CN1258864C - Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor - Google Patents
Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor Download PDFInfo
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- CN1258864C CN1258864C CN 02100687 CN02100687A CN1258864C CN 1258864 C CN1258864 C CN 1258864C CN 02100687 CN02100687 CN 02100687 CN 02100687 A CN02100687 A CN 02100687A CN 1258864 C CN1258864 C CN 1258864C
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Abstract
The present invention relates to an ultrasonic micro-motor of a piezoelectric column with an electric conductive shaft, and a polarization and excitation method of electrodes. The present invention is characterized in that a stator comprises a piezoelectric column and a matching block which are used for exciting vibration and are internally connected with an electric conductive shaft. The outer wall of the piezoelectric column is coated with four outer electrodes which are uniformly distributed and are used for polarization and exciting vibration. The electric conductive shaft is used as an electrode as polarization. The four electrodes are used as the other electrode after parallel connection, and carry out polarization in the axial direction. Otherwise, the electric conductive shaft is used as an electrode. Two adjacent pairs of electrodes are respectively used as an electrode, and respectively carry out positive and reverse polarization in the radial direction. The four electrodes are simultaneously and respectively provided with four channels of the alternate current signals of Sin, Cos,-Sin and-Cos after the four electrodes are welded with welding sheets and conductive wires as excitation. Otherwise, the two pairs of electrodes at opposite corners are respectively provided with the alternate current signals of Sin and Cos. The motor can do curved yawing vibration. The motor can process the size of 0.3MM to 3MM, and promotes the miniaturization of ultrasonic motors. When the peak value of inputted electric signals is 2 V to 6 V, a rotor can obviously rotate on the surface of the stator. The present invention has extensive application foreground in biology, medical care, micro machinery and military industry.
Description
Technical field
A kind of ultrasound micro-motor of the piezo column with conductive shaft belongs to ultrasonic wave electrical micro-machine technical field, relates in particular to the ultrasonic wave electrical micro-machine of a class flexural vibration mode.
Background technology
Piezoelectric ultrasonic motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of functional parts such as stator, rotor and pre-pressure mechanisms.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by the frictional force drives rotor motion between stator and the rotor.Ultrasound electric machine has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load.
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine.
3, starting stops response soon, and the response time is less than 1 millisecond.
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet.
5, self-sustaining moment is arranged, gearless gap, but precision positioning.
6, move quiet noiseless.
The flexural vibration mode supersonic motor is a kind of of ultrasound electric machine, other ultrasound electric machine is fairly simple relatively for its structure, same mainly by the stator that encourages ultrasonic vibration, rotor/the axle of output torque and the compositions such as pre-pressure mechanism that pressurize to rotor, said stator mainly is made of the piezo ceramic element and the match block of excited vibration again.The flexural vibration mode supersonic motor is divided into piezoelectric patches drive motors, piezo tube drive motors according to the mode of the crooked yawing of excitation and the shape of piezo ceramic element again simultaneously.Their transmission principle is all identical with driving mechanism, as shown in Figure 1.Stator is in the mode of oscillation that circumference is shaken the head, one very little gap is arranged between stator 11 and the ring-type rotor 12, the curved edges motion of shaking the head in stator limit during transmission, therefore the point of contact contact is arranged between the stator and rotor, its contact point moves on the circumferential periphery of stator, successively, the frictional force between stator and rotor makes rotor rotate along the direction opposite with the contact point moving direction.
Existing three kinds of crooked yawing modes of excitation such as Fig. 2, Fig. 5 and shown in Figure 6:
Fig. 2 is the schematic diagram that existing piezoelectric patches encourages crooked yawing, and used piezo ceramic element is 4 piezoelectric patches.On same piezoelectric patches, divide the two halves opposite polarization with diameter symmetry, two piezoelectric patches 22 spatial vertical of two piezoelectric patches 21 of logical A phase current and logical B phase current are arranged, two-phase all adopts ten thousand bright sandwich structures to form stator, A imports the Sin signal mutually simultaneously, B imports the Cos signal mutually, adopts each 90 degree phase difference of time and space to encourage flexural vibrations like this; The flexural vibration mode supersonic motor structure of this piezoelectric patches excitation as shown in Figure 3, upper and lower match block 36,38 clamps the common stator that constitutes motor in 4 piezoelectric ceramic pieces, 37 backs, place the rotor 35 on the stator to be hollow-core construction, there is the spring 34 that applies precompression its hollow part, and moment is by gear 33 outputs, and 32 is the polytetrafluoroethylene cover, play bearing, 31 is packing ring, and 39 is main shaft, and 33 is nut.
Fig. 4 is the schematic diagram that existing piezo tube encourages crooked yawing, and used piezo ceramic element is a piezo tube.Piezo tube is evenly polarized to inwall by outer wall, electrode grounding in it in use, and outer wall scribbles four equally distributed external electrodes 45, feeds sin ω t, cos ω t ,-sin ω t ,-cos ω t signal excitation 41,42,43 and 44 4 on extremely successively.The flexural vibration mode supersonic motor structure of this piezo tube excitation as shown in Figure 5, two metal caps of 51 liang of terminations of piezo tube 52 constitute motor stators, rotor 53 usefulness the nuts 55 at two ends and spring 54 are screwed on spools 56.
The main advantage of above-mentioned flexural vibration mode supersonic motor is easy to realize microminiaturization and industrialization exactly.The ultrasound electric machine of the minimum of up to the present doing is that the diameter of NUS is the head-shaking motor of 1.5mm, this motor comes the flexural vibrations of exciting electric with piezoelectric ceramic tube, but piezo tube and piezoelectric patches are owing to considering internal diameter, so will advance-go on foot relatively difficulty of miniaturization.
Summary of the invention
The object of the present invention is to provide a kind of piezo column ultrasound micro-motor with conductive shaft.
The ultrasound micro-motor of the piezo column of band conductive shaft, contain the stator that constitutes by match block and piezo ceramic element, rotor and pre-pressure mechanism, it is characterized in that: this ultrasound micro-motor is a kind of ultrasound micro-motor with flexural vibration mode of fixed axle structure, and described piezo ceramic element is that then conductive shaft and outer wall scribble the piezo column of four equally distributed external electrodes of using for polarization and excited vibration in having coaxially; Described match block is that the bonding and upper surface of lower surface and piezo column is a spill, described rotor place on the match block and with this match block CONTACT WITH FRICTION, described conductive shaft is not only to be connected in coaxially in the piezo column and a motor fixing shaft of also passing match block and rotor coaxially, and described pre-pressure mechanism is to be made of spring, packing ring and nut coaxial with conductive shaft and that be pressed on the rotor upper surface successively.
The polarization of electrode method of the ultrasound micro-motor of the piezo column of band conductive shaft of the present invention is characterized in that: it can be any in following three kinds of methods:
(1) be an electrode with conductive shaft, after four parts of silver electrodes are evenly coated in the piezo column side again them and be unified into another electrode, then radially routinely the polarization method of piezoelectric ceramic polarize;
(2) be an electrode with conductive shaft, evenly coat after four parts of silver electrodes the side becomes another electrode after its two parts of adjacent silver electrode parallel connections, radially carries out the forward polarization; With conductive shaft is an electrode, and the side becomes another electrode after evenly coating other two parts of adjacent electrode parallel connections of silver electrode, radially carries out reverse polarization;
(3) the even full electrode of coated with metal on the side of piezo column; With conductive shaft is that a full electrode in electrode side is another electrode, and the polarization method of piezoelectric ceramic polarizes routinely again; After the polarization, the full electrode in side evenly is divided into 4 parts.
The motivational techniques of the electrode of the ultrasound micro-motor of the piezo column of band conductive shaft of the present invention, it is characterized in that: behind the lead of burn-oning respectively on four electrodes of the piezo column side with conductive shaft of having polarized, can be by any excitation the in following two kinds of excited vibration methods:
(1) with conductive shaft an electrode, after four parts of silver electrodes are evenly coated in the piezo column side again them and be unified into another electrode, then under the situation that the polarization method of piezoelectric ceramic polarizes routinely, on four parts of electrodes, add respectively simultaneously Sin, Cos ,-Sin ,-Cos four tunnel AC signal make piezo column produce required crooked yawing; If any two paths of signals of exchange, the motor antiport;
(2) be an electrode with conductive shaft, after four parts of silver electrodes were evenly coated in the side, its two parts of adjacent silver electrode parallel connections became another electrode, radially carried out the forward polarization; With conductive shaft is an electrode, the side becomes another electrode after evenly coating other two parts of adjacent electrode parallel connections of silver electrode, radially carry out on the pair of electrodes of relative angle, adding the Sin signal under the situation of reverse polarization, on the electrode of another relative angle, add the Cos signal, make piezo column produce required crooked yawing; Above-mentioned two paths of signals exchange, the motor antiport.
(3) the even full electrode of coated with metal on side at piezo column; With conductive shaft is an electrode, the full electrode in side is another electrode, the polarization method of piezoelectric ceramic polarizes and in that full electrode is divided under 4 parts the situation the side after the polarization routinely again, on four parts of electrodes, add respectively simultaneously Sin, Cos ,-Sin ,-Cos four tunnel AC signal make piezo column produce required crooked yawing; If any two paths of signals of exchange, the motor antiport.
Facts have proved: it has reached the purpose of further microminiaturization.
Description of drawings
Fig. 1 is the transmission principle schematic diagram of all flexural vibration mode supersonic motors.
Fig. 2 is for encouraging the principle schematic of crooked yawing by piezoelectric patches.
Fig. 3 encourages the structural representation of crooked head-shaking motor for existing piezoelectric patches.
Fig. 4 is for encouraging the principle schematic of crooked yawing by piezo tube.
Fig. 5 encourages the structural representation of crooked head-shaking motor for existing piezo tube.
Fig. 6 (a) is existing piezo column split pole schematic diagram, (b) is existing piezo column ultrasound micro-motor.
Fig. 7 is piezo column polarization and the lead-in wire schematic diagram with long conductive shaft.
Fig. 8 is piezo column polarization and the lead-in wire schematic diagram with short-range missile electric axis.
Fig. 9 is the little ultrasound electric machine embodiment one of cylinder---the magnetic force positioning motor structural representation with short-range missile electric axis.
Figure 10 is the little ultrasound electric machine embodiment two of cylinder---the axis of torque output motor structural representation with short-range missile electric axis.
Figure 11 is the little ultrasound electric machine embodiment three of cylinder---the fixed axis electric machine structure schematic diagram with short-range missile electric axis.
Figure 12 is the little ultrasound electric machine embodiment four of cylinder with conductive shaft---a shell fastening electric machine structure schematic diagram.
Figure 13 is the little ultrasound electric machine embodiment five of cylinder---the fixed axis electric machine structure schematic diagram with long conductive shaft.
Embodiment
We once proposed the little ultrasound electric machine of a kind of cylinder, were characterized in piezoelectric ceramic post 6 serving as piezoelectric element such as Fig. 6 a of excitation flexural vibrations, wherein a kind of microelectromechanical structure such as Fig. 6 b, 62 is rotor, 63 is stator, and 630 is the fixed axis that processes on the stator, the 61st, and pre-pressure mechanism, the 66th, bonding plane, the 65th, rubbing surface, it does not need to consider internal diameter, and that can do is very little, the diameter of its electrical micro-machine can reach about 0.30mm, the application of ultrasound electric machine can be pushed to a new stage.But the polarizing voltage of this motor is wayward, can make impedance become big, and applied voltage uprises during driving.
The present invention proposes a kind of piezoelectricity pillar bending-rotation ultrasonic ripple electrical micro-machine with conductive shaft.It is by the stator of excitation ultrasonic vibration, rotor/the axle of output torque and the pre-pressure mechanism composition that pressurizes to rotor, said stator mainly is made of the piezo ceramic element and the match block of excited vibration, the piezo ceramic element of excitation flexural vibrations is the piezo column with conductive shaft, promptly piezo column be embedded with conductive shaft for polarization with (among Fig. 7 76, or among Fig. 8 86), the outer wall of piezo column scribbles four equally distributed external electrodes 71～74 or 81～84, external electrode is connected with lead, and is used for excited vibration.
Embodiment one:
Ask for an interview Fig. 9.The 94th, conductive shaft, the 93rd, piezo column, its material uses the material with piezoelectric property, as (down together) such as PZT.The 91st, the magnetic steel ball, the 92nd, upper surface is the magnetic alloy match block of concave arc shape, and it is with magnetic (steel) ball 91 CONTACT WITH FRICTION and attracted the precompression effect mutually, and its lower surface and piezo column 93 bonding being integral constitute stator jointly.Moment is that magnetic (steel) ball 91 is directly exported by rotor.
Embodiment two:
Ask for an interview Figure 10, the 108th, the short-range missile electric axis, the 105th, the piezo column that joins with short-range missile electric axis 108, the 104th, the match block during with short-range missile electric axis 101, there is circular shrinkage hole on its upper and lower surface, simultaneously with piezo column 105 through bonding plane 107 bonding being integral, constitute stator jointly.Rotor 103 and match block 104 are through rubbing surface 106 CONTACT WITH FRICTION while and moment output shaft 101 bondings, a roundel that diameter is bigger slightly than the diameter of axle is being fixed in above-mentioned axle 101 lower ends, the two is made of one, like this can be with match block 104 axle 101 left-hand threads location, axle 101 also can rotate output torque together with rotor 103.Wherein, the 102nd, pre-pressure mechanism is made of spring, packing ring, nut.
Embodiment three:
Ask for an interview Figure 11.Its main feature is to process one thin excellent 1130 axle that fixes to use in the middle of match block 113, this axle 1130 is same metalworks with match block 113, its main effect is that moment is then directly exported by rotor 112 to the location of the little spring in rotor 112 and the pre-pressure mechanism 111.Can be processed into gear to the outward flange of rotor 112 during use and come the transmission output torque.The 114th, piezo column, the 117th, conductive shaft, the 116th, bonding plane, the 115th, rubbing surface.All the other are with embodiment three.
Embodiment four:
Ask for an interview Figure 12.Its main feature is that whole driving mechanism covers in the metal shell 120, shell 120 produces precompression by rubber blanket 121 and poly-tetrafluoro circle 127 pressuring springs 122, the lower end side of shell 120 is threaded at 1210 places with a metab 126, and the lower surface of piezo column 125 is mutually bonding with metal bottom 126, can think: metab 126, shell 120, rubber blanket 121, poly-tetrafluoro circle 127 and spring 122 have constituted pre-pressure mechanism jointly.Rotor 123 places on the stator match block 124, and the 128th, rubbing surface, the centre of rotor 123 processes one thin excellent 1230 as the moment output shaft, and it and rotor 123 are same metalworks.The 1231st, conductive shaft, match block 124 is bonding through bonding plane 129 with piezo column 125.
All the other are with embodiment three.
Embodiment five:
Ask for an interview Figure 13.Its main feature is the fixed axis of long conductive shaft 131 as motor, and it passes in the middle of match block 133, rotor 132, and rotor 132 provides precompression by pre-pressure mechanism 131, and pre-pressure mechanism 131 is made of spring, packing ring and nut.The main effect of long conductive shaft 137 is to locate to the spring in rotor 132 and the pre-pressure mechanism 131.Moment is directly exported by rotor 132.Can be processed into gear to the outer rim of rotor 132 during use, so that transmit output torque, the 134th, piezo column, the 135th, rubbing surface, the 136th, bonding plane by gear.All the other are with embodiment three.
Below with Fig. 7 the polarization method of piezo column 75 top electrodes is described.Earlier on four parts of electrodes 71～74, evenly coat silver electrode.Then, can make an electrode with long conductive shaft 76, the feeding high voltage direct current carries out radial polarised between the electrode 71～74 of 4 parallel connections and long conductive shaft 76.Also can make an electrode with long conductive shaft 76, wherein adjacent arbitrarily two electrodes 71 and 73 are in parallel and constitute another electrode, and between radially carries out forward and polarizes; Make an electrode with long conductive shaft 76 again, two other adjacent electrode 72 and 74 backs in parallel constitute another electrode, and between radially carries out reverse polarization.Can also evenly coat full electrode in the whole side of piezo column 75, make another electrode with long conductive shaft 76, between radially polarizes, and again side electrode evenly is divided into four parts of electrodes vertically after the polarization.
The excited vibration method of piezo column 75 top electrodes below also is described with Fig. 7.First on four electrodes 71～74, burn-on respectively weld tabs and lead.
To above-mentioned (1) (3) polarization, can on four parts of electrode 71-74, add respectively simultaneously Sin, Cos ,-Sin ,-Cos four tunnel AC signal, then can encourage this piezo column 75 to produce required crooked yawing.The wherein any two paths of signals of exchange, then the crooked yawing of motor is reverse.To above-mentioned (2) polarization, can be adding the Sin AC signal again after electrode 71 and 74 parallel connections, adding the Cos AC signal again after electrode 72 and 73 parallel connections, then can encourage this piezo column 75 to produce required crooked yawing.The two-way AC signal exchanges mutually, and then the crooked yawing of motor is reverse.
The machinable 0.3mm that is of a size of of ultrasound electric machine of the present invention's design has promoted the microminiaturization of ultrasound electric machine greatly between the 3mm.When the peak value of input electrical signal was made an appointment with (2-6) V, rotor can obviously rotate on stator surface.The present invention will have wide application prospect at aspects such as biology, medical treatment, micromechanics, science and techniques of defence.
Claims (1)
1, the ultrasound micro-motor of the piezo column of band conductive shaft, contain the stator that constitutes by match block and piezo ceramic element, rotor and pre-pressure mechanism, it is characterized in that: this ultrasound micro-motor is a kind of ultrasound micro-motor with flexural vibration mode of fixed axle structure, and described piezo ceramic element is that then conductive shaft and outer wall scribble the piezo column of four equally distributed external electrodes of using for polarization and excited vibration in having coaxially; Described match block is that the bonding and upper surface of lower surface and piezo column is a spill, described rotor place on the match block and with this match block CONTACT WITH FRICTION, described conductive shaft is not only to be connected in coaxially in the piezo column and a motor fixing shaft of also passing match block and rotor coaxially, and described pre-pressure mechanism is to be made of spring, packing ring and nut coaxial with conductive shaft and that be pressed on the rotor upper surface successively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02100687 CN1258864C (en) | 2002-02-22 | 2002-02-22 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02100687 CN1258864C (en) | 2002-02-22 | 2002-02-22 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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| Publication Number | Publication Date |
|---|---|
| CN1440115A CN1440115A (en) | 2003-09-03 |
| CN1258864C true CN1258864C (en) | 2006-06-07 |
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| CN 02100687 Expired - Fee Related CN1258864C (en) | 2002-02-22 | 2002-02-22 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100384077C (en) * | 2004-11-19 | 2008-04-23 | 清华大学 | Metal square column and piezoelectric ceramic wafer composite ultrasound micromotor |
| CN100384076C (en) * | 2004-11-19 | 2008-04-23 | 清华大学 | Piezoelectric square column flexural vibrating ultrasound micromotor |
| CN100514832C (en) * | 2004-12-24 | 2009-07-15 | 清华大学 | Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor |
| CN100384078C (en) * | 2004-12-24 | 2008-04-23 | 清华大学 | A rotary columnar ultrasound micro-motor of flexural vibration mode |
| CN100461609C (en) * | 2004-12-24 | 2009-02-11 | 清华大学 | Hollow metal square column piezoelectric element composite ultrasonic micromotor |
| CN100414829C (en) * | 2005-01-21 | 2008-08-27 | 哈尔滨工业大学 | Microdriver and microdriving method based on magnet-magnet converting nanometer precision big output capacity |
| CN100428618C (en) * | 2005-04-08 | 2008-10-22 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| CN100438307C (en) * | 2005-11-18 | 2008-11-26 | 清华大学 | Screw thread driven polyhedron ultrasonic motor |
| CN101170286B (en) * | 2006-10-18 | 2010-07-21 | 哈尔滨工业大学 | Multi-freedom degree ultrasonic wave electromotor based on piezoelectric porcelain shear strain |
| CN103710494B (en) * | 2013-12-30 | 2016-04-27 | 江苏大学 | A kind of based on hyperacoustic reinforcement method for small hole and device |
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2002
- 2002-02-22 CN CN 02100687 patent/CN1258864C/en not_active Expired - Fee Related
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Granted publication date: 20060607 Termination date: 20110222 |