CN100384077C - Metal square column and piezoelectric ceramic wafer composite ultrasound micromotor - Google Patents
Metal square column and piezoelectric ceramic wafer composite ultrasound micromotor Download PDFInfo
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- CN100384077C CN100384077C CNB2004100911326A CN200410091132A CN100384077C CN 100384077 C CN100384077 C CN 100384077C CN B2004100911326 A CNB2004100911326 A CN B2004100911326A CN 200410091132 A CN200410091132 A CN 200410091132A CN 100384077 C CN100384077 C CN 100384077C
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Abstract
The present invention relates to a bending vibration mode ultrasonic micromotor by compounding based on a metal square column and a piezoelectric ceramic piece, which belongs to the field of ultrasonic application. The micromotor is composed of a stator exciting ultrasonic for vibration, a rotor outputting force moment or a shaft connected with the rotor and a forepressure mechanism pressurizing the rotor. The stator is mainly composed of a piezoelectric ceramic element exciting vibration and a matching block spliced with the element, which is characterized in that the piezoelectric ceramic element is the complex of a metal square column and piezoelectric ceramic pieces; any adjacent two lateral surfaces or all four lateral surfaces of the metal square column are spliced with piezoelectric ceramic slices for polarization in the direction of thickness; the outer surfaces of the piezoelectric ceramic pieces in parallel with splicing surfaces are smeared with uniformly distributed outer electrodes for exciting vibration. The present invention promotes the miniaturization of an ultrasonic micromotor greatly, and has wide application prospect for biology, medical treatment, micro machinery, precise electronic machines, defense science and technology, etc.
Description
Technical field
The invention belongs to the applications of ultrasound field, particularly a kind of ultrasound micro-motor structural design of microminiaturization.
Background technology
Piezoelectric ultrasonic micro motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of functional parts such as stator, rotor and pre-pressure mechanisms.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by the frictional force drives rotor motion between stator and the rotor.Ultrasound micro-motor has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load.
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine.
3, starting stops response soon, and the response time is less than 1 millisecond.
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet.
5, self-sustaining moment is arranged, gearless gap, but precision positioning.
6, move quiet noiseless.
The flexural vibration mode ultrasound micro-motor is a kind of of ultrasound micro-motor, mainly by the stator that encourages ultrasonic vibration, rotor of output torque (or axle) and the compositions such as pre-pressure mechanism that pressurize to rotor, said stator mainly is made of the piezo ceramic element and the match block of excited vibration again.Be divided into half garden en metal tube and compound ultrasound micro-motor, the cylindrical piezoelectric ultrasound micro-motor of piezoelectric ceramic piece according to the mode of the crooked yawing of excitation and the shape of piezo ceramic element.Their transmission principle is all identical with driving mechanism, as shown in Figure 1.Stator is in the mode of oscillation of shaking the head along circumference, and the point of contact contact is arranged between the rotor, and its contact point moves on the circumferential periphery of stator, and the frictional force between stator and rotor makes rotor rotate along the direction opposite with the contact point moving direction.
Existing two kinds of exciting modes such as Fig. 2 and Fig. 3:
Fig. 2 is existing half garden en metal tube and the compound microelectromechanical structure of piezoelectric ceramic piece.Piezoelectric ceramic piece is polarized along thickness direction, and surface 27,28 scribbles electrode, shown in Fig. 2 a, is bonded on two sides of half garden en metal tube en, and ferrule 21 is connected with axle 25, by compression spring 23, rotor 22 is applied precompression, shown in Fig. 2 b.One the road or the excitation of two-way sin ω t or the cos ω t signal of telecommunication under, rotor 22 drives axle 25 rotation together.The stator that half garden en metal tube and piezoelectric ceramic plate are formed produces crooked yawing.Ferrule applies precompression by spring makes rotor contact with stator, and the rotor banding moving axis rotates together.
Fig. 3 (a) encourages the distribution of electrodes figure of crooked yawing for existing piezo column stator, and used piezo ceramic element is a cylindrical piezoelectric.Cylindrical piezoelectric polarizes according to certain rules, and its outer wall scribbles equally distributed four external electrodes 35 during work, feeds sin ω t, cos ω t ,-sin ω t ,-cos ω t signal excitation 31,32,33 and 34 4 on extremely successively.The flexural vibration mode ultrasound micro-motor structure of this cylindrical piezoelectric excitation is shown in Fig. 3 (b), metal cap of termination 303 constitutes motor stator on the cylindrical piezoelectric 304, axle 3030 is that metal emits 303 to be one, by spring 301 rotor 302 is fixed on the axle 3030, spring 3030 adds precompression to rotor, and 305 is frictional interface between the stator and rotor among the figure.
The main advantage of above-mentioned flexural vibration mode ultrasound micro-motor is easy to realize microminiaturization and industrialization exactly.Up to the present, minimum ultrasound micro-motor is that the diameter of Tsing-Hua University is the crooked head-shaking motor of 1mm, and this motor comes the flexural vibrations of exciting electric with the piezoelectric ceramic post.But because the electrode polarization method makes electric field inhomogeneous, operating voltage height, circuit integration be difficulty.There are processed complex in half garden en metal tube and the compound electrical micro-machine of piezoelectric ceramic piece, are difficult for problems such as further microminiaturization.
Summary of the invention
The objective of the invention is for overcoming the weak point of prior art on microminiaturized direction, a kind of metal square column and piezoelectric ceramic wafer composite ultrasound micromotor are proposed, employing is with 2 or 4 piezoelectric ceramic pieces, be bonded to metal square column adjacent two sides or whole 4 sides arbitrarily, can encourage the Drive Structure of square column flexural vibrating, has handling ease, characteristic of simple structure; This external cause does not need to consider internal diameter, and that can do is very little, the application of ultrasound micro-motor can be pushed to a new stage.
This proposes a kind of flexural vibration mode ultrasound micro-motor based on piezoelectric square column, by the stator of excitation ultrasonic vibration, form with the contacted rotor of stator and to the pre-pressure mechanism of rotor pressurization, said stator mainly is made of the piezo ceramic element and the match block of excited vibration, it is characterized in that, the piezo ceramic element of said excitation flexural vibrations is a piezoelectric square column, and four outer wall surface of this piezoelectric square column scribble for polarization and four used electrodes especially of excited vibration; On external electrode, apply the excitation signal of telecommunication, make stator produce crooked yawing; The vibration of stator is by the friction-driven rotor rotation, by rotor or the axle output torque that links to each other with rotor.
Characteristics of the present invention and technique effect
The machinable 0.1mm that is of a size of of ultrasound micro-motor of the present invention's design has promoted the microminiaturization of ultrasound micro-motor greatly between the 6mm.When the about 3-6V of input electrical signal peak-to-peak value, rotor can obviously rotate on stator surface.The present invention will have wide application prospect at aspects such as biology, medical treatment, micromechanics, science and techniques of defence.
Description of drawings
Fig. 1 is the transmission principle schematic diagram of flexural vibration mode ultrasound micro-motor.
Fig. 2 is a semicircle en metal tube piezoelectric ceramic wafer composite ultrasound micromotor principle schematic, wherein, figure be 2 (a) semicircle en metal tube piezoelectric ceramic piece distribution of electrodes figure, Fig. 2 (b) is the front view of ultrasound micro-motor.
Fig. 3 is a cylindrical piezoelectric ultrasound micro-motor principle schematic, and wherein, Fig. 3 (a) encourages the distribution of electrodes figure of crooked yawing for the piezo column stator, and Fig. 3 (b) is the structural representation of ultrasound micro-motor.
Fig. 4 is a metal square column piezoelectric ceramic wafer composite ultrasound micromotor stator basal body structure schematic diagram of the present invention, wherein, Fig. 4 (a) is the distribution of electrodes figure that 2 piezoelectric ceramic pieces are bonded in 2 adjacent side of square body, and Fig. 4 (b) is the distribution of electrodes figure that 4 piezoelectric ceramic pieces are bonded in 4 sides of square body.
Fig. 5 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment one structural representation of the present invention, wherein, Fig. 5 (a) is the structural representation of 4 piezoelectric ceramic pieces of bonding on square body, and Fig. 5 (b) is the structural representation of 2 piezoelectric ceramic pieces of bonding on square body.
Fig. 6 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment two structural representations, and wherein, Fig. 6 (a) is the structural representation of 4 piezoelectric ceramic pieces of bonding on square body, and Fig. 6 (b) is the structural representation of 2 piezoelectric ceramic pieces of bonding on square body.
Fig. 7 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment three structural representations, and wherein, Fig. 7 (a) is the structural representation of 4 piezoelectric ceramic pieces of bonding on square body, and Fig. 7 (b) is the structural representation of 2 piezoelectric ceramic pieces of bonding on square body.
Fig. 8 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment four structural representations.
Fig. 9 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment five structural representations.
Figure 10 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment six structural representations.
Figure 11 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment seven structural representations, and wherein, Figure 11 (a) is the structural representation of 4 piezoelectric ceramic pieces of bonding on square body, and Figure 11 (b) is the structural representation of 2 piezoelectric ceramic pieces of bonding on square body.
Figure 12 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment eight structural representations, and wherein, Figure 12 (a) is the structural representation of 4 piezoelectric ceramic pieces of bonding on square body, and Figure 12 (b) is the structural representation of 2 piezoelectric ceramic pieces of bonding on square body.
Figure 13 is metal piezoelectric ceramic wafer composite ultrasound micromotor embodiment nine structural representations, and wherein, Figure 13 (a) is the structural representation of 4 piezoelectric ceramic pieces of bonding on square body, and Figure 13 (b) is the structural representation of 2 piezoelectric ceramic pieces of bonding on square body.
Embodiment
Metal square column piezoelectric sheet composite ultrasonic micromotor of the present invention is described in detail as follows in conjunction with six kinds of each accompanying drawings of example structure:
Metal square column piezoelectric ceramic wafer composite ultrasound micromotor stator basal body structure of the present invention as shown in Figure 4.2 or 4 of the piezoelectric ceramic pieces of said excitation flexural vibrations are bonded in 2 adjacent side of square body 40 or are bonded in square body 400 whole 4 sides, and piezoelectric ceramic piece polarizes along thickness direction.Piezoelectric ceramic piece 41,42 polarised directions among Fig. 4 (a) are identical; Or 2 relative piezoelectric ceramic piece polarised directions of the piezoelectric ceramic piece among Fig. 4 (b) are opposite, and promptly 401 is identical with 402 polarised directions, just are being all, and 403 and 404 polarised directions and 401,402 opposite are all negatively, and external electrode is connected with lead, and is used for excited vibration.
On electrode 41,42, add sin ω t, cos ω t pumping signal during use respectively, as Fig. 4 (a); Add sin ω t on electrode 401,403, add cos ω t on 402,404, the two-way ac signal as Fig. 4 (b), then according to the inverse piezoelectric effect of piezoelectric ceramic, just can encourage this metal square column and piezoelectric ceramic piece complex to produce required crooked yawing.Sin ω t is added to 41, and cos ω t is added to 42, utilizes these two mode of flexural vibration can synthesize the elliptical vibration at square column end and middle part.Sin ω t is added to 401 and 403, and cos ω t is added to 402 and 404, utilizes these two mode of flexural vibration also can synthesize the elliptical vibration at square column end and middle part.
Also can make 401,402,403,404 polarised direction all identical, need on electrode 401,402,403,404, to apply respectively sin ω t, cos ω t ,-sin ω t ,-cos ω t4 road ac signal, be that sin ω t is added to 401, cos ω t is added to 402,-sin ω t is added to 403, and-cos ω t is added to 404.Then, just can encourage this metal square column and piezoelectric ceramic piece complex to produce required crooked yawing according to the inverse piezoelectric effect of piezoelectric ceramic.Utilize these two mode of flexural vibration also can synthesize the elliptical vibration at square column end and middle part.
The polarizing electrode combination of the piezoelectric ceramic piece of above-mentioned metal square column and piezoelectric ceramic wafer composite ultrasound ripple electrical micro-machine and the implementation method of excitation may further comprise the steps:
1) on the metal square column side, bond vertically 2 or 4 piezoelectric ceramic pieces;
2) metal square column is as a ground electrode, and 2 adjacent piezoelectric ceramic piece outer surfaces are as sin ω t, two other signal electrode of cos ω t.Perhaps, add sin ω t signal (when there is suitable difference on the frequency in two flexural resonance mode) with two electrode parallel connections.
3) metal square column is as a ground electrode, and relative 2 piezoelectric ceramic piece outer surfaces parallel connection is as the sin ω t excitation signal of telecommunication, and relative another is to the excitation signal of telecommunication of 2 piezoelectric ceramic piece outer surfaces parallel connection as cos ω t.Perhaps, add the sin ω t excitation signal of telecommunication (when there is suitable difference on the frequency in two flexural resonance mode) with 4 electrode parallel connections.
4) when 4 side piezoelectric ceramic piece polarised directions are identical, then need the excitation of 4 road ac signals, be respectively sin ω t, cos ω t is added to two adjacent electrodes, and-sin ω t ,-cos ω t are added to two relative electrodes.Utilize these two mode of flexural vibration also can synthesize the elliptical vibration at square column end and middle part.Perhaps, add the sin ω t excitation signal of telecommunication (when there is suitable difference on the frequency in two flexural resonance mode) with 4 electrode parallel connections.
The embodiment of nine kinds of structural electromotors of the present invention is respectively described below:
Single-ended the head-swinging type ultrasound micro-motor that drives rotor that embodiment one constitutes for the magnetic force location structure
The main feature of this structure is to do rotor with magnetic steel ball (or steel disk) 53, bonding 4 piezoelectric ceramic pieces are shown in Fig. 5 (a) on the compound square column 51 of metal piezoelectric ceramic piece, or on the compound square column 510 of metal piezoelectric ceramic piece bonding 2 piezoelectric ceramic pieces shown in Fig. 5 (b), these two kinds of compound square columns of metal piezoelectric ceramic piece all form one with spill magnetic metal match block 52 usefulness seccotines bonding, constitute the stator of motor jointly.Magnetic steel ball rotor is placed in the metal matching blocks concave surface.Like this by the magnetic force between rotor and the metal matching blocks 52 as fixed rotor with produce the required precompression of frictional force, moment is directly exported by rotor, as shown in Figure 5.Can use non magnetic pad to adjust the size of suction between magnet rotor 53 and the magnetic match block 52.
Single-ended the head-swinging type ultrasound micro-motor that drives rotor that embodiment two constitutes for the axis of torque export structure
This structure is as shown in Figure 6: the lower end of axle 61 is fixed with a protruding dish that straight diameter ratio shaft is big slightly, is used to withstand the little spring 62 that is placed on the axle, and it can be an one with axle.Except wearing axis hole, also a spill circular hole is respectively arranged in the middle of the stator match block 64 in upper and lower surface.Axle 61 is passed after the match block the compound square column 65 of metal piezoelectric ceramic piece with match block 64 and bonding 4 piezoelectric ceramic pieces from top to bottom shown in Fig. 6 (a) again, or with the compound square column 650 of the metal piezoelectric ceramic piece of bonding 2 piezoelectric ceramic pieces shown in Fig. 6 (b), gluing at 67 places, match block 64 and the compound square column 65 of metal piezoelectric ceramic piece or 650 constitute the stators of motors jointly like this.Rotor 63 places on the stator match block 64 and engages by key with axle 61.Precompression is provided by little spring 62.Axle can be located with match block 64 left-hand threads of stator like this, and can rotate together with rotor, and moment can directly be exported by axle 61.66 places are the frictional interface between stator and the rotor among the figure.
Single-ended the head-swinging type ultrasound micro-motor that drives rotor that embodiment three constitutes for fixed axle structure
This structure as shown in Figure 7, main feature is to process the fixed axis 730 of a thin rod as motor in the centre of stator match block 73.This axle and stator match block can be same metalworks.The compound square column 74 of metal piezoelectric ceramic piece (bonding 4 piezoelectric ceramic pieces, shown in Fig. 7 (a)) or the compound square column 740 of metal piezoelectric ceramic piece (bonding 2 piezoelectric ceramic pieces, shown in Fig. 7 (b)) connect in that 76 places are gluing with match block 73, jointly as the stator of motor.Rotor 72 is enclosed within on the fixed axis 730 of stator match block 73 and by little spring 71 precompression is provided.In this motor, the axle 730 main effects that play are to rotor 72 and pressure little spring 71 location.Moment is directly exported by rotor, the rotor outward flange can be processed into gear during actual the use, by the gear drive output torque.75 places are the frictional interface between stator and the rotor.Little spring 71 also can be enclosed between 72 and 73 the axle on.
Single-ended the head-swinging type ultrasound micro-motor that drives rotor that embodiment four constitutes for the shell locking strutcture
This structure as shown in Figure 8, its main feature is that rotor 83 places on the stator match block 84, the centre of rotor 83 is processed with a thin rod as axle 830, this axle and rotor are same metalworks.89 places are gluing between the compound square column 85 of metal piezoelectric ceramic piece (bonding 2 or 4 piezoelectric ceramic pieces) upper end face and match block 84 rear surfaces connects.Whole driving mechanism covers on metal shell 80 the insides, and shell produces precompression by rubber blanket 81 and poly-tetrafluoro circle 87 pressuring springs 82.Compound square column 85 rear surfaces of metal piezoelectric ceramic piece same gluing be connected on the metab 86 and by screw thread in lower end side 810 places and metal shell positioning and fixing.Be frictional interface 88 between stator and the rotor, moment can directly be exported by axle.
Embodiment five is that the middle part drives the ultrasound micro-motor of rotor, its structure as shown in Figure 9: the compound square column 91 of metal piezoelectric ceramic piece (bonding 2 or 4 piezoelectric ceramic pieces) is fixed on the corresponding object by coupled hold assembly 95 and 96 (but clip position).Central protrusion thing 92 contacts with rotor 93 by the friction plate 97 that links to each other with its lower surface, and rotor directly is connected with external agency.Rotor is output torque directly, also can be by axle 94 output torques.Rotor also can contact by the friction plate that links to each other with the upper surface of thrust, forms the symmetrical structure with above-mentioned rotor 93.
Embodiment six is the ultrasound micro-motor that another kind of middle part drives rotor, its structure as shown in figure 10: identical with embodiment 5, the compound square column 101 of metal piezoelectric ceramic piece is fixed on the corresponding object by coupled hold assembly 105 and 106.There is thrust 102 at the compound square column of metal piezoelectric ceramic piece 101 middle parts.With the difference of embodiment 5 is that this thrust 102 contacts with rotor 107 by the friction plate 103 that links to each other with its side.Rotor is output torque directly, also can be by axle 104 output torques.
Embodiment seven drives two-spool head-swinging type ultrasound micro-motor for the double ended that two magnetic force rotor structures constitute
This structure as shown in figure 11, its main feature is to do rotor with magnetic steel ball (or steel disk) 113, the compound square column 111 of metal piezoelectric ceramic piece (bonding 4 piezoelectric ceramic pieces, shown in Figure 11 (a)) or the compound square column 1110 of metal piezoelectric ceramic piece (bonding 2 piezoelectric ceramic pieces, shown in Figure 11 (b)) and spill magnetic metal match block 112 usefulness seccotines bondings form one, constitute the stator of motor jointly.Magnetic steel ball rotor is placed in the metal matching blocks concave surface.Like this by the magnetic force between rotor and the metal matching blocks 112 as fixed rotor with produce the required precompression of frictional force, moment is directly exported by rotor.Can use non magnetic pad to adjust the size of suction between magnet rotor and the magnetic match block.In the lower end of the compound square column 111 of metal piezoelectric ceramic piece, balanced configuration has rotor 115 and match block 114, constitutes the birotor electrical micro-machine.
Embodiment eight drives two-spool head-swinging type ultrasound micro-motor for the double ended that birotor axle export structure constitutes
This structure as shown in figure 12, its main feature is: axle 121 lower end is fixed with a protruding dish that straight diameter ratio shaft is big slightly, is used to withstand the little spring 122 that is placed on the axle, it and axle can be one.Except wearing axis hole, also a spill circular hole is respectively arranged in the middle of the stator match block 124 in upper and lower surface.Axle 121 is passed after the match block from top to bottom again with match block 124 and the compound square column 125 of metal piezoelectric ceramic piece (bonding 4 piezoelectric ceramic pieces, shown in Figure 12 (a)) or the compound square column 1250 of metal piezoelectric ceramic piece (bonding 2 piezoelectric ceramic pieces, shown in Figure 12 (b)) gluing at 127 places, the compound square column 125 of match block 124 and metal piezoelectric ceramic piece constitutes the stators of motors jointly like this.Rotor 123 places on the stator match block 124 and engages by key with axle 121.Precompression is provided by little spring 122.Axle can be located with match block 124 left-hand threads of stator like this, and can rotate together with rotor, and moment can directly be exported by axle 121.126 places are the frictional interface between stator and the rotor among the figure.As shown in figure 12.Lower end in the compound square column 125 of metal piezoelectric ceramic piece or 1250, balanced configuration stick with glue agent 1213 and are bonded in match block 1211 on the square column, rotor 1210, axle 128 and little spring 129.Be combined into the birotor electrical micro-machine.
Embodiment nine drives two-spool head-swinging type ultrasound micro-motor for the double ended that the birotor fixed axle structure constitutes
This structure as shown in figure 13, its main feature is to process the fixed axis 1330 of a thin rod as motor in the centre of stator match block 133.This axle and stator match block can be same metalworks.The compound square column 134 of metal piezoelectric ceramic piece (bonding 4 piezoelectric ceramic pieces, shown in Figure 13 (a)) or the compound square column 1340 of metal piezoelectric ceramic piece (bonding 2 piezoelectric ceramic pieces, shown in Figure 13 (b)) connect in that 136 places are gluing with match block, jointly as the stator of motor.Rotor 132 is enclosed within on the fixed axis 1330 of stator match block 133 and by little spring 131 precompression is provided.In this motor, the axle 1330 main effects that play are to rotor 132 and pressure little spring 131 location.Moment is directly exported by rotor, the rotor outward flange can be processed into gear during actual the use, by the gear drive output torque.135 places are the frictional interface between stator and the rotor.Little spring 131 also can be enclosed between 132 and 133 the axle on.In the lower end of the compound square column 134 of metal piezoelectric ceramic piece or 1340 symmetry bonding match block 139, rotor 138 is installed, little spring 137, friction material 1310 is just made birotor fixed axis ultrasound micro-motor between rotor.
Claims (9)
1. flexural vibration mode ultrasound micro-motor based on piezoelectric square column, by the stator of excitation ultrasonic vibration, form with the contacted rotor of stator and to the pre-pressure mechanism of rotor pressurization, said stator mainly is made of the piezo ceramic element and the match block of excited vibration, it is characterized in that, the piezo ceramic element of said excitation flexural vibrations is a piezoelectric square column, and four outer wall surface of this piezoelectric square column scribble for polarization and four used electrodes especially of excited vibration; On external electrode, apply the excitation signal of telecommunication, make stator produce crooked yawing; The vibration of stator is by the friction-driven rotor rotation, by rotor or the axle output torque that links to each other with rotor.
2. ultrasound micro-motor as claimed in claim 1, it is characterized in that, described four especially electrode feed high voltage direct current by adjacent pair of electrodes wherein, another polarizes to electrode grounding and forms, and is adding sin ω t on the two relative electrodes (85,87) simultaneously respectively, adds cos ω t ac signal on other two electrodes (86,88).
3. ultrasound micro-motor as claimed in claim 1, it is characterized in that, described four especially electrode feed high voltage direct current by wherein relative pair of electrodes, another polarizes to electrode grounding and forms, on four parts of electrodes (81,82,83 and 84), add respectively simultaneously sin ω t, cos ω t ,-sin ω t ,-cos ω t four road ac signals.
4. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, adopt magnetic steel ball (91) to do rotor, piezoelectric square column (93) and spill magnetic metal match block (92) bonding form one, constitute the stator of motor jointly; Magnetic steel ball rotor is placed in the metal matching blocks concave surface, magnetic force between rotor and the metal matching blocks (92) is as fixed rotor and produce the required precompression of frictional force, moment is directly exported by rotor, is provided with the non magnetic pad of adjusting the suction size between magnet rotor and the magnetic match block.
5. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator by the axle (101) that has protruding dish, be placed on this axle (101) stator match block (104) and with this bonding all-in-one-piece piezoelectric square column of stator match block (104) (105) formation, described rotor (103) places on the stator match block (104) and with axle (101) and engages by key; Precompression is provided by the little spring (102) under the protruding dish that is enclosed within axle (101), and moment is directly exported by axle (101).
6. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator is by the stator match block (113) that has a fixed axis (1130), the piezoelectric square column bonding with match block (114) constitutes, described rotor (112) is enclosed within on the fixed axis (1130) of stator match block 113, and this fixed axis (1130) is connected with a protruding dish, is used to withstand the little spring (111) that is placed on the axle, provide precompression by this little spring (111), moment is directly exported by rotor.
7. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, also comprise a metal shell (120), described stator is reached and the bonding piezoelectric square column (125) of its rear surface by match block (124), there is a thin rod centre of described rotor (123) as axle (1230), this rotor (123) places on the stator match block (124), being with this axle of pressuring spring (122) (1230) that produces precompression on this axle (1230) stretches out the hole from metal shell (120) by rubber blanket (121) and poly-tetrafluoro circle (127), described piezoelectric square column (125) rear surface is bonded on the base (126) of metal shell, and moment is directly exported by axle.
8. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator is made of the piezoelectric square column (131) that the middle part is connected with a thrust (132), this thrust (132) by with its on or the friction plate (137) that links to each other of lower surface contact the direct or axle output torque that links to each other with rotor of rotor with rotor (133).
9. as claim 1,2 or 3 ultrasound micro-motors of stating, it is characterized in that, described stator is made of the piezoelectric square column (131) that the middle part is connected with a thrust (132), this thrust (132) contacts with rotor (133) by the friction plate (137) that links to each other with its side, the direct or axle output torque that links to each other with rotor of rotor.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100911326A CN100384077C (en) | 2004-11-19 | 2004-11-19 | Metal square column and piezoelectric ceramic wafer composite ultrasound micromotor |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100911326A CN100384077C (en) | 2004-11-19 | 2004-11-19 | Metal square column and piezoelectric ceramic wafer composite ultrasound micromotor |
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| CN1610237A CN1610237A (en) | 2005-04-27 |
| CN100384077C true CN100384077C (en) | 2008-04-23 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194811B1 (en) * | 1998-03-31 | 2001-02-27 | Minolta Co., Ltd. | Drive apparatus |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1440115A (en) * | 2002-02-22 | 2003-09-03 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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2004
- 2004-11-19 CN CNB2004100911326A patent/CN100384077C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194811B1 (en) * | 1998-03-31 | 2001-02-27 | Minolta Co., Ltd. | Drive apparatus |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1440115A (en) * | 2002-02-22 | 2003-09-03 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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| CN1610237A (en) | 2005-04-27 |
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