CN210629372U

CN210629372U - Piezoelectric planar motor based on stator drive of frame plate structure

Info

Publication number: CN210629372U
Application number: CN201922207008.6U
Authority: CN
Inventors: 贺红林; 方志敏; 龙玉繁; 邓传涛; 吴兴强
Original assignee: Nanchang Hangkong University
Current assignee: Nanchang Hangkong University
Priority date: 2019-12-11
Filing date: 2019-12-11
Publication date: 2020-05-26
Anticipated expiration: 2029-12-11

Abstract

The utility model discloses a piezoelectricity planar motor based on frame plate structure stator drive comprises stator module, active cell subassembly, base. The stator assembly is connected with the rotor assembly and is arranged on the base, and a rolling pair moving in two directions is formed between the rotor assembly and the stator assembly. The utility model adopts a simple frame plate stator matrix, and simultaneously realizes the direct drive of the rotor in two linear freedom directions, thereby enabling the motor to generate the precise motion of micron-level or even higher precision level and enabling the motor to have the characteristic of quick response; the four pairs of driving feet of the stator component alternately push the moving platform to do plane motion, so that the output power of the motor can be multiplied, and the motor can run more stably.

Description

Piezoelectric planar motor based on stator drive of frame plate structure

Technical Field

The utility model relates to a piezoelectricity precision drive technical field, concretely relates to piezoelectricity planar motor based on frame plate structure stator drive.

Background

With the progress of science and technology, the requirements of the fields of precise positioning control, scientific instruments and the like on motor driving are higher and higher, and the driving in a single direction cannot meet the requirements. The piezoelectric planar motor is developed on the basis of a single-degree-of-freedom ultrasonic motor as a novel driver, the inverse piezoelectric effect of piezoelectric ceramics is utilized, alternating voltage is converted into periodic deformation of the piezoelectric ceramics, the vibration of a stator of the piezoelectric planar motor is further excited, the amplification of the vibration is realized through the resonance of the stator, and points in a driving area form an elliptic or oblique line vibration track; when the piezo actuator stator is pre-pressed against the mover, the elliptical or diagonal trajectory is converted into a macroscopic continuous movement of the mover due to the frictional coupling at the contact surfaces. Based on the working principle of the piezoelectric planar motor, the piezoelectric planar motor has the advantages of low speed, large torque, high power density, high positioning precision, high response speed, power failure self-locking, no electromagnetic interference and the like; in addition, the piezoelectric ultrasonic motor can directly drive the rotor through friction coupling, and can realize plane driving of the rotor through reasonable design, so that a driving system can be effectively simplified. In addition, the electromagnetic planar motor has a complex structure, has many difficulties in design and process, is not easy to miniaturize, and is not suitable for low-speed and direct-drive application occasions, and the piezoelectric planar motor just fills the gap in the aspect; therefore, the piezoelectric planar motor is widely researched and developed in nearly 30 years, for example, Liujun standard shows a planar motor driven by cylindrical rod vibration, and a cylindrical rod type two-degree-of-freedom planar motor is developed based on two four-order bending vibration of a variable intercept rod in the orthogonal direction in time, wherein the maximum speed of the motor is 190mm/s, and the maximum thrust is 19N; the planar ultrasonic motor driven by the cross orthogonal energy concentrator is pushed out by the Haugh Dachen Weishan, and the thrust reaches 100N; the new principle and the dynamic structure of single-stator two-degree-of-freedom planar ultrasound are developed strictly and the like; although piezoelectric planar motors are a major focus in the current field of ultrasonic motor research, in some respects, their advantages have been shown primarily. However, the piezoelectric planar motor is still lack of deep system research, and meanwhile, the defects of poor output performance, complex operation control, limited motor structure style and the like exist, so that more new principles of the piezoelectric planar motor and stator piezoelectric transduction structures thereof are still important aspects of piezoelectric planar motor research.

Disclosure of Invention

The utility model discloses the problem that will solve is: the piezoelectric planar motor based on the stator drive of the frame plate structure is simple in structure, high in response speed, high in efficiency and wide in application range.

The utility model discloses a solve the technical scheme that above-mentioned problem provided and do: a piezoelectric planar motor based on stator drive of a frame plate structure comprises a stator assembly, a rotor assembly and a base; the stator assembly is connected with the rotor assembly and is arranged on the base, and a rolling pair moving in two directions is formed between the rotor assembly and the stator assembly;

stator module includes stator base member, piezoceramics piece and drive head, the stator base member includes four vertical poles of mouth font structural slab and two liang of upper and lower central line symmetric distribution of following of inside, controls two liang of four horizontal poles of following central line symmetric distribution, piezoceramics piece attaches in four sides of vertical pole and horizontal pole, the one end of mouth font structural slab is kept away from at vertical pole and horizontal pole to the drive head setting.

Preferably, the piezoelectric ceramic plates adhered to the upper and lower surfaces of the transverse rod and the longitudinal rod are out-of-plane antisymmetric bending vibration excitation ceramics, the piezoelectric ceramic plates adhered to the left and right surfaces of the longitudinal rod are longitudinal rod in-plane bending vibration excitation ceramics, and the piezoelectric ceramic plates adhered to the left and right surfaces of the transverse rod are transverse rod in-plane bending vibration excitation ceramics.

Preferably, the rotor assembly is composed of a movable platform and platform supporting pieces, the movable platform is of a rectangular plate structure, the platform supporting pieces comprise rectangular plates provided with a certain number of pits with hemispherical structures and balls arranged in the pits, and the movable platform is in direct contact with the balls and forms a rolling pair.

Preferably, the base comprises a square plate, and a stator assembly connecting piece and a rotor assembly connecting piece which are arranged on the square plate, the stator assembly connecting piece consists of four L-shaped cushion tables, rubber thimbles are arranged at the vertical ends of the L-shaped cushion tables, the four L-shaped cushion tables are placed along the four corners of the rectangle and are fixedly connected with the square plate through screws, and the rubber thimbles are matched with stator fixing and mounting holes on the four corners of the square-shaped structural plate; the rotor assembly connecting piece comprises a U-shaped vertical plate and an elastic gasket, the U-shaped vertical plate is fixedly installed on the left side of the square plate through a sunk screw, a U-shaped opening faces the right side, and the elastic gasket is pressed in through the adjusting screw connecting platform supporting piece and the connecting surface.

Preferably, four corners of the square plate are provided with base fixing screws.

Preferably, the driving head is in a rectangular parallelepiped shape.

Compared with the prior art, the utility model has the advantages that: 1. the simple stator with the frame plate structure is adopted to directly drive the moving platform to move along the x direction and the y direction, so that the motor has the characteristics of quick response and micron-sized positioning accuracy; 2. all vibration modes of the motor are bending vibration, the operation control mode of the motor is simpler, and the utilization efficiency of the ceramic wafer is high; 3. the motor adopts the rubber thimble as the motor for clamping, thereby reducing the negative influence of the clamping part on the vibration of the motor and improving the running stability of the motor. 4. The four pairs of driving heads of the stator component alternately push the moving platform to do plane motion in pairs, so that the output power of the motor can be multiplied, and the motor can run more stably; 5. compared with a multi-stator planar motor, the motor has the advantages of smaller volume, more compact structure and higher mechanical integration level; 6. the piezoelectric planar motor driven by the stator with the frame plate structure has wide application prospect in the fields of high-precision platforms, spaceflight, robots, medical machinery and the like.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it.

Fig. 1 is a partial sectional view of the three-dimensional structure of the present invention;

fig. 2 is a schematic structural view of a stator assembly in the present invention;

fig. 3 is a schematic structural diagram of a mover assembly of the present invention;

FIG. 4 is a schematic structural view of the base of the present invention;

fig. 5 is a schematic view of an out-of-plane antisymmetric bending vibration mode of operation of the stator assembly of the present invention;

fig. 6 is a schematic view of the cross bar plane internal bending vibration working mode of the stator assembly of the present invention;

fig. 7 is a schematic view of the bending vibration working mode in the longitudinal bar surface of the stator assembly of the present invention;

fig. 8 is a diagram illustrating the arrangement of the positions of the piezoelectric ceramics and the arrangement of the polarization directions thereof in the stator assembly of the present invention;

fig. 9 is a diagram illustrating the arrangement of the positions of the piezoelectric ceramics in the stator assembly and the power supply configuration thereof according to the present invention;

FIG. 10 is a first step of the stator assembly moving the mobile platform in a plane during one cycle of vibration; FIG. 10a is a schematic view showing the in-plane motion state of a xoy plane rod body, wherein FIG. 10b is a schematic view showing the driving state of an xoz plane longitudinal rod, and wherein FIG. 10c is a schematic view showing the driving state of a yoz plane cross rod;

fig. 11 is a second step of the stator assembly pushing the moving platform to make a planar motion within one vibration cycle, where fig. 11a is a schematic view of an in-plane motion state of the xoy planar bar body, fig. 11b is a schematic view of a driving state of the xoz planar vertical bars, and fig. 11c is a schematic view of a driving state of the yoz planar horizontal bar;

fig. 12 is a third step of the stator assembly pushing the moving platform to make a planar motion within one vibration cycle, wherein fig. 12a is a schematic view of an xoy planar rod in-plane motion state, fig. 12b is a schematic view of an xoz planar vertical rod driving state, and fig. 12c is a schematic view of a yoz planar horizontal rod driving state;

fig. 13 is a fourth step of the stator assembly pushing the moving platform to make a planar motion within one vibration cycle, where fig. 13a is a schematic view of an in-plane motion state of the xoy planar bar body, fig. 13b is a schematic view of a driving state of the xoz planar vertical bars, and fig. 13c is a schematic view of a driving state of the yoz planar horizontal bar;

the attached drawings are marked as follows: 1-a stator component, 11-a stator base body, 111-a square structural plate, 112-a longitudinal rod, 113-a transverse rod, 12-a piezoelectric ceramic piece and 13-a driving head; 2-mover assembly, 21-moving platform, 22-platform support, 221-rectangular plate, 222-ball bearing; 3-a base, 31-a square plate, 32-a stator component connecting piece, 33-a rotor component connecting piece, 34-a base fixing screw, 321-an L-shaped cushion table, 322-a rubber thimble, 331-a U-shaped vertical plate and 332-an elastic gasket.

Detailed Description

The following detailed description will be made with reference to the accompanying drawings and examples, so that how to implement the technical means of the present invention to solve the technical problems and achieve the technical effects can be fully understood and implemented.

Referring to fig. 1 to 4, the frame plate structure based stator piezoelectric driven planar motor is composed of a stator assembly 1, a rotor assembly 2 and a base 3, wherein the stator assembly 1 is connected with the rotor assembly 2 and is arranged on the base 3, and a rolling pair moving in two directions is formed between the rotor assembly 2 and the stator assembly 1.

Referring to fig. 2, the stator assembly 1 is composed of a stator base 11, a piezoelectric ceramic plate 12 and a driving head 13; the stator base body 11 is of a frame plate structure integrally and comprises a square-shaped structural plate 111, four longitudinal rods 112 and four transverse rods 113, wherein the four longitudinal rods 112 are symmetrically distributed in the square-shaped structural plate along central lines in an upper-lower pairwise manner, the four transverse rods 113 are symmetrically distributed in a left-right pairwise manner along the central lines, through holes are formed in four corners of the square-shaped structural plate 111 to improve working vibration patterns, round corners are formed in the corners of the sides, and stator fixing and mounting holes are formed in the centers of four round; the longitudinal rod 112 and the transverse rod 113 are both in a square strip structure, a hole with a certain depth is drilled in the longitudinal rod 112 and the middle position of the front surface of the end part is provided with a driving head 13, and the driving head 13 is in a cuboid shape; the piezoelectric ceramic plates 12 are arranged in pairs and are adhered to the periphery of the same position of the longitudinal rod 112 and the transverse rod 113 along the central direction of the frame plate, wherein the piezoelectric ceramic plates adhered to the upper surface and the lower surface of each rod are out-of-plane antisymmetric bending vibration exciting ceramics, the piezoelectric ceramic plates adhered to the left surface and the right surface of the longitudinal rod 112 are longitudinal rod in-plane bending vibration exciting ceramics, and the piezoelectric ceramic plates adhered to the left surface and the right surface of the transverse rod 113 are transverse rod in-plane bending vibration exciting ceramics;

referring to fig. 3, the mover assembly includes a movable platform 21 and a platform support 22, the movable platform 21 is in a rectangular plate structure, the platform support 22 includes a rectangular plate 221 having a number of recesses in a hemispherical structure and balls 222 installed in the recesses, and the movable platform 21 and the balls 222 are in direct contact and form a rolling pair;

referring to fig. 4, the base 3 includes a square plate 31, and a stator assembly connector 32 and a mover assembly connector 33 mounted on the square plate, the stator assembly connector 32 is composed of four pad stages 321 disposed along four corners of the rectangle, the pad stages 321 are L-shaped three-dimensional, a rubber thimble 322 is disposed at a vertical end of the L-shaped three-dimensional pad stages 321, and the L-shaped pad stages 321 are fixedly connected with the square plate 31 through screws; the rotor assembly connecting piece 33 comprises a vertical plate 331 and an elastic gasket 332, the vertical plate 331 is in a U-shaped three-dimensional structure and is fixedly arranged on the left side of the square plate 31 through a sunk screw, a U-shaped opening faces towards the right, the vertical plate 331 is connected with the platform supporting piece 22 through an adjusting screw, and the elastic gasket 332 is pressed into a connecting surface; the stator assembly 1 is arranged at the horizontal end of the L-shaped cushion table 321, the positioning hole of the stator assembly 1 corresponds to the rubber thimble 322 arranged at the vertical end of the L-shaped cushion table 321, so that the stator assembly 1 is fixedly mounted, the movable platform 21 is arranged between the stator assembly 1 and the platform supporting piece 22, the upper surface of the movable platform is in contact with the ball 222 to form a rolling pair, the lower surface of the movable platform is in direct contact with the driving head 13 to provide friction, and the movable platform 21 is arranged between the stator assembly 1 and the platform supporting piece 22, so that the compression degree of the platform supporting piece 22 can be adjusted by using an adjusting screw and the elastic gasket 332, and the purpose of adjusting the pre-pressure between the.

Referring to fig. 5 to 7, the working vibration mode of the piezoelectric planar motor driven by the stator based on the frame plate structure includes specific transverse and longitudinal rod out-of-plane antisymmetric bending vibration, transverse rod in-plane bending vibration and longitudinal rod in-plane bending vibration of the stator assembly, and is characterized in that when the stator assembly 1 performs out-of-plane antisymmetric bending vibration, the longitudinal rod 112 and the transverse rod 113 vibrate back and forth along the normal (or z) direction of the stator base body 11, and at any moment, the vibration directions of the longitudinal rod and the transverse rod are symmetrically opposite, so that the driving heads 13 on the longitudinal rod 112 and the transverse rod 113 are in dynamic contact with and separate from the moving platform 21, and only two pairs of driving heads 13 are in contact with the moving platform 21 at any moment. When the stator assembly 1 does bending vibration in the surface of the longitudinal rod, the longitudinal rod 112 vibrates in the x direction in the surface of the stator base body, so that the driving head 13 on the longitudinal rod can push the moving platform 21 to slide in the x direction. When the stator assembly 1 performs transverse rod in-plane bending vibration, the transverse rod 113 can vibrate in the y direction in the stator base body plane, so that the driving head 13 on the transverse rod can push the moving platform 21 to slide in the y direction.

Referring to fig. 8 to 9, a method for operating a frame plate structure stator-based piezoelectric planar motor is characterized in that when three groups of piezoelectric ceramic plates in the piezoelectric ceramic plates 12 on the stator assembly are respectively fed with three-phase alternating current power simple harmonic signals with certain amplitude and frequency close to the three-phase working mode frequency of the stator substrate, and the electric power signal applied to the out-of-plane antisymmetric bending vibration excitation ceramic group and the electric power signal applied to the cross-bar in-plane bending vibration excitation ceramic group and the longitudinal-bar in-plane bending vibration excitation ceramic group are out of phase difference of 90 ° in time, the stator can be excited to perform three-phase working mode resonance and vibration coupling is utilized, so that the driving heads 13 of the longitudinal bar 112 and the cross bar 113 respectively synthesize elliptical trajectories which advance along the xOz and yOz planes, and the moving platform 21 is pushed to move along the x plane by the friction coupling effect between the driving heads 13 and the moving platform 21, The y-direction movement further pushes the moving platform 21 to make a planar movement.

Referring to fig. 10 to 13, if one vibration cycle T of the stator is equally divided into four periods, and it is assumed that the initial state of the stator is: the vertical rod 112 is in the biggest left bend in the face, the horizontal rod 113 is in the biggest right bend in the face, and vertical rod 112, horizontal rod 113 all are in the zero curved state of off-plane, because the motion condition of four vertical rods is unanimous, and the motion condition of four horizontal rods is unanimous to one of them horizontal rod, the vertical rod signal, then the stator promotes moving platform 21 and makes the process of planar motion as follows:

referring to fig. 10(Step 1), in a time period of 0 to T/4, the out-of-plane antisymmetric bending vibration of the stator assembly 1 causes the up-and-down symmetric vertical rod 112 to bend from the out-of-plane zero bending state to the out-of-plane maximum up bending state, the driving head 13 on the vertical rod contacts with the moving platform 21, the in-plane bending vibration causes the vertical rod 112 to return from the in-plane maximum left bending state to the zero bending state, and the driving head 13 on the vertical rod moves from a to B, so as to push the moving platform 21 to move one Step along the x direction; meanwhile, the out-of-plane antisymmetric bending vibration of the stator assembly 1 enables the cross bar 113 to be bent from the out-of-plane zero bending shape to the out-of-plane maximum downward bending shape, the driving head 13 on the cross bar is separated from the moving platform 21, the in-plane bending vibration enables the cross bar 113 to be restored from the in-plane maximum right bending shape to the zero bending shape, and the driving head 13 on the cross bar moves from E to F.

Referring to fig. 11(Step 2), in a time period from T/4 to T/2, the out-of-plane antisymmetric bending vibration of the stator assembly 1 makes the up-and-down symmetric vertical rod 112 return to a zero-bending shape from the out-of-plane maximum up-bending shape, the driving head 13 on the vertical rod contacts with the moving platform 21, the in-plane bending vibration makes the vertical rod 112 bend from the in-plane zero-bending shape to the in-plane maximum right-bending shape, and the driving head 13 on the vertical rod moves from B to C, so as to push the moving platform 21 to move one Step along the x direction; at the same time, the out-of-plane antisymmetric bending vibration of the stator assembly 1 causes the crossbar 113 to return from the out-of-plane maximum sag to a zero bend. The driving head 13 on the cross bar is separated from the moving platform 21, the in-plane bending vibration enables the cross bar 113 to be bent from the in-plane zero bending shape to the in-plane maximum left bending shape, and the driving head 13 on the cross bar moves from F to G.

Referring to fig. 12(Step 3), in a time period of T/2 to 3T/4, the out-of-plane antisymmetric bending vibration of the stator assembly 1 causes the up-and-down symmetric vertical rod 112 to be bent from the out-of-plane zero bending state to the out-of-plane maximum downward bending state, the driving head 13 on the vertical rod is separated from the moving platform 21, the in-plane bending vibration causes the vertical rod 112 to be restored from the in-plane maximum right bending state to the zero bending state, and the driving head 13 on the vertical rod moves from C to D; at the same time, the out-of-plane antisymmetric bending vibration of the stator assembly 1 causes the crossbar 113 to bend from an out-of-plane zero bend to an out-of-plane maximum upward bend. The driving head 13 on the cross rod is in contact with the moving platform 21, the cross rod is restored to be in a zero-bending shape from the maximum left-bending shape in the plane through in-plane bending vibration, and the driving head 13 on the cross rod moves from G to H, so that the moving platform 21 is pushed to move one step along the y direction.

Referring to fig. 13(Step4), in a time period of 3T/4-T, the out-of-plane antisymmetric bending vibration of the stator assembly 1 enables the up-and-down symmetric vertical rod 112 to return to a zero-bending shape from the out-of-plane maximum downward bending shape, the driving head 13 on the vertical rod is separated from the moving platform 21, the in-plane bending vibration enables the vertical rod 112 to be bent from the in-plane zero-bending shape to the maximum left-bending shape, and the driving head 13 on the vertical rod moves from D to a; at the same time, the out-of-plane antisymmetric bending vibration of the stator assembly 1 causes the crossbar 113 to return from the out-of-plane maximum upward bow to a zero bow. The driving head 13 on the cross bar is contacted with the moving platform 21, the in-plane bending vibration causes the cross bar 113 to be bent from the in-plane zero bending shape to the in-plane maximum right bending shape, and the driving head 13 on the cross bar moves from H to E. Thereby pushing the moving platform 21 to move one step in the y direction.

Referring to fig. 10 to 13, each time the stator assembly 1 completes one vibration cycle T, the driving heads on the crossbar and the crossbar complete one elliptical motion track, and the driving heads on the crossbar and the crossbar push the moving platform 2 to move in the x direction and the y direction alternately. As the stator assembly 1 repeats the vibration cycle, the moving platform 2 is pushed forward in the x and y directions. If the out-of-plane inversion symmetry bending vibration mode is reversed, the motion direction of the mobile platform is reversed if the lead-lag phase relation of the driving voltage of the longitudinal rod in-plane bending vibration mode and the driving voltage of the transverse rod in-plane bending vibration mode is obtained.

Example (b): the invention relates to a piezoelectric planar motor driven by a stator based on a frame plate structure, which comprises a stator component 1, a rotor component 2 and a base 3, wherein the stator component 1 is connected with the rotor component 2 and is arranged on the base 3, and a rolling pair moving in two directions is formed between the rotor component 2 and the stator component 1; the base is provided with a fixing bolt 34 for fixedly mounting the motor on other mechanisms.

As shown in fig. 2, the stator assembly 1 includes a stator base 11, a piezoelectric ceramic plate 12 and a driving head 13, wherein the stator base 11 is formed by cutting a number 45 steel plate with a size of 59.2mm × 59.2mm × 4.7mm, and the whole stator assembly is of a frame plate structure and includes a square structural plate 111, four vertical rods 112 arranged inside the square structural plate and symmetrically distributed along a central line in pairs from top to bottom, and four horizontal rods 113 arranged symmetrically distributed along a central line in pairs from left to right; four corners of the stator base body 11 are drilled with through holes with the aperture of phi 5mm for improving the flexibility of the stator structure, and the corners of the side surfaces are provided with round corners and the centers of the round corner surfaces are provided with stator mounting holes with the aperture of phi 2.5mm for fixing the stator assembly 1. The cross rod 113 and the longitudinal rod 112 are square rod bodies and have the same size, the cross section of each rod is 6mm multiplied by 4.7mm, the length of each rod is 16.85mm, and a slender hole with the aperture of phi 2.6mm and the depth of 14mm is formed in the center of each rod body, so that the frequency consistency of the three-phase working vibration mode of the stator is realized, and the rigidity of the rod bodies is reduced. 32 piezoelectric ceramic pieces 12 are selected as PTZ-8, the size is 5mm multiplied by 4mm multiplied by 0.45mm, the piezoelectric ceramic pieces are symmetrically distributed on the periphery of the same position of the rod body and are pasted at the position where the working vibration mode strain of the stator base body is maximum so as to maximize the motor, the piezoelectric ceramic pieces pasted on the upper surface and the lower surface of each rod are out-of-plane antisymmetric bending vibration excitation ceramics, the piezoelectric ceramic pieces pasted on the left surface and the right surface of the longitudinal rod 112 are longitudinal rod in-plane bending vibration excitation ceramics, and the piezoelectric ceramic pieces pasted on the left surface and the right surface of the transverse rod 113 are transverse rod in-plane bending vibration excitation ceramics; the driving head 13 is in a cuboid shape, the size of the driving head is 3mm multiplied by 1.5mm multiplied by 0.8mm, the driving head is arranged in the middle of the rod end in a welding or sticking mode, a layer of high-performance friction-resistant material such as polyvinylidene fluoride friction material is coated on the surface of the driving head 13, and the purpose is to increase the friction driving force between the driving head 13 of the stator component and the moving platform 2 and prolong the service life of the motor;

as shown in fig. 3, the mover assembly 2 is composed of a movable platform 21 and a platform support 22, wherein the movable platform 21 has a rectangular plate structure and a size of 104mm × 86mm, a layer of high-friction wear-resistant material is coated on a lower surface of the movable platform, an upper surface of the movable platform is smooth, the platform support 22 includes a rectangular plate 221 and balls 222, wherein an outer peripheral size of the rectangular plate 221 is 150mm × 110mm, 16 recesses with a diameter of 3.3mm and a depth of 1.6mm are machined on the lower surface of the rectangular plate 221, and the balls 222 have a diameter of 3.2mm and 16 in total and are mounted in the recesses of the rectangular plate 221. The moving platform 2 is in direct contact with the balls 222 to form a rolling pair, and the moving platform 2 is in direct contact with the driving head 13 to provide friction force;

as shown in fig. 4, the base 3 includes a square plate 31, and a stator assembly connector 32 and a mover assembly connector 33 mounted on the square plate, the four corners of the square plate 31 are provided with base fixing screws 34, the stator assembly connector 32 is composed of four L-shaped pad platforms 321, the L-shaped pad platforms 321 are placed along the four corners of the rectangle and are fixedly connected with the square plate 31 through screws, wherein the horizontal end of each L-shaped pad platform 321 is used for placing a stator assembly, the vertical end of each L-shaped pad platform 321 is provided with a rubber thimble 322 and corresponds to a stator assembly fixing mounting hole, and the rubber thimble 322 is pushed into the four stator fixing mounting holes to realize the fixed mounting of the stator assembly 1; the rotor assembly connecting piece 33 comprises a U-shaped vertical plate 331 and an elastic gasket 332, the U-shaped vertical plate 331 is fixedly arranged on the left side of the square plate 31 through a countersunk head screw, a U-shaped opening faces towards the right, the U-shaped vertical plate 331 is connected with the platform supporting piece 22 through an adjusting screw, and the elastic gasket 332 is pressed into a connecting surface; the moving platform 21 is arranged between the stator assembly 1 and the platform supporting piece 22, so that the pressing degree of the platform supporting piece 22 can be adjusted by using an adjusting screw and the elastic gasket 332, and the aim of adjusting the pre-pressure between the stator assembly 1 and the moving platform 21 is fulfilled;

as shown in fig. 5 to 7, the operation mode of the planar motor of the present invention is to excite a specific vibration mode of the stator assembly 1 to drive the driving head 13 located at the middle position of the end of the longitudinal rod to make an elliptical motion along the xOz plane, and the driving head 13 located at the middle position of the end of the transverse rod to make an elliptical motion along the yOz plane, so as to push the moving platform 2 to slide along the x and y directions by virtue of the friction coupling effect between the driving head 13 and the moving platform 21, and further push the moving platform 21 to make a planar motion. The specific working vibration modes of the stator assembly 1 comprise three-phase working vibration modes such as out-of-plane antisymmetric bending vibration of the longitudinal rod 112 and the transverse rod 113 of the stator base body, in-plane bending vibration of the longitudinal rod 112, in-plane bending vibration of the transverse rod 113 and the like. The out-of-plane antisymmetric bending vibration is mainly used for realizing dynamic contact and separation between the stator assembly 1 and the moving platform 21, and the in-plane bending vibration of the longitudinal rod 112 and the transverse rod 113 is respectively used for driving the moving platform 21 to move along the x direction and the y direction. The motor synthesizes an elliptical motion track along an xOz plane on the driving head 13 of the longitudinal rod based on the in-plane bending vibration and the out-of-plane antisymmetric bending vibration of the longitudinal rod 112, and pushes the moving platform 21 to move along the x direction according to the elliptical motion track; by using the in-plane bending vibration and the out-of-plane antisymmetric bending vibration of the cross bar 113, an elliptical motion track along the yOz plane is synthesized on the driving head 13 of the cross bar, and the moving platform 21 is pushed to move along the y direction according to the elliptical motion track.

As shown in fig. 8 to 9, in order to effectively and correctly excite the three-phase working mode of the stator assembly 1, a reasonable polarization power supply configuration needs to be performed on the piezoelectric ceramic sheet 12, and for 16 pieces of out-of-plane antisymmetric bending vibration excitation ceramics, the out-of-plane antisymmetric bending vibration excitation ceramics 12 adhered to the upper surface of the longitudinal bar 112 are required to be perpendicular to the adhering surface and to be polarized in the direction opposite to the normal direction and pointing to the stator assembly 1 (indicated by "+"); the out-of-plane antisymmetric bending-excited ceramic 12 on the lower surface of the longitudinal rod 112 is perpendicular to the pasting surface and polarized away from the stator assembly 1 in the same direction as the normal direction (indicated by "-"); the out-of-plane antisymmetric bending vibration excitation ceramics 12 adhered on the upper surface of the cross bar 113 are all vertical to the adhering surface and are polarized in the direction opposite to the stator assembly 1 (indicated by a negative line) which is the same as the normal direction; the out-of-plane antisymmetric bend-excited ceramic 12 on the lower surface of the beam 113 is polarized perpendicular to the pasting surface and opposite to the normal direction toward the stator assembly 1 (indicated by "+"). For 16 pieces of in-plane bending vibration excitation ceramic, the in-plane bending vibration excitation ceramic 13 adhered to the left surface of the longitudinal rod 112 is required to be perpendicular to the adhering surface and to be polarized in the direction opposite to the stator assembly 1 (indicated by "-") which is the same as the normal direction; the in-plane bending vibration excitation ceramics 13 adhered to the right surface of the longitudinal rod 112 are all vertical to the adhering surface and are polarized in the direction opposite to the normal direction and pointing to the stator assembly 1 (indicated by "+"); the plane bending vibration exciting ceramic 13 adhered to the left surface of the cross bar 113 is vertical to the adhering surface and is polarized in the direction opposite to the normal direction and pointing to the stator assembly 1 (indicated by "+"); the in-plane bending vibration exciting ceramic 13 attached to the right surface of the cross bar 113 is polarized in the direction opposite to the stator assembly 1 (indicated by "-") perpendicular to the attached surface and in the same direction as the normal line. Because the phase difference between the electric signal for driving the out-of-plane anti-symmetric bending vibration and the electric signal for driving the in-plane anti-symmetric bending vibration is 90 degrees, the same-frequency sinusoidal excitation voltage Usin ω t is required to be applied to the surfaces of all the out-of-plane anti-symmetric bending vibration excitation ceramics. The same-frequency cosine excitation voltage Ucos omegat is introduced to the surfaces of all the in-plane bending vibration excitation ceramics. Meanwhile, the adhesion surfaces of the piezoelectric ceramic plate and the stator substrate 11 are required to be grounded and connected with zero excitation voltage. Wherein U is the amplitude of the alternating power supply and is controlled between 150v and 300v, and omega is the excitation frequency of the alternating power supply and is very close to the frequency of the working mode of the stator.

The utility model discloses a theory of operation: when three groups of piezoelectric ceramic plates in the stator assembly piezoelectric ceramic plates are respectively introduced with three-phase alternating current power simple harmonic signals which have certain amplitude and are close to the three-phase working vibration mode frequency of the stator base body, and the electric power signals applied to the out-of-plane antisymmetric bending vibration excitation ceramic group and the electric power signals applied to the cross rod in-plane bending vibration excitation ceramic group and the longitudinal rod in-plane bending vibration excitation ceramic group are 90 degrees different in time, three working vibration modes of rod body out-of-plane antisymmetric bending vibration, cross rod in-plane bending vibration and longitudinal rod in-plane bending vibration can be excited, the center of the frame plate is taken as an origin, the central line of the frame plate parallel to the cross rod is taken as an x axis, the central line of the frame plate parallel to the longitudinal rod is taken as a y axis, and the axis passing through the; the linear superposition of the reciprocating bending vibration of the longitudinal rod 112 along the x-axis direction (longitudinal rod plane bending vibration) and the reciprocating bending vibration along the z-axis direction (out-of-plane antisymmetric bending vibration) enables mass points on the driving head 13 at the end part of the longitudinal rod to generate an elliptical motion track on the xoz plane; the linear superposition of the reciprocating bending vibration of the crossbar 113 along the y-axis direction (crossbar in-plane bending vibration) and the reciprocating bending vibration along the z-axis direction (out-of-plane antisymmetric bending vibration) causes mass points on the driving heads 13 at the ends of the crossbar to generate an elliptical motion trajectory on the yoz plane, and the driving heads 13 at the ends of the crossbar and the crossbar are alternately in contact with the moving platform 21 without intervals. The piezoelectric stator utilizes the elliptical motion tracks coupled by the driving head at the end part of the rod body on the xoz and yoz surfaces and pushes the moving platform 21 to move along the x direction and the y direction by virtue of the friction coupling action between the driving head 13 and the moving platform 21, and further pushes the moving platform 21 to do plane motion.

The foregoing is illustrative of the preferred embodiments of the present invention only, and is not to be construed as limiting the claims. The present invention is not limited to the above embodiments, and the specific structure thereof is allowed to be changed. All changes which come within the scope of the independent claims of the invention are to be embraced within their scope.

Claims

1. The utility model provides a piezoelectric planar motor based on frame plate structure stator drive which characterized in that: the stator assembly comprises a stator assembly (1), a rotor assembly (2) and a base (3); the stator assembly (1) is connected with the rotor assembly (2) and is arranged on the base (3), and a rolling pair moving in two directions is formed between the rotor assembly (2) and the stator assembly (1);

stator module (1) includes stator base member (11), piezoceramics piece (12) and drive head (13), stator base member (11) including a mouthful font structural slab (111) and inside about two liang along four vertical poles (112) of central line symmetric distribution, control two liang along four horizontal poles (113) of central line symmetric distribution, piezoceramics piece (12) attached in four sides of vertical pole (112) and horizontal pole (113), drive head (13) set up the one end of keeping away from a mouthful font structural slab (111) in vertical pole (112) and horizontal pole (113).

2. A frame plate structure stator drive based piezoelectric planar motor according to claim 1, wherein: the piezoelectric ceramic plates (12) adhered to the upper and lower surfaces of the transverse rod (113) and the longitudinal rod (112) are out-of-plane antisymmetric bending vibration exciting ceramics, the piezoelectric ceramic plates (12) adhered to the left and right surfaces of the longitudinal rod (112) are longitudinal rod (112) in-plane bending vibration exciting ceramics, and the piezoelectric ceramic plates (12) adhered to the left and right surfaces of the transverse rod (113) are transverse rod (113) in-plane bending vibration exciting ceramics.

3. A frame plate structure stator drive based piezoelectric planar motor according to claim 1, wherein: the rotor assembly (2) is composed of a movable platform (21) and platform supporting pieces (22), the movable platform (21) is of a rectangular plate structure, the platform supporting pieces (22) comprise rectangular plates (221) provided with a certain number of pits with hemispherical structures and balls (222) arranged in the pits, and the movable platform (21) is in direct contact with the balls (222) to form a rolling pair.

4. A frame plate structure stator drive based piezoelectric planar motor according to claim 1, wherein: the base (3) comprises a square plate (31), and a stator assembly connecting piece (32) and a rotor assembly connecting piece (33) which are arranged on the square plate (31), wherein the stator assembly connecting piece (32) consists of four L-shaped cushion tables (321), the vertical end of each L-shaped cushion table (321) is provided with a rubber thimble (322), the four L-shaped cushion tables (321) are placed along the four corners of the rectangle and are fixedly connected with the square plate (31) through screws, and the rubber thimble (322) is matched with stator fixing and mounting holes on the four corners of the square-shaped structural plate (111); the rotor assembly connecting piece (33) comprises a U-shaped vertical plate (331) and an elastic gasket (332), the U-shaped vertical plate (331) is fixedly installed on the left side of the square plate (31) through a countersunk head screw, a U-shaped opening faces the right, and the elastic gasket (332) is pressed into the platform supporting piece (22) and the connecting surface through an adjusting screw.

5. A frame plate structure stator drive based piezoelectric planar motor according to claim 4, wherein: four corners of the square plate (31) are provided with base fixing screws (34).

6. A frame plate structure stator drive based piezoelectric planar motor according to claim 1, wherein: the driving head (13) is in a cuboid shape.