CN101741277B - Linear piezoelectric motor - Google Patents
Linear piezoelectric motor Download PDFInfo
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- CN101741277B CN101741277B CN2010101114196A CN201010111419A CN101741277B CN 101741277 B CN101741277 B CN 101741277B CN 2010101114196 A CN2010101114196 A CN 2010101114196A CN 201010111419 A CN201010111419 A CN 201010111419A CN 101741277 B CN101741277 B CN 101741277B
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- stator
- annulus
- piezoelectric ceramic
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- driving angle
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Abstract
The invention discloses a linear piezoelectric motor, which comprises a base, a stator and a slide block, wherein the bottom of the slide block is supported by a bearing. The linear piezoelectric motor is characterized in that the stator is an annular stator and comprises a ring metal block and a ring piezoelectric ceramic; the metal block is provided with a metal driving angle propped against the slide block; the piezoelectric ceramic is provided with 4m subareas at equal intervals along the circumference, wherein the m is a positive integer, every two adjacent subareas form a group of electrodes and have the same polarization direction, and the polarization directions of the adjacent two groups of electrodes are opposite; the metal driving angle is arranged on any one group of electrodes; and half of all the subareas of the piezoelectric ceramic are connected with an excitation voltage, and the subareas connected with the excitation voltage are arranged at intervals along the circumference of the piezoelectric ceramic. Compared with the prior art, the stator is provided with the metal driving angle so as to break through the symmetry of the stator; because of the breakage of the symmetry of the stator, the resonance frequency of two out-of-plane bending vibrations of the stator with the same order have certain difference; and the stator can be directly driven only through a single-phase power supply, and a driving circuit is simpler.
Description
Technical field
The present invention relates to a kind of ultrasonic motor, particularly a kind of linear piezoelectric motor.
Background technology
Piezo-electric motor (claiming ultrasound electric machine again) is the novel driving device of a kind of novel concept of growing up in 80 mid-terms of 20th century, it utilizes the inverse piezoelectric effect of piezoelectric to excite the ultrasonic vibration of certain modality-specific, thereby convert electrical energy into elastomeric ultrasonic vibration (mechanical energy), and frictional drive is converted to the revolution or the rectilinear motion of movable body.
Piezo-electric motor is compared with traditional electromagnetic motor, have advantages such as rotating speed is low, torque big, compact conformation, volume is little, noise is little, because piezo-electric motor do not need magnet and coil, thereby is not subjected to magnetic interference, be widely used in the middle of the fields such as industry, civilian and Aero-Space.Piezo-electric motor is divided according to forms of motion, can be divided into two types of rotary-type and linear patterns.Wherein, linear piezoelectric motor is than rotary-type motor, its positioning accuracy is very high, be widely used in some to positioning accuracy request than higher occasion, as the drug injection in electronic scanning tunnel microscope, optical grating diffraction, interference spectrum scanning, X-Y locating platform, the medical treatment, the cell puncture in the biomedical research etc.
As far back as 1987, CANON just develops first camera of realizing zoom with piezo-electric motor, successfully piezo-electric motor is applied to the high-grade camera of the serial FTM of EOS (Electro Optical System), so far, piezo-electric motor has been installed to realize the zoom of camera by Canon Inc. on the camera of 37 kinds of models.This piezo-electric motor that CANON adopts at first is to utilize annular stator to carry out two mutually orthogonal single order out-of-plane bending vibrations, because annular stator has complete symmetrical structure, the resonance frequency of two out-of-plane bending vibrations is identical, therefore, this motor must adopt the two-phase power supply of two phase phasic differences, 90 degree to drive, to having relatively high expectations of power supply, the power drives system complex.
And the linear piezoelectric motor of other types, as the existing patent No. is a kind of linear ultrasonic motor the Chinese invention patent " piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor " of ZL200410101574.4 then discloses, this motor is formed by the mover of stator, output torque and to the pre-pressure mechanism of mover pressurization, stator is made of eight piezoelectric ceramic pieces and metallic plate, and the side of metallic plate is provided with and drives foot; This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all along the thickness direction polarization of stator, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles external electrode, is used for applying electric field along the direction vertical with the piezoelectric ceramic polarised direction.Above-mentioned patent is to utilize the d of piezoelectric ceramic
31Effect motivates on stator bends the complex vibration that shakes with longitudinal vibration, it need encourage compressional vibration and flexural vibrations with two-phase power supply equally, and, this class linear piezoelectric motor will be regulated the compressional vibration of stator and flexural vibrations in design resonance frequency is consistent, make the change in size of stator be subjected to very big restriction, cause the volume ratio of this class linear piezoelectric motor bigger indirectly, be unfavorable for integratedly, await to do further improvement.
Summary of the invention
A technical problem to be solved by this invention be provide at above-mentioned prior art present situation a kind of can with single phase poaer supply directly drive and volume littler and be beneficial to integrated linear piezoelectric motor.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: this linear piezoelectric motor, include base and be arranged on this base interior stator and slide block, bearings is passed through in the bottom of described slide block, it is characterized in that: described stator is an annular stator, this stator includes annulus metal derby and the annulus piezoelectric ceramic that is arranged on this annulus metal derby, also be provided with a metal driving angle of projection radially outward along this annulus metal derby on the circumference of described annulus metal derby, this metal driving angle and described slide block offset, described annulus piezoelectric ceramic equally spaced is provided with 4m subregion along circumference, wherein, m is a positive integer, per two adjacent described subregions are that one group of electrode and polarised direction are identical, two adjacent groups polarization of electrode direction is then opposite, this annulus piezoelectric ceramic adopts and polarizes along thickness direction, described metal driving angle is arranged on any one group of described electrode, and, half of all described subregions that are provided with on the described annulus piezoelectric ceramic is connected with driving voltage, and this subregion that is connected with described driving voltage was provided with for the circle spacing along described annulus piezoelectric ceramic.
In order to reach best vibrating effect, as preferably, the middle that described metal driving angle is arranged on two adjacent sectors of any one group of described electrode is good.
As preferably, at least one side of described annulus metal derby is provided with described annulus piezoelectric ceramic, and, between this annulus piezoelectric ceramic and the described annulus metal derby by adopting adhering with epoxy resin to be fixed in one.Adopt the fixing reliability that can guarantee that piezoelectric ceramic connects of epoxy resin, in order to reduce the volume of motor, can be only at the bonding piezoelectric ceramic in a side of annulus metal derby, but, in order to reduce the driving voltage of motor, a same piezoelectric ceramic also can bond respectively in two sides of annulus metal derby.
In order to guarantee the connection reliability at metal driving angle, prevent to drive the angle and come off at work, as further preferred, described metal driving angle is the rectangular projection of a cross section, this metal driving angle and described annulus metal derby are one machine-shaping.
In order to reduce the overall volume of piezo-electric motor, make that the mounting structure of motor is more compact, improve integrated between each parts, described base is the rectangular frame structure of an open top, this base is connected with upper holder block at uncovered top by adjustment screw, and described upper holder block offsets by the excircle of flexible rubber web and described stator.
Compared with prior art, the invention has the advantages that: stator is provided with the metal driving angle, the symmetry of stator has been broken at this metal driving angle, because the symmetric destruction of stator, make that the resonance frequency of out-of-plane bending vibration of two same orders of stator is inconsistent and have certain difference, when only with the intermediate frequency f of the resonance frequency of two out-of-plane bending vibrations
0When encouraging, this excited frequency f
0Can realize two mutually orthogonal single order out-of-plane bending vibrations on the stator simultaneously, therefore, the present invention does not need two-phase power supply to drive, only just can directly drive stator by single phase poaer supply, drive circuit is more simple, the whole syndeton of motor is simplified, and the cooperation of annular stator and base makes complete machine structure more compact, is beneficial to integrated more.
Description of drawings
Fig. 1 is the piezo-electric motor assembly structure schematic diagram of the embodiment of the invention.
Fig. 2 is the stator structure schematic diagram of the embodiment of the invention.
Fig. 3 is the end view of stator shown in Figure 2.
Fig. 4 is the energisation mode structural representation that piezoelectric ceramic adopted of the embodiment of the invention.
Fig. 5 is the out-of-plane bending vibration schematic diagram of annular stator under energisation mode shown in Figure 4 of the embodiment of the invention.
Fig. 6 adopts the impedance and the phase frequency spectrum of the annular stator mode of oscillation of electric impedance analyzer test acquisition for the embodiment of the invention.
Embodiment
Embodiment describes in further detail the present invention below in conjunction with accompanying drawing.
As Fig. 1～shown in Figure 4, the linear piezoelectric motor of the embodiment of the invention, this piezo-electric motor has overcome shortcomings such as present linear piezoelectric motor volume is big, drive circuit complexity, provide a sheet type (integral thickness of motor can＜3mm), controllability is good, easily and other electronic equipment integrate, cheap linear piezoelectric motor can be widely used in locating platform, in the fields such as optical alignment.
The linear piezoelectric motor of present embodiment includes the base 1 of a rectangular frame structure, be provided with annular stator 2, slide block 3 and bearing 4 in this base, wherein, the open top of base 1, this base 1 is connected with a upper holder block 6 at uncovered top by adjustment screw 5, can regulate distance between upper holder block 6 and base 1 bottom by turn screw 5, thereby the stator and the slide block 3 that will be arranged in the base 1 compress, and upper holder block 6 offsets by the excircle of flexible rubber web 7 and annular stator 2.
Here, the chemical composition of annulus piezoelectric ceramic 21 adopts prior art, can be Pb (ZrxTi1-x) O3, (1-x) (KNa) NbO3-xLiNbO3, (1-x) (BiNa) TiO3-xBaTiO3, (1-x) Pb (Mg1/3Nb2/3) O3-xPbTiO3, wherein x represents the chemical constituent of different piezoelectric ceramic, its optimum chemical constituent is near the accurate homotype phase boundary of solid solution.
Present embodiment annulus piezoelectric ceramic 21 wherein be applied with the alternating voltage of a high frequency respectively as driving voltage on four subregions 211, and these subregions 211 that are connected with driving voltage were provided with for the circle spacing along annulus piezoelectric ceramic 21, the voltage application mode is referring to Fig. 4, sign on the annulus piezoelectric ceramic 21 is represented the polarised direction of piezoelectric ceramic 21, and does not have feedback electrode between two adjacent subregions;
Therefore, the drive circuit of present embodiment is the high-frequency circuit of single-phase output, when giving wherein four subregions of being provided with at interval (be all subregions of piezoelectric ceramic half) when applying alternating voltage, because the inverse piezoelectric effect of annulus piezoelectric ceramic, just can excite the outer first-order bending vibration of face of annular stator 2, at this moment slide block 3 just can move; When needs change the direction of motion of slide block 3, only need just can achieve the goal to other four subregions excitation of annulus piezoelectric ceramic 21.
As Fig. 5, shown in Figure 6, the operation principle of present embodiment is:
The linear piezoelectric motor utilization of present embodiment be the synthetic elliptic motion that drives particle on the angle of out-of-plane bending vibration of two degenerations of stator, because the introducing at metal driving angle, make the symmetry of stator reduce, since symmetric destruction, the out-of-plane bending vibration W ' of two same orders of stator
1And W '
2Resonance frequency inconsistent, promptly have the difference of 2～5kHz, set the out-of-plane bending vibration W ' of present embodiment annulus stator here
1And W '
2Resonance frequency be respectively f
1And f
2, mode of oscillation W '
1And W '
2Spatially there is 45 ° corner.
When being used in two out-of-plane bending vibration W '
1And W '
2Resonance frequency f
1And f
2Intermediate frequency f
0When encouraging, this driving frequency f
0Will encourage W ' simultaneously
1And W '
2Carry out flexural vibrations, and adopt the impedance and the phase frequency spectrum of electric impedance analyzer test acquisition annular stator mode of oscillation, referring to Fig. 6;
At this moment, encourage the W ' that obtains
1And W '
2Phase phasic difference between the vibration is 90 °, supposes W '
1And W '
2Amplitude equate to be A, if W '
1And W '
2Vibration decompose along X-axis and Y-axis, can see W '
1Vibration only have the branch vibration to be in Y-axis: Acos ω T; And W '
2After decomposing along X-axis and Y-axis, can obtain W '
2Branch vibration along X-axis is Acos45 ° of cos (ω t+90 °), W '
2Branch vibration along Y-axis then is Asin45 ° of cos (ω t+90 °).
So particle can be written as along moving of X-axis and Y-axis on the metal driving angle:
This is a typical elliptical trajectory, in fact, owing to pass through f
0Carry out exciting and can excite W ' simultaneously
1And W '
2The vibration of two kinds of mode, these two kinds of vibrations can produce a capable wave motion on the excircle of annular stator, promptly just can drive when elliptic motion is done at the metal driving angle and this contacted slide block in metal driving angle moves horizontally.
Therefore, the existence of the metal driving angle of present embodiment mainly contains two purposes: (1) destroys the symmetry of annular stator, makes that the resonance frequency of two out-of-plane bending vibrations is inconsistent; (2) amplify the capable wave amplitude of annular stator excircle, help improving the actuating force of motor.Can release from the above-mentioned operation principle of present embodiment piezo-electric motor, the optimal location at metal driving angle should be arranged on the middle of two subregions of any one group of motor of annulus piezoelectric ceramic.
Claims (3)
1. linear piezoelectric motor, include base (1) and be arranged on this base (1) interior stator (2) and slide block (3), the bottom of described slide block (3) is supported by bearing (4), it is characterized in that: described stator (2) is an annular stator, this stator (2) includes annulus metal derby (22) and is arranged on annulus piezoelectric ceramic (21) on this annulus metal derby (22), also be provided with a metal driving angle (23) of projection radially outward along this annulus metal derby (22) on the circumference of described annulus metal derby (22), this metal driving angle (23) and described slide block (3) offset, described annulus piezoelectric ceramic (21) equally spaced is provided with 4m subregion (211) along circumference, wherein, m is a positive integer, per two adjacent described subregions are that one group of electrode and polarised direction are identical, two adjacent groups polarization of electrode direction is then opposite, this annulus piezoelectric ceramic (21) adopts and polarizes along thickness direction, described metal driving angle (23) is arranged on any one group of described electrode, and, half of all described subregions (211) that described annulus piezoelectric ceramic (21) upward is provided with is connected with driving voltage, and this subregion that is connected with described driving voltage was provided with for the circle spacing along described annulus piezoelectric ceramic (21); Described metal driving angle (23) is the rectangular projection of a cross section, and this metal driving angle (23) and described annulus metal derby (22) are one machine-shaping; Described base (1) is the rectangular frame structure of an open top, and this base (1) is connected with upper holder block (6) at uncovered top by adjustment screw (5), and described upper holder block (6) offsets by the excircle of flexible rubber web (7) and described stator (2).
2. linear piezoelectric motor according to claim 1 is characterized in that: described metal driving angle (23) is arranged on the middle of two adjacent sectors of any one group of described electrode.
3. linear piezoelectric motor according to claim 1, it is characterized in that: at least one side of described annulus metal derby (22) is provided with described annulus piezoelectric ceramic (21), and, be fixed in one by the employing adhering with epoxy resin between this annulus piezoelectric ceramic (21) and the described annulus metal derby (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101114196A CN101741277B (en) | 2010-02-11 | 2010-02-11 | Linear piezoelectric motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101114196A CN101741277B (en) | 2010-02-11 | 2010-02-11 | Linear piezoelectric motor |
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| CN101741277A CN101741277A (en) | 2010-06-16 |
| CN101741277B true CN101741277B (en) | 2011-11-23 |
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| CN110133835B (en) * | 2019-05-16 | 2024-01-05 | 宁波市教学仪器有限公司 | Microscope observation head convenient to installation location |
| CN111085950B (en) * | 2019-12-11 | 2021-07-20 | 江苏大学 | Pre-pressure applying device of floating self-balancing ultrasonic motor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2535972Y (en) * | 2002-03-21 | 2003-02-12 | 浙江大学 | Surface elastic wave motor |
| CN101071999A (en) * | 2007-04-05 | 2007-11-14 | 南京航空航天大学 | Motion superposition linear ultrasonic motor and electric exciting manner |
| CN101119079A (en) * | 2007-09-13 | 2008-02-06 | 上海大学 | Triangle bended plate type piezoelectric straight line ultrasound electric motor |
-
2010
- 2010-02-11 CN CN2010101114196A patent/CN101741277B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2535972Y (en) * | 2002-03-21 | 2003-02-12 | 浙江大学 | Surface elastic wave motor |
| CN101071999A (en) * | 2007-04-05 | 2007-11-14 | 南京航空航天大学 | Motion superposition linear ultrasonic motor and electric exciting manner |
| CN101119079A (en) * | 2007-09-13 | 2008-02-06 | 上海大学 | Triangle bended plate type piezoelectric straight line ultrasound electric motor |
Non-Patent Citations (1)
| Title |
|---|
| 狄文宁等.一种实用超声马达驱动电路的设计和制作.《湖北大学学报（自然科学版）》.2009,第31卷(第3期),260-263. * |
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