CN100384076C - Piezoelectric square column flexural vibrating ultrasound micromotor - Google Patents
Piezoelectric square column flexural vibrating ultrasound micromotor Download PDFInfo
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- CN100384076C CN100384076C CNB2004100911307A CN200410091130A CN100384076C CN 100384076 C CN100384076 C CN 100384076C CN B2004100911307 A CNB2004100911307 A CN B2004100911307A CN 200410091130 A CN200410091130 A CN 200410091130A CN 100384076 C CN100384076 C CN 100384076C
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Abstract
The present invention relates to a bending vibration mode ultrasonic micromotor based on a piezoelectric square column, which belongs to the field of ultrasonic application. The micromotor is composed of a stator exciting ultrasonic for vibration, a rotor outputting torque or a shaft connected with the rotor and a forepressure mechanism pressurizing the rotor. The stator is mainly composed of a piezoelectric ceramic element exciting vibration and a matching block, which is characterized in that the piezoelectric ceramic element exciting bending vibration is a piezoelectric square column; the surfaces of four outer walls of the piezoelectric square column are smeared with four outer electrodes for polarization and vibration excitation. The processed size range for elements of the motor of the present invention is wide and can be as small as 0.1mm, which promotes the miniaturization of an ultrasonic micromotor greatly. When the peak-peak value of an input electrical signal is about 3 to 6V, the rotor can rotate obviously on the surface of the stator. The present invention has the wide application prospect of biology, medical treatment, micro machinery, precise electronic machinery, defense science and technology, etc.
Description
Technical field
The invention belongs to the applications of ultrasound field, particularly a kind of ultrasound micro-motor structural design of microminiaturization.
Background technology
Piezoelectric ultrasonic micro motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of functional parts such as stator, rotor and pre-pressure mechanisms.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by the frictional force drives rotor motion between stator and the rotor.Ultrasound micro-motor has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load.
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine.
3, starting stops response soon, and the response time is less than 1 millisecond.
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet.
5, self-sustaining moment is arranged, gearless gap, but precision positioning.
6, move quiet noiseless.
The flexural vibration mode ultrasound micro-motor is a kind of of ultrasound micro-motor, other ultrasound micro-motor is fairly simple relatively for its structure, same mainly by the stator that encourages ultrasonic vibration, rotor of output torque (or axle) and the compositions such as pre-pressure mechanism that pressurize to rotor, said stator mainly is made of the piezo ceramic element and the match block of excited vibration again.The flexural vibration mode ultrasound micro-motor is divided into piezoelectric patches drive motors, piezo tube drive motors according to the mode of the crooked yawing of excitation and the shape of piezo ceramic element again simultaneously.Their transmission principle is all identical with driving mechanism, as shown in Figure 1.Stator is in the mode of oscillation that circumference is shaken the head, one very little gap is arranged between stator 11 and the ring-type rotor 12, the curved edges motion of shaking the head in stator limit during transmission, therefore the point of contact contact is arranged between the stator and rotor, its contact point moves on the circumferential periphery of stator, and the frictional force between stator and rotor makes rotor rotate along the direction opposite with the contact point moving direction.
Existing two kinds of crooked yawing modes of excitation such as Fig. 2 and shown in Figure 4:
Fig. 2 is the schematic diagram that existing piezoelectric patches encourages crooked yawing, and used piezo ceramic element is 4 piezoelectric patches.On same piezoelectric patches, divide the two halves opposite polarization with diameter symmetry, two piezoelectric patches 22 spatial vertical of two piezoelectric patches 21 of logical A phase current and logical B phase current are arranged, two-phase all adopts ten thousand bright sandwich structures to form stator, A imports sin ω t signal mutually simultaneously, B imports cos ω t signal mutually, adopts each 90 degree phase difference of time and space to encourage flexural vibrations like this; The flexural vibration mode ultrasound micro-motor structure of this piezoelectric patches excitation as shown in Figure 3, match block 36,38 clamps the common stator that constitutes motor in 4 piezoelectric ceramic pieces, 37 backs up and down, place the rotor 35 on the stator to be hollow-core construction, there is the spring 34 that applies precompression its hollow part, moment is by gear 33 outputs, and 32 is the polytetrafluoroethylene cover, plays bearing, 31 is packing ring, and 39 is main shaft.
Fig. 4 is the schematic diagram that existing piezo tube encourages crooked yawing, and used piezo ceramic element is a piezo tube.Piezo tube is evenly polarized to inwall by outer wall, its inwall electrode grounding in use, and outer wall scribbles four equally distributed external electrodes 45, feeds sin ω t, cos ω t ,-sin ω t ,-cos ω t signal excitation 41,42,43 and 44 4 on extremely successively.The flexural vibration mode ultrasound micro-motor structure of this piezo tube excitation as shown in Figure 5, two metal caps of 51 liang of terminations of piezo tube 52 constitute motor stators, rotor 53 usefulness the nuts 55 at two ends and spring 54 are screwed on spools 56.
The main advantage of above-mentioned two kinds of flexural vibration mode ultrasound micro-motors is easy to realize microminiaturization and industrialization exactly.The ultrasound micro-motor of the minimum of up to the present doing is that the diameter of Tsing-Hua University is the head-shaking motor of 1mm, and this motor comes the flexural vibrations of exciting electric with the piezoelectric ceramic cylinder.Because the former piezoelectric patches will be considered internal diameter, so want relatively difficulty of further miniaturization; Though it is very thin that latter's cylindrical piezoelectric electrical micro-machine can be done, because electrode surface is curved, the polarization process difficulty.
The objective of the invention is to propose a kind of piezoelectric square column ultrasound micro-motor, be characterized in the piezoelectric square column being the piezoelectric element of excitation flexural vibrations for overcoming the weak point of prior art on microminiaturized direction.It does not need to consider internal diameter, and that can do is very little; Electrode surface is the plane, and polarization is operation easily.Its electrical micro-machine diameter can reach about 0.3mm, the application of ultrasound micro-motor can be pushed to a new stage.
A kind of flexural vibration mode ultrasound micro-motor that the present invention proposes based on piezoelectric square column, by the stator of excitation ultrasonic vibration, form with the contacted rotor of stator and to the pre-pressure mechanism of rotor pressurization, said stator mainly is made of the piezo ceramic element and the match block of excited vibration, it is characterized in that, the piezo ceramic element of said excitation flexural vibrations is a piezoelectric square column, and four outer wall surface of this piezoelectric square column scribble for polarization and four used electrodes especially of excited vibration; On external electrode, apply the excitation signal of telecommunication, make stator produce crooked yawing; The vibration of stator is by the friction-driven rotor rotation, by rotor or the axle output torque that links to each other with rotor.
Characteristics of the present invention and effect:
The machinable 0.1mm that is of a size of of ultrasound micro-motor of the present invention's design has promoted the microminiaturization of ultrasound micro-motor greatly between the 6mm.When the about 3-6V of input electrical signal peak-to-peak value, rotor can obviously rotate on stator surface.The present invention will have wide application prospect at aspects such as biology, medical treatment, micromechanics, science and techniques of defence.
Description of drawings
Fig. 1 is the transmission principle schematic diagram of flexural vibration mode ultrasound micro-motor.
Fig. 2 is for encouraging the principle schematic of crooked yawing by piezoelectric patches.
Fig. 3 encourages the structural representation of crooked head-shaking motor for existing piezoelectric patches.
Fig. 4 is for encouraging the principle schematic of crooked yawing by piezo tube.
Fig. 5 encourages the structural representation of crooked head-shaking motor for existing piezo tube.
Fig. 6 is a piezoelectric square column split pole schematic diagram of the present invention.
Fig. 7 is a piezoelectric square column external wall cross-section polarization embodiment schematic diagram of the present invention.
Fig. 8 encourages crooked yawing mode schematic diagram for the piezoelectric square column galvanization of Fig. 7.
Fig. 9 is piezoelectric square column ultrasound micro-motor embodiment one---magnetic force positioning motor structural representation.
Figure 10 is piezoelectric square column ultrasound micro-motor embodiment two---axis of torque output motor structural representation.
Figure 11 is piezoelectric square column ultrasound micro-motor embodiment three---fixed axis electric machine structure schematic diagram.
Figure 12 is piezoelectric square column ultrasound micro-motor embodiment four---shell fastening electric machine structure schematic diagram.
Figure 13 is piezoelectric square column ultrasound micro-motor embodiment five---center protrusion thing top and the bottom drive rotor rotation electric machine structure schematic diagram.
Figure 14 is piezoelectric square column ultrasound micro-motor embodiment six---portion drives rotor rotation electric machine structure schematic diagram about the center protrusion thing.
Embodiment
Piezoelectric square column ultrasound micro-motor of the present invention is described in detail as follows in conjunction with six kinds of each accompanying drawings of example structure:
Six kinds of embodiment of piezoelectric square column ultrasound micro-motor of the present invention are by the stator of excitation ultrasonic vibration, rotor of output torque (or axle) and the pre-pressure mechanism composition that pressurizes to rotor, said stator mainly is made of the piezo ceramic element and the match block of excited vibration.Their common ground is to encourage the piezo ceramic element of stator vibration all identical, is the piezoelectric square column that evenly plates four parts of silver electrodes 61 at lateral surface respectively, as shown in Figure 6.The polarization of each embodiment piezoelectric square column and motivational techniques are by the add high pressure direct current polarization of Fig. 7 (a) mode or Fig. 7 (b) mode, should pottery after the polarization just have the piezoelectric effect of particular orientation.On four parts of electrodes 81,82,83 and 84, add respectively during use sin ω t, cos ω t ,-sin ω t ,-cos ω t four road ac signals such as Fig. 8 (a) or 85, add sin ω t on 87,86, add cos ω t two-way ac signal such as Fig. 8 (b) on 88, then, just can encourage this piezoelectric square column to produce required crooked yawing according to the inverse piezoelectric effect of piezoelectric ceramic.
The difference of six kinds of embodiment mainly is the structure difference of rotor (or axle) and pre-pressure mechanism.
The embodiment of six kinds of structures of the present invention is respectively described below:
Embodiment one is a single-ended head-swinging type ultrasound micro-motor that drives rotor of magnetic force location structure
The main feature of this structure is to do rotor with magnetic steel ball 91, and piezoelectric square column 93 and spill magnetic metal match block 92 usefulness seccotines bonding form one, constitute the stator of motor jointly.Magnetic steel ball rotor is placed in the metal matching blocks concave surface.Like this by the magnetic force between rotor and the metal matching blocks 92 as fixed rotor with produce the required precompression of frictional force, moment is directly exported by rotor, as shown in Figure 9.Can use non magnetic pad to adjust the size of suction between magnet rotor and the magnetic match block.
Embodiment two is a single-ended head-swinging type ultrasound micro-motor that drives rotor of axis of torque export structure
The main feature of this structure is: axle 101 is connected with a protruding dish that straight diameter ratio shaft is big slightly, is used to withstand the little spring 102 that is placed on the axle, and it and axle are one.Except wearing axis hole, also a spill circular hole is respectively arranged in the middle of the stator match block 104 in upper and lower surface.Axle 101 is passed after the match block from top to bottom again that match block 104 and piezoelectric square column 105 is gluing at 107 places, the stators of match block 104 and piezoelectric square column 105 common formation motors like this.Rotor 103 places on the stator match block 104 and engages by key with axle 101.Precompression is provided by little spring 102.Axle can be located with match block 104 left-hand threads of stator like this, and can rotate together with rotor, and moment is directly exported by axle 101.106 places are the frictional interface between stator and the rotor among the figure.As shown in figure 10.
Embodiment three is a single-ended head-swinging type ultrasound micro-motor that drives rotor of fixed axle structure
The main feature of this structure is to process the fixed axis 1130 of a thin rod as motor in the centre of stator match block 113.This axle and stator match block are same metalworks.Piezoelectric square column 114 and match block connect in that 116 places are gluing, jointly as the stator of motor.Rotor 112 is enclosed within on the fixed axis 1130 of stator match block 113, and fixed axis 1130 is connected with a protruding dish that straight diameter ratio shaft is big slightly, is used to withstand the little spring 111 that is placed on the axle, provides precompression by little spring 111.In this motor, the axle 1130 main effects that play are to rotor 112 and pressure little spring 111 location.Moment is directly exported by rotor, the rotor outward flange can be processed into gear during actual the use, by this gear drive output torque.115 places are the frictional interface between stator and the rotor.As shown in figure 11.
Embodiment four is a single-ended head-swinging type ultrasound micro-motor that drives rotor of shell locking strutcture
The main feature of this structure is that rotor 123 places on the stator match block 124, and the centre of rotor 123 is processed with a thin rod as axle 1230, and this axle and rotor are same metalworks.129 places are gluing between piezoelectric square column 125 upper end faces and match block 124 rear surfaces connects.Whole driving mechanism covers on metal shell 120 the insides, and shell produces precompression by rubber blanket 121 and poly-tetrafluoro circle 127 pressuring springs 122.Piezoelectric square column 125 rear surfaces same gluing be connected on the metab 126 and by screw thread in lower end side 1210 places and metal shell positioning and fixing.Be frictional interface 128 between stator and the rotor, moment can directly be exported by axle, as shown in figure 12.
Embodiment five drives the ultrasound micro-motor of rotor for the middle part
This structure is characterized in that piezoelectric square column 131 is fixed on the corresponding object by coupled hold assembly 135 and 136 as shown in figure 13.There is a thrust 132 at piezoelectric square column 131 middle parts, and this thrust 132 contacts with rotor 133 by the friction plate 137 that links to each other with its lower surface, and rotor directly is connected with external agency.Rotor is output torque directly, also can be by coupled axle 134 output torques.Rotor also can contact by the friction plate that links to each other with the upper surface of thrust, forms the symmetrical structure with above-mentioned rotor 133.
Embodiment six drives the ultrasound micro-motor of rotor for the middle part
This structure as shown in figure 14, and is identical with embodiment 5, and the fixed-site of piezoelectric square column 141 by coupled hold assembly 145 and 146 is to corresponding object.There is thrust 142 at piezoelectric square column 141 middle parts.With the difference of embodiment 5 is that this thrust 142 contacts with rotor 143 by the friction plate 147 that links to each other with its side.Rotor is output torque directly, also can be by axle 144 output torques.
Claims (9)
1. flexural vibration mode ultrasound micro-motor based on piezoelectric square column, by the stator of excitation ultrasonic vibration, form with the contacted rotor of stator and to the pre-pressure mechanism of rotor pressurization, said stator mainly is made of the piezo ceramic element and the match block of excited vibration, it is characterized in that, the piezo ceramic element of said excitation flexural vibrations is a piezoelectric square column, four outer wall surface of this piezoelectric square column scribble for polarization and four used electrodes especially of excited vibration, on external electrode, apply the excitation signal of telecommunication, make stator produce crooked yawing; The vibration of stator is by the friction-driven rotor rotation, by rotor or the axle output torque that links to each other with rotor.
2. ultrasound micro-motor as claimed in claim 1, it is characterized in that, described four especially electrode feed high voltage direct current by adjacent pair of electrodes wherein, another polarizes to electrode grounding and forms, and is adding sin ω t on the two relative electrodes (85,87) simultaneously respectively, adds cos ω t ac signal on other two electrodes (86,88).
3. ultrasound micro-motor as claimed in claim 1, it is characterized in that, described four especially electrode feed high voltage direct current by wherein relative pair of electrodes, another polarizes to electrode grounding and forms, on four parts of electrodes (81,82,83 and 84), add respectively simultaneously sin ω t, cos ω t ,-sin ω t ,-cos ω t four road ac signals.
4. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, adopt magnetic steel ball (91) to do rotor, piezoelectric square column (93) and spill magnetic metal match block (92) bonding form one, constitute the stator of motor jointly; Magnetic steel ball rotor is placed in the metal matching blocks concave surface, magnetic force between rotor and the metal matching blocks (92) is as fixed rotor and produce the required precompression of frictional force, moment is directly exported by rotor, is provided with the non magnetic pad of adjusting the suction size between magnet rotor and the magnetic match block.
5. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator by the axle (101) that has protruding dish, be placed on this axle (101) stator match block (104) and with this bonding all-in-one-piece piezoelectric square column of stator match block (104) (105) formation, described rotor (103) places on the stator match block (104) and with axle (101) and engages by key; Precompression is provided by the little spring (102) under the protruding dish that is enclosed within axle (101), and moment is directly exported by axle (101).
6. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator is by the stator match block (113) that has a fixed axis (1130), the piezoelectric square column bonding with match block (114) constitutes, described rotor (112) is enclosed within on the fixed axis (1130) of stator match block 113, and this fixed axis (1130) is connected with a protruding dish, is used to withstand the little spring (111) that is placed on the axle, provide precompression by this little spring (111), moment is directly exported by rotor.
7. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, also comprise a metal shell (120), described stator is reached and the bonding piezoelectric square column (125) of its rear surface by match block (124), there is a thin rod centre of described rotor (123) as axle (1230), this rotor (123) places on the stator match block (124), being with this axle of pressuring spring (122) (1230) that produces precompression on this axle (1230) stretches out the hole from metal shell (120) by rubber blanket (121) and poly-tetrafluoro circle (127), described piezoelectric square column (125) rear surface is bonded on the base (126) of metal shell, and moment is directly exported by axle.
8. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator is made of the piezoelectric square column (131) that the middle part is connected with a thrust (132), this thrust (132) by with its on or the friction plate (137) that links to each other of lower surface contact the direct or axle output torque that links to each other with rotor of rotor with rotor (133).
9. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator is made of the piezoelectric square column (131) that the middle part is connected with a thrust (132), this thrust (132) contacts with rotor (133) by the friction plate (137) that links to each other with its side, the direct or axle output torque that links to each other with rotor of rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100911307A CN100384076C (en) | 2004-11-19 | 2004-11-19 | Piezoelectric square column flexural vibrating ultrasound micromotor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100911307A CN100384076C (en) | 2004-11-19 | 2004-11-19 | Piezoelectric square column flexural vibrating ultrasound micromotor |
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| CN1610236A CN1610236A (en) | 2005-04-27 |
| CN100384076C true CN100384076C (en) | 2008-04-23 |
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| CNB2004100911307A Expired - Fee Related CN100384076C (en) | 2004-11-19 | 2004-11-19 | Piezoelectric square column flexural vibrating ultrasound micromotor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101860257B (en) * | 2010-06-12 | 2012-05-02 | 北京大学 | Miniature piezoelectric monocrystal linear motor |
| CN104779244A (en) * | 2015-04-08 | 2015-07-15 | 河南师范大学 | Piezoelectric patch assembled piezoelectric tube |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194811B1 (en) * | 1998-03-31 | 2001-02-27 | Minolta Co., Ltd. | Drive apparatus |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1440115A (en) * | 2002-02-22 | 2003-09-03 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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2004
- 2004-11-19 CN CNB2004100911307A patent/CN100384076C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194811B1 (en) * | 1998-03-31 | 2001-02-27 | Minolta Co., Ltd. | Drive apparatus |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1440115A (en) * | 2002-02-22 | 2003-09-03 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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| CN1610236A (en) | 2005-04-27 |
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