CN101707445B - Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof - Google Patents

Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof Download PDF

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CN101707445B
CN101707445B CN 200910212679 CN200910212679A CN101707445B CN 101707445 B CN101707445 B CN 101707445B CN 200910212679 CN200910212679 CN 200910212679 CN 200910212679 A CN200910212679 A CN 200910212679A CN 101707445 B CN101707445 B CN 101707445B
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stator
rotor
wave
face
ultrasonic motor
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CN101707445A (en
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金家楣
泮振锋
钱富
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Abstract

The invention discloses a sheet and dual traveling wave type rotary ultrasonic motor and a control method thereof, belonging to the field of ultrasonic motors. The motor consists of a rotor, a base, a bearing, a rubber spring and a stator, wherein the rotor and the base are located through the bearing; the rubber spring is pressed between the stator and the base to fix the stator and provide a pre-pressure between the stator and the rotor simultaneously; the stator adopts a composite structure consisting of an annular metal sheet and an annular piezoelectric ceramic plate, and the piezoelectric ceramic plate is polarized in unidirection and provided with a fan-shaped silver plating electrode with uniform subareas. The movement of the rotor of the sheet and dual traveling wave type rotary ultrasonic motor is driven by friction provided by the circumferential vibration of the stator, the rotate speed of the rotor is not limited by the axial size of the stator, and teeth are not needed to be arranged on the end surface of the stator. Compared with a traditional traveling wave type ultrasonic motor, the invention has the advantages of simple structure, low machining cost and easy microminiaturization and miniaturization, and can be applied to precise mechanical equipment and optical instruments and equipment.

Description

Thin board type dual traveling wave rotary ultrasonic motor and control method thereof
Technical field:
The present invention relates to a kind of thin board type dual traveling wave rotary ultrasonic motor and control method thereof, belong to the technical field of rotary ultrasonic motor and control method thereof.
Background technology:
Ultrasound electric machine is a kind of inverse piezoelectric effect of utilizing piezoelectric, excites elastomer to produce micro breadth oscillation in supersonic range, and converts thereof into the New-type electric machine of revolution (straight line) motion of rotor (mover) by the friction between the stator and rotor.Wherein, travelling-wave type rotary ultrasonic motor basic principle is by exciting flexural vibrations on annulus or the plectane (or out-of-plane vibration) row ripple, forming the elliptic motion of stator surface.The length of the circumferential axis of track ellipse also is directly proportional with the thickness of stator simultaneously except with the length of normal axis is directly proportional, and oval circumferential axis is longer, motor speed is higher, and vice versa.Yet stator flexural vibrations amplitude is also relevant with thickness: stator is thicker, and amplitude is less.Therefore, the method that improves motor speed by increasing stator thickness is infeasible.At present, the travelling-wave type rotary ultrasonic motor adopts stator faces to offer the version of teeth groove, can relax to a certain extent the contradiction of two aspects.But brought simultaneously a new problem: teeth groove has increased the complexity of stator, is unfavorable for design and processing; Also be unfavorable for little, miniaturization, range of application is limited.
Summary of the invention:
The object of the invention is to defective for prior art propose a kind of simple in structure, be easy to that little, miniaturization, high pulling torque, efficient are high, fast response time, thin board type dual traveling wave rotary ultrasonic motor and control method thereof that range of application is wider.
Thin board type dual traveling wave rotary ultrasonic motor, consisted of by bearing, pedestal, rotor and stator, rotor, stator and pedestal be coaxial to hold setting, it is characterized in that: also comprise rubber spring, described stator compoundly is made of coaxial the holding of endless metal thin slice and ring piezoelectric potsherd, the top of endless metal thin slice connects rotor, the bottom of endless metal thin slice connects the top of annular piezoelectric ceramic piece, bottom and the pedestal of ring piezoelectric potsherd are oppositely arranged, the fan-shaped silver-coated electrode of subregion of the uniform unidirectional polarization in bottom of described ring piezoelectric potsherd; Rubber spring passes the ring piezoelectric potsherd and is pressed between endless metal thin slice and the pedestal, and described rubber spring isolation annular piezoelectric ceramic piece and bearing, fixed stator provide the precompression between stator and rotor simultaneously.
Described thin board type dual traveling wave rotary ultrasonic motor is characterized in that: the number of partitions of the fan-shaped silver-coated electrode of described ring piezoelectric potsherd is 4 or 8 or 12 or 16 or 20 or 24 or 28 or 32.
The control method of described thin board type dual traveling wave rotary ultrasonic motor, it is characterized in that: drive annular piezoelectric ceramic piece (2) through fan-shaped silver-coated electrode (8) to port (13) the input driving signal of telecommunication and produce ultrasonic vibration, described ultrasonic vibration excites endless metal thin slice (6) to produce the outer standing wave (9) of a face and a face standing internal wave (11); Meanwhile, process
Figure G200910212679XD00021
Phase place is driven the signal of telecommunication for port (14) input by fan-shaped silver-coated electrode (8) and drives annular piezoelectric ceramic piece (2) generation ultrasonic vibration, and described ultrasonic vibration excites the endless metal thin slice (6) on the stator to produce the outer standing wave (10) of another face and another face standing internal wave (12); Two synthetic face layman ripples of the outer standing wave of face, two expert ripples of the synthetic face of face standing internal wave, form the dual-travel-wave of advancing in the same way at stator, so that the surperficial particle of stator ring sheet metal (6) is done the motion of elliptical path, rotate by the particle at place, stator capable wave-wave peak and the frictional force drive rotor (7) of rotor (7) contact area, wherein n is the natural number greater than 0.
Two elliptic motions that capable ripple synthesizes the stator surface particle that the dual-travel-wave of thin board type dual traveling wave rotary ultrasonic motor namely utilizes the stack of the interior rotational vibration mode of face and outer (flexural vibrations) mode of face to form, the length of oval circumferential axis is determined jointly by the amplitude of in plane vibration and the transversal effect of out-of-plane vibration thus.This type ultrasound electric machine is except the general characteristic with ultrasound electric machine, and structure is compacter, is easy to little, miniaturization; Can realize the forward and backward motion, by the two-way sinusoidal signal excitation, drive circuit is simple; The piezoelectricity of stator is made pottery and is had uniform electrode subregion.
Description of drawings:
Fig. 1 is thin board type dual traveling wave rotary ultrasonic motor stator, rotor structures schematic diagram.
Fig. 2 is thin board type dual traveling wave rotary ultrasonic motor stator structure schematic diagram.
Fig. 3 is the operation mode schematic diagram of thin board type dual traveling wave rotary ultrasonic motor.Wherein figure (a) is the outer mode of oscillation B of stator surface 12Figure (b) is stator surface internal vibration mode θ 12
Fig. 4 is the excitation of thin board type dual traveling wave rotary ultrasonic motor operation mode.Be that structure shown in Figure 2 is circumferentially opened on edge, radius r place, circumferential origin is arranged on the pitch diameter, during in plane vibration, surperficial particle for ease of observing, represents (e), (f) such as figure with its displacement with vertical coordinate along rotational vibration.Wherein figure (c) is for to apply alternation driving voltage E sin (ω to port (13) 1T) time, stator produces vibration, forms standing wave w A(θ, t)=W sin (2 θ) sin (ω 1T); Figure (d) is for to apply alternation driving voltage E cos (ω to port (14) 1T) time, stator produces vibration, forms standing wave w B(θ, t)=W cos (2 θ) cos (ω 1T).Standing wave w A(θ, t)=Wsin (2 θ) sin (ω 1T) and w B(θ, t)=W cos (2 θ) cos (ω 1T) stack forms face layman ripple.Figure (e) is for to apply alternation driving voltage E sin (ω to port (13) 2T) time, stator produces vibration, forms standing wave δ A(θ, t)=U cos (2 θ) sin (ω 2T); Figure (f) is for to apply alternation driving voltage E cos (ω to port (14) 2T) time, stator produces vibration, forms standing wave δ B(t)=-U sin (2 θ) cos (ω 2T).Standing wave δ A(θ, t)=U cos (2 θ) sin (ω 2T) and δ B(t)=-U sin (2 θ) cos (ω 2T) stack forms the expert ripple of face.Wherein: E is magnitude of voltage, and ω is model frequency, and t is the time, and θ is the phase angle, and W is the outer amplitude of face, and U is amplitude in the face, and h is that neutral line is apart from the vertical range on surface.
Annotate: among the figure all take the even sector electrode subregion of ceramic ring 4n=8 as the example explanation.
Label and designation among Fig. 1, Fig. 2: 1 rubber spring, 2 ring piezoelectric potsherds, 3 check rings, 4 bearings, 5 pedestals, 6 endless metal thin slices, 7 rotors, 8 fan-shaped silver-coated electrodes.
Label title among Fig. 4: 13, the belt ripple driving signal input of 14 stators.
Embodiment:
The below is take the number of partitions of fan-shaped silver-coated electrode 8 as 8 as example explanation thin board type dual traveling wave rotary ultrasonic motor operation principle and embodiment.
As shown in Figure 1 and Figure 2, thin board type dual traveling wave rotary ultrasonic motor of the present invention mainly is made of stator module, rotor and bracket component.Stator module adopts the composite construction of an endless metal thin slice 6 and a ring piezoelectric potsherd 2.The unidirectional polarization of piezoelectric ceramic ring has the fan-shaped silver-coated electrode 8 of eight even subregions; Rotor 7 and pedestal 5 are by bearing 4 location; Rubber spring 1 is pressed in 5 of stator and pedestals, and fixed stator provides the precompression between stator and rotor simultaneously.Thin board type dual traveling wave rotary ultrasonic motor of the present invention, it is made of rotor, pedestal, bearing, rubber spring, stator.Rotor and base via shaft are held the location, and rubber spring is pressed between stator and pedestal, and fixed stator provides the precompression between stator and rotor simultaneously.Stator adopts the composite construction of an endless metal thin slice and a ring piezoelectric potsherd, and the unidirectional polarization of piezoelectric ceramic ring has the fan-shaped silver-coated electrode of even subregion.
As shown in Figure 3, be the operation mode schematic diagram of thin board type dual traveling wave rotary ultrasonic motor.Wherein figure (a) is the outer mode of oscillation B of stator surface 12Figure (b) is stator surface internal vibration mode θ 12
Control method of the present invention is as follows: ring piezoelectric potsherd 2 drives signal of telecommunication E sin (ω t) for port one 3 inputs through fan-shaped silver-coated electrode 8 and produces ultrasonic vibration, excites the endless metal thin slice 6 on the stator to produce the outer standing wave 9 of a face and a face standing internal wave 11; Ring piezoelectric potsherd 2 drives signal of telecommunication E cos (ω t) for port one 4 inputs through fan-shaped silver-coated electrode 8 and produces ultrasonic vibration, excites the endless metal thin slice 6 on the stator to produce the outer standing wave 10 of a face and a face standing internal wave 12; Two synthetic face layman ripples of the outer standing wave of face, two expert ripples of the synthetic face of face standing internal wave, the stack of two capable ripples makes the movement locus of stator surface particle for oval; Place, stator capable wave-wave peak through with rotor 7 contact points near the frictional force acting in conjunction in rotor 7, realize that rotor 7 rotates.Concrete grammar is as shown in Figure 4:
Figure (c) is depicted as to port one 3 and applies alternation driving voltage E sin (ω 1T) time, stator produces vibration, forms standing wave w A(θ, t)=W sin (2 θ) sin (ω 1T), ω 1Be B 12The natural frequency of mode.Figure (d) is for to apply alternation driving voltage E cos (ω to port one 4 1T) time, stator produces vibration, forms standing wave w B(θ, t)=W cos (2 θ) cos (ω 1T).Apply above-mentioned excitation for simultaneously port one 3 and 14, can get the synthetic capable ripple of two standing waves: w (θ, t)=W sin (2 θ+ω 1T).
Figure (e) is depicted as to port one 3 and applies alternation driving voltage E sin (ω 2T) time, stator produces vibration, forms standing wave δ A(θ, t)=U cos (2 θ) sin (ω 2T), ω 2Be θ 12The natural frequency of mode.Figure (f) is for to apply alternation driving voltage E cos (ω to port one 4 2T) time, stator produces vibration, forms standing wave δ B(t)=-U sin (2 θ) cos (ω 2T).Apply above-mentioned excitation for simultaneously port (13) and 14, can get the synthetic capable ripple of two standing waves: δ 2(θ, t)=U cos (2 θ+ω 2T).
As two mode B 12And θ 12Has identical natural frequency (ω 12=ω) time, port (13) and (14) are applied respectively driving voltage E sin (ω t) and E cos (ω t), can excite simultaneously two capable ripples on the stator, a face layman ripple and the expert ripple of face.The surface particle along circumferential vibration is:
δ(θ,t)=δ 1(θ,t)+δ 2(θ,t)=(U-2hW)cos(2θ+ωt)
The motion of any particle P can be expressed as on the surface:
δ P ( t ) = ( U - 2 hW ) cos ( 2 θ P + ωt ) W P ( t ) = W sin ( 2 θ P + ωt )
This is an elliptic equation.After having described two capable ripple stacks, the movement locus of stator surface particle.

Claims (3)

1. thin board type dual traveling wave rotary ultrasonic motor, by bearing (4), pedestal (5), rotor (7) and stator consist of, rotor (7), coaxial the holding of stator and pedestal (5) (4) arranges, it is characterized in that: also comprise rubber spring (1), described stator is by endless metal thin slice (6) and the compound formation of coaxial the holding of ring piezoelectric potsherd (2) (4), the top of endless metal thin slice (6) contacts with rotor (7), the bottom of endless metal thin slice (6) is fixed with ring piezoelectric potsherd (2), the bottom of ring piezoelectric potsherd (2) and pedestal (5) are oppositely arranged, the fan-shaped silver-coated electrode of subregion (8) of the uniform unidirectional polarization in bottom of described ring piezoelectric potsherd (2); Rubber spring (1) passes ring piezoelectric potsherd (2) and is pressed between endless metal thin slice (6) and the pedestal (5), described rubber spring (1) isolation annular piezoelectric ceramic piece (2) and bearing (4) and fixed stator provide the precompression between stator and rotor simultaneously.
2. thin board type dual traveling wave rotary ultrasonic motor according to claim 1, it is characterized in that: the number of partitions of the fan-shaped silver-coated electrode (8) of described ring piezoelectric potsherd (2) is 4 or 8 or 12 or 16 or 20 or 24 or 28 or 32.
3. control method based on thin board type dual traveling wave rotary ultrasonic motor claimed in claim 1, it is characterized in that: drive annular piezoelectric ceramic piece (2) through fan-shaped silver-coated electrode (8) to port (13) the input driving signal of telecommunication and produce ultrasonic vibration, described ultrasonic vibration excites endless metal thin slice (6) to produce the outer standing wave (9) of a face and a face standing internal wave (11); Meanwhile, process
Figure FSB00000893174500011
Phase place is driven the signal of telecommunication for port (14) input by fan-shaped silver-coated electrode (8) and drives annular piezoelectric ceramic piece (2) generation ultrasonic vibration, and described ultrasonic vibration excites the endless metal thin slice (6) on the stator to produce the outer standing wave (10) of another face and another face standing internal wave (12); Two synthetic face layman ripples of the outer standing wave of face, two expert ripples of the synthetic face of face standing internal wave, form the dual-travel-wave of advancing in the same way at stator, so that the surperficial particle of stator ring sheet metal (6) is done the motion of elliptical path, rotate by the particle at place, stator capable wave-wave peak and the frictional force drive rotor (7) of rotor (7) contact area.
CN 200910212679 2009-11-12 2009-11-12 Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof Expired - Fee Related CN101707445B (en)

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CN102185398B (en) * 2011-05-04 2012-12-19 哈尔滨工程大学 Composite material double-body rotor for light motor
CN102647108B (en) * 2012-04-10 2014-11-12 上海交通大学 Traveling wave ultrasonic motor similar to the gear transmission and control method thereof
CN103259448A (en) * 2013-04-25 2013-08-21 南京航空航天大学 Ultrasonic motor partition matching and driving circuit
CN103341794B (en) * 2013-05-29 2015-10-28 南京航空航天大学 A kind of grinding tool for Surface Machining and control method thereof
CN206226321U (en) * 2016-10-27 2017-06-06 华为技术有限公司 A kind of supersonic motor
CN108832837B (en) * 2018-08-06 2024-03-19 深圳市三阶微控实业有限公司 Stepping ultrasonic motor and control method thereof
CN109510508B (en) * 2018-12-12 2020-05-26 南京工程学院 Standing wave type linear ultrasonic motor with H-shaped stator structure
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CN101072001A (en) * 2007-04-05 2007-11-14 南京航空航天大学 Toothless traveling wave rotary ultrasonic motor and working mode and electric exciting manner
CN101170287A (en) * 2007-11-27 2008-04-30 南京航空航天大学 High-temperature rotary traveling wave ultrasonic motor

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EP0306530A1 (en) * 1987-02-28 1989-03-15 Kievsky Politekhnichesky Institut Imeni 50-Letia Velikoi Oktyabrskoi Sotsialisticheskoi Revoljutsii Piezoelectric motor
CN101072001A (en) * 2007-04-05 2007-11-14 南京航空航天大学 Toothless traveling wave rotary ultrasonic motor and working mode and electric exciting manner
CN101170287A (en) * 2007-11-27 2008-04-30 南京航空航天大学 High-temperature rotary traveling wave ultrasonic motor

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