CN107306096A - Pipe screw-type piezoelectric actuator - Google Patents
Pipe screw-type piezoelectric actuator Download PDFInfo
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- CN107306096A CN107306096A CN201610258566.3A CN201610258566A CN107306096A CN 107306096 A CN107306096 A CN 107306096A CN 201610258566 A CN201610258566 A CN 201610258566A CN 107306096 A CN107306096 A CN 107306096A
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- 239000000919 ceramic Substances 0.000 claims abstract description 92
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
Abstract
The invention discloses a kind of pipe screw-type piezoelectric actuator, belong to piezoelectric actuator, piezoelectric motor, piezoelectricity applied technical field, the pipe screw-type piezoelectric actuator includes stator and mover, and the mover is stud, the stator is tubular type piezoelectric ceramics, wherein:The outer surface of the tubular type piezoelectric ceramics and inner surface have positive electrode and negative electrode respectively, the positive electrode of the tubular type piezoelectric ceramics is in axial direction divided into two parts, circumference of the part along the tubular type piezoelectric ceramics, which is divided equally, first to fourth subregion, circumference of the another part along the tubular type piezoelectric ceramics, which is divided equally, has the 5th to octant, and first to fourth subregion is corresponded with the described 5th to octant position.Compared with prior art, the present invention has that driving power big, stable work in work, rigging error be small, design is easy and the characteristics of beneficial to minimizing.
Description
Technical field
The present invention relates to piezoelectric actuator, piezoelectric motor, piezoelectricity applied technical field, one is particularly related to
Plant pipe screw-type piezoelectric actuator.
Background technology
Piezoelectric actuator is the inverse piezoelectric effect using piezoelectric, excites elastomer to produce supersonic range
Micro breadth oscillation, force the particle of contact surface to produce the motion of similar elliptical orbit, and pass through fixed and moving son
Between friction convert thereof into rotation or the linear motion of mover.Piezoelectric actuator has structure type
Various, positional precision is high, inertia is small, low noise is run, response is fast, cuts off self-lock, produce magnetic
Field also not by electromagnetic interference the advantages of.Due to having many advantages, such as the above, piezoelectric actuator industry from
The fields such as dynamicization, Aero-Space, medical treatment, bioengineering have obtained substantial amounts of application, and have played huge
Big effect.Compared with the piezoelectric actuator of other species, screw-type linear piezoelectric actuator is one
Plant to deform using piezoceramic bending drives the mode being combined to produce straight-line displacement with thread friction
A kind of piezoelectric actuator.Due to the particularity of its structure, it has the Some features of oneself:1. pass through
Frictional force drives between multigroup screw thread;2. space rate is low;3. it can reach the stepping fortune of submicron order
It is dynamic;4. accurately cut off self-lock performance;5. it is easy to implement miniaturization.
Driving surface between the stator and mover of screw-type piezoelectric actuator is flank, can be direct
Be linear motion by the convert rotational motion of mover, and need during conventional threads are driven to overcome along spiral shell
The frictional force of streakline is changed into driving force, with power amplification, and improves the efficiency of system.
The technical scheme of prior art
New Scale companies of the U.S. proposed a kind of based on piezoelectric ceramics and screw drive skill in 2005
The linear pattern driver of art.As shown in figure 1, the driver is by matrix 14, piezoelectric ceramic piece
18/20/22/24th, the critical piece such as nut 16, screw rod 12 is constituted, and four piezoelectric ceramic pieces are bonded in
In four planes processed on its matrix, nut is bonded on matrix, screw rod and nut phase interworking
Close.The operation principle of the driver, as shown in Fig. 2 being powered up respectively to piezoelectric ceramic piece, can cause
The overall generation first-order bending vibration that piezoelectric ceramics is constituted with matrix, the first-order bending vibration can drive
Nut carries out the micro-swinging of similar " Ho La hoop " formula, and the micro-swinging passes through nut and the spiral shell of screw rod
Mutual frictional force drives screw rod between line rotates in nut, so that the circular motion that screw rod is rotated
The linear motion of screw rod is converted to, the linear motion, which can be promoted, needs the mechanism for producing linear motion to carry out
Linear motion.
The shortcoming of prior art:
1. use the first-order bending vibration of oscillator in the prior art, the resonant frequency of first-order bending vibration compared with
Low, power output that this directly results in first-order bending vibration is small, and (power proportional shakes in the quadratic sum of frequency
Width), final result causes the power output of driver smaller, reduces the application of driver;
2. the vibration node line position of first-order bending vibration is difficult to determine, the quasi-driver needs when in use
Fixed clamp, the clip position without influenceing its work is the nodel line position of vibration.Single order in the structure
The influence that the nodel line position of flexural vibrations is subject to processing precision, assembly precision, electric signal precision etc. is larger,
Nodel line position when often nodel line position is not design in practical application, this directly results in drive
The efficiency reduction of dynamic device, driver will be unable to work when serious, and service behaviour is unstable;
3. screw-type piezoelectric actuator of the prior art is when being designed, generally require using limited
The method of member is calculated, and verifies the reasonability of design, the size of optimization design.Carrying out finite element
During computer sim- ulation, due to structural factor, it is necessary to neglect such as glue-line, internal stress, bonding uniformity
Problem, causes analysis result to differ larger with actual, increases the rigging error of driver.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of driving power is big, stable work in work, dress
With error is small, design is easy and beneficial to the pipe screw-type piezoelectric actuator of miniaturization.
In order to solve the above technical problems, present invention offer technical scheme is as follows:
A kind of pipe screw-type piezoelectric actuator, including stator and mover, the end of the stator are set
Have a nut, the mover is stud, the stud be located in the middle of the stator and with the nut shape
Into screw thread pair connection, the stator is tubular type piezoelectric ceramics, wherein:
The outer surface of the tubular type piezoelectric ceramics and inner surface have positive electrode and negative electrode, institute respectively
The positive electrode for stating tubular type piezoelectric ceramics is in axial direction divided into two parts, a part of along the tubular type
The circumference of piezoelectric ceramics, which is divided equally, first to fourth subregion, and another part is along the tubular type piezoelectric ceramics
Circumference divide equally and have the 5th to octant, first to fourth subregion with the described 5th to the 8th point
Zone position is corresponded.
Further, the polarised direction of each subregion of the tubular type piezoelectric ceramics is identical or any phase
The polarised direction of adjacent two subregions is opposite.
Further, positive electrode access U=Acos (wt) voltage letter of first subregion and the 7th subregion
Number, positive electrode access U=-Acos (wt) voltage signal of the 3rd subregion and the 5th subregion is described
Positive electrode access U=-Asin (wt) voltage signal of second subregion and octant, the 4th subregion
U=Asin (wt) voltage signal is accessed with the positive electrode of the 6th subregion.
Further, the tubular type piezoelectric ceramics is individual layer tubular type piezoelectric ceramics or multi-layer tube
Type piezoelectric ceramics.
Further, the tubular type piezoelectric ceramics is processed into using the technique of integral forming.
Further, the form of thread of the nut and stud is triangle thread, trapezoidal thread, square
Shape screw thread, circular thread.
Further, the two ends of the tubular type piezoelectric ceramics are provided with a nut.
Further, the nut is bonded in the end of the tubular type piezoelectric ceramics by epoxide-resin glue
Portion.
Further, the nut is convex.
Further, the stud is provided at both ends with hemispheric contact.
The invention has the advantages that:
In the present invention, a kind of pipe spiral shell coupled using two orthogonal second order bending vibration modes is proposed
Line type piezoelectric actuator, with using what two orthogonal single order bending vibration modes were coupled in the prior art
Driver is compared, and the vibration frequency of the stator of driver within the unit interval is improved, so as to improve drive
The driving power of dynamic device;
Also, the present invention is driven using the tubular type piezoelectric ceramics of octant radial polarised to driver
It is dynamic, make the nodel line position of tubular type piezoelectric ceramics at the middle part of tubular type piezoelectric ceramics axial direction, so,
Nodel line position is not influenceed by assembly precision, in practical application, very convenient to the clamping of driver
It is easy, it is not easy to which that the vibration on driver produces influence so that the stable work in work of driver;
Meanwhile, stator is tubular type piezoelectric ceramics in the present invention, and structure design is simple, due to tubular type
The design feature of piezoelectric ceramics is, it is necessary to which the factor ignored is less, and the result of analysis is consistent with actual conditions
Property can be relatively good, reduces rigging error.In addition, the driver of the present invention is not due to being related to mode letter
And problem, the further miniaturization of driver is easily achieved in theory.
To sum up, compared with prior art, the present invention has that driving power is big, stable work in work, dress
With error is small, design is easy and the characteristics of beneficial to miniaturization.
Brief description of the drawings
Fig. 1 is the structural representation of thread driver of the prior art;
Fig. 2 is the operation principle schematic diagram of thread driver of the prior art;
Fig. 3 is the stereogram of the pipe screw-type piezoelectric actuator of the present invention;
Fig. 4 is the section view of the pipe screw-type piezoelectric actuator of the present invention;
Fig. 5 is the power-up mode of the pipe screw-type piezoelectric actuator of the present invention;
Corresponding electric signal is bent in power-up modes of the Fig. 6 for the pipe screw-type piezoelectric actuator of the present invention
Line;
Deformation schematic diagrames of the Fig. 7 for pipe screw-type piezoelectric actuator of the invention along 52 direction views;
Deformation schematic diagrames of the Fig. 8 for pipe screw-type piezoelectric actuator of the invention along 51 direction views.
Embodiment
, below will knot to make the technical problem to be solved in the present invention, technical scheme and advantage clearer
Drawings and the specific embodiments are closed to be described in detail.
The present invention provides a kind of pipe screw-type piezoelectric actuator, as shown in figure 3, including stator and moving
Son, the end of stator is provided with nut 2, and mover is stud 3, and stud 3 is located in the middle of stator simultaneously
It is connected with the formation screw thread pair of nut 2, stator is tubular type piezoelectric ceramics 1, wherein:
The outer surface of tubular type piezoelectric ceramics 1 and inner surface have positive electrode and negative electrode, pipe respectively
The positive electrode of type piezoelectric ceramics 1 is in axial direction divided into two parts, a part of along tubular type piezoelectric ceramics
1 circumference, which is divided equally, first to fourth subregion, and circumference of the another part along tubular type piezoelectric ceramics 1 is
Point have the 5th to octant, first to fourth subregion and the 5th to octant position one-to-one corresponding.
In the present invention, a kind of pipe spiral shell coupled using two orthogonal second order bending vibration modes is proposed
Line type piezoelectric actuator, with using what two orthogonal single order bending vibration modes were coupled in the prior art
Driver is compared, and the vibration frequency of the stator of driver within the unit interval is improved, so as to improve drive
The driving power of dynamic device;
Also, the present invention is carried out using the tubular type piezoelectric ceramics 1 of octant radial polarised to driver
Driving, makes the nodel line position of tubular type piezoelectric ceramics 1 at the middle part of the axial direction of tubular type piezoelectric ceramics 1,
So, nodel line position is not influenceed by assembly precision, in practical application, non-to the clamping of driver
It is often convenient and easy, it is not easy to which that the vibration on driver produces influence so that the service behaviour of driver is steady
It is fixed;
Meanwhile, stator is tubular type piezoelectric ceramics 1 in the present invention, and structure design is simple, due to pipe
The design feature of type piezoelectric ceramics 1 is, it is necessary to the factor ignored is less, the result and actual conditions of analysis
Uniformity can be relatively good, reduces rigging error.In addition, the driver of the present invention is not due to being related to mould
State degeneracy problem, is easily achieved the further miniaturization of driver in theory.
To sum up, compared with prior art, the present invention has that driving power is big, stable work in work, dress
With error is small, design is easy and the characteristics of beneficial to miniaturization.
As a modification of the present invention, the polarised direction of each subregion of tubular type piezoelectric ceramics 1 is identical
Or the polarised direction of two subregions of arbitrary neighborhood is opposite.In the present invention, no matter using both polarization
Direction it is any, corresponding voltage signal can be applied according to the polarised direction of each subregion, to protect
Two bottom surfaces for demonstrate,proving piezoelectric ceramics form elliptic motion, so as to drive stud 3 to produce rotary motion.
As another improvement of the present invention, the positive electrode access of the first subregion and the 7th subregion
Positive electrode access U=-Acos (wt) electricity of U=Acos (wt) voltage signal, the 3rd subregion and the 5th subregion
Press positive electrode access U=-Asin (wt) voltage signal of signal, the second subregion and octant, the 4th
Positive electrode access U=Asin (wt) voltage signal of subregion and the 6th subregion, wherein, above-mentioned voltage signal
In A be amplitude, w is angular frequency.It is above-mentioned that the positive electrode of each subregion of the present invention is not limited only to access
Sine voltage signal, corresponding voltage-sawtooth signal, or art technology can also be accessed
Other voltage signals known to personnel can also realize the technique effect of the present invention, wherein, apply voltage
The frequency of signal assembled close to tubular type piezoelectric ceramics 1 and nut 2 after second order bending vibration modes frequency.
In the present invention, it can be individual layer tubular type piezoelectric ceramics 1 or many that tubular type piezoelectric ceramics 1, which is,
Layer tubular type piezoelectric ceramics 1.Wherein, individual layer tubular type piezoelectric ceramics 1, which has, makes simple, manufacture
The characteristics of cycle is short;And multi-layer tube type piezoelectric ceramics 1 has what low-voltage driving, high pulling torque were exported
Feature.Two kinds of tubular type piezoelectric ceramics 1 are applied to the pipe screw-type piezoelectric actuator of the present invention.
In order to simplify the installation procedure of pipe screw-type piezoelectric actuator, and further reduce assembling mistake
Difference, tubular type piezoelectric ceramics 1 can be processed into using the technique of integral forming.
Specifically, the form of thread of nut 2 and stud 3 can for triangle thread, trapezoidal thread,
Rectangular thread or circular thread, can also be using well known to a person skilled in the art other form of threads.
As a modification of the present invention, as shown in figure 1, the two ends of tubular type piezoelectric ceramics 1
To be provided with a nut 2.In the present invention, the nut 2 at the two ends of tubular type piezoelectric ceramics 1 can be same
When produce friction with stud 3, and then improve to the driving force of stud 3.
In order to improve the fastness that nut 2 is connected with tubular type piezoelectric ceramics 1, nut 2 can pass through
Epoxide-resin glue is bonded in the end of tubular type piezoelectric ceramics 1.
It is preferred that, as shown in figure 4, nut 2 can be convex.Increase nut 2 and stud 3
Frictional contact surface, so as to improve the stability that tubular type piezoelectric ceramics 1 drives to stud 3.
In the present invention, as shown in Figure 3-4, the two ends of stud 3 can be provided with hemispheric contact.
The contact is used to contact with the part for needing driver to be driven.In actual use, stud 3
Contact can typically be contacted with an outside mover, and the mover can apply a certain size edge to stud 3
The axial of stud 3 to preload, and pipe screw-type piezoelectric actuator can promote mover to carry out directly
Line is moved.
Below, the present invention provides a complete embodiment with reference to accompanying drawing:
The structure of pipe screw-type piezoelectric actuator, as shown in figure 3, including octant radial polarised circle
Cast piezoelectric ceramics 1, nut 2, stud 3.The tubular type piezoelectric ceramics 1 of octant radial polarised
Bonded together by epoxide-resin glue with two identical nuts 2, stud 3 and the formation spiral shell of nut 2
Line pair connection.
The cross section structure of pipe screw-type piezoelectric actuator, as shown in figure 4, nut 2 is designed to type
Type, the two ends of stud 3 are machined with hemispheric contact, and the contact is used for needing driver to be driven
Dynamic part contact.
The tubular type piezoelectric ceramics 1 of pipe screw-type piezoelectric actuator is the pipe of octant radial polarised
Type piezoelectric ceramics 1, i.e.,:1. tubular type piezoelectric ceramics 1 is processed into using the technique of integral forming
Integrated pipe;2. uniform 8 identical high temperature silver on the excircle of tubular type piezoelectric ceramics 1
Tubular type piezoelectric ceramics 1 is divided into 8 pieces by electrode district, this eight silver electrode areas;3. in tubular type piezoelectricity
A complete electrode is brushed with the inner periphery of ceramics 1;4. the polarization side of the tubular type piezoelectric ceramics 1
To the radial direction for tubular type piezoelectric ceramics 1.
The nut 2 of pipe screw-type piezoelectric actuator and the form of thread of stud 3 can be triangle spiral shells
Any of line, trapezoidal thread, rectangular thread or circular thread.
The operation principle of the pipe screw-type piezoelectric actuator of above-described embodiment:
Voltage signal is applied to tubular type piezoelectric ceramics 1 according to the power-up mode shown in Fig. 5, wherein 41,
42nd, 43,44 four kinds of voltage signals, its waveform are represented respectively as shown in fig. 6, being respectively
U=Acos (ω t), U=-Acos (ω t), U=-Asin (ω t), U=Asin (ω t).Wherein, external electrode subregion
14 and 16 are connected with voltage signal 41, and external electrode subregion 12 and 18 is connected with voltage signal 42,
External electrode subregion 13 and 15 is connected with voltage signal 43, and external electrode subregion 11 and 17 is believed with voltage
Numbers 44 are connected.In the zero moment, i.e. t=0 of the voltage curve shown in Fig. 4, octant radial direction pole
The tubular type piezoelectric ceramics 1 of change is deformed as shown in fig. 7, Fig. 7 is tubular type piezoelectric ceramics 1 from 52
The view that direction is looked, the piezoelectric ceramics where dispatch from foreign news agency polar region 12,18 produces contraction distortion, dispatch from foreign news agency
Piezoelectric ceramics where polar region 14,16 produces elongation strain, and finally, tubular type piezoelectric ceramics 1 is produced
Raw deformation as shown in Figure 7, when drive voltage signal frequency is close to the second order of tubular type piezoelectric ceramics 1
During bending vibration modes frequency, tubular type piezoelectric ceramics 1 inspires the second order bending vibration modes in a direction;
The t=T/4 moment of voltage curve shown in Fig. 6, the tubular type piezoelectric ceramics 1 of octant radial polarised
Deformation is as shown in figure 8, Fig. 8 is view of the tubular type piezoelectric ceramics 1 as viewed from 51 directions, dispatch from foreign news agency
Piezoelectric ceramics where polar region 13,15 produces contraction distortion, the piezoelectricity where dispatch from foreign news agency polar region 11,17
Ceramics produce elongation strain, and final tubular type piezoelectric ceramics 1 produces deformation as shown in Figure 8, works as drive
Dynamic voltage signal frequency close to tubular type piezoelectric ceramics 1 second order bending vibration modes frequency when, tubular type pressure
Electroceramics swashs the 1 second order bending vibration modes for sending another direction;The two second order bending vibration modes vibration shapes exist
Spatially it is mutually perpendicular to, two above-mentioned characteristic frequencies are equal, due to two shown in Fig. 7 and Fig. 8
The driving voltage of second order bending vibration modes differs 90 degree, i.e. 1/4 cycle in phase, so ought press simultaneously
Apply according to the voltage signal curve shown in Fig. 6 after voltage signal, at two of tubular type piezoelectric ceramics 1
Bottom surface can form elliptic motion, such as in 61 and 62 two points shown in Fig. 7 and Fig. 8, this two
The elliptical vibration track that two phase differences are 90 degree can be formed on individual point, this elliptical vibration track is same
Sample can also be formed on the screw thread of nut 2.Screw thread on nut 2 and the screw thread phase mutual connection on stud 3
Touch, formed on the screw thread of nut 2 behind elliptical vibration track, can produce and rub with the screw thread on stud 3
Wipe, the frictional force drives stud of generation produces rotation, therefore is formed at the contact at the two ends of stud 3
Along the axial linear motion macroscopically of stud 3.In actual use, the contact one of stud 3
As can be in contact with a mover, the mover can apply to stud 3 a certain size along stud 3
Axial preloads, and thread driver can promote mover to be moved along a straight line.
Above-mentioned, specific embodiment brings following beneficial effect:
1. driving power is big:A kind of two orthogonal second orders based on class cantilever beam are proposed in the present invention
The screw-type piezoelectric actuator that bending vibration modes are coupled, with using two orthogonal one in the prior art
The driver that rank bending vibration modes are coupled is compared, the vibration frequency of the stator of driver within the unit interval
Rate is improved, so as to improve the driving power of driver;
2. stable work in work:A kind of octant radial polarised piezoelectric ceramic circular tube is proposed in the present invention
Type thread driver, the nodel line position of the driver is at the middle part of piezoelectric ceramic circular tube axial direction, and nodel line
Position is not influenceed by assembly precision, in practical application, it is very convenient easy to the clamping of driver,
It is not easy the vibration on driver and produces influence so that the stable work in work of driver;
3. rigging error is small, simplify design and beneficial to miniaturization:The screw-type piezoelectricity of prior art drives
Dynamic device is generally required to be calculated using the method for finite element, verifies the conjunction of design when being designed
Rationality, the size of optimization design.Carry out FEM calculation emulation when, due to structural factor, it is necessary to
Neglect such as glue-line, internal stress, bonding uniformity the problems such as, cause analysis result with actually differ compared with
Greatly.Stator is tubular type piezoelectric ceramics in the present invention, and structure design is simple, due to tubular type piezoelectricity pottery
The design feature of porcelain is, it is necessary to which the factor ignored is less, and the result and actual conditions uniformity of analysis can compare
Preferably, rigging error is reduced.In addition, the driver of the present invention is not due to being related to modal matching problem,
The further miniaturization of driver is easily achieved in theory.
Described above is the preferred embodiment of the present invention, it is noted that for the general of the art
For logical technical staff, on the premise of principle of the present invention is not departed from, some change can also be made
Enter and retouch, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of pipe screw-type piezoelectric actuator, including stator and mover, the end of the stator
Be provided with nut, the mover is stud, the stud be located in the middle of the stator and with the spiral shell
Mother forms screw thread pair connection, it is characterised in that the stator is tubular type piezoelectric ceramics, wherein:
The outer surface of the tubular type piezoelectric ceramics and inner surface have positive electrode and negative electrode, institute respectively
The positive electrode for stating tubular type piezoelectric ceramics is in axial direction divided into two parts, a part of along the tubular type
The circumference of piezoelectric ceramics, which is divided equally, first to fourth subregion, and another part is along the tubular type piezoelectric ceramics
Circumference divide equally and have the 5th to octant, first to fourth subregion with the described 5th to the 8th point
Zone position is corresponded.
2. pipe screw-type piezoelectric actuator according to claim 1, it is characterised in that institute
State each subregion of tubular type piezoelectric ceramics polarised direction is identical or pole of two subregions of arbitrary neighborhood
Change in opposite direction.
3. pipe screw-type piezoelectric actuator according to claim 1, it is characterised in that institute
State positive electrode access U=Acos (wt) voltage signal of the first subregion and the 7th subregion, the 3rd subregion
U=-Acos (wt) voltage signal is accessed with the positive electrode of the 5th subregion, second subregion and the 8th point
Positive electrode access U=-Asin (wt) voltage signal in area, the positive electricity of the 4th subregion and the 6th subregion
U=Asin (wt) voltage signal is accessed in pole.
4. pipe screw-type piezoelectric actuator according to claim 1, it is characterised in that institute
Tubular type piezoelectric ceramics is stated for individual layer tubular type piezoelectric ceramics or multi-layer tube type piezoelectric ceramics.
5. pipe screw-type piezoelectric actuator according to claim 1, it is characterised in that institute
Tubular type piezoelectric ceramics is stated to be processed into using the technique of integral forming.
6. according to any described pipe screw-type piezoelectric actuator, its feature in claim 1-5
Be, the form of thread of the nut and stud is triangle thread, trapezoidal thread, rectangular thread,
Circular thread.
7. pipe screw-type piezoelectric actuator according to claim 6, it is characterised in that institute
The two ends for stating tubular type piezoelectric ceramics are provided with a nut.
8. pipe screw-type piezoelectric actuator according to claim 7, it is characterised in that institute
State the end that nut is bonded in the tubular type piezoelectric ceramics by epoxide-resin glue.
9. pipe screw-type piezoelectric actuator according to claim 8, it is characterised in that institute
Nut is stated for convex.
10. pipe screw-type piezoelectric actuator according to claim 9, it is characterised in that institute
That states stud is provided at both ends with hemispheric contact.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107984299A (en) * | 2017-12-06 | 2018-05-04 | 上海理工大学 | Adaptive Precision Machining automatic tool setting system and method |
CN108547768A (en) * | 2018-05-21 | 2018-09-18 | 南京航空航天大学 | A kind of novel piezoelectric screw pump and its working method |
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US20050052094A1 (en) * | 2003-09-08 | 2005-03-10 | Henderson David A. | Ultrasonic lead screw motor |
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CN108547768A (en) * | 2018-05-21 | 2018-09-18 | 南京航空航天大学 | A kind of novel piezoelectric screw pump and its working method |
CN108547768B (en) * | 2018-05-21 | 2023-08-01 | 南京航空航天大学 | Piezoelectric screw pump and working method thereof |
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