CN102148586A - high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven - Google Patents
high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven Download PDFInfo
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- CN102148586A CN102148586A CN2011100606450A CN201110060645A CN102148586A CN 102148586 A CN102148586 A CN 102148586A CN 2011100606450 A CN2011100606450 A CN 2011100606450A CN 201110060645 A CN201110060645 A CN 201110060645A CN 102148586 A CN102148586 A CN 102148586A
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- 238000005096 rolling process Methods 0.000 claims abstract description 7
- 230000005284 excitation Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 4
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 5
- 230000004044 response Effects 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 4
- 230000009286 beneficial effect Effects 0.000 abstract 3
- 238000005516 engineering process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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Abstract
The invention discloses a high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality, which comprises a stator component, a rotor component, and a pedestal component. The high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality is characterized in that: the stator component is connected with the pedestal component through a bolt; the rotor component is connected with the pedestal component through a rolling rail pair; and the stator component is connected with the rotor component through a friction pair. The high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality has the technical effects that: (1) d33 effect of a piezoelectric lamination is used to excite the longitudinal vibration of cross rods and longitudinal rods to push, which can drive a motor to output a larger power; (2) two longitudinal rods in the stator component alternatively drive the rotor component in the same vibration period, which can drive the motor to output a larger speed and increase the thrust of the motor; high stator vibration frequency, small drive step pitch and high position distinguishability can drive the motor to realize submicron-grade and even higher-grade locating precision; the stator component is of a plane H structure, which is beneficial for realizing the thinning and lightening of the motor; the rotor component is designed into a structure with proper flexibility, which can guarantee an ideal contact state between the stator component and the rotor component, and is beneficial for improving the stability of the motor and reducing the heating of the motor; moreover, a rolling rail is adopted between the rotor component and the pedestal component, which can greatly reduce the running resistance of the motor, and is beneficial for improving the efficiency and response speed of the motor.
Description
Technical field
The present invention relates to a kind of linear electric motors, relate in particular to the high thrust piezoelectric linear motor that a kind of three-phase longitudinal vibration mode drives.
Background technology
Piezoelectric linear motor (Piezoelectric Linear Motor, PLM) be an important branch of ultrasound electric machine, it utilizes the inverse piezoelectric effect of piezoelectric ceramic to excite elastomeric ultrasonic vibration and mechanical energy is converted to electric energy, by the friction process between stator and mover elastomeric micro breadth oscillation is converted to macroscopical rectilinear motion of mover and promotes load again.Compare with electromagnetic machine, PLM has that power density is big, response is fast, directly drives, location standard, noiseless, flexible, the electromagnetic compatibility of structure, series of advantages such as miniaturization and, being with a wide range of applications in various fields such as Aerospace Engineering, robot, precision positioning instrument, micromachine, biomedical engineering, is a focus in the current small and special electric machine research field both at home and abroad.Since the new century started, Japan, Germany, the U.S., the upright many researchers that make pottery countries such as bowl, Korea S, Israel, the Singapore amount of measuring one's own ability that successively has high input had been carried out PLM research, and has developed the linear ultrasonic motor of multiple structure type.In existing research, to compare, the PLM technical development of Japan is the fastest, and it has grasped most of patents and the technology of PLM.Domestic LUSM research starts from the end of the nineties in last century, and many colleges and universities such as Nanjing Aero-Space University, Tsing-Hua University, University of Science and Technology, Central China, Shanghai University and the Chinese Academy of Sciences and scientific research institutions all do a lot for this reason and make certain gains.Particularly, the pure living academician leader's of Nanjing boat Da Zhao precision drives research group, has released many types of Series P LM model machine in recent years, indicates that the research level of China's linear ultrasonic motor and advanced international standard are very approaching.
Scan the development and the present situation of domestic and international PLM technology, can clearly see, the development of PLM is very swift and violent at present on the one hand, it is used paces and accelerates, particularly, drive and control application at miniature and miniature precision and show the gesture that substitutes the electromagnetism linear electric motors gradually, but meanwhile, also be not difficult to find, PLM technology up to now also is far from being maturation, a series of problems such as it goes back that the ubiquity outputting power is less, efficient is not high, performance is owed surely, the life-span is long also have one section not small distance from commercial application widely.Particularly, the present still extremely limited structural shape of PLM makes it also can't satisfy many-sided demands such as application is faster to big power, high accuracy, the response of its proposition, structure is various.Under this background, constantly release the importance that piezoelectric linear motor new principle and structure have become PLM research.The phase contract is answered therewith, and the present invention releases a kind of accurate high thrust linear ultrasonic motor of brand-new principle, and development and application for advancing the PLM technology have certain meaning undoubtedly.
Summary of the invention
The high thrust piezoelectric linear motor that the object of the present invention is to provide a kind of three-phase longitudinal vibration mode to drive, this motor has submicron order even higher positioning accuracy, Millisecond response speed, high thrust, characteristics such as simple in structure, can export fair speed, accommodation is wide.
The present invention is achieved like this, it comprises stator module, mover assembly and mounting assembly, it is characterized in that: stator module connects mounting assembly by screw, and mover assembly connects mounting assembly by rolling guide-rail pairs, and stator module connects mover assembly by friction pair; Described stator module comprises a cross bar 1
1With two vertical poles 1
2, 1
3And be configured in cross bar 1
1With vertical pole 1
2, 1
3The laminated piezoelectric 1 at middle part
4, 1
5, 1
6, two vertical poles 1
2, 1
3Respectively by being located at cross bar 1
1The square groove at two ends and cross bar 1
1Run through forming the moving sets connection mutually, and vertical pole and cross bar 1
1Vertically present " H " type structure, laminated piezoelectric 1
4Be configured in cross bar 1
1Single order longitudinal vibration node near, laminated piezoelectric 1
5, 1
6Be configured in vertical pole 1
2, 1
3The centre position is in order to realize the exciting of stator module; Described mover assembly comprises ball body, cover plate, L type bent plate, rectangular side panels, adjustment pad, rectangular side panels is connected on the L type bent plate via adjusting pad by screw, bottom in L type bent plate and rectangular side panels all is drilled with small sircle hole in a row, to hold ball body, after ball body is packed circular hole into cover plate with its shutoff in aperture, two shutoff cover plates are connected on L shaped bent plate and the rectangular side panels by screw respectively, also bored row's aperture on the cover plate, and the position in hole is corresponding on the position in each hole of cover plate and L template, the rectangular side panels, and the aperture is more smaller than ball body diameter; Described mounting assembly comprises bearing body and four guide vane end stops, has offered two gathering sills in the both sides of bearing body, and mover assembly connects bearing body by ball body, and guide vane end stop is connected on the bearing body by screw, is drilled with four installing holes on the bearing body.
Place stator module cross bar 1
1Last laminated piezoelectric 1
4With vertical pole 1
2, 1
3On laminated piezoelectric 1
5, 1
6, phase difference is 90 being subjected in time
0Do the time spent with frequency cosine and sinusoidal electric signals, will inspire cross bar 1 respectively
1With vertical pole 1
2, 1
3The three-phase single order longitudinal vibration mode of quadrature spatially, cause vertical pole 1
2, 1
3The drive end particle form elliptic motion and alternately mover assembly driven.
Described stator basis material is rolling phosphor bronze.
Technique effect of the present invention is: (1) utilizes the d33 effect excitation cross bar of laminated piezoelectric and the extensional vibration of vertical pole to promote, and can make the big power of motor output; (2) two vertical poles carry out driven in the same vibration period to mover assembly in the stator module, can make the bigger speed of motor output and increase motor thrust; (3) stator vibration frequency height, drive that step pitch is little, position resolution is high, can make motor realize submicron order even higher positioning accuracy; (4) stator module is plane H type structure, helps realizing the slimming and the lightweight of motor; (5) mover assembly is designed to have the flexible structure of appropriateness, can guarantee the comparatively ideal CONTACT WITH FRICTION state of stator module and mover assembly, helps improving motor stabilizing and reduces its heating; (6) adopt spherical guide between mover assembly and mounting assembly, can reduce the motor running resistance greatly and help improving efficiency of motor and response speed.
Description of drawings
Fig. 1 is the high thrust piezoelectric linear motor structural representation that three-phase longitudinal vibration mode drives.
Fig. 2 is the high thrust piezoelectric linear motor stator module structural representation that three-phase longitudinal vibration mode drives.
Fig. 3 is the high thrust piezoelectric linear motor mover assembly structural representation that three-phase longitudinal vibration mode drives.
Fig. 4 is the high thrust piezoelectric linear motor mounting assembly structural representation that three-phase longitudinal vibration mode drives.
Fig. 5 is the high thrust piezoelectric linear motor motion principle schematic diagram one that three-phase longitudinal vibration mode drives.
Fig. 6 is the high thrust piezoelectric linear motor motion principle schematic diagram two that three-phase longitudinal vibration mode drives.
Fig. 7 is the high thrust piezoelectric linear motor motion principle schematic diagram three that three-phase longitudinal vibration mode drives.
Fig. 8 is the high thrust piezoelectric linear motor motion principle schematic diagram four that three-phase longitudinal vibration mode drives.
Fig. 9 is the high thrust piezoelectric linear motor motion principle schematic diagram five that three-phase longitudinal vibration mode drives.
Label title among Fig. 1, Fig. 3, Fig. 4 and Fig. 5: 1-stator module, 2-mover assembly, 3-mounting assembly, 4-laminated piezoelectric, 5-guide vane end stop, 6-ball body, 7-screw, 8-adjustment pad, 9-L type bent plate, 10-rectangular side panels, 11-cover plate, 12-cover screw, 13-bearing installing hole, 14-bearing body.
Among Fig. 2: 1
1-cross bar, 1
2-left side bar, 1
3-right-hand rod, 1
4-cross bar laminated piezoelectric, 1
5-left side bar laminated piezoelectric, 1
6-right-hand rod laminated piezoelectric, 1
7-stator location hole, 1
8-attachment screw.
Embodiment
Shown in Fig. 1,2,3,4, the present invention realizes like this, it comprises stator module (1), mover assembly (2) and mounting assembly (3), it is characterized in that: stator module (1) connects mounting assembly (3) by screw, mover assembly (2) connects mounting assembly by rolling guide-rail pairs, and stator module (1) connects mover assembly (2) by friction pair; Described stator module comprises a cross bar 1
1With two vertical poles 1
2, 1
3And be configured in cross bar 1
1With vertical pole 1
2, 1
3The laminated piezoelectric 1 at middle part
4, 1
5, 1
6, two vertical poles 1
2, 1
3Respectively by being located at cross bar 1
1The square groove at two ends and cross bar 1
1Run through forming the moving sets connection mutually, and vertical pole and cross bar 1
1Vertically present " H " type structure, laminated piezoelectric 1
4Be configured in cross bar 1
1Single order longitudinal vibration node near, laminated piezoelectric 1
5, 1
6Be configured in vertical pole 1
2, 1
3The centre position is in order to realize the exciting of stator module (1); Described mover assembly (2) comprises ball body (6), cover plate (11), L type bent plate (9), rectangular side panels (10), adjustment pad (8), rectangular side panels (10) is connected on the L type bent plate (9) via adjusting pad (8) by screw (12), and adjustment pad (8) is used to regulate the pretightning force between stator module (1) and mover assembly (2).(10) bottom in L type bent plate (9) and rectangular side panels all is drilled with small sircle hole in a row, to hold ball body (6), after ball body (6) is packed circular hole into cover plate (11) with its shutoff in aperture, two shutoff cover plates (11) are connected on L shaped bent plate (9) and the rectangular side panels (10) by screw (12) respectively, also bored row's aperture on the cover plate (11), and the position in each hole of cover plate is corresponding with the position that L template (9), rectangular side panels (10) go up the hole, and the aperture is more smaller than ball body (6) diameter; Described mounting assembly (3) comprises bearing body (14) and four guide vane end stops (5), two gathering sills have been offered in the both sides of bearing body (14), the raceway that slides as mover assembly ball body (6) also play the guiding role to the motion of mover assembly (2), mover assembly (2) connects bearing body (14) by ball body (6), guide vane end stop (5) is connected on the bearing body by screw, in order to the stroke of restriction mover assembly (1) and guarantee that its ball body (6) does not break away from raceway, be drilled with four installing holes (13) on the bearing body (14) and be used for installation between motor and frame.Place stator module (1) cross bar 1
1Last laminated piezoelectric 1
4With vertical pole 1
2, 1
3On laminated piezoelectric 1
5, 1
6, phase difference is 90 being subjected in time
0Do the time spent with frequency cosine and sinusoidal electric signals, will inspire cross bar 1 respectively
1With vertical pole 1
2, 1
3The three-phase single order longitudinal vibration mode of quadrature spatially, cause vertical pole 1
2, 1
3The drive end particle form elliptic motion and alternately mover assembly driven, motor utilizes the elliptic motion of vertical pole drive end just, and, promote mover assembly (2) and do reciprocating linear motion by rubbing action between stator module (1) and the mover assembly (2).Described stator basis material is rolling phosphor bronze.
During motor rotation, at the cross bar 1 of stator module
1With vertical pole 1
2, 1
3On laminated piezoelectric (4) on apply the same frequency electrical power signal that frequency is in ultrasonic frequency domain respectively stator module (1) encouraged, so just at cross bar 1
1With vertical pole 1
2, 1
3On inspire single order longitudinal vibration mode respectively.Two phase vibration synthetic result on stator module promptly is at vertical pole 1
2, 1
3The drive end place form the particle elliptic motion.Motor promptly by this elliptic motion and utilize stator module (1) and mover assembly (2) between rubbing action promote mover assembly (2) and do reciprocating linear motion.Accompanying drawing 2 is the structural representation of the stator module in institute's invention motor.Stator module is by a cross bar 1
1With two vertical poles 1
2, 1
3Reach and be configured in cross bar 1 respectively
1With vertical pole 1
2, 1
3On laminated piezoelectric 1
4, 1
5, 1
6Form, its main body is " H " type structure.Two vertical poles 1
2, 1
3Shape, size, material and laminated piezoelectric collocation form identical.Vertical pole 1
2, 1
3Pass respectively and be opened in cross bar 1
1The square groove at two ends and with cross bar 1
1Horizontal stroke runs through mutually and has formed the moving sets connection, and with cross bar 1
1Vertically.Why between cross bar and vertical pole, adopt moving sets, mainly be the consistency of considering to realize easily like this cross bar and vertical pole operation mode frequency, thereby help at vertical pole 1
2, 1
3Drive end form comparatively desirable elliptic motion.At cross bar 1
1On disposed two groups of laminated piezoelectrics, they are installed in respectively near cross bar 1
1The middle part or single order longitudinal vibration mode node near the position, two groups of laminated piezoelectrics are by the attachment screw 1 that places in the cross bar
8Be anchored on cross bar 1
1The body of rod.Theoretically, laminated piezoelectric should place cross bar 1
1Single order longitudinal vibration node on, but consider the fixedly reserved location that is required to be stator module (1), and cross bar 1
1The longitudinal vibration node promptly be the optimum position, so at cross bar 1
1The middle sets out a through hole 1 in order to the fixed stator assembly
7, and the position that allows laminated piezoelectric be contained in to depart from a bit of distance of aperture.By FEM (finite element) calculation, cross bar 1
1This configuration can not have much impact basically to its single order longitudinal vibration mode of bar, so, stator module is just by cross bar 1
1The middle part location hole is connected mounting assembly (3).At cross bar 1
1Two ends all mill out a less groove, as the usefulness of the countersunk seat of the screw of fastening laminated piezoelectric.Vertical pole 1
2, 1
3On laminated piezoelectric be placed in the position, single order longitudinal vibration node place of bar.Cross bar 1
1With vertical pole 1
2, 1
3On laminated piezoelectric realize by the combination of four piezoelectric ceramic and by screw is fastening.The piezoelectric ceramic lamination is placed in cross bar 1
1With vertical pole 1
2, 1
3The middle part is because can make laminated piezoelectric that elastic rod is implemented exciting efficiently like this.
Shown in the accompanying drawing 5,6,7,8,9, the stator module (1) that has provided motor is in the drive mechanism of electric excitation mover assembly (2) in the cycle and the operation principle of motor.The present invention chooses the cross bar 1 of stator module (1)
1With vertical pole 1
2, 1
3Single order longitudinal vibration mode as the operation mode of motor.For on stator module (1), exciting cross bar 1 simultaneously
1With vertical pole 1
2, 1
3Operation mode, at cross bar 1
1With vertical pole 1
2, 1
3Laminated piezoelectric feed with frequently, time phase difference is 90
oHarmonic wave electrical power pumping signal, in this case, stator module (1) can be summarized as following step to the driving of mover assembly (2):
(1) accompanying drawing 5, Fig. 6, Fig. 7, Fig. 8 have provided stator module (1) and have driven the process that mover assembly (2) is done positive movement.As shown in Figure 5, make positive movement, need at cross bar 1 in order to promote mover assembly (1)
1Laminated piezoelectric on insert sinusoidal excitation signal, at vertical pole 1
2, 1
3Laminated piezoelectric apply respectively anti-phase cosine electric excitation signal and.The moment, vertical pole 1
2The elongation at two ends and 1
3The amount of contraction at two ends is maximum, and cross bar 1
1Deflection be 0, vertical pole 1
2Two ends contact with mover assembly (2) and 1
3With then do not contact with mover assembly (2).
(2) the 1st of stator module (1) excitation
In cycle, vertical pole 1
2Two ends shrink to the centre, its longitudinal deformation amount drops to 0 gradually by maximum, but vertical pole 1
2Keep contacting with mover assembly (2); Vertical pole 1
3Two ends then stretch out, it is 0 that its longitudinal deformation amount is replied gradually by negative maximum, but vertical pole 1
3Do not contact with mover assembly (2); At vertical pole 1
2With mover assembly (2) when contacting, cross bar 1
1Two ends stretch out and make its longitudinal deformation amount extend to maximum gradually by 0, like this, vertical pole 1
2The particle of drive end will promote mover assembly (2) and move forward a step pitch
, make motor be in state shown in Figure 6.
(3) the 2nd of stator module (1) excitation
In cycle, vertical pole 1
2Two ends continue to shrink to the middle part, its deflection also is contracted to negative maximum gradually by 0, makes vertical pole 1
2Break away from and contact with mover assembly (2); Vertical pole 1
3Two ends then stretch out, its deflection extends positive maximum gradually by 0, causes 1
3Contact with mover assembly (2), meanwhile, cross bar 1
1Inward at both ends retraction, it is 0 that deflection is replied by positive maximum, like this, vertical pole 1
3Drive end will promote mover assembly (2) step pitch of going forward one by one again forward
, make motor be in state shown in Figure 7.
(4) the 3rd of stator module (1) excitation
In cycle, vertical pole 1
2Two ends outwards elongation make its deflection return back to 0 gradually by negative maximum, but vertical pole 1
2Still do not contact with stator module; Vertical pole 1
3Two ends then to middle part retraction, its deflection also reduces to 0 gradually by maximum, vertical pole 1
3Continue to contact with mover assembly (2); Meanwhile, cross bar 1
1Two ends further inwardly bounce back, and make its deflection drop to negative maximum by 0, and this just makes vertical pole 1
3Can promote mover and continue to move forward a step pitch
, make motor be in state shown in Figure 8.
(5) the 4th of stator module (1) excitation
In cycle, vertical pole 1
2Two ends continue to stretch out, its deflection rises to maximum gradually by 0 and makes 1
2Contact with mover assembly (2); Vertical pole 1
3Two ends then continue inside retraction, its deflection also further drops to negative maximum by 0, vertical pole 1
3Still do not contact with mover assembly (2), like this, vertical pole 1
2Drive end promote mover assembly (2) last step pitch of going forward one by one forward
, make motor be in state shown in Figure 5.
The vertical pole drive end of stator module (1) is implemented said process to mover assembly (2) again and again, makes constantly operation forward of mover assembly (2).After through an Energizing cycle, mover assembly (2) is with regard to 4 the step pitch displacements of advancing forward, and this has just guaranteed that motor of the present invention not only has higher position resolution and can export fair speed.
Fig. 9 has provided and has ordered about the piezoelectric ceramic energisation mode that mover assembly (2) is done the reverse linear motion.As can be seen from the figure, change the direction of motion of motor, only need to change cross bar 1
1With vertical pole 1
2, 1
3Leading, the lagged relationship of phase place, promptly as long as on the cross bar laminated piezoelectric, apply signal, at vertical pole 1
2With 1
3Laminated piezoelectric on insert respectively pumping signal and, just can make the particle on the two vertical pole drive ends do reverse elliptic motion, move thereby advance mover assembly (2) to make reverse linear.When mover assembly is made anti-phase motion, the vertical pole drive end to mover assembly promotion order the situation during with forward drive basic identical.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100606450A CN102148586A (en) | 2011-03-14 | 2011-03-14 | high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100606450A CN102148586A (en) | 2011-03-14 | 2011-03-14 | high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven |
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| Publication Number | Publication Date |
|---|---|
| CN102148586A true CN102148586A (en) | 2011-08-10 |
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ID=44422631
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100606450A Pending CN102148586A (en) | 2011-03-14 | 2011-03-14 | high-thrust piezoelectric linear motor driven by three-phase longitudinal vibration modality driven |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102497132A (en) * | 2011-12-22 | 2012-06-13 | 哈尔滨工业大学 | Ceramic embedded I-shaped four-foot linear ultrasonic motor vibrator |
| CN105006990A (en) * | 2015-07-16 | 2015-10-28 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof |
| CN107834893A (en) * | 2017-11-14 | 2018-03-23 | 南昌航空大学 | The plane ultrasonic motor and its working method of diesis manifold type piezoelectric vibrator similar shape mode driving |
| CN110768572A (en) * | 2019-11-27 | 2020-02-07 | 长春大学 | Linear piezoelectric actuator with high thrust |
-
2011
- 2011-03-14 CN CN2011100606450A patent/CN102148586A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102497132A (en) * | 2011-12-22 | 2012-06-13 | 哈尔滨工业大学 | Ceramic embedded I-shaped four-foot linear ultrasonic motor vibrator |
| CN102497132B (en) * | 2011-12-22 | 2015-03-11 | 哈尔滨工业大学 | Ceramic embedded I-shaped four-foot linear ultrasonic motor vibrator |
| CN105006990A (en) * | 2015-07-16 | 2015-10-28 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof |
| CN105006990B (en) * | 2015-07-16 | 2017-02-01 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working method thereof |
| CN107834893A (en) * | 2017-11-14 | 2018-03-23 | 南昌航空大学 | The plane ultrasonic motor and its working method of diesis manifold type piezoelectric vibrator similar shape mode driving |
| CN107834893B (en) * | 2017-11-14 | 2023-09-26 | 南昌航空大学 | Planar ultrasonic motor driven by isomorphic modes of double cross coupling type piezoelectric vibrator and working mode thereof |
| CN110768572A (en) * | 2019-11-27 | 2020-02-07 | 长春大学 | Linear piezoelectric actuator with high thrust |
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Application publication date: 20110810 |