CN101162876A - Longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine - Google Patents
Longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine Download PDFInfo
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- CN101162876A CN101162876A CNA2007101314839A CN200710131483A CN101162876A CN 101162876 A CN101162876 A CN 101162876A CN A2007101314839 A CNA2007101314839 A CN A2007101314839A CN 200710131483 A CN200710131483 A CN 200710131483A CN 101162876 A CN101162876 A CN 101162876A
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Abstract
The invention relates to a linear ultrasonic motor adopting a compound flexural and compressional vibration cylinder, particularly relates to a cylindrical stator flexural and compressional vibration linear ultrasonic motor, comprising a cylindrical stator (1), a pre-tightening mechanism (2) and a bed plate (3). The cylindrical stator (1) comprises five matching blocks (13), a first flexural ceramic-piece pair (14), a first compressional vibration ceramic-piece pair (15), a second compressional vibration ceramic-piece pair (16) and a second flexural vibration ceramic-piece pair (17). Normal prepress force is exerted onto the cylindrical stator (1) through the pre-tightening mechanism (2). The prepress force to the cylindrical stator (1) is regulated by an adjusting bolt (25). The motor has a series of advantages of a linear ultrasonic motor; in addition, the motor has strong output force and a wide speed-regulating range.
Description
Technical field
The present invention is a kind of longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine, belongs to the technical field that supersonic motor is made.
Background technology
Supersonic motor utilizes inverse piezoelectric effect that electric energy is converted into the vibration of motor stator, then by friction couple drive electric mover motion between motor stator and mover.Thereby supersonic motor has series of advantages, compares with traditional electromagnetic machine, and it has, and inertia is little, response is fast, control characteristic is good, not affected by magnetic fields, itself also do not produce characteristics such as magnetic field, positioning accuracy height simultaneously.Particularly it have in light weight, simple in structure, efficient is high, noise is little, low-speed big, can directly drive characteristics such as load.Linear ultrasonic motor has not only possessed a series of advantage of ultrasound electric machine, and it also has does not need screw body to carry out movement conversion, can realize advantages such as hi-Fix in closed-loop system.Abroad, linear ultrasonic electric machine is widely used in fields such as semiconductor manufacturing, electronic medicine equipment, industrial automation machine and computer-aided manufacture.The mid-90 in last century, the domestic research that begins linear ultrasonic electric machine, and obtain certain achievement.
In recent years, because linear ultrasonic electric machine position resolution height, in semi-conductor industry and other precision instrument device fields, the utilization linear ultrasonic electric machine produces high thrust and realizes that the demand of grand movement is increasing.
Technology contents
Technical problem: the object of the present invention is to provide a kind of longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine, adopt the cylinder stator, the flexural vibrations controlling and driving foot of cylinder stator cylinder and the frictional force of slide block contact-making surface utilize the extensional vibration of cylinder stator cylinder to produce stator thrust.This motor has whole advantages of linear ultrasonic electric machine.In addition, this motor also has high thrust and the good characteristics of dynamic property.
Technical scheme: a kind of longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine, this motor comprises the cylinder stator, pre-tightening mechanism, bedplate, bedplate is horizontally disposed with, the vertical vertical fixing of guide rail mounting panel is in the left end of bedplate, guide rail mounting panel middle inside is fixed in the bottom of guide-track groove, the cell wall of slide block sliding contact guide-track groove, the slide block outside contacts with the left end that drives foot, the pre-tightening mechanism crosswise fixed is at the right-hand member of bedplate, the cylinder stator vertically is arranged on and drives between foot and the pre-tightening mechanism, drive sufficient right-hand member and be fixed in cylinder stator left side, cylinder stator right side contacts with the rectilinear motion tumbler bearing left end camber line groove of pre-tightening mechanism.
The cylinder stator of above-mentioned longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine comprises five match block, be provided with adjacent two match block from cylinder stator left end to right-hand member a potsherd to and to set gradually the first curved potsherd that shakes right to, the second curved potsherd that shakes to, the second longitudinal vibration potsherd to, the first longitudinal vibration potsherd, each potsherd is to constituting by accompanying an electrode slice between two piezoelectric ceramic pieces, above-mentioned each potsherd has through hole to, electrode slice, match block, and the inwall of through hole cooperates with screw flight.Pre-tightening mechanism comprises the rectilinear motion tumbler bearing, spring, mounting yoke, the precompressed slide block, regulate bolt, bearing, lead rail axis, the linear motion ball rest base contacts with bedplate, the mounting yoke vertical fixing is in the right-hand member of bedplate, regulating bolt cooperates with the inner thread of mounting yoke mesopore, regulate the bolt left end and be provided with the precompressed slide block, horizontally set spring between rectilinear motion tumbler bearing right side and precompressed slide block left end, the spring both sides are horizontally disposed with lead rail axis, the lead rail axis left end is provided with bearing and rectilinear motion tumbler bearing middle part and is connected, and the lead rail axis right-hand member runs through and is fixed in outside the mounting yoke.
Longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine of the present invention, 1/3rd cylinder stator length places are provided with respectively and drive foot apart from cylinder stator two ends.First curved shake potsherd pair with second curved shake potsherd to reverse polarization and on shaft position mutual deviation 180 degree, to polarization in the same way, above-mentioned each potsherd drives between the foot being arranged on two the first longitudinal vibration potsherd to, the second longitudinal vibration potsherd.Cylinder stator midpoint and be provided with holding tank respectively apart from sixth cylinder stator length place, cylinder stator two ends, the rectilinear motion tumbler bearing left end camber line groove of three pre-tightening mechanisms contacts with holding tank respectively.
By the rectilinear motion tumbler bearing fixed cylinder stator of pre-tightening mechanism, the cylinder stator is fluted so that fixing at the clip position of rectilinear motion tumbler bearing, and by regulating the adjusting bolt on the pre-tightening mechanism, adjustment is to the precompression of cylinder stator.The cylinder stator is equipped with two and drives sufficient driving guide rail top shoe motion.The cylinder stator of this motor is made up of match block and piezoelectric ceramic piece, between per two piezoelectric ceramic pieces, be provided with electrode slice, set gradually from cylinder stator left end to right-hand member left match block, the first curved potsherd that shakes to, match block in the middle of first, the first longitudinal vibration potsherd to, match block in the middle of second, the second longitudinal vibration potsherd to, match block in the middle of the 3rd, the second curved potsherd that shakes to, right match block.Above-mentioned each potsherd has through hole to, electrode slice, match block, and the inwall of through hole cooperates with screw flight.Left side match block is connected by screw rod with right match block and middle match block of tight fit and piezoelectric ceramic piece.Piezoelectric ceramic is two districts to the dividing electrodes of the piezoelectric ceramic of two-phase excitation flexural vibrations, and reverse polarization mutually, the piezoelectric ceramic of two-phase excitation extensional vibration is a subregion, insert excitation power supply, contacted ground connection of potsherd and stator match block from the middle extraction electrode of every group of potsherd.Extensional vibration and flexural vibrations potsherd are applied the excitation power supply that the frequency same phase differs 90 °, the generation phase difference is two kinds of mode of oscillations of 90 °, make stator drive sufficient contact-making surface particle and produce elliptic motion, slide thereby promote slide block, by exchanging the direction of motion that two excitation power supply phase sequences just can change slide block.
Beneficial effect: the invention reside in provides a kind of longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine.Adopt the cylinder stator, utilize the flexural vibrations control stator of cylinder and the frictional force of slide block contact-making surface, utilize the extensional vibration of cylinder to produce stator thrust.The stator diameter of making is the longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine of 20mm, and its maximum thrust output reaches 20N, and maximum speed reaches 100mm/s.Therefore, longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine of the present invention is with piezoelectric transducer, moving body and the fixing supersonic motor formed of pre-tightening mechanism, it is compared with the traditional electrical magneto, has that thrust is big, outstanding features such as fast dynamic response and operation noiseless.
Description of drawings
Fig. 1 is a general structure end view of the present invention.Cylinder stator 1, pre-tightening mechanism 2, bedplate 3, guide rail mounting panel 4, guide-track groove 5, slide block 6 are wherein arranged, drive foot 7, rectilinear motion tumbler bearing 21, camber line groove 211, spring 22, mounting yoke 23, mounting yoke mesopore 231, precompressed slide block 24, adjusting bolt 25.
Fig. 2 is a stator structure schematic diagram of the present invention.Wherein have holding tank 11, screw rod 12, match block 13, first curved shake potsherd to 14, the first longitudinal vibration potsherd to 15, the second longitudinal vibration potsherd to 16, the second curved potsherd that shakes to 17, electrode slice 18, drive foot 7.
Fig. 3 is a general structure vertical view of the present invention.Cylinder stator 1, pre-tightening mechanism 2, bearing 26, lead rail axis 27 are wherein arranged.
Fig. 4 is a piezoelectric ceramic riding position schematic diagram.Wherein have first curved shake potsherd to 14, the first longitudinal vibration potsherd to 15, the second longitudinal vibration potsherd to 16, the second curved potsherd that shakes to 17, electrode slice 18, "+" wherein polarizes for forward, "-" is reverse polarization.
Embodiment
Motor comprises cylinder stator 1, pre-tightening mechanism 2, bedplate 3, bedplate 3 is horizontally disposed with, guide rail mounting panel 4 vertical vertical fixing are in the left end of bedplate 3, guide rail mounting panel (4) middle inside is fixed in the bottom of guide-track groove 5, the cell wall 51 of slide block 6 sliding contact guide-track grooves 5, slide block 6 outsides contact with the left end that drives foot 7, pre-tightening mechanism 2 crosswise fixed are at the right-hand member of bedplate 3, cylinder stator 1 vertically is arranged in the camber line groove 211 of pre-tightening mechanism 2 left ends, drives foot 7 right-hand members and is fixed in cylinder stator 1 left side.
Claims (6)
1. longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine, it is characterized in that this motor comprises cylinder stator (1), pre-tightening mechanism (2), bedplate (3), bedplate (3) is horizontally disposed with, the vertical vertical fixing of guide rail mounting panel (4) is in the left end of bedplate (3), guide rail mounting panel (4) middle inside is fixed in the bottom of guide-track groove (5), the cell wall (51) of slide block (6) sliding contact guide-track groove (5), slide block (6) outside contacts with the left end that drives foot (7), pre-tightening mechanism (2) crosswise fixed is at the right-hand member of bedplate (3), cylinder stator (1) vertically is arranged in the camber line groove (211) of pre-tightening mechanism (2) left end, drives foot (7) right-hand member and is fixed in cylinder stator (1) left side.
2. longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine according to claim 1, it is characterized in that cylinder stator (1) comprises five match block (13), be provided with adjacent two match block from cylinder stator (1) left end to right-hand member a potsherd to and set gradually first and curved shake potsherd (14), the first longitudinal vibration potsherd is to (15), the second longitudinal vibration potsherd is to (16), second curved shakes potsherd to (17), each potsherd is to constituting by accompanying an electrode slice (18) between two piezoelectric ceramic pieces, above-mentioned each potsherd is right, electrode slice (18), match block has through hole, the inwall of through hole and screw rod (12) threaded engagement.
3. longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine according to claim 1, it is characterized in that pre-tightening mechanism (2) comprises rectilinear motion tumbler bearing (21), spring (22), mounting yoke (23), precompressed slide block (24), regulate bolt (25), bearing (26), lead rail axis (27), rectilinear motion tumbler bearing (21) bottom contacts with bedplate (3), mounting yoke (23) vertical fixing is in the right-hand member of bedplate (3), regulating bolt (25) cooperates with the inner thread of mounting yoke mesopore (231), regulate bolt (25) left end and be provided with precompressed slide block (24), horizontally set spring (22) between rectilinear motion tumbler bearing (21) right side and precompressed slide block (24) left end, spring (22) both sides are horizontally disposed with lead rail axis (27), lead rail axis (27) left end is provided with bearing (26) and rectilinear motion tumbler bearing (21) middle part and is connected, and lead rail axis (27) right-hand member runs through and is fixed in outside the mounting yoke (23).
4. longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine according to claim 1 is characterized in that 1/3rd cylinder stator length places are provided with driving foot (7) respectively and are in same plane apart from cylinder stator two ends.
5. longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine according to claim 1, it is characterized in that first curved shake potsherd to (14) with second curved shake potsherd to (17) reverse polarization and on shaft position mutual deviation 180 degree, the first longitudinal vibration potsherd polarizes to (16) in the same way to (15), the second longitudinal vibration potsherd, and above-mentioned each potsherd drives between the foot (7) being arranged on two.
6. longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine according to claim 1, it is characterized in that cylinder stator (1) midpoint and be provided with holding tank (11) respectively apart from cylinder stator (1) two ends sixth cylinder stator length place, rectilinear motion tumbler bearing (21) the left end camber line groove (211) of three pre-tightening mechanisms (2) contacts with holding tank (11) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101314839A CN101162876A (en) | 2007-08-31 | 2007-08-31 | Longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2007101314839A CN101162876A (en) | 2007-08-31 | 2007-08-31 | Longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine |
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| CN101162876A true CN101162876A (en) | 2008-04-16 |
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| CNA2007101314839A Pending CN101162876A (en) | 2007-08-31 | 2007-08-31 | Longitudinal bending vibration compound cylinder straight-line ultrasonic wave electric machine |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101976969A (en) * | 2010-10-18 | 2011-02-16 | 南京航空航天大学 | Linear buckling ultrasonic motor and electric excitation mode thereof |
| CN104753392A (en) * | 2015-04-09 | 2015-07-01 | 南京航空航天大学 | Linear motion piezoelectric actuator |
| CN105515438A (en) * | 2016-01-08 | 2016-04-20 | 苏州市职业大学 | Laminated piezoelectric ceramic linear ultrasonic motor |
| CN103560694B (en) * | 2013-10-11 | 2018-02-06 | 浙江工商大学 | One kind indulges curved compound ultrasonic motor |
| CN108696175A (en) * | 2017-03-31 | 2018-10-23 | 精工爱普生株式会社 | Piexoelectric actuator and its driving method, robot, electronic component handling apparatus |
-
2007
- 2007-08-31 CN CNA2007101314839A patent/CN101162876A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101976969A (en) * | 2010-10-18 | 2011-02-16 | 南京航空航天大学 | Linear buckling ultrasonic motor and electric excitation mode thereof |
| CN103560694B (en) * | 2013-10-11 | 2018-02-06 | 浙江工商大学 | One kind indulges curved compound ultrasonic motor |
| CN104753392A (en) * | 2015-04-09 | 2015-07-01 | 南京航空航天大学 | Linear motion piezoelectric actuator |
| CN105515438A (en) * | 2016-01-08 | 2016-04-20 | 苏州市职业大学 | Laminated piezoelectric ceramic linear ultrasonic motor |
| CN108696175A (en) * | 2017-03-31 | 2018-10-23 | 精工爱普生株式会社 | Piexoelectric actuator and its driving method, robot, electronic component handling apparatus |
| CN108696175B (en) * | 2017-03-31 | 2022-08-16 | 精工爱普生株式会社 | Piezoelectric driving device, method of driving piezoelectric driving device, robot, and electronic component transfer device |
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Open date: 20080416 |