CN102931875A - SMD square ultrasonic motor vibrator and driving method thereof - Google Patents

SMD square ultrasonic motor vibrator and driving method thereof Download PDF

Info

Publication number
CN102931875A
CN102931875A CN2012104787290A CN201210478729A CN102931875A CN 102931875 A CN102931875 A CN 102931875A CN 2012104787290 A CN2012104787290 A CN 2012104787290A CN 201210478729 A CN201210478729 A CN 201210478729A CN 102931875 A CN102931875 A CN 102931875A
Authority
CN
China
Prior art keywords
vibrating body
beams
piezoelectric ceramic
smd
square
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012104787290A
Other languages
Chinese (zh)
Other versions
CN102931875B (en
Inventor
陈维山
周详宇
刘军考
刘英想
石胜军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201210478729.0A priority Critical patent/CN102931875B/en
Publication of CN102931875A publication Critical patent/CN102931875A/en
Application granted granted Critical
Publication of CN102931875B publication Critical patent/CN102931875B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention provides an SMD (Surface Mounted Device) square ultrasonic motor vibrator and a driving method thereof, relates to an ultrasonic motor vibrator formed by symmetrically arranging a plurality of piezoelectric components on both sides of a vibrating body, and solves the problems of an existing ultrasonic motor vibrator that the effective surface of the electrode surface is small and the over-all structure is complicated. The vibrator comprises a vibrating body and four groups of piezoceramic components, wherein the vibrating body adopts a center-symmetrical structure; the vibrating body consists of two pairs of semi-circular curved beams and four V-shaped beams; the positions of every two semi-circular curved beams which belong to one pair of the curved beams are opposite to each other; each V-shaped beam is located between every two curved beams; four cusps of the V-shaped beams form four driving feet; the outer arcs of each pair of the curved beams are arranged relatively; each piezoceramic component in each group includes two pieces of piezoceramic sheets; each piece of the piezoceramic sheet is a semi-circular lamella; the curvature radius of each semi-circular lamella is same as that of each curved beam; and all the piezoceramic sheets are polarized in the thickness direction. The invention can be applied to the aspects of national defense-related science and technology, micro machine, medical and the like.

Description

SMD square supersonic motor oscillator and driving method thereof
Technical field
The present invention relates to a kind of square patch formula supersonic motor oscillator, more specifically, relate to and having a plurality of piezoelectric element balanced configurations at the two-sided formation supersonic motor of vibrating body oscillator.
Background technology
Ultrasound electric machine is the drive unit of the novel concept that occurs in the last thirty years, compare with traditional electromagnetic machine, have inertia little, not affected by magnetic fields, running peace and quiet, low-speed big, can directly be with dynamic load, cut off self-lock, the characteristics such as forms of motion is versatile and flexible.Supersonic motor utilizes the inverse piezoelectric effect of piezoelectric, is electric energy conversion the vibrational energy of supersonic motor stator, at the rotation or the rectilinear motion that are converted into moving component by friction.Its general mainly formed by functional parts such as stator, rotor and pre-pressure mechanisms.
Paste circular elastomer on the common circular piezoelectric vibrator, thereby form stator and the supersonic motor of the rotor that contacts with this circular elastomer.Circular piezoelectric vibrator forms a plurality of electrodes on the two sides of the circular piezoelectrics that formed by piezoelectric ceramic.A plurality of electrodes comprise the electrode group of first and second phase.By the electrode group of first-phase and the electrode group of second-phase are applied the in time different high frequency voltage of phase place, produce two standing waves.By synthetic these two standing waves, produce the row ripple at the elastomer of ring-type and the surface of piezoelectric vibrator.
Common V-type motor adopts the complex vibration of two beams to form supersonic motor.Fig. 6 is a kind of V-type supersonic motor structure principle chart, wherein two straight beams synthesize a V-type beam 7, piezo ceramic element 8,9,10,11 is pasted on surface at every straight beam, the piezo ceramic element that paste on two straight beams surface respectively application time phase place differs voltage excitation signals Vsin ω t and the Vcos ω t of pi/2, can motivate along the separately length direction of straight beam and produce length travel, the displacement of both direction is synthesized at V-type beam cusp and is produced elliptic motion, by friction-driven with drive toe and put contacted moving component and produce straight line or rotatablely move.Change the paster mode, also can utilize the synthetic elliptic motion of bending displacement of two straight beams.
Hollow cross motor is take the V-type motor as the basis.Cross motor connects into 4 V-type motors the cross shape enclosed construction of hollow, Fig. 7 is a kind of V-type supersonic motor structure principle chart, on tie-beam or former V-type motor straight beam paste piezo ceramic element, consist of 4 at 4 V-type beam cusps and drive foot, the middle rotor of placing.A plurality of electrodes comprise the electrode group of first-phase and second-phase.By the electrode group of first-phase and the electrode group of second-phase are applied the in time different high frequency voltage of phase place, produce two standing waves, by synthetic these two standing waves, drive the elliptic motion that the foot point forms identical direction of rotation on 4 on elastomer, rotate by producing the frictional force drives rotor with rotor.
Existing hollow cross motor is suitable for as external stator, and rotor is placed in inner forms of motion.
Microminiaturization is an important directions of motor development.Because the size of supersonic motor is unrestricted, and is more promising in the micro-machine field, this is so that development small size supersonic motor becomes a kind of inevitable.
Circular piezoelectric vibrator has some difficulties when microminiaturization, main manifestations is that undersized ceramic component cutting accuracy and assembly precision are difficult for guaranteeing.The single V-type motor application of force is uneven, bears extra bending moment when making rotor motion.The developing direction of microminiaturized supersonic motor must in the situation that guarantee that electric machine structure is simple, compactness, piezo ceramic element structured size, component count simplify as far as possible, increases motor output torque, raising motor delivery efficiency.
Summary of the invention
The problem of, complicated integral structure little for the effective area that solves existing supersonic motor oscillator electrode surface, and SMD square supersonic motor oscillator and driving method thereof are proposed.
SMD square supersonic motor oscillator, its involving vibrations body and four groups of piezo ceramic elements.
Symmetrical structure centered by the vibrating body, described this vibrating body is comprised of two pairs of semi-circular camber beams and four V-type beams, belong to relative with two camber beam positions in a pair of camber beam, each V-type beam is between per two camber beams, described two pairs of camber beams and four V-type beams consist of square sheet type cross vibrating body, the cusp of four V-type beams consists of 4 and drives foot, and the outer arc of every pair of camber beam is oppositely arranged;
Every group of piezo ceramic element forms by two piezoelectric ceramic unit, every piezoelectric ceramic unit is the semicircular thin plate, the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, two piezoelectric ceramic unit symmetries in every group of piezo ceramic element are bonded in upper surface and the lower surface of a camber beam, the equal through-thickness polarization in all piezoelectric ceramic unit.
The driving method that drives SMD square supersonic motor oscillator is: the two-phase voltage excitation signals that motor oscillator is applied the phase difference with pi/2, a phase voltage pumping signal wherein is used for driving two groups of piezo ceramic elements that are positioned on a pair of camber beam, and another phase voltage pumping signal is used for driving other two groups of piezo ceramic elements.
The present invention adopts said structure, constructs SMD supersonic motor oscillator by piezoelectric ceramic unit and vibrating body.Utilize the d31 pattern of piezoelectric ceramic, by two groups of relative semi-circular potteries radially contraction and expansion excited vibration body on the first-order bending vibration of two symmetrical camber beams, other two groups of potteries are done passive flexural vibrations simultaneously, move in circles, stator just can drive the periodic motion of moving component generation a direction of expection joint.Adopt other two groups of relative semi-circular pottery excitations and the vibration of aforementioned movement perpendicular direction, the time interval was 1/4 cycle.
SMD square supersonic motor oscillator involving vibrations body of the present invention and four pairs of piezoelectric ceramic unit, this motor oscillator forms simple in structure, and in addition, upper surface and the lower surface of four pairs of piezoelectric ceramic unit are equipped with electrode, make the effective area of electrode surface large.The present invention can be used for the aspects such as science and techniques of defence, micromechanics, medical treatment.
Description of drawings
Fig. 1 is the structural representation of a kind of SMD square supersonic motor oscillator of the present invention;
Fig. 2 is the polarised direction schematic diagram of four groups of piezo ceramic elements 3 among Fig. 1;
Fig. 3 is the surface polarity schematic diagram of four groups of piezo ceramic elements of the present invention;
Fig. 4 is vibrating body structure subdivision graph of the present invention;
Fig. 5 is the partial electrode face numbering figure of four groups of piezo ceramic elements of the present invention;
Fig. 6 is V-type motor oscillator structural representation;
Fig. 7 is existing cross motor oscillator structural representation, and ⊙ represents polarised direction upwards, Represent polarised direction downward.
Embodiment
Embodiment one, described SMD its involving vibrations body 1 of square supersonic motor oscillator of present embodiment and four groups of piezo ceramic elements 3,
Symmetrical structure centered by the vibrating body 1, described this vibrating body 1 is comprised of two pairs of semi-circular camber beams and four V-type beams, belong to relative with two camber beam positions in a pair of camber beam, each V-type beam is between per two camber beams, described two pairs of camber beams and four V-type beams consist of square sheet type cross vibrating body, the cusp of four V-type beams consists of 4 and drives foot, and the outer arc of every pair of camber beam is oppositely arranged;
Every group of piezo ceramic element 3 forms by two piezoelectric ceramic unit, every piezoelectric ceramic unit is the semicircular thin plate, the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, two piezoelectric ceramic unit symmetries in every group of piezo ceramic element 3 are bonded in upper surface and the lower surface of a camber beam, the equal through-thickness polarization in all piezoelectric ceramic unit.
Four groups of piezo ceramic elements have semi-circular flat shape.Therefore can be cheap and make efficiently.But in the present invention, piezo ceramic element also can adopt such as the flat shape such as fan-shaped, or the forms of the composition such as polylith is fan-shaped, rectangular ceramic splicing.
The camber beam of the vibrating body 1 of present embodiment not necessarily will guarantee 180 °, less than 180 ° sector structures also can, and V-beam also available camber beam and non-uniform beam with certain radian substitute; Vibrating body is formed by red copper in the present embodiment.Formed by red copper but vibrating body is also nonessential, other metal material that can realize elastic vibration also can.Above-mentioned vibrating body can be easy to form correct shape by processing modes such as Wire-cut Electrical Discharge Machining or punching processing.
In the present embodiment, symmetrical structure centered by the vibrating body 1.Fig. 4 is vibrating body 1 structure segmentation schematic diagram, wherein the semi-circular camber beam of two couple of vibrating body is respectively 1-3,1-4,1-5,1-6, the V-type beam that is clipped between semi-circular camber beam 1-3, the 1-6 can be divided into straight beam 5 and straight beam 6 along oblique center line, in like manner other 3 V-type beams can be divided.It is two semi-circular camber beam 1-3 that there is a mode of oscillation in vibrating body, 1-5 replaces back-flexing contraction and curved expansion, equally, the semi-circular camber beam 1-4 of vibrating body, it is that two beams replace back-flexing contraction and curved expansion that also there is a mode of oscillation in 1-6, two mode of oscillation quadratures, frequency is close, the a certain frequency of getting between two frequencies is excited frequency, apply electric field in each piezoelectric ceramic unit, excite the vibration of piezoelectric ceramic unit to drive the vibrating body vibration, among Fig. 4, camber beam 1-3, the 1-6 vibration can drive straight beam 5,6 flexural vibrations drive the V-type beam and drive periodically oval displacement movement of foot-shape one-tenth.
Embodiment two, present embodiment and embodiment one described SMD square supersonic motor oscillator difference are, the polarised direction of two piezoelectric ceramic unit that is arranged in same group of piezo ceramic element 3 is opposite, the polarised direction of the wherein a slice piezoelectric ceramic unit in adjacent two piezoelectric ceramic unit is identical in the circumferential direction of the circle with it for every piezoelectric ceramic unit, and opposite with the polarised direction of another sheet piezoelectric ceramic unit.
So-called circumferencial direction refers to that in oscillator do circle take the center of the symmetrical cross centre line of this structure as initial point, the tangential direction on circumference is " circumferencial direction ".
The difference of embodiment three, present embodiment and embodiment one described SMD square supersonic motor oscillator is, every piezoelectric ceramic unit forms by piezoelectrics and pair of electrodes sheet, and two electrode slices of the electrode slice that partners lay respectively at upper surface and the lower surface of piezoelectrics.
The described piezoelectrics of present embodiment are formed by lead zirconate titanate class piezoelectric ceramic, but are not limited to lead zirconate titanate class piezoelectric ceramic, also can be the piezoelectrics of other piezoelectric formation of Kynoar, aluminium nitride.Described electrode slice adopts in suitable metal material coatings such as Al, the Cu of piezo ceramic element surface setting, Ag, Ag-Pd alloys and realizes.
The difference of embodiment four, present embodiment and embodiment one described SMD square supersonic motor oscillator is, it also comprises rotor 2, described rotor 2 is annular, the central point of this rotor 2 overlaps with the central point of vibrating body 1, and vibrating body 1 is positioned at the inside of rotor 2,4 of square vibrating body 1 drive foot all with the inwall CONTACT WITH FRICTION of rotor 2.
The described rotor 2 of present embodiment differs and is decided to be circular ring structure, drives the foot identical revolving body of revolution inclined-plane and gyroaxis that contacts and gets final product so long as have with 4 of vibrating body 1, and ring-type, axle shape structure are not limit.
The difference of embodiment five, present embodiment and embodiment one described SMD square supersonic motor oscillator is, it also comprises interior circular annular sheet 4, interior circular annular sheet 4 is positioned at the center of vibrating body 1, described vibrating body 1 is connect by four short beams with interior circular annular sheet 4, is provided with a short beam in the middle of the outer wall of each camber beam and between the outer wall of interior circular annular sheet 4.
Inner circular ring plate structure in the present embodiment is used for face clamping fixes, but the part that is fixedly clamped not necessarily must keep circular ring structure, the arbitrary shape of the function that can realize being fixedly clamped all can, inside and outside two parts are connect by 4 short beams.
The difference of embodiment six, driving embodiment one described SMD square supersonic motor oscillator is, motor oscillator is applied the two-phase voltage excitation signals of the phase difference with pi/2, a phase voltage pumping signal wherein is used for driving two groups of piezo ceramic elements 3 that are positioned on a pair of camber beam, and another phase voltage pumping signal is used for driving other two groups of piezo ceramic elements 3.
Two groups of piezo ceramic elements in the present embodiment on a pair of camber beam are used for consisting of the piezoelectric element of A phase drive division, and other two groups of piezo ceramic elements are used for consisting of the piezoelectric element of B phase drive division, referring to Fig. 3.About A phase drive division, piezoelectric element mark A+ or A-are represented, about B phase drive division, mark B+ or B-.So-called A+ and A-refer to that piezoelectrics polarize in opposite direction on thickness direction.For B phase drive division, also adopt identical structure.
In the present embodiment, adjacent piezoelectric element group is along the central angle of circumferential spaced apart pi/2.
In the present embodiment, two piezoelectric ceramic unit of first group of piezo ceramic element shown in Figure 1 corresponding electrode surface in Fig. 5 is 3-1,3-2; Two piezoelectric ceramic unit of the described second group of piezo ceramic element of Fig. 1 corresponding electrode surface in Fig. 5 is 3-3,3-4; Two piezoelectric ceramic unit of the 3rd group of piezo ceramic element among Fig. 1 corresponding electrode surface in Fig. 5 is 3-5,3-6; Two piezoelectric ceramic of the 4th group of piezo ceramic element corresponding electrode surface in Fig. 5 is 3-7,3-8 among Fig. 1; Vibrating body 1 shown in Figure 1, electrode surface corresponding in Fig. 5 is 1-2.
Apply Asin (wt) pumping signal at first group of piezo ceramic element and the 3rd group of piezoelectric ceramic set of pieces electrode surface 3-1,3-2,3-5,3-6, simultaneously apply Acos (wt) pumping signal at electrode surface 3-3,3-4,3-7, the 3-8 of second group of piezo ceramic element and the 4th group of piezo ceramic element, with the vibrating body surface earthing, be electrode surface 1-2 and keep no-voltage, power up the excitation electrical field phase place that mode guarantees adjacent piezoelectric ceramic group and differ pi/2 by above-mentioned.If the frequency of the pumping signal that applies between two quadrature single order flexural resonance model frequency scopes of vibrating body, then drives foot point a on the vibrating body of Fig. 4, b, c motivates identical direction of rotation elliptic motion on the d.Because of the different of the polarised direction of 4 groups of group of ceramics and apply two electric field phases and differ pi/2, finally drive foot point a at 4, b, c motivates elliptic motion and also differs pi/2 time phase on the d, and driving rotor that can be stable rotates.

Claims (6)

1. SMD square supersonic motor oscillator is characterized in that, its involving vibrations body (1) and four groups of piezo ceramic elements (3),
Symmetrical structure centered by the vibrating body (1), described this vibrating body (1) is comprised of two pairs of semi-circular camber beams and four V-type beams, belong to relative with two camber beam positions in a pair of camber beam, each V-type beam is between per two camber beams, described two pairs of camber beams and four V-type beams consist of square sheet type cross vibrating body, the cusp of four V-type beams consists of 4 and drives foot, and the outer arc of every pair of camber beam is oppositely arranged;
Every group of piezo ceramic element (3) forms by two piezoelectric ceramic pieces, every electroceramics sheet is the semicircular thin plate, the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, two piezoelectric ceramic piece symmetries in every group of piezo ceramic element (3) are bonded in upper surface and the lower surface of a camber beam, the equal through-thickness polarization of all piezoelectric ceramic pieces.
2. SMD square supersonic motor oscillator according to claim 1, it is characterized in that, the polarised direction of two piezoelectric ceramic pieces that is arranged in same group of piezo ceramic element (3) is opposite, the polarised direction of the wherein a slice piezoelectric ceramic piece in adjacent two piezoelectric ceramic pieces is identical in the circumferential direction of the circle with it for every piezoelectric ceramic piece, and opposite with the polarised direction of another sheet piezoelectric ceramic piece.
3. SMD supersonic motor oscillator according to claim 1 is characterized in that, every piezoelectric ceramic unit forms by piezoelectrics and pair of electrodes sheet, and two electrode slices of the electrode slice that partners lay respectively at upper surface and the lower surface of piezoelectrics.
4. SMD square supersonic motor oscillator according to claim 1, it is characterized in that, it also comprises rotor (2), described rotor (2) is annular, the central point of this rotor (2) overlaps with the central point of vibrating body (1), and vibrating body (1) is positioned at the inside of rotor (2), 4 of square vibrating body (1) drive foot all with the inwall CONTACT WITH FRICTION of rotor (2).
5. SMD square supersonic motor oscillator according to claim 1, it is characterized in that, it also comprises interior circular annular sheet (4), interior circular annular sheet (4) is positioned at the center of vibrating body (1), described vibrating body (1) is connect by four short beams with interior circular annular sheet (4), is provided with a short beam in the middle of the outer wall of each camber beam and between the outer wall of interior circular annular sheet (4).
6. the driving method that drives SMD square supersonic motor oscillator claimed in claim 1 is: the two-phase voltage excitation signals that motor oscillator is applied the phase difference with pi/2, a phase voltage pumping signal wherein is used for driving the two groups of piezo ceramic elements (3) that are positioned on a pair of camber beam, and another phase voltage pumping signal is used for driving other two groups of piezo ceramic elements (3).
CN201210478729.0A 2012-11-22 2012-11-22 SMD square ultrasonic motor vibrator and driving method thereof Expired - Fee Related CN102931875B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210478729.0A CN102931875B (en) 2012-11-22 2012-11-22 SMD square ultrasonic motor vibrator and driving method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210478729.0A CN102931875B (en) 2012-11-22 2012-11-22 SMD square ultrasonic motor vibrator and driving method thereof

Publications (2)

Publication Number Publication Date
CN102931875A true CN102931875A (en) 2013-02-13
CN102931875B CN102931875B (en) 2015-08-19

Family

ID=47646607

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210478729.0A Expired - Fee Related CN102931875B (en) 2012-11-22 2012-11-22 SMD square ultrasonic motor vibrator and driving method thereof

Country Status (1)

Country Link
CN (1) CN102931875B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3127231A4 (en) * 2014-04-02 2018-01-03 PCB Motor Aps A stator and a motor
CN108258932A (en) * 2018-02-13 2018-07-06 哈尔滨工业大学 A kind of multiple field rotating piezoelectric micro-displacement driver
CN108400722A (en) * 2018-04-18 2018-08-14 哈尔滨工业大学 A kind of two-freedom Piexoelectric actuator and its motivational techniques
CN110492785A (en) * 2019-08-09 2019-11-22 南京航空航天大学 A kind of rotary-type ultrasound electric machine of rood beam and its control method
CN112886857A (en) * 2021-01-13 2021-06-01 南京航空航天大学 Piezoelectric driving device and method for swinging fin

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4814660A (en) * 1987-02-12 1989-03-21 Nec Corporation Piezoelectric motor with multilayer piezoelectric elements
JPS6477486A (en) * 1987-09-18 1989-03-23 Nec Corp Ultrasonic motor
CN200959578Y (en) * 2006-09-29 2007-10-10 程凯 Rotary standing-wave piezoelectric motor
CN102037638A (en) * 2008-05-27 2011-04-27 株式会社村田制作所 Ultrasonic motor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4814660A (en) * 1987-02-12 1989-03-21 Nec Corporation Piezoelectric motor with multilayer piezoelectric elements
JPS6477486A (en) * 1987-09-18 1989-03-23 Nec Corp Ultrasonic motor
CN200959578Y (en) * 2006-09-29 2007-10-10 程凯 Rotary standing-wave piezoelectric motor
CN102037638A (en) * 2008-05-27 2011-04-27 株式会社村田制作所 Ultrasonic motor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TAKASHI ICHIHARA等: "Design and Evaluation of Low-profile Micro Ultrasonic Motors using Sector Shaped Piezoelectric Vibrators", 《2008 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS》 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3127231A4 (en) * 2014-04-02 2018-01-03 PCB Motor Aps A stator and a motor
US10404191B2 (en) 2014-04-02 2019-09-03 Pcb Motor Aps Stator and a motor
CN108258932A (en) * 2018-02-13 2018-07-06 哈尔滨工业大学 A kind of multiple field rotating piezoelectric micro-displacement driver
CN108258932B (en) * 2018-02-13 2019-09-10 哈尔滨工业大学 A kind of multiple field rotating piezoelectric micro-displacement driver
CN108400722A (en) * 2018-04-18 2018-08-14 哈尔滨工业大学 A kind of two-freedom Piexoelectric actuator and its motivational techniques
CN108400722B (en) * 2018-04-18 2019-11-08 哈尔滨工业大学 A kind of two-freedom Piexoelectric actuator and its motivational techniques
CN110492785A (en) * 2019-08-09 2019-11-22 南京航空航天大学 A kind of rotary-type ultrasound electric machine of rood beam and its control method
CN112886857A (en) * 2021-01-13 2021-06-01 南京航空航天大学 Piezoelectric driving device and method for swinging fin
CN112886857B (en) * 2021-01-13 2022-04-22 南京航空航天大学 Piezoelectric driving device and method for swinging fin

Also Published As

Publication number Publication date
CN102931875B (en) 2015-08-19

Similar Documents

Publication Publication Date Title
CN102931869A (en) SMD (Surface Mount Device) ultrasonic motor vibrator and drive method thereof
CN100428618C (en) Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet
CN102931875B (en) SMD square ultrasonic motor vibrator and driving method thereof
CN102355157A (en) Piezoelectric plate-sandwiched rotary linear ultrasonic motor stator
CN104410324B (en) A kind of miniature rotation straight-line traveling wave piezoelectric motor
CN102751905B (en) Novel double-tooth-surface rotary ultrasonic motor stator and excitation way thereof
CN101707445B (en) Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof
CN110677073A (en) Paster type traveling wave type double-sided staggered tooth ultrasonic motor stator
CN108712103B (en) Impact type piezoelectric rotary motor
US7825566B2 (en) Ultrasonic actuator and method for manufacturing piezoelectric deformation portion used in the same
CN110601596B (en) Standing wave type magnetic repulsion unidirectional rotating motor based on piezoelectric ceramic
CN110661445B (en) Parallel three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof
CN102904480A (en) Sandwich type square frame ultrasonic motor vibrator
CN102118118B (en) Linear type ultrasonic micromotor
CN101291122B (en) Linear piezoelectric actuator with double-driving feet
CN102299663B (en) Cylindrical traveling-wave ultrasonic motor vibrator pretightened by spring blocks
CN112217415A (en) Frame type three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof
CN202513846U (en) Thin-plate type rotatable ultrasonic motor
JPS63181676A (en) Ultrasonic rotary vibrator
CN110729919A (en) Coaxial counter-rotating standing wave type double-sided staggered tooth ultrasonic motor stator
CN113511315B (en) Ray type underwater piezoelectric robot
JP2012100513A (en) Actuator
CN101741277A (en) linear piezoelectric motor
Shen et al. Design and fabrication of a multi-degree-of-freedom microactuator using symmetric piezoelectric pusher element and its applications
Xu et al. Simulation and Experimental Research on Mode Switching of Traveling Wave Rotary Ultrasonic Motor

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150819

Termination date: 20151122

EXPY Termination of patent right or utility model