CN100581042C - Plane multi-freedom altrasonic electric machine of single vibrator longtitude bend sandwich changer type - Google Patents
Plane multi-freedom altrasonic electric machine of single vibrator longtitude bend sandwich changer type Download PDFInfo
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- CN100581042C CN100581042C CN200710072168A CN200710072168A CN100581042C CN 100581042 C CN100581042 C CN 100581042C CN 200710072168 A CN200710072168 A CN 200710072168A CN 200710072168 A CN200710072168 A CN 200710072168A CN 100581042 C CN100581042 C CN 100581042C
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Abstract
This invention relates to a supersonic motor, in which, a flange is set on a screw post, compressional vibration piezoelectric ceramic plate sets, bent vibration piezoelectric ceramic plate sets, pole copper plates and a cover are mounted on the post and fixed to become one unit with a cross orthogonal luff rod by the post, the polarization directions of two adjacent bent vibration piezoelectric ceramic sets are opposite and those of the two adjacent compressional piezoelectric ceramic sets are opposite, a drive foot is placed at the center of the luff rod and fixed to it.
Description
Technical field
The present invention relates to a kind of ultrasound electric machine, belong to the piezoelectric ultrasonic motor technical field.
Background technology
The multi-planar-degree-of-freedom ultrasound electric machine is a kind of ultrasonic vibrational energy of utilizing, and produce the motor of actuating force by rubbing action, directly drive mover by friction coupling low speed, can realize multivariant linear or rotatablely move, simple in structure, be better than the traditional electrical magneto and will add the form of complicated speed change, combination and decoupling mechanism for realizing multifreedom motion, and have low speed high torque (thrust), need not gear, no electromagnetic interference, advantage such as response speed is fast and cut off self-lock, have very as a kind of piezoelectric actuator and to use widely.Multiple-degree-of-freedom planar motion research in the past is many based on the two-degree-of-freedom micro platform, adopt piezoelectric ceramic heap group to drive mostly, different ceramic stack groups is responsible for driving the driving of the positive and negative a certain direction of orthogonal direction, actually can regard the synthetic of two linear electric motors motion as, platform mostly needs layering to drive.So far, driver research to multiple-degree-of-freedom planar ultrasound electric machine form in the world wide is totally less, find in the data, have only in the phase P486-493 page or leaf of international publication " transducer and brake " magazine (Sensors and Actuators a-Physical) the 125th volume in 2006, A Three Dof Linear Ultrasonic Motor for Transport andMicropositioning. (a kind of Three Degree Of Freedom linear ultrasonic motor that is used for a fine motion transmitting device) literary composition of publication, Frenchman S.Dembele proposes a kind of supersonic motor of realizing the planar three freedom motion, structure is one and has four rectangular slabs that drive foot, driving on the opposite plate face of foot, be stained with 20 piezoelectric ceramic pieces, the potsherd position is [4,5] array, combination by different potsherds in the excitation array, can make the elliptical trajectory that drives the surperficial particle generation of foot expectation, thereby realize that motor is at plane x, the bidimensional rectilinear motion on y plane also can be at x, rotatablely moving around the z axle on the y plane.This three-freedom planar supersonic motor has following shortcoming: 1, adopt the potsherd structure to carry out the active excitation, the output torque is little; 2, machine operation is when certain particular state, and the potsherd that does not participate in encouraging also can produce distortion along with the rectangular slab vibration, and coupling effect can have influence on the mode of oscillation of rectangular slab, makes the surperficial particle of driving foot be subjected to noise jamming; 3, be difficult in machining guarantee that four drive foot in one plane; 4, this structural vibration mode complexity, the position and the excitation combination that drive each potsherd in foot, the Ceramic Array are difficult to determine, promote so this kind drive principle is difficult to accomplish seriation.
Summary of the invention
The purpose of this invention is to provide the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of a kind of simple oscialltor, it can solve the three-freedom planar supersonic motor exist the output torque little, four drive that foot is difficult to guarantee in one plane, mode of oscillation complexity, the position of each potsherd and the problem that the excitation combination is difficult to determine, be difficult to accomplish that seriation is promoted.
The present invention includes the vertical angle coupling heart transducer of simple oscialltor and drive foot; The vertical angle coupling heart transducer of described simple oscialltor is made up of cross quadrature luffing bar, longitudinal vibration piezoelectric ceramic piece group, flange, electrode copper sheet, the curved piezoelectric ceramic piece group of shaking, end cap, double-screw bolt; Be respectively equipped with a double-screw bolt on the vertical axis of described cross quadrature luffing bar, described double-screw bolt is provided with flange, flange is positioned at the nodal section position of the vertical angle coupling heart transducer extensional vibration of simple oscialltor, on the double-screw bolt between the large end face of flange and cross quadrature luffing bar longitudinal vibration piezoelectric ceramic piece group is housed, the curved piezoelectric ceramic piece group of shaking is housed on the double-screw bolt between flange and the end cap, the described curved piezoelectric ceramic piece group of shaking is made up of two curved piezoelectric ceramic pieces that shake, described two curved piezoelectric ceramic pieces that shake are positioned at curved vibration shape antinode place, described longitudinal vibration piezoelectric ceramic piece group is made up of two longitudinal vibration piezoelectric ceramic pieces, between the two longitudinal vibration piezoelectric ceramic pieces of longitudinal vibration piezoelectric ceramic piece group, two of the curved piezoelectric ceramic piece group of shaking is bent to shake between the piezoelectric ceramic piece and bend to shake and the electrode copper sheet is housed, the large end face of cross quadrature luffing bar between piezoelectric ceramic piece group and the flange respectively, longitudinal vibration piezoelectric ceramic piece group, flange, the electrode copper sheet, curved piezoelectric ceramic piece group and the end cap of shaking is tightened to one by double-screw bolt; The every curved piezoelectric ceramic piece symmetry of shaking is cut into curved piezoelectric ceramic piece and the curved piezoelectric ceramic piece that shakes of second sheet of shaking of first sheet, the polarised direction of first sheet of the every curved piezoelectric ceramic piece that shakes curved shake piezoelectric ceramic piece and the curved piezoelectric ceramic piece that shakes of second sheet is opposite, the polarised direction of two curved piezoelectric ceramic pieces that shake of first sheet is opposite, the polarised direction of two curved piezoelectric ceramic pieces that shake of second sheet is opposite, the polarised direction of two longitudinal vibration piezoelectric ceramic pieces is opposite, the polarised direction of adjacent two curved piezoelectric ceramic piece groups of shaking is opposite, the polarised direction of adjacent two longitudinal vibration piezoelectric ceramic piece groups is opposite, drive the curved vibration shape antinode place that foot is positioned at cross quadrature luffing bar center, it is affixed with the small end face of cross quadrature luffing bar to drive foot.
The present invention has following beneficial effect: the present invention adopts the vertical angle coupling heart transducer of simple oscialltor as driver, the extensional vibration that utilizes the piezoelectric ceramic piece group swashs in the vertical angle coupling heart transducer of simple oscialltor and extensional vibration and flexural vibrations, by encouraging each potsherd group various combination to carry out work, three kinds of elliptical vibration tracks of foot position generation can driven, drive the end face particle and can realize the motion of positive and negative both direction, thereby make drive motors realize the multi-planar-degree-of-freedom motion by every kind of vibration elliptical orbit.The present invention is easy to realize the degeneracy of vertical curved frequency by adjusting the overall dimension of luffing bar, and the luffing bar also can reduce the loss of vibrational energy in end cap, assembles vibrational energy, thereby has improved amplitude and the vibration velocity that drives the foot position greatly.In addition, adopt one to drive foot, can guarantee that machine operation is steady.Therefore, but that the present invention has is simple in structure, efficient is high, power output is big, stable performance, be easy to control, mode of oscillation is simple, the position of each piezoelectric ceramic piece and the excitation combination is determined easily, and the advantage of producing in serial form.
Description of drawings
Fig. 1 is an overall structure outline drawing of the present invention, and Fig. 2 is the polarised direction schematic diagram of longitudinal vibration piezoelectric ceramic piece 30 and the curved piezoelectric ceramic piece 31 that shakes, and Fig. 3 is the top plan view of the vertical angle coupling heart transducer of simple oscialltor, and Fig. 4 is the front view of Fig. 3, and Fig. 5 is the left view of Fig. 3.
Embodiment
Embodiment one: in conjunction with Fig. 1～Fig. 5 present embodiment is described, present embodiment is made up of vertical angle coupling heart transducer of simple oscialltor and driving foot 8; The vertical angle coupling heart transducer of described simple oscialltor is made up of cross quadrature luffing bar 1, longitudinal vibration piezoelectric ceramic piece group 2, flange 3, electrode copper sheet 4, the curved piezoelectric ceramic piece group 5 of shaking, end cap 6, double-screw bolt 7; Be respectively equipped with a double-screw bolt 7 on the vertical axis of described cross quadrature luffing bar 1, described double-screw bolt 7 is provided with flange 3, flange 3 is positioned at the nodal section position of the vertical angle coupling heart transducer extensional vibration of simple oscialltor, on the double-screw bolt 7 between the large end face of flange 3 and cross quadrature luffing bar 1 longitudinal vibration piezoelectric ceramic piece group 2 is housed, the curved piezoelectric ceramic piece group 5 of shaking is housed on the double-screw bolt 7 between flange 3 and the end cap 6, the described curved piezoelectric ceramic piece group 5 of shaking is made up of two curved piezoelectric ceramic pieces 31 that shake, described two curved piezoelectric ceramic pieces 31 that shake are positioned at curved vibration shape antinode place, described longitudinal vibration piezoelectric ceramic piece group 2 is made up of two longitudinal vibration piezoelectric ceramic pieces 30, between the two longitudinal vibration piezoelectric ceramic pieces 30 of longitudinal vibration piezoelectric ceramic piece group 2, two of the curved piezoelectric ceramic piece group 5 of shaking is bent to shake between the piezoelectric ceramic piece 31 and bend to shake and between piezoelectric ceramic piece group 5 and the flange 3 electrode copper sheet 4 is housed respectively, the large end face of cross quadrature luffing bar 1, longitudinal vibration piezoelectric ceramic piece group 2, flange 3, electrode copper sheet 4, curved piezoelectric ceramic piece group 5 and the end cap 6 of shaking is tightened to one by double-screw bolt 7; Every curved piezoelectric ceramic piece 31 symmetries of shaking are cut into curved piezoelectric ceramic piece 32 and the curved piezoelectric ceramic piece 33 that shakes of second sheet of shaking of first sheet, the polarised direction of first sheet of the every curved piezoelectric ceramic piece 31 that shakes curved shake piezoelectric ceramic piece 32 and the curved piezoelectric ceramic piece 33 that shakes of second sheet is opposite, the polarised direction of two curved piezoelectric ceramic pieces 32 that shake of first sheet is opposite, the polarised direction of two curved piezoelectric ceramic pieces 33 that shake of second sheet is opposite, the polarised direction of two longitudinal vibration piezoelectric ceramic pieces 30 is opposite, the polarised direction of adjacent two curved piezoelectric ceramic piece groups 5 of shaking is opposite, the polarised direction of adjacent two longitudinal vibration piezoelectric ceramic piece groups 2 is opposite, all piezoelectric ceramic pieces of longitudinal vibration piezoelectric ceramic piece group 2 and the curved piezoelectric ceramic piece group 5 of shaking all polarize along thickness direction, with "+", "-" expression electricdomain is a polarised direction, drive the curved vibration shape antinode place that foot 8 is positioned at cross quadrature luffing bar 1 center, it is affixed with the small end face of cross quadrature luffing bar 1 to drive foot 8, and the cross section that drives foot 8 is circular.
Embodiment two: in conjunction with Fig. 3 present embodiment is described, the cross quadrature luffing bar 1 of present embodiment is made up of four luffing bars 34 of quadrature in same plane; The longitudinal cross-section of described luffing bar 34 is a rectangle, and the length L of luffing bar 34 is 1/4 or 1/2 longitudinal vibration wavelength.So be provided with, luffing bar 34 can reduce the loss of vibrational energy on luffing bar 34 large end faces, plays the effect of assembling vibrational energy, improves the amplitude and the vibration velocity that drive foot 8 positions, and the performance of ultrasound electric machine is increased substantially.Other composition and annexation are identical with embodiment one.
Embodiment three: in conjunction with Fig. 1 present embodiment is described, vertical curved node coincidence place of shaking of the external cylindrical surface of the flange 3 of present embodiment is drilled with two roundlet taper holes 9.So be provided with,, be used for applying pretightning force and produce driving frictional force, or drive load herein as the bite of ultrasound electric machine pretightning force mechanism.Be chosen in this position and bore two roundlet taper holes 9, minimum to the vertical angle coupling heart transducer vibration shape influence of simple oscialltor, can reduce energy loss.Other composition and annexation are identical with embodiment one.
Embodiment four: in conjunction with Fig. 3 present embodiment is described, the double-screw bolt 7 of present embodiment and flange 3 are formed by a block of metal material cutting processing.So be provided with, but weight reduction reduces energy loss.Other composition and annexation are identical with embodiment one.
Embodiment five: in conjunction with Fig. 3 present embodiment is described, the cross quadrature luffing bar of present embodiment 1 with drive foot 8 and form by a block of metal material cutting processing.So be provided with, but weight reduction reduces energy loss.Other composition and annexation are identical with embodiment one.
Embodiment six: in conjunction with Fig. 1 present embodiment is described, the difference of present embodiment and embodiment one is: present embodiment also increases hard ceramic friction plate 10; Described hard ceramic friction plate 10 is bonding with the bottom face that drives foot 8.Hard ceramic friction plate 10 in the present embodiment is selected the alundum (Al ceramic friction plate for use, and resistance to wear is good, can improve the useful life that drives foot 8.
Operation principle: in conjunction with Fig. 4 and Fig. 5 explanation, apply the resonance frequency alternating voltage between electrode A and electrode B, when a pair of curved piezoelectric ceramic piece that shakes of upside expanded, a pair of curved piezoelectric ceramic piece that shakes of downside shrank, and vice versa, excites flexural vibrations.Machine operation drives the antinode place that foot is positioned at the curved vibration shape at the curved state that shakes of odd number, and the curved direction of shaking that drives sufficient drive end is a Z-direction.Between electrode A and electrode C, apply the resonance frequency alternating voltage, the longitudinal vibration piezoelectric ceramic piece of every pair of reverse polarization expands synchronously or shrinks, excite extensional vibration, the polarised direction of the adjacent direction of two groups of longitudinal vibration piezoelectric ceramic pieces of Y direction is different, another group piezoelectric ceramic piece synchronous when one group of piezoelectric ceramic piece expands, drive and drive foot, and drive the curved vibration shape antinode place (longitudinal vibration speed maximum) that foot is positioned at cross quadrature luffing bar 1 center along Y direction extensional vibration.To vertical curved two-way simultaneously the excitation phase difference be+90 ° resonance frequency alternating voltage, the vertical curved vibration of the vertical angle coupling heart transducer of simple oscialltor will make and drive the sufficient driving end face elliptical orbit that superposes out, drive motors moves along Y direction; Adjusting two-way driving voltage phase difference is-90 °, can realize the motor counter motion.In like manner, electrode B, electrode D and between electrode A, apply the resonance frequency alternating voltage and encourage, motor will move along X-direction is positive and negative.By control motor X, Y to movement velocity, just can realize the bidimensional rectilinear motion of X-Y plane.
The curved pottery that shakes is not encouraged, only to electrode C, electrode D with between electrode A, apply phase difference and encourage for+90 ° resonance frequency alternating voltage, the driving end face that the drives foot elliptical orbit on the X-Y plane that will superpose out, motor will be the axle center to drive sufficient mid point, rotatablely move along the Z axle, adjusting two-way driving voltage phase difference is-90 °, the motor reverse rotation.
Claims (7)
1, the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of a kind of simple oscialltor, it comprises the vertical angle coupling heart transducer of simple oscialltor and drives foot (8); It is characterized in that the vertical angle coupling heart transducer of described simple oscialltor is made up of cross quadrature luffing bar (1), longitudinal vibration piezoelectric ceramic piece group (2), flange (3), electrode copper sheet (4), the curved piezoelectric ceramic piece group (5) of shaking, end cap (6), double-screw bolt (7); Be respectively equipped with a double-screw bolt (7) on the vertical axis of described cross quadrature luffing bar (1), described double-screw bolt (7) is provided with flange (3), flange (3) is positioned at the nodal section position of the vertical angle coupling heart transducer extensional vibration of simple oscialltor, on the double-screw bolt (7) between the large end face of flange (3) and cross quadrature luffing bar (1) longitudinal vibration piezoelectric ceramic piece group (2) is housed, the curved piezoelectric ceramic piece group (5) of shaking is housed on the double-screw bolt (7) between flange (3) and the end cap (6), the described curved piezoelectric ceramic piece group (5) of shaking is made up of two curved piezoelectric ceramic pieces (31) that shake, described two curved piezoelectric ceramic pieces (31) that shake are positioned at curved vibration shape antinode place, described longitudinal vibration piezoelectric ceramic piece group (2) is made up of two longitudinal vibration piezoelectric ceramic pieces (30), between the two longitudinal vibration piezoelectric ceramic pieces (30) of longitudinal vibration piezoelectric ceramic piece group (2), two of the curved piezoelectric ceramic piece group (5) of shaking is bent to shake between the piezoelectric ceramic piece (31) and bend to shake and between piezoelectric ceramic piece group (5) and the flange (3) electrode copper sheet (4) is housed respectively, the large end face of cross quadrature luffing bar (1), longitudinal vibration piezoelectric ceramic piece group (2), flange (3), electrode copper sheet (4), curved piezoelectric ceramic piece group (5) and the end cap (6) of shaking is tightened to one by double-screw bolt (7); Every curved piezoelectric ceramic piece (31) symmetry of shaking is cut into curved piezoelectric ceramic piece (32) and the curved piezoelectric ceramic piece (33) that shakes of second sheet of shaking of first sheet, the polarised direction of first sheet of the every curved piezoelectric ceramic piece (31) that shakes curved shake piezoelectric ceramic piece (32) and the curved piezoelectric ceramic piece (33) that shakes of second sheet is opposite, the polarised direction of two curved piezoelectric ceramic pieces (32) that shake of first sheet is opposite, the polarised direction of two curved piezoelectric ceramic pieces (33) that shake of second sheet is opposite, the polarised direction of two longitudinal vibration piezoelectric ceramic pieces (30) is opposite, the polarised direction of adjacent two curved piezoelectric ceramic piece groups (5) of shaking is opposite, the polarised direction of adjacent two longitudinal vibration piezoelectric ceramic piece groups (2) is opposite, drive the curved vibration shape antinode place that foot (8) is positioned at cross quadrature luffing bar (1) center, it is affixed with the small end face of cross quadrature luffing bar (1) to drive foot (8).
2, the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of simple oscialltor according to claim 1 is characterized in that described cross quadrature luffing bar (1) is made up of four luffing bars (34) of quadrature in same plane; The longitudinal cross-section of described luffing bar (34) is a rectangle, and the length L of luffing bar (34) is 1/4 or 1/2 longitudinal vibration wavelength.
3, the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of simple oscialltor according to claim 1 is characterized in that vertical curved node coincidence place of shaking of the external cylindrical surface of described flange (3) is drilled with two roundlet taper holes (9).
4, according to claim 1 or the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of 3 described simple oscialltors, it is characterized in that described double-screw bolt (7) and flange (3) are formed by a block of metal material cutting processing.
5, the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of simple oscialltor according to claim 1 is characterized in that described cross quadrature luffing bar (1) and driving foot (8) are formed by a block of metal material cutting processing.
6, simple oscialltor is indulged angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine according to claim 1 or 5, it is characterized in that the described cross section of foot (8) that drives is for circular.
7, the vertical angle coupling heart energy converter type multi-planar-degree-of-freedom ultrasound electric machine of simple oscialltor according to claim 1 is characterized in that it also comprises hard ceramic friction plate (10); Described hard ceramic friction plate (10) is bonding with the bottom face that drives foot (8).
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| CN200710072168A CN100581042C (en) | 2007-04-30 | 2007-04-30 | Plane multi-freedom altrasonic electric machine of single vibrator longtitude bend sandwich changer type |
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| CN200710072168A CN100581042C (en) | 2007-04-30 | 2007-04-30 | Plane multi-freedom altrasonic electric machine of single vibrator longtitude bend sandwich changer type |
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| CN100581042C true CN100581042C (en) | 2010-01-13 |
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