CN109818525A - A kind of mode of resonance impact type piezo-electric motor - Google Patents

A kind of mode of resonance impact type piezo-electric motor Download PDF

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Publication number
CN109818525A
CN109818525A CN201910230949.3A CN201910230949A CN109818525A CN 109818525 A CN109818525 A CN 109818525A CN 201910230949 A CN201910230949 A CN 201910230949A CN 109818525 A CN109818525 A CN 109818525A
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output rod
stop
impact type
electric motor
motion body
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CN109818525B (en
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贺良国
程子阳
贺提曼
王勇
赵小勇
金键
张晗
郝赛
徐磊
张勇
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Hefei University of Technology
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Hefei University of Technology
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Abstract

The present invention relates to a kind of mode of resonance impact type piezo-electric motors.Including driving mechanism, pre-tightening mechanism and guiding mechanism.Driving mechanism includes output rod, stop-motion body, piezoelectric vibrator and piezoelectric patches;Piezoelectric vibrator includes disk and oscillator bar;The pre-tightening mechanism includes upper housing, lower case, bottom plate, guide rail and sliding block;Upper housing and lower case corresponding matching are fixedly connected to form tubular housing;Sliding block cooperation is set on guide rail, and sliding block is fixed as one with upper housing;Guiding mechanism includes a pair of bearing and a pair of of linear bearing.When work, when continuously to piezoelectric patches input harmonics, driving mechanism is macroscopically unidirectionally moved along a straight line, output rod maintenance level thrust output axially outward.Working frequency of the invention is 10.5KHz, operating voltage 100V, and it is 20mm that output rod horizontal axis, which moves stroke, and the external thrust output of horizontal axis is up to 0.8N, and working efficiency is up to 8%;It is significantly improved compared with conventional inertia impact type Linear piezoelectric motor working efficiency.

Description

A kind of mode of resonance impact type piezo-electric motor
Technical field
The invention belongs to precision actuations and field of locating technology, and in particular to a kind of Linear piezoelectric motor.
Background technique
Piezo-electric motor is the motor that energy converting between mechanical is carried out using the piezoelectricity back wash effect of piezoelectrics, according to motion mode Rotary-type and linear type can be divided into.Impact type Linear piezoelectric motor is a kind of common piezo-electric motor, has low-speed performance good, The advantages of easy to operate, high resolution, it is widely used in the fields such as robot transmission, Precision Position Location System.Conventional inertia impact Formula Linear piezoelectric motor is driven by the way of inputting sawtooth wave to piezoelectric pile, can not be worked under resonance condition, this leads Cause vibration efficiency is very low to can only achieve 3%, thrust output is generally below 0.5N, and generates heat height, at high cost.Such as Zhejiang is big Learning the prosperous impact type Linear piezoelectric motor thrust output for waiting developments of Peng Yu is only 0.35N.
Summary of the invention
It is unable to reach resonant state in order to solve conventional inertia impact type piezo-electric motor, working efficiency is low, and thrust output is low The problem of, have developed a kind of mode of resonance impact type piezo-electric motor.
A kind of mode of resonance impact type piezo-electric motor includes driving mechanism, pre-tightening mechanism and guiding mechanism.
The driving mechanism includes output rod 1, stop-motion body 6, piezoelectric vibrator 7 and piezoelectric patches 9;The piezoelectric vibrator 7 includes Disk 71 and oscillator bar 72,71 fixing sleeve of disk are set to the middle part of oscillator bar 72;One end of the output rod 1 is fixedly connected only The one side at 6 middle part of kinetoplast, the piezoelectric vibrator 7 is fixedly connected the another side at 6 middle part of stop-motion body by oscillator bar 72, defeated Rod 1 and oscillator bar 72 are coaxial, and output rod 1, stop-motion body 6 and piezoelectric vibrator 7 is made to form a coaxial entirety;The piezoelectric patches 9 are fixed in piezoelectric vibrator 7 on the lateral surface of disk 71;The other end of output rod 1 is output end.
The pre-tightening mechanism includes upper housing 3, lower case 13, bottom plate 10, guide rail 5 and sliding block 4;The axis of the upper housing 3 It is fixedly connected to form tubular cavity by more than two pretension bolts to the axial sides corresponding matching of two sides and lower case 13 Body;Preloading spring 12 is arranged on each pretension bolt;The lower case 13 is fixed on the middle part of bottom plate 10, the tubular cavity In the same direction with the length direction of bottom plate 10,10 width direction side of bottom plate corresponding with lower case 13 is equipped with upright riser, described Guide rail 5 is set on riser, and the cooperation of sliding block 4 is equipped on guide rail 5;
The guiding mechanism includes a pair of bearing 2 and a pair of of linear bearing;A pair of bearing 2 is respectively arranged on 13 two sides of lower case Bottom plate 10 length direction on;One end of the output rod 1 of the driving mechanism and one end of oscillator bar 72 pass through linear bearing On bearing block 2, and make in the tubular cavity that the stop-motion body 6 of driving mechanism is located at upper housing 3 and lower case 13 is formed;With cunning Corresponding 3 side of upper housing of block 4 is fixedly connected with sliding block 4 with upper housing 3 by connecting plate 14.
The working frequency of the mode of resonance impact type piezo-electric motor is 10.5KHz, operating voltage 100V, output rod It is 20mm that 1 horizontal axis, which moves stroke, and the external thrust output of horizontal axis is up to 0.8N, and working efficiency is up to 8%;
When work, when continuously to 9 input harmonics of piezoelectric patches, driving mechanism is macroscopically unidirectionally moved along a straight line, and output rod 1 is steady Determine the outside thrust output of horizontal axis.
The technical solution further limited is as follows:
The diameter of the disk 71 of the piezoelectric vibrator 7 is 25mm, with a thickness of 5mm, and the diameter of oscillator bar 72 is 3mm, length is 66mm.The two sides of disk 71 offer annular groove respectively, and the depth of annular groove is 1.5mm, interior diameter 3mm, overall diameter 20mm; The piezoelectric patches 9 is set in the annular groove of disk one side;7 total quality of piezoelectric vibrator is 16g.
The middle part of the stop-motion body 6 is cube 62, and the top of cube 62 is fixed with upper protruding block 61, upper protruding block 61 Top surface is upper arc surface;The bottom of cube 62 is fixed with lower protruding block 63, and the top surface of lower protruding block 63 is lower arc surface;On described Arc surface, lower arc surface are contacted with the inner wall of tubular housing respectively.
Length, width and the height of the middle part cube 62 of the stop-motion body 6 are 10mm, on corresponding two sides respectively Offer the hole of diameter 3mm depth 4mm.Upper protruding block 61 is identical as 63 size shape of lower protruding block, and length, width and height are 5mm; The angle theta of the top surface circular arc vertex of upper protruding block 61 or lower protruding block 63 and the connected straight line in the place circular arc center of circle and vertical direction is 8 degree. The quality of stop-motion body 6 is 9g.
The diameter 3mm, long 50mm, quality 3g of the output rod 1.
The 4 length 22.5mm of sliding block, width 17mm, high 7.7mm.The 5 length 40mm of guide rail.
The piezoelectric vibrator 7, output rod 1, stop-motion body 6, upper housing 3, lower case 13 material be 65Mn steel.
The material of the piezoelectric patches 9 is lead titanate piezoelectric ceramics.
Advantageous effects of the invention embody in the following areas:
1. the piezo-electric motor that the present invention is previously mentioned clamps stop-motion body using upper housing and lower case, stop-motion body is only unidirectionally moved Guarantee that output rod can only be moved unidirectionally from clamping mechanism, therefore single harmonic can be used to be driven without using sawtooth wave Driving, makes piezo-electric motor that can work under resonance condition, working efficiency is increased to 8%, and power output is up to 0.8N.
2. the piezo-electric motor that the present invention is previously mentioned is passed through by the way of pasting piezoelectric patches on the disk in piezoelectric vibrator The inverse piezoelectric effect of piezoelectric patches makes the side-to-side vibrations of disk outer ring to generate driving force, more conventionally employed piezoelectric pile driving it is used Property impact type piezo-electric motor generate heat it is low, it is at low cost.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention.
Fig. 2 is pre-tightening mechanism schematic diagram.
Fig. 3 is driving mechanism schematic diagram.
Fig. 4 is stop-motion body structural schematic diagram.
Fig. 5 is piezoelectric vibrator structural schematic diagram.
Fig. 6 is guiding mechanism schematic diagram.
Fig. 7 is base schematic diagram.
Fig. 8 is upper housing schematic diagram.
Fig. 9 is line slide rail schematic diagram.
Figure 10 is stop-motion body from clamper schematic diagram.
Figure 11 is harmonic signal figure.
Figure 12 is driving mechanism displacement diagram.
One schematic diagram of Figure 13 driving mechanism actuator state.
Two schematic diagram of Figure 14 driving mechanism actuator state.
Three schematic diagram of Figure 15 driving mechanism actuator state.
Serial number in upper figure: output rod 1, bearing block 2, upper housing 3, sliding block 4, guide rail 5, stop-motion body 6, piezoelectric vibrator 7, piezoelectricity Piece 9, bottom plate 10, preloading spring 12, lower case 13, connecting plate 14, upper protruding block 61, cube 62, lower protruding block 63, disk 71, vibration Sub bar 72.
Specific embodiment
With reference to the accompanying drawing, the present invention is further described by embodiment.
Embodiment
Referring to Fig. 1, a kind of mode of resonance impact type piezo-electric motor includes driving mechanism, pre-tightening mechanism and guiding mechanism.
Referring to Fig. 3, driving mechanism includes output rod 1, stop-motion body 6, piezoelectric vibrator 7 and piezoelectric patches 9.
Referring to Fig. 5, piezoelectric vibrator 7 includes disk 71 and oscillator bar 72, and 71 fixing sleeve of disk is set to the middle part of oscillator bar 72. The diameter of the disk 71 of piezoelectric vibrator 7 is 25mm, with a thickness of 5mm, and the diameter of oscillator bar 72 is 3mm, length 66mm.Disk 71 Two sides offer annular groove respectively, the depth of annular groove is 1.5mm, interior diameter 3mm, overall diameter 20mm.Piezoelectric patches 9 is fixed It is installed in the annular groove of disk one side, the material of piezoelectric patches 9 is lead titanate piezoelectric ceramics.7 total quality of piezoelectric vibrator is 16g。
Referring to fig. 4, the middle part of stop-motion body 6 is cube 62, and length, width and the height of cube 62 are 10mm, right The mounting hole of diameter 3mm, depth 4mm are offered on the two sides answered respectively.The top of cube 62 is fixed with upper protruding block 61, on The top surface of convex block 61 is upper arc surface;The bottom of cube 62 is fixed with lower protruding block 63, and the top surface of lower protruding block 63 is lower circular arc Face;Upper arc surface, lower arc surface are contacted with the inner wall of tubular housing respectively.Upper protruding block 61 is identical as 63 size shape of lower protruding block, Length, width and height are 5mm;The top surface circular arc vertex of upper protruding block 61 or lower protruding block 63 and the connected straight line in the place circular arc center of circle Angle theta with vertical direction is 8 degree.The quality of stop-motion body 6 is 9g.
Diameter 3mm, length 50mm, the quality 3g of output rod 1.One end of output rod 1 is fixedly connected by mounting hole One end of 62 one side of cube, the oscillator bar 72 of piezoelectric vibrator 7 is fixedly connected the another of cube 62 by mounting hole Side, output rod 1 and oscillator bar 72 are coaxial, and output rod 1, stop-motion body 6 and piezoelectric vibrator 7 is made to form a coaxial entirety, defeated The other end of rod 1 is output end.
Referring to fig. 2, pre-tightening mechanism includes upper housing 3, lower case 13, bottom plate 10, guide rail 5 and sliding block 4.The axis of upper housing 3 It is fixedly connected to form tubular cavity by more than two pretension bolts to the axial sides corresponding matching of two sides and lower case 13 Body;Preloading spring 12 is set on each pretension bolt.Fig. 7 and Fig. 8, lower case 13 are fixed on the middle part of bottom plate 10, and tubulose is empty The length direction of chamber and bottom plate 10 is in the same direction, and 10 width direction side of bottom plate corresponding with lower case 13 is fixedly installed with upright erect Plate, guide rail 5 are fixedly installed on riser, and referring to Fig. 9, sliding block 4 is fitted on guide rail 5;Length 22.5mm, the width of sliding block 4 Spend 17mm, high 7.7mm, 5 length 40mm of guide rail.
Piezoelectric vibrator 7, output rod 1, stop-motion body 6, upper housing 3, lower case 13 material be 65Mn steel.
Referring to Fig. 6, guiding mechanism includes a pair of bearing 2 and a pair of of linear bearing, and a pair of bearing 2 is respectively arranged in down On the length direction of the bottom plate 10 of 13 two sides of shell;One end of the output rod 1 of driving mechanism and one end of oscillator bar 72 lead to respectively It crosses linear bearing to be installed on bearing block 2, and makes the pipe that the stop-motion body 6 of driving mechanism is located at upper housing 3 and lower case 13 is formed In shape cavity;3 side of upper housing corresponding with sliding block 4 is fixedly connected with sliding block 4 and upper housing 3 by connecting plate 14.
The working principle of piezo-electric motor is described as follows:
Referring to Figure 10, the upper protruding block 61 of stop-motion body 6 is contacted with lower protruding block 63 with upper housing 3 and lower case 13.When contact point and circle When the angle theta of the connected straight line of the heart and vertical direction is less than angle of friction of the stop-motion body 6 with upper housing 3 and with 13 material of lower case, only Kinetoplast 6 can not move right under pulling force effect to the right, and under thrust to the left, stop-motion body 6 can be moved to the left, thus It realizes unidirectional mobile.
It is harmonic signal figure referring to Figure 11 and Figure 12, Figure 11, Figure 12 is driving mechanism displacement diagram.When work, to piezoelectric patches 9 The harmonic wave that frequency is 10.5KHz is inputted, is timing when applying harmonic signal, driving mechanism displacement increases;When application harmonic signal When being negative, driving mechanism stops movement.Referring to Figure 13, driving mechanism initial position such as state one;Referring to Figure 14, in a harmonic wave It is timing when applying harmonic signal, 71 outer ring of disk is swung to the right from limit on the left, and stop-motion body 6 is moved to the left, and works as disk in period 71 outer rings are in limit on the right-right-hand limit, and the movement such as state two that stop-motion body 6 completes a step pitch is one step pitch of entire driving mechanism Forward; Referring to Figure 15, when application harmonic signal is negative, disk 71 is rocked to limit on the left from limit on the right-right-hand limit, and stop-motion body 6 is remained stationary such as shape State three, a cycle are completed, and macroscopical upper drive mechanism is displaced a step pitch to the left.Completed for the second week when applying harmonic signal Phase, driving mechanism continue to be moved to the left a step pitch.So driving mechanism is macro when continuously to 9 input harmonics signal of piezoelectric patches It is unidirectionally moved along a straight line in sight, output rod 1 stablizes outside thrust output.

Claims (8)

1. a kind of mode of resonance impact type piezo-electric motor, it is characterised in that: including driving mechanism, pre-tightening mechanism and Guiding machine Structure;
The driving mechanism includes output rod (1), stop-motion body (6), piezoelectric vibrator (7) and piezoelectric patches (9);The piezoelectric vibrator It (7) include disk (71) and oscillator bar (72), disk (71) fixing sleeve is set to the middle part of oscillator bar (72);The output rod (1) One end be fixedly connected the one side in the middle part of stop-motion body (6), the piezoelectric vibrator (7) is fixedly connected by oscillator bar (72) Another side in the middle part of stop-motion body (6), output rod (1) and oscillator bar (72) coaxially, make output rod (1), stop-motion body (6) and piezoelectricity Oscillator (7) forms a coaxial entirety;The piezoelectric patches (9) is fixed at the lateral surface of disk (71) in piezoelectric vibrator (7) On;The other end of output rod 1 is output end;
The pre-tightening mechanism includes upper housing (3), lower case (13), bottom plate (10), guide rail (5) and sliding block (4);The upper housing (3) the axial sides corresponding matching of axial sides and lower case (13) is fixedly connected shape by more than two pretension bolts At tubular housing;Preloading spring (12) are arranged on each pretension bolt;The lower case (13) is fixed in bottom plate (10) Portion, the tubular cavity and the length direction of bottom plate (10) are in the same direction, bottom plate (10) width direction one corresponding with lower case (13) Side is equipped with upright riser, and the guide rail (5) is set on riser, and sliding block (4) cooperation is equipped on guide rail (5);
The guiding mechanism includes a pair of bearing (2) and a pair of of linear bearing;A pair of bearing (2) is respectively arranged on lower case (13) on the length direction of the bottom plate (10) of two sides;The one of one end of the output rod (1) of the driving mechanism and oscillator bar (72) End is set on bearing block (2) by linear bearing, and the stop-motion body (6) of driving mechanism is made to be located at upper housing (3) and lower case (13) in the tubular cavity formed;Upper housing (3) side corresponding with sliding block (4) makes sliding block (4) and upper by connecting plate (14) Shell (3) is fixedly connected;
The working frequency of the mode of resonance impact type piezo-electric motor is 10.5KHz, operating voltage 100V, output rod (1) It is 20mm that horizontal axis, which moves stroke, and the external thrust output of horizontal axis is up to 0.8N, and working efficiency is up to 8%;
When work, when continuously to piezoelectric patches (9) input harmonics, driving mechanism is macroscopically unidirectionally moved along a straight line, output rod (1) maintenance level thrust output axially outward.
2. a kind of mode of resonance impact type piezo-electric motor according to claim 1, it is characterised in that: the piezoelectric vibrator (7) diameter of disk (71) is 25mm, and with a thickness of 5mm, the diameter of oscillator bar (72) is 3mm, length 66mm;Disk (71) Two sides offer annular groove respectively, the depth of annular groove is 1.5mm, interior diameter 3mm, overall diameter 20mm;The piezoelectric patches (9) in the annular groove of disk one side;Piezoelectric vibrator (7) total quality is 16g.
3. a kind of mode of resonance impact type piezo-electric motor according to claim 1, it is characterised in that: the stop-motion body (6) middle part is cube (62), is fixed with upper protruding block (61) at the top of cube (62), and the top surface of upper protruding block (61) is upper Arc surface;The bottom of cube (62) is fixed with lower protruding block (63), and the top surface of lower protruding block (63) is lower arc surface;The upper circle Cambered surface, lower arc surface are contacted with the inner wall of tubular housing respectively.
4. a kind of mode of resonance impact type piezo-electric motor according to claim 3, it is characterised in that: the stop-motion body (6) length, width and the height of middle part cube (62) are 10mm, and it is deep to offer diameter 3mm on corresponding two sides respectively The hole of 4mm, upper protruding block (61) is identical as lower protruding block (63) size shape, and length, width and height are 5mm;Upper protruding block (61) It is 8 degree with the angle theta of the top surface circular arc vertex of lower protruding block (63) and the connected straight line in the place circular arc center of circle and vertical direction;Stop-motion body (6) quality is 9g.
5. a kind of mode of resonance impact type piezo-electric motor according to claim 1, it is characterised in that: the output rod (1) diameter 3mm, long 50mm, quality 3g.
6. a kind of mode of resonance impact type piezo-electric motor according to claim 1, it is characterised in that: the sliding block (4) Length 22.5mm, width 17mm, high 7.7mm;Guide rail (5) the length 40mm.
7. a kind of mode of resonance impact type piezo-electric motor according to claim 1, it is characterised in that: the piezoelectric vibrator (7), output rod (1), stop-motion body (6), upper housing (3), lower case (13) material be 65Mn steel.
8. a kind of mode of resonance impact type piezo-electric motor according to claim 1, it is characterised in that: the piezoelectric patches (9) material is lead titanate piezoelectric ceramics.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113131785A (en) * 2021-04-08 2021-07-16 合肥工业大学 Inertia rotation piezoelectric motor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19721804A1 (en) * 1996-07-10 1998-01-22 Univ Magdeburg Tech Movement conversion or translating device e.g. for precise positioning for small objects
US20100301710A1 (en) * 2009-05-29 2010-12-02 Rhk Technology, Inc. Linear piezoelectric nano-positioner
CN103023373A (en) * 2012-12-11 2013-04-03 南京航空航天大学 Two-freedom-degree rotation-line motion micro ultrasonic motor
CN105720858A (en) * 2016-04-18 2016-06-29 南京理工大学 Friction force precisely adjustable impact type piezoelectric driving device
CN106130399A (en) * 2016-08-29 2016-11-16 徐州谷脉电子科技有限公司 A kind of mode of resonance inertia impact piezo-electric motor
CN106602927A (en) * 2017-02-27 2017-04-26 合肥工业大学 Resonant square-wave synchronous clamping piezoelectric linear motor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19721804A1 (en) * 1996-07-10 1998-01-22 Univ Magdeburg Tech Movement conversion or translating device e.g. for precise positioning for small objects
US20100301710A1 (en) * 2009-05-29 2010-12-02 Rhk Technology, Inc. Linear piezoelectric nano-positioner
CN103023373A (en) * 2012-12-11 2013-04-03 南京航空航天大学 Two-freedom-degree rotation-line motion micro ultrasonic motor
CN105720858A (en) * 2016-04-18 2016-06-29 南京理工大学 Friction force precisely adjustable impact type piezoelectric driving device
CN106130399A (en) * 2016-08-29 2016-11-16 徐州谷脉电子科技有限公司 A kind of mode of resonance inertia impact piezo-electric motor
CN106602927A (en) * 2017-02-27 2017-04-26 合肥工业大学 Resonant square-wave synchronous clamping piezoelectric linear motor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
贺良国: "谐振锯齿波驱动型冲击直线压电马达", 《振动工程学报》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113131785A (en) * 2021-04-08 2021-07-16 合肥工业大学 Inertia rotation piezoelectric motor
CN113131785B (en) * 2021-04-08 2022-10-18 合肥工业大学 Inertia rotation piezoelectric motor

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