CN103023373A - Two-freedom-degree rotation-line motion micro ultrasonic motor - Google Patents
Two-freedom-degree rotation-line motion micro ultrasonic motor Download PDFInfo
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- CN103023373A CN103023373A CN2012105315460A CN201210531546A CN103023373A CN 103023373 A CN103023373 A CN 103023373A CN 2012105315460 A CN2012105315460 A CN 2012105315460A CN 201210531546 A CN201210531546 A CN 201210531546A CN 103023373 A CN103023373 A CN 103023373A
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- ceramic tube
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Abstract
The invention discloses a two-freedom-degree rotation-line motion micro ultrasonic motor based on a piezoelectric cylinder. The motor comprises a piezoelectricity driver stator, a shaft, a motion guide device, an elastic pre-pressure device and a drive power supply, wherein the piezoelectricity driver stator comprises the piezoelectric cylinder, an annular meta end cap is respectively attached to two ends of the piezoelectric cylinder, the motion guide device comprises a rotation-line motion bearing and a base, the shaft penetrates into the piezoelectric cylinder and is limited by the motion guide device to do a rotary or linear motion, the annular metal end caps are pressed on the shaft, and the elastic friction contact of the piezoelectric cylinder and the shaft is achieved under the pre-pressure action. The invention provides a two-freedom-degree rotation-line drive mechanism which is compact in structure. The motor is simple in structure, small in size and wide in application prospects.
Description
Technical field
The present invention relates to a kind of 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor, especially based on the 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor of piezoelectric ceramic tube, belong to the piezoelectric micromotor electromechanical device field in the precision optical machinery.
Background technology
The piezoelectric micro motor is compared with traditional electromagnetic machine, especially in small size (millimeter-centimetre) scope, piezoelectric micro motor and piezoelectric actuator have shown the advantage of many uniquenesses, such as relatively high power density, large actuating force is with relative high efficient.Traditional electromagnetic machine has become very difficult at the manufacture view of several millimeters magnitude sizes, and its efficient remaining a few percent (＜8%) only when several mm size, because it lacks enough strong magnetic field.The efficient of piezoelectric motor is basic and size is irrelevant, does not also have magnetic field problem.Even piezoelectric motor, also can be kept low speed and relative large torque characteristic at mm size.As accurate driving element, piezoelectric motor and driver are just becoming some new high-tech products such as mobile phone, the key element of medical image system and other micro medical equipment.Many new Driving technique, such as voice coil motor, piezoelectric actuator, piezoelectric ultrasonic micro motor etc. had fast development, and the application that succeeds in a lot of fields.In these micro drives technology, piezoelectric micro motor is in precision control and actuating force, and the aspects such as resolution and power consumption have demonstrated obvious superiority, and more easily accomplish microminiaturization.
Along with the progress of mechanical ﹠ electrical technology, traditional single-degree-of-freedom motor can't satisfy the increasingly microminiaturized requirement of high accuracy compound movement system.Linear piezoelectric motor (US Patent5877579 such as Nanomotion and PI development of company, 20080073999A1) has the resolution capabilities of micro-nano, but can only driving mechanism along a direction moving linearly, if therefore will realize that the multifreedom motion system just must utilize a plurality of motors and transmission mechanism, volume and cost that this has not only increased control system have also reduced the kinematic accuracy of system.The multiple freedom degrees ultrasound motor has direct driving and high-precision characteristics, thereby has shown obvious advantage.Under this background, many scholars both domestic and external have carried out a large amount of research to the multiple degrees of freedom piezoelectric ultrasonic motor, have proposed patent (CN Patent 1738179, Li Long soil etc., 2006 of a lot of multiple freedom degrees ultrasound motors; CN Patent200710072168.3, Chen Weisheng etc., 2007; US Patent5345137, Funakubo, 1994; USPatent7514849 B2, Ichikawa, 2009).But these multiple freedom degrees ultrasound motors of having reported all are to realize that 2DOF plane motion or 3DOF rotatablely move.Report about 2DOF rotation-rectilinear motion motor is few, knowledge according to author's understanding, report (the Tomoaki Mashimo andShigeki Toyama that only has at present a kind of structure, Rotary-linear piezoelectric actuator using single stator, IEEETransactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.56, No.1, pp.114-120,2009), but this motor adopts the compound stator of metal and pottery, and structure is comparatively complicated, and stator and axle need higher quality of fit, and the power output of motor is also very little.Therefore, in order to satisfy the consumer electronics such as some mobile communication, digital camera, with the needs to 2DOF Xuan Zhuan – rectilinear motion mini drive such as some biologies and medicine equipment, be necessary to invent a kind of new, simple in structure, high performance superminiature multiple freedom degrees ultrasound motor.
Summary of the invention
The present invention is directed to the prior art deficiency, a kind of 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor of compact conformation is provided.
The present invention is achieved through the following technical solutions:
A kind of 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor comprises piezoelectric actuator stator, axle, linear motion guide device, elastic forepressure device and driving power; Described linear motion guide device comprises base and Xuan Zhuan – linear motion bearing, and Xuan Zhuan – linear motion bearing is symmetricly set on the both sides of base; Described piezoelectric actuator stator comprises a piezoelectric ceramic tube, and axle passes piezoelectric ceramic tube, and axle simultaneously turns the – linear motion bearing and is equipped with revolving, and piezoelectric ceramic tube realizes that by between elastic forepressure device and the axle elastic-friction contacts.
The two ends of described piezoelectric ceramic tube are fixedly installed an endless metal end cap, and the diameter of bore of endless metal end cap is a bit larger tham the diameter of axle.
Described elastic forepressure device comprises holder, spring and baffle plate, the holder bottom arranges 2 arc bayonet sockets that are used for the clamping piezoelectric ceramic tube, the top of holder is fixed and be positioned to baffle plate and base, holder top is fixedly installed bar, baffle plate is offered the hole, bar passes the hole of baffle plate, and spring housing is on the bar on holder top, between holder and baffle plate.
Described piezoelectric actuator stator uses the two-way of phase phasic difference 90 degree or four road alternating voltages to drive; Described piezoelectric ceramic tube radially polarizes, and its inner wall surface electrode is an integral body, and the outer wall surface electrode is by 8 parts that are divided into of symmetry, i.e. vertically 2 five equilibriums, in the circumferential direction of the circle 4 five equilibriums.
Advantage of the present invention is: its Piezoelectric Driving stator is made of a piezoelectric ceramic tube and 2 endless metal end caps, thereby can satisfy the index requests such as volume is little, lightweight, simple in structure, have also simultaneously that response is fast, the precision high, 2DOF rotation-straight line driving mechanism compact conformation of the present invention, simple in structure, size is little, application prospect is more wide.
Description of drawings
Fig. 1 is embodiment of the invention general structure schematic diagram;
Fig. 2 is the generalized section of piezoelectric actuator stator of the present invention and axle;
Fig. 3 is the structural representation of piezoelectric ceramic tube of the present invention;
Fig. 4 is the first rank extensional vibration mode (L of piezoelectric ceramic tube of the present invention
1);
Fig. 5 is the second-order flexural vibration mode (B of piezoelectric ceramic tube of the present invention
2XOr B
2Y) the shape of shaking;
Fig. 6 is the voltage driving mode of motor-driven axis rotation of the present invention;
Fig. 7 is the operation principle of motor-driven axis rotation of the present invention;
Fig. 8 is the voltage driving mode of motor driving shaft moving linearly of the present invention;
Fig. 9 is the operation principle of motor driving shaft moving linearly of the present invention;
Figure 10 is the L of piezoelectric ceramic tube of the present invention
1Model frequency (f
L1) and the graph of a relation of internal diameter, length;
Figure 11 is the B of piezoelectric ceramic tube of the present invention
2Model frequency (f
B2) and the graph of a relation of internal diameter, length;
Figure 12 is that the internal diameter of piezoelectric ceramic tube of the present invention and length are to B
2Model frequency and L
1Ratio (the f of model frequency
B2/ f
L1) affect graph of a relation.
Among the figure, 10,2DOF rotation-rectilinear motion miniature ultrasonic motor; 20, the piezoelectric actuator stator; 21, piezoelectric ceramic tube; 21a, 21b, 21c, 21d, 21e, 21f, 21g, 21h, 21i, electrode; 22, the endless metal end cap; 30, axle; 40, linear motion guide device; 41, rotation-linear motion bearing; 42, base; 50, the elastic forepressure device; 51, holder; 52, spring; 53, baffle plate; 60; Driving power.
Embodiment
Accompanying drawing discloses part embodiment of the present invention without limitation, below in conjunction with specific embodiment the present invention is further described.
As seen from Figure 1: shown in 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor 10 comprise piezoelectric actuator stator 20, axle 30, linear motion guide device 40, elastic forepressure device 50 and driving power 60; Wherein said piezoelectric actuator stator 20 comprises a piezoelectric ceramic tube 21, respectively assembles an endless metal end cap 22 at its two ends, by epoxy resin both is bonded as one; Described linear motion guide device 40 comprises rotation-linear motion bearing 41 and base 42; Described axle 30 passes piezoelectric ceramic tube 21, and passive movement guider 40 limits, and makes rotation or rectilinear motion; Piezoelectric ceramic tube 21 is pressed on the axle 30 by endless metal end cap 22 under elastic forepressure device 50 effect, realizes that piezoelectric actuator stator 20 contacts with elastic-friction between the axle 30; Described elastic forepressure device 50 comprises holder 51, spring 52 and baffle plate 53; The bayonet socket of 2 arcs is arranged at holder 51 bottoms, is used for clamping piezoelectric ceramic tube 21, and the bar on holder 51 tops passes the hole of baffle plate 53; Spring 52 is enclosed within outside the bar on holder 51 tops, between holder 51 and baffle plate 53, applies precompression for piezoelectric actuator stator 20; Baffle plate 53 is installed on the base 42.
Fig. 2 is the generalized section of piezoelectric actuator stator 20 and axle 30.The diameter of bore of described endless metal end cap 22 is a bit larger tham the diameter of axle 30, is the line contact between the two.
Fig. 3 is the structural representation of piezoelectric ceramic tube 21.Described piezoelectric ceramic tube 21 is Pb (Zr, Ti) O
3Piezoceramic material or other high-performance piezoceramic material, size (length, external diameter, internal diameter) must satisfy certain relation, makes its first rank extensional vibration mode (L
1) and second-order flexural vibration mode (B
2XOr B
2Y) have an approaching resonance frequency; Described B
2XWith B
2YQuadrature each other.Motor is when work, and described piezoelectric ceramic tube 21 is operated in the first rank extensional vibration mode (L
1) and second-order flexural vibration mode (B
2XWith B
2Y), the voltage drive piezoelectric actuator stator 20 that driving voltage source 60 produces is done the elliptical orbit motion of the little amplitude (nanometer is to micron order) of high frequency, by frictional force drives axle 30 motions between endless metal end cap 22 and the axle 30.Described piezoelectric ceramic tube 21 radially polarizes, and its inner wall surface electrode 21i is an integral body, and the outer wall surface electrode is divided into 8 part 21a, 21b, 21c, 21d, 21e, 21f, 21g, 21h, vertically 2 five equilibriums, in the circumferential direction of the circle 4 five equilibriums by symmetry.
Fig. 4, Fig. 5 have shown respectively the first rank extensional vibration mode (L of piezoelectric ceramic tube
1) and second-order flexural vibration mode (B
2XOr B
2Y) the shape of shaking.The size of suitable setting piezoelectric ceramic tube 21 (length, external diameter, internal diameter) can make its first rank extensional vibration mode (L
1) and second-order flexural vibration mode (B
2XOr B
2Y) have an approaching resonance frequency.
Fig. 6 and Fig. 7 have shown respectively voltage driving mode and the operation principle of this motor-driven axis rotation.Electrode 21a, 21e connect alternating voltage Vsin ω t, electrode 21b, 21f connect alternating voltage Vcos ω t:(or-Vcos ω t), electrode 21c, 21g connect alternating voltage-Vsin ω t, electrode 21d, 21h connect alternating voltage-Vcos ω t(or Vcos ω t :), namely the phase place between four road driving voltages increases (or minimizing) 90 degree successively, electrode 21i ground connection because the piezoelectric effect piezoelectric ceramic can produce vibration, when the frequency of driving voltage near B
2Produce dynamo-electric resonance during mode resonance frequency, the end of piezoelectric actuator stator 20 is made " Ho La hoop " and is moved in the XY plane, and namely each particle is made circular motion (the positive ellipse that major axis equates with minor axis length) in the XY plane with respect to its equilbrium position.Fig. 7 has shown the axial view of motor and the elliptic motion schematic diagram at piezoelectric actuator stator 20 frictional interface places.Piezoelectric actuator stator 20 will rotate by frictional force drives axle 30.
Fig. 8 and Fig. 9 have shown respectively voltage driving mode and the operation principle of this motor driving shaft moving linearly.Electrode 21b, 21h connect alternating voltage Vsin ω t, electrode 21d, 21f connect alternating voltage Vcos ω t:(or-Vcos ω t), electrode 21a, 21c, 21e, 21g, 21i ground connection because the piezoelectric effect piezoelectric ceramic can produce vibration, when the frequency of driving voltage near L
1And B
2Produce dynamo-electric resonance during resonance frequency, these two kinds of intrinsic mode all are excited, and the end of piezoelectric actuator stator 20 is done the elliptical orbit resultant motion in the YZ plane.Piezoelectric actuator stator 20 will be made axial rectilinear motion by frictional force drives axle 30.
The purpose of the above embodiment of the present invention is to help further to understand the present invention, but it will be appreciated by those skilled in the art that: without departing from the spirit and scope of the invention and the appended claims, various substitutions and modifications all are possible.Therefore, the present invention should not be limited to the disclosed content of embodiment, and the scope of protection of present invention is as the criterion with the scope that claims define.
Each rank transverse bending vibration pattern that described piezoelectric actuator stator 20 has and longitudinal extension vibration modal frequency are along with the shape of length, external diameter, internal diameter and the piezoceramic material of described piezoelectric ceramic tube 21 and metal end caps 22 and material and change the first rank extensional vibration mode [L
1, mode is shaken shape as shown in Figure 4] and second-order transverse bending vibration mode [B
2XOr B
2Y, mode is shaken shape as shown in Figure 5)] resonance frequency identical point may appear, so utilize identical resonance frequency to realize encouraging the complex vibration mode of described piezoelectric ceramic actuator stator.Described B
2XWith B
2YQuadrature each other.In this embodiment, the quality of metal end caps 22 is little more a lot of than the quality of piezoelectric ceramic tube 21, and metal end caps 22 is little on mode of oscillation and the resonance frequency impact of piezoelectric actuator stator 20.The external diameter of setting piezoelectric ceramic tube 21 is 5mm, and material is the PZT piezoelectric ceramic.Figure 10 shows that the L of piezoelectric ceramic tube 21
1Model frequency (f
L1) and the relation of internal diameter, length.Figure 11 shows that the B of piezoelectric ceramic tube 21
2Model frequency f
B2Relation with internal diameter, length.Figure 12 shows that the internal diameter of piezoelectric ceramic tube 21 and length are to B
2Model frequency and L
1Ratio (the f of model frequency
B2/ f
L1) impact.
Claims (4)
1. a 2DOF revolves and turns – rectilinear motion miniature ultrasonic motor, it is characterized in that: comprise piezoelectric actuator stator, axle, linear motion guide device, elastic forepressure device and driving power; Described linear motion guide device comprises base and Xuan Zhuan – linear motion bearing, and Xuan Zhuan – linear motion bearing is symmetricly set on the both sides of base; Described piezoelectric actuator stator comprises a piezoelectric ceramic tube, and axle passes piezoelectric ceramic tube, and axle simultaneously turns the – linear motion bearing and is equipped with revolving, and piezoelectric ceramic tube realizes that by between elastic forepressure device and the axle elastic-friction contacts.
2. 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor as claimed in claim 1, it is characterized in that: the two ends of described piezoelectric ceramic tube are fixedly installed an endless metal end cap, and the diameter of bore of endless metal end cap is a bit larger tham the diameter of axle.
3. 2DOF Xuan Zhuan – rectilinear motion miniature ultrasonic motor as claimed in claim 1 or 2, it is characterized in that: described elastic forepressure device comprises holder, spring and baffle plate, the holder bottom arranges 2 arc bayonet sockets that are used for the clamping piezoelectric ceramic tube, the top of holder is fixed and be positioned to baffle plate and base, holder top is fixedly installed bar, and baffle plate is offered the hole, and bar passes the hole of baffle plate, spring housing is on the bar on holder top, between holder and baffle plate.
4. 2DOF as claimed in claim 3 revolves and turns – rectilinear motion miniature ultrasonic motor, it is characterized in that: described piezoelectric actuator stator uses the two-way of phase phasic difference 90 degree or four road alternating voltages to drive; Described piezoelectric ceramic tube radially polarizes, and its inner wall surface electrode is an integral body, and the outer wall surface electrode is by 8 parts that are divided into of symmetry, i.e. vertically 2 five equilibriums, in the circumferential direction of the circle 4 five equilibriums.
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| CN2012105315460A CN103023373A (en) | 2012-12-11 | 2012-12-11 | Two-freedom-degree rotation-line motion micro ultrasonic motor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105195976A (en) * | 2015-10-27 | 2015-12-30 | 山东华云机电科技有限公司 | Ultrasonic metal surface machining cutter and using method thereof |
| CN109818525A (en) * | 2019-03-26 | 2019-05-28 | 合肥工业大学 | A kind of mode of resonance impact type piezo-electric motor |
| CN109951101A (en) * | 2019-04-09 | 2019-06-28 | 哈尔滨工业大学 | The ultraprecise four-degree-of-freedom positioning pose_adjuster and its motivational techniques of Piezoelectric Driving |
| CN110995056A (en) * | 2019-12-27 | 2020-04-10 | 合肥工业大学 | Synchronous impact piezoelectric motor |
| CN111973338A (en) * | 2020-08-31 | 2020-11-24 | 哈尔滨工业大学 | Piezoelectric inertia driven two-degree-of-freedom coupling retinal detachment feeding mechanism |
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| JPH10125366A (en) * | 1996-10-02 | 1998-05-15 | Woertz Ag | Connector |
| CN102441796A (en) * | 2011-07-08 | 2012-05-09 | 吉林大学 | Ultraprecise piezoelectric stepping rotation driving platform capable of regulating speed mechanically |
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2012
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Patent Citations (2)
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| JPH10125366A (en) * | 1996-10-02 | 1998-05-15 | Woertz Ag | Connector |
| CN102441796A (en) * | 2011-07-08 | 2012-05-09 | 吉林大学 | Ultraprecise piezoelectric stepping rotation driving platform capable of regulating speed mechanically |
Non-Patent Citations (2)
| Title |
|---|
| TOMOAKI MASHIMO ET AL.: "Rotary-Linear Piezoelectric Actuator Using a Single Stator", 《IEEE TRANSACTIONS ON ULTRASONICS, FERROLELECTRICS, AND FREQUENCY CONTROL》 * |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105195976A (en) * | 2015-10-27 | 2015-12-30 | 山东华云机电科技有限公司 | Ultrasonic metal surface machining cutter and using method thereof |
| CN109818525A (en) * | 2019-03-26 | 2019-05-28 | 合肥工业大学 | A kind of mode of resonance impact type piezo-electric motor |
| CN109951101A (en) * | 2019-04-09 | 2019-06-28 | 哈尔滨工业大学 | The ultraprecise four-degree-of-freedom positioning pose_adjuster and its motivational techniques of Piezoelectric Driving |
| CN109951101B (en) * | 2019-04-09 | 2020-03-06 | 哈尔滨工业大学 | Piezoelectric-driven ultra-precise four-degree-of-freedom positioning and posture adjusting mechanism and excitation method thereof |
| CN110995056A (en) * | 2019-12-27 | 2020-04-10 | 合肥工业大学 | Synchronous impact piezoelectric motor |
| CN111973338A (en) * | 2020-08-31 | 2020-11-24 | 哈尔滨工业大学 | Piezoelectric inertia driven two-degree-of-freedom coupling retinal detachment feeding mechanism |
| CN111973338B (en) * | 2020-08-31 | 2021-06-15 | 哈尔滨工业大学 | Piezoelectric inertia driven two-degree-of-freedom coupling retinal detachment feeding mechanism |
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Application publication date: 20130403 |