CN102437780A - Partition excitation type composite bending vibration linear ultrasonic motor oscillator - Google Patents

Partition excitation type composite bending vibration linear ultrasonic motor oscillator Download PDF

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Publication number
CN102437780A
CN102437780A CN2011103167864A CN201110316786A CN102437780A CN 102437780 A CN102437780 A CN 102437780A CN 2011103167864 A CN2011103167864 A CN 2011103167864A CN 201110316786 A CN201110316786 A CN 201110316786A CN 102437780 A CN102437780 A CN 102437780A
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piezoelectric ceramic
curved
shakes
ultrasonic motor
ceramic piece
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CN2011103167864A
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刘英想
刘军考
杨小辉
陈维山
石胜君
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention provides a partition excitation type composite bending vibration linear ultrasonic motor oscillator, belonging to the piezoelectric ultrasonic motor technology field. Problems that drive foot vibration characteristics of a present bending vibration modal girder type linear ultrasonic motor oscillator are inconsistent, and cutting combination arrangement of bending vibration piezoelectric ceramic sheets is not reasonable are solved. A center of a large end plane of an end cap is provided with a blind hole with internal screw thread. A flange is provided with two studs, each stud is in joint connection with two pairs of bending vibration piezoelectric ceramic sheets, and an end part of a stud is matched with the blind hole through screwing. An electrode slice is provided between adjacent bending vibration piezoelectric ceramic sheets and between a bending vibration piezoelectric ceramic sheet and a contact surface of the flange. The studs are provided with insulation sleeves. Two side surfaces of the flange are provided with two thin walled beams. Outboard of each of the thin walled beams is provided with an installation seat. A small end plane of the end cap is provided with a drive foot. Each bending vibration piezoelectric ceramic sheet is split into two no-bore rectangular piezoelectric ceramic sheets with a same size at two ends and a center hole rectangular piezoelectric ceramic sheet in the middle. The invention is applied to an ultrasonic motor oscillator.

Description

The compound curved linear ultrasonic motor oscillator that shakes of subregion excitation formula
Technical field
The present invention relates to the compound curved linear ultrasonic motor oscillator that shakes of a kind of subregion excitation formula, belong to the piezoelectric ultrasonic motor technical field.
Background technology
Piezoelectric ultrasonic motor is a kind of inverse piezoelectric effect of utilizing piezoelectric ceramic; In elastomer, motivate the vibration in the supersonic range; Form particle movement at surface of elastomer specified point or specific region with particular track; And then convert the microscopic motion of particle the motor of the macroscopic motion of rotor to through the friction between stator, rotor coupling, it has low speed high torque, need not gear, no electromagnetic interference, response speed soon and advantage such as cut off self-lock.
The sandwich ultrasound electric machine adopts the d of the high mechanical-electric coupling efficient of piezoelectric ceramic 33Pattern is worked, and can effectively improve the mechanical output characteristic of motor.But; Present most sandwich ultrasound electric machine adopts the excitation of the compound realization drive area particle elliptical vibration track of special-shaped mode of oscillation; The problem that at first faces in the design process is the degeneracy problem between the special-shaped mode of oscillation characteristic frequency; This has brought many restrictions for the structure of motor, is difficult to realize seriation.Chinese patent " vibrator of beam type linear ultrasonic motor using bending vibration modes "; Publication number is CN101626203A; Open day is on January 13rd, 2010; A kind of new configuration of piezoelectric ultrasonic motor that adopts homotype quadrature bending vibration modes to realize the double-driving foot linear drives has been proposed first, success avoided the mode degeneracy problem in the design process, but have advantage such as simple in structure, flexible design producing in serial form; But,, limited the raising of this motor thrust and speed because the asymmetry that piezoelectric ceramic is provided with makes two to drive sufficient vibration characteristics and inconsistent; In addition; This motor adopts the combination of the curved piezoelectric ceramic piece that shakes of half opposite sheet of polarised direction to realize the excitation of its bending vibration modes; Very little near the strain of oscillator axis portion on the curved piezoelectric ceramic piece that shakes of its bending vibration modes vibration shape explanation, the then curved piezoelectric ceramic that shakes is very little for curved excitation contribution of shaking near the part of neutral surface, therefore; Driving voltage to the curved amplitudes such as piezoelectric ceramic piece applies of shaking of full wafer is also unreasonable, and this can cause the reduction of oscillator energy conversion efficiency.
Summary of the invention
Inconsistent for the driving foot vibration characteristics that solves existing vibrator of beam type linear ultrasonic motor using bending vibration modes, the cutting combination of the curved piezoelectric ceramic piece that shakes is provided with irrational problem, provides a kind of subregion excitation formula the compound curved linear ultrasonic motor oscillator that shakes.
The compound curved linear ultrasonic motor oscillator that shakes of subregion excitation formula according to the invention, it comprises that two drive foot, two end caps, four pairs of curved shake piezoelectric ceramic piece, flange, two thin walled beams, two mount pads, insulating case and eight electrode slices,
Said end cap is that the cross section is square or circular and tapered block, and there is a tapped blind hole at the center of the large end face of end cap,
The center of two end faces of said flange all is provided with a double-screw bolt, two pairs of curved piezoelectric ceramic pieces that shake of equal socket on each double-screw bolt, and the blind hole of the end of each double-screw bolt and an end cap screws, the curved piezoelectric ceramic piece that shakes of this two couple compressed,
Adjacent curved shaking all is provided with electrode slice between the piezoelectric ceramic piece and between the contact-making surface of curved shake piezoelectric ceramic piece and flange,
Between the contact-making surface of all on every double-screw bolt curved shake piezoelectric ceramic piece and all electrode slices and these double-screw bolts insulating case is set,
Be symmetrical set two thin walled beams on two relative sides of flange, the outside of each thin walled beam is provided with a mount pad,
The small end face of each end cap is provided with and drives foot, and driving foot is the cross section block identical with this small end face shape;
The every curved piezoelectric ceramic piece that shakes is cut into two onesize no centre bore rectangular piezoelectric ceramic sheets and the middle band centre bore rectangular piezoelectric ceramic sheet that is positioned at two ends.
Said institute has or not centre bore rectangular piezoelectric ceramic sheet all along the thickness direction polarization, and all band centre bore rectangular piezoelectric ceramic sheets do not polarize,
The polarised direction of two no centre bore rectangular piezoelectric ceramic sheets of the every curved piezoelectric ceramic piece that shakes is opposite;
Every pair of polarised direction of bending the corresponding two no centre bore rectangular piezoelectric ceramic sheets in position in the piezoelectric ceramic piece that shakes is opposite,
The segmentation lines of the curved piezoelectric ceramic piece that shakes of two couple adjacent with flange is parallel to each other, and the segmentation lines of the curved piezoelectric ceramic piece that shakes of adjacent with end cap respectively two couple is parallel to each other,
The segmentation lines of the curved piezoelectric ceramic piece that shakes of two couple on the same double-screw bolt is vertical each other.
Advantage of the present invention is: the present invention adopts the excitation that realizes two homotype quadrature second order flexural vibration modes of oscillator along the curved piezoelectric ceramic piece that shakes of four couple of thickness direction polarization; Owing to adopt homotype mode; There is not the frequency degeneracy problem between mode, makes the oscillator design possess very big flexibility.
The present invention in use; The employing amplitude equates, frequency is pressed signal excitation for the curved characteristic frequency of shaking of oscillator second order, phase difference for+90 ° two-phase alternating current; Utilize the stretching vibration of piezoelectric ceramic piece in oscillator, to motivate the second order flexural vibration mode of two homotype quadratures; Two flexural vibration modes are superimposed upon two and drive the surperficial particle generation of foot elliptical trajectory in the same way; And then pass through to drive the macroscopic motion output that the friction between foot and the mover is coupled and realizes mover, two driving foot participations simultaneously drive, and can increase exponentially the mechanical fan-out capability of motor.Be-90 ° if adjust the phase difference of two phase pumping signals, can realize reverse drive.
Piezo ceramic element of the present invention adopts sandwich structure, adopts the d of the high mechanical-electric coupling efficient of piezoelectric ceramic 33Pattern work can effectively improve oscillator mechanical-electric coupling efficient, improve mechanical fan-out capability.End cap adopts the variable cross-section design to play the effect of amassing wealth by heavy taxation of vibrational energy, can improve the amplitude and the vibration velocity that drive the surperficial particle of foot, makes motor performance be improved; Thin walled beam can realize that resiliency supported and vibration isolate, and drops to the influence degree that is connected the flexural vibration mode of oscillator of mount pad and other member minimum.
The present invention adopts four pairs of curved piezoelectric ceramic pieces that shake to realize being symmetrical set of piezoelectric ceramic, makes that two drivings can be obtaining on all four vibration characteristics, thereby can effectively improve the mechanical output characteristic of motor; In addition; The every curved piezoelectric ceramic piece that shakes is three small pieces by cutting all among the present invention; Band centre bore rectangular piezoelectric ceramic sheet in the middle of being arranged at does not polarize; The stretching vibration that utilizes both sides not have a centre bore rectangular piezoelectric ceramic sheet through the symmetrical expression of hyperpolarization realizes the excitation of oscillator bending vibration modes, and the reasonability of excitation area setting is improved, and can effectively improve the mechanical-electric coupling efficient of oscillator.
But that the present invention has is simple in structure, flexible design, mechanical-electric coupling efficient are high, can realize big moment output, stable performance, be easy to control the advantage of producing in serial form.
Description of drawings
Fig. 1 is the cutaway view of oscillator of the present invention;
Fig. 2 is the perspective view of oscillator of the present invention;
Fig. 3 is the polarised direction sketch map of four pairs of curved piezoelectric ceramic pieces that shake among the present invention;
Fig. 4 is first basic flexural vibration mode vibration shape sketch map of oscillator according to the invention;
Fig. 5 is second basic flexural vibration mode vibration shape sketch map of oscillator according to the invention.
Embodiment
Embodiment one: this execution mode is described below in conjunction with Fig. 1 and Fig. 2; The compound curved linear ultrasonic motor oscillator that shakes of the said subregion excitation of this execution mode formula; It comprises that two drive sufficient 1-1, two end caps 1, the four pairs of curved piezoelectric ceramic pieces 2 that shake, flange 3, two thin walled beams 5, two mount pads 4, insulating case 6 and eight electrode slices 7
Said end cap 1 is square or circular and tapered block for the cross section, and there is a tapped blind hole at the center of the large end face of end cap 1,
The center of two end faces of said flange 3 all is provided with a double-screw bolt 3-1, and each double-screw bolt 3-1 goes up two pairs of curved piezoelectric ceramic pieces 2 that shake of equal socket, and the blind hole of the end of each double-screw bolt 3-1 and an end cap 1 screws, the curved piezoelectric ceramic piece 2 that shakes of this two couple is compressed,
Adjacent curved shaking all is provided with electrode slice 7 between the piezoelectric ceramic piece 2 and between the contact-making surface of curved shake piezoelectric ceramic piece 2 and flange 3,
Between the contact-making surface of on every double-screw bolt 3-1 all curved shake piezoelectric ceramic piece 2 and all electrode slices 7 and this double-screw bolt 3-1 insulating case 6 is set,
Be symmetrical set two thin walled beams 5 on two relative sides of flange 3, the outside of each thin walled beam 5 is provided with a mount pad 4,
The small end face of each end cap 1 is provided with and drives sufficient 1-1, and driving sufficient 1-1 is the cross section block identical with this small end face shape;
The every curved piezoelectric ceramic piece 2 that shakes is cut into two onesize no centre bore rectangular piezoelectric ceramic sheet 2-1 and the middle band centre bore rectangular piezoelectric ceramic sheet 2-2 that is positioned at two ends.
This execution mode is cut into three sections with the every curved piezoelectric ceramic piece 2 that shakes; Having solved present vibrator of beam type linear ultrasonic motor using bending vibration modes will bend the piezoelectric ceramic piece that shakes and be divided into two and half sheets; It is unreasonable to exist the cutting combination to be provided with, and then causes the piezoelectric ceramic excitation area that irrational problem is set.
Flange 3 has been realized the clamping to the curved piezoelectric ceramic piece 2 that shakes of two couple therebetween with screwing of each end cap 1.Thin walled beam 5 can be realized the resiliency supported of motor oscillator and vibration are isolated, and can drop to the influence degree to the flexural vibration mode of oscillator that is caused by oscillator and being connected of other member minimum.
The said motor oscillator of this execution mode is when using; With the eight curved direction serial numbers of piezoelectric ceramic piece 2 of shaking in four pairs of curved piezoelectric ceramic pieces 2 that shake from an end cap 1 to another end cap 1; The second, four, five, seven electrode slices 7 are connected with the common port of driving power; The first, a phase drive signal of eight electrode slices 7 and driving power is connected, the 3rd, six electrode slice 7 and driving power other one mutually drive signal connect.
Embodiment two: below in conjunction with Fig. 2 this execution mode is described, this execution mode is for to the further specifying of execution mode one, and this execution mode also comprises two friction plates 8,
Said each output coupling side that drives sufficient 1-1 is provided with rectangular channel, is provided with friction plate 8 in this rectangular channel.
Embodiment three: this execution mode is for to the further specifying of execution mode one or two, and the cross section of the said curved piezoelectric ceramic piece 2 that shakes of this execution mode is square.
Embodiment four: this execution mode is for to the further specifying of execution mode one, two or three, and sufficient 1-1 of the said driving of this execution mode and end cap 1 are integral piece, and said flange 3, two double-screw bolt 3-1, two thin walled beams 5 and two mount pads 4 are integral piece.
Embodiment five: this execution mode is described below in conjunction with Fig. 3, Fig. 4 and Fig. 5; This execution mode is further specifying execution mode one, two, three or four; The said institute of this execution mode has or not centre bore rectangular piezoelectric ceramic sheet 2-1 all to polarize along thickness direction; All band centre bore rectangular piezoelectric ceramic sheet 2-2 do not polarize
The polarised direction of two no centre bore rectangular piezoelectric ceramic sheet 2-1 of the every curved piezoelectric ceramic piece 2 that shakes is opposite;
Every pair of polarised direction of bending the corresponding two no centre bore rectangular piezoelectric ceramic sheet 2-1 in position in the piezoelectric ceramic piece 2 that shakes is opposite,
The segmentation lines of two couples curved the shake piezoelectric ceramic piece 2 adjacent with flange 3 is parallel to each other, and the segmentation lines of adjacent with the end cap 1 respectively curved piezoelectric ceramic piece 2 that shakes of two couples is parallel to each other,
The segmentation lines of the curved piezoelectric ceramic piece 2 that shakes of two couple on the same double-screw bolt 3-1 is vertical each other.
Referring to Fig. 4 and shown in Figure 5, be two kinds of basic flexural vibration mode vibration shape sketch mapes of the compound curved linear ultrasonic motor oscillator that shakes of subregion excitation formula of the present invention.

Claims (5)

1. a subregion encourages the compound curved linear ultrasonic motor oscillator that shakes of formula; It comprises that two drive foot (1-1), two end caps (1), four pairs of curved shake piezoelectric ceramic piece (2), flange (3), two thin walled beams (5), two mount pads (4), insulating case (6) and eight electrode slices (7), is characterized in that:
Said end cap (1) is square or circular and tapered block for the cross section, and there is a tapped blind hole at the center of the large end face of end cap (1),
The center of two end faces of said flange (3) all is provided with a double-screw bolt (3-1); Each double-screw bolt (3-1) is gone up two pairs of curved piezoelectric ceramic pieces (2) that shake of equal socket; The blind hole of an end of each double-screw bolt (3-1) and an end cap (1) screws, and the curved piezoelectric ceramic piece (2) that shakes of this two couple is compressed
Adjacent curved shaking all is provided with electrode slice (7) between the piezoelectric ceramic piece (2) and between the contact-making surface of curved shake piezoelectric ceramic piece (2) and flange (3),
Between the contact-making surface of all on the every double-screw bolt (3-1) curved shake piezoelectric ceramic piece (2) and all electrode slices (7) and this double-screw bolt (3-1) insulating case (6) is set,
Be symmetrical set two thin walled beams (5) on two relative sides of flange (3), the outside of each thin walled beam (5) is provided with a mount pad (4),
The small end face of each end cap (1) is provided with and drives foot (1-1), and driving foot (1-1) is the cross section block identical with this small end face shape;
The every curved piezoelectric ceramic piece (2) that shakes is cut into two onesize no centre bore rectangular piezoelectric ceramic sheets (2-1) and the middle band centre bore rectangular piezoelectric ceramic sheet (2-2) that is positioned at two ends.
2. the compound curved linear ultrasonic motor oscillator that shakes of subregion excitation formula according to claim 1, it is characterized in that: it also comprises two friction plates (8),
The output coupling side of said each driving foot (1-1) is provided with rectangular channel, is provided with friction plate (8) in this rectangular channel.
3. the compound curved linear ultrasonic motor oscillator that shakes of subregion excitation formula according to claim 1 is characterized in that:
The cross section of the said curved piezoelectric ceramic piece (2) that shakes is square.
4. the compound curved linear ultrasonic motor oscillator that shakes of subregion excitation formula according to claim 1; It is characterized in that: said driving foot (1-1) and end cap (1) are integral piece, and said flange (3), two double-screw bolts (3-1), two thin walled beams (5) and two mount pads (4) are integral piece.
5. according to claim 1,2, the compound curved linear ultrasonic motor oscillator that shakes of 3 or 4 described subregion excitation formulas, it is characterized in that:
Said institute has or not centre bore rectangular piezoelectric ceramic sheet (2-1) all along the thickness direction polarization, and all band centre bore rectangular piezoelectric ceramic sheets (2-2) do not polarize,
The polarised direction of two no centre bore rectangular piezoelectric ceramic sheets (2-1) of the every curved piezoelectric ceramic piece (2) that shakes is opposite;
The polarised direction of every pair of curved middle corresponding two no centre bore rectangular piezoelectric ceramic sheets in position (2-1) of piezoelectric ceramic piece (2) that shake is opposite,
The segmentation lines of the curved piezoelectric ceramic piece (2) that shakes of two couple adjacent with flange (3) is parallel to each other, and the segmentation lines of the curved piezoelectric ceramic piece (2) that shakes of adjacent with end cap (1) respectively two couple is parallel to each other,
The segmentation lines of the curved piezoelectric ceramic piece (2) that shakes of two couple on the same double-screw bolt (3-1) is vertical each other.
CN2011103167864A 2011-10-18 2011-10-18 Partition excitation type composite bending vibration linear ultrasonic motor oscillator Pending CN102437780A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102868315A (en) * 2012-10-12 2013-01-09 哈尔滨工业大学 Paster-type bending vibration composite dual-feet ultrasound motor oscillator
CN104022678A (en) * 2014-06-25 2014-09-03 哈尔滨工业大学 Partitioning stimulation type oscillator for three-degree-of-freedom ultrasonic motor
CN106741773A (en) * 2016-12-01 2017-05-31 南京航空航天大学 A kind of bionical tadpole of sandwich Piezoelectric Driving and its working method
CN106864771A (en) * 2017-03-06 2017-06-20 南京航空航天大学 A kind of sandwich Piezoelectric Driving four-wheel planetary detecting robot and its method of work

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Publication number Priority date Publication date Assignee Title
JP2008011651A (en) * 2006-06-29 2008-01-17 Canon Inc Vibrational wave driver
CN100514833C (en) * 2007-03-20 2009-07-15 哈尔滨工业大学 Sandwich transducer type longitudinal and bending linear ultrasound motor with frequency-modulating variable-amplitude rod
CN101626203A (en) * 2009-08-19 2010-01-13 哈尔滨工业大学 Vibrator of beam type linear ultrasonic motor using bending vibration modes

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2008011651A (en) * 2006-06-29 2008-01-17 Canon Inc Vibrational wave driver
CN100514833C (en) * 2007-03-20 2009-07-15 哈尔滨工业大学 Sandwich transducer type longitudinal and bending linear ultrasound motor with frequency-modulating variable-amplitude rod
CN101626203A (en) * 2009-08-19 2010-01-13 哈尔滨工业大学 Vibrator of beam type linear ultrasonic motor using bending vibration modes

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Title
刘军考,刘英想,杨小辉: "弯振复合型超声电机的研究", 《2011年机械电子学学术会议论文集》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102868315A (en) * 2012-10-12 2013-01-09 哈尔滨工业大学 Paster-type bending vibration composite dual-feet ultrasound motor oscillator
CN104022678A (en) * 2014-06-25 2014-09-03 哈尔滨工业大学 Partitioning stimulation type oscillator for three-degree-of-freedom ultrasonic motor
CN106741773A (en) * 2016-12-01 2017-05-31 南京航空航天大学 A kind of bionical tadpole of sandwich Piezoelectric Driving and its working method
CN106864771A (en) * 2017-03-06 2017-06-20 南京航空航天大学 A kind of sandwich Piezoelectric Driving four-wheel planetary detecting robot and its method of work
CN106864771B (en) * 2017-03-06 2023-04-07 南京航空航天大学 Sandwich type piezoelectric driving four-wheel planetary detection robot and working method thereof

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Application publication date: 20120502