CN102843063B - Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode - Google Patents
Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode Download PDFInfo
- Publication number
- CN102843063B CN102843063B CN201210325651.9A CN201210325651A CN102843063B CN 102843063 B CN102843063 B CN 102843063B CN 201210325651 A CN201210325651 A CN 201210325651A CN 102843063 B CN102843063 B CN 102843063B
- Authority
- CN
- China
- Prior art keywords
- piezoelectric ceramic
- ceramic piece
- metal tube
- resilient sleeve
- output shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005452 bending Methods 0.000 title abstract description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 155
- 229910052751 metal Inorganic materials 0.000 claims abstract description 100
- 239000002184 metal Substances 0.000 claims abstract description 100
- 238000002604 ultrasonography Methods 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 25
- 230000000694 effects Effects 0.000 claims description 20
- 229910000851 Alloy steel Inorganic materials 0.000 claims description 9
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 230000013011 mating Effects 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 239000004332 silver Substances 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 6
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 6
- 239000003822 epoxy resin Substances 0.000 claims description 6
- 239000003292 glue Substances 0.000 claims description 6
- 229920000647 polyepoxide Polymers 0.000 claims description 6
- 229910052752 metalloid Inorganic materials 0.000 claims description 3
- 150000002738 metalloids Chemical class 0.000 claims description 3
- 239000002861 polymer material Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Chemical class 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Chemical class 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Chemical class 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000033001 locomotion Effects 0.000 abstract description 18
- 230000008878 coupling Effects 0.000 abstract description 16
- 238000010168 coupling process Methods 0.000 abstract description 16
- 238000005859 coupling reaction Methods 0.000 abstract description 16
- 238000010030 laminating Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000334 poly[3-(3'-N,N,N-triethylamino-1-propyloxy)-4-methylthiophene-2,5-diyl hydrochloride] polymer Polymers 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a screw-thread-driven rotary-linear ultrasonic motor using a columnar stator high-order bending vibration mode, which belongs to the technical field of ultrasonic motors and is used for solving the problem of small output torque during miniaturization of a screw-thread-driven rotary-linear ultrasonic motor using the columnar stator high-order bending vibration mode. The screw-thread-driven rotary-linear ultrasonic motor comprises a screw thread output shaft, a metal tube elastic sleeve and m groups of piezoelectric ceramic sheets, or comprises a screw thread output shaft, a piezoelectric ceramic tube, two metal caps and p groups of outer electrodes. Two mutually orthogonal high-order bending vibrations such as two-order or three-order bending vibration modes on a free stator space are excited, driving travelling waves are generated on the inner surface of a stator driving end consisting of the metal tube elastic sleeve and the m groups of piezoelectric ceramic sheets by laminating and coupling the vibrations, and a stator and the screw thread output shaft are driven through a screw thread pair, so that rotary-linear motion output of the output shaft is realized under the action of axial loading force. The screw-thread-driven rotary-linear ultrasonic motor is taken as a rotary-linear ultrasonic motor.
Description
Technical field
The present invention relates to a kind of screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode, belong to Ultrasonic Motor Techniques field.
Background technology
The screw drive type rotation-linear ultrasonic motor of column stator flexural vibration mode is utilized to be one in all multiclass ultrasound electric machines, relative to other class ultrasound electric machine, the stator of such ultrasound electric machine and output shaft are by screw thread pair transmission, by exciting two flexural vibration modes mutually orthogonal on stator space, utilize the coupling of vibration and superpose, produce at the inner surface of stator drive end and drive row ripple, it easier can realize the output of threaded output shaft rotation-linear degrees of freedom motion.It is compared with disk capable ripple class ultrasound electric machine, have structure simple, be easy to microminiaturized and that positioning precision is high feature.
Screw drive type ultrasound electric machine based on screw thread pair transmission is divided into following several according to ultrasonic motor stator structure and exciting pattern different: stator is that the in-plane bending vibration modal coupling that utilizes of polyhedral structure drives the screw thread driven polyhedron ultrasonic motor of row ripple, utilize the screw drive type ultrasound electric machine of ring-type superthin structure stator in-plane bending vibration mode standing wave drive, stator many employings polyhedron of this two classes motor or circular ring, by the rotation-rectilinear motion exciting the in plane vibration mode of stator to realize motor output part.
In order to reduce the resonance frequency of motor stator, also proposed the screw linear motor of the Piezoelectric anisotropy bent beam driving that a kind of stator adopts one end of cantilever beam structure clamped, such motor mainly utilizes the coupling of the orthogonal space flexural vibration mode of column cantilever beam structure stator to produce and drives row ripple, realizes the movement output of output shaft; It is paste the metal pipe type of piezoelectric patches and the ultrasound waveguide screw motor of piezoelectricity tubular type two type that another kind has the screw drive type column rotation-linear ultrasonic motor representing meaning to mainly contain stator, spatially orthogonal two first-order bending vibrations of the cylindrical stator that this ultrasound waveguide screw motor mainly utilizes two ends freely to retrain intercouple, produce at the inner surface of stator free end and drive row ripple, stator and output shaft are by screw thread pair transmission, and the rotation-rectilinear motion realizing output shaft under the effect of axial load power exports; Piezoelectric element many employings d that above-mentioned screw drive type ultrasonic motor stator is used
31vibration mode, there is certain advantage at the microminiaturized manufacture view of motor in this kind of vibration mode, particularly for ultrasound waveguide screw motor, this Advantages found obtains more obvious, but inevitably there is the less practical problem of power output simultaneously.
In order to improve the power output of motor, improving load characteristic, having occurred that a class utilizes piezoelectric element d
33the piezoelectric plate-sandwiched rotary linear ultrasonic motor of vibration mode, and the piezoelectricity thread drive linear ultrasound electric machine utilizing MODAL TRANSFORMATION OF A type, and utilize piezoelectric element d
31the screw drive type ultrasound electric machine of vibration mode is compared, and such motor has clear superiority in power output, but there is microminiaturized more difficult problem.
Summary of the invention
The problem that when the present invention is the screw drive type rotation-linear ultrasonic motor microminiaturization in order to solve column stator flexural vibration mode, output torque is little, provides a kind of screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode.
The first technical scheme of the present invention:
Utilize the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode, it comprises threaded output shaft, metal tube resilient sleeve and m group piezoelectric ceramic piece, and m is positive integer,
Metal tube resilient sleeve is socketed in the outer surface of threaded output shaft, and in mating connection by screw thread pair with threaded output shaft, and the outline of metal tube resilient sleeve cross section is positive n limit shape, and the value of n is the integral multiple of 4,
Metal tube resilient sleeve outer surface is uniformly distributed vertically m group piezoelectric ceramic piece, often organizes piezoelectric ceramic piece and be made up of n sheet piezoelectric ceramic piece, the n sheet piezoelectric ceramic piece correspondence often organizing piezoelectric ceramic piece is distributed in each plane of metal tube resilient sleeve outer surface;
Piezoelectric ceramic piece through-thickness polarizes, and upper surface and the lower surface of piezoelectric ceramic piece are all coated with silver electrode.
The second technical scheme of the present invention:
Utilize the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode, it comprises threaded output shaft, metal tube resilient sleeve and m group piezoelectric ceramic piece, and m is positive integer,
Metal tube resilient sleeve is socketed in the outer surface of threaded output shaft, and it is in mating connection by screw thread pair with threaded output shaft, the outline of metal tube resilient sleeve cross section is the shape be made up of circular arc and two straightways, wherein circular arc is more than or equal to 1/2nd circumference, and two straightways are isometric and mutually vertical;
Metal tube resilient sleeve outer surface is uniformly distributed vertically m group piezoelectric ceramic piece, often organizes piezoelectric ceramic piece and be made up of two panels piezoelectric ceramic piece, the two panels piezoelectric ceramic piece correspondence often organizing piezoelectric ceramic piece is distributed in two planes of metal tube resilient sleeve outer surface;
Piezoelectric ceramic piece through-thickness polarizes, and upper surface and the lower surface of piezoelectric ceramic piece are all coated with silver electrode.
In above-mentioned two kinds of technical schemes, described m group piezoelectric ceramic piece lays respectively at the wave amplitude place, center of m amplitude of the m rank flexural vibrations of metal tube resilient sleeve.
Described piezoelectric ceramic piece is adhesively fixed by epoxide-resin glue and metal tube resilient sleeve outer surface.
The material of described metal tube resilient sleeve is titanium alloy, copper alloy, steel alloy or aluminium alloy;
The material of piezoelectric ceramic piece is the piezoceramic material with piezoelectric effect.
The third technical scheme of the present invention:
Utilize the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode, it comprises threaded output shaft, piezoelectric ceramic tube, two metal caps and p group external electrode, and p is positive integer,
The two ends of a piezoelectric ceramic tube respectively bonding metal cap form stator, and described stator sleeve is connected on outside threaded output shaft, and two metal caps and threaded output shaft to pass through screw thread pair in mating connection,
Piezoelectric ceramic pipe internal surface is coated with interior electrode, the outer surface of piezoelectric ceramic tube is uniformly distributed vertically p group external electrode, often organize external electrode and comprise q external electrode, the value of q is the integral multiple of 4, q external electrode often in group external electrode is uniformly distributed fixing along the circumferencial direction of piezoelectric ceramic tube
Piezoelectric ceramic tube radially polarizes.
Epoxide-resin glue is adopted to be adhesively fixed between described piezoelectric ceramic tube and metal cap.
The material of described metal cap is titanium alloy, copper alloy, steel alloy or aluminium alloy;
The material of piezoelectric ceramic tube is the piezoceramic material with piezoelectric effect.
In above-mentioned three kinds of technical schemes:
The two ends of described threaded output shaft are flush configuration or are pommel structure.
The material of threaded output shaft is copper alloy, steel alloy metalloid or polytetrafluoroethylene class high polymer material.
Advantage of the present invention is: the present invention is by exciting two high-order flexural vibrations mutually orthogonal on free stator space, as second order or three rank flexural vibration modes, utilize the superposition of vibration and be coupled, produce at the inner surface of the stator drive end be made up of metal tube spring-backed quill and m group piezoelectric ceramic piece and drive row ripple, stator and threaded output shaft are by screw thread pair transmission, and the rotation-rectilinear motion realizing output shaft under the effect of axial load power exports.The performance of ultrasound electric machine of the present invention improves significantly, and especially in power output, while satisfied microminiaturization, its maximum power output can improve about more than 50% compared with present technology.
Operating efficiency of the present invention is high, and mechanical property is good, facilitates the practical of flexural vibration mode rotary-linear type ultrasound electric machine and microminiaturized process.
The present invention has broad application prospects in fields such as Aero-Space, medicine equipment, intelligent robot, digital product and precision actuation systems.
Accompanying drawing explanation
Fig. 1 is the structural representation of screw drive type rotary linear ultrasonic motor described in embodiment of the present invention one, and in figure, piezoelectric ceramic piece is two groups, and the outline of metal tube spring-backed quill cross section is in square; In figure, "+" number and "-" number represents the polarised direction of piezoelectric ceramic piece;
Fig. 2 is the cutaway view vertically of Fig. 1;
Fig. 3 is the side-looking direction cutaway view of Fig. 1; In figure, arrow represents the polarised direction of piezoelectric ceramic piece;
The second order flexural vibration mode schematic diagram that Fig. 4 is ultrasound electric machine shown in Fig. 1;
Fig. 5 is the structural representation of screw drive type rotary linear ultrasonic motor described in embodiment of the present invention one, and in figure, piezoelectric ceramic piece is three groups, and the outline of metal tube spring-backed quill cross section is in square;
Fig. 6 is the cutaway view vertically of Fig. 5;
The three rank flexural vibration mode schematic diagrames that Fig. 7 is ultrasound electric machine shown in Fig. 5;
Fig. 8 is the structural representation of screw drive type rotary linear ultrasonic motor described in embodiment of the present invention two, and in figure, piezoelectric ceramic piece is two groups;
Fig. 9 is the side-looking direction cutaway view of Fig. 8;
The second order flexural vibration mode schematic diagram that Figure 10 is ultrasound electric machine shown in Fig. 8;
Figure 11 is the structural representation of screw drive type rotary linear ultrasonic motor described in embodiment of the present invention two, and in figure, piezoelectric ceramic piece is three groups;
The three rank flexural vibration mode schematic diagrames that Figure 12 is ultrasound electric machine shown in Figure 11;
Figure 13 is the structural representation of screw drive type rotary linear ultrasonic motor described in embodiment of the present invention six, and in figure, external electrode is two groups;
Figure 14 is the cutaway view vertically of Figure 13;
The second order flexural vibration mode schematic diagram that Figure 15 is ultrasound electric machine shown in Figure 13;
Figure 16 is the structural representation of screw drive type rotary linear ultrasonic motor described in embodiment of the present invention six, and in figure, external electrode is three groups;
Figure 17 is the cutaway view vertically of Figure 16;
The three rank flexural vibration mode schematic diagrames that Figure 18 is ultrasound electric machine shown in Figure 16.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1 to Fig. 7, the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode is utilized described in present embodiment, it comprises threaded output shaft 1, metal tube resilient sleeve 2 and m group piezoelectric ceramic piece 3, m is positive integer
Metal tube resilient sleeve 2 is socketed in the outer surface of threaded output shaft 1, and in mating connection by screw thread pair with threaded output shaft 1, and the outline of metal tube resilient sleeve 2 cross section is positive n limit shape, and the value of n is the integral multiple of 4,
Metal tube resilient sleeve 2 outer surface is uniformly distributed vertically m group piezoelectric ceramic piece 3, often organize piezoelectric ceramic piece 3 to be made up of n sheet piezoelectric ceramic piece, the n sheet piezoelectric ceramic piece correspondence often organizing piezoelectric ceramic piece 3 is distributed in each plane of metal tube resilient sleeve 2 outer surface;
Piezoelectric ceramic piece 3 through-thickness polarizes, and upper surface and the lower surface of piezoelectric ceramic piece 3 are all coated with silver electrode.
Fig. 1 utilizes the rotation-linear ultrasonic motor of second order flexural vibration mode symmetrical structure metal tube stator to Figure 4 shows that, its metal tube resilient sleeve 2 is symmetrical structure, the cross section of metal tube resilient sleeve 2 is the hollow columnar symmetrical structure in four directions, and be processed with screw thread pair in its endoporus, metal tube resilient sleeve 2 and two groups of piezoelectric ceramic pieces 3 form the stator of ultrasound electric machine, and the outer surface of threaded output shaft 1 is processed with the screw thread pair matched with metal tube resilient sleeve 2.
In present embodiment, all piezoelectric ceramic pieces 3 adopt d
31vibration mode, piezoelectric ceramic piece 3 has thin silver electrode on the surface, when piezoelectric ceramic piece 3 be energized excitation time strain and deformation direction and polarised direction perpendicular.In Fig. 1 to Fig. 4, piezoelectric ceramic piece 3 is axially divided into two exciting groups along metal tube resilient sleeve 2, polarised direction along the axial adjacent piezoelectric ceramic piece 3 of metal tube resilient sleeve 2 is contrary, along metal tube resilient sleeve 2 circumferencial direction, piezoelectric ceramic piece 3 be divided into two groups by polarised direction, one group is ecto-entad, and one group is from inside to outside.Polarised direction and the step mode of piezoelectric ceramic piece 3 cooperatively interact, and can reach maximum output torque.
Shown in Fig. 2 and Fig. 3, two groups of piezoelectric ceramic pieces 3 are positioned over the wave amplitude place, center of two amplitudes of the second order flexural vibrations of metal tube resilient sleeve 2, when ultrasound electric machine uses, are fixed on the vibration nodal point place of stator by flange and screw fit.Concrete step mode is: a pair piezoelectric ceramic piece 3 indirect current signal that in first group of exciting group, two panels is oppositely arranged can be the frequency of ac signal for sin ω t, ω, and t is the time; Other a pair piezoelectric ceramic piece 3 indirect current signal is
for phase difference; In second group of exciting group, that corresponding to a pair piezoelectric ceramic piece 3 in first group of exciting group is-sin ω t to piezoelectric ceramic piece 3 indirect current signal, and in second group of exciting group, that corresponding to other a pair piezoelectric ceramic piece 3 in first group of exciting group to piezoelectric ceramic piece 3 indirect current signal is
metal tube resilient sleeve 2 is external surface grounded.Wherein the frequencies omega of ac signal generally should match with this stator second order resonance of flexural vibration frequency or close, reaches the effect of the second order flexural vibration mode exciting stator space mutually orthogonal thus, phase difference
be generally 90 or 270 degree, utilize vibration coupling to produce in the inner surface coupling of two free ends of stator and drive row ripple, under the effect of axial load power, realize rotation-rectilinear motion output in threaded output shaft 1 one directions via screw thread pair; Work as phase difference
when becoming 270 degree from 90, threaded output shaft 1 can be made to produce rightabout rotation-rectilinear motion and to export, see Fig. 4.
Fig. 5 to Fig. 7 is the rotation-linear ultrasonic motor utilizing three rank flexural vibration mode symmetrical structure metal tube stators, its piezoelectric ceramic piece 3 is three groups, three groups of piezoelectric ceramic pieces 3 form three exciting groups, three groups of piezoelectric ceramic pieces 3 are positioned over the wave amplitude place, center of three amplitudes of three rank flexural vibrations of metal tube resilient sleeve 2 respectively, be fixed on the vibration nodal point place of stator by flange and screw fit when ultrasound electric machine uses, as shown in Figure 6 and Figure 7, concrete step mode is: in the first exciting group, a pair relative piezoelectric ceramic piece 3 indirect current signal can be sin ω t, separately a pair potsherd 3 is led to
in second exciting group, the power on signal of the piezoelectric ceramic piece 3 that piezoelectric ceramic piece 3 is corresponding to the first exciting group is contrary, the energising direction of piezoelectric ceramic piece 3 and roughly the same above-mentioned in second exciting group, metal tube resilient sleeve 2 ground connection.Wherein the frequencies omega of this ac signal generally should match with this stator three rank resonance of flexural vibration frequency or close, reaches the effect of the three rank flexural vibration modes exciting stator space mutually orthogonal thus, phase difference
be generally 90 or 270 degree, utilize vibration coupling to produce in the inner surface coupling of two free ends of stator and drive row ripple, under the effect of axial load power, realize rotation-rectilinear motion output in threaded output shaft 1 one directions via screw thread pair; Work as phase difference
when becoming 270 degree from 90, threaded output shaft 1 can be made to produce rightabout rotation-rectilinear motion and to export, see Fig. 7.
Embodiment two: present embodiment is described below in conjunction with Fig. 8 to Figure 12, the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode is utilized described in present embodiment, it comprises threaded output shaft 1, metal tube resilient sleeve 2 and m group piezoelectric ceramic piece 3, m is positive integer
Metal tube resilient sleeve 2 is socketed in the outer surface of threaded output shaft 1, and it is in mating connection by screw thread pair with threaded output shaft 1, the outline of metal tube resilient sleeve 2 cross section is the shape be made up of circular arc and two straightways, wherein circular arc is more than or equal to 1/2nd circumference, and two straightways are isometric and mutually vertical;
Metal tube resilient sleeve 2 outer surface is uniformly distributed vertically m group piezoelectric ceramic piece 3, often organize piezoelectric ceramic piece 3 to be made up of two panels piezoelectric ceramic piece, the two panels piezoelectric ceramic piece correspondence often organizing piezoelectric ceramic piece 3 is distributed in two planes of metal tube resilient sleeve 2 outer surface;
Piezoelectric ceramic piece 3 through-thickness polarizes, and upper surface and the lower surface of piezoelectric ceramic piece 3 are all coated with silver electrode.
Fig. 8 to Figure 10 is the rotation-linear ultrasonic motor utilizing second order flexural vibration mode unsymmetric structure metal tube stator, the cross section of metal tube resilient sleeve 2 is the hollow columnar unsymmetric structure of semicircle en, screw thread pair is processed with in its endoporus, metal tube resilient sleeve 2 and two groups of piezoelectric ceramic pieces 3 form ultrasonic motor stator, threaded output shaft 1 are processed with the screw thread pair matched with metal tube resilient sleeve 2.
Piezoelectric ceramic piece 3 adopts d
31vibration mode, its upper and lower surface is coated with thin silver electrode, energising excitation time strain and deformation direction and polarised direction perpendicular.Piezoelectric ceramic piece 3 is divided into two exciting groups along metal tube resilient sleeve 2 circumferencial direction, often organizes the polarised direction of piezoelectric ceramic piece 3 and is ecto-entad or from inside to outside.Polarised direction and the step mode of piezoelectric ceramic piece 3 cooperatively interact, and can reach maximum output torque.
Two groups of piezoelectric ceramic pieces 3 are positioned over the wave amplitude place, center of two amplitudes of the second order flexural vibrations of metal tube resilient sleeve 2, be fixed on the vibration nodal point place of stator by flange and screw fit when ultrasound electric machine uses, see Fig. 9 and Figure 10, concrete step mode is: in the first exciting group, two panels piezoelectric ceramic piece 3 difference indirect current signal can be sin ω t and-sin ω t, two panels piezoelectric ceramic piece 3 no power in second exciting group, metal tube resilient sleeve 2 ground connection.In present embodiment, the frequencies omega of ac signal generally should match with the second order resonance of flexural vibration frequency of this unsymmetric structure stator or close, reach the effect of the second order flexural vibration mode exciting a stator direction thus, because stator adopts unsymmetric structure, thus by utilizing vibration coupling to produce driving row ripple in the inner surface coupling of two free ends of stator, under the effect of axial load power, realize rotation-rectilinear motion output in threaded output shaft 1 one directions via screw thread pair; When indirect current signal sin ω t is with-sin ω t respectively for two panels piezoelectric ceramic piece 3 in the second exciting group, two panels piezoelectric ceramic piece 3 no power in the first exciting group, metal tube resilient sleeve 2 ground connection.Utilize same principle then can realize the rightabout rotation of threaded output shaft 1-rectilinear motion to export.
Figure 11 and Figure 12 is the rotation-linear ultrasonic motor utilizing three rank flexural vibration mode unsymmetric structure metal tube stators, metal tube resilient sleeve 2 cross section is the hollow columnar unsymmetric structure of semicircle en, screw thread pair is processed with in its endoporus, metal tube resilient sleeve 2 and three groups of piezoelectric ceramic pieces 3 form the stator of ultrasound electric machine, threaded output shaft 1 outer surface are processed with the screw thread pair matched with metal tube resilient sleeve 2.
Piezoelectric ceramic piece 3 adopts d
31vibration mode, the type piezoelectric patches through-thickness polarize, upper and lower surface is coated with thin silver electrode, energising excitation time strain and deformation direction and polarised direction perpendicular.All piezoelectric ceramic pieces 3 are along the circumferential direction divided into two exciting groups, each exciting group comprises 3 piezoelectric ceramic pieces 3, the piezoelectric ceramic piece 3 of two exciting groups is positioned over the wave amplitude place, center of three amplitudes of three rank flexural vibrations of metal tube resilient sleeve 2, the vibration nodal point place of stator is fixed on by flange and screw fit, see Figure 12 when ultrasound electric machine uses.
Concrete step mode is: in first exciting group, three piezoelectric ceramic piece 3 difference indirect current signals can be sin ω t ,-sin ω t and sin ω t, three piezoelectric ceramic piece 3 no powers in second exciting group, metal tube resilient sleeve 2 ground connection.Wherein the frequencies omega of this ac signal generally should match with three rank resonance of flexural vibration frequencies of this unsymmetric structure stator or close, reach the effect of the three rank flexural vibration modes exciting a stator direction thus, because stator adopts unsymmetric structure, thus by utilizing vibration coupling to produce driving row ripple in the inner surface coupling of two free ends of stator, under the effect of axial load power, realize rotation-rectilinear motion output in threaded output shaft 1 one directions via screw thread pair; As three piezoelectric ceramic piece 3 indirect current signal sin ω t ,-sin ω t and sin ω t respectively in the second exciting group, three piezoelectric ceramic piece 3 no powers in first exciting group, metal tube resilient sleeve 2 ground connection, utilizes same principle then can realize the rightabout rotation of threaded output shaft 1-rectilinear motion and exports.
Embodiment three: present embodiment is described below in conjunction with Fig. 2 and Fig. 6, present embodiment is further illustrating execution mode one or two, and described m group piezoelectric ceramic piece 3 lays respectively at the wave amplitude place, center of m amplitude of the m rank flexural vibrations of metal tube resilient sleeve 2.
Embodiment four: present embodiment is further illustrating execution mode one, two or three, described piezoelectric ceramic piece 3 is adhesively fixed by epoxide-resin glue and metal tube resilient sleeve 2 outer surface.
Piezoelectric ceramic piece 3 and metal tube resilient sleeve 2 also can be fixed by the mode of cold welding.
Embodiment five: present embodiment is further illustrating execution mode one, two, three or four, the material of described metal tube resilient sleeve 2 is titanium alloy, copper alloy, steel alloy or aluminium alloy;
The material of piezoelectric ceramic piece 3 is the piezoceramic material with piezoelectric effect.
The material of the piezoelectric ceramic piece 3 described in present embodiment can be PZT4, PZT-5, PZT-8 or PMNT.
Embodiment six: present embodiment is described below in conjunction with Figure 13 to Figure 18, the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode is utilized described in present embodiment, it comprises threaded output shaft 1, piezoelectric ceramic tube 4, two metal caps 5 and p group external electrode 6-2, p is positive integer
The two ends of a piezoelectric ceramic tube 4 respectively bonding metal cap 5 form stator, and described stator sleeve is connected on outside threaded output shaft 1, and two metal caps 5 are in mating connection by screw thread pair with threaded output shaft 1,
Piezoelectric ceramic tube 4 inner surface is coated with interior electrode 6-1, the outer surface of piezoelectric ceramic tube 4 is uniformly distributed vertically p group external electrode 6-2, often organize external electrode 6-2 and comprise q external electrode, the value of q is the integral multiple of 4, q external electrode often in group external electrode 6-2 is uniformly distributed fixing along the circumferencial direction of piezoelectric ceramic tube 4
Piezoelectric ceramic tube 4 radially polarizes.
Shown in Figure 13 to Figure 15, for utilizing the rotation-linear ultrasonic motor of second order flexural vibration mode piezo tube stator, piezoelectric ceramic tube 4 outer surface is evenly distributed with eight external electrode 6-2 being energized used for excited vibration radially polarized, in order to effective exciting external electrode is preferably arranged in the vibration wave amplitude center of respective curved vibration, mainly utilize second order or the more high-order flexural vibration mode of piezo tube stator, when motor uses, be fixed on the vibration nodal point place of stator by flange and screw fit; Metal cap 5 endoporus is processed with screw thread pair, and the outer surface of threaded output shaft 1 is processed with the screw thread pair matched with metal cap 5.
Piezoelectric ceramic tube 4 radially polarizes, and adopts d
31vibration mode, these eight external electrodes are divided into two exciting groups along the axis of piezoelectric ceramic tube 4, and concrete step mode is: in the first exciting group four external electrode 6-2 along the circumferential direction in turn indirect current signal can for sin ω t,
-sin ω t and
in second exciting group, the power on signal of the external electrode 6-2 that external electrode 6-2 is corresponding to first exciting group is contrary; Piezoelectric ceramic tube 4 inner surface virtual earth.Wherein the frequencies omega of this ac signal generally should match with this stator second order resonance of flexural vibration frequency or close, reaches the effect of the second order flexural vibration mode exciting stator space mutually orthogonal thus, phase difference
be generally 90 or 270 degree, utilize vibration coupling to produce in the inner surface coupling of two free end metal caps 5 of stator and drive row ripple, under the effect of axial load power, realize rotation-rectilinear motion output in threaded output shaft 1 one directions via screw thread pair; Work as phase difference
when becoming 270 degree from 90, threaded output shaft 1 can be made to produce rightabout rotation-rectilinear motion and to export, see Figure 13 and Figure 14.
Shown in Figure 16 to Figure 18, for utilizing the rotation-linear ultrasonic motor of three rank flexural vibration mode piezo tube stators, piezoelectric ceramic tube 4 outer surface be evenly distributed with 12 radially polarize to be energized external electrode used for excited vibrations, in order to effective exciting external electrode is preferably arranged in the vibration wave amplitude center of respective curved vibration, mainly utilize three rank or the more high-order flexural vibration mode of piezo tube stator, when motor uses, be fixed on the vibration nodal point place of stator by flange and screw fit; These 12 external electrodes can be divided into three groups to carry out exciting, these 12 external electrodes are divided into three exciting groups along the axis of piezoelectric ceramic tube 4, and concrete step mode is: in the first exciting group four external electrode 6-2 along the circumferential direction in turn indirect current signal can for sin ω t,
-sin ω t and
in second exciting group, the power on signal of the external electrode 6-2 that external electrode 6-2 is corresponding to first exciting group is contrary; In 3rd exciting group, external electrode 6-2 is identical with the power on signal of external electrode 6-2 corresponding in first exciting group, piezoelectric ceramic tube 4 inner surface virtual earth.Wherein the frequencies omega of this ac signal generally should match with this stator three rank resonance of flexural vibration frequency or close, reaches the effect of the three rank flexural vibration modes exciting stator space mutually orthogonal thus, phase difference
be generally 90 or 270 degree, utilize vibration coupling to produce in the inner surface coupling of two free end metal caps 5 of stator and drive row ripple, under the effect of axial load power, realize rotation-rectilinear motion output in threaded output shaft 1 one directions via screw thread pair; Work as phase difference
when becoming 270 degree from 90, threaded output shaft 1 can be made to produce rightabout rotation-rectilinear motion and to export, see Figure 18.
Embodiment seven: present embodiment is further illustrating execution mode six, adopts epoxide-resin glue to be adhesively fixed between piezoelectric ceramic tube 4 and metal cap 5 described in present embodiment.
Can also be fixed by the mode of cold welding between piezoelectric ceramic tube 4 and metal cap 5.
Embodiment eight: present embodiment is further illustrating execution mode six or seven, the material of described metal cap 5 is titanium alloy, copper alloy, steel alloy or aluminium alloy;
The material of piezoelectric ceramic tube 4 is the piezoceramic material with piezoelectric effect.
Embodiment nine: present embodiment is further illustrating execution mode one, two, three, four, five, six, seven or eight, the two ends of described threaded output shaft 1 are flush configuration or are pommel structure.
Embodiment ten: present embodiment is further illustrating execution mode one, two, three, four, five, six, seven, eight or nine, the material of threaded output shaft 1 is copper alloy, steel alloy metalloid or polytetrafluoroethylene class high polymer material.
In each execution mode above-mentioned of the present invention, the piezoelectric that piezoelectric ceramic piece 3 or piezoelectric ceramic tube 4 adopt also can select the intellectual material such as magnetostrictive materials or electrostatic material.
Claims (9)
1. one kind utilizes the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode, it is characterized in that: it comprises threaded output shaft (1), metal tube resilient sleeve (2) and m group piezoelectric ceramic piece (3), m is positive integer
Metal tube resilient sleeve (2) is socketed in the outer surface of threaded output shaft (1), and it is in mating connection by screw thread pair with threaded output shaft (1), the outline of metal tube resilient sleeve (2) cross section is positive n limit shape, and the value of n is the integral multiple of 4
Metal tube resilient sleeve (2) outer surface is uniformly distributed vertically m group piezoelectric ceramic piece (3), often organize piezoelectric ceramic piece (3) to be made up of n sheet piezoelectric ceramic piece, the n sheet piezoelectric ceramic piece correspondence often organizing piezoelectric ceramic piece (3) is distributed in each plane of metal tube resilient sleeve (2) outer surface;
Piezoelectric ceramic piece (3) through-thickness polarizes, and upper surface and the lower surface of piezoelectric ceramic piece (3) are all coated with silver electrode;
Piezoelectric ceramic piece (3) is axially divided into m exciting group along metal tube resilient sleeve (2), polarised direction along the axial adjacent piezoelectric ceramic piece (3) of metal tube resilient sleeve (2) is contrary, along metal tube resilient sleeve (2) circumferencial direction, piezoelectric ceramic piece (3) is divided into two groups by polarised direction, one group is ecto-entad, and one group is from inside to outside;
Described m group piezoelectric ceramic piece (3) carries out spatially mutually orthogonal m rank flexural vibrations under the excitation of the signal of telecommunication;
Described m group piezoelectric ceramic piece (3) lays respectively at the wave amplitude place, center of m amplitude of the m rank flexural vibrations of metal tube resilient sleeve (2);
When described ultrasound electric machine uses, the vibration nodal point place of stator is fixed by flange and screw fit.
2. one kind utilizes the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode, it is characterized in that: it comprises threaded output shaft (1), metal tube resilient sleeve (2) and m group piezoelectric ceramic piece (3), m is positive integer
Metal tube resilient sleeve (2) is socketed in the outer surface of threaded output shaft (1), and it is in mating connection by screw thread pair with threaded output shaft (1), the outline of metal tube resilient sleeve (2) cross section is the shape be made up of circular arc and two straightways, wherein circular arc is more than or equal to 1/2nd circumference, and two straightways are isometric and mutually vertical;
Metal tube resilient sleeve (2) outer surface is uniformly distributed vertically m group piezoelectric ceramic piece (3), often organize piezoelectric ceramic piece (3) to be made up of two panels piezoelectric ceramic piece, the two panels piezoelectric ceramic piece correspondence often organizing piezoelectric ceramic piece (3) is distributed in two planes of metal tube resilient sleeve (2) outer surface;
Piezoelectric ceramic piece (3) through-thickness polarizes, and upper surface and the lower surface of piezoelectric ceramic piece (3) are all coated with silver electrode;
Piezoelectric ceramic piece (3) is divided into two exciting groups along metal tube resilient sleeve (2) is circumferential; The polarised direction often organizing piezoelectric ceramic piece (3) is ecto-entad or from inside to outside;
Described m group piezoelectric ceramic piece (3) carries out the m rank flexural vibrations in a direction under the excitation of the signal of telecommunication;
Described m group piezoelectric ceramic piece (3) lays respectively at the wave amplitude place, center of m amplitude of the m rank flexural vibrations of metal tube resilient sleeve (2); When described ultrasound electric machine uses, the vibration nodal point place of stator is fixed by flange and screw fit.
3. the screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode according to claim 1 and 2, is characterized in that: described piezoelectric ceramic piece (3) is adhesively fixed by epoxide-resin glue and metal tube resilient sleeve (2) outer surface.
4. the screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode according to claim 1 and 2, is characterized in that: the material of described metal tube resilient sleeve (2) is titanium alloy, copper alloy, steel alloy or aluminium alloy;
The material of piezoelectric ceramic piece (3) is the piezoceramic material with piezoelectric effect.
5. one kind utilizes the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode, it is characterized in that: it comprises threaded output shaft (1), piezoelectric ceramic tube (4), two metal caps (5) and p group external electrode (6-2), p is positive integer
A two ends bonding metal cap (5) the formation stator respectively of piezoelectric ceramic tube (4), described stator sleeve is connected on threaded output shaft (1) outside, and two metal caps (5) are in mating connection by screw thread pair with threaded output shaft (1)
Piezoelectric ceramic tube (4) inner surface is coated with interior electrode (6-1), the outer surface of piezoelectric ceramic tube (4) is uniformly distributed vertically p group external electrode (6-2), often organize external electrode (6-2) and comprise q external electrode, the value of q is the integral multiple of 4, often organizing q external electrode in external electrode (6-2) is uniformly distributed fixing along the circumferencial direction of piezoelectric ceramic tube (4)
Piezoelectric ceramic tube (4) radially polarizes; P group external electrode (6-2) is divided into p excitation group along the axis of piezoelectric ceramic tube (4);
Described p group external electrode (6-2) carries out the mutually orthogonal p rank flexural vibrations in space under the excitation of the signal of telecommunication;
P group external electrode (6-2) is arranged in the vibration wave amplitude center of piezoelectric ceramic tube (4) respective curved vibration;
When described ultrasound electric machine uses, the vibration nodal point place of piezoelectric ceramic tube (4) stator is fixed by flange and screw fit.
6. the screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode according to claim 5, is characterized in that: adopt epoxide-resin glue to be adhesively fixed between described piezoelectric ceramic tube (4) and metal cap (5).
7. the screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode according to claim 5 or 6, is characterized in that: the material of described metal cap (5) is titanium alloy, copper alloy, steel alloy or aluminium alloy;
The material of piezoelectric ceramic tube (4) is the piezoceramic material with piezoelectric effect.
8. the screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode according to claim 1,2 or 5, is characterized in that: the two ends of described threaded output shaft (1) are flush configuration or are pommel structure.
9. the screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode according to claim 1,2 or 5, is characterized in that: the material of threaded output shaft (1) is copper alloy, steel alloy metalloid or polytetrafluoroethylene class high polymer material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210325651.9A CN102843063B (en) | 2012-09-05 | 2012-09-05 | Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210325651.9A CN102843063B (en) | 2012-09-05 | 2012-09-05 | Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102843063A CN102843063A (en) | 2012-12-26 |
| CN102843063B true CN102843063B (en) | 2015-01-28 |
Family
ID=47370179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210325651.9A Expired - Fee Related CN102843063B (en) | 2012-09-05 | 2012-09-05 | Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102843063B (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103115055B (en) * | 2013-03-12 | 2015-06-17 | 哈尔滨工业大学 | Paster type ultrasonic nut with self-locking and unlocking functions |
| CN103133487B (en) * | 2013-03-12 | 2015-02-18 | 哈尔滨工业大学 | Unlockable nut for switching operating modes of patch type cantilever beam lengthways torsion mode |
| CN103115122B (en) * | 2013-03-12 | 2016-06-22 | 哈尔滨工业大学 | There is the surface mount type ultrasonic wave lead screw of low frictional behavior |
| CN103148078B (en) * | 2013-03-12 | 2015-04-08 | 哈尔滨工业大学 | Unlockable nut in paster-type free beam longitudinal torsion state switching working mode |
| CN103133494B (en) * | 2013-03-12 | 2015-04-08 | 哈尔滨工业大学 | Unlockable nut of patch type free beam torsional vibration operating mode |
| CN103148079B (en) * | 2013-03-12 | 2015-03-04 | 哈尔滨工业大学 | Unlockable nut in sandwich cantilever longitrorse mode conversion working mode |
| CN103148081B (en) * | 2013-03-12 | 2015-02-18 | 哈尔滨工业大学 | Unlockable nut in paster-type cantilever beam composite bending-vibration working mode |
| CN103115059B (en) * | 2013-03-12 | 2015-03-18 | 哈尔滨工业大学 | Paster type unlockable nut of bending vibration working mode of free beam |
| CN103326615B (en) * | 2013-06-09 | 2016-01-13 | 上海大学 | Based on the triangular prism shaped linear ultrasonic motor of asymmetric mode of oscillation |
| CN103856101B (en) * | 2014-03-26 | 2017-01-11 | 长春工业大学 | Patch disk-structure ultrasonic meshing motor |
| CN103856099B (en) * | 2014-03-26 | 2017-08-25 | 长春工业大学 | SMD disk-shaped structure rotary linear ultrasonic motor |
| CN105833418B (en) * | 2016-03-15 | 2022-04-22 | 南京航空航天大学 | Blood vessel treatment device of dosing based on piezoelectricity drive |
| CN107306096A (en) * | 2016-04-22 | 2017-10-31 | 北京派和智能装备技术有限公司 | Pipe screw-type piezoelectric actuator |
| CN106026765B (en) * | 2016-06-06 | 2017-09-22 | 长春工业大学 | Asymmetric rhombus enlarger piezoelectricity stick-slip linear electric motors and its motivational techniques |
| CN108282106B (en) * | 2018-02-05 | 2024-01-23 | 中国科学院苏州生物医学工程技术研究所 | Eccentric rotary piezoelectric ceramic motor |
| CN111726034B (en) * | 2020-05-25 | 2021-05-25 | 南京航空航天大学 | Surface-mounted piezoelectric rotating mechanism and driving method thereof |
| CN112165274B (en) * | 2020-09-24 | 2021-11-30 | 南京工程学院 | Longitudinal-bending coupling type linear ultrasonic motor based on homodromous eccentric stator |
| CN112953298B (en) * | 2021-03-26 | 2022-09-13 | 重庆第二师范学院 | Flat ultrasonic motor |
| CN113517825A (en) * | 2021-05-31 | 2021-10-19 | 吉林大学 | Micro-miniature ultrasonic motor based on longitudinal vibration mode and driving method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1879232A (en) * | 2003-09-08 | 2006-12-13 | 新测量科技有限公司 | Ultrasonic lead screw motor |
| CN101517883A (en) * | 2006-09-25 | 2009-08-26 | 国立大学法人东京农工大学 | Ultrasonic operation device and microtube inside system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07231684A (en) * | 1994-02-21 | 1995-08-29 | Kanagawa Kagaku Gijutsu Akad | Ultrasonic micromotor and manufacture of its stator |
| US7309943B2 (en) * | 2003-09-08 | 2007-12-18 | New Scale Technologies, Inc. | Mechanism comprised of ultrasonic lead screw motor |
-
2012
- 2012-09-05 CN CN201210325651.9A patent/CN102843063B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1879232A (en) * | 2003-09-08 | 2006-12-13 | 新测量科技有限公司 | Ultrasonic lead screw motor |
| CN101517883A (en) * | 2006-09-25 | 2009-08-26 | 国立大学法人东京农工大学 | Ultrasonic operation device and microtube inside system |
Non-Patent Citations (3)
| Title |
|---|
| Burhanettin Koc,Serra Cagatay,Kenji Uchino.A Piezoelectric Motor Using Two Orthogonal Bending Modes of a Hollow Cylinder.《IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL》.2002,第49卷(第4期),第495-500页. * |
| JP特开平7-231684A 1995.08.29 * |
| Tomoaki Mashimo,shigeki Toyama.Rotary-Linear Piezoelectric Microactuator With a Cubic Stator of Side Length 3.5 mm.《IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL》.2010,第57卷(第8期),第1825-1830页. * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102843063A (en) | 2012-12-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102843063B (en) | Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode | |
| CN102355157B (en) | Piezoelectric plate-sandwiched rotary linear ultrasonic motor stator | |
| CN100525058C (en) | Multi-freedom ring stator supersonic dynamo | |
| US9407173B2 (en) | Piezo actuator having an electrode structure for a torsional vibration mode, and rotation-type ultrasonic motor including same | |
| CN104506081B (en) | Cylindrical piezoelectric motor capable of generating spiral linear movement | |
| CN102843064A (en) | Flexible replaceable screw thread pair driving ultrasonic motor | |
| CN102710167B (en) | The rotary ultrasonic motor of bending vibration excitation and electric excitation mode thereof | |
| CN101227157B (en) | Piezoelectricity thread driver adopting Langevin-type transducer structure | |
| Zhou et al. | Ring-shaped traveling wave ultrasonic motor for high-output power density with suspension stator | |
| CN107834899B (en) | Method for adjusting two-phase modal frequency difference and steering of ultrasonic motor | |
| CN102931875B (en) | SMD square ultrasonic motor vibrator and driving method thereof | |
| CN206164396U (en) | Accurate piezoelectricity thread drive mechanism is received to declining of columnar structure | |
| CN102005965B (en) | Ultrasonic motor driven by single-phase power supply | |
| CN101563839A (en) | A linear driver | |
| CN101895231A (en) | Miniature two-degrees-of-freedom plane motion piezoelectric motor | |
| CN103117675B (en) | The high thrust precision positioning ultrasound electric machine of many element combination formula ultrasonic vibrator excitation | |
| CN103023373A (en) | Two-freedom-degree rotation-line motion micro ultrasonic motor | |
| CN1258864C (en) | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor | |
| CN107306096A (en) | Pipe screw-type piezoelectric actuator | |
| CN207504786U (en) | Rotary type travelling wave ultrasonic motor and driver in a kind of face | |
| CN102299663B (en) | Cylindrical traveling-wave ultrasonic motor vibrator pretightened by spring blocks | |
| CN103117674B (en) | The precision positioning ultrasound electric machine of two element combination formula ultrasonic vibrator excitation | |
| CN103944444B (en) | Wheel-shaped structure thread-pair driven type ultrasonic motor and motivation method thereof | |
| CN103929090A (en) | Cylindrical structure rotary linear ultrasonic motor of excitation of piezoelectric actuator and excitation method of cylindrical structure rotary linear ultrasonic motor | |
| CN112217417B (en) | Three-foot plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150128 |