CN107612415A - A kind of multiple degrees of freedom sandwich micro-containing operators and its displacement output control method - Google Patents
A kind of multiple degrees of freedom sandwich micro-containing operators and its displacement output control method Download PDFInfo
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Abstract
A kind of multiple degrees of freedom sandwich micro-containing operators and its displacement output control method, belong to micro-nano operating technology field, solve the problems, such as that operating frequency range existing for existing micro-containing operators is narrow, power output is small and are difficult to miniaturization.The micro-containing operators：M layers piezoelectric ceramic piece stack and it is radially fixed between pedestal and drive end bearing bracket, piezoelectric ceramic piece is along the circumferential direction divided into several polarization subregions, the quantity of polarization subregion is more than or equal to 3, and is connected along the radial polarization of piezoelectric ceramic piece, each subregion that polarizes with excitation voltage source.The displacement output control method of the micro-containing operators：Positive energize voltage or negative energize voltage are applied to the polarization subregion on piezoelectric ceramic piece, and adjust the amplitude of voltage, so that piezoelectric ceramic piece overall elongated or shorten corresponding with voltage magnitude length and make the place azimuthal tilt for the subregion that polarizes that drive end bearing bracket encourage to negative voltage, to realize displacement output of the multiple degrees of freedom sandwich micro-containing operators on multiple free degree directions.
Description
Technical field
The present invention relates to a kind of micro-containing operators and its control method, belongs to micro-nano operating technology field.
Background technology
Micro-nano operating technology refers to fabricate out the side of structure and device with specific function on micro-, nanoscale
Method.In recent years, micro-nano operating technology has obtained the extensive concern of domestic and foreign scholars and related research institutes.Micro-nano operating technology
Developing direction is nano functional device and micro-nano system of the manufacture with novel physics, chemistry and biological characteristic, so as to promote electricity
The fast development in the fields such as son, information, material, advanced manufacture and biomedicine, has great economic results in society.
Micro-containing operators are one of vital parts in micro-nano operating technology, and it directly determines adding for micro-nano device
The performance indications such as the operation precision of working medium amount and micro-nano system.Piezoelectric element due to structure design flexibly, fast response time,
Power-off can self-locking and the features such as not by electromagnetic interference, be applied successfully in micro-nano operating technology field.
Generally existing is broadly divided into piezo tube formula micro-containing operators and pressure with relatively broad micro-containing operators are studied at present
Pile stacked micro-containing operators：
Piezo tube formula micro-containing operators in piezo tube outer application multiple electrodes region mainly by forming multiple poles
Change area, and different excitation electric signals is applied to multiple polarized areas to realize position of the micro-containing operators on multiple free degree directions
Move output.However, existing piezo tube is usually " elongated tubular " shape structure, its axial dimension is much larger than radial dimension.Therefore, it is existing
The resonant frequency of piezo tube is relatively low, and then causes the operating frequency range of piezo tube formula micro-containing operators narrower.In addition,
The piezo tube of " elongated tubular " shape structure make it that the power output of piezo tube formula micro-containing operators is smaller, it is difficult to meet under heavy load operating mode
Technical need.
Piezo-electric stack formula micro-containing operators are mainly stacked using laminated piezoelectric and are used as actuating element, and it generally will be multiple
Piezo-electric stack is distributed in diverse location and forms piezo-electric stack parallel institution, to realize micro-containing operators on multiple free degree directions
Displacement output.However, this piezo-electric stack parallel institution is ensureing that micro-containing operators are high-precision on multiple free degree directions
While spending displacement output, also bring complicated and the problem of be difficult to further be miniaturized.
As the progress of science and technology, particularly Ultra-precision Turning, the manufacture of micro-nano electronic device and grating ruling etc. are advanced
The rapid development of manufacturing field, the piezo tube formula micro-containing operators being primarily present at present and piezo-electric stack formula micro-containing operators are
Well or it can not can not meet wide operating frequency range, heavy load and miniaturization that above-mentioned field proposes to micro-containing operators etc.
The technical need of aspect.Therefore, a kind of micro-containing operators of new principle are developed, operating frequency range is wide, holds to make it have
Loading capability is greatly one of current micro-nano operating technology field key issue urgently to be resolved hurrily with structure formed technical characterstic,
Far-reaching influence will be produced to the development for promoting above-mentioned advanced manufacturing technology field.
The content of the invention
Operating frequency range is narrow, power output is small and is difficult to be miniaturized existing for the existing micro-containing operators of present invention solution
A kind of problem, it is proposed that multiple degrees of freedom sandwich micro-containing operators.
Multiple degrees of freedom sandwich micro-containing operators of the present invention include pedestal 1, m layers piezoelectric ceramic piece 2 and drive end bearing bracket
3, m be positive integer；
M layers piezoelectric ceramic piece 2 stacks and radially fixed between pedestal 1 and drive end bearing bracket 3；
Piezoelectric ceramic piece 2 is along the circumferential direction divided into several polarization subregion 2-1, and polarization subregion 2-1 quantity is more than or waited
In 3, polarize radial polarizations of the subregion 2-1 along piezoelectric ceramic piece 2；
Each polarization subregion 2-1 is connected with excitation voltage source.
As preferably, guide pillar 1-1 is installed with pedestal 1, m layers piezoelectric ceramic piece 2 is run through in guide pillar 1-1 front end,
And it is threadedly coupled with drive end bearing bracket 3.
As preferably, drive end bearing bracket 3 is truncated cone.
As preferably, the bottom surface of drive end bearing bracket 3 connects with piezoelectric ceramic piece 2, and drive is provided with the top surface of drive end bearing bracket 3
Action spot 3-1.
As preferably, the area all same of the polarization subregion 2-1 on piezoelectric ceramic piece 2.
As preferably, the polarised direction all same of the polarization subregion 2-1 on piezoelectric ceramic piece 2.
As preferably, as m ＞ 1, the quantity of the polarization subregion 2-1 on m layers piezoelectric ceramic piece 2 is equal or different.
As preferably, when the quantity of the polarization subregion 2-1 on m layers piezoelectric ceramic piece 2 is equal, m is laminated electroceramics
The area all same of polarization subregion 2-1 on piece 2.
As preferably, the polarised direction all same of the polarization subregion 2-1 on the m layers piezoelectric ceramic piece 2 of stacked state.
The direct control object of the displacement output control method of multiple degrees of freedom sandwich micro-containing operators of the present invention
For piezoelectric ceramic piece 2, the displacement output control method comprises the following steps：
Positive energize voltage or negative is applied to each polarization subregion 2-1 of piezoelectric ceramic piece 2 both ends by excitation voltage source
Driving voltage, and adjust the amplitude of positive energize voltage or negative energize voltage, make piezoelectric ceramic piece 2 in its axial direction overall elongated or
Shorten length corresponding with voltage magnitude, and then adjust the position of drive end bearing bracket 3；
Positive energize voltage is applied to the n adjacent polarization subregion 2-1 on piezoelectric ceramic piece 2 by excitation voltage source, it is right
Remaining polarization subregion 2-1 applies negative energize voltage, and adjusts the amplitude of positive energize voltage and negative energize voltage, makes n polarization point
Area 2-1 overall elongateds in the axial direction of piezoelectric ceramic piece 2 length corresponding with positive energize voltage magnitude, make remaining polarization subregion 2-
1 integrally shortens length corresponding with negative energize voltage magnitude in the axial direction of piezoelectric ceramic piece 2, and then makes drive end bearing bracket 3 to remaining
Polarize azimuthal tilt where subregion 2-1；
N is positive integer and the total half for the subregion 2-1 that polarizes being more than or equal on piezoelectric ceramic piece 2.
The present invention uses actuating element of the piezoelectric ceramic piece as micro-containing operators, by being provided with piezoelectric ceramic piece
Multiple polarization subregions, and using the inverse piezoelectric effect of piezoelectric ceramics, can make piezoelectric ceramic piece overall elongated, it is overall shorten or
Subregion is extended, and remaining region is shortened, and so as to cause the change in location of drive end bearing bracket, and then realizes the displacement to micro-containing operators
The accurate control of output.
The m layers piezoelectric ceramic piece of multiple degrees of freedom sandwich micro-containing operators of the present invention forms piezoelectric ceramics lamella.
It is of the present invention how free in the case where meeting identical use demand compared with existing piezo tube formula micro-containing operators
Spend axle of the axial length less than the piezo tube of piezo tube formula micro-containing operators of the piezoelectric ceramics lamella of sandwich micro-containing operators
To length.Therefore, multiple degrees of freedom sandwich micro-containing operators of the present invention have broader operating frequency range.Except this it
Outside, in the case where the axial length of piezoelectric ceramics lamella is equal to the axial length of piezo tube, multiple degrees of freedom of the present invention
The power output of sandwich micro-containing operators is larger.
Compared with existing piezo-electric stack formula micro-containing operators, multiple degrees of freedom sandwich micro-containing operators of the present invention
Using m layers piezoelectric ceramic piece as independent transducer, there is the characteristics of simple and compact for structure, be more miniaturized.In addition, originally
The described multiple degrees of freedom sandwich micro-containing operators of invention also overcome existing piezo-electric stack formula micro-containing operators because complicated
And the defects of causing its output performance to be had a great influence by process and assemble precision.
Brief description of the drawings
Multiple degrees of freedom sandwich micro-nano of the present invention will hereinafter be operated based on embodiment and refer to the attached drawing
Device and its displacement output control method are described in more detail, wherein：
Fig. 1 is the structural representation of the multiple degrees of freedom sandwich micro-containing operators described in embodiment one；
Fig. 2 is the structural representation for the pedestal that embodiment one refers to；
Fig. 3 is the structural representation for the drive end bearing bracket that embodiment one refers to；
Fig. 4 is the polarization subregion schematic diagram for the piezoelectric ceramic piece that embodiment one refers to；
Fig. 5 is the polarization subregion schematic diagram for the piezoelectric ceramic piece that embodiment two refers to.
Embodiment
Below in conjunction with accompanying drawing to multiple degrees of freedom sandwich micro-containing operators of the present invention and its displacement output control
Method further illustrates.
Embodiment one：The present embodiment is explained with reference to Fig. 1~Fig. 4.
Multiple degrees of freedom sandwich micro-containing operators described in the present embodiment include pedestal 1,4 layer of piezoelectric ceramic piece 2 and front end
Lid 3；
4 layers of piezoelectric ceramic piece 2 stack and radially fixed between pedestal 1 and drive end bearing bracket 3；
Every layer of piezoelectric ceramic piece 2 is along the circumferential direction divided into 3 polarization subregion 2-1, polarization subregion 2-1 along piezoelectric ceramics
The radial polarization of piece 2；
Each polarization subregion 2-1 is connected with excitation voltage source.
Guide pillar 1-1 is installed with the pedestal 1 of the present embodiment, guide pillar 1-1 front end sequentially passes through 4 layers of piezoelectric ceramic piece 2, and
It is threadedly coupled with drive end bearing bracket 3,4 layers of piezoelectric ceramic piece 2 are clamped between pedestal 1 and drive end bearing bracket 3 by the mode of this threaded connection,
And 4 layers of piezoelectric ceramic piece 2 are caused to bear certain initial precompression.
The drive end bearing bracket 3 of the present embodiment is truncated cone, and the bottom surface of drive end bearing bracket 3 connects with piezoelectric ceramic piece 2, in drive end bearing bracket
The sufficient 3-1 of driving is provided with 3 top surface.
In the present embodiment, 3 on piezoelectric ceramic piece 2 polarization subregion 2-1 are distributed according to clockwise direction, are followed successively by the
One polarization subregion 2-1-1, the second polarization subregion 2-1-2 and the 3rd polarization subregion 2-1-3, the first polarization subregion 2-1-1, the second pole
Change the polarization subregions of subregion 2-1-2 and the 3rd 2-1-3 area and polarised direction all same, 4 layers of piezoelectric ceramic piece 2 of stacked state
On polarization subregion 2-1 polarised direction all same.
The present embodiment applies different excitation electricity by excitation voltage source to 3 polarization subregion 2-1 on piezoelectric ceramic piece 2
Pressure, the multiple degrees of freedom sandwich micro-containing operators can be achieved and move output in the enterprising line position in multiple free degree directions：
Positive energize voltage is applied to 3 polarization subregion 2-1 on piezoelectric ceramic piece 2 by excitation voltage source, makes piezoelectricity
The overall elongated length corresponding with voltage magnitude, and then adjust the position of drive end bearing bracket 3 in its axial direction of potsherd 2, realizes institute
State the displacement output of multiple degrees of freedom sandwich micro-containing operators；
Negative energize voltage is applied to 3 polarization subregion 2-1 on piezoelectric ceramic piece 2 by excitation voltage source, makes piezoelectricity
Potsherd 2 is overall in its axial direction to shorten length corresponding with voltage magnitude, and then adjusts the position of drive end bearing bracket 3, realizes institute
State the displacement output of multiple degrees of freedom sandwich micro-containing operators；
The first polarization subregion 2-1-1 on piezoelectric ceramic piece 2 and the second polarization subregion 2-1-2 are applied by excitation voltage source
Add positive energize voltage, make the polarization of the first polarization subregion 2-1-1 and second subregion 2-1-2 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize voltage is applied to the 3rd polarization subregion 2-1-3, makes the 3rd polarization subregion 2-1-
3 shorten length corresponding with voltage magnitude in the axial direction of piezoelectric ceramic piece 2, and then make drive end bearing bracket 3 to the 3rd polarization subregion 2-
Azimuthal tilt where 1-3, realize the displacement output of the multiple degrees of freedom sandwich micro-containing operators；
The first polarization subregion 2-1-1 on piezoelectric ceramic piece 2 and the 3rd polarization subregion 2-1-3 are applied by excitation voltage source
Add positive energize voltage, make the polarization of the first polarization subregion 2-1-1 and the 3rd subregion 2-1-3 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize voltage is applied to the second polarization subregion 2-1-2, makes the second polarization subregion 2-1-
2 shorten length corresponding with voltage magnitude in the axial direction of piezoelectric ceramic piece 2, and then make drive end bearing bracket 3 to the second polarization subregion 2-
Azimuthal tilt where 1-2, realize the displacement output of the multiple degrees of freedom sandwich micro-containing operators；
The second polarization subregion 2-1-2 on piezoelectric ceramic piece 2 and the 3rd polarization subregion 2-1-3 are applied by excitation voltage source
Add positive energize voltage, make the polarization of the second polarization subregion 2-1-2 and the 3rd subregion 2-1-3 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize voltage is applied to the first polarization subregion 2-1-1, makes the first polarization subregion 2-1-
1 shortens length corresponding with voltage magnitude in the axial direction of piezoelectric ceramic piece 2, and then makes drive end bearing bracket 3 to the first polarization subregion 2-
Azimuthal tilt where 1-1, realize the displacement output of the multiple degrees of freedom sandwich micro-containing operators；
In summary, opposed polarity and width are applied by 3 polarization subregion 2-1 on the piezoelectric ceramic piece 2 to the present embodiment
The driving voltage of value, displacement of the micro-containing operators in multiple free degree directions can be achieved and export.
The present embodiment only illustrates to be had using 3 polarization subregion 2-1 on 4 layers of piezoelectric ceramic piece 2 and piezoelectric ceramic piece 2
The specific embodiment of identical polarised direction and equal areas, have for 3 polarization subregion 2-1 on 4 layers of piezoelectric ceramic piece 2
The situation of different polarised directions and/or unequal-area, this implementation can be realized by the amplitude or direction that change corresponding driving voltage
Function in example, also within protection scope of the present invention, this is no longer going to repeat them.
Embodiment two：The present embodiment is explained with reference to Fig. 5.The present embodiment be to described in embodiment one it is more from
By further the limiting of degree sandwich micro-containing operators, the difference of the multiple degrees of freedom sandwich micro-containing operators described in the present embodiment
Part is that the piezoelectric ceramic piece 2 of the present embodiment is along the circumferential direction divided into 4 polarization subregion 2-1.
In the present embodiment, 4 on piezoelectric ceramic piece 2 polarization subregion 2-1 are distributed according to clockwise direction, are followed successively by the
One polarization subregion 2-1-1, the second polarization subregion 2-1-2, the 3rd polarization subregion 2-1-3 and the 4th polarization subregion 2-1-4, the first pole
Change subregion 2-1-1, the second polarization subregion 2-1-2, the 3rd polarization subregion 2-1-3 and the 4th polarization subregion 2-1-4 area and pole
Change direction all same, the polarised direction all same of the polarization subregion 2-1 on 4 layers of piezoelectric ceramic piece 2 of stacked state.
The present embodiment applies different excitation electricity by excitation voltage source to 4 polarization subregion 2-1 on piezoelectric ceramic piece 2
Pressure, the multiple degrees of freedom sandwich micro-containing operators can be achieved and move output in the enterprising line position in multiple free degree directions：
Positive energize voltage is applied to 4 polarization subregion 2-1 on piezoelectric ceramic piece 2 by excitation voltage source, makes piezoelectricity
The overall elongated length corresponding with voltage magnitude, and then adjust the position of drive end bearing bracket 3 in its axial direction of potsherd 2, realizes institute
State the displacement output of multiple degrees of freedom sandwich micro-containing operators；
Negative energize voltage is applied to 4 polarization subregion 2-1 on piezoelectric ceramic piece 2 by excitation voltage source, makes piezoelectricity
Potsherd 2 is overall in its axial direction to shorten length corresponding with voltage magnitude, and then adjusts the position of drive end bearing bracket 3, realizes institute
State the displacement output of multiple degrees of freedom sandwich micro-containing operators；
By excitation voltage source to the first polarization subregion 2-1-1, the second polarization subregion 2-1-2 on piezoelectric ceramic piece 2 and
3rd polarization subregion 2-1-3 applies positive energize voltage, makes the first polarization subregion 2-1-1, the second polarization subregion 2-1-2 and the 3rd pole
Change subregion 2-1-3 overall elongateds in the axial direction of piezoelectric ceramic piece 2 length corresponding with voltage magnitude, to the 4th polarization subregion 2-
1-4 applies negative energize voltage, the 4th polarization subregion 2-1-4 is shortened in the axial direction of piezoelectric ceramic piece 2 corresponding to voltage magnitude
Length, and then azimuthal tilt where making drive end bearing bracket 3 to the 4th polarization subregion 2-1-4 realizes that the multiple degrees of freedom is sandwich and declines
Receive operator displacement output；
By excitation voltage source to the first polarization subregion 2-1-1, the second polarization subregion 2-1-2 on piezoelectric ceramic piece 2 and
4th polarization subregion 2-1-4 applies positive energize voltage, makes the first polarization subregion 2-1-1, the second polarization subregion 2-1-2 and quadrupole
Change subregion 2-1-4 overall elongateds in the axial direction of piezoelectric ceramic piece 2 length corresponding with voltage magnitude, to the 3rd polarization subregion 2-
1-3 applies negative energize voltage, the 3rd polarization subregion 2-1-3 is shortened in the axial direction of piezoelectric ceramic piece 2 corresponding to voltage magnitude
Length, and then azimuthal tilt where making drive end bearing bracket 3 to the 3rd polarization subregion 2-1-3 realizes that the multiple degrees of freedom is sandwich and declines
Receive operator displacement output；
By excitation voltage source to the first polarization subregion 2-1-1, the 3rd polarization subregion 2-1-3 on piezoelectric ceramic piece 2 and
4th polarization subregion 2-1-4 applies positive energize voltage, makes the first polarization subregion 2-1-1, the 3rd polarization subregion 2-1-3 and quadrupole
Change subregion 2-1-4 overall elongateds in the axial direction of piezoelectric ceramic piece 2 length corresponding with voltage magnitude, to the second polarization subregion 2-
1-2 applies negative energize voltage, the second polarization subregion 2-1-2 is shortened in the axial direction of piezoelectric ceramic piece 2 corresponding to voltage magnitude
Length, and then azimuthal tilt where making drive end bearing bracket 3 to the second polarization subregion 2-1-2 realizes that the multiple degrees of freedom is sandwich and declines
Receive operator displacement output；
By excitation voltage source to the second polarization subregion 2-1-2, the 3rd polarization subregion 2-1-3 on piezoelectric ceramic piece 2 and
4th polarization subregion 2-1-4 applies positive energize voltage, makes the second polarization subregion 2-1-2, the 3rd polarization subregion 2-1-3 and quadrupole
Change subregion 2-1-4 overall elongateds in the axial direction of piezoelectric ceramic piece 2 length corresponding with voltage magnitude, to the first polarization subregion 2-
1-1 applies negative energize voltage, the first polarization subregion 2-1-1 is shortened in the axial direction of piezoelectric ceramic piece 2 corresponding to voltage magnitude
Length, and then azimuthal tilt where making drive end bearing bracket 3 to the first polarization subregion 2-1-1 realizes that the multiple degrees of freedom is sandwich and declines
Receive operator displacement output；
The first polarization subregion 2-1-1 on piezoelectric ceramic piece 2 and the second polarization subregion 2-1-2 are applied by excitation voltage source
Add positive energize voltage, make the polarization of the first polarization subregion 2-1-1 and second subregion 2-1-2 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize electricity is applied to the 3rd polarization subregion 2-1-3 and the 4th polarization subregion 2-1-4
Pressure, makes the 3rd polarization subregion 2-1-3 and the 4th polarization subregion 2-1-4 shortens in the axial direction of piezoelectric ceramic piece 2 and voltage magnitude
Corresponding length, and then make azimuthal tilt where drive end bearing bracket 3 to the 3rd polarization subregion 2-1-3 and the 4th polarization subregion 2-1-4, it is real
The displacement output of the existing multiple degrees of freedom sandwich micro-containing operators；
The first polarization subregion 2-1-1 on piezoelectric ceramic piece 2 and the 4th polarization subregion 2-1-4 are applied by excitation voltage source
Add positive energize voltage, make the polarization of the first polarization subregion 2-1-1 and the 4th subregion 2-1-4 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize electricity is applied to the second polarization subregion 2-1-2 and the 3rd polarization subregion 2-1-3
Pressure, the subregion 2-1-3 that polarize of the second polarization subregion 2-1-2 and the 3rd are made to shorten in the axial direction of piezoelectric ceramic piece 2 and voltage magnitude
Corresponding length, and then make azimuthal tilt where drive end bearing bracket 3 to the second polarization subregion 2-1-2 and the 3rd polarization subregion 2-1-3, it is real
The displacement output of the existing multiple degrees of freedom sandwich micro-containing operators；
The 3rd polarization subregion 2-1-3 on piezoelectric ceramic piece 2 and the 4th polarization subregion 2-1-4 are applied by excitation voltage source
Add positive energize voltage, make the 3rd polarization subregion 2-1-3 and the 4th polarization subregion 2-1-4 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize electricity is applied to the first polarization subregion 2-1-1 and the second polarization subregion 2-1-2
Pressure, the subregion 2-1-2 that polarize of the first polarization subregion 2-1-1 and second are made to shorten in the axial direction of piezoelectric ceramic piece 2 and voltage magnitude
Corresponding length, and then make azimuthal tilt where drive end bearing bracket 3 to the first polarization subregion 2-1-1 and the second polarization subregion 2-1-2, it is real
The displacement output of the existing multiple degrees of freedom sandwich micro-containing operators；
The second polarization subregion 2-1-2 on piezoelectric ceramic piece 2 and the 3rd polarization subregion 2-1-3 are applied by excitation voltage source
Add positive energize voltage, make the polarization of the second polarization subregion 2-1-2 and the 3rd subregion 2-1-3 overall in the axial direction of piezoelectric ceramic piece 2
Elongation length corresponding with voltage magnitude, negative energize electricity is applied to the 4th polarization subregion 2-1-4 and the first polarization subregion 2-1-1
Pressure, makes the 4th polarization subregion 2-1-4 and the first polarization subregion 2-1-1 shortens in the axial direction of piezoelectric ceramic piece 2 and voltage magnitude
Corresponding length, and then make azimuthal tilt where drive end bearing bracket 3 to the 4th polarization subregion 2-1-4 and the first polarization subregion 2-1-1, it is real
The displacement output of the existing multiple degrees of freedom sandwich micro-containing operators；
In summary, opposed polarity and width are applied by 4 polarization subregion 2-1 on the piezoelectric ceramic piece 2 to the present embodiment
The driving voltage of value, displacement of the micro-containing operators in multiple free degree directions can be achieved and export.
The present embodiment only illustrates to be had using 4 polarization subregion 2-1 on 4 layers of piezoelectric ceramic piece 2 and piezoelectric ceramic piece 2
The specific embodiment of identical polarised direction and equal areas, have for 4 polarization subregion 2-1 on 4 layers of piezoelectric ceramic piece 2
The situation of different polarised directions and/or unequal-area, this implementation can be realized by the amplitude or direction that change corresponding driving voltage
Function in example, also within protection scope of the present invention, this is no longer going to repeat them.
Although the present invention is described herein with reference to specific embodiment, it should be understood that, these realities
Apply the example that example is only principles and applications.It should therefore be understood that exemplary embodiment can be permitted
More modifications, and can be designed that other arrangements, the spirit of the invention limited without departing from appended claims and
Scope.It should be understood that different appurtenances can be combined by way of different from described by original claim
It is required that and feature specifically described herein.It will also be appreciated that the feature with reference to described by separate embodiments can be used at it
In his embodiment.
Claims (10)
1. a kind of multiple degrees of freedom sandwich micro-containing operators, it is characterised in that the micro-containing operators include pedestal (1), m is laminated
Electroceramics piece (2) and drive end bearing bracket (3), m are positive integer；
M layers piezoelectric ceramic piece (2) stack and it is radially fixed between pedestal (1) and drive end bearing bracket (3)；
Piezoelectric ceramic piece (2) be along the circumferential direction divided into several polarization subregion (2-1), polarization subregion (2-1) quantity be more than or
Equal to 3, radial polarization of the polarization subregion (2-1) along piezoelectric ceramic piece (2)；
Each polarization subregion (2-1) is connected with excitation voltage source.
2. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 1, it is characterised in that be installed with pedestal (1)
Guide pillar (1-1), m layers piezoelectric ceramic piece (2) is run through in the front end of guide pillar (1-1), and is threadedly coupled with drive end bearing bracket (3).
3. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 2, it is characterised in that drive end bearing bracket (3) is justified for truncation
Cone.
4. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 3, it is characterised in that the bottom surface of drive end bearing bracket (3) with
Piezoelectric ceramic piece (2) connects, and driving foot (3-1) is provided with the top surface of drive end bearing bracket (3).
5. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 1, it is characterised in that on piezoelectric ceramic piece (2)
The area all same of polarization subregion (2-1).
6. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 1, it is characterised in that on piezoelectric ceramic piece (2)
The polarised direction all same of polarization subregion (2-1).
7. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 1, it is characterised in that as m ＞ 1, m lamination electricity potteries
The quantity of polarization subregion (2-1) on ceramics (2) is equal or different.
8. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 7, it is characterised in that when m layers piezoelectric ceramic piece (2)
On polarization subregion (2-1) quantity it is equal when, the area all same of the polarization subregion (2-1) on m layers piezoelectric ceramic piece (2).
9. multiple degrees of freedom sandwich micro-containing operators as claimed in claim 8, it is characterised in that the m lamination electricity of stacked state
The polarised direction all same of polarization subregion (2-1) on potsherd (2).
10. the displacement output control method of the multiple degrees of freedom sandwich micro-containing operators described in claim 1, it is characterised in that
The direct control object of the displacement output control method is piezoelectric ceramic piece (2)；
The displacement output control method comprises the following steps：
Positive energize voltage or negative is applied to the both ends of each polarization subregion (2-1) of piezoelectric ceramic piece (2) by excitation voltage source
Driving voltage, and the amplitude of positive energize voltage or negative energize voltage is adjusted, make piezoelectric ceramic piece (2) overall elongated in its axial direction
Or shorten length corresponding with voltage magnitude, and then adjust drive end bearing bracket (3) position；
Positive energize voltage is applied to the n adjacent polarization subregion (2-1) on piezoelectric ceramic piece (2) by excitation voltage source, it is right
Remaining polarization subregion (2-1) applies negative energize voltage, and adjusts the amplitude of positive energize voltage and negative energize voltage, makes n polarization
Subregion (2-1) overall elongated in the axial direction of piezoelectric ceramic piece (2) length corresponding with positive energize voltage magnitude, makes remaining polarization
Subregion (2-1) integrally shortens length corresponding with negative energize voltage magnitude in the axial direction of piezoelectric ceramic piece (2), and then makes front end
Azimuthal tilt where covering (3) to remaining polarization subregion (2-1)；
N is positive integer and the total half for the polarization subregion (2-1) being more than or equal on piezoelectric ceramic piece (2).
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| CN109951104A (en) * | 2019-04-09 | 2019-06-28 | 哈尔滨工业大学 | A kind of ultraprecise five degree of freedom piezoelectricity positioning pose_adjuster and its motivational techniques |
| CN110635711A (en) * | 2019-07-05 | 2019-12-31 | 季华实验室 | Nano displacement linear stepping motor |
| CN110639785A (en) * | 2019-09-30 | 2020-01-03 | 程龙 | Ultrasonic transducer and ultrasonic knife handle |
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