CN1622445A - Hollow metal square column piezoelectric element composite ultrasonic micromotor - Google Patents
Hollow metal square column piezoelectric element composite ultrasonic micromotor Download PDFInfo
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- CN1622445A CN1622445A CN 200410101575 CN200410101575A CN1622445A CN 1622445 A CN1622445 A CN 1622445A CN 200410101575 CN200410101575 CN 200410101575 CN 200410101575 A CN200410101575 A CN 200410101575A CN 1622445 A CN1622445 A CN 1622445A
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Abstract
The compound ultrasonic miniature motor consists of stator to excite ultrasonic vibration, rotor or runner to output moment and pre-stress mechanism to pressurize the rotor or runner. The stator consists of mainly composite element comprising square hollow metal column to excite vibration and piezoelectric ceramic chips and matching block. The piezoelectric ceramic chips are adhered to two or four sides of the square hollow metal column, has coated outer electrode for polarizing and exciting in the surface and is polarized in the thickness direction. The ultrasonic miniature motor of the present invention has the advantages of easy polarization of the piezoelectric ceramic chips, exciting electric field perpendicular to the polarization direction and high efficiency. The present invention has size as small as 0.3 mm, and may find its wide application in biology, medicine, micro machine, etc.
Description
Technical field
The invention belongs to the applications of ultrasound field, particularly a kind of structural design of supersonic motor of microminiaturization.
Background technology
Piezoelectric ultrasonic motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of functional parts such as stator, rotor and pre-pressure mechanisms.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by the frictional force drives rotor motion between stator and the rotor.Ultrasound electric machine has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load;
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine;
3, starting stops response soon, and the response time is less than 1 millisecond;
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet;
5, self-sustaining moment is arranged, gearless gap, but precision positioning;
6, move quiet noiseless.
The flexural vibration mode supersonic motor is a kind of of ultrasound electric machine, other ultrasound electric machine is fairly simple relatively for its structure, same mainly by the stator that encourages ultrasonic vibration, rotor of output torque (or mover) and the compositions such as pre-pressure mechanism of giving rotor (or mover) pressurization, described stator mainly is made of the piezo ceramic element and the match block of excited vibration again.The transmission principle of flexural vibration mode supersonic motor as shown in Figure 1, stator is in the mode of vibration that circumference is shaken the head, one very little gap is arranged between stator 11 and the ring-type rotor 12, the curved edges motion of shaking the head in stator limit during transmission, therefore the point of contact contact is arranged between the stator and rotor, its contact point moves on the circumferential periphery of stator, and successively, the frictional force between stator and rotor makes rotor rotate along the direction opposite with the contact point moving direction.
The energisation mode of common flexural vibration mode supersonic motor stator vibration has two kinds, first kind of d that utilizes piezoelectric ceramic
33Effect applies electric field in polarised direction, makes the deformation of piezoelectric ceramic generation along polarised direction; Second kind of d that utilizes piezoelectric ceramic
31Effect applies electric field in polarised direction, make piezoelectric ceramic produce along with the vertical deformation of polarised direction.
Fig. 2 is the d that adopts piezoelectric ceramic
33The bending of piezoelectric effect the shake the head energisation mode and the structural representation of ultrasound electric machine, this kind motor is comparative maturity, and it utilizes the d of piezoelectric ceramic
33Effect is carried out the flexural vibrations excitation of stator, thereby inspires the yawing of stator.The polarization of the piezoelectric ceramic of this motor and excitation are shown in Fig. 2 (a), the used piezo ceramic element of this stator is 4 piezoelectric patches, on same piezoelectric patches, divide the two halves opposite polarization with diameter symmetry, two piezoelectric patches 212 spatial vertical of two piezoelectric patches 211 of logical A phase current and logical B phase current are arranged, adopt ten thousand bright sandwich structures to form stator, A imports Sin ω t signal mutually simultaneously, and B imports Cos ω t signal mutually, adopts each 90 degree phase difference of time and space to encourage flexural vibrations like this; The flexural vibration mode supersonic motor structure of this piezoelectric patches excitation is shown in Fig. 2 (b), match block 226,228 clamps the common stator that constitutes motor in 4 piezoelectric ceramic pieces, 227 backs up and down, place the rotor 225 on the stator to be hollow-core construction, there is the spring 224 that applies precompression its hollow part, moment is by gear 223 outputs, and 222 is the polytetrafluoroethylene cover, plays bearing, 221 is packing ring, and 229 is main shaft.
Fig. 3 is the d that adopts piezoelectric ceramic
31The bending of piezoelectric effect the shake the head energisation mode and the structural representation of ultrasound electric machine, the polarization of this piezoelectric ceramic tube and subregion are shown in Fig. 3 (a), and used piezo ceramic element is a piezo tube, has adopted the d of piezoelectric ceramic
31Piezoelectric effect.Piezo tube is evenly polarized to inwall by outer wall, electrode grounding in it in use, and outer wall scribbles four equally distributed external electrodes 31, feeds sin ω t, cos ω t ,-sin ω t ,-cos ω t signal excitation 311,312,313 and 314 4 on extremely successively.The flexural vibration mode supersonic motor structure of this piezo tube excitation is shown in Fig. 3 (b), and two metal caps of 321 liang of terminations of piezo tube 322 constitute motor stator, and the rotor 323 usefulness nuts 325 at two ends and spring 324 are screwed on the axle 326.
The main advantage of flexural vibration mode supersonic motor is easy to realize microminiaturization and industrialization exactly.The industrialization of bar-shaped swing type ultrasound electric machine, the diameter of motor is generally all bigger; Piezoelectric ceramic tube and piezoelectric ceramic post scheme help the microminiaturization of ultrasound electric machine structure, and the diameter of the swing type ultrasound electric machine of Xin Jiabo national university development only is 1.5mm.The microminiature ultrasound electric machine can be at mobile phone, and fields such as medical treatment and space flight obtain extensive use, the application of ultrasound electric machine can be pushed to a new stage.
But then, existing miniature piezo-ceramic post scheme exists small hollow hole to be not easy problems such as processing and polarization process more complicated, be difficult to guarantee excitation electrical field perpendicular to polarised direction, thereby be easy to generate undesirable force component, influence the vibration efficiency of motor.
Summary of the invention
The present invention proposes a kind of hollow metal square column piezoelectric element composite ultrasonic micromotor in order to overcome the problems referred to above that prior art exists, and adopts the stator of making electrical micro-machine in the method for four side pressings of metal column electroceramics sheet, has utilized the d of piezoelectric ceramic
31The flexural vibration mode of effect excitation stator.Have piezoelectric ceramic and be easy to polarization, polarization process is simple and can guarantee excitation electrical field perpendicular to polarised direction, the efficient advantage of higher.
The hollow metal square column piezoelectric element composite ultrasonic micromotor that the present invention proposes, stator by the excitation ultrasonic vibration, rotor of output torque (or mover) and the pre-pressure mechanism composition of giving rotor (or mover) pressurization, it is characterized in that, described stator mainly is made of composite component and the match block that the hollow metal square column and the piezoelectric ceramic piece of excited vibration are formed, described piezoelectric ceramic piece is bonded on two of the hollow metal square column or four sides, along the thickness direction polarization, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness.
Described piezoelectric ceramic piece can adopt 2, be bonded to two adjacent sides of hollow metal square column, add sin ω t and the cos ω t excitation signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration) respectively.
Described piezoelectric ceramic piece can adopt 4, be bonded to four sides of hollow metal square column, relative piezoelectric ceramic piece polarised direction opposite (with respect to the method direction of metal column adhesive surface), four adjacent side add sin ω t in regular turn, cos ω t, sin ω t, cos ω t encourages the signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration).
Described piezoelectric ceramic piece can adopt 4, be bonded to four sides of hollow metal square column, relative piezoelectric ceramic piece polarised direction identical (with respect to the method direction of metal column adhesive surface), four adjacent side add sin ω t in regular turn, cos ω t,-sin ω t ,-cos ω t encourages the signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration).
Described piezoelectric ceramic piece can adopt 4, be bonded to four sides of hollow metal square column, one group of relative piezoelectric ceramic piece polarised direction identical (with respect to the method direction of metal column adhesive surface), it is opposite that another organizes relative piezoelectric ceramic piece polarised direction, if four adjacent side add sin ω t in regular turn, cos ω t,-sin ω t, cos ω t encourages the signal of telecommunication, then two cos ω t signals are added on two opposite potteries of polarised direction, if apply sin ω t in regular turn, cos ω t, sin ω t ,-cos ω t encourages the signal of telecommunication, then two sin ω t signals are added in (motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration) on two opposite potteries of polarised direction.
Above-mentioned sin ω t (or-sin ω t) pumping signal and cos ω t (or-cos ω t) the pumping signal exchange, then crooked yawing is reverse, and motor movement is reverse.
The purpose that the present invention applies electric field is to motivate the flexural vibrations that two space quadratures are 90 degree on stator, and two flexural vibrations of stator synthesize the motion of shaking the head of stator.The movement locus that is used to drive the lip-deep point of rotor this moment on the stator is an ellipse, thereby can drive rotor motion.
Characteristics of the present invention and effect:
The ultrasound electric machine of the present invention design can be with dimensioned very little, may diminish to 0.3mm, can promote the microminiaturization of ultrasound electric machine.The present invention will have wide application prospect at aspects such as biology, medical treatment, micromechanics, science and techniques of defence.
Description of drawings
Fig. 1 is the general transmission principle schematic diagram that adopts the flexural vibration mode supersonic motor.
Fig. 2 is the d of existing employing piezoelectric ceramic
33The bending of the piezoelectric effect ultrasound electric machine schematic diagram of shaking the head;
Wherein: Fig. 2 (a) is the polarization and the excitation of piezoelectric ceramic, and Fig. 2 (b) is the structural representation of motor.
Fig. 3 is the d of existing employing piezoelectric ceramic
31The shake the head structural representation of ultrasound electric machine of the bending of piezoelectric effect;
Wherein: Fig. 3 (a) is the polarization and the subregion of piezoelectric ceramic, and Fig. 3 (b) is an electric machine structure;
Fig. 4 is the structure and the exiting form schematic diagram of the stator of electrical micro-machine of the present invention.
Wherein: Fig. 4 (a) is hollow metal square column and the polarization and the energisation mode of adjacent two sides piezoelectric ceramic piece,
Fig. 4 (b) is hollow metal square column and polarization and the energisation mode that piezoelectric ceramic has all been pasted in four sides.
Fig. 5 is embodiments of the invention one---magnetic force positioning motor structural representation.
Fig. 6 is embodiments of the invention two---both-end axle output motor structural representation.
Fig. 7 is embodiments of the invention three---single-ended axle output motor structural representation.
Fig. 8 is embodiments of the invention four---be shell fastening electric machine structure schematic diagram.
Fig. 9 is embodiments of the invention five---waist abdomen drive motors structural representation.
Embodiment
The embodiment that hollow metal square column piezoelectric element composite ultrasonic micromotor of the present invention reaches five kinds of electric machine structures in conjunction with the accompanying drawings is respectively described below:
The hollow metal square column piezoelectric element composite ultrasonic micromotor that the present invention proposes, stator by the excitation ultrasonic vibration, rotor of output torque (or mover) and the pre-pressure mechanism composition of giving rotor (or mover) pressurization, described stator mainly is made of the piezo ceramic element and the match block of excited vibration; This stator is made of the hollow metal square column of side pressing electroceramics element.The version of stator is divided into and pastes piezoelectric ceramic piece (shown in Fig. 4 (a)) in the adjacent two sides of hollow metal square column 411 and all paste two kinds of forms of piezoelectric ceramic piece (shown in Fig. 4 (b)) in four sides of hollow metal square column 422 as shown in Figure 4;
Piezoelectric ceramic all polarizes along thickness direction.In the structure shown in Fig. 4 (a), when pasting piezoelectric ceramic piece in adjacent two sides, the polarised direction of two potsherds can identical (with respect to the method direction of adhesive surface), also can be opposite.In the structure shown in Fig. 4 (b), generally speaking, the polarised direction of relative potsherd (potsherd 421 is relative with 425, and potsherd 423 is relative with 424) should be opposite during installation, to reduce the design difficulty of driving power, can certainly be arbitrarily;
For the stator structure shown in Fig. 4 (a), the mode that applies of electric field is: add on piezoelectric ceramic piece pole-face 412+the sin pumping signal, add cos ω t pumping signal on 413 electrode surfaces, with metal column 411 ground connection;
For the stator structure shown in Fig. 4 (b), the mode that applies of electric field is: add on potsherd 423 pole-faces+sin ω t pumping signal, on potsherd 425 pole-faces, add cos ω t pumping signal, if 423 with 424 polarised directions identical (with respect to the method direction of metal column adhesive surface) when mounted, then on 424 pole-faces, add-sin ω t pumping signal, if polarised direction is opposite when mounted for potsherd 423 and potsherd 424, then on potsherd 424 pole-faces, add sin ω t pumping signal.If polarised direction is identical when mounted then adds on potsherd 421 pole-faces-cos ω t pumping signal for potsherd 421 and potsherd 425, if polarised direction is opposite when mounted for potsherd 421 and potsherd 425, then on potsherd 421 pole-faces, add cos ω t pumping signal, with metal column 422 ground connection;
Sin ω t (or-sin ω t) pumping signal and cos ω t (or-cos ω t) the pumping signal exchange, then crooked yawing is reverse, and motor movement is reverse.
The purpose that applies electric field is to motivate the flexural vibrations that two space quadratures are 90 degree on stator, and two flexural vibrations of stator synthesize the motion of shaking the head of stator.The movement locus that is used to drive the lip-deep point of rotor this moment on the stator is an ellipse, thereby can drive rotor motion.
Embodiment one: be the electrical micro-machine of magnetic force location structure
This structure as shown in Figure 5, its main feature is to do rotor with magnetic steel ball 51, hollow metal piezoelectric ceramic piece combined column 53 and spill magnetic metal match block 52 usefulness seccotines bonding forms one, constitutes the stator of motor jointly.Magnetic steel ball rotor is placed in the concave surface of metal matching blocks 52.Like this by the magnetic force between rotor and the metal matching blocks 52 as fixed rotor with produce the required precompression of frictional force, moment is directly exported by rotor.
Embodiment two: be the electrical micro-machine of both-end axle export structure
This structure as shown in Figure 6, its main feature is that both-end drives, axle output, promptly pastes match block 63 at the two ends of the compound stator 64 of metal crimp electroceramics and constitutes stators, 66 for being used to paste the thin glue of one deck of stator 64 and match block 63.The rotor 62 at two ends connects together by the axle 68 that passes from hollow stator, the spring 61 and the clamp nut 67 that are placed on the axle 68.Spring is used to provide the precompression between stator and rotor.Stator drives rotor 62 rotations by frictional layer 65.Moment is directly exported by rotor, rotor 62 outward flanges can be processed into gear during actual the use, by the gear drive output torque.
Embodiment three is the electrical micro-machine of single-ended axle export structure
This structure as shown in Figure 7, its main feature is that the middle one of stator match block 73 processes (or fixing) thin rod fixed axis 77 as motor.This axle and stator match block can be same metalworks.The compound square column of metal piezoelectric ceramic piece 74 and match block 73 connect in that 76 places are gluing, jointly as the stator of motor.Rotor 72 is enclosed within on the fixed axis 77 of stator match block 73 and provides precompression between stator and rotor by being enclosed within little spring 71 on the fixed axis 77.In this motor, the axle 77 main effects that play are to rotor 72 and pressure little spring 71 location.78 for sliding or rolling bearing.Moment is directly exported by rotor, the rotor outward flange can be processed into gear during actual the use, by the gear drive output torque.75 places are the frictional interface between stator and the rotor.
Embodiment four is the electrical micro-machine of shell locking strutcture
This structure as shown in Figure 8, its main feature is that whole driving mechanism covers on metal shell 810 the insides, shell produces precompressions by rubber blanket 81 and sliding bearing (or rolling bearing) 87 pressuring springs 82.Rotor 83 places on the stator match block 84, and the centre of rotor 83 is processed with a thin rod as axle 830, and this axle and rotor are same metalworks.89 places are gluing between piezoelectric ceramic cylinder 85 upper end faces and match block 84 rear surfaces connects.Piezoelectric ceramic cylinder 85 rear surfaces same gluing be connected on the metab 86 and by screw thread in lower end side 810 places and shell positioning and fixing.Be frictional interface 88 between stator and the rotor, moment can directly be exported by axle.
Embodiment five is the electrical micro-machine of waist abdomen Drive Structure
This structure as shown in Figure 9, its main feature is: comprise the motor-driven piece 93 that sticks on the compound stator of metal crimp electroceramics 92 middle parts, drive block 93 links to each other with rotor 95 by friction material 94, stator 92 is fixed with fixed mechanism 91 at its curved node place that shakes.Utilize the motion at stator middle part (waist abdomen) to drive rotor 95 motions by drive block 93, can constitute linear electric motors, also can continue conversion of motion is rotatablely moving of armature spindle 96.
Claims (10)
1, a kind of based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, stator by the excitation ultrasonic vibration, the rotor of output torque or mover and give rotor or the pre-pressure mechanism of mover pressurization is formed, it is characterized in that, described stator mainly is made of composite component and the match block that the hollow metal square column and the piezoelectric ceramic piece of excited vibration are formed, described piezoelectric ceramic piece is bonded on two of the hollow metal square column or four sides, along the thickness direction polarization, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness.
2, as claimed in claim 1 based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, described piezoelectric ceramic piece adopts 2, is bonded to two adjacent sides of hollow metal square column, adds sin ω t and the cos ω t excitation signal of telecommunication respectively.
3, as claimed in claim 1 based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, described piezoelectric ceramic piece adopts 4, be bonded to four sides of hollow metal square column, relative piezoelectric ceramic piece polarised direction is opposite, and four adjacent side add sin ω t in regular turn, cos ω t, sin ω t, cos ω t encourages the signal of telecommunication.
4, as claimed in claim 1 based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, described piezoelectric ceramic piece adopts 4, be bonded to four sides of hollow metal square column, relative piezoelectric ceramic piece polarised direction is identical, four adjacent side add sin ω t in regular turn, cos ω t,-sin ω t,-cos ω t encourages the signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration).
5, as claimed in claim 1 based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, described piezoelectric ceramic piece adopts 4, be bonded to four sides of hollow metal square column, one group of relative piezoelectric ceramic piece polarised direction is identical, it is opposite that another organizes relative piezoelectric ceramic piece polarised direction, if four adjacent side add sin ω t in regular turn, cos ω t,-sin ω t, cos ω t encourages the signal of telecommunication, and then two cos ω t signals are added on two opposite potteries of polarised direction, if apply sin ω t in regular turn, cos ω t, sin ω t ,-cos ω t encourages the signal of telecommunication, and then two sin ω t signals are added on two opposite potteries of polarised direction.
6, as claim 1,2,3,4 or 5 described based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, described rotor adopts the magnetic steel ball, described match block adopts spill magnetic metal piece, this magnetic steel ball rotor is placed in the concave surface of this metal matching blocks, magnetic force between this rotor and the match block is used for fixing rotor and produces the required precompression of frictional force, and moment is directly exported by rotor.
7, as claim 1,2,3,4 or 5 described based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, the two ends of the compound stator of described metal crimp electroceramics are pasted match block and are constituted stator, also comprise the axle that passes from hollow stator, described pre-pressure mechanism adopts spring, described rotor is that two two ends that are placed in this join by frictional layer and stator, and fuses by being placed in spring on the axle and clamp nut and this stator; Moment is directly exported by rotor.
8, as claim 1,2,3,4 or 5 described based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, the match block of a thin rod as the fixed axis of motor in the middle of adopting, described match block arranged, described pre-pressure mechanism adopts the spring that is enclosed within on this fixed axis, and described rotor is enclosed within on the fixed axis of this match block and provides precompression between stator and rotor by little spring; Moment is directly exported by rotor.
9, as claim 1,2,3,4 or 5 described based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, also comprise a metal shell, described stator and rotor are arranged in this shell, there is a thin rod centre of described rotor as axle, and described pre-pressure mechanism adopts the spring that is enclosed within on this, and this shell pressuring spring produces precompression, for being provided with frictional interface, moment is directly exported by axle between described stator and the rotor.
10, as claim 1,2,3,4 or 5 described based on hollow metal square column and the compound flexural vibration mode ultrasonic wave electrical micro-machine of piezoelectric ceramic piece, it is characterized in that, also comprise the fixed mechanism of fixed stator and stick on the motor-driven piece at described stator middle part, this drive block links to each other with described rotor by friction material layer, and the motion at stator middle part drives the rotatablely moving of axle that rotor motion constitutes linear electric motors or is converted into rotor by drive block.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004101015759A CN100461609C (en) | 2004-12-24 | 2004-12-24 | Hollow metal square column piezoelectric element composite ultrasonic micromotor |
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| CNB2004101015759A CN100461609C (en) | 2004-12-24 | 2004-12-24 | Hollow metal square column piezoelectric element composite ultrasonic micromotor |
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| CN1622445A true CN1622445A (en) | 2005-06-01 |
| CN100461609C CN100461609C (en) | 2009-02-11 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101170286B (en) * | 2006-10-18 | 2010-07-21 | 哈尔滨工业大学 | Multi-freedom degree ultrasonic wave electromotor based on piezoelectric porcelain shear strain |
| CN101170290B (en) * | 2007-09-26 | 2010-09-15 | 哈尔滨工业大学 | Micro bending ultrasonic electromotor based on magnetic force pre-pressure device |
| CN106787938A (en) * | 2016-12-21 | 2017-05-31 | 深圳大学 | A kind of annular traveling wave supersonic motor of welding procedure |
| CN108282106A (en) * | 2018-02-05 | 2018-07-13 | 中国科学院苏州生物医学工程技术研究所 | The piezoelectric ceramic motor being eccentrically rotated |
| CN109861583A (en) * | 2019-04-15 | 2019-06-07 | 太原科技大学 | A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6477482A (en) * | 1987-09-18 | 1989-03-23 | Nec Corp | Ultrasonic motor |
| JPH04355679A (en) * | 1991-05-30 | 1992-12-09 | Asmo Co Ltd | Ultrasonic motor |
| CN1156068C (en) * | 2001-02-28 | 2004-06-30 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1258864C (en) * | 2002-02-22 | 2006-06-07 | 清华大学 | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor |
| CN1279686C (en) * | 2003-09-05 | 2006-10-11 | 清华大学 | Piezoelectric ceramic electric motor |
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2004
- 2004-12-24 CN CNB2004101015759A patent/CN100461609C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101170286B (en) * | 2006-10-18 | 2010-07-21 | 哈尔滨工业大学 | Multi-freedom degree ultrasonic wave electromotor based on piezoelectric porcelain shear strain |
| CN101170290B (en) * | 2007-09-26 | 2010-09-15 | 哈尔滨工业大学 | Micro bending ultrasonic electromotor based on magnetic force pre-pressure device |
| CN106787938A (en) * | 2016-12-21 | 2017-05-31 | 深圳大学 | A kind of annular traveling wave supersonic motor of welding procedure |
| CN106787938B (en) * | 2016-12-21 | 2023-01-31 | 深圳大学 | Annular traveling wave ultrasonic motor of welding process |
| CN108282106A (en) * | 2018-02-05 | 2018-07-13 | 中国科学院苏州生物医学工程技术研究所 | The piezoelectric ceramic motor being eccentrically rotated |
| CN108282106B (en) * | 2018-02-05 | 2024-01-23 | 中国科学院苏州生物医学工程技术研究所 | Eccentric rotary piezoelectric ceramic motor |
| CN109861583A (en) * | 2019-04-15 | 2019-06-07 | 太原科技大学 | A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor |
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| CN100461609C (en) | 2009-02-11 |
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