CN101697460B - Two-way single-mode ramp type tower-shaped linear ultrasonic motor and electric excitation method - Google Patents
Two-way single-mode ramp type tower-shaped linear ultrasonic motor and electric excitation method Download PDFInfo
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- CN101697460B CN101697460B CN200910185020XA CN200910185020A CN101697460B CN 101697460 B CN101697460 B CN 101697460B CN 200910185020X A CN200910185020X A CN 200910185020XA CN 200910185020 A CN200910185020 A CN 200910185020A CN 101697460 B CN101697460 B CN 101697460B
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Abstract
The invention relates to a two-way single-mode ramp type tower-shaped linear ultrasonic motor and an electric excitation method thereof, and the two-way single-mode ramp type tower-shaped linear ultrasonic motor belongs to the ultrasonic motors and comprises a stator, piezoelectric ceramics and a guide rail. The guide rail is pressed on a stator drive foot by pre-pressure and inclines with a Theta angle. The stator comprises the drive foot, a flexible amplifying round hole and a tower-shaped metal body of two rectangular columns, and six piezoelectric ceramics are symmetrically adhered on the outer surface of the tower-shaped metal body and used for exciting two orthogonal working modes (x-z section bending vibration mode and y-z section symmetrical vibration mode including local bending vibration) of the stator. When a single-phase voltage signal is used for exciting any one working mode of the stator, a motion curve of mass points on the surface of the stator drive foot is a skew line oppositely to the guide rail, and the skew direction of the skew line is changed with the change of the working modes, thereby pushing the guide rail to move in a forward and reverse way. The ultrasonic motor has compact structure, high drive efficiency, large thrust-weight ratio and reliable working.
Description
Technical field:
Bidirectional single-mode inclined track tower-shaped linear ultrasonic motor of the present invention and electric excitation mode belong to the ultrasound electric machine field.
Background technology:
Ultrasound electric machine is to utilize the inverse piezoelectric effect of piezoelectric ceramic and the new type power output device of ultrasonic vibration.Wherein, the rectilinear motion ultrasound electric machine belongs to a kind of of ultrasound electric machine.Compare with the traditional electrical magneto, ultrasound electric machine has low-speed and large-torque, and transient state is corresponding fast, the positioning accuracy height, control characteristic is good, does not produce advantages such as magnetic field is not affected by magnetic fields yet, drive in precision, medicine equipment, fields such as Aero-Space have a wide range of applications.
Through the existing literature search that is similar to the ultrasound electric machine of turriform is found, the application number that Zhao Chun life etc. is delivered is 200710134000 Chinese invention patent Shen Qing Publication specification " ultrasound electric machine with two degrees of freedom ", this public announcement of a patent application specification has proposed a kind of ultrasound electric machine with two degrees of freedom, this motor stator is to have the arch oscillator of approximate turriform of quadrature symmetrical structure and the piezoelectric ceramic piece of eight unidirectional polarization is formed, the arch oscillator of approximate turriform contains four rectangular column legs, and eight piezoelectric ceramic pieces stick on respectively on the lateral surface of four rectangular column legs of arch oscillator.This motor utilizes the curved symmetry-antisymmetry mode of shaking in part that contains of quadrature to carry out work, when after input two-phase phase difference is the same frequency sinusoidal drive signals of pi/2 on four piezoelectric ceramic pieces on the symmetrical rectangular column of the arch oscillator side, can in the yoz plane, inspire symmetry-antisymmetry mode, make the particle on the arch oscillator driving head produce elliptic motion, drive mover along y to moving.Equally, after input two-phase phase difference is the same frequency sinusoidal drive signals of pi/2 on four piezoelectric ceramic pieces on the rectangular column side of symmetry before and after the arch oscillator, can in the xoz plane, inspire symmetry-antisymmetry mode, make the particle on the arch oscillator driving head produce elliptic motion, drive mover along x to moving.Therefore, this motor adopts single oscillator to drive as mover, can realize the forward and reverse motion of two directions, makes its compact conformation, is easy to miniaturization.
The weak point of above-mentioned motor is: when this motor was used to drive mover and makes the rectilinear motion of single-degree-of-freedom, only inspiring symmetry-antisymmetry mode in the yoz plane or the symmetry-antisymmetry mode in the yoz plane can achieve the goal.Therefore, the arch oscillator that contains the approximate turriform of four rectangular columns can be reduced to the turriform oscillator that contains two rectangular columns, makes the structure of motor simpler.
Find through literature search existing oblique rail shape linear ultrasonic motor, refer to " ultrasonic waves drives モ-タ-study self-criticism of the theoretical お I of principle び experiment " that Tian Niansheng delivers at " Japanese Applied Physics " (nineteen eighty-two the 51st volume the 6th phase 713-720 page or leaf), this article has carried out labor to the movement mechanism of the oblique rail shape of a kind of vibrating reed linear ultrasonic motor, the vibrating reed top of this motor contacts with guide pass, and with respect to the guide pass normal one inclination angle [theta] is arranged, show as the guide rail θ degree that tilted.The longitudinal vibration that goes out motor stator by the direct-drive of single-phase electricity signal, and indirectly the cycle contact force by vibrating reed top and guide pass motivates the curved of vibrating reed and shakes, thereby on the particle of vibrating reed on vibrating reed/guide rail contact-making surface, produce elliptic motion, promote guide rail movement.Its deficiency is: this motor can only one-way movement, can not be reverse.Find again in the retrieval, Elliptec company describes in detail the movement mechanism of the oblique rail shape of the product X15G of its company type Elliptec motor at company web page http://www.elliptec.com, the driving foot end of this motor contacts with guide pass, and with respect to the guide pass normal one inclination angle [theta] is arranged, show as the guide rail θ degree that tilted.Go out an operation mode of motor stator by single-phase direct-drive, and motivate another quadrature operation mode by the driving foot end of stator and the cycle contact force of guide pass indirectly, making its movement locus that drives sufficient end particle is elliptic motion, promotes guide rail movement.Because the oblique rail shape of X15G type Elliptec motor can go out two different operation modes frequently of motor stator by the direct-drive of single-phase electricity signal, makes it drive sufficient end particle and produces the opposite elliptical trajectory of the direction of motion, promotes guide rail and realizes forward and reverse motion.Its deficiency is: this motor adopts the stacked piezoelectric pottery as driving element, and price is more expensive; This motor can only provide the motive force of maximum 0.5N, has limited its scope of application.
The linear type ultrasound motor that proposes in above-mentioned three documents all by exciting the mode of oscillation of two quadratures simultaneously, produces elliptic motion on the particle of stator on stator/guide rail contact-making surface, promote guide rail movement.There is following deficiency in this:
1. to excite the mode of oscillation of two quadratures simultaneously, require two quadratures operation mode have a close resonance frequency;
2. because Theoretical Calculation and actual manufacturing tolerance, the contact of rotor when adding machine operation, the variation of temperature and load causes the resonance frequency of two quadrature operation modes that to a certain degree difference is arranged;
3. under the alternating signal excitation of single-frequency, because the resonance frequency of two quadrature operation modes has difference to a certain degree, cause two quadrature operation modes not ejected to greatest extent simultaneously, influenced the operational efficiency and the performance of motor, made that also the drivable frequency domain of motor is narrower.
One of way of head it off is the motivational techniques that adopt single mode to drive.The motivational techniques that adopt single mode to drive have the following advantages: the frequency invariance problem that does not have the composite mode ultrasound electric machine; Drivable frequency domain broad; The operational efficiency of motor is higher; Anti-interference power is strong during work; Can adopt the self-oscillation driving power, be easy to realize miniaturization and integrated.
The literature search of the ultrasound electric machine through existing single mode is driven is found, " the two-way standing wave type linear ultrasonic motor " that Qian Xiaohua etc. deliver at " small and special electric machine " (2007 the 8th phase 28-30 pages or leaves), this article has proposed the rectangular plate type linear type ultrasound motor that a kind of single mode drives, and this motor has B3 and two operation modes of B4 (simultaneously a mode participation job can only be arranged).When B3 mode is worked, produce the skew lines motion that is tilted to the right on stator/guide rail contact-making surface on the particle of stator, the mover positive movement; When B4 mode is worked, produce the skew lines motion that is tilted to the left on stator/guide rail contact-making surface on the particle of stator, the mover counter motion.Its deficiency is: the clip position of stator is not placed near node, nodel line or the nodal section of operation mode, and this clamping that can cause stator is to the influence of operation mode and energy loss is increased; In order to take into account forward and reverse motion, its position that drives foot is not at the amplitude maximum simultaneously, and the vibrational energy utilance is not high.
Summary of the invention:
The present invention is directed to the deficiencies in the prior art, propose a kind of bidirectional single-mode inclined track tower-shaped linear ultrasonic motor.Purpose is to develop that a kind of single mode drives, stator drive the surperficial particle of foot with respect to the movement locus of guide rail be skew lines, can realize forward and reverse motion, simple in structure, thrust-weight ratio is big, exciting efficiency is high, vibrational energy utilance height, the fast linear type ultrasound motor of response speed.
Bidirectional single-mode inclined track tower-shaped linear ultrasonic motor of the present invention is made of stator and guide rail.It is characterized in that: described guide rail drives on the foot being pressed in stator under the effect of precompression, and the angle of guide rail and stator center line is that (90+ θ) spends, and wherein θ is greater than 0; Described stator integral body is the turriform metallic object, by driving be enough to and with drive left rectangular column and the right rectangular column that foot links to each other and constitute, above-mentioned driving foot also has flexible amplification circular hole with left rectangular column and right rectangular column connection; Above-mentioned piezoelectric ceramic one have six stick on accordingly above-mentioned left rectangular column and forward and backward, the outside totally six outer surfaces of right rectangular column, be used to excite in the stator x-z face symmetric vibration mode in the second order flexural vibration mode and y-z face; The principle of above-mentioned guide rail tiltangle size is: the mode amplitude is greater than the roughness R of stator and guide rail contact interface along the normal component of stator and guide rail contact interface
a, the amplitude of promptly setting the interior symmetric vibration mode of y-z face of son is U, then this mode of oscillation perpendicular to the normal vibration component of guide rail is: U
f=Ucos θ; The amplitude of setting the interior second order flexural vibration mode of x-z face of son is V, and then this mode of oscillation perpendicular to the normal vibration component of guide rail is: V
f=Vsin θ; Make stator driving guide rail effectively, must meet the following conditions: Ucos θ＞R
a, Vsin θ＞R
aSo, the range of choice of guide rail tiltangle: arcsin (R
a/ V)＜θ＜arccos (R
a/ U).
The electric excitation mode of above-mentioned bidirectional single-mode inclined track tower-shaped linear ultrasonic motor is characterized in that: establishing along slant rail to upper left to positive direction, is negative direction along slant rail to the bottom right; Two quadrature operation modes of stator are respectively symmetric vibration mode and the interior second order flexural vibration mode of x-z face in the y-z face; Wherein symmetric vibration mode is excited by two piezoelectric ceramic pieces that are attached to left rectangular column lateral surface and right rectangular column lateral surface respectively totally in the y-z face, when stator with the y-z face in during the symmetric vibration modal vibration, local curved the shaking of left side rectangular column and the generation of right rectangular column, and drive drives the sufficient local longitudinal vibration that produces; For guide rail, the movement locus that stator drives the surperficial particle of foot is a reciprocating skew lines, and the inclination angle is (90-θ) degree, promotes to be pressed in the guide rail that drives on the foot and produces positive movement.Wherein the second order flexural vibration mode is excited by four piezoelectric ceramic pieces that are attached to left rectangular column and the forward and backward surface of right rectangular column respectively totally in the x-z face, when stator with the x-z face in during the vibration of second order flexural vibration mode, drive foot and produce horizontal vibration; For guide rail, the movement locus that stator drives the surperficial particle of foot is a reciprocating skew lines, and the inclination angle is (180-θ) degree, promotes to be pressed in the guide rail that drives on the foot and produces counter motion.
Compare with background technology, the innovation part of bidirectional single-mode inclined track tower-shaped linear ultrasonic motor of the present invention is:
1. give birth to waiting at application number with Zhao Chun is that the ultrasound electric machine with two degrees of freedom that 200710134000 Chinese invention patent Shen Qing Publication specification " ultrasound electric machine with two degrees of freedom " proposes is compared, and the present invention has following innovation:
(a) innovation of structure: be reduced to the turriform oscillator that contains two rectangular columns of tower-shaped linear ultrasonic motor by the arch oscillator that contains the approximate turriform of four rectangular columns of ultrasound electric machine with two degrees of freedom, make the structure of motor simpler, be more conducive to realize miniaturization;
(b) innovation of operation mode: become in containing of tower-shaped linear ultrasonic motor of the local curved y-z face that shakes the compound operation mode of second order flexural vibration mode in the symmetric vibration mode and x-z face by the compound operation mode of the symmetry-antisymmetry of ultrasound electric machine with two degrees of freedom coplane.Change the reason of operation mode: through FEM (finite element) calculation, the symmetrical operation mode of the coplane of turriform oscillator and the model frequency difference of antisymmetry operation mode are bigger, and the amplitude of antisymmetry operation mode is less.And adopt the compound operation mode that contains second order flexural vibration mode in interior symmetric vibration mode of the local curved y-z face that shakes and the x-z face to address the above problem.
2. compare at the oblique rail shape of the vibrating reed linear ultrasonic motor that " ultrasonic waves drives モ-タ-study self-criticism of the theoretical お I of principle び experiment " literary composition proposes with referring to Tian Niansheng, refer to that the oblique rail shape of the vibrating reed linear ultrasonic motor that Tian Niansheng proposes can only promote the mover positive movement, can not counter motion.The bidirectional single-mode inclined track tower-shaped linear ultrasonic motor can promote mover and realize forward and reverse motion.
3. compare with the oblique rail shape of the X15G type Elliptec motor of Elliptec company, during the oblique rail shape of X15G type Elliptec motor-driven, produce elliptic motion, promote the mover rectilinear motion by stator is driven on the particle that drives foot on the foot/guide rail contact-making surface; This motor adopts the more expensive stacked piezoelectric pottery of price as driving element.When the bidirectional single-mode inclined track tower-shaped linear ultrasonic motor drives, drive the reciprocal skew lines motion that produces on the sufficient particle with respect to guide rail on the foot/guide rail contact-making surface, promote the mover rectilinear motion by stator is driven; This motor adopts low-cost common piezoelectric ceramic as driving element.
4. compare with the rectangular plate type linear type ultrasound motor that single mode that Qian Xiaohua etc. proposes at " two-way standing wave type linear ultrasonic motor " drives, the clip position of the stator of the rectangular plate type linear type ultrasound motor that single mode drives is not placed near node, nodel line or the nodal section of operation mode, and this clamping that can cause stator is to the influence of operation mode and energy loss is increased; In order to take into account forward and reverse motion, its position that drives foot is not at the amplitude maximum simultaneously, and the vibrational energy utilance is not high.Bidirectional single-mode inclined track tower-shaped linear ultrasonic motor clip position is placed near the operation mode nodel line, and this influence to operation mode is little and energy loss is reduced; It drives sufficient position at operation mode amplitude maximum simultaneously, vibrational energy utilance height.
5. bidirectional single-mode inclined track tower-shaped linear ultrasonic motor of the present invention, its maximum innovative point is: stator design has two quadrature operation modes, by making guide rail cant angle theta degree angle, when making stator with any one the mode work in two orthogonal modes, the movement locus that stator drives the surperficial particle of foot is a skew lines with respect to guide rail, and the incline direction of skew lines changes with the change of operation mode, thereby promotes the forward and reverse motion of guide rail.
Description of drawings:
Fig. 1. be bidirectional single-mode inclined track tower-shaped linear ultrasonic motor stator structure schematic diagram.Wherein Fig. 1-1 is a front view, and Fig. 1-2 is a vertical view.
Fig. 2. bidirectional single-mode inclined track tower-shaped linear ultrasonic motor structural representation.Wherein, a figure left side is an x-z direction schematic diagram, and the figure right side is a y-z direction schematic diagram.
Fig. 3. schematic diagram is arranged in the polarization of bidirectional single-mode inclined track tower-shaped linear ultrasonic motor piezoelectric ceramic.
Fig. 4. Fig. 5. bidirectional single-mode inclined track tower-shaped linear ultrasonic motor operation principle schematic diagram.
The number in the figure title: 1 drives foot; The 2 flexible circular holes that amplify; 3 left rectangular columns; 4 right rectangular columns; 5,6,7,8,9,10 piezoelectric ceramic; 11 turriform metallic objects.12 precompressions; 13 guide rails; 14,15, second order flexural vibrations nodel line in the 16x-z face; Second order flexural vibration mode in the 17x-z face; Symmetric vibration in the 18y-z face (local curved shaking) mode; 19,20,21, symmetric vibration (local curved shaking) nodel line in the 22y-z face; 23 stator support positions; 24 guide rail tiltangle degree.25 piezoelectric ceramic polarised directions; Symmetric vibration in the 26y-z face (local curved shaking) mode pumping signal; Second order flexural vibration mode pumping signal in the 27x-z face.28,29 stators drive sufficient end face particle motion trace; 30 stators drive sufficient end face particle motion trace and guide rail angle (90-θ) degree; 31 stators drive sufficient end face particle motion trace and guide rail angle (180-θ) degree; 32,33 guide rail movement directions.
Embodiment:
A kind of rectilinear motion ultrasound electric machine is made of stator and guide rail as shown in Figure 2, and its guide rail has tiltangle degree 24, is pressed on the stator by precompression 12, and its stator is by shown in Figure 1.Its characteristics: stator is to constitute by having a turriform metallic object 11 that drives 1, flexible amplification circular hole 2 of foot and two rectangular columns 3,4, the outer surface of turriform metallic object 11 is pasted with six piezoelectric ceramic 5,6,7,8,9,10 symmetrically, is used to excite the vibration of turriform metallic object 11.As shown in Figure 3, wherein, piezoelectric ceramic 6,7,9,10 is used to excite the second order flexural vibration mode 17 of turriform stator in the x-z face; Piezoelectric ceramic 5,8 is used to excite the turriform stator to include local curved symmetric vibration mode 18 of shaking at the y-z face.
On piezoelectric ceramic 5,8, apply symmetric vibration mode pumping signal 26 in the y-z face, E
1=Vsin (ω t) can excite the symmetric vibration mode 18 of stator as shown in Figure 4, and the driving foot that drives stator produces local longitudinal vibration; For guide rail, the movement locus that stator drives the surperficial particle of foot is a reciprocating skew lines 28, and it be (90-θ) degree with the angle 30 of guide rail, promote to be pressed in the guide rail of driving on sufficient along the upper left side to 32 positive movements.
In like manner, on piezoelectric ceramic 6,7,9,10, apply second order flexural vibration mode pumping signal 27 in the x-z face, E
2=Vsin ω t can excite the second order flexural vibration mode 17 of stator as shown in Figure 5, and the driving foot that drives stator produces tangential vibrations; For guide rail, the movement locus that stator drives the surperficial particle of foot is a reciprocating skew lines 29, and it be (180-θ) degree with the angle 31 of guide rail, promote to be pressed in the guide rail of driving on sufficient along the lower right to 33 counter motions.
Principles of structural design:
1. the size of guide rail tiltangle is suitable.The size of guide rail tiltangle directly influences the performability of motor.Select the principle of guide rail tiltangle size to be: the mode amplitude is greater than the roughness R of stator/guide rail contact interface along the normal component of stator/guide rail contact interface
a
The amplitude of setting the interior symmetric vibration mode of y-z face of son is U, and then this mode of oscillation perpendicular to the normal vibration component of guide rail is: U
f=Ucos θ;
The amplitude of setting the interior second order flexural vibration mode of x-z face of son is V, and then this mode of oscillation perpendicular to the normal vibration component of guide rail is: V
f=Vsin θ;
Make stator driving guide rail effectively, must meet the following conditions:
Ucosθ＞R
a，Vsinθ＞R
a
So, the range of choice of guide rail tiltangle: arcsin (R
a/ V)＜θ＜arccos (R
a/ U).
2. the pore size of flexible amplification circular hole 2 is suitable.The flexible pore size that amplifies circular hole 2 directly influences the longitudinal vibration amplitude and the intensity of stator.Therefore, the flexible pore size that amplifies circular hole 2 will be taken into account the needs of stator longitudinal vibration amplitude and intensity.
3. piezoelectric ceramic 6,7,9,10 is used to excite the second order flexural vibration mode 17 of stator in the x-z face, because during curved shaking, its crest or trough place strain maximum should be pasted on piezoelectric ceramic 6,7,9,10 respectively near the trough and crest of mode of oscillation 17 as far as possible, to improve launching efficiency; In like manner, piezoelectric ceramic 5,8 is used to excite symmetric vibration (the local curved shake) mode 18 of stator in the y-z face, should piezoelectric ceramic 5,8 be pasted on respectively near the curved trough and crest that shakes in part of mode of oscillation 18, to improve launching efficiency as far as possible.
4. second order flexural vibration mode 17 has 3 nodel lines 14,15,16 in the x-z face of stator, and symmetric vibration in the y-z face (local curved shaking) mode 18 has 4 nodel lines 19,20,21,22.Make nodel line 16,19,22 have identical z coordinate, and stator support is placed on this z coordinate place, to reduce to support interference operation mode.
5. the thickness of the front-back of above-mentioned left rectangular column 3 and right rectangular column 4 is progressively diminished to the turriform top by the turriform bottom, and such variable section structure has the effect of cumulative, makes the amplitude of the driving foot that is positioned at the turriform top become big.
Claims (3)
1. bidirectional single-mode inclined track tower-shaped linear ultrasonic motor, comprise stator, piezoelectric ceramic and guide rail, it is characterized in that: said stator is whole to be turriform metallic object (11), constitute by driving foot (1) and the left rectangular column (3) that links to each other with driving foot (1) and right rectangular column (4), above-mentioned driving foot (1) also has flexibility with left rectangular column (3) and right rectangular column (4) connection and amplifies circular hole (2);
Above-mentioned piezoelectric ceramic one have six (5,6,7,8,9,10) stick on accordingly above-mentioned left rectangular column (3) and forward and backward, the outside totally six outer surfaces of right rectangular column (4), be used to excite second order flexural vibration mode (17) and the interior symmetric vibration mode (18) of y-z face in the stator x-z face;
Above-mentioned guide rail (13) is pressed in stator by precompression (12) and drives on the foot (1);
Above-mentioned guide rail inclination angle is θ, and the principle of guide rail tiltangle (24) size is: the mode amplitude is greater than the roughness R of stator and guide rail contact interface along the normal component of stator and guide rail contact interface
a, the amplitude of promptly setting the interior symmetric vibration mode of y-z face of son is U, then this mode of oscillation perpendicular to the normal vibration component of guide rail is: U
f=Ucos θ; The amplitude of setting the interior second order flexural vibration mode of x-z face of son is V, and then this mode of oscillation perpendicular to the normal vibration component of guide rail is: V
f=Vsin θ; Make stator driving guide rail effectively, must meet the following conditions: Ucos θ＞R
a, Vsin θ＞R
aSo, the range of choice of guide rail tiltangle (24): arcsin (R
a/ V)＜θ＜arccos (R
a/ U).
2. the turriform stator of a bidirectional single-mode inclined track tower-shaped linear ultrasonic motor as claimed in claim 1 is characterized in that: the thickness of the front-back of above-mentioned left rectangular column (3) and right rectangular column (4) is progressively diminished to the turriform top by the turriform bottom.
3. the electric excitation mode of a bidirectional single-mode inclined track tower-shaped linear ultrasonic motor as claimed in claim 1 is characterized in that:
If along slant rail to upper left be positive direction, be negative direction along slant rail to the bottom right;
Two quadrature operation modes of stator are respectively symmetric vibration mode (18) and the interior second order flexural vibration mode (17) of x-z face in the y-z face;
Wherein symmetric vibration mode (18) is excited by two piezoelectric ceramic pieces (5,8) that are attached to left rectangular column (3) lateral surface and right rectangular column (4) lateral surface respectively totally in the y-z face, when stator with the y-z face in symmetric vibration mode (18) when vibration, left rectangular column (3) and right rectangular column (4) produce local curved shaking, and drive driving foot (1) produces local longitudinal vibration; For guide rail, the movement locus that stator drives the surperficial particle of foot is a reciprocating skew lines (28), and it be (90-θ) degree with the angle (30) of guide rail, promotes to be pressed in the guide rail positive movement (32) of driving on sufficient;
Wherein second order flexural vibration mode (17) is excited by four piezoelectric ceramic pieces (6,7,9,10) that are attached to left rectangular column (3) and the forward and backward surface of right rectangular column (4) respectively totally in the x-z face, when stator with the x-z face in second order flexural vibration mode (17) when vibration, drive foot (1) and produce horizontal vibration; For guide rail, the movement locus that stator drives the surperficial particle of foot is a reciprocating skew lines (29), and it be (180-θ) degree with the angle (31) of guide rail, promotes to be pressed in the guide rail counter motion (33) of driving on sufficient.
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| CN102931871B (en) * | 2012-11-02 | 2016-05-04 | 南京航空航天大学 | A kind of paraboloid shape linear ultrasonic motor |
| CN103825492B (en) * | 2013-05-15 | 2016-12-28 | 南京航空航天大学 | A kind of piezoelectricity motor |
| CN104617812A (en) * | 2015-02-15 | 2015-05-13 | 金陵科技学院 | Anti-friction modal-driven tower-shaped piezoelectric motor and drive mode thereof |
| CN104601039B (en) * | 2015-02-15 | 2017-01-18 | 金陵科技学院 | Drive method of anti-friction and modal driven oblique-rotor tower-shaped piezoelectric motor |
| CN105553327A (en) * | 2016-02-02 | 2016-05-04 | 吉林大学 | Piezoelectric vibration travelling mechanism |
| CN106208803A (en) * | 2016-07-25 | 2016-12-07 | 南京航空航天大学 | Utilize rectangular block shape linear ultrasonic motor and electric excitation method thereof thereof that single mode drives |
| CN106505907B (en) * | 2017-01-05 | 2018-06-12 | 南京工程学院 | It is a kind of can two-way linear operation single-phase supersonic motor |
| CN110138262B (en) * | 2019-05-24 | 2024-02-02 | 华侨大学 | Linear ultrasonic motor with single excitation source for bidirectional actuation |
| CN113938051B (en) * | 2021-09-29 | 2023-09-29 | 东北电力大学 | Two-parallel bending vibrator compound actuation stepping piezoelectric driver and working method thereof |
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| JP2005278290A (en) * | 2004-03-24 | 2005-10-06 | Taiheiyo Cement Corp | Ultrasonic motor |
| CN200987127Y (en) * | 2006-10-30 | 2007-12-05 | 苏州市职业大学 | K-shaped straight line ultrasonic motor |
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Application publication date: 20100421 Assignee: Gui Xin Magnetoelectric Hi-tech Co., Ltd. Assignor: Nanjing University of Aeronautics and Astronautics Contract record no.: 2013320000627 Denomination of invention: Two-way single-mode ramp type tower-shaped linear ultrasonic motor and electric excitation method Granted publication date: 20111130 License type: Exclusive License Record date: 20130703 |
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