CN100514832C - Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor - Google Patents
Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor Download PDFInfo
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- CN100514832C CN100514832C CNB2004101015744A CN200410101574A CN100514832C CN 100514832 C CN100514832 C CN 100514832C CN B2004101015744 A CNB2004101015744 A CN B2004101015744A CN 200410101574 A CN200410101574 A CN 200410101574A CN 100514832 C CN100514832 C CN 100514832C
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- 239000000919 ceramic Substances 0.000 title claims abstract description 133
- 239000002905 metal composite material Substances 0.000 title claims abstract description 19
- 238000002604 ultrasonography Methods 0.000 title claims description 20
- 230000005684 electric field Effects 0.000 claims abstract description 15
- 230000005284 excitation Effects 0.000 claims abstract description 13
- 230000010287 polarization Effects 0.000 claims description 11
- 230000033001 locomotion Effects 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000002783 friction material Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 abstract description 10
- 239000002131 composite material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 206010049214 Monopodia Diseases 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005086 pumping Methods 0.000 description 7
- 230000001105 regulatory effect Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
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Abstract
This invention relates to a vibration linear supersonic motor in a piezoelectric ceramic metal composite plate composed of a stator, a runner outputting moment and a pre-press unit pressing the runner, among which, the stator is composed of eight ceramic plates and a metal plate, a driving foot is set at the side of the metal plate, the ceramic plates are adhered to both surfaces of the metal plate to be polarized along the thickness direction of the stator, an outer electrode is coated on the surface of ceramic plates to excitation electrode for applying electric field along the direction vertical to the ceramic polarized direction and composite vibration is excited on the stator.
Description
Technical field
The invention belongs to the applications of ultrasound field, particularly a kind of structural design of linear type ultrasound wave pressure electricity motor.
Background technology
Piezoelectric ultrasonic motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of stator, rotor or functional parts such as mover and pre-pressure mechanism.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by frictional force drives rotor between stator and rotor or the mover or mover motion.Ultrasound electric machine has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load;
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine;
3, starting stops response soon, and the response time is less than 1 millisecond;
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet;
5, self-sustaining moment is arranged, gearless gap, but precision positioning;
6, move quiet noiseless.
The ultrasonic linear motor of complex vibration pattern is a kind of of ultrasound electric machine in the employing face.This linear electric motors are compared with the ultrasonic linear motor that adopts other vibration modes, and advantage is that under the same power output (or moment), its driving mechanism (stator) can be done forr a short time, and weight is lighter.The ultrasonic linear motor of complex vibration mode in the face of present existing procuctsization.
The ultrasonic linear motor of common complex vibration pattern has adopted piezoelectric ceramic plate to make stator, as shown in Figure 1, wherein, Fig. 1 (a) is a kind of ultrasonic linear motor that adopts piezoelectric ceramic plate to make the complex vibration pattern of stator, it adopts a monoblock piezoelectric ceramic plate to make stator, piezoelectric ceramic plate is polarized along thickness direction, and be divided into four the district 111,112,113 and 114, wherein distinguish 111 for two of the diagonal angle, 114 add sin ω t pumping signal, two other district 112 at diagonal angle, 113 add cos ω t pumping signal, on piezoelectric ceramic plate, inspire the complex vibration mode of longitudinal vibration and flexural vibrations by pre-pressure mechanism 117, drive movers 116 motions with driving head 115.Fig. 1 (b) is the drive principle schematic diagram of these linear electric motors.Wherein 121 is rectangular slabs, and it drives 122 driving heads and vibrates together, drives mover 123 motions.Linear type ultrasound motor can obtain extensive use at aspects such as small-sized, micromachine, precision positioning, SERVO CONTROL and space flight, the application of ultrasound electric machine can be pushed to a new stage.But the ultrasonic linear motor that adopts piezoelectric ceramic plate to make stator exists piezoelectric ceramic plate to break easily, the shortcoming of clamping difficulty.
Summary of the invention
The objective of the invention is for overcoming the weak point of prior art, a kind of piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor is proposed, this motor is with respect to adopting the monoblock piezoelectric ceramic plate to make the linear electric motors of stator, its advantage is that the polarization mode and the layout of pottery is more flexible, is convenient to install and repair.
The employing piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor that the present invention proposes, mainly form by the mover of the stator that encourages ultrasonic vibration, output torque and to the pre-pressure mechanism of mover pressurization, it is characterized in that, said stator is made of the piezoelectric ceramic piece and the metallic plate of eight excited vibrations, and the side of this metallic plate is provided with the driving foot that makes the mover motion; This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all along the thickness direction polarization of stator, the polarised direction of the piezoelectric ceramic piece of symmetric position is identical, and the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness; Apply excitation electrical field along the piezoelectric ceramic polarised direction, utilize the d of piezoelectric ceramic
31Piezoelectric effect motivates on stator bends the complex vibration that shakes with longitudinal vibration;
Wherein said all piezoelectric ceramic piece polarised direction homogeneous phases simultaneously, the mode that applies of electric field is: add sin ω t signal along first pair of piezoelectric ceramic piece (21,25) of metallic plate symmetry with the 4th pair of piezoelectric ceramic piece (24,28) of first pair of piezoelectric ceramic piece on same diagonal, add cos (ω t+ θ) signal at second pair of piezoelectric ceramic piece (22,26) adjacent with the first pair of piezoelectric ceramic piece with the 3rd pair of piezoelectric ceramic piece (23,27) of second pair of piezoelectric ceramic piece on same diagonal; Perhaps first pair of piezoelectric ceramic piece (21,25) adds sin ω t signal, and second pair of piezoelectric ceramic piece (22,26) adds-sin ω t signal, and the 3rd pair and the 4th pair of piezoelectric ceramic piece (23,24,27,28) add cos (ω t+ θ) signal.
Driving can be thought rectangle, semicircle and boss shape raised structures completely.
Characteristics of the present invention and effect:
The ultrasound electric machine compact conformation of the present invention's design be convenient to install and repair, but the array use provides bigger actuating force.The present invention will obtain extensive use at aspects such as small-sized, micromachine, precision positioning, SERVO CONTROL and science and techniques of defence, wide application prospect is arranged.
Description of drawings
Fig. 1 has adopted piezoelectric ceramic plate to make the ultrasonic linear motor structure and the drive principle schematic diagram of complex vibration mode in the face of stator.
Fig. 2 is the stator structure and the excitation schematic diagram of the piezoelectric ceramic metal composite plate in-plane vibration ultrasonic linear motor of side biped driving.
Fig. 3 is the stator structure and the excitation schematic diagram of the piezoelectric ceramic metal composite plate in-plane vibration ultrasonic linear motor of end monopodia driving.
Fig. 4 is embodiments of the invention one---double-pin linear driving mechanism schematic diagram.
Fig. 5 is embodiments of the invention two---monopodia straight line driving mechanism schematic diagram.
Fig. 6 is embodiments of the invention three---monopodia rotary drive mechanism schematic diagram.
Embodiment:
Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor of the present invention reaches three kinds of embodiment in conjunction with the accompanying drawings and is respectively described below:
The employing piezoelectric ceramic metal composite plate that the present invention proposes is made the ultrasonic wave linear piezoelectric motor of stator, mainly by the stator that encourages ultrasonic vibration, and the mover of output torque and the pre-pressure mechanism composition that pressurizes to mover; Said stator is made of the piezoelectric ceramic piece and the metallic plate of excited vibration, this piezoelectric ceramic piece is along the thickness direction polarization of stator, symmetry sticks on two surfaces of metallic plate, the polarised direction of the piezoelectric ceramic piece of symmetric position identical (with respect to the method direction of stickup metal sheet surface), the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness, be used for applying electric field, utilize the d of piezoelectric ceramic along the direction vertical with the piezoelectric ceramic polarised direction
31Effect motivates on stator bends the complex vibration that shakes with longitudinal vibration.Stator has side biped and two kinds of drive forms of end monopodia, as shown in Figures 2 and 3.Wherein, the piezoelectric ceramic metal composite plate stator structure that Fig. 2 drives for the side biped, piezoelectric ceramic 21,22,23,24,25,26,27,28 sticks on the metallic plate 210, and double-driving foot 211 is arranged on the side; The piezoelectric ceramic metal composite plate stator structure that Fig. 3 drives for the end monopodia, piezoelectric ceramic 31,32,33,34,35,36,37,38 sticks on the metallic plate 310, and single-driving foot 311 is arranged on the side.The piezoelectric ceramic piece bonding method of above-mentioned two kinds of structures has three kinds: first kind of all piezoelectric ceramic piece polarised direction (with respect to the method direction of stickup metal sheet surface) is all identical, second kind be two piezoelectric ceramic pieces 21,24,25,28 (or 31,34,35,38) polarised direction (with respect to the method direction of stickup metal sheet surface) at diagonal angle for just, and two piezoelectric ceramic pieces 22,23,26,27 (or 32,33,36,37) polarised direction in addition at diagonal angle is for negative.The third is that piezoelectric ceramic piece 21,25 and 22,26 (or 31,35 and 32,36) polarised direction (with respect to the method direction of stickup metal sheet surface) is opposite, and piezoelectric ceramic piece 23,24,27,28 (or 33,34,37,38) polarised direction is identical.
The form that drives foot 211 and 311 can also can be semicircle and boss shape for rectangle (shown in 2 figure).
The polarised direction difference of above-mentioned each piezoelectric ceramic piece, the energisation mode of electric field are also corresponding different, and the essence that adds excitation electrical field is for longitudinal vibration that inspires certain phase difference on stator and flexural vibrations.
All piezoelectric ceramic piece polarised direction (with respect to the method direction of stickup metal sheet surface) homogeneous phase while when pasting, the mode that applies of electric field is:
1) two of the diagonal angle piezoelectric ceramic pieces 21,24,25,28 (or 31,34,35,38) add sin ω t signal, and two other piezoelectric ceramic piece 22,23,26,27 (or 32,33,36,37) at diagonal angle adds cos (ω t+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor;
2) or piezoelectric ceramic piece 21,25 (or 31,35) add sin ω t signal, piezoelectric ceramic piece 22,26 (or 32,36) adds-sin ω t signal, piezoelectric ceramic piece 23,24,27,28 (or 33,34,37,38) adds cos (ω t+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
Piezoelectric ceramic piece 21,24,25,28 (or 31,34,35,38) polarised direction (with respect to the method direction of stickup metal sheet surface) is for just when pasting, and piezoelectric ceramic piece 22,23,26,27 (or 32,33,36,37) polarised direction is when negative, and the mode that applies of electric field is:
1) two of the diagonal angle piezoelectric ceramic pieces 21,24,25,28 (or 31,34,35,38) add sin ω t signal, and two other piezoelectric ceramic piece 22,23,26,27 (or 32,33,36,37) at diagonal angle adds cos (ω t+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
2) or piezoelectric ceramic piece 21,22,25,26 (or 31,32,35,36) add sin ω t signal, piezoelectric ceramic piece 23,27 (or 33,37) adds cos (ω t+ θ) signal, piezoelectric ceramic piece 24,28 or (34,38) add-cos (ω t+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
Piezoelectric ceramic piece 21,25 and 22,26 (or 31,35 and 32,36) polarised direction (with respect to the method direction of stickup metal sheet surface) is opposite, and piezoelectric ceramic piece 23,24,27,28 (or 33,34,37,38) is when polarised direction is identical, and the mode that applies of electric field is:
Piezoelectric ceramic piece 21,25,22,26 (or 31,35,32,36) adds sin ω t signal, and piezoelectric ceramic piece 23,27,24,28 (or 33,37,34,38) adds cos (ω t+ θ) signal.By the voltage of regulating pumping signal or the actuating speed that phase difference θ can regulate motor.
Embodiment one is the double-pin linear driving mechanism
The main feature of this structure is: stator is made up of 8 piezoelectric ceramic pieces 41 that metallic plate 48 and symmetry stick on the metallic plate two sides.Stator drives foot 43 driving movers 42 by two and does rectilinear motion.Elastic restraint (spring pad) 46 applies a power by the centre bore on the stator 45 to stator, makes to keep a suitable precompression between stator and the rotor.It is that elastic restraint 48 is added on three side surfaces of metallic plate of stator that another of precompression applies scheme.In order to increase the life-span of motor, can drive sufficient drive surfaces coating wearing layer, and on the contact surface of mover 42, paste friction material 44.
Embodiment two is the monopodia straight line driving mechanism
The main feature of this structure is: stator is made up of 8 piezoelectric ceramic pieces 51 that metallic plate 56 and symmetry stick on the metallic plate two sides.Stator drives foot 54 driving movers 53 by one and does rectilinear motion.Elastic restraint (spring pad) 52 applies power to stator on three side surfaces of the metallic plate of stator, make to keep a suitable precompression between stator and the rotor.In order to increase the life-span of motor, can drive sufficient drive surfaces coating wearing layer, and on the contact surface of mover 53, paste friction material 55.
Embodiment three is the monopodia rotary drive mechanism
The main feature of this structure is: stator is made up of 8 piezoelectric ceramic pieces 61 that metallic plate 66 and symmetry stick on the metallic plate two sides.Stator drives foot 63 driving rotors 65 by one and rotates.Elastic restraint (spring pad) 62 applies power to stator on three side surfaces of the metallic plate of stator, make to keep a suitable precompression between stator and the rotor.In order to increase the life-span of motor, can drive sufficient drive surfaces coating wearing layer, and on the contact surface of rotor 65, paste friction material 64.
Claims (8)
1, a kind of piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor, mainly form by the mover of the stator that encourages ultrasonic vibration, output torque and to the pre-pressure mechanism of mover pressurization, it is characterized in that, said stator is made of the piezoelectric ceramic piece and the metallic plate of eight excited vibrations, and the side of this metallic plate is provided with the driving foot that makes the mover motion; This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all along the thickness direction polarization of stator, the polarised direction of the piezoelectric ceramic piece of symmetric position is identical, and the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness; Apply excitation electrical field along the piezoelectric ceramic polarised direction, utilize the d of piezoelectric ceramic
31Piezoelectric effect motivates on stator bends the complex vibration that shakes with longitudinal vibration;
Wherein said all piezoelectric ceramic piece polarised direction homogeneous phases simultaneously, the mode that applies of electric field is: add sin ω t signal along first pair of piezoelectric ceramic piece (21,25) of metallic plate symmetry with the 4th pair of piezoelectric ceramic piece (24,28) of first pair of piezoelectric ceramic piece on same diagonal, add cos (ω t+ θ) signal at second pair of piezoelectric ceramic piece (22,26) adjacent with the first pair of piezoelectric ceramic piece with the 3rd pair of piezoelectric ceramic piece (23,27) of second pair of piezoelectric ceramic piece on same diagonal; Perhaps first pair of piezoelectric ceramic piece (21,25) adds sin ω t signal, and second pair of piezoelectric ceramic piece (22,26) adds-sin ω t signal, and the 3rd pair and the 4th pair of piezoelectric ceramic piece (23,24,27,28) add cos (ω t+ θ) signal.
2, a kind of piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor, mainly form by the mover of the stator that encourages ultrasonic vibration, output torque and to the pre-pressure mechanism of mover pressurization, it is characterized in that, said stator is made of the piezoelectric ceramic piece and the metallic plate of eight excited vibrations, and the side of this metallic plate is provided with the driving foot that makes the mover motion; This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all along the thickness direction polarization of stator, the polarised direction of the piezoelectric ceramic piece of symmetric position is identical, and the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness; Apply excitation electrical field along the piezoelectric ceramic polarised direction, utilize the d of piezoelectric ceramic
31Piezoelectric effect motivates on stator bends the complex vibration that shakes with longitudinal vibration;
Wherein along first pair of piezoelectric ceramic piece (21 of metallic plate symmetry, 25) and with its 4th pair of piezoelectric ceramic piece (24 on same diagonal, 28) polarised direction is for just, with first pair of second pair of piezoelectric ceramic piece (22 that piezoelectric ceramic piece is adjacent, 26) and with the three pair piezoelectric ceramic piece (23 of second pair of piezoelectric ceramic piece on same diagonal, when 27) polarised direction is negative, the mode that applies of electric field is: first pair and the 4th pair of piezoelectric ceramic piece (21,24,25,28) add sin ω t signal, second pair and the 3rd pair of piezoelectric ceramic piece (22,23,26,27) add cos (ω t+ θ) signal; Perhaps first pair and second pair of piezoelectric ceramic piece (21,25,22,26) add sin ω t signal, and the 3rd pair of piezoelectric ceramic piece (23,27) adds cos (ω t+ θ) signal, and the 4th pair of piezoelectric ceramic piece (24,28) adds-cos (ω t+ θ) signal.
3, a kind of piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor, mainly form by the mover of the stator that encourages ultrasonic vibration, output torque and to the pre-pressure mechanism of mover pressurization, it is characterized in that, said stator is made of the piezoelectric ceramic piece and the metallic plate of eight excited vibrations, and the side of this metallic plate is provided with the driving foot that makes the mover motion; This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all along the thickness direction polarization of stator, the polarised direction of the piezoelectric ceramic piece of symmetric position is identical, and the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness; Apply excitation electrical field along the piezoelectric ceramic polarised direction, utilize the d of piezoelectric ceramic
31Piezoelectric effect motivates on stator bends the complex vibration that shakes with longitudinal vibration;
Wherein along first pair of piezoelectric ceramic piece (21 of metallic plate symmetry, 25) and the second pair of piezoelectric ceramic piece (22 that is adjacent, 26) polarised direction is opposite, and with the four pair piezoelectric ceramic piece (24 of first pair of piezoelectric ceramic piece on same diagonal, 28) and with the three pair piezoelectric ceramic piece (23 of second pair of piezoelectric ceramic piece on same diagonal, when 27) polarised direction is identical, the mode that applies of electric field is: first pair and second pair of piezoelectric ceramic piece (21,25,22,26) add sin ω t signal, the 3rd pair and the 4th pair of piezoelectric ceramic piece (23,27,24,28) add cos (ω t+ θ) signal.
4, as claim 1,2 or 3 described piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motors, it is characterized in that, the described foot that drives adopts two driving movers that are located at this metallic plate one side to do straight-line driving foot, middle part at this metallic plate has installing hole, described pre-pressure mechanism adopts the spring pad that is fixed in the described installing hole, or is fixed on four springs on other three side surfaces of this metallic plate.
5, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 4 is characterized in that, drives the drive surfaces coating wearing layer of foot at this, and paste friction material on the contact surface of described mover.
6, as claim 1,2 or 3 described piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motors, it is characterized in that, the described foot that drives adopts of being located at this metallic plate one side to drive the driving foot that mover is done straight line or rotatablely moved, and described pre-pressure mechanism adopts four springs on other three side surfaces that are fixed on this metallic plate.
7, piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor as claimed in claim 6 is characterized in that, drives the drive surfaces coating wearing layer of foot at this, and paste friction material on the contact surface of described mover.
As the arbitrary described piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor of claim 1-7, it is characterized in that 8, described driving foot adopts rectangle, semicircle or boss shape raised structures.
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| CNB2004101015744A CN100514832C (en) | 2004-12-24 | 2004-12-24 | Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor |
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| CNB2004101015744A CN100514832C (en) | 2004-12-24 | 2004-12-24 | Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor |
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| CN100514832C true CN100514832C (en) | 2009-07-15 |
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| CN100488020C (en) * | 2005-12-12 | 2009-05-13 | 南京航空航天大学 | Linear ultrasonic motor |
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| US8912707B2 (en) * | 2011-07-13 | 2014-12-16 | Academia Sinica | Friction-driven actuator |
| WO2014172833A1 (en) * | 2013-04-22 | 2014-10-30 | 北京大学 | Piezoelectric driver and piezoelectric motor |
| DE102014209419B3 (en) * | 2014-05-19 | 2015-05-07 | Physik Instrumente (Pi) Gmbh & Co. Kg | ultrasonic actuator |
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| EP3089348B1 (en) * | 2015-04-29 | 2019-02-27 | Physik Instrumente (PI) GmbH & Co. Kg | Piezoelectric motor |
| CN105406760B (en) * | 2015-12-15 | 2018-01-30 | 上海交通大学 | Without impact rectangular slab piezoelectric micro motor |
| CN107147328B (en) * | 2017-06-21 | 2018-11-02 | 哈尔滨工业大学 | It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver |
| CN107171589B (en) * | 2017-06-21 | 2019-01-08 | 哈尔滨工业大学 | A kind of cymbal type two-freedom piezoelectric actuator and the motivational techniques for the two-freedom movement realized using the driver |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194811B1 (en) * | 1998-03-31 | 2001-02-27 | Minolta Co., Ltd. | Drive apparatus |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1440115A (en) * | 2002-02-22 | 2003-09-03 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
-
2004
- 2004-12-24 CN CNB2004101015744A patent/CN100514832C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194811B1 (en) * | 1998-03-31 | 2001-02-27 | Minolta Co., Ltd. | Drive apparatus |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1440115A (en) * | 2002-02-22 | 2003-09-03 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
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