CN207504786U - Rotary type travelling wave ultrasonic motor and driver in a kind of face - Google Patents
Rotary type travelling wave ultrasonic motor and driver in a kind of face Download PDFInfo
- Publication number
- CN207504786U CN207504786U CN201721522507.9U CN201721522507U CN207504786U CN 207504786 U CN207504786 U CN 207504786U CN 201721522507 U CN201721522507 U CN 201721522507U CN 207504786 U CN207504786 U CN 207504786U
- Authority
- CN
- China
- Prior art keywords
- stator
- rotor
- rotary type
- travelling wave
- ultrasonic motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model is related to ultrasound electric machine fields, provide rotary type travelling wave ultrasonic motor and the driver comprising the motor in a kind of face.Rotary type travelling wave ultrasonic motor includes stator, rotor, shaft and housing composition in face, rotor is for hollow cylinder and equipped with a cavity, stator is hollow truncated cone-shaped, stator is fixedly connected on housing, rotor is fixed by socket in shaft, the smaller one end of stator outer diameter is nested into the cavity of rotor, and shaft is rotationally connected with housing.Stator is flaky with rotor, reduce axial volume, suitable for many sheet type electronic products, and the stator and rotor of truncated cone-shaped are mutually embedding, by axial precompression conversion of the rotor to stator, circumferentially pretightning force, the circular-rotation of stator drive rotor rotation, obtain big driving moment, the structure of stator and rotor is easy to process, highly practical.
Description
Technical field
The utility model is related to ultrasound electric machine field, in particular to rotary type travelling wave ultrasonic motor in a kind of face with
And driver.
Background technology
Rotary type travelling wave ultrasonic motor utilizes the inverse pressure of piezoceramic material as a kind of novel energy conversion equipment in face
Electrical effect excitation metal elastomer (stator) generates high frequency micro breadth oscillation, while utilizes the friction on stator, rotor contact interface
The micro breadth oscillation of stator is converted into the macroscopic motion of rotor by power, and conversion of the electric energy to mechanical energy is realized with this.
Ultrasound electric machine compared with traditional electromagnetic machine there are many it is unique the advantages of, including compact-sized, low-speed big,
Low noise runs, cuts off self-lock, Millisecond quick response, Electro Magnetic Compatibility are good, displacement and speed control are good, it can be achieved that micron
Grade even nano level positioning accuracy etc..It is had broad application prospects compared with traditional electromagnetic machine.
However existing ultrasound electric machine mostly uses out-of-plane vibration mode, axially in contact with this between stator, rotor
In the case of, motor is necessarily unfavorable for be made very thin, i.e., axial volume is big.Existing many sheet type electronic products need not only
Motor that is small, but also being thinned as far as possible.
Utility model content
The purpose of this utility model is to provide rotary type travelling wave ultrasonic motors in a kind of face, have slimming, volume
Small, light-weight, simple in structure, driving moment is big, it is efficient the advantages of.
The another object of the utility model is to provide a kind of driver, can have small, and drive efficiency is high
Advantage.
What the embodiment of the utility model was realized in:
Rotary type travelling wave ultrasonic motor in a kind of face is formed including stator, rotor, shaft and housing;Rotor is hollow
Cylinder and set there are one cavity, stator is hollow truncated cone-shaped, and stator is fixedly connected on housing, and rotor is fixed by socket in turning
Axis, the smaller one end of stator outer diameter are nested into the cavity of rotor, and shaft is rotationally connected with housing.
In the utility model preferred embodiment, piezoelectric ceramics is further included, piezoelectric ceramics is connected to the inner surface of stator,
The lead of piezoelectric ceramics is drawn by the gap between stator and housing.
In the utility model preferred embodiment, the height of above-mentioned piezoelectric ceramics is identical with the height of stator.
In the utility model preferred embodiment, said stator includes multiple stator tooths, multiple stator spaces of teeth point
It is distributed in the peripheral side of stator.
In the utility model preferred embodiment, in the mounted state, said stator is completely embedded into the cavity of rotor,
The side wall of rotor and the stator tooth of stator fit.
In the utility model preferred embodiment, in the mounted state, the depth of the cavity of above-mentioned rotor is more than stator
Height.
In the utility model preferred embodiment, the larger one end of said stator outer diameter is equipped at least one support element,
It is connected between stator and housing by support element.
In the utility model preferred embodiment, above-mentioned support element is four, it is preferable that four support elements are set on stator
It the centre position of the larger one end of outer diameter and is equidistantly arranged according to circumference.
In the utility model preferred embodiment, disc spring and clamp spring are further included, disc spring and clamp spring are connected to outside rotor
The smaller one end of diameter.
A kind of driver, including rotary type travelling wave ultrasonic motor in above-mentioned face.
The advantageous effect of the utility model embodiment is:
Rotary type travelling wave ultrasonic motor in a kind of face provided by the utility model, the hollow cylinder of rotor and there are one setting
Cavity, stator are hollow truncated cone-shaped, and the smaller one end of stator outer diameter is nested into the cavity of rotor, and stator is in thin slice with rotor
Shape reduces axial volume, and suitable for many sheet type electronic products, and the stator of truncated cone-shaped and rotor are mutually embedding, by rotor pair
Circumferentially pretightning force, the circular-rotation of stator drive rotor rotation, obtain big driving moment for the axial precompression conversion of stator,
The structure of stator and rotor is easy to process, highly practical.The utility model also provides a kind of driver, and it includes above-mentioned face inward turnings
Make the transition travelling wave supersonic motor, has the characteristics of small, driving rate is high.
Description of the drawings
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Knot of the rotary type travelling wave ultrasonic motor under the first visual angle in the face that Fig. 1 is provided for the utility model first embodiment
Structure schematic diagram;
Knot of the rotary type travelling wave ultrasonic motor under the second visual angle in the face that Fig. 2 is provided for the utility model first embodiment
Structure schematic diagram;
The structure of stator in the face that Fig. 3 is provided for the utility model first embodiment in rotary type travelling wave ultrasonic motor is shown
It is intended to;
Piezoelectric ceramics polarization in the face that Fig. 4 is provided for the utility model first embodiment in rotary type travelling wave ultrasonic motor
Subregion vertical view.
In figure:10- housings;20- stators;21- stator tooths;30- bearings;40- support elements;50- piezoelectric ceramics;60- rotors;
61- cavitys;70- disc springs;80- clamp springs;90- shafts;Rotary type travelling wave ultrasonic motor in 100- faces.
Specific embodiment
Purpose, technical scheme and advantage to make the utility model embodiment are clearer, below in conjunction with this practicality
The technical solution in the utility model embodiment is clearly and completely described in attached drawing in novel embodiment, shows
So, described embodiment is the embodiment of a part of embodiment of the utility model rather than whole.Based on this practicality
Embodiment in novel, those of ordinary skill in the art are obtained every other without creative efforts
Embodiment shall fall within the protection scope of the present invention.Therefore, the implementation to the utility model provided in the accompanying drawings below
The detailed description of mode is not intended to limit claimed the scope of the utility model, but is merely representative of the utility model
Selected embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative labor
The every other embodiment obtained under the premise of dynamic, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be appreciated that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer ",
The orientation or position relationship of the instructions such as " clockwise ", " counterclockwise " be based on orientation shown in the drawings or position relationship, be only for
Convenient for description the utility model and simplify description rather than instruction or imply signified equipment or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that limitation to the utility model.
In addition, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity for indicating indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more this feature." multiple " are meant that two or two in the description of the present invention,
More than, unless otherwise specifically defined.
In the utility model unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. terms should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or integral;Can be
Mechanical connection or electrical connection;It can be directly connected, can also be indirectly connected by intermediary, can be two
The interaction relationship of connection or two elements inside element.It for the ordinary skill in the art, can basis
Concrete condition understands concrete meaning of the above-mentioned term in the utility model.
In the utility model unless specifically defined or limited otherwise, fisrt feature second feature it " on " or it
" under " can be in direct contact including the first and second features, it is not to be in direct contact but lead to that can also include the first and second features
Cross the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " above " including
One feature is right over second feature and oblique upper or is merely representative of fisrt feature level height higher than second feature.First is special
Sign second feature " under ", " lower section " and " below " including fisrt feature immediately below second feature and obliquely downward or only
Represent that fisrt feature level height is less than second feature.
First embodiment
Please refer to Fig. 1 and attached drawing 2, rotary type travelling wave ultrasonic motor 100 in a kind of face provided in this embodiment, including fixed
Son 20, rotor 60, shaft 90 and housing 10.
Further, rotor 60 for hollow cylinder and is set there are one cavity 61, and stator 20 is hollow truncated cone-shaped, fixed
Son 20 includes the larger one end of outer diameter and the smaller one end of outer diameter.The purpose that stator 20 is set as truncated cone-shaped is determining for truncated cone-shaped
Son 20 can be embedded in rotor 60, on the one hand saved and occupied spatial area, while again by rotor 60 to the axial precompression of stator 20
Circumferentially pretightning force, the circular-rotation of stator 20 drive rotor 60 to rotate, obtain big driving moment for transformation.
Further, attached drawing 3 is please referred to, the stator 20 of truncated cone-shaped includes a peripheral side, and stator 20 includes multiple stators
Tooth 21, multiple stator tooths 21 are spaced apart on the peripheral side of stator 20.In the present embodiment, between multiple stator tooths 21
Every equal, in other words, multiple stator tooths 21 are distributed evenly in the peripheral side of stator 20.The shape size and stator of stator tooth 21
20 and the shape size of rotor 60 match.
Specifically, the smaller one end of 20 outer diameter of stator is nested into the cavity 61 of rotor 60.In the mounted state, rotor
The depth of 60 cavity 61 is more than the height of stator 20, and in other words, the upper surface of stator 20 and the lower surface of rotor 60 form envelope
The cavity closed, is not in direct contact in the axial direction, avoids rotor 60 that axial precompression is passed to stator 20.
Further, in the mounted state, stator 20 is completely embedded into the cavity 61 of rotor 60, and the side wall of rotor 60 is with determining
The stator tooth 21 of son 20 fits.Specifically, after stator 20 is chimeric with rotor 60, the end face of the larger one end of 20 outer diameter of stator
Maintain an equal level with the end face of the lower end of rotor 60, and the peripheral side of stator 20 is inclined-plane, the end of the side wall of rotor 60 is and stator 20
Peripheral side and the skew wall that matches of stator tooth 21.The setting of stator tooth 21 can increase Oscillation Amplitude, can be more by changing
The size of a stator tooth 21, meets the needs of 100 different performance of rotary type travelling wave ultrasonic motor in face.
Further, stator 20 is fixedly connected on housing 10.Specifically, the larger one end of 20 outer diameter of stator is equipped at least
One support element 40, is connected between stator 20 and housing 10 by support element 40.In the present embodiment, four supports are set altogether
Part 40, four support elements 40 are set on the centre position of the larger one end of 20 outer diameter of stator and are equidistantly arranged according to circumference, four
Support element 40 is relatively more firm, and support element 40, which is evenly distributed, to be made to be more uniformly stressed.And support element 40 be rectangular thin plate, support element
40 one end is connected with stator 20, and the other end is connected with housing 10.It should be noted that in other embodiments, support element 40
Number, size shape and arrangement position can according to actual conditions selectively set.
Further, rotary type travelling wave ultrasonic motor 100 further includes piezoelectric ceramics 50 in face.Piezoelectric ceramics 50 is connected to fixed
The inner surface of son 20, the lead of piezoelectric ceramics 50 are drawn by the gap between stator 20 and housing 10.
Piezoelectric ceramics is a kind of informational function ceramic material that can mutually convert mechanical energy and electric energy, has piezoelectricity
Property.Piezoelectric ceramics under mechanical stress effect, is caused the relative displacement of internal positive and negative charge center and polarized using its material,
So that two end surfaces of material the opposite bound charge of symbol i.e. piezoelectric effect occur and make, there is sensitive characteristic.Piezoresistive material
Material can generate electric field because of mechanically deform, can also generate mechanically deform because of electric field action, rotary type travelling wave ultrasonic motor in face
100 be the inverse piezoelectric effect using piezoelectric ceramics 50, i.e., applies voltage to piezoelectric ceramics 50, piezoelectric ceramics 50 generates machinery should
Power, electric energy are converted into mechanical energy.When high frequency electrical signal is added on piezoelectric ceramics 50, then high frequency sound signal (mechanical oscillation) is generated,
That is ultrasonic signal.
Further, the height of piezoelectric ceramics 50 is identical with the height of stator 20.Specifically, piezoelectric ceramics 50 is set on stator
20 inner surface saves and occupies space in axial direction, makes rotary type travelling wave ultrasonic motor 100 in face compacter compact.This
Sample is set, and piezoelectric ceramics 50 can make the stator tooth 21 of 20 peripheral side of stator generate the displacement of circumferential direction and radial direction, so as to drive rotor
60 circumferentially rotate.
Further, rotor 60 is fixed by socket in shaft 90, and shaft 90 is rotationally connected with housing 10.Specifically, rotor
60 rotations drive shaft 90 to rotate, and housing 10 plays a protective role, and shaft 90 is rotationally connected with housing 10, i.e. shaft 90 rotates
When housing 10 do not rotate.
Further, rotary type travelling wave ultrasonic motor 100 has further included bearing 30 in face, specifically, housing 10 is equipped with
One circular cavity, for installing bearing 30.The major function of bearing 30 is the mechanical rotary body of support, is reduced in its motion process
Friction coefficient, and ensure its rotating accuracy.30 essence of bearing is to undertake radial load, limits 90 axial direction of shaft and diameter
To movement, shaft 90 is made to realize rotation.
Further, rotary type travelling wave ultrasonic motor 100 has further included disc spring 70 and clamp spring 80 in face.Disc spring 70 and rotor
60 radially smaller end thereof contacts, are serially connected in shaft 90.The load of disc spring 70 is big, and required space is small, is applied in combination conveniently,
Larger load can be born in a smaller space, and there is good buffering damping capaicty.It is remote that clamp spring 80 is set to disc spring 70
One end from rotor 60 is serially connected in shaft 90.Clamp spring 80 is also baffle ring or retaining ring, belongs to one kind of fastener, plays prevention
The effect of part axial movement in shaft 90.
The operation principle of rotary type travelling wave ultrasonic motor 100 is the inverse piezoelectric effect using piezoelectric ceramics 50 in face, to pressure
Electroceramics 50 carries out radial polarised, and it is two groups that piezoelectric ceramics 50, which is divided to, applies phase difference on two groups of piezoelectric ceramics 50 respectively as pi/2
The amplitudes such as same frequency (supersonic frequency) alternating voltage, piezoelectric ceramics 50 can generate two phases differ 90 ° two practise physiognomy in
Standing wave, two-phase standing wave pass through the N rank traveling waves that are superimposed in forming face.Stator 20 and rotor 60 are tightly mutually embedding, 20 peripheral side of stator
Stator tooth 21 is subjected to displacement (generation of axial displacement is smaller with axial direction with respect to the circumferential direction) in circumferential and radial direction, so as to drive
Rotor 60 circumferentially rotates.
Specifically, the different design size of stator 20 can generate the traveling wave of different rank, attached drawing 4 is please referred to, to generate 4
In terrace for traveling wave, radially polarized using the ring-shaped piezo ceramic 50 for being circumferentially bonded in survey in circular platform type stator 20,
In 1/4 wavelength be unpolarized area, as boundary, unpolarized region with left half apply A phase alternating voltages, with right part apply with
This A phases phase difference is 90 degree of B phase alternating voltages, and black arrows represent radial polarised direction in figure, and annular piezoelectric is ceramic
A alpha regions polarize according to 1/2 wavelength forward direction counterclockwise in 50,1/2 wavelength reverse polarization, the polarization of 1/2 wavelength forward direction, 3/8 wavelength
Reverse polarization sequence is arranged, and B phases polairzed area and A phases polairzed area are symmetrical.According to the inverse piezoelectric effect of piezoelectric ceramics 50, not
In the case of fixed stator 20, stator 20 90 rotates around the shaft by rectangular, and in the case of fixed stator 20, rotor 60 will be to phase
90 rotation around the shaft of anti-direction.
To sum up, the utility model provides rotary type travelling wave ultrasonic motor in a kind of face, including stator, rotor, shaft and
Housing forms.Rotor is for hollow cylinder and equipped with a cavity, and stator is hollow truncated cone-shaped, and stator is fixedly connected on shell
Body, rotor is fixed by socket in shaft, and the smaller one end of stator outer diameter is nested into the cavity of rotor, and shaft is rotationally connected with shell
Body.Stator is flaky with rotor, reduces axial volume, suitable for many sheet type electronic products, and the stator of truncated cone-shaped
Mutually embedding with rotor, by axial precompression conversion of the rotor to stator, circumferentially pretightning force, the circular-rotation of stator drive rotor to turn
It is dynamic, obtain big driving moment, the structure of stator and rotor is easy to process, highly practical.
In addition, the utility model additionally provides a kind of driver, it includes rotary type travelling wave ultrasonic motor in above-mentioned face, tools
There is the characteristics of small, efficient.
It these are only the preferred embodiment of the utility model, be not intended to limit the utility model, for this field
Technical staff for, various modifications and changes may be made to the present invention.Within the spirit and principle of the utility model,
Any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (11)
1. rotary type travelling wave ultrasonic motor in a kind of face, which is characterized in that it includes stator, rotor, shaft and housing composition;Institute
Rotor is stated as hollow cylinder and is set there are one cavity, the stator is hollow truncated cone-shaped, and the stator is fixedly connected on
The housing, the rotor are fixed by socket in the shaft, and described smaller one end of stator outer diameter is nested into the institute of the rotor
It states in cavity, the shaft is rotationally connected with the housing.
2. rotary type travelling wave ultrasonic motor in face according to claim 1, which is characterized in that further include piezoelectric ceramics, institute
The inner surface that piezoelectric ceramics is connected to the stator is stated, the lead of the piezoelectric ceramics passes through between the stator and the housing
Gap draw.
3. rotary type travelling wave ultrasonic motor in face according to claim 2, which is characterized in that the height of the piezoelectric ceramics
It is identical with the height of the stator.
4. rotary type travelling wave ultrasonic motor in face according to claim 1, which is characterized in that the stator includes multiple
Stator tooth, multiple stator tooths are spaced apart in the peripheral side of the stator.
5. rotary type travelling wave ultrasonic motor in face according to claim 4, which is characterized in that in the mounted state, described
Stator is completely embedded into the cavity of the rotor, and the side wall of the rotor and the stator tooth of the stator fit.
6. rotary type travelling wave ultrasonic motor in face according to claim 1, which is characterized in that in the mounted state, described
The depth of the cavity of rotor is more than the height of the stator.
7. rotary type travelling wave ultrasonic motor in face according to claim 1, which is characterized in that the stator outer diameter is larger
One end is equipped at least one support element, is connected between the stator and the housing by the support element.
8. rotary type travelling wave ultrasonic motor in face according to claim 7, which is characterized in that the support element is four.
9. rotary type travelling wave ultrasonic motor in face according to claim 8, which is characterized in that four support elements are set on
It the centre position of the larger one end of the stator outer diameter and is equidistantly arranged according to circumference.
10. rotary type travelling wave ultrasonic motor in face according to claim 1, which is characterized in that further included disc spring and card
Spring, the disc spring and clamp spring are connected to the smaller one end of the rotor diameter.
11. a kind of driver, which is characterized in that it is included such as rotary type travelling wave in claim 1~10 any one of them face
Ultrasound electric machine.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721522507.9U CN207504786U (en) | 2017-11-15 | 2017-11-15 | Rotary type travelling wave ultrasonic motor and driver in a kind of face |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721522507.9U CN207504786U (en) | 2017-11-15 | 2017-11-15 | Rotary type travelling wave ultrasonic motor and driver in a kind of face |
Publications (1)
Publication Number | Publication Date |
---|---|
CN207504786U true CN207504786U (en) | 2018-06-15 |
Family
ID=62504151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201721522507.9U Active CN207504786U (en) | 2017-11-15 | 2017-11-15 | Rotary type travelling wave ultrasonic motor and driver in a kind of face |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN207504786U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107834900A (en) * | 2017-11-15 | 2018-03-23 | 郑州大学 | A kind of face inward turning transition travelling wave supersonic motor and driver |
-
2017
- 2017-11-15 CN CN201721522507.9U patent/CN207504786U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107834900A (en) * | 2017-11-15 | 2018-03-23 | 郑州大学 | A kind of face inward turning transition travelling wave supersonic motor and driver |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102843063B (en) | Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode | |
CN101026343B (en) | Multi travelling wave bending-rotation ultrasonic motor | |
US20130307376A1 (en) | Piezo actuator having an electrode structure for a torsional vibration mode, and rotation-type ultrasonic motor including same | |
CN104410324B (en) | A kind of miniature rotation straight-line traveling wave piezoelectric motor | |
CN108551278A (en) | A kind of patch type counter rotating birotor ultrasonic motor | |
CN106160566B (en) | A kind of traveling wave type ultrasonic motor based on piezoelectric stack driving method | |
CN102801356A (en) | Magnetic force coupling axial excitation-based rotary disk type piezoelectric generator | |
CN207504786U (en) | Rotary type travelling wave ultrasonic motor and driver in a kind of face | |
CN102710167B (en) | The rotary ultrasonic motor of bending vibration excitation and electric excitation mode thereof | |
Xing et al. | A miniature cylindrical piezoelectric motor with an asymmetric vibrator | |
CN101707445A (en) | Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof | |
CN101982929B (en) | High dynamic and short stroke linear oscillating motor | |
CN101656491B (en) | In-plane modal circumferential traveling wave rotary type ultrasonic motor | |
CN206164396U (en) | Accurate piezoelectricity thread drive mechanism is received to declining of columnar structure | |
CN102931875A (en) | SMD square ultrasonic motor vibrator and driving method thereof | |
CN110601596A (en) | Standing wave type magnetic repulsion unidirectional rotating motor based on piezoelectric ceramic | |
CN107834900A (en) | A kind of face inward turning transition travelling wave supersonic motor and driver | |
CN105048865A (en) | Elastic blade type radial transduction type single-phase supersonic motor | |
CN211791325U (en) | Toggle type piezoelectric rotary generator | |
CN102118118A (en) | Linear type ultrasonic micromotor | |
CN209170248U (en) | A kind of gyromagnet Exciting-simulator system piezoelectric generating device | |
CN208767995U (en) | A kind of patch type counter rotating birotor ultrasonic motor | |
CN202513846U (en) | Thin-plate type rotatable ultrasonic motor | |
CN105281597A (en) | Powerful output sandwich type mode conversion ultrasonic motor, drive platform and drive method thereof | |
CN205319970U (en) | Free beam structure miniature screw thread supersound motor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |