special case that between the motion of normal direction in elliptical trajectory and tangential motion, phase difference is 0 as, so the single mode of skew lines movement locus drives and also can be considered as the bimodal special case that phase difference is 0 between normal direction mode of motion and tangential motion mode in driving; Stator is worked under the single mode of skew lines movement locus drives, thereby promotes the forward and reverse motion of guide rail.Compare with above-mentioned enforcement structure, other of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor implemented structure except there is certain difference in version, and their operation principle is basic identical.Through retrieval, find again, in the monograph " Ultrasonic Motor Techniques and application " that Science Press publishes in September, 2007 (the raw work of a Zhao Chun) book, mentioned document " A Novel, Single-Mode Piezoceramic Plate Actuator for Ultrasonic Linear Motors " Physik-Instrumente (PI) the single-driving foot plate shape piezoelectric motor of described this enforcement structure, this motor has successfully been widely used in the fields such as accurate driving.
Through existing antifriction being driven to the literature search of piezoelectric motor, find, the Chinese patent that the artificial Zhou Tieying of patented invention and Dong Shuxiang and patent publication No. are CN1043225A " annular three laminate patch piezoelectric supersonic oscillators and with the ultrasonic micro motor of its clamper " is described a kind of antifriction in detail and is driven piezoelectric motor, this antifriction drives piezoelectric motor to have following characteristic feature: its background technology is the clamping type linear piezoelectric motor based on replacing clamper drive principle, as the clamping type micro-creep piezoelectric motor of U.S. Burleigh company development in 1978, be intended to reduce high clamper operating voltage, extend the useful life of motor, by the alternately clamper drive principle of background technology, evolved to the alternately antifriction drive principle of the antifriction driving piezoelectric motor of the propositions such as Zhou Tieying, alternately antifriction drive principle imbody is in alternately apply the voltage signal that a frequency is clamper oscillator resonance frequency on two clamper oscillators, make two frictional resistance between clamper friction pair along with resonance potential signal alternately apply by stiction → kinetic force of friction → stiction → kinetic force of friction → ... alternately change, by apply resonance potential signal reduce coefficient of friction between clamper friction pair and and then reduce the frictional resistance between clamper friction pair, the antifriction of the propositions such as Zhou Tieying drives piezoelectric motor to be operated in off-resonance state, when the driving element off-resonance of piezoelectric motor is periodically extended and shortens, driving the movement locus of the surperficial particle of foot is horizontal linear, if now do not apply antifriction on certain clamper oscillator, do not drive signal, the frictional resistance of two clamper friction pairs equates, only rely on driving element off-resonance periodically extend and shorten and can not move by drive motors, must on certain clamper oscillator, apply antifriction and drive signal to cause the frictional resistance of two clamper friction pairs unequal, when the antifriction of the propositions such as Zhou Tieying drives the driving element off-resonance of piezoelectric motor, periodically extend and shorten, on two clamper oscillators, coordinate driving element alternately to apply the antifriction driving signal that a frequency is clamper oscillator resonance frequency, will drive mover to realize directed movement simultaneously.
Through driving the literature search of piezoelectric motor to find again to existing antifriction, the artificial Hu Junhui of patented invention, Lu little Long and Zhao Chun Chinese patent " microminiature antifriction drive type straight-line ultrasound electric machine and energisation mode thereof " raw and that patent publication No. is CN102780417A is described a kind of stickup chip antifriction in detail and is driven linear ultrasonic motor, through retrieval, find again, the artificial Hu Junhui of patented invention, Lu little Long and Zhao Chun Chinese patent " microminiature antifriction drive-type rotary ultrasonic motor " raw and that patent publication No. is CN102751901A is described a kind of stickup chip antifriction in detail and is driven rotary ultrasonic motor, through retrieval, find again, the artificial Hu Junhui of patented invention, Lu little Long and Zhao Chun Chinese patent " antifriction drive-type ultrasound electric machine and combined type stator module thereof " raw and that patent publication No. is CN102810997A is described a kind of bolt matable antifriction in detail and is driven linear ultrasonic motor, above-mentioned three kinds of artificial Hu Junhui of patented invention, the antifriction drive-type piezoelectric motor of Lu little Long and Zhao Chunsheng has following characteristic feature jointly: its background technology is the ultrasound electric machine based on bimodal drive principle, if patentee is the described single-driving foot plate shape of United States Patent (USP) " Ceramic Motor " piezoelectric motor that Nanomotion Ltd and the patent No. are 5453653, the described rotary type travelling wave ultrasonic motor of the Chinese patent that and for example patented invention people is CN1242645A for Zhao Chun is raw with Jin Long and patent publication No. " rotary type travelling wave ultrasonic motor and by the curtain open/close device of its driving ", and patented invention people for Zhao Chun raw with Huang Weiqing and the patent publication No. described rotary type travelling wave ultrasonic motor of Chinese patent " piezoelectric travelling-wave type ring-shape supersonic motor " that is CN1405967A etc., be intended to solve existing Electric Machine Control difficulty and the low shortcoming of delivery efficiency that two operation mode frequency invariances are had relatively high expectations and caused thus of ultrasound electric machine based on bimodal drive principle, by the bimodal drive principle of background technology, evolved to the antifriction drive principle of the propositions such as Hu Junhui, the antifriction drive principle imbody of the propositions such as Hu Junhui applies compartment sine voltage signal mutually in the antifriction by motor, swash local longitudinal vibration or the bending vibration of generator drive foot compartment, make frictional resistance between stator and mover along with compartment sine voltage signal apply by stiction → kinetic force of friction → stiction → kinetic force of friction → ... compartment ground changes, by apply sine voltage signal reduce coefficient of friction between stator and mover and and then reduce the frictional resistance between stator and mover, the antifriction of the propositions such as Hu Junhui drives piezoelectric motor to be operated in resonance state, when the driving of piezoelectric motor applies the square-wave signal of continous way mutually, can excite the operation mode that friction drive is provided, under the effect of operation mode, driving the movement locus of the surperficial particle of foot is horizontal linear, if now do not apply mutually compartment sine voltage signal in the antifriction of motor, stator equals backhaul at the horizontal rectilinear motion track acting to mover at the rise of horizontal rectilinear motion track to the acting of mover, only rely on the operation mode of horizontal rectilinear motion track to move by drive motors, must apply mutually in the antifriction of piezoelectric motor pumping signal to cause stator, at the rise of horizontal rectilinear motion track, the acting of mover is greater than to backhaul at the horizontal rectilinear motion track acting to mover, when driving the driving of piezoelectric motor, the antifriction of the propositions such as Hu Junhui applies mutually the square-wave signal of continous way, for exciting the operation mode that friction drive is provided, simultaneously in the antifriction of motor, match and apply compartment sine voltage signal, for compartment ground, excite and provide the motor of antifriction to drive local longitudinal vibration or bending vibration enough, will drive mover to realize directed movement.
Although the above-mentioned some piezoelectric motors in background technology have the commendable parts such as the single mode drive principle of skew lines movement locus and antifriction drive principle, all have deficiency separately.
The described antifriction of the Chinese patent that the artificial Zhou Tieying of patented invention and Dong Shuxiang and patent publication No. are CN1043225A " annular three laminate patch piezoelectric supersonic oscillators and with the ultrasonic micro motor of its clamper " drives the weak point of piezoelectric motor to be: due to the antifriction of proposition such as Zhou Tieying, driving piezoelectric motor is to research and develop for the deficiency of clamping type linear piezoelectric motor, therefore this motor can only be operated in off-resonance state, cause its speed of service very low, limited its scope of application.Solve one of way of this weak point: the piezoelectric motor of design Novel work principle, to replace the piezoelectric motor of clamping type operation principle, makes the piezoelectric motor of Novel work principle not only can be operated in off-resonance state, and can be operated in resonance state.
The artificial Hu Junhui of patented invention, Lu little Long and Zhao Chun life and patent publication No. are respectively CN102780417A, the described three kinds of antifriction of the Chinese patent of CN102751901A and CN102810997A drive the weak point of ultrasound electric machine to be: because the antifriction of proposition such as Hu Junhui drives piezoelectric motor, be drive for bimodal that ultrasound electric machine exists two operation mode frequency invariances are had relatively high expectations and the Electric Machine Control difficulty and the low shortcoming of delivery efficiency that cause are are thus researched and developed, therefore the antifriction driving piezoelectric motor of propositions such as Hu Junhui has only adopted antifriction drive principle, and abandon using bimodal drive principle.The monograph " Ultrasonic Motor Techniques and application " of publishing according to Science Press (the raw work of Zhao Chun) is known: although Electric Machine Control difficulty and the low shortcoming of delivery efficiency that two operation mode frequency invariances are had relatively high expectations and caused thus that bimodal drives ultrasound electric machine to exist, but the development along with technology, occurred that a lot of new technologies drive the above-mentioned shortcoming of ultrasound electric machine in order to solve bimodal, as the automatic frequency tracking technology of bimodal driving ultrasound electric machine; Successfully be widely used in the classical ultrasound electric machine in various high and new technologies field now, majority is all the ultrasound electric machine that bimodal drives; These have all illustrated that it is not proper abandoning using bimodal drive principle.Solve one of way of this weak point: antifriction drive principle and bimodal drive principle are organically combined, for researching and developing novel piezoelectric motor; Two of way: the single mode drive principle that adopts skew lines movement locus, for researching and developing novel piezoelectric motor, because driving, the single mode of skew lines movement locus also can be considered as the bimodal special case that phase difference is 0 between normal direction mode of motion and tangential motion mode in driving, therefore adopt the single mode drive principle of skew lines movement locus not only to there is bimodal drive principle, and the Electric Machine Control difficulty and the low shortcoming of delivery efficiency that do not exist bimodal drive principle two operation mode frequency invariances to be had relatively high expectations and cause thus; Three of way: the single mode drive principle of antifriction drive principle and skew lines movement locus is organically combined, for researching and developing novel piezoelectric motor.
Document " A Novel, Single-Mode Piezoceramic Plate Actuator for Ultrasonic Linear Motors " described patentee be that a kind of weak point of implementing structure of the single-driving foot plate shape piezoelectric motor described in Physik-Instrumente (PI) and the patent No. United States Patent (USP) " Piezoelectric adjusting element " that is 6765335B2 is: although this enforcement structure of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor has successfully been widely used in the fields such as precision driving, but the angle from scientific and technological progress, should be on the basis of the skew lines movement locus single mode drive mechanism of this enforcement structure of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor, incorporate other drive mechanism, for researching and developing novel piezoelectric motor.Solve one of way of this weak point: the single mode drive principle of antifriction drive principle and skew lines movement locus is organically combined, for researching and developing novel piezoelectric motor.Because other enforcement structure and the above-mentioned enforcement structure of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor are basic identical in operation principle, and whole enforcement structures of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor all do not adopt the single mode of antifriction drive principle or antifriction driving and skew lines movement locus to drive the drive principle combining, therefore the method single mode drive principle of antifriction drive principle and skew lines movement locus being organically combined, will form the piezoelectric motor of novel drive principle.
utility model content:
The utility model is for the deficiencies in the prior art, proposes that a kind of single mode antifriction drive, can realize forward and reverse motion, simple in structure, thrust-weight ratio is large, exciting efficiency is high, vibrational energy utilance is high, the single-driving foot plate shape piezoelectric motor of fast response time.
For reaching this object, the single-driving foot plate shape piezoelectric motor that the utility model provides a kind of single mode antifriction to drive, by plate shape stator and mover, formed, wherein mover is a line slideway, plate shape stator is comprised of oscillator main body and single-driving foot two parts, and described guide rail is pressed on the single-driving foot of plate shape stator under the effect of precompression; The oscillator main body wherein consisting of piezoceramic material is cuboid, on it, there are three polarization subregions, wherein two polarization subregions drive for the single mode driving of the skew lines movement locus under resonance mode and the forced vibration under off-resonance pattern, and another one polarization subregion drives for antifriction; The described single-driving foot consisting of high-abrasive material is integrated by bonding or welding or sintering and oscillator body junction.
As the further refinement of the utility model piezoelectric motor, the single-driving foot plate shape piezoelectric motor that single mode of the present utility model antifriction drive, its oscillator main body is characterised in that: the polarised direction of oscillator main body polarizes for the thickness direction along oscillator main body; Thickness direction along oscillator main body has two surfaces, is respectively thickness direction front surface and thickness direction rear surface; On thickness direction front surface, sintering has the silver layer of three mutually insulateds that use as electrode, corresponds respectively to three polarization subregions of oscillator main body; On thickness direction rear surface, the silver layer that sintering has a monoblock to use as electrode.
As the single-driving foot plate shape piezoelectric motor of single mode of the present utility model antifriction driving, its mode of operation is characterised in that: this design of electrical motor has resonance and two kinds of mode of operations of off-resonance.In resonance mode of operation, stator is worked under the single mode of skew lines movement locus antifriction drive, and promotes the forward and reverse motion of guide rail; In off-resonance mode of operation, stator is worked under forced vibration antifriction driving, promotes the forward and reverse motion of guide rail.
As the further refinement of the utility model mode of operation, in resonance mode of operation, the single mode vibration shape of drive motors work is the asymmetric vibration shape 10 of skew lines movement locus and the asymmetric vibration shape 11 of skew lines movement locus; The resonance frequency of the asymmetric vibration shape 10 single modes of skew lines movement locus and the asymmetric vibration shape 11 single modes of skew lines movement locus equates, is all
; The frequency of the single mode pumping signal of skew lines movement locus is
,
approach
, take simultaneously the work of antifriction mode drive motors for driving sufficient part forcing longitudinal vibration or driving sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot, the frequency of antifriction driving pumping signal is
,
.
As the further refinement of the utility model mode of operation mode of connection, the mode of connection under resonance and two kinds of mode of operations of off-resonance is as follows, silver layer
for ground connection; Silver layer
form separately the A phase of motor, silver layer
form separately the B phase of motor, silver layer
form separately the C phase of motor, the C of motor is also that motor drives phase in the antifriction of resonance and two kinds of mode of operations of off-resonance mutually.The mode of connection under above-mentioned resonance and two kinds of mode of operations of off-resonance for the utility model, realizes the single mode of the skew lines movement locus under resonance mode of operation the forced vibration under antifriction driving and off-resonance mode of operation antifriction for motor and drives and lay the first stone.
As the further refinement of the utility model mode of operation pumping signal, in resonance mode of operation, the A phase of motor (or B phase) incoming frequency is
continuous sine wave pumping signal, for exciting stator to produce the asymmetric vibration shape 10 single modes (or the asymmetric vibration shape 11 single modes of skew lines movement locus) of skew lines movement locus, the C of motor inputs mutually the frequency that periodic intervals triggers and is simultaneously
(
) sine wave exciting signal, for excite stator produce to drive sufficient part to force longitudinal vibration or drive sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot simultaneously; When the A of motor phase incoming frequency is
continuous sine wave pumping signal, simultaneously the C of motor inputs mutually the frequency that periodic intervals triggers and is
sine wave exciting signal time, guide rail will produce directed movement; When motor is switched to B phase incoming frequency mutually by A, be
continuous sine wave pumping signal, simultaneously the C of motor inputs mutually the frequency that periodic intervals triggers and is
sine wave exciting signal time, guide rail will produce reverse directed movement.The type of drive that the single mode of above-mentioned skew lines movement locus under the mode of operation that resonates antifriction drive is all larger than adopting separately the single mode driving of skew lines movement locus or power output and the delivery efficiency of antifriction type of drive under resonance mode of operation in theory.
The single-driving foot plate shape piezoelectric motor that single mode of the present utility model antifriction drive, its off-resonance mode of operation is characterised in that: in off-resonance mode of operation, the vibration shape of the forced vibration of drive motors work, for forcing flexural vibrations, forces the frequency of flexural vibrations pumping signal to be
; Take simultaneously the work of antifriction mode drive motors for driving sufficient part forcing longitudinal vibration or driving sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot, the frequency of antifriction driving pumping signal is
,
.
As the further refinement of the utility model mode of operation pumping signal, in off-resonance mode of operation, the A phase incoming frequency of motor is
continuous sine wave or asymmetric sawtooth waveforms or asymmetric trapezoidal wave or square wave excitation signal, simultaneously the B of motor inputs mutually the frequency mutually anti-phase with the A of motor and is
continuous sine wave or asymmetric sawtooth waveforms or asymmetric trapezoidal wave or square wave excitation signal, for exciting stator to produce, force flexural vibrations; The frequency that the periodic intervals of inputting the C of motor mutually triggers is
(
) sine wave exciting signal, for exciting stator produce to drive sufficient part to force longitudinal vibration or driving sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot; When the A of motor phase incoming frequency is
continuous sine wave or asymmetric sawtooth waveforms or asymmetric trapezoidal wave or square wave excitation signal, simultaneously the B of motor inputs mutually the frequency mutually anti-phase with the A of motor and is
continuous sine wave or asymmetric sawtooth waveforms or asymmetric trapezoidal wave or square wave excitation signal, simultaneously the C of motor inputs mutually the frequency that periodic intervals triggers and is
sine wave exciting signal time, guide rail will produce directed movement; Simultaneously anti-phase when the A of motor phase and B phase input signal, and the C phase input signal of motor is when constant, and guide rail will produce reverse directed movement.The type of drive that above-mentioned forced vibration under off-resonance mode of operation antifriction drive is all larger than adopting separately power output and the delivery efficiency of forced vibration driving or antifriction type of drive under off-resonance mode of operation in theory.
Compare with background technology, the single-driving foot plate shape piezoelectric motor that single mode of the present utility model antifriction drive and the innovation of mode of operation thereof are:
1. the described antifriction of the Chinese patent that is CN1043225A with the artificial Zhou Tieying of patented invention and Dong Shuxiang and patent publication No. " annular three laminate patch piezoelectric supersonic oscillators and with the ultrasonic micro motor of its clamper " drives piezoelectric motor to compare, the piezoelectric motor of the propositions such as Zhou Tieying utilizes antifriction drive principle to carry out work, and can only be operated in off-resonance state; And single-driving foot plate shape piezoelectric motor of the present utility model is to utilize the drive principle of the single mode drive principle combination of antifriction drive principle and skew lines movement locus to carry out work, this novel drive principle can provide larger power output in theory; In addition, piezoelectric motor of the present utility model has resonance and two kinds of mode of operations of off-resonance, and its control mode is more versatile and flexible.
2. the described three kinds of antifriction of Chinese patent that and patent publication No. raw with the artificial Hu Junhui of patented invention, Lu little Long and Zhao Chun is respectively CN102780417A, CN102751901A and CN102810997A drive ultrasound electric machine to compare, the piezoelectric motor of the propositions such as Hu Junhui utilizes antifriction drive principle to carry out work, and can only be operated in resonance state; And single-driving foot plate shape piezoelectric motor of the present utility model is to utilize the drive principle of the single mode drive principle combination of antifriction drive principle and skew lines movement locus to carry out work, this novel drive principle can provide larger power output in theory; In addition, piezoelectric motor of the present utility model has resonance and two kinds of mode of operations of off-resonance, and its control mode is more versatile and flexible.
3. with document " A Novel, Single-Mode Piezoceramic Plate Actuator for Ultrasonic Linear Motors " described patentee is that a kind of enforcement structure of the single-driving foot plate shape piezoelectric motor described in Physik-Instrumente (PI) and the patent No. United States Patent (USP) " Piezoelectric adjusting element " that is 6765335B2 is compared, this enforcement structure of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor is to utilize the single mode drive principle of skew lines movement locus to carry out work, and single-driving foot plate shape piezoelectric motor of the present utility model is to utilize the drive principle of the single mode drive principle combination of antifriction drive principle and skew lines movement locus to carry out work, this novel drive principle can provide larger power output in theory, in addition, because other enforcement structure and the above-mentioned enforcement structure of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor are basic identical in operation principle, and whole enforcement structures of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor all do not adopt antifriction drive principle or antifriction driving and single mode to drive the drive principle combining, single-driving foot plate shape piezoelectric motor therefore of the present utility model adopts the method that the single mode drive principle of antifriction drive principle and skew lines movement locus is organically combined, the piezoelectric motor of novel drive principle will be formed.
4. single mode of the present utility model antifriction drive single-driving foot plate shape piezoelectric motor and mode of operation thereof, its maximum innovative point is: (1) structure innovation.Compare with whole enforcement structures of Physik-Instrumente (PI) single-driving foot plate shape piezoelectric motor in background technology, single-driving foot plate shape piezoelectric motor of the present utility model has structurally increased antifriction and has driven phase, makes it to be applicable to the single mode of skew lines movement locus the type of drive that antifriction drives; (2) drive principle innovation.Single-driving foot plate shape piezoelectric motor of the present utility model is to utilize the drive principle of the single mode drive principle combination of antifriction drive principle and skew lines movement locus to carry out work, with in background technology, only adopt the single mode drive principle of skew lines movement locus or the piezoelectric motor of antifriction drive principle to compare, the piezoelectric motor of single mode antifriction drive principle can provide larger power output in theory.
In sum, piezoelectric motor of the present utility model has single mode antifriction to be driven, can realize forward and reverse motion, and the advantage such as simple in structure, thrust-weight ratio is large, exciting efficiency is high, vibrational energy utilance is high, fast response time; Except above-mentioned advantage, because piezoelectric motor of the present utility model has resonance and two kinds of mode of operations of off-resonance simultaneously, piezoelectric motor of the present utility model is also had the following advantages: motor had both had advantages of that under resonance mode of operation, the speed of service was high, had again low speed good operation stability and positioning precision advantages of higher under off-resonance mode of operation; Piezoelectric motor therefore of the present utility model is estimated to drive in precision (for example Rapid focusing device of camera), medicine equipment, and automobile, the fields such as Aero-Space have a wide range of applications.
accompanying drawing explanation:
Fig. 1. the single-driving foot plate shape piezoelectric motor structural representation that single mode antifriction drive.
Fig. 2. the polarised direction of the piezoceramic material stator of the single-driving foot plate shape piezoelectric motor that single mode antifriction drive and polarization subregion schematic diagram.
Fig. 3. the silver layer electrode schematic diagram of the piezoceramic material stator surface sintering of the single-driving foot plate shape piezoelectric motor that single mode antifriction drive.
Fig. 4. the mode of connection schematic diagram of the single-driving foot plate shape piezoelectric motor stator that single mode antifriction drive stator surface silver layer electrode under resonance and two kinds of mode of operations of off-resonance.
Fig. 5. the single-driving foot plate shape piezoelectric motor stator that single mode antifriction drive is at the single mode vibration shape schematic diagram of resonance mode of operation straight downward-sloping lines movement locus; Wherein: the asymmetric vibration shape of the skew lines movement locus of stator when Fig. 5 (a) encourages for A is mutually single-phase under resonance mode of operation; The asymmetric vibration shape of the skew lines movement locus of stator when Fig. 5 (b) encourages for B is mutually single-phase under resonance mode of operation.
Fig. 6. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive pumping signal and electric excitation mode schematic diagram that under resonance mode of operation, A phase single mode drives and the antifriction of C phase drives; Wherein: Fig. 6 (a) is the skew lines movement locus that A phase single mode drives lower stator to drive the surperficial particle of foot to form; Fig. 6 (b) is rise movement locus part and the drawback movement track part that A phase single mode drives lower single cycle skew lines movement locus; Fig. 6 (c) is rise signal section and the returned signal part that A phase single mode drives lower single cycle sine wave drive signal; Fig. 6 (d) is the pumping signal that A phase single mode drives and the antifriction of C phase drives.
Fig. 7. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive pumping signal and electric excitation mode schematic diagram that under resonance mode of operation, B phase single mode drives and the antifriction of C phase drives; Wherein: Fig. 7 (a) is the skew lines movement locus that B phase single mode drives lower stator to drive the surperficial particle of foot to form; Fig. 7 (b) is rise movement locus part and the drawback movement track part that B phase single mode drives lower single cycle skew lines movement locus; Fig. 7 (c) is rise signal section and the returned signal part that B phase single mode drives lower single cycle sine wave drive signal; Fig. 7 (d) is the pumping signal that B phase single mode drives and the antifriction of C phase drives.
Fig. 8. the vibration shape schematic diagram that the single-driving foot plate shape piezoelectric motor stator that single mode antifriction drive forces flexural vibrations under off-resonance mode of operation.
Fig. 9. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive is at the pumping signal and the electric excitation mode schematic diagram that force forward operation under flexural vibrations driving of continuous sine wave excitation; Wherein: horizontal rectilinear motion track and rise movement locus part and drawback movement track part that Fig. 9 (a) is the surperficial particle of stator driving foot; Fig. 9 (b) is rise signal section and the returned signal part of the single cycle sine wave drive signal of A phase; Fig. 9 (c) is that A, B two-phase are forced the pumping signal that flexural vibrations drive and the antifriction of C phase drives.
Figure 10. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive is at the pumping signal and the electric excitation mode schematic diagram that force inverted running under flexural vibrations driving of continuous sine wave excitation; Wherein: Figure 10 (a) stator drives horizontal rectilinear motion track and rise movement locus part and the drawback movement track part of the surperficial particle of foot; Figure 10 (b) is rise signal section and the returned signal part of the single cycle sine wave drive signal of A phase; Figure 10 (c) is that A, B two-phase are forced the pumping signal that flexural vibrations drive and the antifriction of C phase drives.
Figure 11. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive is at the pumping signal and the electric excitation mode schematic diagram that force forward operation under flexural vibrations driving of continuous asymmetric sawtooth drive; Wherein: horizontal rectilinear motion track and rise movement locus part and drawback movement track part that Figure 11 (a) drives the surperficial particle of foot to form for stator; Figure 11 (b) is rise signal section and the returned signal part that asymmetric sawtooth waveforms of the single cycle of A phase drives signal; Figure 11 (c) is that A, B two-phase are forced the pumping signal that flexural vibrations drive and the antifriction of C phase drives.
Figure 12. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive is at the pumping signal and the electric excitation mode schematic diagram that force inverted running under flexural vibrations driving of continuous asymmetric sawtooth drive; Wherein: horizontal rectilinear motion track and rise movement locus part and drawback movement track part that Figure 12 (a) drives the surperficial particle of foot to form for stator; Figure 12 (b) is rise signal section and the returned signal part that asymmetric sawtooth waveforms of the single cycle of A phase drives signal; Figure 12 (c) is that A, B two-phase are forced the pumping signal that flexural vibrations drive and the antifriction of C phase drives.
Figure 13. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive is at the pumping signal and the electric excitation mode schematic diagram that force forward operation under flexural vibrations driving of continuous asymmetric trapezoidal wave excitation; Wherein: horizontal rectilinear motion track and rise movement locus part and drawback movement track part that Figure 13 (a) drives the surperficial particle of foot to form for stator; Figure 13 (b) is rise signal section and the returned signal part that asymmetric sawtooth waveforms of the single cycle of A phase drives signal; Figure 13 (c) is that A, B two-phase are forced the pumping signal that flexural vibrations drive and the antifriction of C phase drives.
Figure 14. the single-driving foot plate shape piezoelectric motor that single mode antifriction drive is at the pumping signal and the electric excitation mode schematic diagram that force inverted running under flexural vibrations driving of continuous asymmetric trapezoidal wave excitation; Wherein: horizontal rectilinear motion track and rise movement locus part and drawback movement track part that Figure 14 (a) drives the surperficial particle of foot to form for stator; Figure 14 (b) is rise signal section and the returned signal part that asymmetric sawtooth waveforms of the single cycle of A phase drives signal; Figure 14 (c) is that A, B two-phase are forced the pumping signal that flexural vibrations drive and the antifriction of C phase drives.
Figure 15. the structural representation of second embodiment of the single-driving foot plate shape piezoelectric motor that single mode antifriction drive.
Figure 16. the structural representation of the 3rd embodiment of the single-driving foot plate shape piezoelectric motor that single mode antifriction drive.
Number in the figure title: the oscillator main body of 1 plate shape stator; One of polarization subregion of 2 oscillator main bodys;
silver layer corresponding to polarization subregion 2; One of polarization subregion of 3 oscillator main bodys;
silver layer corresponding to polarization subregion 3; One of polarization subregion of 4 oscillator main bodys;
silver layer corresponding to polarization subregion 4; The single-driving foot of 5 plate shape stators; 6 line slideways; The polarised direction of 7 oscillator main bodys; The front surface of 8 through-thickness oscillator main bodys; The rear surface of 9 through-thickness oscillator main bodys;
the silver layer of sintering on the rear surface of through-thickness oscillator main body; The asymmetric vibration shape of 10 plate shape stators skew lines movement locus of A mutually single-phase when excitation stator under resonance mode of operation; The asymmetric vibration shape of 11 plate shape stators skew lines movement locus of B mutually single-phase when excitation stator under resonance mode of operation; 12 plate shape stators force the vibration shape of flexural vibrations under off-resonance mode of operation.
embodiment:
As shown in Figure 1, motor consists of plate shape stator and mover for the single-driving foot plate shape piezoelectric motor that a kind of single mode antifriction drive and mode of operation thereof, and wherein mover is a line slideway 6.Be characterized in: plate shape stator is comprised of oscillator main body 1 and single-driving foot 5 two parts, described guide rail 6 is pressed on the single-driving foot 5 of plate shape stator under the effect of precompression; The oscillator main body 1 wherein consisting of piezoceramic material is cuboid, has three polarization subregions 2,3,4 on it; The single-driving foot 5 consisting of high-abrasive material is combined as a whole by bonding or welding or sintering and oscillator main body 1; This design of electrical motor has resonance and two kinds of mode of operations of off-resonance: in resonance mode of operation, stator is worked under the single mode of skew lines movement locus antifriction drive, the forward and reverse motion of promotion guide rail; In off-resonance mode of operation, stator is worked under forced vibration antifriction driving, promotes the forward and reverse motion of guide rail.
The silver layer electrode schematic diagram of the polarised direction of the single-driving foot plate shape piezoelectric motor stator that single mode antifriction drive and polarization subregion schematic diagram and stator surface sintering respectively as shown in Figure 2 and Figure 3.The polarised direction 7 of oscillator main body 1 polarizes for the thickness direction along oscillator main body 1; Thickness direction along oscillator main body 1 has two surfaces, is respectively thickness direction front surface 8 and thickness direction rear surface 9; On thickness direction front surface 8, sintering has the silver layer of three mutually insulateds that use as electrode
,
,
, correspond respectively to three of oscillator main body 1 polarization subregions 2,3,4; On thickness direction rear surface 9, the silver layer that sintering has a monoblock to use as electrode
.
The mode of connection schematic diagram of the single-driving foot plate shape piezoelectric motor that single mode antifriction drive stator surface silver layer electrode under resonance and off-resonance mode of operation as shown in Figure 4.Under resonance and off-resonance mode of operation, silver layer
for ground connection; Silver layer
form separately the A phase of motor; Silver layer
form separately the B phase of motor; Silver layer
form separately the C phase of motor, the C of motor is also that the antifriction of motor under resonance and off-resonance mode of operation drives phase mutually.
The single-driving foot plate shape piezoelectric motor stator that single mode antifriction drive at the single mode vibration shape schematic diagram of resonance mode of operation straight downward-sloping lines movement locus as shown in Figure 5.Under resonance mode of operation, during the mutually single-phase excitation of A, the asymmetric vibration shape of the single mode of the skew lines movement locus of drive motors work is 10, the skew lines movement locus that stator drives the surperficial particle formation of foot to be tilted to the right; Under resonance mode of operation, during the mutually single-phase excitation of B, the asymmetric vibration shape of the single mode of the skew lines movement locus of drive motors work is 11, the skew lines movement locus that stator drives the surperficial particle formation of foot to be tilted to the left; The resonance frequency of the asymmetric vibration shape 10 single modes of skew lines movement locus and the asymmetric vibration shape 11 single modes of skew lines movement locus equates, is all
; The frequency of single mode pumping signal is
,
approach
, take simultaneously the work of antifriction mode drive motors for driving sufficient part forcing longitudinal vibration or driving sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot, the frequency of antifriction driving pumping signal is
,
.
Pumping signal and electric excitation mode schematic diagram be as shown in Figure 6, Figure 7 under resonance mode of operation for the single-driving foot plate shape piezoelectric motor that single mode antifriction drive.In resonance mode of operation, the A phase of motor (or B phase) incoming frequency is
continuous sine wave pumping signal, for exciting stator to produce the asymmetric vibration shape 10 single modes (or the asymmetric vibration shape 11 single modes of skew lines movement locus) of skew lines movement locus, the C of motor inputs mutually the frequency that periodic intervals triggers and is simultaneously
(
) sine wave exciting signal, for excite stator produce to drive sufficient part to force longitudinal vibration or drive sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot simultaneously; The single mode of the skew lines movement locus that wherein A phase (or B phase) excites drives for friction drive is provided, and the antifriction that C excites mutually drives and to reduce frictional resistance by reducing coefficient of friction, and then reduce friction to increase power output on the basis driving in the single mode of skew lines movement locus.When the A of motor phase incoming frequency is
continuous sine wave pumping signal, at stator, drive the surperficial particle of foot will form the skew lines movement locus (as shown in Figure 6 (a)) being tilted to the right, line slideway 6 directed movement to the right under its effect, the skew lines movement locus that drives sufficient movement locus can be tilted to the right in the single cycle to the not same-action of line slideway 6 according to stator is divided into two parts, wherein the part of operation obliquely of skew lines movement locus plays the effect of direct promotion line slideway 6, for rise movement locus part, the part of the oblique lower operation of skew lines movement locus plays and returns rise starting point and prepare again directly to promote the effect of line slideway 6, for drawback movement track part, when the initial point of rise movement locus and drawback movement track is moved to the zero point of coordinate system simultaneously, just formed Fig. 6 (b), rise and backhaul part corresponding to single cycle skew lines movement locus, single periodic drive signal also can be divided into rise signal and returned signal part, when the initial point of rise signal and returned signal is moved to the zero point of coordinate system simultaneously, just formed Fig. 6 (c).According to the monograph of Shanghai science tech publishing house in December, 1998 publication " ultrasonic motor theory and application ", (upper plumage chastity is gone, rich river justice youth work, Yang Zhigang, Zheng Xuelun translate) in the description of p230--p250, when requiring ultrasound electric machine to have larger power output (this situation is very general), because the precompression of determining between mover is larger, make the contact angle of determining between mover be greater than 180 °; In the case, not only at whole rise movement locus, determine mover and contact, and at part drawback movement track, determine mover and also contact, at rise movement locus stator, mover is done to positive work, and at drawback movement track stator, mover is done to negative work.In order to reduce the friction of drawback movement track, do not reduce again the power stage of rise movement locus simultaneously, when the A of motor inputs returned signal mutually, the C phase incoming frequency of motor is
(
) sine wave exciting signal, and when the A of motor inputs rise signal mutually the C of motor input signal not mutually, the input signal of motor C phase shows as the sine wave exciting signal that periodic intervals triggers; The input signal of motor A phase and C phase as shown in Fig. 6 (d), line slideway 6 directed movement to the right under its effect.In like manner, as shown in Figure 7, when motor is switched to B phase incoming frequency mutually by A, be
continuous sine wave pumping signal, at stator, drive the surperficial particle of foot will form the skew lines movement locus (as shown in Figure 7 (a)) being tilted to the left, the input signal of motor C phase is constant simultaneously, guide rail 6 will produce reverse directed movement.
The vibration shape schematic diagram of single-driving foot plate shape piezoelectric motor stator forced vibration under off-resonance mode of operation that single mode antifriction drive as shown in Figure 8.In off-resonance mode of operation, the vibration shape of the forced vibration of drive motors work is for forcing flexural vibrations 12, forced vibration pumping signal is continuous sine wave or continuous asymmetric sawtooth waveforms or continuous asymmetric class sawtooth waveforms or continuous square wave, forces the frequency of flexural vibrations 12 pumping signals to be
; Take simultaneously the work of antifriction mode drive motors for driving sufficient part forcing longitudinal vibration or driving sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive sufficient local bending vibration modes, it is the sine wave that periodic intervals triggers that antifriction drives pumping signal, and antifriction drives the frequency of pumping signal to be
,
.
The single-driving foot plate shape piezoelectric motor that single mode antifriction drive under off-resonance mode of operation and the forced vibration pumping signal pumping signal that is continuous sine wave and electric excitation mode schematic diagram as shown in Figure 9, Figure 10.In off-resonance mode of operation, when the A of motor phase incoming frequency is
continuous sine wave pumping signal, simultaneously the B of motor inputs mutually the frequency mutually anti-phase with the A of motor and is
continuous sine wave pumping signal, at stator, drive the surperficial particle of foot will form reciprocating horizontal rectilinear motion track (as shown in Fig. 9 (a)), according to stator, drive the reciprocating horizontal rectilinear motion track that sufficient movement locus can the single cycle to the not same-action of line slideway 6 to be divided into two parts, first consider line slideway 6 levels (be defaulted as positive direction) to the right motion situation, because horizontal rectilinear motion track to the right partly plays the effect of direct promotion line slideway 6, for rise movement locus part, horizontal rectilinear motion track left partly plays and returns rise starting point and prepare again directly to promote the effect of line slideway 6, for drawback movement track part, when the initial point of rise movement locus and drawback movement track is moved to the zero point of coordinate system simultaneously, just formed Fig. 9 (a), rise and backhaul part corresponding to single cycle horizontal rectilinear motion track, the single cycle sine wave drive signal that motor A inputs mutually also can be divided into rise signal and returned signal part, when the initial point of rise signal and returned signal is moved to the zero point of coordinate system simultaneously, just formed Fig. 9 (b).Because stator drives the movement locus of the surperficial particle of foot, be reciprocating horizontal linear, making the contact angle of determining between mover is 360 °; In the case, because rise movement locus and the drawback movement track along continuous straight runs of reciprocating motion horizontal rectilinear motion track is symmetrical, and the rise signal of sine wave drive signal and returned signal part is also symmetrical, so the positive work that stator is done mover at rise movement locus equals the negative work of mover being done at drawback movement track, the simple continuous sine wave that adopts cannot drive mover, must add that antifriction drives; In order to reduce the friction of drawback movement track, do not reduce again the power stage of rise movement locus simultaneously, when the A of motor inputs returned signal mutually, the C phase incoming frequency of motor is
(
) sine wave exciting signal, and when the A of motor inputs rise signal mutually the C of motor input signal not mutually, the input signal of motor C phase shows as the sine wave exciting signal that periodic intervals triggers, and inputs mutually the frequency mutually anti-phase with the A of motor to be at the B of motor simultaneously
continuous sine wave pumping signal; The input signal of above-mentioned motor A phase, B phase and C phase as shown in Figure 9 (c), line slideway 6 directed movement to the right under its effect.In like manner, as shown in figure 10, simultaneously reverse when the input signal of motor A phase and B phase, the input signal of motor C phase is constant simultaneously, and guide rail 6 will produce reverse directed movement.
The single-driving foot plate shape piezoelectric motor that single mode antifriction drive under off-resonance mode of operation and the forced vibration pumping signal pumping signal that is continuous asymmetric sawtooth waveforms and electric excitation mode schematic diagram as shown in Figure 11, Figure 12.In off-resonance mode of operation, when the A of motor phase incoming frequency is
continuous asymmetric sawtooth drive signal, simultaneously the B of motor inputs mutually the frequency mutually anti-phase with the A of motor and is
continuous asymmetric sawtooth drive signal, at stator, drive the surperficial particle of foot will form reciprocating horizontal rectilinear motion track (as shown in Figure 11 (a) shows), according to stator, drive the reciprocating horizontal rectilinear motion track that sufficient movement locus can the single cycle to the not same-action of line slideway 6 to be divided into two parts, first consider line slideway 6 levels (be defaulted as positive direction) to the right motion situation, because horizontal rectilinear motion track to the right partly plays the effect of direct promotion line slideway 6, for rise movement locus part, horizontal rectilinear motion track left partly plays and returns rise starting point and prepare again directly to promote the effect of line slideway 6, for drawback movement track part, when the initial point of rise movement locus and drawback movement track is moved to the zero point of coordinate system simultaneously, just formed Figure 11 (a), rise and backhaul part corresponding to single cycle horizontal rectilinear motion track, the asymmetric sawtooth waveforms of single cycle that motor A inputs mutually drives signal also can be divided into rise signal and returned signal part, when the initial point of rise signal and returned signal is moved to the zero point of coordinate system simultaneously, just formed Figure 11 (b).Because stator drives the movement locus of the surperficial particle of foot, be reciprocating horizontal linear, making the contact angle of determining between mover is 360 °; In the case, although the rise movement locus of reciprocating motion horizontal rectilinear motion track and drawback movement track along continuous straight runs are symmetrical, it is partly asymmetrical that but asymmetric sawtooth waveforms drives rise signal and the returned signal of signal, so the positive work that stator is done mover at rise movement locus is greater than the negative work of mover being done at drawback movement track, the asymmetric sawtooth waveforms of simple employing drives signal can drive mover, and the antifriction of therefore adding drives must further strengthen power stage; In order to reduce the friction of drawback movement track, do not reduce again the power stage of rise movement locus simultaneously, when the A of motor inputs returned signal mutually, the C phase incoming frequency of motor is
(
) sine wave exciting signal, and when the A of motor inputs rise signal mutually the C of motor input signal not mutually, the input signal of motor C phase shows as the sine wave exciting signal that periodic intervals triggers, and inputs mutually the frequency mutually anti-phase with the A of motor to be at the B of motor simultaneously
continuous asymmetric sawtooth drive signal; The input signal of above-mentioned motor A phase, B phase and C phase as shown in Figure 11 (c), line slideway 6 directed movement to the right under its effect.In like manner, as shown in figure 12, simultaneously reverse when the input signal of motor A phase and B phase, the input signal of motor C phase is constant simultaneously, and guide rail 6 will produce reverse directed movement.
The single-driving foot plate shape piezoelectric motor that single mode antifriction drive under off-resonance mode of operation and the forced vibration pumping signal pumping signal that is continuous asymmetric trapezoidal wave and electric excitation mode schematic diagram as shown in Figure 13, Figure 14.In off-resonance mode of operation, when the A of motor phase incoming frequency is
continuous asymmetric trapezoidal wave pumping signal, simultaneously the B of motor inputs mutually the frequency mutually anti-phase with the A of motor and is
continuous asymmetric trapezoidal wave pumping signal, at stator, drive the surperficial particle of foot will form reciprocating horizontal rectilinear motion track (as shown in Figure 13 (a)), according to stator, drive the reciprocating horizontal rectilinear motion track that sufficient movement locus can the single cycle to the not same-action of line slideway 6 to be divided into two parts, first consider line slideway 6 levels (be defaulted as positive direction) to the right motion situation, because horizontal rectilinear motion track to the right partly plays the effect of direct promotion line slideway 6, for rise movement locus part, horizontal rectilinear motion track left partly plays and returns rise starting point and prepare again directly to promote the effect of line slideway 6, for drawback movement track part, when the initial point of rise movement locus and drawback movement track is moved to the zero point of coordinate system simultaneously, just formed Figure 13 (a), rise and backhaul part corresponding to single cycle horizontal rectilinear motion track, the asymmetric trapezoidal wave of single cycle that motor A inputs mutually drives signal also can be divided into rise signal and returned signal part, when the initial point of rise signal and returned signal is moved to the zero point of coordinate system simultaneously, just formed Figure 13 (b).Because stator drives the movement locus of the surperficial particle of foot, be reciprocating horizontal linear, making the contact angle of determining between mover is 360 °; In the case, although the rise movement locus of reciprocating motion horizontal rectilinear motion track and drawback movement track along continuous straight runs are symmetrical, it is partly asymmetrical that but asymmetric trapezoidal wave drives rise signal and the returned signal of signal, so the positive work that stator is done mover at rise movement locus is greater than the negative work of mover being done at drawback movement track, the asymmetric trapezoidal wave of simple employing drives signal can drive mover, and the antifriction of therefore adding drives must further strengthen power stage; In order to reduce the friction of drawback movement track, do not reduce again the power stage of rise movement locus simultaneously, when the A of motor inputs returned signal mutually, the C phase incoming frequency of motor is
(
) sine wave exciting signal, and when the A of motor inputs rise signal mutually the C of motor input signal not mutually, the input signal of motor C phase shows as the sine wave exciting signal that periodic intervals triggers, and inputs mutually the frequency mutually anti-phase with the A of motor to be at the B of motor simultaneously
continuous asymmetric trapezoidal wave pumping signal; The input signal of above-mentioned motor A phase, B phase and C phase as shown in Figure 13 (c), line slideway 6 directed movement to the right under its effect.In like manner, as shown in figure 14, simultaneously reverse when the input signal of motor A phase and B phase, the input signal of motor C phase is constant simultaneously, and guide rail 6 will produce reverse directed movement.
In off-resonance mode of operation, when the A of motor phase incoming frequency is
continuous square wave excitation signal, simultaneously the B of motor inputs mutually the frequency mutually anti-phase with the A of motor and is
continuous square wave excitation signal, for exciting stator to produce, force flexural vibrations 12; The frequency that the periodic intervals of inputting the C of motor mutually triggers is
(
) sine wave exciting signal, for exciting stator produce to drive sufficient part to force longitudinal vibration or driving sufficient part to force bending vibration or drive the local longitudinal vibration mode of foot or drive the local bending vibration modes of foot; Because piezoelectric motor stator is capacitive load, so the driving process of piezoelectric motor can be considered as the repeated charge process of capacitive load; Because the charge and discharge process of capacitive load needs the regular hour, and the time that discharges and recharges there is larger difference, therefore piezoelectric motor of the present utility model is under off-resonance mode of operation and the response that the response that is continuous square wave of forced vibration pumping signal is equivalent to the piezoelectric motor shown in Figure 13 and Figure 14 under off-resonance mode of operation and forced vibration pumping signal is continuous asymmetric trapezoidal wave; So piezoelectric motor of the present utility model under off-resonance mode of operation and forced vibration pumping signal be continuous square wave pumping signal and electric excitation mode are equivalent to Figure 13 and Figure 14.
Principles of structural design:
1. the overall dimension of oscillator main body 1 must meet
; Because only have satisfied
, when A phase or the B phase incoming frequency of motor under resonance mode of operation is
continuous sine wave pumping signal, can excite stator to produce the identical asymmetric vibration shape 10 single modes of skew lines movement locus or the asymmetric vibration shape 11 single modes of skew lines movement locus of resonance frequency, make motor be applicable to single mode and drive;
2. structurally must design antifriction drive phase, make motor on the basis of single mode driving, can carry out antifriction driving.
Claims (2)
1. the single-driving foot plate shape piezoelectric motor that a single mode antifriction drive, it is characterized in that: motor consists of plate shape stator and mover, wherein mover is a line slideway (6), plate shape stator is comprised of oscillator main body (1) and single-driving foot (5) two parts, and described guide rail (6) is pressed on the single-driving foot (5) of plate shape stator under the effect of precompression; The oscillator main body (1) wherein consisting of piezoceramic material is cuboid, on it, there are three polarization subregions (2,3,4), wherein two polarization subregions (2,3) drive for the single mode driving of resonance mode straight downward-sloping lines movement locus and the forced vibration under off-resonance pattern, and another one polarization subregion (4) drives for antifriction; The described single-driving foot consisting of high-abrasive material (5) is combined as a whole by bonding or welding or sintering and oscillator main body (1).
2. the single-driving foot plate shape piezoelectric motor that single mode according to claim 1 antifriction drive, is characterized in that: the polarised direction (7) of oscillator main body (1) polarizes for the thickness direction along oscillator main body (1); Thickness direction along oscillator main body (1) has two surfaces, is respectively thickness direction front surface (8) and thickness direction rear surface (9); Upper at thickness direction front surface (8), sintering have three mutually insulateds that use as electrode silver layers (
,
,
), correspond respectively to three of oscillator main body (1) polarization subregions (2,3,4); Upper in thickness direction rear surface (9), sintering have the silver layer that a monoblock used as electrode (
).
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103427706A (en) * | 2013-08-21 | 2013-12-04 | 金陵科技学院 | Single-mode and antifriction driven single-driving-foot platy piezoelectric motor and working modes thereof |
| CN113659868A (en) * | 2021-08-23 | 2021-11-16 | 金陵科技学院 | Modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor and excitation mode thereof |
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2013
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103427706A (en) * | 2013-08-21 | 2013-12-04 | 金陵科技学院 | Single-mode and antifriction driven single-driving-foot platy piezoelectric motor and working modes thereof |
| CN113659868A (en) * | 2021-08-23 | 2021-11-16 | 金陵科技学院 | Modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor and excitation mode thereof |
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