CN104506081A - Cylindrical piezoelectric motor capable of generating spiral linear movement - Google Patents
Cylindrical piezoelectric motor capable of generating spiral linear movement Download PDFInfo
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- CN104506081A CN104506081A CN201510002335.1A CN201510002335A CN104506081A CN 104506081 A CN104506081 A CN 104506081A CN 201510002335 A CN201510002335 A CN 201510002335A CN 104506081 A CN104506081 A CN 104506081A
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Abstract
The invention discloses a cylindrical piezoelectric motor capable of generating spiral linear movement. The cylindrical piezoelectric motor capable of generating spiral linear movement comprises a stator and a rotor, wherein the stator is composed of a piezoelectric ceramic external barrel and an elastomer internal barrel; threads matched with each other are formed between the stator and the rotor and achieve transmission through a thread pair to exert a pair of AC (alternate current) signals onto the piezoelectric ceramic external barrel of the stator and further to excite the stator to generate travelling waves in a circumferential direction; driven by the thread pair, the rotor can generate spiral linear movement output. The cylindrical piezoelectric motor capable of generating spiral linear movement can solves the problem of structural complexity, miniaturization difficulty and the like of existing rotary linear piezoelectric motors, save transmission mechanism, achieve a simple structure, be well applicable to miniaturization, and have an important application prospect in the field of precise driving, particularly of micro optical modules.
Description
Technical field
The invention belongs to precision actuation and field of locating technology, relate to a kind of spiral Linear piezoelectric motor, particularly relate to a kind of cylindric piezo-electric motor producing spiral rectilinear motion.
Background technology
Piezo-electric motor is that a kind of inverse piezoelectric effect of piezoelectric element that utilizes excites oscillator (or weighed son) to produce the ultrasonic vibration of degree, high frequency a little, form the particle movement with particular track at oscillator surface specified point or specific region, being coupled by the friction between oscillator with mover realizes the novel motor of mechanical energy output.Piezo-electric motor has compact conformation, slow-speed of revolution high-torque, responds soon, cuts off self-lock, not by advantages such as magnetic and electric disturbances, have as a kind of next-generation drive and apply very widely, now started to be widely applied to the every field such as camera, scanning electron microscopy, robot, precision optical machinery.
Different according to the output form of mover, piezo-electric motor can be divided into several output types such as straight line, rotation and multiple degrees of freedom.Rotational alignment ultrasonic motor is as the one in current many output type piezo-electric motors, and between its oscillator and mover, the main screw thread pair that adopts carries out transmission, is realized the output of rotational alignment two-freedom-spiral rectilinear motion by screw thread pair transmission.Compared with other class ultrasonic motor, rotational alignment ultrasonic motor have structure simple, be easy to the advantage such as microminiaturized, positioning precision is high, the technical field of precision actuation and transmission can be widely used in.
Publication No. is that the Chinese patent of CN1767347 discloses a kind of screw thread driven polyhedron ultrasonic motor, 4-12 piezoelectric element is pasted in the plane outside metal thin-wall cylinder stator, rotor and metal thin-wall cylinder stator pass through threaded engagement, make by excitation piezoelectric patches the capable ripple of in-plane bending that produces in stator along the circumferential direction, rotated by screw thread direct driving rotor and convert the spiral rectilinear motion of rotor to.But the rotor of this motor is polyhedron pipe structure, multiple piezoelectric ceramic piece is pasted onto on each face polyhedral and forms driving body, higher to processing request, production process is also comparatively complicated, for the mass production of motor and microminiaturization bring the technical barriers such as complex manufacturing technology.
Publication No. be US6940209 U.S. patents disclose a kind of rhabditis-form Linear piezoelectric motor, it utilizes two piezoelectric pile elements to produce " Ho La hoop " (wobbling) motion two ends, promote a screw rod be inserted therein by screw drive principle and produce rectilinear motion, it can make the rod-like structure of minor diameter, but its size is in the longitudinal direction comparatively large, is not suitable for doing extra-thin camera lens module.In addition, the deficiency of this motor is also to need more Aided Machine structure.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the invention provides a kind of cylindric piezo-electric motor producing spiral rectilinear motion, directly motion is produced by screw thread between stator and rotor, realize rotating the motion with straight line two degrees of freedom, other transmission mechanisms can be saved, make its structure more simply compact, microminiaturization and mass production can be adapted to better.
Technical scheme provided by the invention is:
Produce a cylindric piezo-electric motor for spiral rectilinear motion, comprise stator and rotor, described stator comprises piezoelectric ceramic outer cylinder and the threaded elastomer inner cylinder of inner surface belt; Described rotor is for having externally threaded hollow elasticity body annulus; The screw thread kissing of the external screw thread of described rotor and the elastomer inner cylinder inner surface of described stator merges and screws in stator; Described stator and described rotor are by screw thread pair transmission, and the spiral rectilinear motion realizing rotor exports.
In above-mentioned piezo-electric motor, described piezoelectric ceramic outer cylinder, along barrel direction polarization, is coated with electrode respectively at the inside and outside wall of cylinder, and the electrode of inwall is an entirety, and the electrode of outer wall is along the circumferential direction divided into multiple region, and each region is an electrode; The electrode grounding of described piezoelectric ceramic outer cylinder inwall, multiple electrodes of outer wall connect a pair high-frequency AC excitation signal; The piezoelectric ceramic outer cylinder of stator, under the excitation of described a pair high-frequency AC excitation signal, inspires two dephased crooked syntony mode of oscillations of tool, is formed along the row ripple that the elastomer internal and external circumference direction of described stator is propagated through superposition coupling; By described row ripple and the screw thread pair between stator and rotor, described stator drives described rotor to spin rectilinear motion along stator shaft orientation.
In above-mentioned piezo-electric motor, the outer wall of piezoelectric ceramic outer cylinder is divided into doubly several regions that multiple region is specifically along the circumferential direction divided into four; In one embodiment of the invention, the electrode of the outer wall of piezoelectric ceramic outer cylinder is eight, is followed successively by electrode 11 ~ electrode 18 by clock-wise order, and described electrode 11 and 15 is A1 exciting group, electrode 13 and 17 is A2 exciting group, A1 and A2 exciting group forms A exciting group; Electrode 12 and 16 is B1 exciting group, and electrode 14 and 18 is B2 exciting group, B1 and B2 exciting group forms B exciting group; The high-frequency AC excitation signal that described A exciting group and B exciting group are connected is that frequency is identical, voltage magnitude is identical, but two supersonic frequency signals of telecommunication that phase place is different.In the embodiment of the present invention, two supersonic frequency signals of telecommunication have
phase difference.
In above-mentioned piezo-electric motor, piezoelectric ceramic outer cylinder and elastomer inner cylinder are by gluing or cold welding technique consolidation.The elastomeric material of stators and rotators is titanium alloy, copper alloy, steel alloy, aluminium alloy or high strength elastic high molecular polymer.High strength elastic high molecular polymer is the engineering plastics such as polyamide (PA), Merlon (PC), polyformaldehyde (POM), polyphenylene oxide (PPO), polyether-ether-ketone (PEEK).
The piezoelectric ceramic of piezoelectric ceramic outer cylinder has the lead zirconate titanate series ceramic suppressing electrical effect or the leadless piezoelectric ceramics with excellent piezoelectric property, comprises barium titanate (BaTiO
3) based leadless piezoelectric ceramics, bismuth-sodium titanate ((Bi
0.5na
0.5) TiO
3) based leadless piezoelectric ceramics and alkali metal potassium-sodium niobate ((K, Na) NbO
3) based leadless piezoelectric ceramics etc.
In above-mentioned piezo-electric motor, the hollow space of rotor is used for the fixing element needing to drive.
Compared with prior art, the invention has the beneficial effects as follows:
Directly produced the motion rotated with straight line two degrees of freedom by screw thread between the stator of piezo-electric motor provided by the invention and rotor, other transmission mechanisms can be saved, greatly reduce the volume of piezo-electric motor system, it is simple and compact for structure, simplify manufacturing process, the problems such as existing rotational alignment piezoelectric motor configuration is complicated, microminiaturized difficulty can be solved, microminiaturization and mass production can be adapted to better, in precision actuation field, particularly in micro-optical module, there is important application prospect.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention;
Wherein, 1-piezoelectric ceramic outer cylinder; 2-elastomer inner cylinder; 3-rotor.
Fig. 2 is the structural representation of piezoelectric ceramic outer cylinder in the embodiment of the present invention, and external electrode is circumferentially divided into eight (4 × 2) decile;
Fig. 3 is the vertical view of piezoelectric ceramic outer cylinder in the embodiment of the present invention;
Fig. 4 is the structural representation that in the embodiment of the present invention, piezoelectric ceramic outer cylinder adopts the first voltage drive mode;
Fig. 5 is the structural representation that in the embodiment of the present invention, piezoelectric ceramic outer cylinder adopts the second voltage drive mode;
In Fig. 2 ~ Fig. 5,11 ~ 18 is eight electrodes be divided into by external electrode, and wherein, electrode 11 and 15 is A1 exciting group, and electrode 13 and 17 is A2 exciting group, A1 and A2 exciting group forms A exciting group, and electrode 12 and 16 is B1 exciting group, and electrode 14 and 18 is B2 exciting group; B1 and B2 exciting group forms B exciting group; 19 is interior electrode;
In Fig. 4 ~ Fig. 5, the angular frequency of ω-high frequency ac signal; T-time.
Fig. 6 is the flexural vibration mode schematic diagram of piezoelectric ceramic outer cylinder under voltage drive in the embodiment of the present invention;
Wherein, (a) applies alternating signal to A exciting group separately, the standing wave resonance vibration that piezoelectric ceramic outer cylinder produces; B () is apply alternating signal to B exciting group separately, the standing wave resonance vibration that piezoelectric ceramic outer cylinder produces.
Embodiment
Below in conjunction with accompanying drawing, further describe the present invention by embodiment, but the scope do not limited the present invention in any way.
Fig. 1 is perspective view of the present invention; Fig. 2 is the structural representation of piezoelectric ceramic outer cylinder in the embodiment of the present invention, and external electrode is circumferentially divided into eight (4 × 2) decile; Fig. 3 is the vertical view of piezoelectric ceramic outer cylinder in the embodiment of the present invention.As seen from the figure, the cylindric piezo-electric motor producing spiral rectilinear motion provided by the invention forms primarily of piezoelectric ceramic outer cylinder 1, elastomer inner cylinder 2 and rotor 3.
Wherein, piezoelectric ceramic outer cylinder 1, along the direction polarization of barrel.Piezoelectric ceramic outer cylinder 1 two sides inside and outside barrel is coated with electrode, interior electrode 19 is overall electrodes, the external electrode of barrel is divided into eight parts (quantity of institute's sub-electrode can be the integral multiple of 4), and dispatch from foreign news agency is electrode 11,12,13,14,15,16,17,18 very.Piezoelectric ceramic outer cylinder 1 realizes the consolidation with elastomer inner cylinder 2 by gluing (epoxy resin) or cold welding technique, and piezoelectric ceramic outer cylinder 1 forms stator jointly with elastomer inner cylinder 2.
Rotor 3, for having the elastomer annulus of externally threaded hollow structure, needs the element (such as camera lens) driven can be fixed on the inside of rotor 3.Rotor 3 outside, with external screw thread, realizes transmission by screw thread pair between rotor 3 and elastomer inner cylinder 2.
In the external electrode of piezoelectric ceramic outer cylinder, electrode 11 is symmetrical along the diametric(al) of piezoelectric ceramic outer cylinder with electrode 15, is called A1 exciting group; Electrode 13 is also symmetrical along the diametric(al) of piezoelectric ceramic outer cylinder with electrode 17, is called A2 exciting group; A1 exciting group forms A exciting group with A2 exciting group.Electrode 12 is symmetrical with the diametric(al) of electrode 16 also along piezoelectric ceramic outer cylinder, is called B1 exciting group; Electrode 14 is symmetrical with the diametric(al) of electrode 18 also along piezoelectric ceramic outer cylinder, is called B2 exciting group; B1 exciting group and B2 exciting group form B exciting group.
The motivational techniques of present embodiment: be described with reference to Fig. 4, Fig. 5 and Fig. 6.Separately A1 exciting group in A exciting group is applied to make it produce and is elongated or shortened the alternating signal of distortion, apply to make it produce the alternating signal of shortening or elongation strain to A2 exciting group, because the effect of inverse piezoelectric effect, produce the deformation of extending and shrinking in two perpendicular directions respectively, whole piezoelectric ceramic outer cylinder is by the standing wave resonance vibration R1 of generation one as shown in Fig. 6 (a).Separately B1 exciting group in B exciting group is applied to make it produce and is elongated or shortened the alternating signal of distortion, B2 exciting group applies to make it produce the alternating signal of shortening or elongation strain, because the effect of inverse piezoelectric effect, produce the deformation of extending and shrinking in two perpendicular directions respectively, whole piezoelectric ceramic outer cylinder is by the standing wave resonance vibration R2 of generation one as shown in Fig. 6 (b).The differential seat angle of 45 ° is spatially there is in standing wave resonance vibration R1 with R2.
A exciting group and B exciting group to connect the frequency of alternating signal identical, be all in supersonic range, voltage magnitude is identical, but has
phase difference.When A exciting group and B exciting group are excited simultaneously, piezoelectric ceramic outer cylinder 1 will encourage the vibration of R1 and R2 two standing wave resonances simultaneously, and their superposition can be coupled formation row wave resonance vibration.Wherein, when the phase difference being carried in alternating signal in A exciting group and B exciting group meets
orthogonality relation time, as shown in Figure 4, A exciting group and B exciting group excite piezoelectric ceramic outer cylinder 1 to produce the row ripple of 2 wavelength, and whole stator also will vibrate thereupon, by screw thread pair transmission, drive rotor 3 clock wise spirals straight line to export.When the phase difference being carried in alternating signal in A exciting group and B exciting group meets
orthogonality relation time, as shown in Figure 5, A exciting group and B exciting group excite piezoelectric ceramic outer cylinder 1 to produce the returning wave of 2 wavelength, and whole stator also will vibrate thereupon, by screw thread pair transmission, drive rotor 3 counter-clockwise helical straight line to export.
It should be noted that the object publicizing and implementing example is to help to understand the present invention further, but it will be appreciated by those skilled in the art that: in the spirit and scope not departing from the present invention and claims, various substitutions and modifications are all possible.Therefore, the present invention should not be limited to the content disclosed in embodiment, and the scope that the scope of protection of present invention defines with claims is as the criterion.
Claims (10)
1. produce a cylindric piezo-electric motor for spiral rectilinear motion, comprise stator and rotor, it is characterized in that, described stator comprises piezoelectric ceramic outer cylinder and the threaded elastomer inner cylinder of inner surface belt; Described rotor is for having externally threaded hollow elasticity body annulus; The screw thread kissing of the external screw thread of described rotor and the elastomer inner cylinder inner surface of described stator merges and screws in stator; Described stator and described rotor are by screw thread pair transmission, thus the spiral rectilinear motion realizing rotor exports.
2. piezo-electric motor as claimed in claim 1, it is characterized in that, the piezoelectric ceramic outer cylinder of described stator is along barrel direction polarization, electrode is coated with respectively at the inside and outside wall of cylinder, the electrode of inwall is an entirety, and the electrode of outer wall is along the circumferential direction divided into multiple region, and each region is an electrode; The electrode grounding of described piezoelectric ceramic outer cylinder inwall, multiple electrodes of outer wall connect a pair high-frequency AC excitation signal; The piezoelectric ceramic outer cylinder of described stator, under the excitation of described a pair high-frequency AC excitation signal, inspires two dephased crooked syntony mode of oscillations of tool, is formed along the row ripple that the elastomer internal and external circumference direction of described stator is propagated through superposition coupling; By described row ripple and the screw thread pair between stator and rotor, described stator drives described rotor to spin rectilinear motion along stator shaft orientation.
3. piezo-electric motor as claimed in claim 2, it is characterized in that, the outer wall of described piezoelectric ceramic outer cylinder is divided into multiple region, is specifically along the circumferential direction divided into doubly several regions of four.
4. piezo-electric motor as claimed in claim 2, it is characterized in that, the electrode of the outer wall of described piezoelectric ceramic outer cylinder is eight, electrode 11 ~ electrode 18 is followed successively by by clock-wise order, described electrode 11 and 15 is A1 exciting group, and electrode 13 and 17 is A2 exciting group, A1 and A2 exciting group forms A exciting group; Electrode 12 and 16 is B1 exciting group, and electrode 14 and 18 is B2 exciting group, B1 and B2 exciting group forms B exciting group; A pair high-frequency AC excitation signal that described A exciting group and B exciting group are connected is two, and frequency is identical, voltage magnitude is identical, but the supersonic frequency signal of telecommunication that phase place is different.
5. piezo-electric motor as claimed in claim 4, it is characterized in that, the phase difference of described a pair high-frequency AC excitation signal is
6. piezo-electric motor as claimed in claim 1, it is characterized in that, described piezoelectric ceramic outer cylinder and elastomer inner cylinder are by gluing or cold welding technique consolidation.
7. piezo-electric motor as claimed in claim 1, it is characterized in that, the elastomeric material of described stators and rotators is titanium alloy, copper alloy, steel alloy, aluminium alloy or high strength elastic high molecular polymer; Described high strength elastic high molecular polymer is polyamide, Merlon, polyformaldehyde, polyphenylene oxide or polyether-ether-ketone.
8. piezo-electric motor as claimed in claim 1, it is characterized in that, the piezoelectric ceramic of described piezoelectric ceramic outer cylinder is lead zirconate titanate series ceramic or leadless piezoelectric ceramics.
9. piezo-electric motor as claimed in claim 8, it is characterized in that, described leadless piezoelectric ceramics comprises barium titanate-based lead-free piezoelectric ceramic, bismuth-sodium titanate base lead-free piezoelectric ceramic and alkali metal potassium niobate sodium-based leadless piezoelectric ceramic.
10. piezo-electric motor as claimed in claim 1, is characterized in that, the hollow space of described rotor is used for the fixing element needing to drive.
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| CN201510002335.1A CN104506081B (en) | 2015-01-05 | 2015-01-05 | Cylindrical piezoelectric motor capable of generating spiral linear movement |
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| CN201510002335.1A CN104506081B (en) | 2015-01-05 | 2015-01-05 | Cylindrical piezoelectric motor capable of generating spiral linear movement |
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| CN104506081B CN104506081B (en) | 2017-02-22 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106089715A (en) * | 2016-08-25 | 2016-11-09 | 深圳沃海森科技有限公司 | Ultrasound wave frequency converting air-conditioner compressor |
| CN106391435A (en) * | 2016-10-19 | 2017-02-15 | 杭州电子科技大学 | Device for realizing particle suspension and rotation |
| CN111312027A (en) * | 2018-12-11 | 2020-06-19 | 北京纳米能源与系统研究所 | Micro motor, driver and braille display based on polylactic acid piezoelectric film |
| CN111911126A (en) * | 2020-09-07 | 2020-11-10 | 中国石油天然气集团有限公司 | Setting bridge plug for repeated fracturing and repeated fracturing construction method of oil and gas field well |
| CN112706822A (en) * | 2019-10-25 | 2021-04-27 | 比亚迪股份有限公司 | Steering system and vehicle |
| US11043907B2 (en) | 2018-11-27 | 2021-06-22 | Industrial Technology Research Institute | Ultrasonic linear actuation device utilizing standing wave oscillations for actuation |
| CN113630037A (en) * | 2021-08-13 | 2021-11-09 | 中国工程物理研究院机械制造工艺研究所 | Device and method for improving motion resolution of standing wave type piezoelectric motor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1767347A (en) * | 2005-11-18 | 2006-05-03 | 清华大学 | Screw thread driven polyhedron ultrasonic motor |
| TW200847607A (en) * | 2007-04-03 | 2008-12-01 | Shu-Xiang Dong | Miniature piezoelectric motor and method of driving elements using same |
| CN101420190A (en) * | 2007-10-26 | 2009-04-29 | 博立码杰通讯(深圳)有限公司 | Ultrasonic motor driving method |
| DE102010022812A1 (en) * | 2010-06-05 | 2011-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasonic motor, has element to be driven and contact element, which are in threaded engagement, and ultrasound actuator surrounding contact element on outer circumferential surface completely |
| CN103227279A (en) * | 2012-01-31 | 2013-07-31 | 三星电子株式会社 | Slip-stick piezoelectric actuator |
-
2015
- 2015-01-05 CN CN201510002335.1A patent/CN104506081B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1767347A (en) * | 2005-11-18 | 2006-05-03 | 清华大学 | Screw thread driven polyhedron ultrasonic motor |
| TW200847607A (en) * | 2007-04-03 | 2008-12-01 | Shu-Xiang Dong | Miniature piezoelectric motor and method of driving elements using same |
| CN101420190A (en) * | 2007-10-26 | 2009-04-29 | 博立码杰通讯(深圳)有限公司 | Ultrasonic motor driving method |
| DE102010022812A1 (en) * | 2010-06-05 | 2011-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasonic motor, has element to be driven and contact element, which are in threaded engagement, and ultrasound actuator surrounding contact element on outer circumferential surface completely |
| CN103227279A (en) * | 2012-01-31 | 2013-07-31 | 三星电子株式会社 | Slip-stick piezoelectric actuator |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106089715A (en) * | 2016-08-25 | 2016-11-09 | 深圳沃海森科技有限公司 | Ultrasound wave frequency converting air-conditioner compressor |
| CN106391435A (en) * | 2016-10-19 | 2017-02-15 | 杭州电子科技大学 | Device for realizing particle suspension and rotation |
| CN106391435B (en) * | 2016-10-19 | 2019-06-21 | 杭州电子科技大学 | A kind of device for realizing particle suspension and rotation |
| US11043907B2 (en) | 2018-11-27 | 2021-06-22 | Industrial Technology Research Institute | Ultrasonic linear actuation device utilizing standing wave oscillations for actuation |
| CN111312027A (en) * | 2018-12-11 | 2020-06-19 | 北京纳米能源与系统研究所 | Micro motor, driver and braille display based on polylactic acid piezoelectric film |
| CN112706822A (en) * | 2019-10-25 | 2021-04-27 | 比亚迪股份有限公司 | Steering system and vehicle |
| CN111911126A (en) * | 2020-09-07 | 2020-11-10 | 中国石油天然气集团有限公司 | Setting bridge plug for repeated fracturing and repeated fracturing construction method of oil and gas field well |
| CN113630037A (en) * | 2021-08-13 | 2021-11-09 | 中国工程物理研究院机械制造工艺研究所 | Device and method for improving motion resolution of standing wave type piezoelectric motor |
| CN113630037B (en) * | 2021-08-13 | 2023-07-25 | 中国工程物理研究院机械制造工艺研究所 | Motion resolution improving device and method for standing wave type piezoelectric motor |
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