CN102437783A - Surface mount type I-shaped four-footed linear ultrasonic motor vibrator - Google Patents
Surface mount type I-shaped four-footed linear ultrasonic motor vibrator Download PDFInfo
- Publication number
- CN102437783A CN102437783A CN2011104358587A CN201110435858A CN102437783A CN 102437783 A CN102437783 A CN 102437783A CN 2011104358587 A CN2011104358587 A CN 2011104358587A CN 201110435858 A CN201110435858 A CN 201110435858A CN 102437783 A CN102437783 A CN 102437783A
- Authority
- CN
- China
- Prior art keywords
- horn
- piezoelectric ceramic
- vertical beam
- ultrasonic motor
- horizontal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 43
- 239000011159 matrix material Substances 0.000 claims description 13
- 230000008878 coupling Effects 0.000 abstract description 11
- 238000010168 coupling process Methods 0.000 abstract description 11
- 238000005859 coupling reaction Methods 0.000 abstract description 11
- 235000012431 wafers Nutrition 0.000 abstract 4
- 230000002411 adverse Effects 0.000 abstract 1
- 238000005452 bending Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002131 composite material Substances 0.000 description 11
- 210000002683 foot Anatomy 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
The invention relates to a surface mount type I-shaped four-footed linear ultrasonic motor vibrator, belonging to the technical field of piezoelectric ultrasonic motors. The surface mount type I-shaped four-footed linear ultrasonic motor vibrator provided by the invention eliminates various adverse impacts caused by coupling bending vibration in the traditional rectangular four-footed linear ultrasonic motor vibrator. Two end faces of a vertical beam of the vibrator are respectively provided with an amplitude transformer, binding site of the two amplitude transformers is a big end face of the amplitude transformer, the two end faces of a horizontal beam are respectively provided with one amplitude transformer, the binging site of the two amplitude transformers is the big end face of the amplitude transformer, the vertical beam is respectively fixedly connected with middle position of inner side walls of the two horizontal beams by virtue of small end faces of the two amplitude transformers of the two end faces of the vertical beam; the outer side wall, the upper side wall and the lower side wall of each horizontal beam are respectively provided with one piezoelectric ceramic wafer, one piezoelectric ceramic wafer is respectively arranged at the two sides of the amplitude transformer on the inner side wall of each horizontal beam, the upper side wall and the lower side wall of the vertical beam are respectively provided with one piezoelectric ceramic wafer, and the inner side wall and the outer side wall of the vertical beam are symmetrically provided with two piezoelectric ceramic wafers at the two sides of a thin walled beam. The surface mount type I-shaped four-footed linear ultrasonic motor vibrator provided by the invention can be applied to the field of manufacturing of ultrasonic motors.
Description
Technical field
The present invention relates to a kind of SMD I shape four-pin linear ultrasonic motor vibrator, belong to the piezoelectric ultrasonic motor technical field.
Background technology
Piezoelectric ultrasonic motor is a kind of inverse piezoelectric effect of utilizing piezoelectric ceramic; In elastomer, motivate the vibration in the supersonic range; Form particle movement at surface of elastomer specified point or specific region with particular track; And then through the friction between stator, the rotor coupling microscopic motion of particle is converted to the macroscopic motion of rotor; Have low speed high torque, need not gear, no electromagnetic interference, advantage such as response speed is fast and cut off self-lock, have very as a kind of piezoelectric actuator and to use widely.
Open day is that January 13, publication number in 2010 are that CN101626205A, denomination of invention are the patent application of " rectangular four-pin linear ultrasonic motor vibrator "; It has proposed a kind of new configuration of sandwich linear type ultrasound motor of enclosed construction first, realizes four excitations that drive the elliptical orbit vibration of foot place through four longitudinal vibration transducers according to rectangular arrangement; But, there is tangible vibration coupling problem between the transducer in this ultrasonic motor oscillator, the actual vibration state of transducer is not single longitudinal vibration, but the complex vibration of a kind of longitudinal vibration and the curved stack of shaking; Wherein, longitudinal vibration is that the active excitation through piezoelectric ceramic piece produces, and curved shaking then is to have the coupling between the adjacent transducer to cause; This coupling is given birth to curved existence of shaking can make oscillator mode characteristic frequency depart from the single transducer resonance frequency, and can reduce the electromechanical conversion efficiency of oscillator, the raising of restriction oscillator machinery output characteristic.In addition, this coupling is given birth to curved existence of shaking makes four oscillation trajectories that drive the foot place have tangible inconsistency, also is unfavorable for the improvement of its output characteristic.In addition; Adopt the double-screw bolt pretension to make that this oscillator structure is comparatively complicated, it is microminiaturized to be difficult to realize; And this oscillator is high to assembly precision and each parts requirement on machining accuracy; Can cause the inner existence that exists internal stress, piezoelectric ceramic precompression greatly to apply problem such as inhomogeneous of oscillator can't reach requirement the time at processing and assembly precision, thereby cause the oscillator can't operate as normal.
Summary of the invention
Give birth to vibration, configuration complicacy in order to solve the coupling that exists in the existing rectangular four-pin linear ultrasonic motor vibrator, be difficult to realize microminiaturization, processing and assembly precision are required harsh problem, the invention provides a kind of SMD I shape four-pin linear ultrasonic motor vibrator.
SMD I shape four-pin linear ultrasonic motor vibrator comprises I shape metallic matrix and piezoelectric ceramic piece; The I shape metallic matrix comprises two horizontal beams, a vertical beam, six horn, two thin walled beams and two mount pads; Said horizontal beam and vertical beam all are that the cross section is the four prisms cylinder of rectangle; Said each horn all is that the cross section is rectangle and tapered four prisms cylinder; Two end faces of vertical beam respectively are provided with a horn; And the end face that said vertical beam and each horn combine is the large end face of this horn, and two end faces of each horizontal beam respectively are provided with a horn, and the end face that combines with each horn of this horizontal beam is the large end face of this horn; The small end face of two horn of said vertical beam through being arranged on these vertical beam two ends is fixedly connected with the centre position of a sidewall of two horizontal beams respectively, and said two horizontal beams are all vertical with said vertical beam and be positioned at same plane; Two sidewall centers are symmetrically arranged with two thin walled beams about said vertical beam, and the outside of each thin walled beam is provided with a mount pad; The sidewall of horizontal beam and vertical beam is provided with piezoelectric ceramic piece.
All be provided with a slice piezoelectric ceramic piece on the lateral wall of each horizontal beam, upper side wall and the lower wall between two parties; The sidewall that each horizontal beam is connected with horn is provided with two piezoelectric ceramic pieces; And said two piezoelectric ceramic piece symmetries are positioned at the left and right sides of the junction of this horizontal beam and horn; All be provided with a slice piezoelectric ceramic piece on the upper side wall of vertical beam and the lower wall between two parties; Be provided with two piezoelectric ceramic pieces on the madial wall of vertical beam, the lateral wall, said two piezoelectric ceramic pieces are symmetricly set on the both sides of the thin walled beam on the sidewall of place.
Piezoelectric ceramic piece in the SMD I shape four-pin linear ultrasonic motor vibrator of the present invention adopts amplitude to equate, frequency is oscillator self resonance frequency, phase difference is pressed signal excitation (horizontal composite beam adopts the excitation of two phase voltages respectively with piezoelectric ceramic piece on the vertical composite beam) for+90 ° two-phase alternating current, utilizes the stretching vibration of piezoelectric ceramic piece in oscillator, to motivate two mode of oscillations (two mode of oscillations of oscillator such as Fig. 4 and shown in Figure 5); Mode of oscillation wherein shown in Figure 4 is two mode that horizontal composite beam longitudinal vibration is encouraged, and correspondence causes the vibration of the terminal particle along continuous straight runs of level luffing bar; Mode of oscillation shown in Figure 5 is the mode that vertical composite beam longitudinal vibration is encouraged; Correspondence causes the vibration vertically of the terminal particle of level luffing bar); Two mode of oscillations are superimposed upon four and drive sufficient (the level luffing bar is terminal for driving foot) surperficial particle generation elliptical trajectory; When four driving foots contact under certain precompression with the both sides mover, export through the macroscopic motion that drives the friction coupling realization mover between foot and the mover.If the phase difference of adjustment excitation signals is-90 °, can realize reverse drive.Horn adopts the variable cross-section design to play the effect of amassing wealth by heavy taxation of vibrational energy, can improve the amplitude and the vibration velocity that drive the surperficial particle of foot, makes motor performance be improved.Four drive foot and participate in simultaneously driving, and can significantly improve the mechanical fan-out capability of motor, and this oscillator made full use of vibration and produced energy, can effectively improve delivery efficiency.
SMD I shape four-pin linear ultrasonic motor vibrator of the present invention has been given up the enclosed construction of denomination of invention for being proposed in the patent application of " rectangular four-pin linear ultrasonic motor vibrator "; Adopt the mode of incorporate I shape metallic matrix and piezoelectric ceramic bonding to encourage; Owing to given up the double-screw bolt firmly beforehand means; Make structure greatly simplified, be convenient to realize the microminiaturization of oscillator, also greatly the simplification of degree processing and assembly technology; The integral structure of metallic matrix has avoided oscillator inside in the double-screw bolt firmly beforehand means to have the problem of internal stress, and the bonding mode that is adopted between metallic matrix and the piezoelectric ceramic has then avoided the piezoelectric ceramic precompression to apply uneven problem; Vertically composite beam and horizontal composite beam binding site are positioned at the nodal section place of horizontal composite beam longitudinal vibration Mode Shape; Make horizontal composite beam when longitudinal vibration, can not produce vibration coupling to vertical composite beam; Thereby effectively reduced the vibration coupling problem that exists in the oscillator; The vibrational state that guarantees vertical composite beam is single extensional vibration, can effectively improve the consistency of the terminal drive area of four level luffing bars particle vibration track.Therefore, SMD rectangular four-pin linear ultrasonic motor vibrator success of the present invention overcome the rectangular four-pin linear ultrasonic motor vibrator configuration complicated, exist coupling give birth to vibration, be difficult to realize microminiaturized, processing and assembly precision are required problems such as harshness.
But that SMD I shape four-pin linear ultrasonic motor vibrator of the present invention has is simple in structure, the advantage of flexible design, processing and the simple producing in serial form of assembling.
Description of drawings
Fig. 1 is the vertical view of SMD I shape four-pin linear ultrasonic motor vibrator of the present invention; Fig. 2 is the perspective view of oscillator shown in Figure 1; Fig. 3 is the perspective view of the I shape metallic matrix in the oscillator shown in Figure 1; Fig. 4 and Fig. 5 are two fundamental vibration Mode Shape sketch mapes of oscillator shown in Figure 1.
Embodiment
Embodiment one, combination Fig. 1 to Fig. 3 explain this execution mode, and the described SMD I shape four-pin linear ultrasonic motor vibrator of this execution mode comprises I shape metallic matrix 1 and piezoelectric ceramic piece 2; I shape metallic matrix 1 comprises two horizontal beam 1-1, a vertical beam 1-2, six horn 1-3, two thin walled beam 1-4 and two mount pad 1-5; Said horizontal beam 1-1 and vertical beam 1-2 all are that the cross section is the four prisms cylinder of rectangle; Said each horn 1-3 all is that the cross section is rectangle and tapered four prisms cylinder; Two end faces of vertical beam 1-2 respectively are provided with a horn 1-3; And the end face that said vertical beam 1-2 and each horn 1-3 combine is the large end face of this horn 1-3; Two end faces of each horizontal beam 1-1 respectively are provided with a horn 1-3; And the end face that this horizontal beam 1-1 combines with each horn 1-3 is the large end face of this horn 1-3, and the small end face of two the horn 1-3s of said vertical beam 1-2 through being arranged on this vertical beam 1-2 two ends is fixedly connected with the centre position of the sidewall of two horizontal beam 1-1 respectively, and said two horizontal beam 1-1 are all vertical with said vertical beam 1-2 and be positioned at same plane; Two sidewall centers are symmetrically arranged with two thin walled beam 1-4 about said vertical beam 1-2, and the outside of each thin walled beam 1-4 is provided with a mount pad 1-5; The sidewall of horizontal beam 1-1 and vertical beam 1-2 is provided with piezoelectric ceramic piece 2.
The difference of embodiment two, this execution mode and embodiment one described SMD I shape four-pin linear ultrasonic motor vibrator is; All be provided with a slice piezoelectric ceramic piece 2 on the lateral wall of each horizontal beam 1-1, upper side wall and the lower wall between two parties; The sidewall that each horizontal beam 1-1 is connected with horn 1-3 is provided with two piezoelectric ceramic pieces 2; And said two piezoelectric ceramic piece 2 symmetries are positioned at the left and right sides of the junction of this horizontal beam 1-1 and horn 1-3; All be provided with a slice piezoelectric ceramic piece 2 on the upper side wall of vertical beam 1-2 and the lower wall between two parties; Be provided with two piezoelectric ceramic pieces 2 on the madial wall of vertical beam 1-5, the lateral wall, said two piezoelectric ceramic pieces 2 are symmetricly set on the both sides of the thin walled beam 1-4 on the sidewall of place.
The SMD I shape four-pin linear ultrasonic motor vibrator of this execution mode is when using; I shape metallic matrix 1 is connected with the common port of driving power; The lateral electrode face of ten piezoelectric ceramic pieces 2 being fixed on two horizontal beam 1-1 all with one mutually drive signal connect, the lateral electrode face of six piezoelectric ceramic pieces 2 vertically fix on the beams of metal 1-2 all with other one drive signal connection mutually.
The SMD I shape four-pin linear ultrasonic motor vibrator of this execution mode is when using, and thin walled beam 1-4 is arranged on the node position of vertical composite beam longitudinal vibration Mode Shape, can play the effect of elastic bearing and vibration isolation; Mount pad 1-5 can be used for the installation of oscillator and fixing, and it is fixing faint to oscillator self vibration characteristics influence ten minutes with external member.
The difference of embodiment three, this execution mode and embodiment one described SMD I shape four-pin linear ultrasonic motor vibrator is that I shape metallic matrix 1 is an integral piece, can simplify processing and assembly technology, guarantee machining accuracy.
The difference of embodiment four, this execution mode and embodiment one described SMD I shape four-pin linear ultrasonic motor vibrator is; It also comprises four friction plates 3; All have a rectangular recess on the small end face of the horn 1-3 of two horizontal beam 1-1 ends, this groove runs through the place small end face; Friction plate 3 is fixed on the end of horn 1-2 through said groove.The setting of friction plate 3 can be played the effect that increases coefficient of friction, improves resistance to wear.
The difference of embodiment five, this execution mode and embodiment four described SMD I shape four-pin linear ultrasonic motor vibrators is that friction plate 3 covers the small end face of horn 1-3 fully.
The difference of embodiment six, this execution mode and embodiment one described SMD I shape four-pin linear ultrasonic motor vibrator is; Piezoelectric ceramic piece 2 is fixedly connected with the sidewall of horizontal beam 1-1 or vertical beam 1-2 through bonding mode, and all piezoelectric ceramic pieces 2 polarize along thickness direction.
Claims (6)
1. SMD I shape four-pin linear ultrasonic motor vibrator comprises I shape metallic matrix (1) and piezoelectric ceramic piece (2); It is characterized in that: I shape metallic matrix (1) comprises two horizontal beams (1-1), a vertical beam (1-2), six horn (1-3), two thin walled beams (1-4) and two mount pads (1-5); Said horizontal beam (1-1) and vertical beam (1-2) all are that the cross section is the four prisms cylinder of rectangle; Said each horn (1-3) all is that the cross section is rectangle and tapered four prisms cylinder; Two end faces of vertical beam (1-2) respectively are provided with a horn (1-3); And the end face that said vertical beam (1-2) and each horn (1-3) combine is the large end face of this horn (1-3); Two end faces of each horizontal beam (1-1) respectively are provided with a horn (1-3); And the end face that this horizontal beam (1-1) combines with each horn (1-3) is the large end face of this horn (1-3); The small end face of two horn (1-3) of said vertical beam (1-2) through being arranged on this vertical beam (1-2) two ends is fixedly connected with the centre position of a sidewall of two horizontal beams (1-1) respectively, and said two horizontal beams (1-1) are all vertical with said vertical beam (1-2) and be positioned at same plane; Two sidewall centers are symmetrically arranged with two thin walled beams (1-4) about said vertical beam (1-2), and the outside of each thin walled beam (1-4) is provided with a mount pad (1-5); The sidewall of horizontal beam (1-1) and vertical beam (1-2) is provided with piezoelectric ceramic piece (2).
2. SMD I shape four-pin linear ultrasonic motor vibrator according to claim 1; It is characterized in that all being provided with a slice piezoelectric ceramic piece (2) between two parties on lateral wall, upper side wall and the lower wall of each horizontal beam (1-1); The sidewall that each horizontal beam (1-1) is connected with horn (1-3) is provided with two piezoelectric ceramic pieces (2); And said two piezoelectric ceramic pieces (2) symmetry is positioned at the left and right sides of the junction of this horizontal beam (1-1) and horn (1-3); All be provided with a slice piezoelectric ceramic piece (2) on the upper side wall of vertical beam (1-2) and the lower wall between two parties; Be provided with two piezoelectric ceramic pieces (2) on the madial wall of vertical beam (1-5), the lateral wall, said two piezoelectric ceramic pieces (2) are symmetricly set on the both sides of the thin walled beam (1-4) on the sidewall of place.
3. SMD I shape four-pin linear ultrasonic motor vibrator according to claim 1 is characterized in that I shape metallic matrix (1) is an integral piece.
4. SMD I shape four-pin linear ultrasonic motor vibrator according to claim 1; It is characterized in that it also comprises four friction plates (3); All have a rectangular recess on the small end face of the horn (1-3) that two horizontal beams (1-1) are terminal, this groove runs through the place small end face; Friction plate (3) is fixed on the end of horn (1-2) through said groove.
5. SMD I shape four-pin linear ultrasonic motor vibrator according to claim 4 is characterized in that friction plate (3) covers the small end face of horn (1-3) fully.
6. SMD I shape four-pin linear ultrasonic motor vibrator according to claim 1; It is characterized in that piezoelectric ceramic piece (2) is fixedly connected with the sidewall of horizontal beam (1-1) or vertical beam (1-2) through bonding mode, all piezoelectric ceramic pieces (2) polarize along thickness direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110435858.7A CN102437783B (en) | 2011-12-22 | 2011-12-22 | Surface mount type I-shaped four-footed linear ultrasonic motor vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110435858.7A CN102437783B (en) | 2011-12-22 | 2011-12-22 | Surface mount type I-shaped four-footed linear ultrasonic motor vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102437783A true CN102437783A (en) | 2012-05-02 |
| CN102437783B CN102437783B (en) | 2014-10-08 |
Family
ID=45985692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110435858.7A Expired - Fee Related CN102437783B (en) | 2011-12-22 | 2011-12-22 | Surface mount type I-shaped four-footed linear ultrasonic motor vibrator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102437783B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103746598A (en) * | 2014-01-27 | 2014-04-23 | 哈尔滨工业大学 | Paster longitudinal vibration composite dual-feet piezoelectric supersonic motor vibrator |
| CN103746597A (en) * | 2014-01-27 | 2014-04-23 | 哈尔滨工业大学 | Paster T-shaped dual-feet linear piezoelectric supersonic motor vibrator |
| CN103795290A (en) * | 2014-01-27 | 2014-05-14 | 哈尔滨工业大学 | Patch type longitudinal vibration composite single-foot piezoelectric ultrasonic motor oscillator |
| CN104967355A (en) * | 2015-07-20 | 2015-10-07 | 哈尔滨工业大学 | Bionic crawling multi-foot linear piezoelectric actuator |
| CN114244183A (en) * | 2021-12-25 | 2022-03-25 | 西安交通大学 | Resonance type piezoelectric actuator with X-shaped structure capable of being driven in two directions and actuating method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201252496Y (en) * | 2008-08-08 | 2009-06-03 | 辽宁工业大学 | H-shaped stationary wave linear ultrasonic motor vibrator |
| CN101626204A (en) * | 2009-08-25 | 2010-01-13 | 哈尔滨工业大学 | U-type double-pin linear ultrasonic motor vibrator |
| CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
-
2011
- 2011-12-22 CN CN201110435858.7A patent/CN102437783B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201252496Y (en) * | 2008-08-08 | 2009-06-03 | 辽宁工业大学 | H-shaped stationary wave linear ultrasonic motor vibrator |
| CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
| CN101626204A (en) * | 2009-08-25 | 2010-01-13 | 哈尔滨工业大学 | U-type double-pin linear ultrasonic motor vibrator |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103746598A (en) * | 2014-01-27 | 2014-04-23 | 哈尔滨工业大学 | Paster longitudinal vibration composite dual-feet piezoelectric supersonic motor vibrator |
| CN103746597A (en) * | 2014-01-27 | 2014-04-23 | 哈尔滨工业大学 | Paster T-shaped dual-feet linear piezoelectric supersonic motor vibrator |
| CN103795290A (en) * | 2014-01-27 | 2014-05-14 | 哈尔滨工业大学 | Patch type longitudinal vibration composite single-foot piezoelectric ultrasonic motor oscillator |
| CN104967355A (en) * | 2015-07-20 | 2015-10-07 | 哈尔滨工业大学 | Bionic crawling multi-foot linear piezoelectric actuator |
| CN104967355B (en) * | 2015-07-20 | 2017-03-01 | 哈尔滨工业大学 | Simulating crawling polypody linear piezoelectric actuator |
| CN114244183A (en) * | 2021-12-25 | 2022-03-25 | 西安交通大学 | Resonance type piezoelectric actuator with X-shaped structure capable of being driven in two directions and actuating method thereof |
| CN114244183B (en) * | 2021-12-25 | 2023-08-15 | 西安交通大学 | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102437783B (en) | 2014-10-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101626203B (en) | Vibrator of beam type linear ultrasonic motor using bending vibration modes | |
| CN101626206B (en) | Longitudinal and flexural composite transducer type double cylinder-shaped traveling wave ultrasonic motor vibrator | |
| CN102437786A (en) | Surface mount type square four-footed rotational ultrasonic motor vibrator | |
| CN101630924B (en) | T-shaped linear ultrasonic motor oscillator | |
| CN102437782B (en) | Sandwich I-shaped four-footed linear ultrasonic motor vibrator | |
| CN102868315A (en) | Paster-type bending vibration composite dual-feet ultrasound motor oscillator | |
| CN102437783B (en) | Surface mount type I-shaped four-footed linear ultrasonic motor vibrator | |
| CN102361413B (en) | Composite flexural vibration sandwich type double-foot linear ultrasonic motor vibrator | |
| CN103746597A (en) | Paster T-shaped dual-feet linear piezoelectric supersonic motor vibrator | |
| CN102355160B (en) | Longitudinal and bending composite mode sandwich two-foot ultrasonic linear motor oscillator with elastic support | |
| CN102361414A (en) | Buckling composite modal sandwich type double-foot rotating ultrasonic motor vibrator with elastic supports | |
| CN104967355A (en) | Bionic crawling multi-foot linear piezoelectric actuator | |
| CN102739106A (en) | Bent vibration composite single-driving foot linear ultrasonic driver | |
| CN102361412A (en) | Patch type rectangular four-foot linear ultrasonic motor vibrator | |
| CN102497132B (en) | Ceramic embedded I-shaped four-foot linear ultrasonic motor vibrator | |
| CN102882420A (en) | Surface-mounted piezoelectric ceramic and metal composite beam and method for exciting the composite beam to realize longitudinal and bending compounded vibration | |
| CN102437779B (en) | Wedge-shaped pre-tightened sandwich type rectangular four-pin linear ultrasonic motor vibrator | |
| CN101651431B (en) | Cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor vibrator | |
| CN101626204B (en) | U-type double-pin linear ultrasonic motor vibrator | |
| CN105406754A (en) | Longitudinal-flexural-combined single-foot two-degree-of-freedom ultrasonic motor vibrator | |
| CN103762886B (en) | Sandwich type T type two-foot straight line piezoelectric ultrasonic motor oscillator | |
| CN102437780A (en) | Partition excitation type composite bending vibration linear ultrasonic motor oscillator | |
| CN102868316A (en) | Paster-type dual-feet ultrasound motor oscillator | |
| CN103746601A (en) | Paster transducer cylinder traveling wave piezoelectric supersonic motor vibrator | |
| CN101626207B (en) | Vibrator of beam type rotary ultrasonic motor using bending vibration modes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141008 |