CN1633022A - Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor - Google Patents
Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor Download PDFInfo
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- CN1633022A CN1633022A CN 200410101574 CN200410101574A CN1633022A CN 1633022 A CN1633022 A CN 1633022A CN 200410101574 CN200410101574 CN 200410101574 CN 200410101574 A CN200410101574 A CN 200410101574A CN 1633022 A CN1633022 A CN 1633022A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 97
- 239000002905 metal composite material Substances 0.000 title claims abstract description 20
- 238000002604 ultrasonography Methods 0.000 title claims description 20
- 230000005684 electric field Effects 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 11
- 230000005284 excitation Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 10
- 230000033001 locomotion Effects 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000002783 friction material Substances 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 239000002131 composite material Substances 0.000 abstract 1
- 206010049214 Monopodia Diseases 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005086 pumping Methods 0.000 description 7
- 230000001105 regulatory effect Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Abstract
This invention relates to a vibration linear supersonic motor in a piezoelectric ceramic metal composite plate composed of a stator, a runner outputting moment and a pre-press unit pressing the runner, among which, the stator is composed of eight ceramic plates and a metal plate, a driving foot is set at the side of the metal plate, the ceramic plates are adhered to both surfaces of the metal plate to be polarized along the thickness direction of the stator, an outer electrode is coated on the surface of ceramic plates to excitation electrode for applying electric field along the direction vertical to the ceramic polarized direction and composite vibration is excited on the stator.
Description
Technical field
The invention belongs to the applications of ultrasound field, particularly a kind of structural design of linear type ultrasound wave pressure electricity motor.
Background technology
Piezoelectric ultrasonic motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of stator, rotor or functional parts such as mover and pre-pressure mechanism.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by frictional force drives rotor between stator and rotor or the mover or mover motion.Ultrasound electric machine has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load;
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine;
3, starting stops response soon, and the response time is less than 1 millisecond;
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet;
5, self-sustaining moment is arranged, gearless gap, but precision positioning;
6, move quiet noiseless.
The ultrasonic linear motor of complex vibration pattern is a kind of of ultrasound electric machine in the employing face.This linear electric motors are compared with the ultrasonic linear motor that adopts other vibration modes, and advantage is that under the same power output (or moment), its driving mechanism (stator) can be done forr a short time, and weight is lighter.The ultrasonic linear motor of complex vibration mode in the face of present existing procuctsization.
The ultrasonic linear motor of common complex vibration pattern has adopted piezoelectric ceramic plate to make stator, as shown in Figure 1, wherein, Fig. 1 (a) is a kind of ultrasonic linear motor that adopts piezoelectric ceramic plate to make the complex vibration pattern of stator, it adopts a monoblock piezoelectric ceramic plate to make stator, piezoelectric ceramic plate is polarized along thickness direction, and be divided into four the district 111,112,113 and 114, wherein distinguish 111 for two of the diagonal angle, 114 add the sinwt pumping signal, two other district 112 at diagonal angle, 113 add the coswt pumping signal, on piezoelectric ceramic plate, inspire the complex vibration mode of longitudinal vibration and flexural vibrations by pre-pressure mechanism 117, drive movers 116 motions with driving head 115.Fig. 1 (b) is the drive principle schematic diagram of these linear electric motors.Wherein 121 is rectangular slabs, and it drives 122 driving heads and vibrates together, drives mover 123 motions.Linear type ultrasound motor can obtain extensive use at aspects such as small-sized, micromachine, precision positioning, SERVO CONTROL and space flight, the application of ultrasound electric machine can be pushed to a new stage.But the ultrasonic linear motor that adopts piezoelectric ceramic plate to make stator exists piezoelectric ceramic plate to break easily, the shortcoming of clamping difficulty.
Summary of the invention
The objective of the invention is for overcoming the weak point of prior art, a kind of piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor is proposed, this motor is with respect to adopting the monoblock piezoelectric ceramic plate to make the linear electric motors of stator, its advantage is that the polarization mode and the layout of pottery is more flexible, is convenient to install and repair.
The employing piezoelectric ceramic metal composite plate that the present invention proposes is made the ultrasonic wave linear piezoelectric motor of stator, mainly by the stator that encourages ultrasonic vibration, and the mover of output torque and the pre-pressure mechanism composition that pressurizes to mover; Said stator is made of the piezoelectric ceramic piece and the metallic plate of eight excited vibrations, the side of this metallic plate is provided with the driving foot that makes the mover motion, this each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all the thickness direction along stator polarizes, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness, be used for applying electric field, utilize the d of piezoelectric ceramic along the direction vertical with the piezoelectric ceramic polarised direction
31Effect motivates on stator bends the complex vibration that shakes with longitudinal vibration.
Driving can be thought rectangle, semicircle and boss shape raised structures completely.
Characteristics of the present invention and effect:
The ultrasound electric machine compact conformation of the present invention's design be convenient to install and repair, but the array use provides bigger actuating force.The present invention will obtain extensive use at aspects such as small-sized, micromachine, precision positioning, SERVO CONTROL and science and techniques of defence, wide application prospect is arranged.
Description of drawings
Fig. 1 has adopted piezoelectric ceramic plate to make the ultrasonic linear motor structure and the drive principle schematic diagram of complex vibration mode in the face of stator.
Fig. 2 is the stator structure and the excitation schematic diagram of the piezoelectric ceramic metal composite plate in-plane vibration ultrasonic linear motor of side biped driving.
Fig. 3 is the stator structure and the excitation schematic diagram of the piezoelectric ceramic metal composite plate in-plane vibration ultrasonic linear motor of end monopodia driving.
Fig. 4 is embodiments of the invention one---double-pin linear driving mechanism schematic diagram.
Fig. 5 is embodiments of the invention two---monopodia straight line driving mechanism schematic diagram.
Fig. 6 is embodiments of the invention three---monopodia rotary drive mechanism schematic diagram.
Embodiment:
Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor of the present invention reaches three kinds of embodiment in conjunction with the accompanying drawings and is respectively described below:
The employing piezoelectric ceramic metal composite plate that the present invention proposes is made the ultrasonic wave linear piezoelectric motor of stator, mainly by the stator that encourages ultrasonic vibration, and the mover of output torque and the pre-pressure mechanism composition that pressurizes to mover; Said stator is made of the piezoelectric ceramic piece and the metallic plate of excited vibration, this piezoelectric ceramic piece is along the thickness direction polarization of stator, symmetry sticks on two surfaces of metallic plate, the polarised direction of the piezoelectric ceramic piece of symmetric position identical (with respect to the method direction of stickup metal sheet surface), the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness, be used for applying electric field, utilize the d of piezoelectric ceramic along the direction vertical with the piezoelectric ceramic polarised direction
31Effect motivates on stator bends the complex vibration that shakes with longitudinal vibration.Stator has side biped and two kinds of drive forms of end monopodia, as shown in Figures 2 and 3.Wherein, the piezoelectric ceramic metal composite plate stator structure that Fig. 2 drives for the side biped, piezoelectric ceramic 21,22,23,24,25,26,27,28 sticks on the metallic plate 210, and double-driving foot 211 is arranged on the side; The piezoelectric ceramic metal composite plate stator structure that Fig. 3 drives for the end monopodia, piezoelectric ceramic 31,32,33,34,35,36,37,38 sticks on the metallic plate 310, and single-driving foot 311 is arranged on the side.The piezoelectric ceramic piece bonding method of above-mentioned two kinds of structures has three kinds: first kind of all piezoelectric ceramic piece polarised direction (with respect to the method direction of stickup metal sheet surface) is all identical, second kind be two piezoelectric ceramic pieces 21,24,25,28 (or 31,34,35,38) polarised direction (with respect to the method direction of stickup metal sheet surface) at diagonal angle for just, and two piezoelectric ceramic pieces 22,23,26,27 (or 32,33,36,37) polarised direction in addition at diagonal angle is for negative.The third is that piezoelectric ceramic piece 21,25 and 22,26 (or 31,35 and 32,36) polarised direction (with respect to the method direction of stickup metal sheet surface) is opposite, and piezoelectric ceramic piece 23,24,27,28 (or 33,34,37,38) polarised direction is identical.
The form that drives foot 211 and 311 can also can be semicircle and boss shape for rectangle (shown in 2 figure).
The polarised direction difference of above-mentioned each piezoelectric ceramic piece, the energisation mode of electric field are also corresponding different, and the essence that adds excitation electrical field is for longitudinal vibration that inspires certain phase difference on stator and flexural vibrations.
All piezoelectric ceramic piece polarised direction (with respect to the method direction of stickup metal sheet surface) homogeneous phase while when pasting, the mode that applies of electric field is:
1) two of the diagonal angle piezoelectric ceramic pieces 21,24,25,28 (or 31,34,35,38) add the sinwt signal, and two other piezoelectric ceramic piece 22,23,26,27 (or 32,33,36,37) at diagonal angle adds cos (wt+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor;
2) or piezoelectric ceramic piece 21,25 (or 31,35) add the sinwt signal, piezoelectric ceramic piece 22,26 (or 32,36) adds-the sinwt signal, piezoelectric ceramic piece 23,24,27,28 (or 33,34,37,38) adds cos (wt+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
Piezoelectric ceramic piece 21,24,25,28 (or 31,34,35,38) polarised direction (with respect to the method direction of stickup metal sheet surface) is for just when pasting, and piezoelectric ceramic piece 22,23,26,27 (or 32,33,36,37) polarised direction is when negative, and the mode that applies of electric field is:
1) two of the diagonal angle piezoelectric ceramic pieces 21,24,25,28 (or 31,34,35,38) add the sinwt signal, and two other piezoelectric ceramic piece 22,23,26,27 (or 32,33,36,37) at diagonal angle adds cos (wt+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
2) or piezoelectric ceramic piece 21,22,25,26 (or 31,32,35,36) add the sinwt signal, piezoelectric ceramic piece 23,27 (or 33,37) adds cos (wt+ θ) signal, piezoelectric ceramic piece 24,28 or (34,38) add-cos (wt+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
Piezoelectric ceramic piece 21,25 and 22,26 (or 31,35 and 32,36) polarised direction (with respect to the method direction of stickup metal sheet surface) is opposite, and piezoelectric ceramic piece 23,24,27,28 (or 33,34,37,38) is when polarised direction is identical, and the mode that applies of electric field is:
Piezoelectric ceramic piece 21,25,22,26 (or 31,35,32,36) adds the sinwt signal, and piezoelectric ceramic piece 23,27,24,28 (or 33,37,34,38) adds cos (wt+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
Embodiment one is the double-pin linear driving mechanism
The main feature of this structure is: stator is made up of 8 piezoelectric ceramic pieces 41 that metallic plate 48 and symmetry stick on the metallic plate two sides.Stator drives foot 43 driving movers 42 by two and does rectilinear motion.Elastic restraint (spring pad) 46 applies a power by the centre bore on the stator 45 to stator, makes to keep a suitable precompression between stator and the rotor.It is that elastic restraint 48 is added on three side surfaces of metallic plate of stator that another of precompression applies scheme.In order to increase the life-span of motor, can drive sufficient drive surfaces coating wearing layer, and on the contact surface of mover 42, paste friction material 44.
Embodiment two is the monopodia straight line driving mechanism
The main feature of this structure is: stator is made up of 8 piezoelectric ceramic pieces 51 that metallic plate 56 and symmetry stick on the metallic plate two sides.Stator drives foot 54 driving movers 53 by one and does rectilinear motion.Elastic restraint (spring pad) 52 applies power to stator on three side surfaces of the metallic plate of stator, make to keep a suitable precompression between stator and the rotor.In order to increase the life-span of motor, can drive sufficient drive surfaces coating wearing layer, and on the contact surface of mover 53, paste friction material 55.
Embodiment three is the monopodia rotary drive mechanism
The main feature of this structure is: stator is made up of 8 piezoelectric ceramic pieces 61 that metallic plate 66 and symmetry stick on the metallic plate two sides.Stator drives foot 63 driving rotors 65 by one and rotates.Elastic restraint (spring pad) 62 applies power to stator on three side surfaces of the metallic plate of stator, make to keep a suitable precompression between stator and the rotor.In order to increase the life-span of motor, can drive sufficient drive surfaces coating wearing layer, and on the contact surface of rotor 65, paste friction material 64.
Claims (9)
1, a kind of piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor, mainly by the stator that encourages ultrasonic vibration, the mover of output torque and the pre-pressure mechanism composition that pressurizes to mover, it is characterized in that, said stator is made of the piezoelectric ceramic piece and the metallic plate of eight excited vibrations, and the side of this metallic plate is provided with the driving foot that makes the mover motion; This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all the thickness direction along stator polarizes, the polarised direction of the piezoelectric ceramic piece of symmetric position identical (with respect to the method direction of stickup metal sheet surface), the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness, be used for applying excitation electrical field, utilize the d31 piezoelectric effect of piezoelectric ceramic on stator, to motivate curved shaking and the complex vibration of longitudinal vibration along the piezoelectric ceramic polarised direction.
2, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 1, it is characterized in that, described all piezoelectric ceramic piece polarised direction homogeneous phases simultaneously, the mode that applies of electric field is: piezoelectric ceramic piece (21,24,25,28) adds the sinwt signal, and piezoelectric ceramic piece (22,23,26,27) adds cos (wt+ θ) signal; Perhaps piezoelectric ceramic piece (21,25) adds the sinwt signal, and piezoelectric ceramic piece (22,26) adds-the sinwt signal, and piezoelectric ceramic piece (23,24,27,28) adds cos (wt+ θ) signal.
3, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 1, it is characterized in that, described piezoelectric ceramic piece (21,24,25,28) polarised direction is for just, when piezoelectric ceramic piece (22,23,26,27) polarised direction is negative, the mode that applies of electric field is: piezoelectric ceramic piece (21,24,25,28) adds the sinwt signal, and piezoelectric ceramic piece (22,23,26,27) adds cos (wt+ θ) signal; Perhaps piezoelectric ceramic piece (21,25,22,26) adds the sinwt signal, and piezoelectric ceramic piece (23,27) adds cos (wt+ θ) signal, and piezoelectric ceramic piece (24,28) adds-cos (wt+ θ) signal.
4, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 1, it is characterized in that, described piezoelectric ceramic piece (21,25 and 22,26) polarised direction is opposite, and piezoelectric ceramic piece (23,24,27,28) is when polarised direction is identical, the mode that applies of electric field is: piezoelectric ceramic piece (21,25,22,26) adds the sinwt signal, and piezoelectric ceramic piece (23,27,24,28) adds cos (wt+ θ) signal.
5, as claim 1,2,3 or 4 described piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motors, it is characterized in that, the described foot that drives adopts two driving movers that are located at this metallic plate one side to do straight-line driving foot, middle part at this metallic plate has installing hole, described pre-pressure mechanism adopts the spring pad that is fixed in the described installing hole, or is fixed on four springs on other three side surfaces of this metallic plate.
6, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 5 is characterized in that, drives the drive surfaces coating wearing layer of foot at this, and paste friction material on the contact surface of described mover.
7, as claim 1,2,3 or 4 described piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motors, it is characterized in that, the described foot that drives adopts of being located at this metallic plate one side to drive the driving foot that mover is done straight line or rotatablely moved, and described pre-pressure mechanism adopts four springs on other three side surfaces that are fixed on this metallic plate.
8, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 7 is characterized in that, drives the drive surfaces coating wearing layer of foot at this, and paste friction material on the contact surface of described mover.
As claim 1,6 or 8 described piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motors, it is characterized in that 9, described driving foot adopts rectangle, semicircle or boss shape raised structures.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004101015744A CN100514832C (en) | 2004-12-24 | 2004-12-24 | Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor |
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| CNB2004101015744A CN100514832C (en) | 2004-12-24 | 2004-12-24 | Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor |
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| CN1633022A true CN1633022A (en) | 2005-06-29 |
| CN100514832C CN100514832C (en) | 2009-07-15 |
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| CN101071997B (en) * | 2007-04-05 | 2011-05-11 | 南京航空航天大学 | Square plate linear ultrasonic motor and electric exciting manner |
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| CN100488020C (en) * | 2005-12-12 | 2009-05-13 | 南京航空航天大学 | Linear ultrasonic motor |
| CN101071997B (en) * | 2007-04-05 | 2011-05-11 | 南京航空航天大学 | Square plate linear ultrasonic motor and electric exciting manner |
| CN102684547B (en) * | 2011-03-14 | 2015-03-25 | 江海 | Composite metal ceramic tubular piezoelectric motor |
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| CN107418894A (en) * | 2017-08-15 | 2017-12-01 | 南京航空航天大学 | A kind of shake platform for wave bioreactor Piezoelectric Driving |
| CN113572387A (en) * | 2021-07-27 | 2021-10-29 | 杭州电子科技大学 | Piezoelectric actuator with tuning fork type structure and working method thereof |
| CN113572387B (en) * | 2021-07-27 | 2023-06-02 | 杭州电子科技大学 | Piezoelectric actuator with tuning fork structure and working method thereof |
| CN113659868A (en) * | 2021-08-23 | 2021-11-16 | 金陵科技学院 | Modal decoupling three-partition piezoelectric ceramic single-foot or double-foot ultrasonic motor and excitation mode thereof |
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