CN113659868A

CN113659868A - Modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor and excitation mode thereof

Info

Publication number: CN113659868A
Application number: CN202110966322.1A
Authority: CN
Inventors: 陈乾伟; 任小艳; 孟靖智; 孟妍妮; 李鸿秋
Original assignee: Jinling Institute of Technology
Current assignee: Jinling Institute of Technology
Priority date: 2021-08-23
Filing date: 2021-08-23
Publication date: 2021-11-16

Abstract

A modal decoupling three-division piezoelectric ceramic single or biped ultrasonic motor and an excitation method thereof belong to the category of ultrasonic motors. The motor consists of a plate-shaped stator and a linear guide rail. The plate-shaped stator includes a single or double driving foot (made of wear-resistant material) and a vibrator body (made of piezoelectric ceramics). The guide rail is pre-made Pressure on single or double drive feet. The main body of the vibrator has three polarization zones: two small ones and one big one and three polarization zones: two of them form the A phase, which are used to independently excite the second-order bending vibration mode of the stator; The first longitudinal vibration mode of the stator. The second-order bending and first-order longitudinal vibration modes of the stator are simultaneously excited by two sinusoidal signals with a phase difference of π/2, so that the end face of the single or double driving foot of the stator produces elliptical motion, and the guide rail is driven by friction. There are three types of motor designs: force and speed balanced, force-focused, and speed-focused. Compared with the existing ultrasonic motor, the motor has a wider range of applications.

Description

Modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor and excitation mode thereof

Technical Field

The invention belongs to the field of ultrasonic motors, and particularly relates to a modal decoupling tri-partition piezoelectric ceramic single-or double-foot ultrasonic motor and an excitation mode thereof.

Background

The ultrasonic motor is a novel power output device which works by utilizing the inverse piezoelectric effect of piezoelectric ceramics. Compared with the traditional electromagnetic motor, the ultrasonic motor has the advantages of low speed and large torque, fast transient response, high positioning precision, good control characteristic, no magnetic field generation, no influence of the magnetic field and the like, and has wide application prospect in the fields of precision driving, chip manufacturing, medical instruments, automobiles, aerospace and the like.

Through the literature search of the prior plate-shaped ultrasonic Motor with the vibrator main body made of piezoelectric Ceramic material, the united states patent of nano motion Ltd and 5453653, namely Ceramic Motor, describes a single-drive-foot plate-shaped ultrasonic Motor in detail, and the single-drive-foot plate-shaped ultrasonic Motor has the following typical characteristics: the stator of the motor is integrally in a plate shape and comprises a vibrator main body and a single driving foot; the vibrator main body is a cuboid made of piezoelectric ceramic materials, four uniformly distributed polarization subareas are arranged on the cuboid, the four uniformly distributed polarization subareas are polarized along the thickness direction, the polarization directions are the same, and two polarization subareas which are distributed diagonally are electrically connected to form one phase of the vibrator main body, so that two phases of the vibrator main body A, B are formed; the single driving foot is made of wear-resistant materials and is combined with the vibrator main body into a whole through bonding to form the stator. When the A-phase single-phase input sine wave excitation signal of the stator is input, two orthogonal working modes (a first-order longitudinal vibration mode and a second-order bending vibration mode) of the stator with a certain phase difference are excited at the same time, namely the two orthogonal working modes are coupled in control, at the moment, particles on a contact interface of the driving foot and the guide rail generate an inclined elliptical motion track, and the guide rail generates directional motion; when the same sine wave excitation signal is input into the B-phase single phase of the stator, mass points on the contact interface of the driving foot and the guide rail generate elliptic motion tracks with opposite inclination and rotation directions, and the guide rail generates opposite directional motion. In the search, it is found that a single-drive foot plate-shaped ultrasonic motor with a patent number of 5453653 in the patent of Nanomotion Ltd is mentioned in a book of ultrasonic motor technology and application (Zhaochun), which is a patent publication published by scientific publishing corporation in 9 months 2007, and the motor is successfully and widely applied to the fields of precision drive and the like.

The above analysis shows that: the single-drive foot plate-shaped ultrasonic Motor described in U.S. patent No. 5453653, namely, Ceramic Motor, patented as Nanomotion Ltd has the characteristic of single-phase bimodal coupling drive, so that the single-drive foot plate-shaped ultrasonic Motor only needs a single-phase drive circuit, and has the advantages of simple structure and low cost; however, the single-phase driving also enables only half of the piezoelectric ceramics of the single-driving-foot plate-shaped ultrasonic motor to be in a working state when the single-driving-foot plate-shaped ultrasonic motor works, and the other half of the piezoelectric ceramics are in an idle state, which is an obvious disadvantage.

Through document retrieval of the prior plate-shaped ultrasonic motor with the piezoelectric ceramic material as the vibrator main body, it is found that the history of the university of science and technology in china provides a plate-shaped ultrasonic motor with the piezoelectric ceramic material as the vibrator main body in 2014 master academic paper, "simulation design of linear ultrasonic motor based on longitudinal bending mode": the working modes of the ultrasonic motor are two orthogonal working modes (a first-order longitudinal vibration mode and a second-order bending vibration mode); the front surface of the piezoelectric ceramic piece is averagely divided into four rectangular electrode areas, a certain gap is reserved between the adjacent electrode areas, the excitation voltage signal is that a sine alternating current signal Esin omega t (E is a voltage amplitude, omega is an excitation frequency) is applied to two subareas of two quadrants and four quadrants of the front surface of the piezoelectric ceramic piece, a cosine alternating current signal Ecos omega t is applied to two subareas of one quadrant and three quadrants, and the back surface of the piezoelectric ceramic piece is grounded for the whole electrode.

It can be known from analysis that the working mode and the sectional polarization mode of the plate-shaped ultrasonic Motor with the piezoelectric Ceramic material as the vibrator main body proposed by the history of university of science and technology in china are completely consistent with the single-drive-foot plate-shaped ultrasonic Motor described in the united states patent of china patent as Nanomotion Ltd and with the patent number of 5453653, so that the electric connection line excitation mode (A, B two-phase simultaneous excitation) of the plate-shaped ultrasonic Motor with the piezoelectric Ceramic material as the vibrator main body proposed by the history of university of science and technology in the text of the simulation design of linear ultrasonic Motor based on longitudinal and bending mode in page 22 of the patent publication is also applicable to the single-drive-foot plate-shaped ultrasonic Motor with the nano motion Ltd, namely, the a-phase input sine wave excitation signal ein ω t (E is the voltage amplitude, ω is the excitation frequency) of the single-drive-foot plate-shaped piezoelectric Motor, and the B-phase input cosine wave excitation signal Ecos ω t, the guide rail will generate directional movement; when a sine wave excitation signal Esin omega t (E is a voltage amplitude and omega is an excitation frequency) is input into a phase B of the nano motion Ltd single-drive foot plate-shaped piezoelectric motor, and a cosine wave excitation signal Ecos omega t is input into a phase A, the guide rail generates reverse directional motion. The wiring mode can solve the defect that half of piezoelectric ceramics of the single-drive foot plate-shaped ultrasonic motor of the Nanomotion Ltd are always in an idle state, but the existence of the coupling phenomenon controlled by two orthogonal working modes (a first-order longitudinal vibration mode and a second-order bending vibration mode) of a stator, which are brought by four uniformly-distributed polarized subareas of the single-drive foot plate-shaped ultrasonic motor of the Nanomotion Ltd, leads to the generation of an inclined elliptical motion track component of a mass point on a contact interface of a drive foot and a guide rail when a sine wave excitation signal Esin omega t is input into an A phase of the single-drive foot plate-shaped ultrasonic motor of the Nanomotion Ltd; when the B of the nano motion Ltd single-drive-foot plate-shaped piezoelectric motor is the same, a cosine wave excitation signal Ecos ω t is input, at this time, mass points on the driving foot and the guide rail contact interface generate elliptic motion track components with reverse inclination and reverse rotation, and inclined elliptic motion track components generated by the a phase and the B phase are not orthogonal, so that the elliptic motion track finally synthesized on the mass points on the driving foot and the guide rail contact interface is irregular and time-varying, and is not favorable for stable driving. Similarly, because the plate-shaped ultrasonic motor proposed by the history of the university of science and technology in china also has the phenomenon of controlling coupling of two orthogonal working modes (a first-order longitudinal vibration mode and a second-order bending vibration mode) of the stator, which is brought by four uniformly distributed polarization partitions, the analysis of the simultaneous excitation condition of the two phases of the nano motion Ltd single-drive foot plate-shaped piezoelectric motor at A, B is also suitable for the plate-shaped ultrasonic motor proposed by the history of the university of science and technology in china.

In summary, the disadvantage of the plate-shaped ultrasonic Motor with a single driving foot described in united states patent "Ceramic Motor" with patent number 5453653 and patented as nano motion Ltd and the plate-shaped ultrasonic Motor with a piezoelectric Ceramic material as a vibrator body proposed by history of university of science and technology in china is that: because the single-drive foot plate-shaped ultrasonic motor of the Nanomotion Ltd and the plate-shaped ultrasonic motor proposed by the university of science and technology in china have the control coupling phenomenon of two orthogonal working modes (a first-order longitudinal vibration mode and a second-order bending vibration mode) of the stator caused by four uniformly distributed polarization partitions, the two orthogonal working modes control the coupling phenomenon or cause half of piezoelectric ceramics of the single-drive foot plate-shaped piezoelectric motor of the Nanomotion Ltd to be in an idle state or cause the final time-varying elliptic motion track synthesized on the mass point of the contact interface between the driving foot and the guide rail of the plate-shaped ultrasonic motor proposed by the university of science and technology in china to be irregular and time-varying. One effective solution to this deficiency is: the mode of connecting the polarization partitions of the four uniformly distributed polarization partitions with the electricity is changed, two orthogonal working modes (a first-order longitudinal vibration mode and a second-order bending vibration mode) of the stator are controlled and decoupled, and therefore the novel ultrasonic motor is developed.

Disclosure of Invention

Aiming at the problems, the invention provides a modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and an excitation method thereof, and provides the modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and the excitation method thereof, wherein the modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor can realize forward and reverse motion, and has the advantages of simple structure, large thrust-weight ratio, high excitation efficiency, high vibration energy utilization rate and high response speed. The ultrasonic motor of the invention is expected to have wide application prospect in the fields of precision driving (such as a rapid focusing device of a camera), chip manufacturing, medical instruments, automobiles, aerospace and the like.

The invention provides a modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and an excitation mode thereof: the ultrasonic motor has two design structures, namely a single-drive foot structure and a double-drive foot structure; the single-drive-foot structure of the ultrasonic motor is a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor, and the double-drive-foot structure of the ultrasonic motor is a modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor.

The invention provides a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor which comprises: the single-foot ultrasonic motor is composed of a single-foot plate-shaped stator and a rotor, the rotor is a linear guide rail, and the single-foot plate-shaped stator is composed of a vibrator main body and a single driving foot; the vibrator main body is a cuboid made of piezoelectric ceramic materials, the vibrator main body is provided with three polarization zones, namely a small polarization zone I, a small polarization zone II and a large polarization zone, the small polarization zone I, the small polarization zone II and the large polarization zone are the same in size, a single driving foot of the single-foot plate-shaped stator is made of wear-resistant materials and is integrated with the vibrator main body through bonding, welding or sintering, and the guide rail presses on the single driving foot of the single-foot plate-shaped stator under the action of pre-pressing force;

the polarization partition on the vibrator main body is characterized in that: the polarization direction of the small polarization partition I, the polarization direction of the small polarization partition II and the polarization direction of the large polarization partition of the oscillator main body are polarization along the thickness direction of the oscillator main body, wherein the polarization direction of the small polarization partition I is opposite to the polarization direction of the small polarization partition II, and the polarization direction of the large polarization partition is the same as the polarization direction of the small polarization partition I or the polarization direction of the small polarization partition II; two surfaces are arranged along the thickness direction of the vibrator main body, namely a front surface in the thickness direction and a rear surface in the thickness direction; sintering three silver layer electrodes which are mutually insulated on the front surface in the thickness direction, wherein the silver layer electrodes are respectively a silver layer electrode corresponding to the small polarization zone I, a silver layer electrode corresponding to the small polarization zone II and a silver layer electrode corresponding to the large polarization zone; on the thickness direction rear surface, a monolithic silver layer electrode is sintered.

The modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor is further improved as follows: the linear guide rail is horizontally arranged, namely the motion direction of the linear guide rail is the horizontal direction; the three polarization zones on the vibrator main body of the single-foot ultrasonic motor have the following four distribution modes which respectively correspond to the four embodiments of the single-foot ultrasonic motor;

the first distribution mode of the single-foot ultrasonic motor, namely the first embodiment of the single-foot ultrasonic motor:

the two small polarization subareas I and the small polarization subareas II which are the same in size are positioned on the left side of the vibrator main body and are arranged up and down, and the other large polarization subarea is positioned on the right side of the vibrator main body and is singly arranged in a row;

the second distribution mode of the single-foot ultrasonic motor, namely the second embodiment of the single-foot ultrasonic motor:

the two small polarization subareas I and the small polarization subareas II which are the same in size are positioned on the right side of the vibrator main body and are arranged up and down, and the other large polarization subarea is positioned on the left side of the vibrator main body and is singly arranged in a row;

the distribution mode of the single-foot ultrasonic motor is three, namely the third embodiment of the single-foot ultrasonic motor:

the two small polarization partitions I and the small polarization partitions II which are the same in size are positioned on the upper portion of the vibrator body and are arranged in a left-right mode, and the other large polarization partition is positioned on the lower portion of the vibrator body and is in a row independently;

the distribution mode of the single-foot ultrasonic motor is four, namely the fourth embodiment of the single-foot ultrasonic motor:

the two small polarization subareas I and the small polarization subareas II with the same size are positioned at the lower part of the vibrator body and arranged in a left-right mode, and the other large polarization subarea is positioned at the upper part of the vibrator body and is independently arranged in a line.

The invention provides a modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor which is composed of a double-foot plate-shaped stator and a rotor, wherein the rotor is a linear guide rail, and the double-foot plate-shaped stator is composed of a vibrator main body and double driving feet; the double-drive-foot plate-shaped stator is characterized in that the vibrator main body is a cuboid made of piezoelectric ceramic materials, the vibrator main body is provided with three polarization zones including a small polarization zone I, a small polarization zone II and a large polarization zone, the small polarization zone I, the small polarization zone II and the large polarization zone are the same in size, double drive feet of the double-foot plate-shaped stator are made of wear-resistant materials and are combined with the vibrator main body into a whole through bonding, welding or sintering, and the guide rails are pressed on the double drive feet of the double-foot plate-shaped stator under the action of pre-pressing force.

The mode decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor is further improved as follows: the linear guide rail is horizontally arranged, namely the motion direction of the linear guide rail is the horizontal direction; the three polarization zones on the vibrator main body of the double-foot ultrasonic motor have the following four distribution modes which respectively correspond to four embodiments of the double-foot ultrasonic motor;

the first distribution mode of the ultrasonic motor with double feet is that the first embodiment of the ultrasonic motor with double feet:

the first distribution mode of the double-foot ultrasonic motor is that the second embodiment of the double-foot ultrasonic motor:

the two small polarization partitions I and the small polarization partitions II which are the same in size are positioned at the lower part of the vibrator body and are arranged in a left-right mode, and the other large polarization partition is positioned at the upper part of the vibrator body and is in a row independently;

the first distribution mode of the ultrasonic motor with double feet is that the third embodiment of the ultrasonic motor with double feet is as follows:

the first distribution mode of the double-foot ultrasonic motor is that in the fourth embodiment of the double-foot ultrasonic motor:

the two small polarization subareas I and the small polarization subareas II which are the same in size are positioned on the right side of the vibrator body and are arranged up and down, and the other large polarization subarea is positioned on the left side of the vibrator body and is independently arranged in a row.

The invention provides an excitation mode of a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor, wherein a whole silver layer sintered on the rear surface of a vibrator body in the thickness direction is used for grounding; the silver layer electrode corresponding to the small polarization zone I and the silver layer electrode corresponding to the small polarization zone II are connected to form an A phase of the motor, are positioned on the front surface of the vibrator body in the thickness direction, are only used for exciting a stator to generate a second-order bending vibration mode and are only used for providing a tangential vibration component of a single driving foot; the silver layer electrodes corresponding to the large polarization subareas form a B phase of the motor independently and are positioned on the front surface of the vibrator main body in the thickness direction, only used for exciting the stator to generate a first-order longitudinal vibration mode and only used for providing a normal vibration component of a single driving foot; the second-order bending vibration mode and the first-order longitudinal vibration mode of the stator of the single-drive-foot structure are decoupled in control, namely, the modes are decoupled.

AsThe mode decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor excitation method is further improved as follows: two orthogonal working modes of the driving motor are a second-order bending vibration mode and a first-order longitudinal vibration mode of the stator respectively; through the structural design, the second-order bending vibration mode and the first-order longitudinal vibration mode of the stator have better frequency consistency, namely the resonance frequency omega of the first-order longitudinal vibration mode_zAnd resonance frequency omega of second-order bending vibration mode_wIs in accordance with | ω_z-ω_wLess than or equal to 200 Hz; the frequency of the two orthogonal working mode excitation signals is omega₀，ω₀Close to omega_zAnd ω_w. When the A-phase input frequency of the motor is omega₀The continuous sine wave excitation signal is used for independently exciting the stator to generate a second-order bending vibration mode; at the same time, the B-phase input frequency of the motor is omega₀But the phase difference of the continuous sine wave excitation signal and the A-phase input signal is 90 degrees, and the continuous sine wave excitation signal is used for independently exciting the stator to generate a first-order longitudinal vibration mode; at the moment, particles on the contact interface of the single driving foot of the single-foot ultrasonic motor and the guide rail can generate an elliptical motion track, and the guide rail can generate directional horizontal motion; when the A-phase input frequency of the motor is omega₀The continuous sine wave excitation signal is not changed, and the B-phase input frequency of the motor is omega₀But the phase difference between the continuous sine wave excitation signal and the A-phase input signal is-90 degrees, at the moment, mass points on the contact interface of the single-foot ultrasonic motor and the guide rail generate an elliptic motion track rotating in the opposite direction, and the guide rail generates opposite directional horizontal motion.

The mode of excitation of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor is further improved as follows: according to mechanical output characteristics, the single-foot ultrasonic motor can be divided into three design types, namely a force and speed balanced type, a force side heavy type and a speed side heavy type;

the single-foot ultrasonic motor has the characteristics of force and speed balance:

the sum of the areas of the silver layer electrodes of the small polarization subarea I and the small polarization subarea II corresponding to the phase A of the single-foot ultrasonic motor is approximately equal to the area of the silver layer electrodes of the large polarization subarea corresponding to the phase B of the single-foot ultrasonic motor, so that the power output from the single-foot ultrasonic motor to the second-order bending vibration mode corresponding to the phase A and the tangential vibration component of the single driving foot is approximately equal to the power output to the first-order longitudinal vibration mode corresponding to the phase B and the normal vibration component of the single driving foot;

the single-foot ultrasonic motor is characterized in that the force side is heavy:

the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II corresponding to the phase A of the single-foot ultrasonic motor is obviously smaller than the area of the silver layer electrode of the large polarization zone corresponding to the phase B of the single-foot ultrasonic motor, so that the output power of the single-foot ultrasonic motor is emphasized on a first-order longitudinal vibration mode corresponding to the phase B and a normal vibration component of a single driving foot;

the single-foot ultrasonic motor is characterized in that the speed side is heavy:

the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II corresponding to the phase A of the single-foot ultrasonic motor is obviously larger than the area of the silver layer electrode of the large polarization zone corresponding to the phase B of the single-foot ultrasonic motor, so that the output power of the single-foot ultrasonic motor is emphasized on the second-order bending vibration mode corresponding to the phase A and the tangential vibration component of the single driving foot.

The three design types and characteristics of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor enable the single-foot ultrasonic motor to have a wider application range.

The invention provides an excitation mode of a modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor, which comprises the following steps: a whole silver layer electrode sintered on the rear surface of the vibrator body in the thickness direction is used for grounding; the silver layer electrode corresponding to the first small polarization zone and the silver layer electrode corresponding to the second small polarization zone are connected to form an A phase of the motor, are positioned on the front surface of the vibrator body in the thickness direction, are only used for exciting the stator to generate a second-order bending vibration mode and are only used for providing a normal vibration component of the double driving feet; the silver layer electrodes corresponding to the large polarization subareas form a B phase of the motor independently and are positioned on the front surface of the vibrator body in the thickness direction, and the silver layer electrodes are only used for exciting the stator to generate a first-order longitudinal vibration mode and are only used for providing tangential vibration components of the double driving feet; the second-order bending vibration mode and the first-order longitudinal vibration mode of the stator of the double-driving-foot structure are decoupled in control, namely, the modes are decoupled.

The mode of excitation of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor is further improved as follows: two orthogonal working modes of the driving motor are a second-order bending vibration mode and a first-order longitudinal vibration mode of the stator respectively; through the structural design, the second-order bending vibration mode and the first-order longitudinal vibration mode of the stator have better frequency consistency, namely the resonance frequency omega of the first-order longitudinal vibration mode_zAnd resonance frequency omega of second-order bending vibration mode_wIs in accordance with | ω_z-ω_wLess than or equal to 200 Hz; the frequency of the two orthogonal working mode excitation signals is omega₀，ω₀Close to omega_zAnd ω_w. When the A-phase input frequency of the motor is omega₀The continuous sine wave excitation signal is used for independently exciting the stator to generate a second-order bending vibration mode; at the same time, the B-phase input frequency of the motor is omega₀But the phase difference of the continuous sine wave excitation signal and the A-phase input signal is 90 degrees, and the continuous sine wave excitation signal is used for independently exciting the stator to generate a first-order longitudinal vibration mode; at the moment, particles on the contact interface of the double driving feet of the double-foot ultrasonic motor and the guide rail can generate an elliptical motion track, and the guide rail can generate directional horizontal motion; when the A-phase input frequency of the motor is omega₀The continuous sine wave excitation signal is not changed, and the B-phase input frequency of the motor is omega₀But the phase difference between the continuous sine wave excitation signal and the A-phase input signal is-90 degrees, at the moment, mass points on the contact interface between the double driving feet of the double-foot ultrasonic motor and the guide rail can generate an elliptic motion track rotating in the opposite direction, and the guide rail can generate opposite directional horizontal motion.

The mode of excitation of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor is further improved as follows: according to mechanical output characteristics, the double-foot ultrasonic motor can be divided into three design types, namely a force and speed balanced type, a force side heavy type and a speed side heavy type;

the double-foot ultrasonic motor has the characteristics of force and speed balance:

the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II corresponding to the phase A of the double-foot ultrasonic motor is approximately equal to the area of the silver layer electrode of the large polarization zone corresponding to the phase B of the double-foot ultrasonic motor, so that the power output from the double-foot ultrasonic motor to the second-order bending vibration mode corresponding to the phase A and the normal vibration component of the double-driving foot is approximately equal to the power output to the first-order longitudinal vibration mode corresponding to the phase B and the tangential vibration component of the double-driving foot;

the force side heavy type of the double-foot ultrasonic motor is characterized in that:

the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II corresponding to the phase A of the double-foot ultrasonic motor is obviously larger than the area of the silver layer electrode of the large polarization zone corresponding to the phase B of the double-foot ultrasonic motor, so that the output power of the double-foot ultrasonic motor is emphasized on the second-order bending vibration mode corresponding to the phase A and the normal vibration component of the double-driving foot;

the double-foot ultrasonic motor is characterized in that the speed side is heavy:

the sum of the areas of the silver layer electrode of the small polarization zone I corresponding to the phase A and the silver layer electrode of the small polarization zone II of the double-foot ultrasonic motor is obviously smaller than the area of the silver layer electrode of the large polarization zone corresponding to the phase B of the double-foot ultrasonic motor, so that the output power of the double-foot ultrasonic motor is emphasized on the first-order longitudinal vibration mode corresponding to the phase B and the tangential vibration component of the double driving feet.

The three design types and the characteristics of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor enable the double-foot ultrasonic motor to have a wider application range.

Compared with the background technology, the modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and the excitation mode thereof have the innovation points that:

1. compared with a single-drive foot plate-shaped ultrasonic Motor described in U.S. patent No. 5453653, Ceramic Motor, patented as Nanomotion Ltd:

firstly, the characteristics of a Nanomotion Ltd ultrasonic motor are seen: a. the two polarization subareas which are distributed diagonally are connected to form two phases of the vibrator main body A, B; b. single-phase bimodal coupling drive by a; c. and (4) single-phase driving.

The defects of the Nanomotion Ltd ultrasonic motor can be known from the characteristics of the ultrasonic motor: the coupling is controlled by two orthogonal working modes caused by four uniformly distributed polarization partitions, so that the ultrasonic motor can be driven by single-phase excitation, only half of the piezoelectric ceramics of the ultrasonic motor is in a working state while the other half of the piezoelectric ceramics is in an idle state during working.

The modal decoupling tri-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor adopts a polarization mode of non-uniform tri-partition, so that the two orthogonal working modes of the ultrasonic motor are controlled and decoupled, A, B two phases of the ultrasonic motor simultaneously input two-phase sine wave excitation signals with the phase difference of 90 degrees, and the guide rail is driven to move forward and backward; namely, all the piezoelectric ceramics are in working states when the ultrasonic motor works. In addition, because the ultrasonic motor adopts a polarization mode of non-uniform three partitions, the single-drive foot structure (single-foot ultrasonic motor) and the double-drive foot structure (double-foot ultrasonic motor) of the ultrasonic motor have three design types: the ultrasonic motor has the advantages that the ultrasonic motor is in a design type of four uniformly-distributed polarization subareas, namely, a force and speed balance type, a force side heavy type and a speed side heavy type, so that the ultrasonic motor has a wider application range compared with the ultrasonic motor with the nano motion Ltd.

2. Compared with a plate-shaped ultrasonic motor with a piezoelectric ceramic material as a vibrator main body, which is proposed in 2014 simulation design of linear ultrasonic motor based on longitudinal bending mode in the university of science and technology of Huazhong university history:

seeing the characteristics of the plate-shaped ultrasonic motor proposed by the university of science and technology in Huazhong, the history of the motor is recorded: a. the two polarization subareas which are distributed diagonally are connected to form two phases of the vibrator main body A, B; b. a bimodal coupling drive by a belt; c.A, B two-phase driving (A, B two phases input two-phase sine wave excitation signals with a phase difference of 90 degrees at the same time).

The defects of the plate-shaped ultrasonic motor can be known from the characteristics of the plate-shaped ultrasonic motor proposed by History of Huazhong university of science and technology: due to the control coupling of two orthogonal working modes caused by the four uniformly-distributed polarized subareas, an oblique elliptical motion track component generated by the ultrasonic motor under the excitation of the A phase is not orthogonal to an oblique elliptical motion track component generated under the excitation of the B phase, so that A, B two-phase driving is finally irregular and time-varying in an elliptical motion track synthesized on a mass point of a contact interface of the driving foot and the guide rail, and is not beneficial to stable driving.

The modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor adopts a polarization mode of non-uniform tri-partition, so that two orthogonal working modes of the ultrasonic motor are controlled and decoupled; because the two orthogonal working modes are controlled and decoupled, when A, B two phases of the ultrasonic motor simultaneously input two-phase sine wave excitation signals with the phase difference of 90 degrees, the motion track on the mass point of the contact interface of the driving foot and the guide rail is a regular elliptic motion track theoretically, and stable driving is facilitated. In addition, because the ultrasonic motor adopts a polarization mode of non-uniform three partitions, the single-drive foot structure (single-foot ultrasonic motor) and the double-drive foot structure (double-foot ultrasonic motor) of the ultrasonic motor have three design types: the plate-shaped ultrasonic motor provided by the history of Huazhong science and technology university is only provided with four uniformly-distributed polarization partitions, namely, the force and speed balanced type, the force side heavy type and the speed side heavy type, so that the ultrasonic motor has a wider application range compared with the plate-shaped ultrasonic motor provided by the history of Huazhong science and technology university.

3. The modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor and the excitation mode thereof have the greatest innovation points that: (1) the structure is innovative. Compared with a single-drive foot plate-shaped ultrasonic motor of the Nanomotion Ltd in the background technology and a plate-shaped ultrasonic motor proposed by History of Huazhong science and technology university, the plate-shaped ultrasonic motor optimizes the structure of four uniformly distributed polarized partitions in the background technology and simplifies the structure into non-uniformly distributed three-polarized partitions, so that the utilization rate of piezoelectric ceramics during working is improved, the manufacturing process is simplified, and the manufacturing cost is reduced; (2) the driving principle is innovative. Compared with a single-drive foot plate-shaped ultrasonic motor of the Nanomotion Ltd in the background technology and a plate-shaped ultrasonic motor proposed by the university of science and technology in Huazhong, the plate-shaped ultrasonic motor adopts the non-uniform three-polarization partition, optimizes the driving mechanism of the control coupling of the two orthogonal working modes in the background technology into the control decoupling of the two orthogonal working modes, and directly solves the defects existing in the background technology: or half of the piezoelectric ceramics are in an idle state when in work or the elliptic motion track synthesized on the mass point of the contact interface of the driving foot and the guide rail is irregular and time-varying (not beneficial to stable driving); furthermore, the plate-shaped ultrasonic motor of the invention also provides three design types on the basis of non-uniform three-polarization partition and two-orthogonal working mode control decoupling: "force and speed balanced type", "force side heavy type", and "speed side heavy type"; compared with a plate-shaped ultrasonic motor of Nanomotion Ltd in the background technology and a plate-shaped ultrasonic motor proposed by Huazhong science and technology university history, the modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor can provide larger output power and better stability in theory and has wider application range.

Description of the drawings:

FIG. 1 is a schematic structural diagram of a modal decoupling tri-partition piezoelectric ceramic single-or double-foot ultrasonic motor; wherein: the solid line part is a schematic diagram of a single-drive-foot structure (namely a modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor) of the ultrasonic motor; the dotted line part is a schematic diagram of a double-driving-foot structure (namely a modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor) of the ultrasonic motor.

Fig. 2 is a structural schematic diagram of a first embodiment of a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor, which is also a design type of a force and speed balance type of the first embodiment of the single-foot ultrasonic motor.

Fig. 3 is a structural schematic diagram of the first embodiment of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor, which is also a design type of the force and speed balance type of the first embodiment of the double-foot ultrasonic motor.

FIG. 4 is a schematic view of an example I of the structure and polarization division and polarization direction of a stator of a first embodiment of a modal decoupling tri-partition piezoceramic single-foot ultrasonic motor; wherein: fig. 4(a) is a schematic structural view of a stator of the first embodiment of the ultrasonic motor with single foot; fig. 4(b) is an i-th example of the stator polarization division and polarization direction of the first embodiment of the one-legged ultrasonic motor.

FIG. 5 is a schematic diagram of the second, third and fourth examples of the polarization zones and polarization directions of the stator of the first embodiment of the modal decoupling tri-zone piezoceramic single-legged ultrasonic motor; wherein: wherein: fig. 5(a) is a ii example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor of one foot; fig. 5(b) is a iii-th example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor of one foot; fig. 5(c) is an iv example of the polarization division and polarization direction of the stator of the first embodiment of the one-legged ultrasonic motor.

FIG. 6 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the first embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 7 is a schematic stator wiring mode diagram of the first embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 8 is a schematic diagram of two orthogonal working modes of the stator of the first, second, third and fourth embodiments of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor; wherein: fig. 8(a) is a schematic diagram of a second-order bending vibration mode of the single-foot ultrasonic motor; fig. 8(b) is a schematic diagram of a first-order longitudinal vibration mode of the single-foot ultrasonic motor.

FIG. 9 is a schematic diagram of the driving modes of the stators of the first, second, third and fourth embodiments of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor; wherein: fig. 9(a) is a diagram showing that two orthogonal working modes of the stator are simultaneously excited by two sinusoidal signals with a phase difference of pi/2, so that mass points on the end face of a single driving foot of the single-foot ultrasonic motor generate a forward-rotating elliptical motion track; fig. 9(b) is a diagram showing that two orthogonal working modes of the stator are simultaneously excited by two sinusoidal signals with a phase difference of-pi/2, so that mass points on the end face of a single driving foot of the single-foot ultrasonic motor generate an elliptic motion track with reverse rotation.

FIG. 10 is a schematic diagram of two design types of the first embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor; wherein: FIG. 10(a) is a "force side heavy" design type of the first embodiment of the single-foot ultrasonic motor; fig. 10(b) shows a type of "speed side heavy" design of the first embodiment of the single-foot ultrasonic motor.

Fig. 11 is a structural schematic diagram of a second embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor, which is also a design type of a force and speed balance type of the second embodiment of the single-foot ultrasonic motor.

FIG. 12 is a schematic view of an example I of the structure and polarization division and polarization direction of the stator of a second embodiment of a modal decoupling tri-partition piezoceramic single-legged ultrasonic motor; wherein: fig. 12(a) is a schematic structural view of a stator of a second embodiment of the ultrasonic single-legged motor; fig. 12(b) is an i-th example of stator polarization division and polarization direction of the second embodiment of the one-legged ultrasonic motor.

FIG. 13 is a schematic diagram of the second, third and fourth examples of the polarization zones and polarization directions of the stator of the second embodiment of the modal decoupling three-zone piezoceramic single-legged ultrasonic motor; wherein: fig. 13(a) is a ii example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic one-legged motor; fig. 13(b) is a iii-th example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor of one foot; fig. 13(c) is an iv example of the polarization division and polarization direction of the stator of the second embodiment of the one-legged ultrasonic motor.

Fig. 14 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the second embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 15 is a schematic diagram of a stator wiring mode of a second embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 16 is a schematic diagram of two design types of a second embodiment of a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor; wherein: FIG. 16(a) is a "force side heavy" design type of the second embodiment of the single-foot ultrasonic motor; fig. 16(b) shows a "speed side heavy" type of design of the second embodiment of the single-foot ultrasonic motor.

Fig. 17 is a structural schematic diagram of a third embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor, which is also a design type of a force and speed balance type of the third embodiment of the single-foot ultrasonic motor.

FIG. 18 is a schematic view of an example I of the structure and polarization division and polarization direction of the stator of a third embodiment of a modal decoupling tri-division piezoelectric ceramic single-legged ultrasonic motor; wherein: fig. 18(a) is a schematic structural view of a stator of a third embodiment of the ultrasonic motor with single foot; fig. 18(b) is an i-th example of the stator polarization division and polarization direction of the third embodiment of the ultrasonic motor of one-foot.

FIG. 19 is a schematic diagram of the second, third and fourth examples of polarization division and polarization direction of the stator of the third embodiment of the modal decoupling tri-division piezoceramic single-foot ultrasonic motor; wherein: fig. 19(a) is a ii th example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor of one foot; fig. 19(b) is a iii-th example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor of one foot; fig. 19(c) is an iv example of the polarization division and polarization direction of the stator of the third embodiment of the one-legged ultrasonic motor.

Fig. 20 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the third embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 21 is a schematic stator wiring mode diagram of a third embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 22 is a schematic diagram of two design types of a third embodiment of a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor; wherein: FIG. 22(a) is a design type of a third embodiment of the single-foot ultrasonic motor "force side heavy type"; fig. 22(b) shows a design type of the third embodiment "speed side heavy type" of the ultrasonic motor with one foot.

Fig. 23 is a structural schematic diagram of a fourth embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor, which is also a design type of a force and speed balance type of the fourth embodiment of the single-foot ultrasonic motor.

FIG. 24 is a schematic view of an example I of the structure and polarization division and polarization direction of a stator of a fourth embodiment of a modal decoupling tri-division piezoelectric ceramic single-legged ultrasonic motor; wherein: fig. 24(a) is a schematic structural view of a stator of a fourth embodiment of the ultrasonic single-legged motor; fig. 24(b) is an i-th example of the stator polarization division and polarization direction of the fourth embodiment of the one-legged ultrasonic motor.

FIG. 25 is a schematic diagram of the second, third and fourth examples of polarization division and polarization direction of the stator of the fourth embodiment of the modal decoupling tri-division piezoceramic single-legged ultrasonic motor; wherein: fig. 25(a) is a ii example of the polarization division and polarization direction of the stator of the fourth embodiment of the ultrasonic motor of one foot; fig. 25(b) is a iii-th example of the polarization division and polarization direction of the stator of the fourth embodiment of the ultrasonic motor of one foot; fig. 25(c) is an iv example of the polarization division and polarization direction of the stator of the fourth embodiment of the one-legged ultrasonic motor.

Fig. 26 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the fourth embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 27 is a schematic stator wiring mode diagram of a fourth embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor.

FIG. 28 is a schematic diagram of two design types of a fourth embodiment of a modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor; wherein: FIG. 28(a) is a design type of the fourth embodiment of the single-foot ultrasonic motor "force side heavy type"; fig. 28(b) shows a design type of the fourth embodiment of the ultrasonic motor of "speed side heavy type".

FIG. 29 is a schematic view of an example I of the structure and polarization division and polarization direction of the stator of the first embodiment of the modal decoupling three-division piezoceramic bipedal ultrasonic motor; wherein: fig. 29(a) is a schematic structural view of a stator of the first embodiment of the ultrasonic motor for both feet; fig. 29(b) is an i-th example of the stator polarization division and polarization direction of the first embodiment of the ultrasonic motor for both feet.

FIG. 30 is a schematic diagram of the second, third and fourth examples of polarization division and polarization direction of the stator of the first embodiment of the modal decoupling tri-division piezoceramic bipedal ultrasonic motor; wherein: wherein: fig. 30(a) is a ii example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor for both feet; fig. 30(b) is a iii-th example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor for both feet; fig. 30(c) is an iv example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor for both feet.

Fig. 31 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the first embodiment of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor.

FIG. 32 is a schematic stator wiring diagram of the first embodiment of the modal decoupling tri-partition piezoceramic biped ultrasonic motor.

FIG. 33 is a schematic view of two orthogonal operating modes of the stators of the first, second, third and fourth embodiments of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor; wherein: fig. 33(a) is a schematic view of a second-order bending vibration mode of the ultrasonic biped motor; fig. 33(b) is a schematic view of a first-order longitudinal vibration mode of the ultrasonic biped motor.

FIG. 34 is a schematic view of the driving modes of the stators of the first, second, third and fourth embodiments of the modal decoupling tri-segmented piezoceramic bipedal ultrasonic motor; wherein: fig. 34(a) is a diagram showing that two orthogonal working modes of the stator are simultaneously excited by two sinusoidal signals with a phase difference of pi/2, so that mass points on the end faces of the dual-drive feet of the dual-foot ultrasonic motor generate a forward-rotating elliptical motion track; fig. 34(b) is a diagram showing that two sinusoidal signals with a phase difference of-pi/2 simultaneously excite two orthogonal working modes of the stator, so that particles on the end faces of the dual-drive feet of the dual-foot ultrasonic motor generate an elliptic motion track with reverse rotation.

FIG. 35 is a schematic view of two design types of the first embodiment of the modal decoupling tri-partition piezoceramic biped ultrasonic motor; wherein: FIG. 35(a) is a design type of the first embodiment of the ultrasonic biped motor "force side heavy type"; fig. 35(b) shows a design type of the "speed side heavy type" of the first embodiment of the ultrasonic motor with two feet.

Fig. 36 is a structural schematic diagram of a second embodiment of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor, which is also a design type of a force and speed balance type of the second embodiment of the double-foot ultrasonic motor.

FIG. 37 is a schematic view of an example I of the structure and polarization division and polarization direction of the stator of a second embodiment of a modal decoupling tri-segmented piezoceramic bipedal ultrasonic motor; wherein: fig. 37(a) is a schematic structural view of a stator of the second embodiment of the ultrasonic motor for both feet; fig. 37(b) is an i-th example of stator polarization division and polarization direction of the second embodiment of the ultrasonic motor with two feet.

FIG. 38 is a schematic view of the second, third and fourth examples of the polarization division and polarization direction of the stator of the second embodiment of the modal decoupling tri-division piezoceramic bipedal ultrasonic motor; wherein: fig. 38(a) is a ii example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor for both feet; fig. 38(b) is a iii-th example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor; fig. 38(c) is an iv example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor with two feet.

Fig. 39 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of a second embodiment of the modal decoupling tri-partition piezoceramic biped ultrasonic motor.

FIG. 40 is a schematic diagram of a stator wiring mode of a second embodiment of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor.

FIG. 41 is a schematic view of two design types of a second embodiment of a modal decoupling tri-partition piezoceramic biped ultrasonic motor; wherein: FIG. 41(a) is a design type of a second embodiment of the ultrasonic biped motor "force side heavy type"; fig. 41(b) is a type of design of the second embodiment of the ultrasonic motor of both feet, which is "speed side heavy".

Fig. 42 is a structural schematic diagram of a third embodiment of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor, which is also a design type of a force and speed balance type of the third embodiment of the double-foot ultrasonic motor.

FIG. 43 is a schematic view of an example I of the structure and polarization division and polarization direction of the stator of a third embodiment of a modal decoupling tri-partition piezoceramic bipedal ultrasonic motor; wherein: fig. 43(a) is a schematic structural view of a stator of the third embodiment of the ultrasonic motor with two feet; fig. 43(b) is an i-th example of the stator polarization division and the polarization direction of the third embodiment of the ultrasonic motor for both feet.

FIG. 44 is a schematic diagram of the second, third and fourth examples of polarization divisions and polarization directions of the stator of the third embodiment of the modal decoupling tri-division piezoceramic bipedal ultrasonic motor; wherein: fig. 44(a) is a ii example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor for both feet; fig. 44(b) is a iii-th example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor for both feet; fig. 44(c) is an iv example of the polarization division and the polarization direction of the stator of the third embodiment of the ultrasonic motor of both feet.

Fig. 45 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the third embodiment of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor.

FIG. 46 is a schematic stator wiring mode diagram of a third embodiment of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor.

FIG. 47 is a schematic view of two design types of a third embodiment of a modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor; wherein: FIG. 47(a) is a design type of a third embodiment of the ultrasonic biped motor "force side heavy type"; fig. 47(b) is a design type of the third embodiment "speed side heavy type" of the ultrasonic motor for both feet.

Fig. 48 is a structural schematic diagram of a fourth embodiment of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor, which is also a design type of a force and speed balance type of the fourth embodiment of the double-foot ultrasonic motor.

FIG. 49 is a schematic view of the first example of the structure and polarization division and polarization direction of the stator of the fourth embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor; wherein: fig. 49(a) is a schematic structural view of a stator of a fourth embodiment of the ultrasonic motor with two feet; fig. 49(b) is an i-th example of the stator polarization division and polarization direction of the fourth embodiment of the bipedal ultrasonic motor.

FIG. 50 is a schematic diagram of the second, third and fourth examples of polarization zones and polarization directions of the stator of the fourth embodiment of the modal decoupling tri-zone piezoceramic bipedal ultrasonic motor; wherein: fig. 50(a) is a ii example of the polarization division and polarization direction of the stator of the fourth embodiment of the ultrasonic motor of both feet; fig. 50(b) is a iii-th example of the polarization division and polarization direction of the stator of the fourth embodiment of the bipedal ultrasonic motor; fig. 50(c) is an iv example of the polarization division and the polarization direction of the stator of the fourth embodiment of the ultrasonic motor of both feet.

FIG. 51 is a schematic diagram of silver layer electrodes sintered on the surface of a stator of the fourth embodiment of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor.

FIG. 52 is a schematic stator wiring mode diagram of a fourth embodiment of the modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor.

FIG. 53 is a schematic diagram of two design types of a fourth embodiment of a modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor; wherein: FIG. 53(a) is a design type of a fourth embodiment of the ultrasonic biped motor "force side heavy type"; fig. 53(b) shows a design type of the fourth embodiment of the ultrasonic motor of "speed side heavy type".

Number designation in the figures: 1 a vibrator body of a plate-shaped stator; 2, small polarization zone one; 3, small polarization partition two; 4 large polarization partition; 5-1 single driving foot of the plate-shaped stator with single driving foot structure; 5-2 double driving feet of the plate-shaped stator with the double driving foot structure; 6, a linear guide rail; 7 polarization direction of the small polarization zone I; 8 polarization direction of the small polarization partition II; 9 polarization direction of large polarization zone; 10 front surface of vibrator body in thickness direction; 11 a rear surface of the vibrator body in a thickness direction; 12 silver layer electrodes corresponding to the first small polarization subarea are sintered on the front surface of the vibrator body in the thickness direction; 13 silver layer electrodes corresponding to the small polarization subarea II are sintered on the front surface of the vibrator body in the thickness direction; 14 silver layer electrodes corresponding to large polarization subareas are sintered on the front surface of the vibrator body in the thickness direction; 15 a whole silver layer electrode sintered on the rear surface of the vibrator body in the thickness direction; 16 phase a of the ultrasonic motor; 17 phase B of the ultrasonic motor; the vibration mode of a first-order longitudinal vibration mode of the 18-plate-shaped stator; 19, the vibration mode of a second-order bending vibration mode of the plate-shaped stator; 20, a forward rotating elliptical motion track generated by mass points on the end face of a single driving foot of the stator of the single driving foot structure under the excitation of a sinusoidal signal with a phase difference of pi/2 is generated; 21, exciting a mass point on the end surface of a single driving foot of the stator of the single driving foot structure by a sinusoidal signal with a phase difference of-pi/2 to generate a reversely rotating elliptical motion track; 22, under the excitation of a sinusoidal signal with a phase difference of pi/2, the two phases of the elliptical motion track of positive rotation generated by mass points on the end faces of the double driving feet of the stator with the double driving foot structure; 23, the two-phase sinusoidal signal with the phase difference of-pi/2 excites mass points on the end faces of the double driving feet of the stator of the double driving foot structure to generate an elliptic motion track rotating in the opposite direction.

Detailed Description

The invention is described in further detail below with reference to the following detailed description and accompanying drawings:

the invention provides a modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and an excitation mode thereof, and provides a modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and an excitation mode thereof, wherein the modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor can realize forward and reverse motion, and has the advantages of simple structure, large thrust-weight ratio, high excitation efficiency, high vibration energy utilization rate and high response speed. The ultrasonic motor of the invention is expected to have wide application prospect in the fields of precision driving (such as a rapid focusing device of a camera), chip manufacturing, medical instruments, automobiles, aerospace and the like.

A modal decoupling tri-partition piezoelectric ceramic single or double-foot ultrasonic motor and an excitation mode thereof are shown in figure 1, and are characterized in that: the motor has two design structures, namely a single-drive foot structure and a double-drive foot structure; the single-drive-foot structure of the ultrasonic motor is a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor, and the double-drive-foot structure of the ultrasonic motor is a modal decoupling tri-partition piezoelectric ceramic double-foot ultrasonic motor.

A first embodiment of a modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor is shown in fig. 2, and is characterized in that: the single-foot ultrasonic motor is composed of a single-foot plate-shaped stator and a linear guide rail (6), wherein the single-foot plate-shaped stator is composed of a vibrator main body (1) and a single driving foot (5-1); the vibrator main body (1) is a cuboid made of piezoelectric ceramic materials, three polarization partitions including a small polarization partition I (2), a small polarization partition II (3) and a large polarization partition (4) are arranged on the cuboid, the two small polarization partitions I (2) and the small polarization partition II (3) which are the same in size are located on the left side of the vibrator main body (1) and are arranged up and down, and the other large polarization partition (4) is located on the right side of the vibrator main body (1) and is arranged in a row independently; the single driving foot (5-1) is made of wear-resistant materials and is integrated with the vibrator main body (1) through bonding, welding or sintering; the linear guide rail (6) is horizontally arranged, namely the motion direction of the linear guide rail (6) is the horizontal direction, and the linear guide rail presses the single driving foot (5-1) of the single-foot plate-shaped stator under the action of pre-pressure.

A first embodiment of a modal decoupling tri-partition piezoelectric ceramic two-foot ultrasonic motor is shown in fig. 3, and is characterized in that: the double-foot ultrasonic motor is composed of a double-foot plate-shaped stator and a linear guide rail (6), wherein the double-foot plate-shaped stator is composed of a vibrator main body (1) and double driving feet (5-2); the vibrator main body (1) is a cuboid made of piezoelectric ceramic materials, three polarization partitions including a small polarization partition I (2), a small polarization partition II (3) and a large polarization partition (4) are arranged on the cuboid, the two small polarization partitions I (2) and the small polarization partition II (3) which are the same in size are located on the upper portion of the vibrator main body (1) and are arranged in the left and right directions, and the other large polarization partition (4) is located on the lower portion of the vibrator main body (1) and is arranged in a line independently; the double driving feet (5-2) are made of wear-resistant materials and are integrated with the vibrator main body (1) through bonding, welding or sintering; the linear guide rail (6) is horizontally arranged, namely the motion direction of the linear guide rail (6) is the horizontal direction, and the linear guide rail presses the double driving feet (5-2) of the plate-shaped stator with the double driving feet structure under the action of pre-pressure.

Fig. 4 shows a schematic diagram of an example i of the structure of the stator and the polarization partitions and polarization directions of the first embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor; the following signs for the polarization directions are defined: in the present "embodiment mode", any mark having a polarization direction directed perpendicularly from the front surface (10) of the vibrator body (1) to the rear surface (11) of the vibrator body (1) is a "+" sign, and any mark having a polarization direction directed perpendicularly from the rear surface (11) of the vibrator body (1) to the front surface (10) of the vibrator body (1) is a "-" sign; the first example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor with one foot is characterized by: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

The schematic diagrams of the structure of the stator of the first embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor and the II, III and IV examples of the polarization partition and the polarization direction are shown in FIGS. 5(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the characteristics of the third example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the iv example of the polarization division and polarization direction of the stator of the first embodiment of the one-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator and the schematic diagrams of wiring modes of the first embodiment of the modal decoupling tri-partition piezoelectric ceramic single-foot ultrasonic motor are respectively shown in fig. 6 and 7; the method is characterized in that: a whole block of silver layer (15) sintered on the rear surface (11) of the vibrator body in the thickness direction is used for grounding; the silver layer electrode (12) corresponding to the small polarization zone I and the silver layer electrode (13) corresponding to the small polarization zone II are connected to form an A phase (16) of the single-foot ultrasonic motor, are positioned on the front surface (10) of the vibrator body (1) in the thickness direction, are only used for exciting a stator to generate a second-order bending vibration mode (18), and are only used for providing a tangential vibration component of a single driving foot (5-1); the silver layer electrode (14) corresponding to the large polarization subarea separately forms a B phase (17) of the single-foot ultrasonic motor, is positioned on the front surface (10) of the vibrator body (1) in the thickness direction, is only used for exciting the stator to generate a first-order longitudinal vibration mode (19), and is only used for providing a normal vibration component of a single driving foot (5-1); this results in the second-order bending mode (18) and the first-order longitudinal mode (19) of the stator being decoupled from one another in terms of control, i.e. mode decoupling. The wiring mode and the decoupling control mode of the second-order bending vibration mode and the first-order longitudinal vibration mode of the single-foot ultrasonic motor lay a foundation for the single-foot ultrasonic motor to be divided into three design types (force and speed balanced type, force side heavy type and speed side heavy type).

The two-orthogonal working mode schematic diagrams and the driving mode schematic diagrams of the stators of the mode decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor in the first embodiment, the second embodiment, the third embodiment and the fourth embodiment are respectively shown in fig. 8 and fig. 9; the method is characterized in that: the two orthogonal working modes for driving the single-foot ultrasonic motor to work are a second-order bending vibration mode (18) and a first-order longitudinal vibration mode (19) of the single-foot plate-shaped stator respectively; the second-order bending vibration mode (18) and the first-order longitudinal vibration mode (19) of the stator have better frequency consistency through structural design, namely the resonance frequency omega of the first-order longitudinal vibration mode (19)_zAnd second order bending vibration mode(18) Resonant frequency ω of_wIs in accordance with | ω_z-ω_wLess than or equal to 200 Hz; the frequency of the two orthogonal working mode excitation signals is omega₀，ω₀Close to omega_zAnd ω_w(ii) a When the input frequency of the A phase (16) of the motor is omega₀For individually exciting said stator to produce a second order bending mode (18); at the same time, the B phase (17) input frequency of the motor is omega₀But 90 ° (phase lead) out of phase with the a phase (16) input signal, for separately exciting the stator to produce a first order longitudinal mode (19); at the moment, particles on the contact interface of the single driving foot (5-1) of the stator and the guide rail (6) can generate an elliptical motion track (20), and the guide rail (6) can generate directional motion; when the input frequency of the A phase (16) of the motor is omega₀Is constant while the B-phase (17) input frequency of the motor is omega₀But the phase difference of the continuous sine wave excitation signal with the phase A (16) input signal is-90 degrees (phase lag), and the mass point on the contact interface of the single driving foot (5-1) of the stator and the guide rail (6) generates an elliptic motion track (21) rotating in the opposite direction, and the guide rail (6) generates a directional motion in the opposite direction.

Three design types ("force and speed equilibrium type", "force side heavy type" and "speed side heavy type") of the first embodiment of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor are respectively shown in fig. 2 and 10; the method is characterized in that: according to mechanical output characteristics, the first embodiment of the single-foot ultrasonic motor can be divided into three design types, namely a force and speed balance type, a force side heavy type and a speed side heavy type;

as shown in fig. 2, the sum of the areas of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the "a phase (16)" of the motor is approximately equal to the area of the silver layer electrode (14) of the large polarization zone corresponding to the "B phase (17)" of the motor, so that the power output by the motor to the tangential vibration component of the "second-order bending vibration mode (18) corresponding to the" a phase (16) and the single driving foot (5-1) "and the power output to the first-order longitudinal vibration mode (19) corresponding to the" B phase (17) and the normal vibration component of the single driving foot (5-1) "are approximately equal;

as shown in fig. 10(a), the sum of the areas of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the phase a (16) of the motor is "significantly smaller than the area of the silver layer electrode (14) of the large polarization zone corresponding to the phase B (17)" of the motor, so that the output power of the motor is heavier than the normal vibration components of the first-order longitudinal vibration mode (19) and the single driving foot (5-1) corresponding to the phase B (17) ";

as shown in fig. 10(B), the sum of the areas of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the "a phase (16)" of the motor is "significantly larger than the area of the silver layer electrode (14) of the large polarization zone corresponding to the" B phase (17) "of the motor, which makes the motor output power heavier than the tangential vibration component of the" second-order bending vibration mode (18) and the single drive foot (5-1) corresponding to the "a phase (16"); the three design types and features of the first embodiment of the single drive foot configuration described above allow for a wider range of applications for the ultrasonic motor of the present invention.

A second embodiment of a modal decoupling tri-partition piezoceramic single-leg ultrasonic motor is shown in fig. 11, which differs from the first embodiment of the single-leg ultrasonic motor shown in fig. 2 in that: in the three non-uniform polarized subareas (2, 3 and 4), two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the right side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the left side of the vibrator main body (1) and is in a single row; other embodiments are consistent with the first embodiment of the single-legged ultrasonic motor shown in fig. 2.

Fig. 12 is a schematic diagram of an example i of the structure of the stator and the polarization partitions and polarization directions of the second embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor; the characteristics of the first example of the polarization division and polarization direction of the stator of the second embodiment of the single-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the second, third and fourth examples of polarization partitions and polarization directions of the stator of the second embodiment of the modal decoupling tri-partition piezoceramic single-legged ultrasonic motor are shown in fig. 13(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the second embodiment of the single-legged ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of one small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the third example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the second embodiment of the single-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator of the second embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor and the schematic diagrams of the wiring mode are respectively shown in fig. 14 and 15, and are different from the silver layer electrodes sintered on the surface of the stator of the first embodiment of the single-foot ultrasonic motor and the wiring mode shown in fig. 6 and 7 in that: in the three non-uniform polarized subareas (2, 3 and 4), two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the right side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the left side of the vibrator main body (1) and is in a single row; correspondingly, the silver layer electrode (12) corresponding to the first small polarization subarea and the silver layer electrode (13) corresponding to the second small polarization subarea, which are sintered on the front surface (10) in the thickness direction of the oscillator body, are positioned on the right side of the front surface (10) in the thickness direction of the oscillator body and are arranged up and down, and the silver layer electrode (14) corresponding to the large polarization subarea and sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the left side of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a row; other embodiments correspond to the embodiment of the first embodiment of the single-foot ultrasonic motor in fig. 6 and 7.

The three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the second embodiment of the modal-decoupled tri-partition piezoceramic single-foot ultrasonic motor are shown in fig. 11 and 16, respectively, and differ from the three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the first embodiment of the single-foot ultrasonic motor shown in fig. 2 and 10 in that: in the three non-uniform polarized subareas (2, 3 and 4), two small polarized subareas (2 and 3) with the same size are positioned on the right side of the vibrator body and are arranged up and down, and the other large polarized subarea (4) is positioned on the left side of the vibrator body and is in a single row; correspondingly, the silver layer electrode (12) corresponding to the first small polarization subarea and the silver layer electrode (13) corresponding to the second small polarization subarea, which are sintered on the front surface (10) in the thickness direction of the oscillator body, are positioned on the right side of the front surface (10) in the thickness direction of the oscillator body and are arranged up and down, and the silver layer electrode (14) corresponding to the large polarization subarea and sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the left side of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a row; other embodiments are consistent with the embodiments of the first embodiment of the single-legged ultrasonic motor in fig. 2 and 10. The three design types and characteristics of the second embodiment of the single-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

A third embodiment of a modal decoupling tri-partition piezoceramic single-foot ultrasonic motor is shown in fig. 17, which differs from the first embodiment of the single-foot ultrasonic motor shown in fig. 2 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the upper part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the lower part of the vibrator main body (1) and is singly arranged in a line; other embodiments are consistent with the first embodiment of the single-legged ultrasonic motor shown in fig. 2.

Fig. 18 is a schematic diagram of an example i of the structure of the stator and the polarization partitions and the polarization directions of the third embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor; the characteristics of the ith example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor with one foot are: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the second, third and fourth examples of the polarization partitions and polarization directions of the stator of the third embodiment of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor are shown in fig. 19(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor of one-foot is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of one small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the third example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor of one-foot is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the third embodiment of the single-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator and the schematic diagrams of the wiring mode of the third embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor are respectively shown in fig. 20 and 21, and are different from the silver layer electrodes sintered on the surface of the stator and the wiring mode of the first embodiment of the single-foot ultrasonic motor shown in fig. 6 and 7 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the upper part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the lower part of the vibrator main body (1) and is singly arranged in a line; correspondingly, the silver layer electrode (12) corresponding to the small polarization subarea I and the silver layer electrode (13) corresponding to the small polarization subarea II which are sintered on the front surface (10) in the thickness direction of the oscillator body are positioned on the upper part of the front surface (10) in the thickness direction of the oscillator body and arranged in the left and right directions, and the silver layer electrode (14) corresponding to the large polarization subarea which is sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the lower part of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a line; other embodiments correspond to the embodiment of the first embodiment of the single-foot ultrasonic motor in fig. 6 and 7.

The three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the third embodiment of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor are shown in fig. 17 and 22, respectively, and are different from the three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the first embodiment of the single-foot ultrasonic motor shown in fig. 2 and 10 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the upper part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the lower part of the vibrator main body (1) and is singly arranged in a line; correspondingly, the silver layer electrode (12) corresponding to the small polarization subarea I and the silver layer electrode (13) corresponding to the small polarization subarea II which are sintered on the front surface (10) in the thickness direction of the oscillator body are positioned on the upper part of the front surface (10) in the thickness direction of the oscillator body and arranged in the left and right directions, and the silver layer electrode (14) corresponding to the large polarization subarea which is sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the lower part of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a line; other embodiments are consistent with the embodiments of the first embodiment of the single-legged ultrasonic motor in fig. 2 and 10. The three design types and characteristics of the third embodiment of the single-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

A fourth embodiment of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor is shown in fig. 23, and is different from the first embodiment of the single-foot ultrasonic motor shown in fig. 2 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the lower part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the upper part of the vibrator main body (1) and is singly arranged in a line; other embodiments are consistent with the first embodiment of the single-legged ultrasonic motor shown in fig. 2.

Fig. 24 shows a schematic diagram of the structure of the stator and the first example of the polarization partition and the polarization direction of the fourth embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor; the characteristics of the first example of the polarization division and polarization direction of the stator of the fourth embodiment of the single-legged ultrasonic motor are as follows: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the second, third and fourth examples of the polarization partitions and polarization directions of the stator of the fourth embodiment of the modal decoupling tri-partition piezoceramic single-legged ultrasonic motor are shown in fig. 25(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the fourth embodiment of the one-legged ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of one small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the characteristics of the third example of the polarization division and the polarization direction of the stator of the fourth embodiment of the one-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the fourth embodiment of the single-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator and the schematic diagrams of the wiring mode of the fourth embodiment of the modal decoupling three-partition piezoelectric ceramic single-foot ultrasonic motor are respectively shown in fig. 26 and 27, and are different from the silver layer electrodes sintered on the surface of the stator and the wiring mode of the first embodiment of the single-foot ultrasonic motor shown in fig. 6 and 7 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the lower part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the upper part of the vibrator main body (1) and is singly arranged in a line; correspondingly, the silver layer electrode (12) corresponding to the small polarization subarea I and the silver layer electrode (13) corresponding to the small polarization subarea II which are sintered on the front surface (10) in the thickness direction of the oscillator body are positioned at the lower part of the front surface (10) in the thickness direction of the oscillator body and are arranged in the left and right directions, and the silver layer electrode (14) corresponding to the large polarization subarea which is sintered on the front surface (10) in the thickness direction of the oscillator body is positioned at the upper part of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a line; other embodiments correspond to the embodiment of the first embodiment of the single-foot ultrasonic motor in fig. 6 and 7.

The three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the fourth embodiment of the modal decoupling tri-partition piezoceramic single-foot ultrasonic motor are shown in fig. 23 and 28, respectively, and are different from the three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the first embodiment of the single-foot ultrasonic motor shown in fig. 2 and 10 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the lower part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the upper part of the vibrator main body (1) and is singly arranged in a line; correspondingly, the silver layer electrode (12) corresponding to the small polarization subarea I and the silver layer electrode (13) corresponding to the small polarization subarea II which are sintered on the front surface (10) in the thickness direction of the oscillator body are positioned at the lower part of the front surface (10) in the thickness direction of the oscillator body and are arranged in the left and right directions, and the silver layer electrode (14) corresponding to the large polarization subarea which is sintered on the front surface (10) in the thickness direction of the oscillator body is positioned at the upper part of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a line; other embodiments are consistent with the embodiments of the first embodiment of the single-legged ultrasonic motor in fig. 2 and 10. The three design types and the characteristics of the fourth embodiment of the single-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

Fig. 29 is a schematic diagram of an example i of the structure of the stator and the polarization partitions and polarization directions of the first embodiment of the modal decoupling three-partition piezoceramic bipedal ultrasonic motor; the first example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor with two feet is characterized in that: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the structure of the stator of the first embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor and the second, third and fourth examples of the polarization partition and polarization direction are shown in fig. 30(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the first embodiment of the two-legged ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the third example of the polarization division and polarization direction of the stator of the first embodiment of the ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the first embodiment of the two-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

Fig. 31 and fig. 32 show schematic diagrams of silver layer electrodes sintered on the surface of a stator and a schematic diagram of a wiring manner of the first embodiment of the modal decoupling three-zone piezoceramic biped ultrasonic motor, respectively; the method is characterized in that: a whole block of silver layer (15) sintered on the rear surface (11) of the vibrator body in the thickness direction is used for grounding; the silver layer electrode (12) corresponding to the small polarization zone I and the silver layer electrode (13) corresponding to the small polarization zone II are connected to form an A phase (16) of the double-foot ultrasonic motor, are positioned on the front surface (10) of the vibrator body (1) in the thickness direction, are only used for exciting a stator to generate a second-order bending vibration mode (18) and are only used for providing a normal vibration component of the double-driving foot (5-2); the silver layer electrode (14) corresponding to the large polarization subarea separately forms a B phase (17) of the double-foot ultrasonic motor, is positioned on the front surface (10) of the vibrator body (1) in the thickness direction, is only used for exciting the stator to generate a first-order longitudinal vibration mode (19), and is only used for providing a tangential vibration component of the double driving feet (5-2); this results in the second-order bending mode (18) and the first-order longitudinal mode (19) of the stator being decoupled from one another in terms of control, i.e. mode decoupling. The wiring mode and the decoupling control mode of the second-order bending vibration mode and the first-order longitudinal vibration mode of the double-foot ultrasonic motor lay a foundation for the double-foot ultrasonic motor to be divided into three design types (force and speed balanced type, force side heavy type and speed side heavy type).

The schematic diagrams of two orthogonal working modes and the schematic diagrams of the driving mode of the stators of the first, second, third and fourth embodiments of the modal decoupling three-partition piezoceramic bipedal ultrasonic motor are respectively shown in fig. 33 and fig. 34; the method is characterized in that: two orthogonal working modes for driving the biped ultrasonic motor to work are a second-order bending vibration mode (18) and a first-order longitudinal vibration mode (19) of the biped plate-shaped stator respectively; the second-order bending vibration mode (18) and the first-order longitudinal vibration mode (19) of the stator have better frequency consistency through structural design, namely the resonance frequency omega of the first-order longitudinal vibration mode (19)_zAnd the resonance frequency omega of the second-order bending vibration mode (18)_wIs in accordance with | ω_z-ω_wLess than or equal to 200 Hz; the frequency of the two orthogonal working mode excitation signals is omega₀，ω₀Close to omega_zAnd ω_w(ii) a When the input frequency of the A phase (16) of the motor is omega₀For individually exciting said stator to produce a second order bending mode (18); at the same time, the B phase (17) input frequency of the motor is omega₀But 90 ° (phase lead) out of phase with the a phase (16) input signal, for separately exciting the stator to produce a first order longitudinal mode (19); at the moment, particles on the contact interface of the double driving feet (5-2) of the stator and the guide rail (6) can generate an elliptical motion track (22), and the guide rail (6) can generate directional motion; when the input frequency of the A phase (16) of the motor is omega₀Is constant while the B-phase (17) input frequency of the motor is omega₀But the phase difference of the continuous sine wave excitation signal with the phase A (16) input signal is-90 degrees (phase lag), and the mass points on the contact interface of the double driving feet (5-2) of the stator and the guide rail (6) generate an elliptic motion track (23) rotating in the opposite direction, and the guide rail (6) generates a directional motion in the opposite direction.

Three design types ("force and speed balanced type", "force side heavy type" and "speed side heavy type") of the first embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor are shown in fig. 3 and fig. 35, respectively; the method is characterized in that: according to mechanical output characteristics, the first embodiment of the double-foot ultrasonic motor can be divided into three design types, namely a force and speed balance type, a force side heavy type and a speed side heavy type;

as shown in fig. 3, the sum of the areas of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the "a phase (16)" of the motor is approximately equal to the area of the silver layer electrode (14) of the large polarization zone corresponding to the "B phase (17)" of the motor, so that the power output to the "second-order bending vibration mode (18) corresponding to the a phase (16) and the normal vibration component of the dual drive foot (5-2) and the power output to the" first-order longitudinal vibration mode (19) corresponding to the B phase (17) and the tangential vibration component of the dual drive foot (5-2) "of the motor are approximately equal;

as shown in fig. 35(a), the sum of the areas of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the "a phase (16)" of the motor is "significantly larger than the area of the silver layer electrode (14) of the large polarization zone corresponding to the" B phase (17) "of the motor, which makes the output power of the motor heavier than the normal vibration component of the" second-order bending vibration mode (18) and the double drive foot (5-2) corresponding to the "a phase (16");

as shown in fig. 35(B), the sum of the areas of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the "a phase (16)" of the motor is "significantly smaller than the area of the silver layer electrode (14) of the large polarization zone corresponding to the" B phase (17) "of the motor, which makes the motor output power heavier than the tangential vibration components of the first-order longitudinal vibration mode (19) and the double drive foot (5-2) corresponding to the" B phase (17) "; the three design types and characteristics of the first embodiment of the double-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

A second embodiment of a modal decoupling tri-partition piezoceramic biped ultrasonic motor is shown in fig. 36, which differs from the first embodiment of the biped ultrasonic motor shown in fig. 3 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the lower part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the upper part of the vibrator main body (1) and is singly arranged in a line; other embodiments are consistent with the first embodiment of the ultrasonic motor shown in figure 3.

Fig. 37 is a schematic diagram of an example i of the structure of the stator and the polarization partitions and polarization directions of the second embodiment of the modal decoupling three-partition piezoceramic bipedal ultrasonic motor; the characteristics of the first example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor are: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the second, third and fourth examples of polarization divisions and polarization directions of the stator of the second embodiment of the modal decoupling tri-division piezoceramic bipedal ultrasonic motor are shown in fig. 38(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the second embodiment of the two-legged ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of one small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the third example of the polarization division and polarization direction of the stator of the second embodiment of the ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the second embodiment of the two-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator and the schematic diagrams of the wiring mode of the second embodiment of the modal decoupling three-partition piezoceramic two-legged ultrasonic motor are respectively shown in fig. 39 and 40, and are different from the silver layer electrodes sintered on the surface of the stator and the wiring mode of the first embodiment of the two-legged ultrasonic motor shown in fig. 31 and 32 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the lower part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the upper part of the vibrator main body (1) and is singly arranged in a line; correspondingly, the silver layer electrode (12) corresponding to the small polarization subarea I and the silver layer electrode (13) corresponding to the small polarization subarea II which are sintered on the front surface (10) in the thickness direction of the oscillator body are positioned at the lower part of the front surface (10) in the thickness direction of the oscillator body and are arranged in the left and right directions, and the silver layer electrode (14) corresponding to the large polarization subarea which is sintered on the front surface (10) in the thickness direction of the oscillator body is positioned at the upper part of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a line; other embodiments correspond to the embodiment of the stator of the first embodiment of the ultrasonic motor with two feet in fig. 31 and 32.

The three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the second embodiment of the modal decoupling tri-segmented piezoceramic bipedal ultrasonic motor are shown in fig. 36 and 41, respectively, and differ from the three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the first embodiment of the dual drive foot structure shown in fig. 3 and 35 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned at the lower part of the vibrator main body (1) and arranged left and right, and the other large polarized subarea (4) is positioned at the upper part of the vibrator main body (1) and is singly arranged in a line; correspondingly, the silver layer electrode (12) corresponding to the small polarization subarea I and the silver layer electrode (13) corresponding to the small polarization subarea II which are sintered on the front surface (10) in the thickness direction of the oscillator body are positioned at the lower part of the front surface (10) in the thickness direction of the oscillator body and are arranged in the left and right directions, and the silver layer electrode (14) corresponding to the large polarization subarea which is sintered on the front surface (10) in the thickness direction of the oscillator body is positioned at the upper part of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a line; other embodiments correspond to the embodiment of the first embodiment of the ultrasonic bipedal motor in figures 3 and 35. The three design types and characteristics of the second embodiment of the double-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

A third embodiment of a modal decoupling tri-partition piezoceramic bipedal ultrasonic motor is shown in fig. 42, which differs from the first embodiment of the dual drive foot configuration shown in fig. 3 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the left side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the right side of the vibrator main body (1) and is singly arranged in a row; other embodiments are consistent with the first embodiment of the ultrasonic motor shown in figure 3.

Fig. 43 shows a schematic diagram of an example i of the structure of the stator and the polarization partitions and polarization directions of the third embodiment of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor; the characteristics of the first example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor with two feet are as follows: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the second, third and fourth examples of polarization partitions and polarization directions of the stator of the third embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor are shown in fig. 44(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor with two feet is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of one small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the third example of the polarization division and polarization direction of the stator of the third embodiment of the ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the third embodiment of the two-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator and the schematic diagrams of the wiring mode of the third embodiment of the modal decoupling three-partition piezoceramic two-legged ultrasonic motor are respectively shown in fig. 45 and 46, and are different from the silver layer electrodes sintered on the surface of the stator and the wiring mode of the first embodiment of the two-legged ultrasonic motor shown in fig. 31 and 32 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the left side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the right side of the vibrator main body (1) and is singly arranged in a row; correspondingly, the silver layer electrode (12) corresponding to the first small polarization subarea and the silver layer electrode (13) corresponding to the second small polarization subarea, which are sintered on the front surface (10) in the thickness direction of the oscillator body, are positioned on the left side of the front surface (10) in the thickness direction of the oscillator body and are arranged up and down, and the silver layer electrode (14) corresponding to the large polarization subarea and sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the right side of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a row; other embodiments correspond to the embodiment of the first embodiment of the ultrasonic motor with two feet in fig. 31 and 32.

The three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the third embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor are shown in fig. 42 and 47, respectively, and are different from the three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the first embodiment of the bipedal ultrasonic motor shown in fig. 3 and 35 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the left side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the right side of the vibrator main body (1) and is singly arranged in a row; correspondingly, the silver layer electrode (12) corresponding to the first small polarization subarea and the silver layer electrode (13) corresponding to the second small polarization subarea, which are sintered on the front surface (10) in the thickness direction of the oscillator body, are positioned on the left side of the front surface (10) in the thickness direction of the oscillator body and are arranged up and down, and the silver layer electrode (14) corresponding to the large polarization subarea and sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the right side of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a row; other embodiments correspond to the embodiment of the first embodiment of the ultrasonic bipedal motor in figures 3 and 35. The three design types and the characteristics of the third embodiment of the double-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

A fourth embodiment of a modal decoupling tri-partition piezoceramic biped ultrasonic motor is shown in fig. 48, which differs from the first embodiment of the biped ultrasonic motor shown in fig. 3 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the right side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the left side of the vibrator main body (1) and is independently arranged in a row; other embodiments are consistent with the first embodiment of the ultrasonic motor shown in figure 3.

Fig. 49 is a schematic diagram of an example i of the structure of the stator and the polarization partitions and the polarization directions of the fourth embodiment of the modal decoupling three-partition piezoelectric ceramic double-foot ultrasonic motor; the characteristics of the first example of the polarization division and polarization direction of the stator of the fourth embodiment of the ultrasonic motor with two feet are as follows: the polarization direction (7) of the small polarization partition I, the polarization direction (8) of the small polarization partition II and the polarization direction (9) of the large polarization partition of the vibrator main body (1) are polarized along the thickness direction of the vibrator main body (1); the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of the small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign.

Schematic diagrams of the second, third and fourth examples of the polarization partitions and polarization directions of the stator of the fourth embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor are shown in fig. 50(a), (b) and (c); the second example of the polarization division and polarization direction of the stator of the fourth embodiment of the ultrasonic motor with two feet is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a plus sign, the polarization direction (8) of one small polarization partition II is marked as a minus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign; the third example of the polarization division and polarization direction of the stator of the fourth embodiment of the ultrasonic motor is characterized in that: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a plus sign; the characteristics of the fourth example of the polarization division and polarization direction of the stator of the fourth embodiment of the two-legged ultrasonic motor are: the polarization direction (7) of the small polarization partition I is marked as a minus sign, the polarization direction (8) of the small polarization partition II is marked as a plus sign, and the polarization direction (9) of the large polarization partition is marked as a minus sign.

The schematic diagrams of silver layer electrodes sintered on the surface of the stator and the schematic diagrams of the wiring mode of the fourth embodiment of the modal decoupling three-partition piezoceramic two-legged ultrasonic motor are respectively shown in fig. 51 and 52, and are different from the silver layer electrodes sintered on the surface of the stator and the wiring mode of the first embodiment of the two-legged ultrasonic motor shown in fig. 31 and 32 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the right side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the left side of the vibrator main body (1) and is independently arranged in a row; correspondingly, the silver layer electrode (12) corresponding to the first small polarization subarea and the silver layer electrode (13) corresponding to the second small polarization subarea, which are sintered on the front surface (10) in the thickness direction of the oscillator body, are positioned on the right side of the front surface (10) in the thickness direction of the oscillator body and are arranged up and down, and the silver layer electrode (14) corresponding to the large polarization subarea and sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the left side of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a row; other embodiments correspond to the embodiment of the first embodiment of the ultrasonic motor with two feet in fig. 31 and 32.

The three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the fourth embodiment of the modal decoupling tri-partition piezoceramic bipedal ultrasonic motor are shown in fig. 48 and 53, respectively, and are different from the three design types ("force and speed balanced type", "force side heavy type", and "speed side heavy type") of the first embodiment of the bipedal ultrasonic motor shown in fig. 3 and 35 in that: in three non-uniform polarized subareas (2, 3 and 4), wherein two small polarized subareas I (2) and two small polarized subareas II (3) with the same size are positioned on the right side of the vibrator main body (1) and are arranged up and down, and the other large polarized subarea (4) is positioned on the left side of the vibrator main body (1) and is independently arranged in a row; correspondingly, the silver layer electrode (12) corresponding to the first small polarization subarea and the silver layer electrode (13) corresponding to the second small polarization subarea, which are sintered on the front surface (10) in the thickness direction of the oscillator body, are positioned on the right side of the front surface (10) in the thickness direction of the oscillator body and are arranged up and down, and the silver layer electrode (14) corresponding to the large polarization subarea and sintered on the front surface (10) in the thickness direction of the oscillator body is positioned on the left side of the front surface (10) in the thickness direction of the oscillator body and is singly arranged in a row; other embodiments correspond to the three design types of the first embodiment of the ultrasonic bipedal motor in the embodiments of figures 3 and 35. The three design types and the characteristics of the fourth embodiment of the double-foot ultrasonic motor enable the ultrasonic motor of the invention to have wider application range.

The principle of structural design:

1. the single-foot or double-foot ultrasonic motor stator is optimized into three non-uniform polarized subareas (two small polarized subareas with the same size and one large polarized subarea) by four uniform polarized subareas in the background technology, wherein a single-drive foot structure (a single-foot ultrasonic motor) and a double-drive foot structure (a double-foot ultrasonic motor) are designed according to different numbers of stator drive feet; on the basis, according to the difference of the relative positions of the three polarization partitions on the stator, the single-foot ultrasonic motor and the double-foot ultrasonic motor are respectively designed with four embodiments; on the basis, according to the difference of the polarization directions of the three polarization subareas, the first, second, third and fourth examples are designed in each embodiment of the single-foot ultrasonic motor and the double-foot ultrasonic motor; according to different requirements of mechanical performance, each embodiment of the single-foot ultrasonic motor and the double-foot ultrasonic motor is divided into three design types of force and speed balance type, force side heavy type and speed side heavy type, wherein the design structure of three non-uniform polarized partitions (two small polarized partitions with the same size and one large polarized partition) lays a foundation for the mode decoupling control mode of the motor stator;

2. the first-order longitudinal vibration mode and the second-order bending vibration mode of the stator have better frequency consistency through structural design, namely the resonance frequency omega of the first-order longitudinal vibration mode_zAnd resonance frequency omega of second-order bending vibration mode_wIs in accordance with | ω_z-ω_wThe | is less than or equal to 200Hz, so that the motor is suitable for bimodal driving;

3. based on a mode decoupling control mode, the four embodiments of the single-foot ultrasonic motor are designed with three structural types: "force and speed balanced type", "force side heavy type", and "speed side heavy type"; wherein the structure characteristics of "power and speed balanced type" single-footed motor: the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II is approximately equal to the area of the silver layer electrode of the large polarization zone; wherein the structural characteristics of the 'heavy-duty force side' single-foot motor are as follows: the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II is smaller than the area of the silver layer electrode of the large polarization zone; wherein the structure characteristics of "heavy motor of speed side" are: the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II is larger than the area of the silver layer electrode of the large polarization zone.

4. Based on a mode decoupling control mode, the four embodiments of the double-foot ultrasonic motor are designed with three structural types: "force and speed balanced type", "force side heavy type", and "speed side heavy type"; wherein the structural characteristics of "power and speed balanced type" biped motor: the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II is approximately equal to the area of the silver layer electrode of the large polarization zone; wherein the structural characteristics of the 'force side heavy type' double-foot motor are as follows: the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II is larger than the area of the silver layer electrode of the large polarization zone; wherein the structure characteristics of "heavy type both feet motor of speed side" are: the sum of the areas of the silver layer electrode of the small polarization zone I and the silver layer electrode of the small polarization zone II is smaller than the area of the silver layer electrode of the large polarization zone.

The above description is only one of the preferred embodiments of the present invention, and is not intended to limit the present invention in any way, but any modifications or equivalent variations made in accordance with the technical spirit of the present invention are within the scope of the present invention as claimed.

Claims

1. A modal decoupled three-zone piezoelectric ceramic monopod ultrasonic motor, which is one of the two design structures of a modal decoupled three-zone piezoelectric ceramic monopod or biped ultrasonic motor. ”, which is characterized in that: the single-foot ultrasonic motor is composed of a single-foot plate-shaped stator and a mover, the mover is a linear guide rail (6), and the single-foot plate-shaped stator is composed of a vibrator body (1) and a single-foot plate-shaped stator. The driving foot (5-1) is composed of two parts; the vibrator main body (1) is a cuboid made of piezoelectric ceramic material, and the vibrator main body (1) has two small polarization partitions of the same size one (2) and Two small polarization subregions (3) and one large polarization subregion (4), a total of three polarization subregions, the single driving foot (5-1) of the single-foot plate-shaped stator is composed of wear-resistant materials and is bonded or The main body (1) of the vibrator is integrated by welding or sintering, and the guide rail (6) is pressed on the single driving foot (5-1) of the single-foot plate-shaped stator under the action of pre-pressure;

The characteristics of the polarization partition on the oscillator main body (1) are: the polarization direction (7) of the first small polarization partition, the polarization direction (8) of the second small polarization partition, and the large polarization of the oscillator main body (1). The polarization direction (9) of the partition is polarization along the thickness direction of the oscillator body (1), wherein the polarization direction (7) of the small polarization partition one is opposite to the polarization direction (8) of the small polarization partition two, The polarization direction (9) of the large polarization partition is the same as the polarization direction (7) of the small polarization partition one or the polarization direction (8) of the small polarization partition two; The surfaces are respectively the front surface (10) in the thickness direction and the rear surface (11) in the thickness direction; on the front surface (10) in the thickness direction, three mutually insulated silver layer electrodes are sintered, one corresponding to the small polarization zone The silver layer electrode (12), the silver layer electrode (13) corresponding to the second small polarization partition, and the silver layer electrode (14) corresponding to the large polarization partition; The silver layer electrode (15) of the block.

2. The modal decoupling three-zone piezoelectric ceramic monopod ultrasonic motor according to claim 1 is characterized in that: the linear guide rail (6) is placed horizontally, that is, the linear guide rail (6) movement direction is a horizontal direction; The three polarization zones on the vibrator main body (1) of the foot ultrasonic motor have the following four distribution modes, respectively corresponding to the four embodiments of the single-foot ultrasonic motor;

The first distribution mode of the monopod ultrasonic motor, that is, the first embodiment of the monopod ultrasonic motor:

Two small polarization partitions (2) and small polarization partitions (3) of the same size are located on the left side of the oscillator body (1) and arranged up and down, and the other large polarization partition (4) is located on the oscillator body (1) the right side of and in separate columns;

The second distribution mode of the monopod ultrasonic motor, that is, the second embodiment of the monopod ultrasonic motor:

Two small polarization partitions (2) and small polarization partitions (3) of the same size are located on the right side of the oscillator main body (1) and arranged up and down, and the other large polarization partition (4) is located in the oscillator main body (1) to the left of and in separate columns;

The three distribution modes of the monopod ultrasonic motor are the third embodiment of the monopod ultrasonic motor:

Two equal-sized small polarization partitions one (2) and small polarization partitions (3) are located on the upper part of the oscillator body (1) and arranged left and right, and the other large polarization partition (4) is located on the vibrator body (1). lower and in separate rows;

The distribution mode of the monopod ultrasonic motor is four, that is, the fourth embodiment of the monopod ultrasonic motor:

Two small polarization sub-regions (2) and small polarization sub-regions (3) with the same size are located in the lower part of the oscillator body (1) and arranged left and right, and the other large polarization subregion (4) is located at the lower part of the oscillator body (1). upper and in separate rows.

3. A modal decoupling three-section piezoelectric ceramic bipedal ultrasonic motor, which is a "double-drive foot structure" which is the second of the two design structures of a modal decoupling three-section piezoelectric ceramic single- or bipedal ultrasonic motor. ”, which is characterized in that: the bipedal ultrasonic motor is composed of a bipedal plate-shaped stator and a mover, the movable element is a linear guide rail (6), and the bipedal plate-shaped stator is composed of a vibrator main body (1) and a double-footed plate-shaped stator. The driving foot (5-2) is composed of two parts; the vibrator main body (1) is a cuboid made of piezoelectric ceramic material, and the vibrator main body (1) has two small polarization partitions of the same size one (2) and Two small polarization subregions (3) and one large polarization subregion (4) have a total of three polarization subregions, and the double driving feet (5-2) of the bipedal plate-shaped stator are composed of wear-resistant materials and are bonded or The main body (1) of the vibrator is integrated by welding or sintering, and the guide rail (6) is pressed on the double driving feet (5-2) of the double-foot plate-shaped stator under the action of pre-pressure.

4. The modal decoupling three-zone piezoelectric ceramic bipedal ultrasonic motor according to claim 3 is characterized in that: the linear guide rail (6) is placed horizontally, that is, the linear guide rail (6) movement direction is a horizontal direction; The three polarization zones on the vibrator main body (1) of the foot ultrasonic motor have the following four distribution modes, respectively corresponding to the four embodiments of the bipedal ultrasonic motor;

The first distribution mode of the bipedal ultrasonic motor, that is, the first embodiment of the bipedal ultrasonic motor:

The first distribution mode of the bipedal ultrasonic motor, that is, the second embodiment of the bipedal ultrasonic motor:

Two small polarization sub-regions (2) and small polarization sub-regions (3) with the same size are located in the lower part of the oscillator body (1) and arranged left and right, and the other large polarization subregion (4) is located at the lower part of the oscillator body (1). upper and separate lines;

The first distribution mode of the bipedal ultrasonic motor is the third embodiment of the bipedal ultrasonic motor:

The first distribution mode of the bipedal ultrasonic motor is the fourth embodiment of the bipedal ultrasonic motor:

Two small polarization partitions (2) and small polarization partitions (3) of the same size are located on the right side of the oscillator main body (1) and arranged up and down, and the other large polarization partition (4) is located in the oscillator main body (1) to the left and in separate columns.

5. The excitation mode of the modal decoupling three-division piezoelectric ceramic monopod ultrasonic motor according to claims 1 and 2, characterized in that: a whole body (11) sintered on the rear surface (11) in the thickness direction of the vibrator body (1) The block silver layer (15) is used for grounding; it is located on the front surface (10) of the vibrator body (1) in the thickness direction, and corresponds to the silver layer electrode (12) of the first small polarization partition and the silver layer corresponding to the second small polarization partition The electrodes (13) are connected to form the A phase (16) of the motor, and are only used to excite the stator to generate the second-order bending vibration mode (18), and are only used to provide the tangential vibration component of the single driving foot (5-1); Located on the front surface (10) of the vibrator body (1) in the thickness direction, the silver layer electrodes (14) corresponding to the large polarization partitions constitute the B-phase (17) of the motor alone, and are only used to excite the stator to generate the first-order longitudinal vibration mode (19), and is only used to provide the normal vibration component of the single-drive foot (5-1); this makes the second-order bending vibration mode (18) and the first-order longitudinal vibration mode (19) of the single-foot ultrasonic motor ) are decoupled from each other in control, that is, modal decoupling.

6. The excitation mode of the modal decoupling three-division piezoelectric ceramic monopod ultrasonic motor according to claim 5, wherein the two orthogonal working modes of the driving motor are respectively the second-order bending vibration modes of the stator. state (18) and first-order longitudinal vibration mode (19); through structural design, the second-order flexural vibration mode (18) and first-order longitudinal vibration mode (19) of the stator have good frequency consistency, that is, a The resonance frequency ω _z of the first-order longitudinal vibration mode (19) and the resonance frequency ω _w of the second-order flexural vibration mode (18) conform to |ω _z -ω _w |≤200Hz; the frequencies of the excitation signals of the two orthogonal operating modes is ω ₀ , ω ₀ is close to ω _z and ω _w , when the A-phase (16) of the motor inputs a continuous sine wave excitation signal with a frequency of ω ₀ , it is used to excite the stator alone to generate the second-order bending vibration mode (18); The B-phase (17) input frequency of the motor is ω ₀ but the phase difference with the A-phase (16) input signal is a continuous sine wave excitation signal of 90°, which is used to independently excite the stator to generate the first-order longitudinal vibration mode (19); At this time, the mass point on the single driving foot (5-1) of the single-foot ultrasonic motor in contact with the guide rail (6) will produce an elliptical motion trajectory (20), and the guide rail (6) will produce a directional horizontal movement; when the motor's A The continuous sine wave excitation signal with the input frequency of ω ₀ in phase (16) is unchanged, while the input frequency of phase B (17) of the motor is ω ₀ but the phase difference with the input signal of phase A (16) is -90°. wave excitation signal, at this time, the particle on the single driving foot (5-1) of the single-foot ultrasonic motor and the contact interface with the guide rail (6) will generate a reverse-rotating elliptical motion trajectory (21), and the guide rail (6) will generate Reverse directional horizontal movement.

7. The excitation mode of the modal decoupling three-zone piezoelectric ceramic monopod ultrasonic motor according to claim 5, characterized in that: according to mechanical output characteristics, the monopod ultrasonic motor can be divided into three design types, respectively It is "balanced force and speed", "force focused" and "speed focused";

The characteristics of the single-foot ultrasonic motor "balanced force and speed" are:

"The sum of the area of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the phase A (16) of the monopod ultrasonic motor is the same as that of the monopod ultrasonic motor. "The area of the silver layer electrode (14) of the large polarization zone corresponding to the B-phase (17)" is approximately equal, which makes the single-foot ultrasonic motor output to the "second-order bending vibration mode (18) corresponding to the A-phase (16)" ) and the power of the tangential vibration component of the single-drive foot (5-1) and output to the first-order longitudinal vibration mode (19) corresponding to the B-phase (17) and the normal direction of the single-drive foot (5-1) The power of the "vibration component" is approximately equal;

The characteristics of the "force-focused type" of the monopod ultrasonic motor are:

"The sum of the area of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the A phase (16) of the monopod ultrasonic motor is significantly smaller than that of the monopod ultrasonic motor. "The area of the silver layer electrode (14) corresponding to the large polarization zone corresponding to the B phase (17)", which makes the output power of the monopod ultrasonic motor focus on "the first-order longitudinal vibration mode corresponding to the B phase (17)" (19) and the normal vibration component of the single drive foot (5-1)”;

The characteristics of the "speed-focused type" of the monopod ultrasonic motor are:

"The sum of the area of the silver layer electrode (12) of the small polarization zone one and the silver layer electrode (13) of the small polarization zone two corresponding to the A phase (16) of the monopod ultrasonic motor is significantly larger than that of the monopod ultrasonic motor. "The area of the silver layer electrode (14) corresponding to the large polarization zone corresponding to the B phase (17)", which makes the output power of the monopod ultrasonic motor focus on "the second-order bending vibration mode corresponding to the A phase (16)" (18) and the tangential vibration component of the single drive foot (5-1)”.

8. The excitation mode of the modal decoupling three-division piezoelectric ceramic bipedal ultrasonic motor according to claims 3 and 4, characterized in that: a whole piece of silver sintered on the rear surface (11) in the thickness direction of the vibrator body (1) The layer electrode (15) is used for grounding; it is located on the front surface (10) of the vibrator body (1) in the thickness direction, and corresponds to the silver layer electrode (12) of the first small polarization partition and the silver layer electrode corresponding to the second small polarization partition (13) The A-phase (16) of the motor is connected with each other, and is only used to excite the stator to generate the second-order bending vibration mode (18), and is only used to provide the normal vibration component of the double driving feet (5-2); located in On the front surface (10) in the thickness direction of the vibrator body (1), the silver layer electrodes (14) corresponding to the large polarization subregions constitute the B-phase (17) of the motor alone, and are only used to excite the stator to generate the first-order longitudinal vibration mode ( 19), and is only used to provide the tangential vibration component of the double-driven foot (5-2); this makes the second-order bending vibration mode (18) and the first-order longitudinal vibration mode (19) of the double-foot ultrasonic motor In terms of control, they are decoupled from each other, that is, modal decoupling.

9 . The excitation mode of the modal decoupling three-division piezoelectric ceramic bipedal ultrasonic motor according to claim 8 , wherein the two orthogonal working modes of the driving motor are respectively the second-order bending vibration modes of the stator. state (18) and first-order longitudinal vibration mode (19); through structural design, the second-order flexural vibration mode (18) and first-order longitudinal vibration mode (19) of the stator have good frequency consistency, that is, a The resonance frequency ω _z of the first-order longitudinal vibration mode (19) and the resonance frequency ω _w of the second-order flexural vibration mode (18) conform to |ω _z -ω _w |≤200Hz; the frequencies of the excitation signals of the two orthogonal operating modes is ω ₀ , ω ₀ is close to ω _z and ω _w , when the A-phase (16) of the motor inputs a continuous sine wave excitation signal with a frequency of ω ₀ , it is used to excite the stator alone to generate the second-order bending vibration mode (18); The B-phase (17) input frequency of the motor is ω ₀ but the phase difference with the A-phase (16) input signal is a continuous sine wave excitation signal of 90°, which is used to independently excite the stator to generate the first-order longitudinal vibration mode (19); At this moment, the particles on the double driving feet (5-2) of the bipedal ultrasonic motor contacting the guide rail (6) will produce an elliptical motion trajectory (22), and the guide rail (6) will produce a directional horizontal movement; The continuous sine wave excitation signal with the input frequency of ω ₀ in phase (16) is unchanged, while the input frequency of phase B (17) of the motor is ω ₀ but the phase difference with the input signal of phase A (16) is -90°. wave excitation signal, at this time, the particles on the double driving feet (5-2) of the bipedal ultrasonic motor and the contact interface with the guide rail (6) will generate an elliptical motion trajectory (23) of reverse rotation, and the guide rail (6) will generate Reverse directional horizontal movement.

10. The excitation mode of the modal decoupling three-zone piezoelectric ceramic bipedal ultrasonic motor according to claim 8, characterized in that: according to the mechanical output characteristics, the bipedal ultrasonic motor can be divided into three design types, respectively. It is "balanced force and speed", "force focused" and "speed focused";

The characteristics of the "balanced force and speed type" of the bipedal ultrasonic motor are:

"The sum of the area of the silver layer electrode (12) of the first small polarization zone and the silver layer electrode (13) of the second small polarization zone corresponding to the phase A (16) of the bipedal ultrasonic motor is the same as that of the bipedal ultrasonic motor. "The area of the silver layer electrode (14) of the large polarization zone corresponding to the B-phase (17)" is approximately equal, which makes the bipedal ultrasonic motor output to the "second-order bending vibration mode (18) corresponding to the A-phase (16)" ) and the normal vibration components of the double driving feet (5-2) and output to the first-order longitudinal vibration mode (19) corresponding to the B-phase (17) and the tangential direction of the double driving feet (5-2) The power of the "vibration component" is approximately equal;

The characteristics of the "force-focused type" of the bipedal ultrasonic motor are:

"The sum of the area of the silver layer electrode (12) in the first small polarization zone corresponding to the A phase (16) and the silver layer electrode (13) in the second small polarization zone" of the bipedal ultrasonic motor is significantly larger than that of the bipedal ultrasonic motor "The area of the silver layer electrode (14) corresponding to the large polarization partition of the B phase (17)", which makes the output power of the bipedal ultrasonic motor focus on "the second-order bending vibration mode corresponding to the A phase (16)" (18) and the normal vibration components of the double driving feet (5-2)”;

The characteristics of the "speed-focused type" of the bipedal ultrasonic motor are:

"The sum of the area of the silver layer electrode (12) in the first small polarization zone corresponding to the A phase (16) and the silver layer electrode (13) in the second small polarization zone" of the bipedal ultrasonic motor is significantly smaller than that of the bipedal ultrasonic motor. “The area of the silver layer electrode (14) corresponding to the large polarization zone corresponding to the B phase (17)”, which makes the output power of the bipedal ultrasonic motor focus on the “first-order longitudinal vibration mode corresponding to the B phase (17)” (19) and the tangential vibration components of the dual drive feet (5-2)".