CN101626207B - Vibrator of beam type rotary ultrasonic motor using bending vibration modes - Google Patents
Vibrator of beam type rotary ultrasonic motor using bending vibration modes Download PDFInfo
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- CN101626207B CN101626207B CN2009100727015A CN200910072701A CN101626207B CN 101626207 B CN101626207 B CN 101626207B CN 2009100727015 A CN2009100727015 A CN 2009100727015A CN 200910072701 A CN200910072701 A CN 200910072701A CN 101626207 B CN101626207 B CN 101626207B
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Abstract
A vibrator of a beam type rotary ultrasonic motor using bending vibration modes belongs to the technical field of piezoelectric ultrasonic motors and is used for the piezoelectric ultrasonic motors. The vibrator solves the problem that the mechanical output capabilities of the ultrasonic motors are restricted because of low tensile strength and low electromechanical coupling efficiency of ceramic materials in the prior art. The vibrator comprises four bending vibration compound transducers, eight thin-walled beams and four mounting bases; wherein, the bending vibration compound transducer comprises driving pads, front end covers, four piezoelectric ceramics, studs and rear end covers; the driving pads are positioned at the tail ends of the front end covers; the four piezoelectric ceramics are sleeved on the studs between the front end covers and the rear end covers; the four bending vibration compound transducers are symmetrically arranged in a plane in a cross shape; the four mounting bases are respectively arranged between every two adjacent thin-walled beams and are symmetrically aligned by sharing the same centers of symmetry with the four bending vibration compound transducers; the mounting bases are respectively fixed on the two rear end covers adjacent to two thin-walled beams by the two thin-walled beams; the bending vibration compound transducers respectively realize elliptical motion of the driving pads.
Description
Technical field
The present invention relates to a kind of vibrator of beam type rotary ultrasonic motor using bending vibration modes, belong to the piezoelectric ultrasonic motor field.
Background technology
Piezoelectric ultrasonic motor is a kind of inverse piezoelectric effect of utilizing piezoelectric ceramic, in elastomer, motivate the vibration in the supersonic range, form particle movement at surface of elastomer specified point or specific region with particular track, and then the microscopic motion of particle is converted to the macroscopic motion of rotor by the friction between stator, rotor coupling, have low speed high torque, need not gear, no electromagnetic interference, advantage such as response speed is fast and cut off self-lock, have very as a kind of piezoelectric actuator and to use widely.
For the simplicity of exiting principle and the simplicity of theoretical analysis method, piezoelectric ultrasonic motor adopts the mode of metallic elastic body stickup piezoelectric ceramic thin sheet to encourage mostly at present, owing to be subjected to the d of piezoelectric ceramic
31Pattern (piezoelectric ceramic is flexible along its length) mechanical-electric coupling efficient and ceramic material tensile strength are low, and the restriction of the intensity of glue-line and fatigue life etc., and such energisation mode makes the mechanical fan-out capability of ultrasound electric machine be subjected to serious restriction.
Summary of the invention
The purpose of this invention is to provide a kind of vibrator of beam type rotary ultrasonic motor using bending vibration modes, to solve the problem that prior art mechanical fan-out capability low because of ceramic material tensile strength and the low ultrasound electric machine that causes of mechanical-electric coupling efficient is restricted.
It is made up of four curved composite transducers 10 of shaking, eight thin walled beams 3 and four mount pads 4, and each is curved, and the composite transducer 10 that shakes is made up of the sufficient 1-1 of driving, front end housing 1, insulating case 6, four piezoelectric ceramic pieces 2, double-screw bolt 5, four electrode slices 8 and rear end cap 7; Front end housing 1 be the cross section be square and from the head end to the end tapered four prisms cylinder, described driving foot 1-1 is positioned at front end housing 1 end, an end of double-screw bolt 5 screws the center at the head end end face of front end housing 1; The other end of double-screw bolt 5 screws in the center of rear end cap 7 one end end faces, and four piezoelectric ceramic pieces 2 are enclosed within on the double-screw bolt 5 between front end housing 1 and the rear end cap 7; Be fixed with an electrode slice 8 respectively between rear end cap 7 and the piezoelectric ceramic piece 2 and between per two piezoelectric ceramic pieces 2; Between piezoelectric ceramic piece 2 and electrode slice 8 and double-screw bolt 5, be provided with insulating case 6; Four curved composite transducers 10 that shake are " cross " symmetric arrays in a plane and drive sufficient 1-1 and be positioned at the outside, four mount pads 4 be arranged at respectively every adjacent two curved shake between the composite transducer 10 and mount pad 4 with symmetrical the arranging of symmetrical centre of four curved composite transducers 10 that shake; Each mount pad 4 is separately fixed at by two thin walled beams 3 between two rear end caps 7 that are adjacent, and the plate face of the thin walled beam 3 of " sheet " shape is perpendicular to the axial line of its curved composite transducer of fixing 10 that shakes; Four piezoelectric ceramic pieces 2 in each curved composite transducer 10 that shakes polarize along thickness direction, every piezoelectric ceramic piece by cutting after two and half sheet piezoelectric ceramic piece 2-1 that reconfigure, the shape symmetry form, polarised direction is opposite between the two and half sheet piezoelectric ceramic piece 2-1, polarised direction between adjacent with the front end housing 1 a pair of piezoelectric ceramic piece 2 is opposite, polarised direction between a pair of piezoelectric ceramic piece 2 adjacent with rear end cap 7 is opposite, and vertical mutually between the segmentation lines of these two pairs of piezoelectric ceramic pieces 2.
Piezoelectric ceramic piece in the vibrator of beam type rotary ultrasonic motor using bending vibration modes of the present invention adopts amplitude to equate, frequency is transducer self resonance frequency, phase difference is+90 ° ac voltage signal excitation, utilize the vibration of the thickness direction of piezoelectric ceramic piece to bend the flexural vibration mode (two flexural vibration modes of single bending vibration transducer as illustrated in Figures 5 and 6) that motivates two quadratures in the composite transducer that shakes at each, two flexural vibration modes are superimposed upon and drive the surperficial particle generation of foot elliptical trajectory, and then by driving the macroscopic motion output of the friction coupling realization rotor between foot and the rotor, four drive foot participation driving simultaneously, can increase exponentially the mechanical fan-out capability of motor.If adjusting the phase difference of excitation signals is-90 °, can realize the rotor counter motion.Piezo ceramic element in the vibrator of beam type rotary ultrasonic motor using bending vibration modes of the present invention has adopted sandwich structure, adopts the d of the high mechanical-electric coupling efficient of piezoelectric ceramic
33Pattern (piezoelectric ceramic is flexible along thickness direction) work has solved the problem of pasting low, the mechanical fan-out capability difference of piezoelectric ceramic chip piezoelectric ultrasonic motor mechanical-electric coupling efficient.The present invention adopts along the excitation of the flexural vibration mode of two quadratures of four piezoelectric ceramic pieces realization transducers of thickness direction polarization, owing to adopt homotype mode, does not have the frequency degeneracy problem between mode; Front end housing adopts the variable cross-section design to play the effect of amassing wealth by heavy taxation of vibrational energy, can improve the amplitude and the vibration velocity that drive the surperficial particle of foot, makes motor performance be improved; Thin walled beam can realize that resiliency supported and vibration isolate, and makes the influence degree that connects the flexural vibration mode of oscillator of mount pad and other member drop to minimum.
But that vibrator of beam type rotary ultrasonic motor using bending vibration modes of the present invention has is simple in structure, flexible design, mechanical-electric coupling efficient height, can realize big moment output, stable performance, be easy to control the advantage of producing in serial form.
Description of drawings
Fig. 1 is the cutaway view of vibrator of beam type rotary ultrasonic motor using bending vibration modes of the present invention, Fig. 2 is the perspective view of vibrator of beam type rotary ultrasonic motor using bending vibration modes shown in Figure 1, Fig. 3 is the polarised direction schematic diagram of two pairs of piezoelectric ceramic pieces 2 among Fig. 1, Fig. 4 is the drive signal schematic diagram that is applied on the oscillator, Fig. 5 is the basic flexural vibration mode vibration shape schematic diagram of of single transducer, and Fig. 6 is another basic flexural vibration mode vibration shape schematic diagram of single transducer.
Embodiment
Embodiment one: specify present embodiment below in conjunction with Fig. 1 to Fig. 6.Present embodiment is made up of four curved composite transducers 10 of shaking, eight thin walled beams 3 and four mount pads 4, and each is curved, and the composite transducer 10 that shakes is made up of the sufficient 1-1 of driving, front end housing 1, insulating case 6, four piezoelectric ceramic pieces 2, double-screw bolt 5, four electrode slices 8 and rear end cap 7; Front end housing 1 be the cross section be square and from the head end to the end tapered four prisms cylinder, described driving foot 1-1 is positioned at front end housing 1 end, an end of double-screw bolt 5 screws the center at the head end end face of front end housing 1; The other end of double-screw bolt 5 screws the center at rear end cap 7 one end end faces; Driving sufficient 1-1 is the block that the cross section equates with the front end housing small end face, and drives sufficient 1-1 and front end housing 1 and be integral piece; Four piezoelectric ceramic pieces 2 are enclosed within on the double-screw bolt 5 between front end housing 1 and the rear end cap 7; Be fixed with an electrode slice 8 respectively between rear end cap 7 and the piezoelectric ceramic piece 2 and between per two piezoelectric ceramic pieces 2; Between piezoelectric ceramic piece 2 and electrode slice 8 and double-screw bolt 5, be provided with insulating case 6; Four curved composite transducers 10 that shake are " cross " symmetric arrays in a plane and drive sufficient 1-1 and be positioned at the outside, four mount pads 4 be arranged at respectively every adjacent two curved shake between the composite transducer 10 and mount pad 4 with symmetrical the arranging of symmetrical centre of four curved composite transducers 10 that shake; Each mount pad 4 is separately fixed at by two thin walled beams 3 between two rear end caps 7 that are adjacent, and the plate face of the thin walled beam 3 of " sheet " shape is perpendicular to the axial line of its curved composite transducer of fixing 10 that shakes; Described rear end cap, thin walled beam and mount pad are integral piece.Described thin walled beam 3 can be realized the effect that resiliency supported and vibration are isolated, and can drop to the influence degree that connects the flexural vibration mode of oscillator of oscillator and other member minimum.Four piezoelectric ceramic pieces 2 in each curved composite transducer 10 that shakes polarize along thickness direction, every piezoelectric ceramic piece by cutting after two and half sheet piezoelectric ceramic piece 2-1 that reconfigure, the shape symmetry form, polarised direction is opposite between the two and half sheet piezoelectric ceramic piece 2-1, polarised direction between a pair of piezoelectric ceramic piece 2 adjacent with front end housing 1 is opposite, polarised direction between a pair of piezoelectric ceramic piece 2 adjacent with rear end cap 7 is opposite, and vertical mutually between the segmentation lines of these two pairs of piezoelectric ceramic pieces 2.
The vibrator of beam type rotary ultrasonic motor using bending vibration modes of present embodiment is when using, and drive signal connects as shown in Figure 4, is the common port V of starting point first and the 3rd electrode slice and the driving power that begin to count from rear end cap in all transducers
0Connect the drive signal V of second electrode slice and driving power
1Connect the drive signal V of the 4th electrode slice and driving power
2Connect.
Embodiment two: the difference of present embodiment and embodiment one described vibrator of beam type rotary ultrasonic motor using bending vibration modes is that the cross section of described piezoelectric ceramic piece 2 is square or circular.
Claims (2)
1. vibrator of beam type rotary ultrasonic motor using bending vibration modes, it is characterized in that it is made up of four curved composite transducer (10), eight thin walled beams (3) and four mount pads (4) of shaking, form enough by (1-1), front end housing (1), insulating case (6), four piezoelectric ceramic pieces (2), double-screw bolt (5), four electrode slices (8) and rear end cap (7) by driving for each curved composite transducer (10) that shakes; Front end housing (1) be the cross section be square and from the head end to the end tapered four prisms cylinder, described driving foot (1-1) is positioned at front end housing (1) end, one end of double-screw bolt (5) screws the center at the head end end face of front end housing (1), the other end of double-screw bolt (5) screws in the center of rear end cap (7) one end end faces, and four piezoelectric ceramic pieces (2) are enclosed within on the double-screw bolt (5) between front end housing (1) and the rear end cap (7); Be fixed with an electrode slice (8) respectively between rear end cap (7) and the piezoelectric ceramic piece (2) and between per two piezoelectric ceramic pieces (2); Between piezoelectric ceramic piece (2) and electrode slice (8) and double-screw bolt (5), be provided with insulating case (6); Four curved composite transducers (10) that shake are " cross " symmetric arrays in a plane and drive foot (1-1) and be positioned at the outside, four mount pads (4) be arranged at respectively every adjacent two curved shake between the composite transducer (10) and mount pad (4) with symmetrical the arranging of symmetrical centre of four curved composite transducers (10) that shake; Each mount pad (4) is separately fixed at by two thin walled beams (3) between two rear end caps (7) that are adjacent, and the plate face of the thin walled beam (3) of " sheet " shape is perpendicular to the axial line of its curved composite transducer of fixing that shakes (10); Four piezoelectric ceramic pieces (2) in each curved composite transducer (10) that shakes polarize along thickness direction, every piezoelectric ceramic piece by cutting after two and half sheet piezoelectric ceramic pieces (2-1) that reconfigure, the shape symmetry form, polarised direction is opposite between the two and half sheet piezoelectric ceramic pieces (2-1), polarised direction between a pair of piezoelectric ceramic piece (2) adjacent with front end housing (1) is opposite, polarised direction between a pair of piezoelectric ceramic piece (2) adjacent with rear end cap (7) is opposite, and vertical mutually between the segmentation lines of these two pairs of piezoelectric ceramic pieces (2).
2. vibrator of beam type rotary ultrasonic motor using bending vibration modes according to claim 1, the cross section that it is characterized in that piezoelectric ceramic piece (2) is square or circular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100727015A CN101626207B (en) | 2009-08-19 | 2009-08-19 | Vibrator of beam type rotary ultrasonic motor using bending vibration modes |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100727015A CN101626207B (en) | 2009-08-19 | 2009-08-19 | Vibrator of beam type rotary ultrasonic motor using bending vibration modes |
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| Publication Number | Publication Date |
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| CN101626207A CN101626207A (en) | 2010-01-13 |
| CN101626207B true CN101626207B (en) | 2011-07-20 |
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| CN2009100727015A Expired - Fee Related CN101626207B (en) | 2009-08-19 | 2009-08-19 | Vibrator of beam type rotary ultrasonic motor using bending vibration modes |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103753603B (en) * | 2014-01-29 | 2016-06-22 | 哈尔滨工业大学 | Adopt the single-degree-of-freedom rotating mechanical arm that piezoelectric ultrasonic vibrator drives |
| CN105728306B (en) * | 2016-03-22 | 2018-06-26 | 中国计量学院 | The orthogonal tubular energy converter of composite drive piezoelectricity of cross |
| CN105689248B (en) * | 2016-03-22 | 2018-06-26 | 许龙 | The orthogonal tubular energy converter of composite drive piezoelectricity of cross |
| CN112217415B (en) * | 2019-07-09 | 2024-07-02 | 重庆邮电大学 | Frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof |
| CN115498917B (en) * | 2022-10-21 | 2024-08-02 | 山东大学 | Two-degree-of-freedom linear ultrasonic motor and working method thereof |
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