CN102931875B - SMD square ultrasonic motor vibrator and driving method thereof - Google Patents
SMD square ultrasonic motor vibrator and driving method thereof Download PDFInfo
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- CN102931875B CN102931875B CN201210478729.0A CN201210478729A CN102931875B CN 102931875 B CN102931875 B CN 102931875B CN 201210478729 A CN201210478729 A CN 201210478729A CN 102931875 B CN102931875 B CN 102931875B
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Abstract
SMD square ultrasonic motor vibrator and driving method thereof, relate to and having multiple piezoelectric element balanced configuration in the two-sided formation ultrasonic motor vibrator of vibrating body.The effective area it solving existing ultrasonic motor vibrator electrode surface is little, complicated integral structure, and in existing similar electric machine structure, cross hang beam is to the interference of oscillation trajectory and the problem weakening vibration.Its involving vibrations body and four groups of piezo ceramic elements, symmetrical structure centered by vibrating body, this vibrating body is made up of HBV"liang dui ban" annular rib and four V-type beams, belong to relative with two camber beam positions in a pair camber beam, each V-type beam is between every two camber beams, the cusp of four V-type beams forms 4 and drives foot, and the outer arc of often pair of camber beam is oppositely arranged; Often organize piezo ceramic element by two panels piezoelectric ceramic piece composition, every sheet electroceramics sheet is semicircular thin plate, and the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, the equal through-thickness polarization of all piezoelectric ceramic pieces.The present invention can be applied to the aspects such as science and techniques of defence, micromechanics, medical treatment.
Description
Technical field
The present invention relates to a kind of square patch formula ultrasonic motor vibrator, more specifically, relate to and having multiple piezoelectric element balanced configuration in the two-sided formation ultrasonic motor vibrator of vibrating body.
Background technology
Ultrasound electric machine is the drive unit of the novel concept occurred in the last thirty years, compare with traditional electromagnetic machine, there is inertia little, not affected by magnetic fields, quiet operation, low-speed big, can directly be with dynamic load, cut off self-lock, the feature such as forms of motion is versatile and flexible.Supersonic motor utilizes the inverse piezoelectric effect of piezoelectric, is the vibrational energy of supersonic motor stator electric energy conversion, is being converted into rotation or the rectilinear motion of moving component by friction.It is generally primarily of functional part compositions such as stator, rotor and pre-pressure mechanisms.
Common circular piezoelectric vibrator pastes circular elastomer, thus forms the supersonic motor of stator and the rotor with this circular elastomer contact.Circular piezoelectric vibrator forms multiple electrode on the two sides of the circular piezoelectrics formed by piezoelectric ceramic.Multiple electrode comprises the electrode group of first and second phase.By applying the different high frequency voltage of phase place in time to the electrode group of first-phase with the electrode group of second-phase, produce two standing waves.By synthesizing this two standing waves, produce row ripple at the elastomer of ring-type and the surface of piezoelectric vibrator.
Common V-type motor adopts the complex vibration of two beams to form supersonic motor.Fig. 6 is a kind of V-type supersonic motor structure principle chart, wherein two straight beams synthesize a V-type beam 7, at the surface mount piezo ceramic element 8,9,10,11 of every root straight beam, the voltage excitation signals Vsin ω t of the piezo ceramic element difference application time phase pi/2 of two straight beam surface mount and Vcos ω t, the respective length direction that can motivate along straight beam produces length travel, the displacement synthesis of both direction produces elliptic motion at V-type beam cusp, produces straight line or rotary motion by friction-driven with the moving component driving toe point to contact.Change paster mode, also can utilize the bending displacement synthesis elliptic motion of two straight beams.
Hollow cross motor is based on V-type motor.4 V-type motors are connected into the cross shape enclosed construction of hollow by cross motor, Fig. 7 is a kind of V-type supersonic motor structure principle chart, on tie-beam or on former V-type motor straight beam, paste piezo ceramic element, form 4 at 4 V-type beam cusps and drive foot, middle placement rotor.Multiple electrode comprises the electrode group of first-phase and second-phase.By applying the different high frequency voltage of phase place in time to the electrode group of first-phase with the electrode group of second-phase, produce two standing waves, by synthesizing this two standing waves, foot point is driven to form the elliptic motion of identical direction of rotation, by producing frictional force drives rotor turns with rotor on 4, elastomer.
Existing hollow cross motor is suitable for as external stator, and rotor is placed in inner forms of motion.
Microminiaturization is an important directions of motor development.Because the size of supersonic motor is unrestricted, more promising in micro-machine field, this makes development small size supersonic motor become a kind of inevitable.
Circular piezoelectric vibrator has some difficulties when microminiaturization, main manifestations is that undersized ceramic component cutting accuracy and assembly precision not easily ensure.Single V-type motor force is uneven, makes to bear extra bending moment during rotor motion.The developing direction of microminiaturized supersonic motor when ensureing that electric machine structure is simple, compact, piezo ceramic element structured size, component count are simplified as far as possible, must increase motor output torque, improving motor delivery efficiency.
Summary of the invention
In order to the effective area solving existing ultrasonic motor vibrator electrode surface is little, complicated integral structure, in existing similar electric machine structure, cross hang beam is to the interference of oscillation trajectory and the problem weakening vibration, and proposes SMD square ultrasonic motor vibrator and driving method thereof.
SMD square ultrasonic motor vibrator, its involving vibrations body and four groups of piezo ceramic elements.
Symmetrical structure centered by vibrating body, this vibrating body described is made up of HBV"liang dui ban" annular rib and four V-type beams, belong to relative with two camber beam positions in a pair camber beam, each V-type beam is between every two camber beams, described two pairs of camber beams and four V-type beams form square sheet type cross vibrating body, the cusp of four V-type beams forms 4 and drives foot, and the outer arc of often pair of camber beam is oppositely arranged;
Often organize piezo ceramic element to form by two panels piezoelectric ceramic unit, every sheet piezoelectric ceramic unit is semicircular thin plate, the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, the two panels piezoelectric ceramic unit symmetry often organized in piezo ceramic element is bonded in upper surface and the lower surface of a camber beam, the equal through-thickness polarization of all piezoelectric ceramic unit, it also comprises interior circular annular sheet 4, interior circular annular sheet 4 is positioned at the center of vibrating body 1, described vibrating body 1 is connect by four short beams with interior circular annular sheet 4, a short beam is provided with in the middle of the outer wall of each camber beam and between the outer wall of interior circular annular sheet 4,
It is that two semi-circular camber beams replace back-flexing contraction and curved expansion that vibrating body exists a mode of oscillation, equally, it is that two beams replace back-flexing contraction and curved expansion that the semi-circular camber beam of vibrating body also exists a mode of oscillation, two mode of oscillations are orthogonal, frequency is close, the a certain frequency of getting between two frequencies is excited frequency, each piezoelectric ceramic unit applies electric field, excite piezoelectric ceramic unit to vibrate and drive vibrating body vibration, camber beam vibration drives straight beam flexural vibrations, drives V-type beam to drive foot-shape to become periodical elliptical displacement movement.
The driving method of driving SMD square ultrasonic motor vibrator is: the two-phase voltage excitation signals applying to have the phase difference of pi/2 to motor oscillator, a phase voltage pumping signal is wherein for driving the two groups of piezo ceramic elements be positioned on a pair camber beam, and another phase voltage pumping signal is for driving other two groups of piezo ceramic elements.
The present invention adopts said structure, by piezoelectric ceramic unit and vibrating body structure surface mount type ultrasonic wave motor oscillator.Utilize the d31 pattern of piezoelectric ceramic, by the first-order bending vibration of two symmetrical camber beams on the contraction radially of two groups of relative semi-circular potteries and expansion excited vibration body, other two groups of potteries do passive flexural vibrations simultaneously, move in circles, stator just can drive the moving component of expection joint to produce the periodic motion of a direction.Adopt the vibration that the excitation of other two groups of relative semi-circular potteries is vertical with aforementioned movement direction, the time interval was 1/4 cycle.
SMD square ultrasonic motor vibrator involving vibrations body of the present invention and four pairs of piezoelectric ceramic unit, this motor oscillator composition structure is simple, and in addition, upper surface and the lower surface of four pairs of piezoelectric ceramic unit are equipped with electrode, make the effective area of electrode surface large.The present invention can be used for the aspects such as science and techniques of defence, micromechanics, medical treatment.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of SMD square ultrasonic motor vibrator of the present invention;
Fig. 2 is the polarised direction schematic diagram of four groups of piezo ceramic elements 3 in Fig. 1;
Fig. 3 is the surface polarity schematic diagram of the present invention's four groups of piezo ceramic elements;
Fig. 4 is vibrating body structure subdivision graph of the present invention;
Fig. 5 is the partial electrode face numbering figure of the present invention's four groups of piezo ceramic elements;
Fig. 6 is V-type motor oscillator structural representation;
Fig. 7 is existing cross motor oscillator structural representation, and ⊙ represents polarised direction upwards,
represent polarised direction downward.
Embodiment
Its involving vibrations body of SMD square ultrasonic motor vibrator described in embodiment one, present embodiment 1 and four groups of piezo ceramic elements 3,
Symmetrical structure centered by vibrating body 1, this vibrating body 1 described is made up of HBV"liang dui ban" annular rib and four V-type beams, belong to relative with two camber beam positions in a pair camber beam, each V-type beam is between every two camber beams, described two pairs of camber beams and four V-type beams form square sheet type cross vibrating body, the cusp of four V-type beams forms 4 and drives foot, and the outer arc of often pair of camber beam is oppositely arranged;
Often organize piezo ceramic element 3 to form by two panels piezoelectric ceramic unit, every sheet piezoelectric ceramic unit is semicircular thin plate, the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, the two panels piezoelectric ceramic unit symmetry often organized in piezo ceramic element 3 is bonded in upper surface and the lower surface of a camber beam, the equal through-thickness polarization of all piezoelectric ceramic unit.
Four groups of piezo ceramic elements, have semi-circular flat shape.Therefore, it is possible to cheap and manufacture efficiently.But in the present invention, piezo ceramic element also can adopt as the flat shape such as fan-shaped, or the form of the composition such as polylith is fan-shaped, rectangular ceramic splicing.
The camber beam of the vibrating body 1 of present embodiment not necessarily will ensure 180 °, the sector structure being less than 180 ° also can, and V-beam also can substitute with the camber beam of certain radian and non-uniform beam; Vibrating body is formed by red copper in the present embodiment.But vibrating body is non-essential to be formed by red copper, other metal material that can realize elastic vibration also can.Above-mentioned vibrating body, by the processing mode such as Wire-cut Electrical Discharge Machining or punching processing, can be easy to form correct shape.
In present embodiment, symmetrical structure centered by vibrating body 1.Fig. 4 is vibrating body 1 structure segmentation schematic diagram, wherein the HBV"liang dui ban" annular rib of vibrating body is respectively 1-3,1-4,1-5,1-6, diagonally the V-type beam be clipped between semi-circular camber beam 1-3,1-6 can be divided into straight beam 5 and straight beam 6 by center line, in like manner other 3 V-type beams can be divided.It is two semi-circular camber beam 1-3 that vibrating body exists a mode of oscillation, 1-5 replaces back-flexing contraction and curved expansion, equally, the semi-circular camber beam 1-4 of vibrating body, it is that two beams replace back-flexing contraction and curved expansion that 1-6 also exists a mode of oscillation, two mode of oscillations are orthogonal, frequency is close, the a certain frequency of getting between two frequencies is excited frequency, each piezoelectric ceramic unit applies electric field, excite piezoelectric ceramic unit to vibrate and drive vibrating body vibration, in Fig. 4, camber beam 1-3, 1-6 vibration can drive straight beam 5, 6 flexural vibrations, V-type beam is driven to drive foot-shape to become periodical elliptical displacement movement.
SMD square ultrasonic motor vibrator difference described in embodiment two, present embodiment and embodiment one is, the polarised direction being arranged in the two panels piezoelectric ceramic unit of same group of piezo ceramic element 3 is contrary, the polarised direction of the wherein a slice piezoelectric ceramic unit in the two panels piezoelectric ceramic unit that every sheet piezoelectric ceramic unit is along the circumferential direction adjacent with it is identical, and contrary with the polarised direction of another sheet piezoelectric ceramic unit.
So-called circumferencial direction, refers in oscillator, with the center of the symmetrical cross centre line of this structure for initial point does circle, is " circumferencial direction " in tangential direction circumferentially.
The difference of the SMD square ultrasonic motor vibrator described in embodiment three, present embodiment and embodiment one is, every sheet piezoelectric ceramic unit is by piezoelectrics and pair of electrodes sheet composition, and two electrode slices of the electrode slice that partners lay respectively at upper surface and the lower surface of piezoelectrics.
Piezoelectrics described in present embodiment are formed by lead zirconate titanate class piezoelectric ceramic, but are not limited to lead zirconate titanate class piezoelectric ceramic, also can be Kynoar, aluminium nitride other piezoelectric formed piezoelectrics.Described electrode slice adopts the suitable metal material coatings such as Al, Cu, Ag, Ag-Pd alloy arranged on piezo ceramic element surface to realize.
The difference of the SMD square ultrasonic motor vibrator described in embodiment four, present embodiment and embodiment one is, it also comprises rotor 2, described rotor 2 is annular, the central point of this rotor 2 and the point coincides of vibrating body 1, and vibrating body 1 is positioned at the inside of rotor 2,4 of square vibrating body 1 drive foot all with the inwall CONTACT WITH FRICTION of rotor 2.
Rotor 2 described in present embodiment differs and is decided to be circular ring structure, and to drive foot to contact to turn round inclined-plane with 4 of vibrating body 1 and the identical revolving body of gyroaxis as long as have, ring-type, shaft-like structure are not limit.
The difference of the SMD square ultrasonic motor vibrator described in embodiment five, present embodiment and embodiment one is, it also comprises interior circular annular sheet 4, interior circular annular sheet 4 is positioned at the center of vibrating body 1, described vibrating body 1 is connect by four short beams with interior circular annular sheet 4, is provided with a short beam in the middle of the outer wall of each camber beam and between the outer wall of interior circular annular sheet 4.
Inner circular ring plate structure in present embodiment is used for face clamping and fixes, but the part that is fixedly clamped not necessarily must keep circular ring structure, and the arbitrary shape of the function that can realize being fixedly clamped, inside and outside two parts are connect by 4 short beams.
The difference of embodiment six, the SMD square ultrasonic motor vibrator of driving described in embodiment one is, the two-phase voltage excitation signals with the phase difference of pi/2 is applied to motor oscillator, a phase voltage pumping signal is wherein for driving the two groups of piezo ceramic elements 3 be positioned on a pair camber beam, and another phase voltage pumping signal is for driving other two groups of piezo ceramic elements 3.
Two groups of piezo ceramic elements in present embodiment on a pair camber beam for forming the piezoelectric element of A phase drive division, other two groups of piezo ceramic elements for forming the piezoelectric element of B phase drive division, see Fig. 3.About A phase drive division, piezoelectric element mark A+ or A-is represented, about B phase drive division, mark B+ or B-.So-called A+ and A-refers to that piezoelectrics polarize in a thickness direction in opposite direction.For B phase drive division, also adopt identical structure.
In present embodiment, the central angle of adjacent piezoelectric element group circumferentially spaced apart pi/2.
In present embodiment, the electrode surface that the two panels piezoelectric ceramic unit of group piezo ceramic element of first shown in Fig. 1 is corresponding is in Figure 5 3-1,3-2; The electrode surface that the two panels piezoelectric ceramic unit of second group of piezo ceramic element described in Fig. 1 is corresponding is in Figure 5 3-3,3-4; The electrode surface that the two panels piezoelectric ceramic unit of the 3rd group of piezo ceramic element in Fig. 1 is corresponding is in Figure 5 3-5,3-6; The electrode surface that in Fig. 1, two piezoelectric ceramic of the 4th group of piezo ceramic element are corresponding is in Figure 5 3-7,3-8; Vibrating body 1 shown in Fig. 1, electrode surface corresponding is in Figure 5 1-2.
Asin (wt) pumping signal is applied at first group of piezo ceramic element and the 3rd group of piezoelectric ceramic set of pieces electrode surface 3-1,3-2,3-5,3-6, apply Acos (wt) pumping signal at electrode surface 3-3,3-4,3-7,3-8 of second group of piezo ceramic element and the 4th group of piezo ceramic element simultaneously, by vibrating body surface earthing, be electrode surface 1-2 and keep no-voltage, power up by above-mentioned the excitation electrical field phase pi/2 that mode ensures adjacent piezoelectric ceramic group.If the frequency of pumping signal applied is between two orthogonal single order flexural resonance model frequency range of vibrating body, then the vibrating body of Fig. 4 drives foot point a, b, c, d motivates identical direction of rotation elliptic motion.Because of difference and applying two electric field phases difference pi/2s of the polarised direction of 4 groups of group of ceramics, finally on 4 drivings foot point a, b, c, d, motivate elliptic motion and also differ pi/2 time phase, driving rotor turns that can be stable.
Claims (5)
1. SMD square ultrasonic motor vibrator, is characterized in that, its involving vibrations body (1) and four groups of piezo ceramic elements (3),
Symmetrical structure centered by vibrating body (1), described this vibrating body (1) is made up of HBV"liang dui ban" annular rib and four V-type beams, belong to relative with two camber beam positions in a pair camber beam, each V-type beam is between every two camber beams, described two pairs of camber beams and four V-type beams form square sheet type cross vibrating body, the cusp of four V-type beams forms 4 and drives foot, and the outer arc of often pair of camber beam is oppositely arranged;
Often organize piezo ceramic element (3) to form by two panels piezoelectric ceramic piece, every sheet electroceramics sheet is semicircular thin plate, the radius of curvature of described semicircular thin plate is identical with the radius of curvature of camber beam, the two panels piezoelectric ceramic piece symmetry often organized in piezo ceramic element (3) is bonded in upper surface and the lower surface of a camber beam, the equal through-thickness polarization of all piezoelectric ceramic pieces, it also comprises interior circular annular sheet (4), interior circular annular sheet (4) is positioned at the center of vibrating body (1), described vibrating body (1) and interior circular annular sheet (4) are connect by four short beams, a short beam is provided with in the middle of the outer wall of each camber beam and between the outer wall of interior circular annular sheet (4),
It is that two semi-circular camber beams replace back-flexing contraction and curved expansion that vibrating body exists a mode of oscillation, equally, it is that two beams replace back-flexing contraction and curved expansion that the semi-circular camber beam of vibrating body also exists a mode of oscillation, two mode of oscillations are orthogonal, a certain frequency between two the orthogonal single order flexural resonance model frequency range getting vibrating body is excited frequency, each piezoelectric ceramic unit applies electric field, excite piezoelectric ceramic unit to vibrate and drive vibrating body vibration, camber beam vibration drives straight beam flexural vibrations, V-type beam is driven to drive foot-shape to become periodical elliptical displacement movement.
2. SMD square ultrasonic motor vibrator according to claim 1, it is characterized in that, the polarised direction being arranged in the two panels piezoelectric ceramic piece of same group of piezo ceramic element (3) is contrary, the polarised direction of the wherein a slice piezoelectric ceramic piece in the two panels piezoelectric ceramic piece that every sheet piezoelectric ceramic piece is along the circumferential direction adjacent with it is identical, and contrary with the polarised direction of another sheet piezoelectric ceramic piece.
3. SMD square ultrasonic motor vibrator according to claim 1, is characterized in that, every sheet piezoelectric ceramic unit is by piezoelectrics and pair of electrodes sheet composition, and two electrode slices of the electrode slice that partners lay respectively at upper surface and the lower surface of piezoelectrics.
4. SMD square ultrasonic motor vibrator according to claim 1, it is characterized in that, it also comprises rotor (2), described rotor (2) is annular, the central point of this rotor (2) and the point coincides of vibrating body (1), and vibrating body (1) is positioned at the inside of rotor (2), 4 of square vibrating body (1) drive foot all with the inwall CONTACT WITH FRICTION of rotor (2).
5. the driving method of driving SMD square ultrasonic motor vibrator according to claim 1 is: the two-phase voltage excitation signals applying to have the phase difference of pi/2 to motor oscillator, a phase voltage pumping signal is wherein for driving the two groups of piezo ceramic elements (3) be positioned on a pair camber beam, and another phase voltage pumping signal is for driving other two groups of piezo ceramic elements (3).
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| EP3127231A4 (en) * | 2014-04-02 | 2018-01-03 | PCB Motor Aps | A stator and a motor |
| CN108258932B (en) * | 2018-02-13 | 2019-09-10 | 哈尔滨工业大学 | A kind of multiple field rotating piezoelectric micro-displacement driver |
| CN108400722B (en) * | 2018-04-18 | 2019-11-08 | 哈尔滨工业大学 | A kind of two-freedom Piexoelectric actuator and its motivational techniques |
| CN110492785A (en) * | 2019-08-09 | 2019-11-22 | 南京航空航天大学 | A kind of rotary-type ultrasound electric machine of rood beam and its control method |
| CN112886857B (en) * | 2021-01-13 | 2022-04-22 | 南京航空航天大学 | Piezoelectric driving device and method for swinging fin |
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| JPS6477486A (en) * | 1987-09-18 | 1989-03-23 | Nec Corp | Ultrasonic motor |
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| US4814660A (en) * | 1987-02-12 | 1989-03-21 | Nec Corporation | Piezoelectric motor with multilayer piezoelectric elements |
| CN200959578Y (en) * | 2006-09-29 | 2007-10-10 | 程凯 | Rotary standing-wave piezoelectric motor |
| CN102037638A (en) * | 2008-05-27 | 2011-04-27 | 株式会社村田制作所 | Ultrasonic motor |
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