CN104124891B - Piezoelectric vibrator and include the precision displacement platform of this piezoelectric vibrator - Google Patents
Piezoelectric vibrator and include the precision displacement platform of this piezoelectric vibrator Download PDFInfo
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Abstract
The invention discloses a kind of piezoelectric vibrator and include the precision displacement platform of this piezoelectric vibrator, belong to technical field of piezoelectricity, it is respectively arranged with multilayer piezoelectric ceramic on two surfaces up and down of described piezoelectric vibrator, the side of piezoelectric vibrator is provided with pottery contact, interior electrode it is provided with between every layer of multilayer piezoelectric ceramic and on inner surface, being provided with external electrode in outmost surface, the interior electrode of multilayer piezoelectric ceramic uses mode in parallel to connect, and is connected with external electrode；Multilayer piezoelectric ceramic on two surfaces up and down of piezoelectric vibrator is respectively divided into four electrode districts, and through-thickness polarizes, and the polarised direction of adjacent two electrode districts is contrary；Four electrode districts on two surfaces up and down of piezoelectric vibrator are symmetrical and line with add the most consistent, be positioned at the same face adjacent two electrode districts add the most contrary.The present invention uses multilayer piezoelectric ceramic, uses less driving voltage to provide for bigger driving force, and can improve driving stability.
Description
Technical field
The present invention relates to technical field of piezoelectricity, particularly relate to a kind of piezoelectric vibrator and include this piezoelectric vibrator
Precision displacement platform.
Background technology
Piezoelectric actuator is the inverse piezoelectric effect utilizing piezoelectric, excites elastomer to produce supersonic range
Micro breadth oscillation, force the particle of contact surface to produce the motion of similar elliptical orbit, and by fixed and moving son
Between friction convert thereof into rotation or the linear motion of mover.Piezoelectric actuator has version
Various, positional precision is high, inertia is little, low noise runs, response is fast, cut off self-lock, do not produce magnetic
Field is not the most by advantages such as electromagnetic interference.Owing to having above plurality of advantages, piezoelectric actuator is in industry certainly
The fields such as dynamicization, Aero-Space, medical treatment, biological engineering have obtained substantial amounts of application, and have played huge
Big effect.
The CN102664552A patent application that Nanjing Aero-Space University proposes, entitled " a kind of double
Drive the foot board-like linear ultrasonic motor of Rectangular piezoelectric ", it includes pedestal, stator and mover, Qi Zhongding
Attached bag includes a rectangular slab piezoelectric ceramics and two ceramic driving foot, the end face of rectangular slab piezoelectric ceramics,
Bottom surface all by silver as electrode layer；Said two ceramic driving foot is bonded in rectangular slab piezoelectric ceramics respectively
At the crest of rank, side 2 bending vibration and trough；Mover includes slide block and aluminium oxide ceramics bar, and described oxygen
Change aluminum pottery bar and be bonded in the side of slide block；The end face of pedestal forms containing cavity, the side of this containing cavity
Being provided with track, mover is slidingly disposed on track；Stator is located in containing cavity, and makes on stator
Two ceramic driving foots contact with the aluminium oxide ceramics bar on mover.
The CN100514832C patent that Tsing-Hua University Zhou Tieying et al. proposes, entitled " piezoelectric ceramics
Metal composite plate in-plane vibration linear ultrasound motor ", this motor by stator, output torque mover with
And to the pre-pressure mechanism composition of mover pressurization, stator is by eight piezoelectric ceramic pieces and metallic plate structure
Becoming, the side of metallic plate is provided with driving foot.This each piezoelectric ceramic piece symmetry is pasted onto the two of metallic plate
On surface, and the thickness direction each along stator polarizes, and this piezoelectric ceramic piece connects the surface of exciting electrode
Scribble external electrode, for applying electric field along the direction vertical with piezoelectric ceramics polarised direction, utilize piezoelectricity
The d of pottery31Effect motivates the complex vibration of bending vibration and longitudinal vibration on stator, and this technology is to pass through multi-disc
Piezoelectric ceramics cooperates to reach to drive effect.
Above two scheme, all use single layer piezoelectric pottery, higher power output will be reached, needed for drive
Galvanic electricity pressure is relatively big, and external force increase simultaneously can cause piezoelectric vibrator (i.e. stator) mode of oscillation to change,
So that the service behaviour of piezoelectric vibrator is deteriorated, stability is driven to decline.
Summary of the invention
The technical problem to be solved in the present invention is to provide that a kind of driving voltage is little, driving force big, it is steady to drive
Qualitative high piezoelectric vibrator and include the precision displacement platform of this piezoelectric vibrator.
For solving above-mentioned technical problem, the present invention provides technical scheme as follows:
The present invention provides a kind of piezoelectric vibrator and includes the precision displacement platform of this piezoelectric vibrator, described pressure
It is respectively arranged with multilayer piezoelectric ceramic, the side of described piezoelectric vibrator on two surfaces up and down of electric tachometer indicator
It is provided with pottery contact, wherein:
Interior electrode, described multilamellar it is provided with between every layer of described multilayer piezoelectric ceramic and on inner surface
Being provided with external electrode in the outmost surface of piezoelectric ceramics, the interior electrode of described multilayer piezoelectric ceramic uses also
The mode of connection connects, and is connected with described external electrode；
Described multilayer piezoelectric ceramic on two surfaces up and down of described piezoelectric vibrator is respectively divided into four electricity
Polar region, through-thickness polarizes, and the polarised direction of adjacent two electrode districts is contrary；
Four electrode districts on two surfaces up and down of described piezoelectric vibrator are symmetrical and line and adding electrically
Unanimously, be positioned at the same face adjacent two electrode districts add the most contrary.
Further, the multilayer piezoelectric ceramic on two surfaces up and down of described piezoelectric vibrator is tubulose one
Structure, by advance by banding piezoelectric ceramic film continuous crisping and the high temperature sintering of a lot of electrode district
Become.
Further, described piezoelectric vibrator also includes that upper and lower two surfaces are the metal circular tube of plane, institute
State multilayer piezoelectric ceramic to be laminated structure and be arranged on two surfaces up and down of described metal circular tube；
Or, described piezoelectric vibrator also includes that metal rectangular shell, described multilayer piezoelectric ceramic are lamellar knot
Structure and being arranged on two surfaces up and down of described metal rectangular shell.
Further, described multilayer piezoelectric ceramic is laminated structure, and described piezoelectric vibrator is by described in two panels
Multilayer piezoelectric ceramic connects formation.
Further, four electrode districts of described multilayer piezoelectric ceramic are uniformly distributed by matts mode,
The number of plies of described multilayer piezoelectric ceramic is at least 5 layers, and the quantity of described pottery contact is 2 and arranges
Two ends at described piezoelectric vibrator.
Further, pressure described in any claim during described piezoelectric vibrator is claim 1 to 5
Electric tachometer indicator；Described precision displacement platform includes upper platform body and lower platform body, wherein:
Described upper platform body and lower platform body are connected by crossed roller guide rail；
The side of described upper platform body is provided with aluminium oxide ceramics bar, and phase the same side of described lower platform body is arranged
Have putting part, described piezoelectric vibrator to be positioned at described putting part, the ceramic contact of described piezoelectric vibrator with
Described aluminium oxide ceramics bar contacts.
Further, it is provided with, in described putting part, the elasticity clamping described piezoelectric vibrator along its length
Clip, the length direction two ends of described Flexible clamp are provided with disc spring.
Further, it is provided with spring between side, long limit and the described putting part of described Flexible clamp.
Further, described putting part is provided with for regulating the longitudinal pretension to described piezoelectric vibrator
The adjusting means of power and/or laterally pretightning force.
Further, described piezoelectric vibrator is provided with location in the side contrary with described pottery contact
Post, described Flexible clamp is provided with hole, location in the position corresponding with described locating dowel.
During work, the electrode district of the multilayer piezoelectric ceramic on any surface of piezoelectric vibrator is loaded certain
The sine voltage signal of frequency, single order longitudinal vibration and the second order that can inspire multilayer piezoelectric ceramic curved simultaneously
Shaking, two kinds of vibrations can be coupled into elliptical vibration at pottery contact.If two up and down of piezoelectric vibrator
The multilayer piezoelectric ceramic on surface is simultaneously powered up, can strengthen the ellipse being coupled at pottery contact at double and shake
Dynamic, increase driving force.The elliptical vibration formed at pottery contact, by rubbing action in accurate displacement
The aluminium oxide ceramics bar of the upper platform body of platform, and then drive precision displacement platform to move.
The method have the advantages that
Compared with prior art, the present invention uses multilayer piezoelectric ceramic, the thickness of each lamination electroceramics
Relatively small, the driving voltage of needs is less, and multilayer piezoelectric ceramic is in parallel, can be at total voltage
Bigger driving force is produced, this more traditional side using single layer piezoelectric pottery in the case of amplitude is less
For case, less driving voltage is used to provide for bigger driving force.
And, use single layer piezoelectric pottery, in order to produce bigger vibration displacement and driving force,
Need piezoelectric ceramics to work at the resonant frequency fx, and resonant frequency is affected relatively by the physical dimension of pottery
Greatly, the dimensional discrepancy caused due to mismachining tolerance can affect the resonant frequency of piezoelectric ceramics, thus meeting
Affecting the overall driveability of piezoelectric vibrator, the driving causing piezoelectric vibrator is unstable, and the present invention uses
Multilayer piezoelectric ceramic can avoid this problem so that drives stability to improve.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of embodiment of the piezoelectric vibrator of the present invention；
Fig. 2 is the structural representation of the another embodiment of the piezoelectric vibrator of the present invention；
Fig. 3 is the structural representation of the another embodiment of the piezoelectric vibrator of the present invention；
Fig. 4 is the structural representation of another embodiment of the piezoelectric vibrator of the present invention；
Fig. 5 is the electrode lead-out mode schematic diagram of the multilayer piezoelectric ceramic of the piezoelectric vibrator of the present invention；
Fig. 6 is the exploded perspective view of a kind of embodiment of the precision displacement platform of the present invention；
Fig. 7 is the assembling schematic diagram of the another embodiment of the precision displacement platform of the present invention；
Fig. 8 is the assembling schematic diagram of the another embodiment of the precision displacement platform of the present invention.
Detailed description of the invention
For making the technical problem to be solved in the present invention, technical scheme and advantage clearer, below will knot
Conjunction drawings and the specific embodiments are described in detail.
On the one hand, the present invention provides a kind of piezoelectric vibrator, as Figure 1-5, and piezoelectric vibrator upper and lower
Be respectively arranged with multilayer piezoelectric ceramic 14,14 ', 14 on two surfaces ", 14 " ', the one of piezoelectric vibrator
Side be provided with pottery contact 11,11 ', 11 ", 11 " '.It should be noted that in order to clearly show that
The structure of piezoelectric vibrator, the piezoelectricity will seen in edge-on for piezoelectric vibrator placement, i.e. Fig. 1-4 in Fig. 1-4
Before and after oscillator, two sides is two surfaces up and down when it is normally placed.Further, Fig. 1 shows simultaneously
Go out the structure on two sides before and after piezoelectric vibrator.
Multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' every layer between and multilayer piezoelectric ceramic 14,14 ',
14 " inner surface, 14 " ' is provided with interior electrode, multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " '
Outmost surface on be provided with external electrode 12,12 ', 12 ", 12 " ', multilayer piezoelectric ceramic 14,14 ',
14 " interior electrode, 14 " ' uses mode in parallel to connect, with external electrode 12,12 ', 12 ", 12 " '
It is connected (electrode lead-out mode is referred to the 14a-14e in Fig. 5)；
The multilayer piezoelectric ceramic 14,14 ', 14 on two surfaces up and down of piezoelectric vibrator ", 14 " ' divide respectively
Being four electrode districts, through-thickness polarizes, the polarised direction of adjacent two electrode districts 13,13 ',
13 ", 13 " ' contrary；
Four electrode districts on two surfaces up and down of piezoelectric vibrator are symmetrical and line with add the most consistent,
Be positioned at the same face adjacent two electrode districts add the most contrary.
During work, the multilayer piezoelectric ceramic 14,14 ', 14 on any surface of piezoelectric vibrator ", 14 " '
Electrode district load certain frequency sine voltage signal, the one of multilayer piezoelectric ceramic can be inspired simultaneously
Rank longitudinal vibration and second order bending vibration, two kinds of vibrations can be at pottery contact 11,11 ', 11 ", 11 " ' place is coupled into
Elliptical vibration.If the multilayer piezoelectric ceramic 14,14 ', 14 on two surfaces up and down of piezoelectric vibrator ",
14 " ' simultaneously powered up, can at double strengthen pottery contact 11,11 ', 11 ", 11 " ' place be coupled into ellipse
Circular vibration, increases driving force.
Compared with prior art, the present invention uses multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ', often
One lamination electroceramics thickness relatively small, the driving voltage of needs is less, by multilayer piezoelectric ceramic 14,
14 ', 14 ", 14 " ' in parallel, bigger driving can be produced in the case of total voltage magnitude is less
Power, for this more traditional scheme using single layer piezoelectric pottery, uses less driving voltage with regard to energy
Bigger driving force is provided.
Traditionally, use single layer piezoelectric pottery, in order to produce bigger vibration displacement and driving force,
Need piezoelectric ceramics to work at the resonant frequency fx, and resonant frequency is affected relatively by the physical dimension of pottery
Greatly, the dimensional discrepancy caused due to mismachining tolerance can affect the resonant frequency of piezoelectric ceramics, thus meeting
Affecting the overall driveability of piezoelectric vibrator, the driving causing piezoelectric vibrator is unstable, and the present invention uses
Multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' this problem can be avoided so that drive stability carry
High.
Further, on the basis of above-mentioned principle, the piezoelectric vibrator of the present invention can use multiple knot
Configuration formula, the most only enumerates four kinds of versions being easier to realize and is explained.
Version one:
As it is shown in figure 1, the multilayer piezoelectric ceramic 14 on two surfaces up and down of piezoelectric vibrator is tubulose one
Body structure, by advance by banding piezoelectric ceramic film continuous crisping and the high temperature sintering of a lot of electrode district
Become.This structure is easy to making and the processing of piezoelectric vibrator.
Version two:
As in figure 2 it is shown, piezoelectric vibrator includes the metal circular tube 15 that upper and lower two surfaces are plane, multilamellar
Piezoelectric ceramics 14 ' is laminated structure and arranges (can paste setting) at up and down the two of metal circular tube 15
On individual surface.And, the side of metal circular tube 15 can be provided with fluting, to reduce Metal Substrate
The rigidity of body.The benefit of this version is to overcome owing to piezoelectric ceramics fragility is relatively big, causes piezoelectricity
The shortcoming that pottery is frangible.
Version three:
As it is shown on figure 3, piezoelectric vibrator includes metal rectangular shell 16, multilayer piezoelectric ceramic 14 " it is lamellar
Structure and being arranged on two surfaces up and down of metal rectangular shell 16.In this embodiment, gold is used
Belong to Rectangular shell 16 structure, the symmetry of structure is realized favourable, it is simple to the technique of structural symmetry is real
Existing；Simultaneously because the uniform wall thickness of metal rectangular shell 16, the piezoelectric ceramics being pasted onto above can be made
14 " stress ratio is more uniform, reduces the impact on piezoelectric ceramic vibration mode, can when actual motion
To be more close to requirement during design, more meet and use requirement.
Version four:
As shown in Figure 4, multilayer piezoelectric ceramic 14 " ' it is laminated structure, piezoelectric vibrator is by many described in two panels
Lamination electroceramics 14 " ' connect formation.In this embodiment, directly by two panels multilayer piezoelectric ceramic 14 " '
Up and down arrange link together, formed piezoelectric vibrator, easy to process fast.
It should be appreciated that Fig. 1-4 illustrated embodiment illustrate only piezoelectric vibrator preferred four kinds not
Same version, those skilled in the art can be changed on this basis and adjust, to be formed
More different versions, belong to protection scope of the present invention.
In the above-described embodiments, multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' four electrode districts excellent
Choosing is uniformly distributed by matts mode, and in order to improve power output, multilayer piezoelectric ceramic 14,14 ',
14 ", 14 " ' the number of plies be preferably at least 5 layers, it addition, pottery contact 11,11 ', 11 ", 11 " '
Quantity be preferably 2, be preferably arranged within two ends of piezoelectric vibrator, such that it is able to effectively profit
The elliptical vibration produced two ends with piezoelectric ceramics, compares more existing only one pottery of use
The scheme of contact, can preferably utilize the electric energy of input, be beneficial to reduce energy consumption.
On the other hand, corresponding with above-mentioned piezoelectric vibrator, the present invention provides a kind of precision displacement platform,
Being provided with piezoelectric vibrator, precision displacement platform includes upper platform body 9,9 ', 9 " and lower platform body 10,
10 ', 10 ", wherein:
Upper platform body 9,9 ', 9 " and lower platform body 10,10 ', 10 " by crossed roller guide rail 8,8 ', 8 "
Connect；
Upper platform body 9,9 ', 9 " side be provided with aluminium oxide ceramics bar 7,7 ', 7 ", lower platform body 10,
10 ', 10 " phase the same side is provided with putting part 4,4 ', 4 ", piezoelectric vibrator be positioned at putting part 4,4 ',
4 " in, the ceramic contact 11,11 ', 11 of piezoelectric vibrator ", 11 " ' with aluminium oxide ceramics bar 7,7 ', 7 "
Contact.
During work, piezoelectric vibrator itself produce single order longitudinal vibration and second order bending vibration, pottery contact 11,
11 ', 11 ", 11 " ' place is coupled into elliptical vibration, elliptical vibration is by pottery contact 11,11 ', 11 ",
11 " ' and in upper platform body 9,9 ', 9 " the upper aluminium oxide ceramics bar 7,7 ', 7 pasted " between friction come
Drive upper platform body 9,9 ', 9 " do submicron to the motion of length nano-stepping.Aluminium oxide ceramics bar 7,7 ',
7 " use can reduce piezoelectric vibrator and upper platform body 9,9 ', 9 " between abrasion, improve accurate position
Move stability and precision stability that platform runs.
Further, putting part 4,4 ', 4 in the present invention " in can be provided with and clamp along its length
The Flexible clamp 2,2 ', 2 of piezoelectric vibrator ", the length direction two ends of this Flexible clamp can be provided with
Disc spring 1,1 ', 1 ".Flexible clamp 2,2 ', 2 " engineering plastics are preferably used is materials processing, its
Advantage is to realize the resilient clamp to piezoelectric vibrator, realizes insulation simultaneously, and this is beneficial to piezoelectric vibrator
At two ends by electrode, it is achieved low voltage drive.
Further, Flexible clamp 2,2 ', 2 " side, long limit preferably and putting part 4,4 ', 4 " between
It is provided with spring 3,3 ', 3 ", to realize the adjustment of the horizontal pretightning force to piezoelectric vibrator.
For the ease of regulation to longitudinal pretightning force of piezoelectric vibrator and/or the regulation of horizontal pretightning force, accommodating
Adjusting means it is preferably provided with on shell.Concrete, putting part 4,4 ', 4 " on can be provided with accommodating
Shell protecgulum 5,5 ', 5 ", putting part protecgulum 5,5 ', 5 " by semicircle pin 6,6 ', 6 " be connected to
Putting part 4,4 ', 4 " on, for changing horizontal pretightning force；Or, putting part and lower platform body 10,
10 ', 10 " can make between to be connected with, for changing longitudinal pretightning force size.
It addition, piezoelectric vibrator with pottery contact 11,11 ', 11 ", 11 " ' contrary side preferably sets
It is equipped with locating dowel 15, Flexible clamp 2,2 ', 2 " position corresponding with locating dowel is provided with location
Hole 16.During installation, locating dowel coordinates with hole, location, constrains the axial rotation of piezoelectric vibrator, it is possible to
Improve the stability of piezoelectric vibrator work.
To sum up, the method have the advantages that
1, compared with prior art, the present invention uses multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ',
The thickness of each lamination electroceramics is relatively small, and the driving voltage of needs is less, by multilayer piezoelectric ceramic
14,14 ', 14 ", 14 " ' in parallel, can produce bigger in the case of total voltage magnitude is less
Driving force；Employing single layer piezoelectric pottery, in order to produce bigger vibration displacement and driving force, needs
Want piezoelectric ceramics to work at the resonant frequency fx, and resonant frequency is affected relatively by the physical dimension of pottery
Greatly, the dimensional discrepancy caused due to mismachining tolerance can affect the resonant frequency of piezoelectric ceramics, thus meeting
Affecting the overall driveability of piezoelectric vibrator, the driving causing piezoelectric vibrator is unstable, and the present invention uses
Multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' this problem can be avoided so that piezoelectric vibrator is stable
Property improve, be beneficial to from the conversion of two driving heads to multiple driving heads.
2, multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' concurrently form after adding sine voltage signal
Single order longitudinal vibration and second order bending vibration, pottery contact 11,11 ', 11 ", 11 " ' place formed elliptical vibration,
Elliptical vibration by pottery contact 11,11 ', 11 ", 11 " ' with in upper platform body paste aluminium oxide make pottery
Friction between porcelain drives upper platform body 9,9 ', 9 " do submicron to the motion of length nano-stepping, make
With aluminium oxide ceramics bar 7,7 ', 7 " reduce piezoelectric vibrator and upper platform body 9,9 ', 9 " between mill
Damage, improve stability and precision stability that precision displacement platform runs.
3, pottery contact 11,11 ', 11 ", 11 " ' be preferably 2 and be arranged in the two of piezoelectric vibrator
Individual end, can effectively utilize multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' at piezoelectric vibrator two
The elliptical vibration that individual end produces, compares the more existing scheme only using a ceramic contact, can
With the more preferable electric energy utilizing input, it is beneficial to reduce energy consumption.
The above is the preferred embodiment of the present invention, it is noted that general for the art
For logical technical staff, on the premise of without departing from principle of the present invention, it is also possible to make some changing
Entering and retouch, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (6)
1. a piezoelectric vibrator, it is characterised in that divide on two surfaces up and down of described piezoelectric vibrator
Not being provided with multilayer piezoelectric ceramic, the side of described piezoelectric vibrator is provided with pottery contact, wherein:
Interior electrode, described multilamellar it is provided with between every layer of described multilayer piezoelectric ceramic and on inner surface
Being provided with external electrode in the outmost surface of piezoelectric ceramics, the interior electrode of described multilayer piezoelectric ceramic uses also
The mode of connection connects, and is connected with described external electrode；
Described multilayer piezoelectric ceramic on two surfaces up and down of described piezoelectric vibrator is respectively divided into four electricity
Polar region, through-thickness polarizes, and the polarised direction of adjacent two electrode districts is contrary；
Four electrode districts on two surfaces up and down of described piezoelectric vibrator are symmetrical and line and adding electrically
Unanimously, be positioned at the same face adjacent two electrode districts add the most contrary；
The multilayer piezoelectric ceramic on two surfaces up and down of described piezoelectric vibrator is tubulose integrative-structure, by thing
First formed by banding piezoelectric ceramic film continuous crisping and the high temperature sintering of a lot of electrode district；Or, institute
Stating piezoelectric vibrator and also include that upper and lower two surfaces are the metal circular tube of plane, described multilayer piezoelectric ceramic is
Laminated structure and being arranged on two surfaces up and down of described metal circular tube, described metal circular tube is hollow
Structure, the surface of described metal circular tube has rectangular channel；Or, described piezoelectric vibrator also includes gold
Belonging to Rectangular shell, described multilayer piezoelectric ceramic is laminated structure and is arranged on the upper and lower of described metal rectangular shell
On two surfaces, described metal rectangular shell is hollow structure.
Piezoelectric vibrator the most according to claim 1, it is characterised in that described multi-layer piezoelectric is made pottery
Four electrode districts of porcelain are uniformly distributed by matts mode, and the number of plies of described multilayer piezoelectric ceramic is at least
5 layers, the quantity of described pottery contact is 2 and is arranged in two ends of described piezoelectric vibrator.
3. a precision displacement platform, is provided with piezoelectric vibrator, it is characterised in that described pressure
Electric tachometer indicator is the piezoelectric vibrator described in claim 1 or 2；Described precision displacement platform includes upper platform body
And lower platform body, wherein:
Described upper platform body and lower platform body are connected by crossed roller guide rail；
The side of described upper platform body is provided with aluminium oxide ceramics bar, and phase the same side of described lower platform body is arranged
Have putting part, described piezoelectric vibrator to be positioned at described putting part, the ceramic contact of described piezoelectric vibrator with
Described aluminium oxide ceramics bar contacts；
The Flexible clamp clamping described piezoelectric vibrator along its length it is provided with in described putting part, described
The length direction two ends of Flexible clamp are provided with disc spring.
Precision displacement platform the most according to claim 3, it is characterised in that described elastic clip
It is provided with spring between side, long limit and the described putting part of son.
Precision displacement platform the most according to claim 4, it is characterised in that described putting part
On be provided with for regulation longitudinal pretightning force of described piezoelectric vibrator and/or the regulation of horizontal pretightning force
Device.
6., according to the precision displacement platform described in any claim in claim 3 to 5, it is special
Levying and be, described piezoelectric vibrator is provided with locating dowel in the side contrary with described pottery contact, described
Flexible clamp is provided with hole, location in the position corresponding with described locating dowel.
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| CN105071687B (en) * | 2015-08-24 | 2017-03-08 | 苏州大学张家港工业技术研究院 | The stick-slip with sidepiece frictional force guiding mechanism drives across yardstick precisely locating platform |
| CN106953540B (en) * | 2016-01-07 | 2019-07-26 | 北京派和智能装备技术有限公司 | Piezoelectric vibrator, driver and micropositioner including the piezoelectric vibrator |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN109088564B (en) * | 2018-06-20 | 2019-12-27 | 长春工业大学 | Piezoelectric micro-nano clamping and positioning adjusting device and using method thereof |
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| CN100514832C (en) * | 2004-12-24 | 2009-07-15 | 清华大学 | Piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor |
| CN102185096B (en) * | 2011-04-02 | 2013-11-06 | 北京大学 | Piezoelectric actuator and linear piezoelectric motor |
| US8796906B2 (en) * | 2011-12-06 | 2014-08-05 | Seiko Epson Corporation | Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot |
| CN102664552A (en) * | 2012-05-10 | 2012-09-12 | 南京航空航天大学 | Double drive-feet rectangular piezoelectric plate type linear ultrasonic motor |
| CN103259449B (en) * | 2013-04-22 | 2016-08-03 | 北京大学 | Piezoelectric actuator and piezo-electric motor |
| CN204068758U (en) * | 2014-07-25 | 2014-12-31 | 北京派和科技股份有限公司 | Piezoelectric vibrator and comprise the precision displacement platform of this piezoelectric vibrator |
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