CN104506081B - Cylindrical piezoelectric motor capable of generating spiral linear movement - Google Patents
Cylindrical piezoelectric motor capable of generating spiral linear movement Download PDFInfo
- Publication number
- CN104506081B CN104506081B CN201510002335.1A CN201510002335A CN104506081B CN 104506081 B CN104506081 B CN 104506081B CN 201510002335 A CN201510002335 A CN 201510002335A CN 104506081 B CN104506081 B CN 104506081B
- Authority
- CN
- China
- Prior art keywords
- stator
- electrode
- rotor
- exciting group
- piezoelectric ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a cylindrical piezoelectric motor capable of generating spiral linear movement. The cylindrical piezoelectric motor capable of generating spiral linear movement comprises a stator and a rotor, wherein the stator is composed of a piezoelectric ceramic external barrel and an elastomer internal barrel; threads matched with each other are formed between the stator and the rotor and achieve transmission through a thread pair to exert a pair of AC (alternate current) signals onto the piezoelectric ceramic external barrel of the stator and further to excite the stator to generate travelling waves in a circumferential direction; driven by the thread pair, the rotor can generate spiral linear movement output. The cylindrical piezoelectric motor capable of generating spiral linear movement can solves the problem of structural complexity, miniaturization difficulty and the like of existing rotary linear piezoelectric motors, save transmission mechanism, achieve a simple structure, be well applicable to miniaturization, and have an important application prospect in the field of precise driving, particularly of micro optical modules.
Description
Technical field
The invention belongs to precision actuation and field of locating technology, it is related to a kind of spiral Linear piezoelectric motor, more particularly, to one
Plant the cylindric piezo-electric motor producing spiral linear motion.
Background technology
Piezo-electric motor is that a kind of inverse piezoelectric effect using piezoelectric element excites oscillator (or weighed son) to produce degree, height a little
The supersonic vibration of frequency, forms the particle movement with particular track in oscillator surface specified point or specific region, by oscillator with
The novel motor of mechanical energy output is realized in friction coupling between mover.Piezo-electric motor has compact conformation, slow-speed of revolution high-torque, sound
Should fast, the advantages of cut off self-lock, be not subject to magnetic and electric disturbances, have quite varied application as a kind of next-generation drive, opened
Begin to be widely applied to the every field such as photographing unit, scanning electron microscope, robot, precision optical machinery.
Output form according to mover is different, and piezo-electric motor can be divided into straight line, rotation and several output classes such as multiple degrees of freedom
Type.Rotational alignment ultrasonic motor is as one of many output type piezo-electric motors at present, main between its oscillator and mover
It is driven using screw thread pair, realized the output of rotational alignment two-freedom spiral linear motion by screw thread auxiliary driving.With
Other class ultrasonic motors are compared, and rotational alignment ultrasonic motor has that structure is simple, be easy to the advantages such as miniaturization, positioning precision height,
Can be widely applied to the technical field of precision actuation and transmission.
Publication No. is that the Chinese patent of CN1767347 discloses a kind of screw thread driven polyhedron ultrasonic motor, by 4-12
Piezoelectric element pastes in the plane outside metal thin-wall cylinder stator, and rotor is nibbled by screw thread phase with metal thin-wall cylinder stator
Close, make in stator, to produce in-plane bending traveling wave along the circumferential direction by encouraging piezoelectric patches, revolved by screw thread direct driving rotor
Turn and be converted into the spiral linear motion of rotor.But the rotor of this motor is polyhedron pipe structure, multiple piezoelectric ceramic pieces
It is pasted onto composition driving body on each face polyhedral, higher to processing request, manufacturing process is also complex, be criticizing of motor
Quantify to produce and bring the technical barriers such as complex manufacturing technology with miniaturization.
Publication No. is that the United States Patent (USP) of US6940209 discloses a kind of rhabditis-form Linear piezoelectric motor, and it utilizes two pressures
Pile element produces " Ho La hoop " (wobbling) motion two ends, promotes one by screw drive principle and inserts in it
Screw rod produce linear motion, it can make the rod-like structure of minor diameter, but its size in the longitudinal direction is larger, no
It is suitable for doing extra-thin camera lens module.Additionally, the deficiency of this motor also resides in needs more Aided Machine structure.
Content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides a kind of cylindric pressure producing spiral linear motion
Electric notor, directly produces motion by screw thread between stator and rotor, realizes the motion of rotation and two degree of freedom of straight line, can save
Remove other drive mechanisms so as to structure is simpler compact, miniaturization and mass production can be better adapted to.
The present invention provide technical scheme be：
A kind of cylindric piezo-electric motor producing spiral linear motion, including stator and rotor, described stator includes piezoelectricity
Ceramic excircle cylinder and inner surface screwed elastomer inner cylinder；Described rotor is to have externally threaded hollow elasticity body circle
Ring；The external screw thread of described rotor is merged with the screw thread kissing of the elastomer inner circle tube inner surface of described stator in screw-in stator；Institute
State stator and pass through screw thread auxiliary driving with described rotor, realize the spiral linear motion output of rotor.
In above-mentioned piezo-electric motor, described piezoelectric ceramics outer cylinder, along barrel direction polarization, is coated with respectively in the inside and outside wall of cylinder
Electrode, the electrode of inwall is an entirety, and the electrode of outer wall is along the circumferential direction divided into multiple regions, and each region is an electricity
Pole；The electrode ground connection of described piezoelectric ceramics outer cylinder inwall, the multiple electrodes of outer wall connect a pair of high-frequency AC excitation signal；Fixed
The piezoelectric ceramics outer cylinder of son, under the excitation of the pair of high-frequency AC excitation signal, inspires two tools dephased curved
Bent resonant vibration mode, superimposed coupling forms the traveling wave that the elastomer internal and external circumference side along described stator upwardly propagates；Pass through
Screw thread pair between described traveling wave and stator and rotor, rotor described in described stator driving along stator shaft orientation spin straight line fortune
Dynamic.
In above-mentioned piezo-electric motor, the outer wall of piezoelectric ceramics outer cylinder is divided into multiple regions and is specifically along the circumferential direction divided into
Four several again regions；In one embodiment of the invention, the electrode of the outer wall of piezoelectric ceramics outer cylinder is eight, by up time
Pin order is followed successively by electrode 11～electrode 18, described electrode 11 and 15 be A1 exciting group, electrode 13 and 17 be A2 exciting group, A1 and
A2 exciting group constitutes A exciting group；Electrode 12 and 16 is B1 exciting group, and electrode 14 and 18 is B2 exciting group, B1 and B2 exciting group structure
Become B exciting group；The high-frequency AC excitation signal that described A exciting group is connected with B exciting group is that frequency is identical, voltage magnitude phase
With, but two different supersonic frequency signals of telecommunication of phase place.In the embodiment of the present invention, two supersonic frequency signals of telecommunication havePhase
Potential difference.
In above-mentioned piezo-electric motor, piezoelectric ceramics outer cylinder and elastomer inner cylinder pass through gluing or cold welding technique consolidation.Fixed
The material of son and rotor elastomer is titanium alloy, copper alloy, steel alloy, aluminium alloy or high strength elastic high molecular polymer.High
Strength, elastic high molecular polymer is polyamide (PA), Merlon (PC), polyformaldehyde (POM), polyphenylene oxide (PPO), polyethers ether
The engineering plastics such as ketone (PEEK).
The piezoelectric ceramics of piezoelectric ceramics outer cylinder is the lead zirconate titanate series ceramic having and suppressing electrical effect or has excellent
The leadless piezoelectric ceramics of piezoelectric property, including Barium metatitanate. (BaTiO3) based leadless piezoelectric ceramics, bismuth-sodium titanate ((Bi0.5Na0.5)
TiO3) based leadless piezoelectric ceramics and alkali metal potassium-sodium niobate ((K, Na) NbO3) based leadless piezoelectric ceramics etc..
In above-mentioned piezo-electric motor, the hollow space of rotor is used for the fixing element needing and driving.
Compared with prior art, the invention has the beneficial effects as follows：
Between the stator of piezo-electric motor that the present invention provides and rotor by screw thread directly produce rotation and two, straight line from
By the motion spent, other drive mechanisms can be saved, greatly reduce the volume of piezo-electric motor system, it is simple and compact for structure, letter
Change manufacturing process, it is possible to resolve the problems such as existing rotational alignment piezoelectric motor configuration is complicated, miniaturization is difficult, can better adapt to
Miniaturization and mass production, in precision actuation field, particularly have important application prospect in micro-optical module.
Brief description
Fig. 1 is the perspective view of the present invention；
Wherein, 1 piezoelectric ceramics outer cylinder；2 elastomer inner cylinders；3 rotors.
Fig. 2 is the structural representation of piezoelectric ceramics outer cylinder in the embodiment of the present invention, and external electrode is circumferentially divided into eight (4
× 2) decile；
Fig. 3 is the top view of piezoelectric ceramics outer cylinder in the embodiment of the present invention；
Fig. 4 is the structural representation that in the embodiment of the present invention, piezoelectric ceramics outer cylinder adopts the first voltage drive mode；
Fig. 5 is the structural representation that in the embodiment of the present invention, piezoelectric ceramics outer cylinder adopts second voltage drive mode；
In Fig. 2～Fig. 5,11～18 is eight electrodes being divided into external electrode, and wherein, electrode 11 and 15 is A1 exciting
Group, electrode 13 and 17 is A2 exciting group, A1 and A2 exciting group constitutes A exciting group, and electrode 12 and 16 is B1 exciting group, electrode 14 He
18 is B2 exciting group；B1 and B2 exciting group constitutes B exciting group；19 is interior electrode；
In Fig. 4～Fig. 5, the angular frequency of ω high frequency ac signal；The t time.
Fig. 6 is flexural vibration mode schematic diagram under voltage drive for the piezoelectric ceramics outer cylinder in the embodiment of the present invention；
Wherein, (a) is individually to apply alternating signal to A exciting group, the standing wave resonance vibration that piezoelectric ceramics outer cylinder produces；
B () is individually to apply alternating signal to B exciting group, the standing wave resonance vibration that piezoelectric ceramics outer cylinder produces.
Specific embodiment
Below in conjunction with the accompanying drawings, the present invention is further described by embodiment, but limit the model of the present invention never in any form
Enclose.
Fig. 1 is the perspective view of the present invention；Fig. 2 is that the structure of piezoelectric ceramics outer cylinder in the embodiment of the present invention is shown
It is intended to, external electrode is circumferentially divided into eight (4 × 2) decile；Fig. 3 is the vertical view of piezoelectric ceramics outer cylinder in the embodiment of the present invention
Figure.As seen from the figure, the cylindric piezo-electric motor of the produced spiral linear motion that the present invention provides is mainly cylindrical by piezoelectric ceramics
Cylinder 1, elastomer inner cylinder 2 and rotor 3 form.
Wherein, piezoelectric ceramics outer cylinder 1, along the direction polarization of barrel.Piezoelectric ceramics outer cylinder 1 is two inside and outside barrel
Face is coated with electrode, and interior electrode 19 is the electrode of an entirety, and the external electrode of barrel is divided into eight parts (quantity of institute's sub-electrode
Can be 4 integral multiple), dispatch from foreign news agency extremely electrode 11,12,13,14,15,16,17,18.Piezoelectric ceramics outer cylinder 1 is passed through gluing
(epoxy resin) or cold welding technique realize the consolidation with elastomer inner cylinder 2, and piezoelectric ceramics outer cylinder 1 is with elastomer inner cylinder
2 collectively form stator.
Rotor 3 is the elastomer annulus with externally threaded hollow structure, needs the element (such as camera lens) driving permissible
It is fixed on the inside of rotor 3.Rotor 3 is outside to carry external screw thread, is realized by screw thread pair between rotor 3 and elastomer inner cylinder 2
Transmission.
In the external electrode of piezoelectric ceramics outer cylinder, electrode 11 is symmetrical along the diametric(al) of piezoelectric ceramics outer cylinder with electrode 15
Distribution, referred to as A1 exciting group；Electrode 13 is also symmetrical along the diametric(al) of piezoelectric ceramics outer cylinder with electrode 17, referred to as A2
Exciting group；A1 exciting group constitutes A exciting group with A2 exciting group.Electrode 12 is with electrode 16 also along the diameter side of piezoelectric ceramics outer cylinder
To symmetrical, referred to as B1 exciting group；Electrode 14 is also symmetrical along the diametric(al) of piezoelectric ceramics outer cylinder with electrode 18, claims
For B2 exciting group；B1 exciting group constitutes B exciting group with B2 exciting group.
The motivational techniques of present embodiment：Illustrate with reference to Fig. 4, Fig. 5 and Fig. 6.Individually to A1 exciting group in A exciting group
Apply to make it produce the alternating signal elongating or shortening deformation, A2 exciting group is applied make it produce the friendship of shortening or elongation strain
Varying signal, because the effect of inverse piezoelectric effect, produces elongation and the deformation shunk, whole pressure in two perpendicular directions respectively
Electroceramics outer cylinder will produce a standing wave resonance vibration R1 as shown in Fig. 6 (a).Individually B1 exciting group in B exciting group is applied
Plus making it produce the alternating signal elongating or shortening deformation, B2 exciting group applies to make it produce the alternation letter of shortening or elongation strain
Number, because the effect of inverse piezoelectric effect, produce elongation and the deformation shunk, whole piezoelectricity pottery in two perpendicular directions respectively
Porcelain outer cylinder will produce a standing wave resonance vibration R2 as shown in Fig. 6 (b).Standing wave resonance vibration R1 spatially exists with R2
45 ° of differential seat angle.
A exciting group is identical with the frequency of the connect alternating signal of B exciting group, and all in supersonic range, voltage magnitude is identical, but
HavePhase contrast.When A exciting group and B exciting group are excited simultaneously, piezoelectric ceramics outer cylinder 1 will encourage simultaneously R1 and
Two standing wave resonance vibrations of R2, their superposition can couple one traveling wave resonant vibration of formation.Wherein, when being carried in A exciting group
Meet with the phase contrast of alternating signal in B exciting groupOrthogonality relation when, as shown in figure 4, A exciting group is excited with B exciting group
Piezoelectric ceramics outer cylinder 1 produces the traveling wave of 2 wavelength, and whole stator also will vibrate therewith, by screw thread auxiliary driving, drives rotor
3 clock wise spirals straight line outputs.When the phase contrast being carried in alternating signal in A exciting group and B exciting group meetsOrthogonal pass
When being, as shown in figure 5, A exciting group and B exciting group excite piezoelectric ceramics outer cylinder 1 to produce the backward-travelling wave of 2 wavelength, entirely
Stator also will vibrate therewith, by screw thread auxiliary driving, drive the output of rotor 3 counter-clockwise helical straight line.
It should be noted that the purpose publicizing and implementing example is that help further understands the present invention, but the skill of this area
Art personnel be appreciated that：Without departing from the present invention and spirit and scope of the appended claims, various substitutions and modifications are all
Possible.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is with claim
The scope that book defines is defined.
Claims (9)
1. a kind of cylindric Technology of Traveling Ultrasonic Motor producing spiral linear motion, including piezoelectric stator and rotor, is characterized in that, institute
State piezoelectric stator and include piezoelectric ceramics outer cylinder and inner surface screwed elastomer inner cylinder；The piezoelectricity of described piezoelectric stator
Ceramic excircle cylinder, along barrel direction polarization, is coated with electrode in the inside and outside wall of cylinder, the electrode of inwall is an entirety, outer wall respectively
Electrode is along the circumferential direction divided into four several again equal portions regions, and multiple is more than or equal to 2；Each region is an electrode；Described pressure
Electric stator, because of the effect of inverse piezoelectric effect, produces elongation in two perpendicular directions respectively and the traveling wave resonance of contraction deformation shakes
Dynamic；Described rotor is to have externally threaded hollow elasticity body annulus；The external screw thread of described rotor and the elasticity of described piezoelectric stator
The screw thread kissing of internal cylinder inner surface merges in screw-in stator；Described piezoelectric stator utilizes traveling wave resonant vibration, with described turn
Son passes through screw thread auxiliary driving, thus realizing the spiral linear motion output of rotor.
2. piezo-electric motor as claimed in claim 1, is characterized in that, the electrode ground connection of described piezoelectric ceramics outer cylinder inwall, outer wall
Multiple electrodes connect a pair of high-frequency AC excitation signal；The piezoelectric ceramics outer cylinder of described stator is in the pair of high-frequency ac
Under the excitation of pumping signal, inspire two dephased crooked syntony mode of oscillations of tool, superimposed coupling forms along described
The traveling wave that the elastomer inner circle circumferential direction upload of stator is broadcast.
3. piezo-electric motor as claimed in claim 2, is characterized in that, the phase contrast of the pair of high-frequency AC excitation signal is
4. piezo-electric motor as claimed in claim 1, is characterized in that, the electrode of the outer wall of described piezoelectric ceramics outer cylinder is eight,
It is followed successively by electrode 11～electrode 18 by clock-wise order, described electrode 11 and 15 is A1 exciting group, electrode 13 and 17 is A2 exciting
Group, A1 and A2 exciting group constitutes A exciting group；Electrode 12 and 16 is B1 exciting group, and electrode 14 and 18 is B2 exciting group, B1 and B2 swashs
Group of shaking constitutes B exciting group；A pair of high-frequency AC excitation signal that described A exciting group is connected with B exciting group is two frequency phases
Identical with, voltage magnitude, but the different supersonic frequency signal of telecommunication of phase place.
5. piezo-electric motor as claimed in claim 1, is characterized in that, described piezoelectric ceramics outer cylinder and elastomer inner cylinder pass through glue
Viscous or cold welding technique consolidates.
6. piezo-electric motor as claimed in claim 1, is characterized in that, the material of described stator and rotor elastomer is titanium alloy, copper
Alloy, steel alloy, aluminium alloy or high strength elastic high molecular polymer；Described high strength elastic high molecular polymer is polyamides
Amine, Merlon, polyformaldehyde, polyphenylene oxide or polyether-ether-ketone.
7. piezo-electric motor as claimed in claim 1, is characterized in that, the piezoelectric ceramics of described piezoelectric ceramics outer cylinder is lead zirconate titanate
Series ceramic or leadless piezoelectric ceramics.
8. piezo-electric motor as claimed in claim 7, is characterized in that, described leadless piezoelectric ceramics includes barium titanate-based lead-free piezoelectricity pottery
Porcelain, bismuth-sodium titanate base lead-free piezoelectric ceramic and alkali metal potassium niobate sodium-based leadless piezoelectric ceramic.
9. piezo-electric motor as claimed in claim 1, is characterized in that, the hollow space of described rotor is used for the fixing unit needing and driving
Part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510002335.1A CN104506081B (en) | 2015-01-05 | 2015-01-05 | Cylindrical piezoelectric motor capable of generating spiral linear movement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510002335.1A CN104506081B (en) | 2015-01-05 | 2015-01-05 | Cylindrical piezoelectric motor capable of generating spiral linear movement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104506081A CN104506081A (en) | 2015-04-08 |
| CN104506081B true CN104506081B (en) | 2017-02-22 |
Family
ID=52947808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510002335.1A Active CN104506081B (en) | 2015-01-05 | 2015-01-05 | Cylindrical piezoelectric motor capable of generating spiral linear movement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104506081B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106089715A (en) * | 2016-08-25 | 2016-11-09 | 深圳沃海森科技有限公司 | Ultrasound wave frequency converting air-conditioner compressor |
| CN106391435B (en) * | 2016-10-19 | 2019-06-21 | 杭州电子科技大学 | A kind of device for realizing particle suspension and rotation |
| TWI678879B (en) | 2018-11-27 | 2019-12-01 | 財團法人工業技術研究院 | Ultrasonic linear actuation device |
| CN111312027A (en) * | 2018-12-11 | 2020-06-19 | 北京纳米能源与系统研究所 | Micro motor, driver and braille display based on polylactic acid piezoelectric film |
| CN112706822A (en) * | 2019-10-25 | 2021-04-27 | 比亚迪股份有限公司 | Steering system and vehicle |
| CN111911126B (en) * | 2020-09-07 | 2022-11-22 | 中国石油天然气集团有限公司 | Setting bridge plug for repeated fracturing and repeated fracturing construction method of oil and gas field well |
| CN113630037B (en) * | 2021-08-13 | 2023-07-25 | 中国工程物理研究院机械制造工艺研究所 | Motion resolution improving device and method for standing wave type piezoelectric motor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1767347A (en) * | 2005-11-18 | 2006-05-03 | 清华大学 | Screw thread driven polyhedron ultrasonic motor |
| TW200847607A (en) * | 2007-04-03 | 2008-12-01 | Shu-Xiang Dong | Miniature piezoelectric motor and method of driving elements using same |
| CN101420190A (en) * | 2007-10-26 | 2009-04-29 | 博立码杰通讯(深圳)有限公司 | Ultrasonic motor driving method |
| DE102010022812A1 (en) * | 2010-06-05 | 2011-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasonic motor, has element to be driven and contact element, which are in threaded engagement, and ultrasound actuator surrounding contact element on outer circumferential surface completely |
| CN103227279A (en) * | 2012-01-31 | 2013-07-31 | 三星电子株式会社 | Slip-stick piezoelectric actuator |
-
2015
- 2015-01-05 CN CN201510002335.1A patent/CN104506081B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1767347A (en) * | 2005-11-18 | 2006-05-03 | 清华大学 | Screw thread driven polyhedron ultrasonic motor |
| TW200847607A (en) * | 2007-04-03 | 2008-12-01 | Shu-Xiang Dong | Miniature piezoelectric motor and method of driving elements using same |
| CN101420190A (en) * | 2007-10-26 | 2009-04-29 | 博立码杰通讯(深圳)有限公司 | Ultrasonic motor driving method |
| DE102010022812A1 (en) * | 2010-06-05 | 2011-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasonic motor, has element to be driven and contact element, which are in threaded engagement, and ultrasound actuator surrounding contact element on outer circumferential surface completely |
| CN103227279A (en) * | 2012-01-31 | 2013-07-31 | 三星电子株式会社 | Slip-stick piezoelectric actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104506081A (en) | 2015-04-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104506081B (en) | Cylindrical piezoelectric motor capable of generating spiral linear movement | |
| CN102843063B (en) | Screw-thread-driven rotary-linear ultrasonic motor using columnar stator high-order bending vibration mode | |
| CN102355157B (en) | Piezoelectric plate-sandwiched rotary linear ultrasonic motor stator | |
| He et al. | A single vibration mode tubular piezoelectric ultrasonic motor | |
| CN104410324B (en) | A kind of miniature rotation straight-line traveling wave piezoelectric motor | |
| CN102931869A (en) | SMD (Surface Mount Device) ultrasonic motor vibrator and drive method thereof | |
| CN108429486B (en) | Combined flat surface 3-freedom ultrasonic motor oscillator and its driving method | |
| Xing et al. | A miniature cylindrical piezoelectric motor with an asymmetric vibrator | |
| CN101364775B (en) | Flat dual-stator thread driving ultrasonic minimized motor having thread pair pretensioning | |
| CN1306336A (en) | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method | |
| CN206164396U (en) | Accurate piezoelectricity thread drive mechanism is received to declining of columnar structure | |
| CN102005965B (en) | Ultrasonic motor driven by single-phase power supply | |
| CN102931875A (en) | SMD square ultrasonic motor vibrator and driving method thereof | |
| KR960003266Y1 (en) | Vibration driven motor | |
| CN101546967A (en) | Thin type standing wave rotary ultrasonic motor | |
| CN103023373A (en) | Two-freedom-degree rotation-line motion micro ultrasonic motor | |
| CN101246243A (en) | Optical focusing mechanism | |
| CN105162354B (en) | Swing type micro machine based on giant magnetostrictive material | |
| CN105305875B (en) | A kind of floor displacement type longitudinal-torsional composite ultrasonic motor | |
| CN103178745B (en) | A kind of frequency-control-type list drives two-way rod-type piezoelectric motor | |
| CN101572505B (en) | Rotary and linear dual-purpose ultrasonic motor | |
| Pan et al. | Coupled torsional and longitudinal vibrations of piezoelectric fiber actuator with helical electrodes | |
| Zhou et al. | Integrated lens auto-focus system driven by a nut-type ultrosonic motor (USM) | |
| CN100461609C (en) | Hollow metal square column piezoelectric element composite ultrasonic micromotor | |
| Xu et al. | An inertial piezoelectric rotary motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |