CN107834893A - The plane ultrasonic motor and its working method of diesis manifold type piezoelectric vibrator similar shape mode driving - Google Patents
The plane ultrasonic motor and its working method of diesis manifold type piezoelectric vibrator similar shape mode driving Download PDFInfo
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- CN107834893A CN107834893A CN201711119607.1A CN201711119607A CN107834893A CN 107834893 A CN107834893 A CN 107834893A CN 201711119607 A CN201711119607 A CN 201711119607A CN 107834893 A CN107834893 A CN 107834893A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
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Abstract
The present invention relates to a kind of plane ultrasonic motor based on the driving of diesis manifold type piezoelectric vibrator similar shape bending vibration modes, the motor is made up of vibrator component, mover assembly and mounting assembly.Diesis coupling configuration is presented in the agent structure of vibrator component, and it is screwed on mounting assembly, between the riser of both sides on mounting assembly, within two pieces of slide plates in mover assembly, by driving foot connection mover assembly.Mover assembly is mainly made up of upper and lower two pieces of slide plates, and two slide plates connect eight driving foots in vibrator component upper and lower surface respectively.Mounting assembly is connected with vibrator component by spacer blocks and is fixed by the screw at bottom plate corner.Motor synthesizes edge on the vertical pole of vibrator component and the driving foot of cross bar respectively using the resonance of the three-phase mode such as bending vibration in bending vibration in the face external symmetry bending vibration of vibrator component, vertical pole face, cross bar facexOz、yOzThe two-phase elliptical orbit that face is advanced, motor promote mover assembly edge using two-phase elliptical orbit and by the friction coupling between vibrator component and mover assemblyx、yTo sliding, and realize the plane motion of motor and make it have precise motion and fast response characteristic.Motor promotes mover using multiple driving foots, can increase exponentially out force density, speed and make its operation more stable.
Description
Technical field
The present invention relates to the plane ultrasonic electricity that a kind of similar shape bending vibration modes using diesis manifold type piezoelectric vibrator drive
Machine, belong to ultrasound electric machine and planar motor technical field.
Technical background
Ultrasound electric machine is that one kind excites elastomer ultrasonic vibration a little using piezoelectric inverse piezoelectric effect, by elastomer
Friction coupling effect between mover and drive mover to produce a kind of new type power part controllable, that macro-mechanical can be used to move.
It has that power density is big, response is fast, small-size light-weight, flexible structure, does not produce mechanical noise, electromagnetic compatibility and cuts off self-lock
Series of advantages, there is wide application prospect in various fields such as high-end manufacturing equipment, IC photoetching, cell manipulation, fine chemistry industries.
Ultrasound electric machine has a variety of motor types such as rotary-type, linear pattern, plane, multiple degrees of freedom type.In recent years, in order to preferably meet
Miniature precision drives application demand, in the world many developments in science and technology in the high-precision pointed collar domain such as Aero-Space, precision and ultra-precision machining
National numerous and confused input huge fund and a large amount of manpowers are endeavoured to carry out rotary-type, linear type ultrasound motor research, achieve important breakthrough.Can
To say, rotary-type and linear type ultrasound motor technology now is ripe day by day, and particularly electric rotating machine has stepped into industry metaplasia
Production and application.In contrast, but because it is internal there are complicated kinematics, dynamics, electromechanical coupling characteristics in plane ultrasonic motor
And its internal technology conflict is increased sharply, and make its accurate mathematical modeling difficult, in addition this kind of motor in driving uniformity and
No small difficult and challenge in terms of motion control all be present, its experience to designer improves high requirement.Everything is caused
Plane ultrasonic motor technology so far lags behind rotation and linear ultrasonic motor significantly.However, it is contemplated that plane ultrasonic electricity
Machine is driven in high-end numerical control equipment, IC manufactures, fine assembling, raw doctor's operation, biochip make, micro switch control, big intensity
Printed substrate multi pack exists with putting numerous two/three-dimensional planar positioning requirements occasions for having accurate ultra such as crystalline substance, fiber alignment
The motor for other patterns is difficult to the advantage substituted and application prospect, therefore carries out plane ultrasonic motor research in a deep going way and just become very
It is necessary.
Up to the present, educational circles has also marginally carried out plane ultrasonic motor research and has correspondingly been proposed some motor samples
Machine, such as, Korean HONG is by encouraging the one of the square plate oscillator being made up of stainless steel and piezoelectric ceramic piece vertical, four curved mode conjunctions
A kind of planar motor is developed into two-phase ellipse, its translational speed is 100mm/s.But the motor assist device is more and it is tied
Structure is complicated；When ship a kind of mast formula planar motor, motor speed 190 developed based on the orthogonal quadravalence bending vibration of bar of variable cross-section two-phase
Mm/s, the N of thrust 19；Chen Weishan develops the high-speed plane motor of piezoelectricity amplitude transformer driving, and its speed reaches 960mm/s；Li Chao
The planar motor of square frame-shaped construction driving is released in east, and the mover of the motor can be along the diagonal motion of square frame two, but motor power is not
Greatly；Jin Jiamei develops a kind of rod-type planar motor, speed 145mm/s, and thrust is 4.3 N.From having released motor conditions
See, the pattern of existing plane ultrasonic motor is also extremely limited, and their performance is from being widely applied also larger gap.Although such as
This, the advantage of such motor is but more and more paid close attention to constantly showing and caused many scholars and industry both at home and abroad.
It is adapted to this background, and aims at current advanced manufacture and the multi-field great demand of the national economic development, it is flat preferably to promote
The development of face Ultrasonic Motor Techniques, the present invention propose a kind of plane ultrasonic electricity of diesis shape manifold type oscillator similar shape mode driving
Machine.It yet there are no other motors that there is similar principles and structure with the present invention both at home and abroad so far.
The content of the invention
The purpose of the present invention is proposing bending vibration, vertical pole in a kind of cross bar face using diesis manifold type metallic elastic structure
The plane ultrasonic motor that the three-phase bending vibration modes such as bending vibration and face external symmetry bending vibration drive in face, the movement position of the motor are differentiated
Rate can reach micron order, have Millisecond response speed, can produce the higher speed of service, can export compared with high thrust, be worked in plane
Wide application prospect be present in the application such as the positioning of device precise motion, microminiature servo actuator precision actuation.
In view of above-mentioned purpose, the present invention uses following technical scheme：Including vibrator component, mover assembly and mounting assembly,
Characterized in that, the mover assembly is made up of upper slide, lower skateboard and column；The mounting assembly by bottom plate, riser, every
Plate, strip contiguous block and ball are formed；The vibrator component between mounting assembly and mover assembly, by its upper surface and
Driving foot on lower surface connects the upper slide and lower skateboard of mover assembly respectively, and with mode connects for screw to mounting assembly；Institute
Mounting assembly is stated to connect mover assembly by the ball in its bottom plate and connect vibrator component by spacer blocks.
The vibrator component includes diesis shape matrix and Piezoelectric Ceramics Excitation component.Diesis shape matrix is by two block structures
Identical four-bladed vane is formed by connecting by middle brace rod, and two four-bladed vanes are by two geomery identical cross bars, vertical pole structures
Into the both ends of middle brace rod are provided with screwed hole and are used for two four-bladed vanes of connection.Piezoelectric Ceramics Excitation component is by curved in vertical pole face
Excitation of shaking is ceramic, bending vibration encourages bending vibration excitation ceramics outside ceramic, face to form in cross bar face, and these piezoelectric ceramic pieces are pasted on respectively
Vertical pole two sides, cross bar both sides on two cross metallic plates, and the front of cross bar, vertical pole and reverse side.In each cross bar, vertical pole
End is equipped with driving foot, and the height of each driving foot exceeds the thickness of bending vibration excitation potsherd outside face, particularly, upper ten
The upper slide of the positive driving foot connection mover assembly of letter stencil, the downslide of the driving foot connection mover assembly of lower cross back
Plate.
The mover assembly includes upper slide, lower skateboard and column, and its two slide plates are respectively with mode connects for screw to column two
End, upper slide and lower skateboard connect the driving foot on the four-bladed vane upper surface of upper strata and the driving on lower floor's four-bladed vane lower surface respectively
Foot, lower skateboard form rolling pair by ball connects bearing component.
The mounting assembly includes riser, cover plate, bottom plate, spacer blocks, strip contiguous block, ball and disc spring, two risers
It is connected to strip contiguous block both ends and is screwed in bottom plate both sides；Strip contiguous block is connected by screw spacer blocks, dividing plate
Front and rear sides be provided with stator installation screwed hole to fixed vibrator component；Disk spring is pressed between cover plate and bottom plate, on cover plate
Ball grooves are opened up to accommodate ball, ball with lower skateboard a little contact；Bottom plate is in four edge mode connects for screw in base
On.
The plane ultrasonic motor of the diesis manifold type piezoelectric vibrator similar shape mode driving, it is characterised in that：It is to shake
Bending vibration modes in the face external symmetry bending vibration modes of sub-component, vertical pole face, bending vibration modes are as operation mode in cross bar face, by swashing
The resonance of three-phase mode is sent out, the vertical pole of two four-bladed vanes, cross bar drive and be respectively synthesized out edge on foot above and below diesis shape matrixxOz、yOzThe elliptical orbit that face is advanced, to promote mover assembly to do plane motion.In the vibration of three-phase operation mode, face external symmetry
Bending vibration realizes dynamic Contact between mover assembly and vibrator component with separating, bending vibration in vertical pole face, bending vibration difference in cross bar face
Drive mover assembly edgexXiang HeyTo motion；
The face external symmetry bending vibration modes vibration is excited using inverse piezoelectric effect.When motor works, bending vibration swashs outside opposite
Encourage piezoelectric ceramics and apply specific simple-sinusoidal voltage, the horizontal stroke excited on the four-bladed vane of vibrator component two, vertical pole generation face external symmetry is curved
Mode Shape of shaking is moved, and causes vertical pole, cross bar to vibrate in the opposite direction, so that driving foot on vertical pole, cross bar alternately with moving
Sub-component is contacting and separating.
Bending vibration modes vibration excites also with inverse piezoelectric effect in the vertical pole face.When motor works, to vertical pole
On face in apply specific simple-sinusoidal voltage on bending vibration excitation piezoelectric ceramics, two vertical poles cross plate face interior edge residing for respective will be madexTo same phase flexural vibrations are done, so as to drive vertical pole driving foot to promote mover assembly edgexTo sliding；
Bending vibration modes vibration is equally excited using inverse piezoelectric effect in the cross bar face.When motor works, on cross bar
Face in apply specific simple-sinusoidal voltage on bending vibration excitation piezoelectric ceramics, two cross bars cross plate face interior edge residing for respective will be madeyDo
With phase flexural vibrations, cross bar driving foot is driven to promote mover assembly edgeyTo sliding.
The major technique effect of the present invention is：1. planar motor rotor is driven using diesis manifold type piezoelectric vibrator,
Motor can be made to realize that precision plane moves, the repetitive positioning accuracy of motor can reach micron, submicron order；2. motor is using double ten
Word formula oscillator pushes directly on mover, avoids caused kinematic error, big inertia when being moved using linear electric motors composite plane
And structural complexity, motor response speed and efficiency can be improved；3. motor promotes mover using polypody synchronous driving mode, can be big
The big motor that improves goes out force density and operation stability.4. electric mover is because upper and lower two slide plate promotes simultaneously, therefore can be into multiplication
Big motor power.
Brief description of the drawings：
Fig. 1 is that the three-dimensional mounting structure of plane ultrasonic motor of the present invention is shown；
Fig. 2 is the structure composition schematic diagram of vibrator component in the present invention；
Fig. 3 is the structure composition schematic diagram of mover assembly in the present invention；
Fig. 4 is the structure composition schematic diagram of mounting assembly in the present invention；
Fig. 5 is the schematic diagram of bending vibration operation mode in the cross bar face of plane ultrasonic motor of the present invention；
Fig. 6 is the schematic diagram of bending vibration operation mode in the vertical pole face of plane ultrasonic motor of the present invention；
Fig. 7 is the schematic diagram one of the face external symmetry bending vibration operation mode of plane ultrasonic motor of the present invention；
Fig. 8 is the schematic diagram two of the face external symmetry bending vibration operation mode of plane ultrasonic motor of the present invention；
Fig. 9 is the position of piezoelectric ceramics and its piezoelectric polarization and power supply configuration diagram one in motor of the present invention；
Figure 10 is piezoelectric ceramics position and its piezoelectric polarization and power supply configuration diagram two in motor of the present invention；
Figure 11 is that diesis piezoelectric vibrator promotes mover to do the first step of plane motion within a vibration period；
Figure 12 is that diesis piezoelectric vibrator promotes mover to do the second step of plane motion within a vibration period；
Figure 13 is that diesis piezoelectric vibrator promotes mover to do the 3rd step of plane motion within a vibration period；
Figure 14 is that diesis piezoelectric vibrator promotes mover to do the 4th step of plane motion within a vibration period.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples：
As shown in Figures 1 to 4, the plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving, including oscillator group
Part 1, mover assembly 2 and mounting assembly 3.The vibrator component 1 is made up of diesis matrix 11 and piezo ceramic element 12, and it is special
Sign is that its diesis matrix 11 is made up of two physical dimension identical four-bladed vanes 111,112 and connecting rod 113, even
The both ends auger shell pit 114 of extension bar 113, four-bladed vane 111,112 is respectively with screw attachment in the both ends of connecting rod 113；Four-bladed vane 111 by
Cross bar 1111, vertical pole 1112 are formed, and four-bladed vane 112 is then made up of cross bar 1121, vertical pole 1122；Cross bar 1111,1121, vertical pole
1112nd, 1122 be square strip, 4 driving foots 115 be set in cross bar 1111, the upper surface of vertical pole 1112, cross bar 1121,
The lower surface of vertical pole 1122 is equally provided with 4 driving foots 115；It is wear-resisting that the top surface of each driving foot 115 is coated with big coefficient of friction
Material, two groups of driving foots 115 connect upper slide and lower skateboard on mover assembly 2 respectively.
The piezo ceramic element 12 includes the outer bending vibration excitation ceramics 121 in face, in vertical pole face bending vibration excitation ceramic 122 and
Bending vibration excitation ceramics 123 in cross bar face.Bending vibration excitation ceramics 121 are made up of 16 piezoelectric ceramic pieces outside face, these potsherds point
Front and the reverse side of four-bladed vane 111,112 are not pasted on；Bending vibration excitation ceramics 122 are then by 8 piezoelectric ceramic piece groups in vertical pole face
Into, and vertical pole 1112,1122 two sides are pasted on respectively；Bending vibration excitation ceramics 123 are also by 8 piezoelectric ceramic piece groups in cross bar face
Into they are respectively adhered on cross bar 1111,1121 two sides.
The mover assembly 2 includes upper slide 21, lower skateboard 22, column 23, wherein, column 23 is in square strip.In column
Preloading spring bolt 24 is set between 23 and upper slide 21, upper slide 21, lower skateboard 22 are can adjust using the preloading spring bolt 24
Between distance, reach regulation vibrator component 1 and mover assembly 2 between precompression purpose；Upper slide 22 is connected by screw column
23 upper ends, upper slide 21 connect the driving foot 115 of the upper surface of four-bladed vane 111, and lower skateboard 22 is connected by screw under column 23
End, lower skateboard 22 connect the driving foot 115 of the lower surface of four-bladed vane 112.
The mounting assembly 3 include riser 31, bottom plate 32, cover plate 33, spacer blocks 34, ball 35, strip contiguous block 36 and
Disc spring 37；Two pieces of risers 31 are connected to the both ends of strip contiguous block 36 and are screwed in the both sides of bottom plate 32；Strip contiguous block 36
Spacer blocks 34 are connected by screw, the front and rear sides of spacer blocks 34 is equipped with stator installation screwed hole 341, to fix oscillator group
Part 1；Disc spring 37 has been pressed between cover plate 33 and bottom plate 32, ball grooves have also been opened up on cover plate 33 to accommodate ball 35, ball 35 is with
Slide plate forms point contact, and counter sink is provided with the center of cover plate 33；Screwed hole is set at the center of bottom plate 32, bottom plate 32 is in four edges
Base is connected to screw 38.
The plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving, with the face of vibrator component 1 outside
Bending vibration in symmetrical bending vibration, vertical pole face, the mode such as bending vibration is as operation mode in cross bar face, then by exciting operation mode during work
Vibrate and utilize vibration coupling, edge is respectively synthesized out on the driving foot 115 of vibrator component 1xOz、yOzThe oval rail that face is advanced
Mark, promote the edge of mover assembly 2x、yTo motion.In described three-phase operation mode vibration, face external symmetry bending vibration realizes mover assembly
2 with the dynamic Contact of vibrator component 1 with separating；Bending vibration in vertical pole face, bending vibration promotes the edge of mover assembly 2 respectively in cross bar facexTo,yMoved to sliding.
The face external symmetry bending vibration modes vibration is encouraged using inverse piezoelectric effect.When motor works, bending vibration outside opposite
Excitation ceramics 121 are passed through harmonic excitation voltage, and mover assembly 1 will be excited to do the vibration of face external symmetry bending vibration modes and make vertical pole
1112nd, method of the cross bar 1111 along four-bladed vane 111（Orz）To vibration, so that the driving foot 115 and upper slide 21 of four-bladed vane 111
Dynamic Contact is with separating, and because vertical pole 1112 and the normal vibration direction of cross bar 1111 are just on the contrary, therefore vertical pole 1112, cross bar 1111
On driving foot 115 alternately will contact with upper slide 21.In addition, the face external symmetry bending vibration modes vibration of mover assembly 1 also makes to indulge
Bar 1122, cross bar 1121 are along the method for four-bladed vane 112（Orz）To vibration, and make the driving foot 115 of four-bladed vane 112 and lower skateboard 22 dynamic
State is contacted with separating, similarly because vertical pole 1122 and the normal vibration of cross bar 1121 are in opposite direction, therefore vertical pole 1122, cross bar 1112
Driving foot 115 also will be contacted alternately with lower skateboard 22.
Bending vibration modes vibration is to enter row energization using inverse piezoelectric effect in the vertical pole face.When motor works, to vertical pole
Bending vibration excitation ceramics 122 are passed through harmonic excitation voltage in face, and mover assembly 1 will be excited to do the vibration of vertical pole bending vibration modes, make vertical pole
1112nd, vertical pole 1122 is in respective residing cross plate face interior edgexTo vibration, so that the driving foot 115 on this two bar promotes respectively
Upper slide 21, the edge of lower skateboard 22xTo sliding in the same direction.
Bending vibration modes vibration is same in the cross bar face enters row energization based on inverse piezoelectric effect.When motor works, to cross bar
Bending vibration excitation ceramics group 123 is passed through harmonic excitation voltage in face, and the vertical pole bending vibration modes that do for exciting mover assembly 1 are vibrated, made
Cross bar 1111, cross bar 1121 are in respective residing cross plate face interior edgeyTo vibration, so that two bars driving foot 115 promotes respectively
Slide plate 21, the edge of lower skateboard 22yTo sliding in the same direction.
Embodiment：The plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving of the present invention, including oscillator
Component 1, mover assembly 2 and mounting assembly 3, referring to Fig. 1 to Fig. 4.The ball 35 that mounting assembly 3 is installed by it on cover plate 33
Connect the lower skateboard 22 of mover assembly 2 and form rolling friction pair；Vibrator component 1 is located between two risers of mounting assembly 3, is situated between
Connection is dynamic respectively within the upper slide 21 and lower skateboard 22 of mover assembly 2, and by the driving foot 115 thereon, at lower surface
The upper slide 21 and lower skateboard 22 of sub-component 2；Vibrator component 1 passes through the connects bearing component 3 of screw 343.
As shown in Figure 1 and Figure 2, the vibrator component 1 includes diesis matrix 11 and piezo ceramic element 12, wherein, double ten
Word matrix 11 is made up of the identical four-bladed vane 111,112 of two physical dimensions and connecting rod 113, in 113 liang of connecting rod
End machined screwed hole 114, and four-bladed vane 111,112 is respectively with mode connects for screw at the both ends of connecting rod 113 placed vertically；Four-bladed vane
111st, four-bladed vane 112 is made up of square shape column shape cross bar 1111, vertical pole 1112 and cross bar 1121, vertical pole 1122 respectively；It is double
Through hole is opened up at the center of cross matrix 11 to realize its fixation with holder assembly 3.
The piezo ceramic element 12 encourages bending vibration excitation ceramics 122, horizontal stroke in ceramic 121, vertical pole face including bending vibration outside face
Bending vibration excitation ceramics 123 in pole face, these ceramics are respectively adhered on the positive and negative of four-bladed vane 111,112, vertical pole 1112,1122
Arranged on left and right sides face and cross bar 1111,1121 upper and lower faces.It is equal in the upper surface of four-bladed vane 111, the lower surface of four-bladed vane 112
Driving foot 115 is set, and driving 115 height of foot are more than the thickness of piezoelectric ceramic piece 12；It is placed in the positive and negative of diesis matrix 11
Driving foot 115 connects mover assembly upper slide 21, lower skateboard 22 respectively, and makes lower skateboard 22, upper slide 21 synchronous for driving
It is mobile；The top of driving foot 115 is coated with big coefficient of friction high-abrasive material such as Kynoar base frication material etc. to increase driving
Foot 115 and the friction drive between upper slide 21, lower skateboard 22, to improve motor thrust and service life.
As shown in Figure 1, Figure 3, the mover assembly 2 is made up of upper slide 21, lower skateboard 22, column 23, upper slide 21, under
Slide plate 22 is square plate, is connected between upper slide 21, lower skateboard 22 by column 23；Preloading spring is also equipped with upper slide 21
Bolt 24, the effect of preloading spring are to adjust distance between upper slide 21, lower skateboard 22.Column 23 is connected by screw downslide
Plate 22；Upper slide 21, lower skateboard 22 connect the driving foot 115 on the positive and negative two sides of vibrator component 1 respectively；Lower skateboard 22 passes through
The connecting cover plate 33 of ball 35, and vibrator component 2 is formed rolling pair with mover assembly 2 and be connected.
As Figure 1 and Figure 4, the mounting assembly 3 include riser 31, bottom plate 32, cover plate 33, spacer blocks 34, ball 35,
Strip contiguous block 36 and disc spring 37, the both sides above bottom plate 32 are connected by screw riser 31, and strip contiguous block 36 passes through screw
311st, both sides riser 31 is connected by screw 342 with the spacer blocks 34 of centre, and spacer blocks 34 are in square frame-shaped, spacer blocks 34 it is forward and backward
Screwed hole 341 is provided with the center of both sides, by screw 343 connect at the center of vibrator component 1 connecting rod 113 screwed hole 114 and, with
Realize the fixation of vibrator component 1；In cover plate 33 the built-in ball of ball recess groove is simultaneously provided with towards this of lower skateboard 22
35, ball 35 forms rolling pair with lower skateboard 22；Disc spring 37 is installed between cover plate 33 and bottom plate 32.By adjusting disc spring 37
The adjustable precompression between vibrator component 1 and mover group of tightness.
As shown in Fig. 5 ~ Fig. 8, plane ultrasonic motor of the invention excites the three-phase of vibrator component 1 using piezo ceramic element 12
The resonance or Near resonance oscillating of certain vibration operation mode, drive the front of four-bladed vane 111,112 for being placed in vibrator component, the drive on reverse side
The edge respectively of action spot 115xOz、yOzElliptic motion is done in face, and then by driving foot respectively with the upper slide 21 of mover assembly 2 and gliding
Friction coupling between plate 22, promote upper slide 21 and the edge of lower skateboard 22x、yTo sliding, to promote mover assembly 2 to put down
Move in face.Described three-phase vibration operation mode includes two vertical poles 1112 of diesis matrix 11, vertical pole 1122 along respective place
Bending vibration modes, cross bar 1111, cross bar 1121 the bending vibration mould along respective place cross plate face cross bar face in the vertical pole face of cross plate face
State and the face external symmetry bending vibration modes along two cross plate face normal direction, wherein face external symmetry bending vibration modes vibration realizing mover assembly 2
Dynamic Contact is with separating between vibrator component 1, and bending vibration modes in vertical pole face, bending vibration modes then realize driving respectively in cross bar face
The edge of mover assembly 2x、yTo the driving of motion.
In order to synthesize edge on driving footxOz、yOzFace traveling elliptical orbit, it is desirable to the three-phase Working mould of vibrator component 1
The intrinsic frequency of state as close possible to or it is equal, and to prevent from producing excessive mechanical noise when motor from working, especially for
Motor is set to export larger speed, it is necessary to make three-phase modal frequency by reasonably configuring the physical dimension of vibrator component 1
Reach unanimity and be in ultrasonic frequency domain.
As shown in Fig. 5 ~ Fig. 8, the piezo ceramic element 12 encourages bending vibration in ceramic 121, vertical pole face to swash by bending vibration outside face
Ceramic 123 grade, the three groups of potsherds of bending vibration excitation in ceramics 122 and cross bar face are encouraged to form.Piezo ceramic element 12 includes 32 height altogether
Performance PZT8 piezoelectric ceramic pieces, the polarised direction of each potsherd are each perpendicular to its sticking veneer.Three groups of piezoelectric ceramic pieces are respectively used to
Encourage bending vibration outside vibrator component 1 face, bending vibration in vertical pole face, the three-phase operational vibration mode such as bending vibration in cross bar face.
As shown in Fig. 5 ~ Fig. 8, bending vibration excitation ceramics 121 include 16 high performance piezoelectric potsherds outside the face, these potteries
Ceramics is respectively adhered on the positive and back side of four-bladed vane 112 of four-bladed vane 111 and is installed in cross bar 1111, cross bar 1121, vertical pole
1112nd, at each crest and trough of the face external symmetry bending vibration operation mode vibration shape of vertical pole 1122.
As shown in Fig. 5 ~ Fig. 8, bending vibration excitation ceramics 122 are made up of 8 high performance piezoelectric potsherds in the vertical pole face, this
A little potsherds are respectively adhered on the arranged on left and right sides face of vertical pole 1112 and vertical pole 1122, and are separately mounted to vertical pole 1112, vertical pole
1122 at 4 crests of the second order bending vibration vibration shape in face and 4 troughs.
As shown in Fig. 5 ~ Fig. 8, bending vibration excitation ceramics group 123 is made up of 8 high performance piezoelectric potsherds in the cross bar face,
They are respectively adhered on cross bar 1111, the front and rear sides of cross bar 1121, and be separately mounted to cross bar 1111, cross bar 1121 is in face
At interior 4 crests of the second order bending vibration vibration shape and 4 troughs.
As shown in Fig. 5 ~ Figure 10, in order to inspire the vibration of the face external symmetry bending vibration operation mode of vibrator component 1, need outside opposite
Bending vibration excitation ceramics 121 carry out rationally polarization power supply configuration, are required for this：Be pasted onto the front of vertical pole 1112, the reverse side of vertical pole 1122,
Cross bar 1121 is positive, the edge of bending vibration excitation ceramics 121 deviates from its sticking veneer direction polarization outside the face of the reverse side of cross bar 1111；It is pasted onto
The reverse side of vertical pole 1112, vertical pole 1122 are positive, cross bar 1111 is positive, bending vibration excitation ceramics organize 121 then outside the reverse side of cross bar 1121 face
Along its sticking veneer direction polarization of sensing；It is also required that each potsherd and the electrode that vibrator component diesis matrix 11 bonds are equal
Ground connection, it then needs to be passed through cosine driving voltage away from the electrode of diesis matrix 11。
As shown in fig. 5-10, vibrate, need to effectively inspire bending vibration operation mode in the vertical pole face of vibrator component 1
The configuration that reasonably polarizes and power is carried out to bending vibration excitation ceramics 122 in vertical pole face.For this require, it is all be placed in vertical pole 1112,
Bending vibration encourages ceramics 122 along the direction polarization of diesis matrix 11 is pointed to, to be placed in vertical pole 1112, indulge in the face in the left side of vertical pole 1122
Bending vibration excitation ceramics 122 then need edge to deviate from the direction polarization of diesis matrix 11 in the face on the right side of bar 1122.Furthermore it is required that outside face
The electrode that each potsherd bonds with diesis matrix 11 in bending vibration excitation ceramics 121 is grounded, and it is away from diesis matrix 11
Electrode then needs to be passed through sinusoidal excitation voltage。
As shown in fig. 5-10, vibrate, need to effectively inspire bending vibration operation mode in the cross bar face of vibrator component 1
Rationally polarization power supply configuration is carried out to bending vibration excitation ceramics 123 in cross bar face.Required for this, it is all to be placed in cross bar 1111, cross bar
Bending vibration excitation ceramics 123 are placed in cross bar 1111, cross bar along the direction polarization of diesis matrix 11 is pointed in the face of 1121 front sides
Then edge deviates from the direction polarization of diesis matrix 11 to bending vibration excitation ceramics 123 in the face of 1121 rear sides.Furthermore it is required that cross bar outside face
The electrode that each potsherd bonds with diesis matrix 11 in bending vibration excitation ceramics 123 is grounded, and it is away from diesis matrix 11
Electrode is then passed through sinusoidal excitation voltage。
As shown in figures 11-14,115 edges of driving footxOzFace,yOzThe two-phase elliptical orbit of traveling, it is in oscillator group
Phase difference is passed through on part as 90oThree same frequency simple-sinusoidal voltages, after the three-phase operation mode for having inspired stator, pass through face excurvation
Vibration respectively with the vibration coupling of bending vibration in bending vibration in vertical pole face, cross bar face and formed.If by a vibration period of statorT
It was divided into for four periods, then elliptical orbit is formed then via the following four stage：
Such as Figure 11（Step 1）, 0 ~TIn/4 periods, bending vibration in the face external symmetry bending vibration of vibrator component 1, vertical pole face, make vertical pole
1112 are deformed into outside face zero curved state in maximum curved, face by maximum right curved state in outside face zero curved, face, cause the drive on vertical pole 1112
Action spot 115 keeps contacting with upper slide 21, and makes driving foot 115 by B1 rows to B2, so as to promote the edge of mover assembly 2xTo movement
One step；At the same time, the face external symmetry bending vibration of vibrator component 1, bending vibration in cross bar face, then make cross bar 1111 by outside face zero curved, face
Interior maximum palintrope state is deformed into outside face under maximum zero curved state in curved, face, the foot of the driving on cross bar 1,111 115 is not connect with upper slide
Touch and by A1 rows to A2.
Such as Figure 12（Step 2）,T/4~TIn/2 periods, bending vibration in the face external symmetry bending vibration of vibrator component 1, vertical pole face,
Vertical pole 1112 is set to cause vertical pole 1112 by zero curved state is deformed into outside face maximum left curved state in zero curved, face in maximum curved, face outside face
On driving foot 115 keep contacting with upper slide 21, and make driving enough 115 by B2 rows to B3, so as to promote the edge of mover assembly 2x
Xiang Zaiyi is further；At the same time, the face external symmetry bending vibration of vibrator component 1, bending vibration in cross bar face, then make cross bar 1111 by face outside
Zero curved state is deformed into outside face maximum antecurvature state in zero curved, face in curved under maximum, face, make to drive on cross bar 1111 foot 115 still not with
Upper slide contacts and by A2 row to A3.
Such as Figure 13（Step 3）,T/2~3TIn/4 periods, bending vibration in the face external symmetry bending vibration of vibrator component 1, vertical pole face,
Vertical pole 1112 is deformed into outside face under maximum zero curved state in curved, face by maximum left curved state in outside face zero curved, face, make vertical pole 1112
Driving foot 115 disengages and by B3 rows to B4 with upper slide 21；At the same time, the face external symmetry bending vibration of vibrator component 1, cross bar
Bending vibration in face, then cross bar 1111 is set by maximum antecurvature state in outside face outer zero curved, face to be deformed into outside face in maximum curved, face zero curved
State, cause the foot of the driving on cross bar 1,111 115 to be contacted with upper slide and make driving foot 115 by A3 rows to A3, so as to promote mover
The edge of component 2yTo sliding a step；
Such as Figure 14（Step4）, 3T/4~TIn period, bending vibration in the face external symmetry bending vibration of vibrator component 1, vertical pole face, make vertical pole
1112 are deformed into outside face maximum right curved state in zero curved, face by zero curved state in curved, face under maximum outside face, make the driving foot of vertical pole 1112
115 do not contact still with upper slide 21 and by B4 rows to B1；At the same time, face external symmetry bending vibration, bending vibration in cross bar face, then make cross bar
1111, by zero curved state is deformed into outside face maximum palintrope state in zero curved, face in maximum curved, face outside face, make the driving foot of cross bar 1111
115 still keep contacting and by A4 rows to A1, promote the edge of mover assembly 2 with upper slide 21yXiang Zaiyi is further.
As shown in Figure 11 ~ Figure 14, vibrator component 1 often completes a vibration periodT, the driving foot 115 of vertical pole 1112 will be complete
Into the elliptical orbit via B1-B2-B3-B4, and the driving foot 115 of cross bar 1111 then completes the ellipse via A1-A2-A3-A4
Track, so as to promote the edge of mover assembly 2 respectivelyxXiang HeyTo being moved into two steps.When vibrator component 1 constantly repeats above-mentioned vibration cycles
When, it will just promote 21 continuous edge of upper slidexXiang HeyTo reach.If bending vibration in the outer bending vibration in the face of reverse and vertical pole face, in cross bar face
The lead-lag phase relation of the driving voltage of longitudinal vibration mode, then the direction of motion of mover assembly will take a turn for the worse.
As shown in Fig. 9 ~ Figure 14, due to the polarization and power supply of bending vibration excitation ceramics outside the face on vertical pole 1122 and vertical pole 1112
The situation contrast of configuration, therefore vertical pole 1122 is powered after excitation, bending vibration situation is just opposite with vertical pole 1112 outside its face；And because
The piezoelectric polarization of the both sides of vertical pole 1122 and power supply configuration are identical with the situation of vertical pole 1112, therefore bending vibration in the face of vertical pole 1122
It is also identical with vertical pole 1112, so, the travel track of the driving foot 115 of vertical pole 1122 and driving foot 115 on vertical pole 1112
Movement locus just on the contrary, this upper driving foot 115 with 1122 of vertical pole 1112 synchronously, is respectively promoted sliding
Plate 21 and the edge of lower skateboard 22xSliding, because upper slide 21 and lower skateboard 22 are fixedly connected, therefore 4 on two vertical poles driving foot
115 will promote mover assembly edge jointlyxTo motion, so as to be advantageous to increase the operation of the speed, power swallow raising motor of motor
Stability.Similarly, because of the situation of the polarization and power supply configuration of bending vibration excitation ceramics outside the face on cross bar 1121 and cross bar 1111
Contrast, therefore cross bar 1121 is powered after excitation, bending vibration situation is just opposite with cross bar 1111 outside its face；Again because of 1121 liang of cross bar
The piezoelectric polarization of side and power supply configuration are identical with the situation of vertical pole cross bar 1111, therefore bending vibration and cross bar in the face of cross bar 1121
1111 is identical, so, the motion rail of the travel track and driving foot 115 on cross bar 1111 of the driving foot 115 of cross bar 1121
Mark is just on the contrary, this just enables cross bar 1121, the driving foot 115 on cross bar 1111 synchronously, respectively promote the and of upper slide 21
The edge of lower skateboard 22ySliding, equally because upper slide 21 and lower skateboard 22 are fixedly connected, therefore 4 on two cross bars driving foot 115 will
It is common to promote mover assembly edgeyTo motion.
Claims (5)
1. a kind of plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving, including vibrator component, mover group
Part and mounting assembly, it is characterised in that the mover assembly is made up of upper slide, lower skateboard and column；The mounting assembly by
Bottom plate, riser, dividing plate, strip contiguous block and ball are formed；The vibrator component is led between mounting assembly and mover assembly
Cross in its upper and lower surface driving foot respectively connect mover assembly upper slide and lower skateboard, and with mode connects for screw to prop up
On holder assembly；The mounting assembly connects mover assembly by the ball in its bottom plate and connects vibrator component by spacer blocks.
2. the plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving according to claim 1, it is special
Sign is：The vibrator component includes diesis shape matrix and Piezoelectric Ceramics Excitation component, and diesis shape matrix is by two block structures
Identical four-bladed vane is formed by connecting by middle brace rod, and two four-bladed vanes are by two geomery identical cross bars, vertical pole structures
Into the both ends of middle brace rod are provided with screwed hole and are used for two four-bladed vanes of connection.
3. Piezoelectric Ceramics Excitation component encourages bending vibration in ceramic, cross bar face to encourage bending vibration outside ceramic, face to swash by bending vibration in vertical pole face
Ceramic composition is encouraged, these piezoelectric ceramic pieces are pasted on vertical pole two sides, cross bar both sides on two cross metallic plates respectively, and horizontal
Bar, the front of vertical pole and reverse side；Driving foot is equipped with the end of each cross bar, vertical pole, and the height of each driving foot exceeds
The thickness of bending vibration excitation potsherd outside face, particularly, the upper slide of the upper positive driving foot connection mover assembly of four-bladed vane, lower ten
The lower skateboard of the driving foot connection connection mover assembly at the letter stencil back side.
4. the plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving according to claim 1, it is special
Sign is：The mover assembly includes upper slide, lower skateboard and column, two slide plates respectively with mode connects for screw to column both ends, on
Slide plate and lower skateboard connect driving foot and according to claim 1 pair of lower floor's cross on the four-bladed vane upper surface of upper strata respectively
The plane ultrasonic motor of cross manifold type piezoelectric vibrator similar shape mode driving, it is characterised in that：The mounting assembly include riser,
Cover plate, bottom plate, spacer blocks, strip contiguous block, ball and disc spring, two risers are connected to strip contiguous block both ends and consolidated with screw
It is scheduled on bottom plate both sides；Strip contiguous block is connected by screw spacer blocks, and the front and rear sides of dividing plate is provided with stator installation screwed hole and used
To fix vibrator component；Disk spring is pressed between cover plate and bottom plate, ball grooves are opened up on cover plate to accommodate ball, ball is with gliding
Plate carries out a contact；Bottom plate is in four edge mode connects for screw bases.
5. a kind of plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving as claimed in claim 1, its
It is characterised by, selectes the face external symmetry bending vibration modes of vibrator component, bending vibration modes in vertical pole face, bending vibration modes are work in cross bar face
Make mode, and by inspiring the resonance effects of three-phase mode, be respectively synthesized out on the driving foot on the longitudinal and transverse bar of vibrator component
EdgexOz、yOzThe elliptical orbit that face is advanced, mover assembly edge is promoted accordinglyx、yTo movement；Described three-phase operation mode vibration
In, face external symmetry bending vibration realizes dynamic Contact between mover assembly and vibrator component with separating, bending vibration and cross bar face in vertical pole face
Interior bending vibration is then respectively used to promote mover assembly edgex、yTo sliding；
The face external symmetry bending vibration modes vibration is excited using inverse piezoelectric effect；When motor works, bending vibration encourages outside face
Piezoelectric ceramics applies specific simple-sinusoidal voltage, encourages horizontal stroke in the four-bladed vane of vibrator component two, vertical pole according to face external symmetry bending vibration mould
The vibration shape of state is moved, and vertical pole, cross bar is always vibrated in the opposite direction, so that the driving foot of vertical pole, cross bar is alternately
Contacted with mover assembly with being separated；
Bending vibration modes are excited using inverse piezoelectric effect in the vertical pole face；When motor works, bending vibration encourages in vertical pole face
Apply specific simple-sinusoidal voltage on piezoelectric ceramics, make two vertical poles in respective residing cross plate face interior edgexShaken to the bending for doing same phase
It is dynamic, drive vertical pole driving foot to promote mover assembly edgexTo movement；
Bending vibration modes are excited using inverse piezoelectric effect in the cross bar face；During motor operation, bending vibration encourages in cross bar face
Apply specific simple-sinusoidal voltage on piezoelectric ceramics, make two cross bars in respective residing cross plate face interior edgeyShaken to the bending for doing same phase
It is dynamic, drive cross bar driving foot to promote mover assembly edgeyTo movement.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108712104A (en) * | 2018-08-08 | 2018-10-26 | 吉林大学 | A kind of parasitic type piezoelectricity stick-slip driver |
| CN108705329A (en) * | 2018-08-22 | 2018-10-26 | 金陵科技学院 | Precision stage based on two degrees of freedom piezoelectric actuator and corresponding piezoelectric actuator |
| CN109079828A (en) * | 2018-08-24 | 2018-12-25 | 南京航空航天大学 | A kind of Piezoelectric Driving articulated robot arm refers to and its driving method |
| CN110299866A (en) * | 2019-07-29 | 2019-10-01 | 南昌航空大学 | The accurate piezoelectric straight line mobile platform and operation mode of frame structure driving |
| CN111193434A (en) * | 2020-02-24 | 2020-05-22 | 南京航空航天大学 | Rail carrying system based on sandwich type frame actuator and working method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102064660A (en) * | 2011-01-26 | 2011-05-18 | 麦伟仪 | Rotor structure of resonant type permanent magnet linear generator |
| CN102148586A (en) * | 2011-03-14 | 2011-08-10 | 南昌航空大学 | high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven |
| JP2013230057A (en) * | 2012-04-26 | 2013-11-07 | Sumida Corporation | Ultrasonic motor |
| JP2014057397A (en) * | 2012-09-11 | 2014-03-27 | Toyota Industries Corp | Ultrasonic motor |
| CN105006990A (en) * | 2015-07-16 | 2015-10-28 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof |
| CN106787933A (en) * | 2017-03-27 | 2017-05-31 | 武汉大学 | Based on planar motor and driving method that quasi- matrix pattern piezoelectric vibrator drives |
| CN207819793U (en) * | 2017-11-14 | 2018-09-04 | 南昌航空大学 | The plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving |
-
2017
- 2017-11-14 CN CN201711119607.1A patent/CN107834893B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102064660A (en) * | 2011-01-26 | 2011-05-18 | 麦伟仪 | Rotor structure of resonant type permanent magnet linear generator |
| CN102148586A (en) * | 2011-03-14 | 2011-08-10 | 南昌航空大学 | high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven |
| JP2013230057A (en) * | 2012-04-26 | 2013-11-07 | Sumida Corporation | Ultrasonic motor |
| JP2014057397A (en) * | 2012-09-11 | 2014-03-27 | Toyota Industries Corp | Ultrasonic motor |
| CN105006990A (en) * | 2015-07-16 | 2015-10-28 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof |
| CN106787933A (en) * | 2017-03-27 | 2017-05-31 | 武汉大学 | Based on planar motor and driving method that quasi- matrix pattern piezoelectric vibrator drives |
| CN207819793U (en) * | 2017-11-14 | 2018-09-04 | 南昌航空大学 | The plane ultrasonic motor of diesis manifold type piezoelectric vibrator similar shape mode driving |
Non-Patent Citations (1)
| Title |
|---|
| 贺红林 等: "基于H卧板面内四足驱动的平面超声电机", 压电与声光, vol. 38, no. 4, pages 541 - 547 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108712104A (en) * | 2018-08-08 | 2018-10-26 | 吉林大学 | A kind of parasitic type piezoelectricity stick-slip driver |
| CN108712104B (en) * | 2018-08-08 | 2024-03-01 | 吉林大学 | Parasitic piezoelectric stick-slip driver |
| CN108705329A (en) * | 2018-08-22 | 2018-10-26 | 金陵科技学院 | Precision stage based on two degrees of freedom piezoelectric actuator and corresponding piezoelectric actuator |
| CN108705329B (en) * | 2018-08-22 | 2023-08-22 | 金陵科技学院 | Precision workbench based on two-degree-of-freedom piezoelectric actuator and corresponding piezoelectric actuator |
| CN109079828A (en) * | 2018-08-24 | 2018-12-25 | 南京航空航天大学 | A kind of Piezoelectric Driving articulated robot arm refers to and its driving method |
| CN109079828B (en) * | 2018-08-24 | 2023-05-23 | 南京航空航天大学 | Piezoelectric driving articulated mechanical finger and driving method thereof |
| CN110299866A (en) * | 2019-07-29 | 2019-10-01 | 南昌航空大学 | The accurate piezoelectric straight line mobile platform and operation mode of frame structure driving |
| CN110299866B (en) * | 2019-07-29 | 2024-06-04 | 南昌航空大学 | Square frame structure driven precision piezoelectric linear moving platform and working mode |
| CN111193434A (en) * | 2020-02-24 | 2020-05-22 | 南京航空航天大学 | Rail carrying system based on sandwich type frame actuator and working method thereof |
| CN111193434B (en) * | 2020-02-24 | 2024-05-28 | 南京航空航天大学 | Rail carrying system based on sandwich type frame actuator and working method thereof |
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