CN109861583A - A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor - Google Patents
A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor Download PDFInfo
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- CN109861583A CN109861583A CN201910297486.2A CN201910297486A CN109861583A CN 109861583 A CN109861583 A CN 109861583A CN 201910297486 A CN201910297486 A CN 201910297486A CN 109861583 A CN109861583 A CN 109861583A
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- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000007246 mechanism Effects 0.000 abstract description 3
- 210000000515 tooth Anatomy 0.000 description 38
- 238000010586 diagram Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002783 friction material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 241000826860 Trapezium Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a kind of superimposed type longitudinal vibration mode rotary piezo-electric motors, belong to piezoelectric driving technology field.The present invention includes stud, back shroud, piezoelectric ceramic piece, electrode slice, modal transducer, lower end spring, cone rotor, upper end spring, nut.The back shroud, piezoelectric ceramic piece, electrode slice, modal transducer constitute the stator module of the rotary piezo-electric motor；The cone rotor is the rotor portion of rotary piezo-electric motor.The upper end spring, lower end spring and nut constitute the positive pressure prefastening force adjustment mechanism of piezo-electric motor rotor and stator module.The present invention drives modal transducer to tilt by being superimposed the longitudinal vibration mode of two groups of piezoelectric ceramic pieces, and then cone rotor rotation is driven under the action of frictional force.The features such as present invention has compact-sized, drive efficiency height, is convenient for micromation.
Description
Technical field
The present invention relates to piezoelectric driving technology field, in particular to a kind of superimposed type longitudinal vibration mode rotary piezo-electric motor.
Background technique
Piezoelectric type micromotion mechanism is widely applied in fields such as micro feed, fiber alignment and industrial robots, piezoelectricity
Material is also most common driving element material in intellectual material simultaneously, has good dynamic characteristic and high-resolution.With
The development and application of piezo technology, piezo technology are widely used in robot, medical treatment and aerospace field, form one kind
Unique system.In order to adapt to requirement of the modern electronic technology to motor microminiaturization, the advantages of piezo-electric motor comes out, piezo-electric motor
It is prominent: it does not need to lubricate, it is compact-sized without gear-box；While also with small in size, response is fast, precision is high and does without magnetic field
The features such as disturbing.Due to there is no belt and gear, and can be increased by Microcomputer control, the controllability of piezo-electric motor.
In Publication No. CN203261258U, the patent text of entitled " a kind of mono signal driving rotary ultrasonic motor "
In offering, discloses and a kind of the extensional vibration that sandwich oscillator generates is converted into particle at the top of sliding tooth using strip sliding tooth
Elliptical vibration, and then utilize the ultrasound electric machine of frictional force drives rotor rotation.The inventive structure is simple, and assembly is easy, but drives
Tooth requirement on machining accuracy is high, and high production cost causes certain obstruction to the promotion and application of the ultrasound electric machine.The present invention utilizes
Modal transducer with rotational symmetry tooth reduces adding for each part of piezo-electric motor by means of frictional force drives cone rotor
Work precision improves the mechanical performance of piezo-electric motor.
In Publication No. CN102005965A, the patent of entitled " a kind of supersonic motor of single phase poaer supply driving "
In document, disclose a kind of to the two panels relaxor ferroelectric monocrystal piezoelectric patches being set on the outside of hollow metal straight tube on cross section application
One-way communication electricity can inspire stator along two first-order bending vibrations of X-axis and Y-axis, and then turn using frictional force drives simultaneously
The supersonic motor of son rotation.This electric machine structure is simple, but thrust is limited, and unavoidably because excess load causes to slide, if
Precompression is small, and frictional engagement face is possible to generate sliding friction, causes to be plastically deformed if precompression is excessive, be difficult to realize just
Really driving, and be also easy to generate wear problem.The present invention use pyramidal structure rotor, can effectively reduce stator module and
Sliding friction between rotor.
The electric parameter and mechanical parameter of piezo-electric motor are outstanding, and certain characteristics are better than best conventional electromagnetic motor, but
The precompression of some limitations such as to be that there is also power outputs small, structure is complicated, the stator of part rotary piezo-electric motor and rotor without
Method effectively adjusts, and leads to not effective regulating friction force, and the present invention effectively and accurately adjusts positive pressure preload using spring and nut
Power.
Summary of the invention
The purpose of the present invention is to provide a kind of superimposed type longitudinal vibration mode rotary piezo-electric motors, to solve now in the art
Existing foregoing problems.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor mainly includes stator module and rotor, it is characterised in that: the stator
Component includes back shroud 1, piezoelectric ceramic piece 2, electrode slice 9, the modal transducer 3 with rotary teeth；The rotor is cone rotor
4, it is bonded with frictional layer in the extrados of cone rotor 4, is rubbed with being generated after the rotation tooth contact on aforementioned 3 top of modal transducer
Coupling.The stationary part is connect with rotor by stud 7, while stator module is also the energy convertion section of piezo-electric motor
Point, convert electrical energy into the vibrational energy of stationary part.
The modal transducer 3 is integrated, the rotation toothed portion of tetragonous post part and upper end including lower end,
The rotary teeth is respectively distributed to the midpoint of quadrangular upper surface four edges, and the quantity of the rotary teeth is 4.The rotation
The purpose that tooth is set as trapezium structure is frictional engagement face between the extrados for the inclined-plane and cone rotor that increase rotary teeth
Area, guarantee piezo-electric motor displacement output big step pitch.
The extrados and 4 axis of cone rotor of the cone rotor 4 form 30 °~60 ° of angle and modal transducer 3
The inclined-plane of upper end rotary teeth is consistent with the corner dimension that 3 axis of modal transducer is formed.
The cone rotor 4 using the rotor of pyramidal structure can reduce rotary teeth tooth inclined-plane and rotor taper extrados it
Between sliding friction, reduce the amount of elastic deformation that rotor and rotary teeth occur, effectively delay the appearance of wear problem.
The upper end spring 5, lower end spring 6 and nut 8 constitute the positive pressure pretightning force of piezo-electric motor rotor and stator module
Adjustment mechanism.The distance between the adjustable cone rotor of the lower end spring 6 and modal transducer, make the outer arc of metallic rotator
The face not contact of incline plane with modal transducer upper end rotary teeth, while on adjustable cone rotor extrados and modal transducer
Hold the distance between rotary teeth inclined-plane.
The piezoelectric ceramic piece of the piezo-electric motor works in d33Vibration mode, d33Mode is the longitudinal extension of piezoelectric ceramic piece
The fundamental tone mode of vibration, this vibration mode realize that the mechanical-electric coupling of energy conversion is high-efficient；The preferentially choosing of piezoelectric ceramic piece 2
Selecting has higher d33The PZT-5H piezoelectric material of piezoelectric constant, the upper and lower end face of each piezoelectric ceramic piece are respectively provided with a plate electrode
Piece.
Further, the inclined-plane that the modal transducer rotary teeth is contacted with rotor is bonded with A friction material.
Further, B friction material is bonded on the cone rotor and the extrados of mode rotation tooth contact.
Further, the surface that electrode slice is not contacted with piezoelectric ceramic piece is coated with insulating materials.
Detailed description of the invention
Fig. 1 and Fig. 2 is superimposed type longitudinal vibration mode rotary piezo-electric motor structural schematic diagram.Figure label title: 1- back shroud；
2- piezoelectric ceramic piece；Modal transducer of the 3- with rotary teeth；4- cone rotor；The upper end 5- spring；The lower end 6- spring；7- stud；
8- nut；9- electrode slice.
Fig. 3 is the spatial position schematic diagram of two pairs of piezoelectric ceramic pieces in Fig. 1 or Fig. 2.
Fig. 4 (1) is a fundamental vibration mode schematic diagram of piezo-electric motor stator module；Fig. 4 (2) is the fundamental vibration
The movement schematic diagram of modal transducer under mode；Fig. 4 (3) is the rotation schematic diagram of cone rotor.Figure label title: 31-
One rotary teeth；The second rotary teeth of 32-；33- third rotary teeth；The 4th rotary teeth of 34-.
Fig. 5 is complete fundamental vibration mode schematic diagram in a circulation of piezo-electric motor stator module.
Specific embodiment
For the clearer technical characterstic for illustrating this programme, the present invention will be described in detail with reference to the accompanying drawing.
A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor is as depicted in figs. 1 and 2, including stud 7 and is sequentially sleeved in stud 7
On back shroud 1, piezoelectric ceramic piece 2, electrode slice 9, the modal transducer 3 with rotary teeth, cone rotor 4, upper end spring 5, under
Hold spring 6, nut 8；Stator module is by back shroud 1, piezoelectric ceramic piece 2, electrode slice 9, the modal transducer 3 with rotary teeth
It connects.Coupled by the internal screw thread of external screw thread and nut 8 on stud 7, back shroud 1, piezoelectric ceramic piece 2, electrode slice 9 and band
The modal transducer 3 of rotary teeth is fixed.One end of stud 7 screws at the center of 1 one end end face of back shroud；Four piezoelectricity
2 sets of potsherd is on the stud 7 between rear end cap 1 and modal transducer 3 with rotary teeth；Each piezoelectric ceramic piece 2 is along thickness
Direction polarization, polarization direction are consistent.
Modal transducer 3 with rotary teeth is integrated, the rotary teeth of tetragonous post part and upper end including lower end
Part, rotary teeth are distributed in the midpoint of quadrangular upper surface four edges, and the quantity of rotary teeth is 4, the geometry of each rotary teeth
Central axis is parallel with the axis of parallelepiped body portion.The extrados of cone rotor 4 and the axis of cone rotor 4 form 30 °~60 °
3 upper end rotary teeth of angle and modal transducer inclined-plane it is consistent with the corner dimension that 3 axis of modal transducer is formed.It adjusts
The positive pressure pretightning force in the frictional engagement face after rotary teeth inclined-plane and cone rotor outer arc face contact can be changed in the position of nut 8, protects
Demonstrate,prove the big step pitch of piezo-electric motor displacement output.
The spatial distribution of the piezoelectric ceramic piece 2 of the rotary piezo-electric motor is as shown in Fig. 2, piezoelectric ceramic piece 21 and piezoelectricity pottery
Tile 24 is generally aligned in the same plane, and piezoelectric ceramic piece 22 and piezoelectric ceramic piece 23 are generally aligned in the same plane, piezoelectric ceramic piece 21 and piezoelectricity
The position of potsherd 24 and the position of piezoelectric ceramic piece 22 and piezoelectric ceramic piece 23 shape angle in 90 ° in the horizontal direction.
An a kind of operation mode schematic diagram of superimposed type longitudinal vibration mode rotary piezo-electric motor is as shown in figure 4, four piezoelectricity
The electrode slice of potsherd is respectively connected to that vibration frequency is identical, and phase difference is the ultrasonic ac signal in 1/4 period；Such as Fig. 4 (1) institute
Show, when piezoelectric ceramic piece 22 is in wave crest state, and piezoelectric ceramic piece 23 is in trough state, piezoelectric ceramic piece 22 is due to inverse pressure
Electrical effect excites longitudinal stretch motion, and piezoelectric ceramic piece 23 is due to inverse piezoelectric effect excitation longitudinal contraction movement, piezoelectric ceramic piece 2
The banking motion as shown in Fig. 4 (2) can occur for the modal transducer 3 of upper end, make the outer arc of the first rotary teeth 31 and cone rotor 4
Face forms frictional engagement face, and the inclined-plane of the first rotary teeth 31 contacts friction with the generation of 4 extrados of cone rotor；Piezoelectric ceramics at this time
Piece 24 is in trough state, and the modal transducer 3 of 2 upper end of piezoelectric ceramic piece can be superimposed a banking motion, the first rotary teeth 31
Inclined-plane and cone rotor 4 extrados caused by contact friction force horizontal component be cone rotor 4 driving force is provided, send out
The raw rotary motion as shown in Fig. 4 (3).
Shown in fig. 5 is an a kind of complete drive cycle of superimposed type longitudinal vibration mode rotary piezo-electric motor stator module,
One complete drive cycle is made of four groundwork mode, and four groundwork mode are driven by four rotary teeths respectively
Dynamic, continuous rotation movement may be implemented in motor.
The rotary piezo-electric motor is compact-sized, is conducive to minimize；4 rotary teeths of each drive cycle are distinguished in four points
Driving, drive efficiency are high.
The present invention is illustrated by above embodiment, but it is to be understood that, above embodiment is only used for lifting
Example and explanation are not intended to and limit the present invention within the scope of described embodiment.It will be appreciated by those skilled in the art that
, introduction according to the present invention can also make more kinds of variants and modifications, these variants and modifications belong to the present invention
Protection scope.
Claims (7)
1. a kind of superimposed type longitudinal vibration mode rotary piezo-electric motor, including stator module and rotor, it is characterised in that: the stator pack
Back shroud, piezoelectric ceramic piece, electrode slice, modal transducer in part are sequentially sleeved on stud；The rotor is cone-shaped metal body,
Frictional engagement face is formed after the contact of incline plane of its extrados and modal transducer rotary teeth；Between the stationary part and rotor
Positive pressure pretightning force can be adjusted by upper end spring, lower end spring and nut.
2. superimposed type longitudinal vibration mode rotary piezo-electric motor according to claim 1, it is characterised in that: the piezoelectric ceramic piece
It is made of upper and lower two groups of superpositions, two groups of piezoelectric ceramic pieces shape angle in 90 ° in the horizontal direction；The piezoelectric ceramic piece is along d33Side
To polarization, polarization direction is consistent.
3. superimposed type longitudinal vibration mode rotary piezo-electric motor according to claim 1 or 2, it is characterised in that: the stud with
Back shroud is fixedly connected, and the axis of the cone rotor is overlapped with stud axis.
4. superimposed type longitudinal vibration mode rotary piezo-electric motor according to claim 1, it is characterised in that: the piezoelectric ceramic piece
Thickness be 3~12mm；The material of the piezoelectric ceramic piece is recommended as PZT-5H.
5. superimposed type longitudinal vibration mode rotary piezo-electric motor according to claim 1 or 2, it is characterised in that: the taper turns
The extrados and cone rotor axis of son form 30 °~60 ° of angle and the inclined-plane and mode of modal transducer upper end rotary teeth
The corner dimension that transducer axis is formed is consistent.
6. superimposed type longitudinal vibration mode rotary piezo-electric motor according to claim 1 or 2, it is characterised in that: lower end spring can
To adjust the distance between cone rotor and modal transducer, rotate the extrados of metallic rotator with modal transducer upper end
The contact of incline plane of tooth, while the distance between adjustable cone rotor extrados and modal transducer upper end rotary teeth inclined-plane.
7. superimposed type longitudinal vibration mode rotary piezo-electric motor according to claim 1 or 2, it is characterised in that: piezoelectric ceramic piece
Work is in d33Vibration mode, d33Mode is the fundamental tone mode of the longitudinal extension vibration of piezoelectric ceramic piece, and this vibration mode is realized
The mechanical-electric coupling of energy conversion is high-efficient.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910297486.2A CN109861583A (en) | 2019-04-15 | 2019-04-15 | A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor |
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| CN201910297486.2A CN109861583A (en) | 2019-04-15 | 2019-04-15 | A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299867A (en) * | 2019-07-16 | 2019-10-01 | 太原科技大学 | A kind of four-footed driving rotary ultrasonic wave motor |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311981A (en) * | 1989-06-05 | 1991-01-21 | Canon Inc | Motor |
| JPH06178561A (en) * | 1992-12-03 | 1994-06-24 | Canon Inc | Ultrasonic motor |
| CN1514535A (en) * | 2003-07-30 | 2004-07-21 | 哈尔滨工业大学 | Piezoelectric sheet sticked metal prop stator and micro ultra sonic motor using said stator |
| CN1622445A (en) * | 2004-12-24 | 2005-06-01 | 清华大学 | Hollow metal square column piezoelectric element composite ultrasonic micromotor |
| CN1667934A (en) * | 2005-04-08 | 2005-09-14 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| TW200746610A (en) * | 2006-06-06 | 2007-12-16 | Univ Cheng Shiu | Piezoelectric motor |
| CN101572507A (en) * | 2009-06-12 | 2009-11-04 | 清华大学 | Protrudent toothed belt groove longitudinal bending mode conversion dual-rotor ultrasonic motor |
| CN101803053A (en) * | 2007-09-19 | 2010-08-11 | 皮南诺科技(皮尔佐南诺-科技)有限公司 | stick-slip piezoelectric motor |
| CN103208944A (en) * | 2013-05-08 | 2013-07-17 | 苏州科技学院 | Single electric signal driving rotation ultrasonic motor |
| CN103414375A (en) * | 2013-08-26 | 2013-11-27 | 苏州科技学院 | Single-electric-signal driving rotating ultrasonic motor |
| CN203596764U (en) * | 2013-09-27 | 2014-05-14 | 浙江工商大学 | Piezoelectric cantilever beam-type supersonic wave motor |
| TW201438392A (en) * | 2013-03-29 | 2014-10-01 | Univ Cheng Shiu | Composite piezoelectric motor |
| CN104377988A (en) * | 2014-12-09 | 2015-02-25 | 河北大学 | Standing-wave type ultrasonic motor of two driving frequency |
| CN106059378A (en) * | 2016-07-11 | 2016-10-26 | 南京航空航天大学 | Thin reverse type ultrasonic motor |
| CN109004859A (en) * | 2018-08-08 | 2018-12-14 | 南京航空航天大学 | Spoke type rotor ultrasound electric machine and its working method based on longitudinal vibration |
| CN109525143A (en) * | 2018-11-29 | 2019-03-26 | 南京航空航天大学 | A kind of curved compound sheet ultrasound electric machine of diameter and its control method |
-
2019
- 2019-04-15 CN CN201910297486.2A patent/CN109861583A/en active Pending
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311981A (en) * | 1989-06-05 | 1991-01-21 | Canon Inc | Motor |
| JPH06178561A (en) * | 1992-12-03 | 1994-06-24 | Canon Inc | Ultrasonic motor |
| CN1514535A (en) * | 2003-07-30 | 2004-07-21 | 哈尔滨工业大学 | Piezoelectric sheet sticked metal prop stator and micro ultra sonic motor using said stator |
| CN1622445A (en) * | 2004-12-24 | 2005-06-01 | 清华大学 | Hollow metal square column piezoelectric element composite ultrasonic micromotor |
| CN1667934A (en) * | 2005-04-08 | 2005-09-14 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| TW200746610A (en) * | 2006-06-06 | 2007-12-16 | Univ Cheng Shiu | Piezoelectric motor |
| CN101803053A (en) * | 2007-09-19 | 2010-08-11 | 皮南诺科技(皮尔佐南诺-科技)有限公司 | stick-slip piezoelectric motor |
| CN101572507A (en) * | 2009-06-12 | 2009-11-04 | 清华大学 | Protrudent toothed belt groove longitudinal bending mode conversion dual-rotor ultrasonic motor |
| TW201438392A (en) * | 2013-03-29 | 2014-10-01 | Univ Cheng Shiu | Composite piezoelectric motor |
| CN103208944A (en) * | 2013-05-08 | 2013-07-17 | 苏州科技学院 | Single electric signal driving rotation ultrasonic motor |
| CN103414375A (en) * | 2013-08-26 | 2013-11-27 | 苏州科技学院 | Single-electric-signal driving rotating ultrasonic motor |
| CN203596764U (en) * | 2013-09-27 | 2014-05-14 | 浙江工商大学 | Piezoelectric cantilever beam-type supersonic wave motor |
| CN104377988A (en) * | 2014-12-09 | 2015-02-25 | 河北大学 | Standing-wave type ultrasonic motor of two driving frequency |
| CN106059378A (en) * | 2016-07-11 | 2016-10-26 | 南京航空航天大学 | Thin reverse type ultrasonic motor |
| CN109004859A (en) * | 2018-08-08 | 2018-12-14 | 南京航空航天大学 | Spoke type rotor ultrasound electric machine and its working method based on longitudinal vibration |
| CN109525143A (en) * | 2018-11-29 | 2019-03-26 | 南京航空航天大学 | A kind of curved compound sheet ultrasound electric machine of diameter and its control method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299867A (en) * | 2019-07-16 | 2019-10-01 | 太原科技大学 | A kind of four-footed driving rotary ultrasonic wave motor |
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