CN110299867A - A kind of four-footed driving rotary ultrasonic wave motor - Google Patents
A kind of four-footed driving rotary ultrasonic wave motor Download PDFInfo
- Publication number
- CN110299867A CN110299867A CN201910642170.2A CN201910642170A CN110299867A CN 110299867 A CN110299867 A CN 110299867A CN 201910642170 A CN201910642170 A CN 201910642170A CN 110299867 A CN110299867 A CN 110299867A
- Authority
- CN
- China
- Prior art keywords
- rotor
- ultrasonic wave
- piezoelectric ceramic
- wave motor
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 39
- 230000010287 polarization Effects 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 4
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 230000033001 locomotion Effects 0.000 abstract description 8
- 230000007246 mechanism Effects 0.000 abstract description 6
- 210000002683 foot Anatomy 0.000 description 19
- 238000000034 method Methods 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002783 friction material Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 238000013019 agitation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a kind of four-footeds to drive rotary ultrasonic wave motor, belongs to Piezoelectric Driving and piezoelectric energy-capturing technical field.The present invention includes main shaft, hollow thin rectangular plate, driving foot, rotor, nut, spring, bearing, piezoelectric ceramic piece.The equal through-thickness polarization of piezoelectric ceramic piece；The hollow thin rectangular plate, driving foot, piezoelectric ceramic piece constitute the stator module of supersonic motor.The nut, spring constitute the prefastening force adjustment mechanism between stator module and rotor.When work, the piezoelectric ceramic piece lower surface ground connection Nian Jie with thin rectangular plate, upper surface is respectively connected to two-phase high-frequency alternating voltage, and thin rectangular plate, which deforms, excites the elliptic motion of the sufficient end face of driving, and then drives rotor rotation.The configuration of the present invention is simple, drive efficiency is high, and patch type structure provides thinking for miniaturized ultrasonic wave motor.
Description
Technical field
The present invention relates to Piezoelectric Driving and piezoelectric energy-capturing technical field, in particular to a kind of four-footed drives supersonic motor.
Background technique
It is seized of in fields, precision mechanisms such as modern age sophisticated industry production field, field of scientific study and aerospaces
Extremely important status, and piezoelectric type micromotor is the key element that precision mechanism can operate normally under various operating conditions, is surpassed
Sound wave motor is also referred to as motor of new generation.Supersonic motor is big with low speed torque, structure is simple, Unit Weight output power
Greatly, without electromagnetic interference the features such as.Supersonic motor is applied to precision instrument, such as digital camera, mobile phone, space flight and aviation more.Pressure
The electric parameter and mechanical parameter of electric notor are all very outstanding, and certain characteristics are better than best conventional electromagnetic motor, but also deposit
Pretightning force between some limitations of power output, structure etc., the stator and rotor of part rotary ultrasonic wave motor can not have
Effect adjustment, leads to not effective regulating friction force, and the present invention effectively and accurately adjusts pretightning force using spring and nut.Simultaneously originally
Invention reduces each part of piezo-electric motor by means of frictional force drives cone rotor using the stator with rotational symmetry tooth
Machining accuracy reduces processing cost, improves the mechanical performance of piezo-electric motor.
In 109004859 A of Publication No. CN, it is entitled " spoke type rotor excusing from death motor based on longitudinal vibration and its
Working method " patent document in, disclose it is a kind of using patch type vertically hung scroll stator generate extensional vibration make the curved of metal spoke
Bent potential energy is converted to the supersonic motor of the rotation potential energy of rotary table rotor, and propose rotor also can produce conjunction under given conditions
At tangential motion needed for elliptic motion.But the processing technology of limiting slot and vertically hung scroll is complicated, requirement on machining accuracy is high, motor
Processing cost it is higher.
In 109525143 A of Publication No. CN, entitled " a kind of curved compound sheet ultrasound electric machine of diameter and its control
Mode processed " patent document in, disclosing a kind of has hollow convex cylindrical and by beam type waveguiding structure and internal diameter using internal
The circular ring metal piece being connected constitutes the ultrasound electric machine of the rubbed driving rotor rotation of stator.Upper lower rotor part can be achieved to revolve on the contrary
Transhipment is dynamic.But structure is complicated for beam type waveguiding structure, and drive rotor of fixed place and time, drive efficiency are lower.
Current most of rotary ultrasonic wave point machines are all to generate friction coupling by means of contact point to drive rotor to rotate,
Drive efficiency is low, and can not effectively adjust the pretightning force between stator and rotor.The present invention using driving foot with angle and
Cone rotor carries out friction coupling, realizes that contact surface transmits frictional force, effectively increases drive efficiency.
Supersonic motor the problems such as there is also structure is complicated, requirement on machining accuracy is high, complex process, to supersonic motor
Further development causes obstruction.The present invention makees stator using patch type thin rectangular plate, and structure is simple, is that supersonic motor is small-sized
Change provides thinking.
Summary of the invention
The purpose of the present invention is to provide a kind of four-footeds to drive rotary ultrasonic wave motor, to solve now to exist in the art
Foregoing problems.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of four-footed driving rotary ultrasonic wave motor mainly includes that stator module, rotor and precompression adjustment mechanism, feature exist
In: the rotor is cone-shaped metal body 3, and material preferentially selects aluminium, and the rotor extrados is bonded with friction material；The stator
Component includes hollow thin rectangular plate 1, drives foot 2, piezoelectric ceramic piece 8, and the upper surface of the driving foot is bonded with frictional layer；It is described
Precompression adjustment mechanism includes spring 6 and nut 4.
The quantity of the driving foot is 4, is welded on four angles of hollow, rectangular plate, driving foot structure centre with it is hollow
The distance at Rectangular Plate Structure center is 18-25mm.
Driving 2 end faces of foot of the stator upper end and the angle and 3 extrados of cone rotor and vertical plane of horizontal plane
Angle it is consistent, corner dimension 100--140。
The tap web rotor 3 can effectively increase the friction coupling surface between stator and rotor using pyramidal structure, increase driving
Efficiency reduces rotor and drives the amount of elastic deformation between sufficient end face, effectively reduces wear problem.
The prefastening force adjustment mechanism that the spring 6 and nut 4 constitute supersonic motor can by adjusting the position of nut
To adjust the pretightning force between stator and rotor.
The quantity of the piezoelectric ceramic piece 8 is 4, passes through conductive epoxy between piezoelectric ceramic piece and hollow thin rectangular plate
Rouge glue sticking.
Further, 2 end faces with inclination angle of foot is driven to be bonded with A friction material in the stator module.
Further, the cone-shaped metal rotor 3 is bonded with B friction material with the extrados of sufficient contact of incline plane is driven.
Further, 8 overlay coating of piezoelectric ceramic piece is silver, and the mode of lead is soldering.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of four-footed driving rotary ultrasonic wave motor.Figure label title: the hollow thin rectangular plate of 1-；
2- driving foot；3- rotor；4- nut；5- main shaft；6- spring；7- bearing；8- piezoelectric ceramic piece.
Fig. 2 is the polarization direction of piezoelectric ceramic piece and applies pumping signal mode, and the arrow in figure indicates piezoelectric ceramic piece
Polarization direction, the two panels piezoelectric ceramics connected by same lead applies diagram pumping signal.
Fig. 3 is the deformation process schematic diagram of four-footed driving one complete cycle of rotary ultrasonic wave motor stator component.
Fig. 4 is to apply amplitude as 20Vp-pTwo-phase alternating voltage as pumping signal, the work of one Energizing cycle of stator
Make modal graph.
Fig. 5 is the 3 D motion trace for driving sufficient end face particle.
Specific embodiment
In order to illustrate more clearly of the technical characterstic of this programme, the present invention will be described in detail with reference to the accompanying drawing.
A kind of structure of four-footed driving supersonic motor as shown in Figure 1, hollow thin rectangular plate 1, rotor 3 with driving foot 2,
Bearing 7, spring 6, nut 4 are sequentially sleeved on main shaft 5；4 drivings are fixed on hollow thin rectangular plate by welding enough
On four angles, the distance between structure centre and the structure centre of hollow thin rectangular plate 1 of driving foot 2 are 18-25mm.
For the piezoelectric ceramic piece Jing Guo polarization process, the component of piezoelectric strain constant matrix d is divided into 3 nonzero components
d33, d31, d15.In supersonic motor proposed in this paper, the piezoelectric ceramic piece 8 being pasted in stator base works in d31Transverse-vibration
Dynamic model state.Driving signal acts on symmetrical two groups of piezoelectric ceramic piece upper surfaces (as shown in Fig. 2, arrow generation by certain phase difference
The polarization direction of table piezoelectric ceramic piece), the surface earthing Nian Jie with elastomer of piezoelectric ceramic piece 8.Under inverse piezoelectric effect effect,
2 end faces of driving foot of the lateral mode driving supersonic motor stator upper end of piezoelectric ceramic piece 8 generate elliptical orbit movement, and lead to
The multi-contact surface friction overdrived between foot 2 and rotor 3 couples the rotation of drive rotor 3, realizes braking.
The stator module of four-footed driving supersonic motor is fixed with 1 He of hollow, rectangular plate of four piezoelectric ceramic pieces by one
Four driving foots 2 form.When four piezoelectric ceramics on pieces apply voltage as shown in Figure 2, hollow thin rectangular plate will be generated
Deformation excites sufficient end face X, Y, Z the phase amplitude of four drivings, then passes through friction coupling driving rotor rotation.Piezoelectric ceramic piece a and pressure
Electroceramics piece c applies V0 Driving voltage, piezoelectric ceramic piece b and piezoelectric ceramic piece d apply V0 Driving voltage, in order to
Each vibration deformation process is divided into four sub-portions as shown in Figure 3 by the driving principle for more intuitively understanding supersonic motor:
(1) phase angleT=0, piezoelectric ceramic piece c elongation, piezoelectric ceramic piece a are shunk, other two piezoelectric ceramic pieces remain unchanged,
At this time shown in displacement such as Fig. 3 (1) of each driving foot.
(2) phase anglet=/ 2, piezoelectric ceramic piece b elongation, piezoelectric ceramic piece d are shunk, other two piezoelectric ceramic pieces are protected
Hold it is constant, at this time shown in displacement such as Fig. 3 (2) of each driving foot.
(3) phase anglet=, piezoelectric ceramic piece a elongation, piezoelectric ceramic piece c contraction, other two piezoelectric ceramic pieces holdings are not
Become, at this time shown in displacement such as Fig. 3 (3) of each driving foot.
(4) phase anglet=/ 2, piezoelectric ceramic piece d elongation, piezoelectric ceramic piece b are shunk, other two piezoelectric ceramic pieces are protected
Hold it is constant, at this time shown in displacement such as Fig. 3 (4) of each driving foot.
It is a duty cycle of stator module above, it can be deduced that, by being overlapped two different vibrations, often
The sufficient end face of a driving is respectively formed a complete three-dimensional elliptical track, if continuous agitation driving signal shown in Fig. 3, will make every
The sufficient end face of a driving generates continuous three-dimensional elliptical movement, and then rubbed coupling driving rotor continuously rotates clockwise.
It takes the end face center point of one of driving foot A to do analysis (see figure 2), has obtained driving foot A's as shown in Figure 5
The three-dimensional motion curve of end face center point.
After applying the ac-excited voltage exchange of two-phase, rotor 3 will generate counter-clockwise rotary motion.
The sufficient end face of four drivings of the supersonic motor drives rotor to rotate simultaneously in one cycle, and drive efficiency is high,
Stator module uses patch type structure, provides thinking for the miniaturization of supersonic motor.
The present invention is illustrated by above embodiment, but it is to be understood that, above embodiment is only used for lifting
Example and explanation are not intended to and limit the present invention within the scope of described embodiment.It will be appreciated by those skilled in the art that
, introduction according to the present invention can also make more kinds of variants and modifications, these variants and modifications belong to the present invention
Protection scope.
Claims (6)
1. a kind of four-footed drives rotary ultrasonic wave motor, including stator module and rotor, it is characterised in that: in the stator module
There are four the hollow thin rectangular plate of driving foot, rotor, bearing, spring, nuts to be sequentially sleeved on main shaft for welding；The hollow thin square
Shape plate upper surface is pasted with 4 piezoelectric ceramic pieces, and adhesives is epoxy conducting；The rotor is cone-shaped metal body, described
The material of rotor recommends selection aluminium；The driving foot upper surface of the stationary part and cone rotor extrados form frictional engagement
Face, the pretightning force between the stator module and rotor are adjusted by the nut and spring.
2. four-footed according to claim 1 drives rotary ultrasonic wave motor, it is characterised in that: the piezoelectric ceramic piece is equal
Through-thickness polarization, the material of the piezoelectric ceramic piece recommend selection pzt-5H.
3. the four-footed according to claims 1 or 2 drives rotary ultrasonic wave motor, it is characterised in that: the piezoelectric ceramics
Piece thickness is 0.1mm -1mm.
4. the four-footed according to claims 1 or 2 drives rotary ultrasonic wave motor, it is characterised in that: opposite two panels pressure
Electroceramics piece accesses same high frequency pumping alternating voltage.
5. the four-footed according to claims 1 or 2 drives rotary ultrasonic wave motor, it is characterised in that: the stator upper end
The sufficient end face of driving and horizontal plane angle it is consistent with the angle of the cone rotor extrados and vertical plane, corner dimension is
100--140。
6. the four-footed according to claims 1 or 2 drives rotary ultrasonic wave motor, it is characterised in that: four, band drives
The material of the hollow thin rectangular plate of action spot recommends selection 65Mn, and four drivings are welded in the upper of the hollow thin rectangular plate enough
Surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910642170.2A CN110299867A (en) | 2019-07-16 | 2019-07-16 | A kind of four-footed driving rotary ultrasonic wave motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910642170.2A CN110299867A (en) | 2019-07-16 | 2019-07-16 | A kind of four-footed driving rotary ultrasonic wave motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110299867A true CN110299867A (en) | 2019-10-01 |
Family
ID=68031278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910642170.2A Pending CN110299867A (en) | 2019-07-16 | 2019-07-16 | A kind of four-footed driving rotary ultrasonic wave motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110299867A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111555656A (en) * | 2020-04-14 | 2020-08-18 | 睿恩光电有限责任公司 | Piezoelectric driving device, camera device, and electronic apparatus |
| CN113141126A (en) * | 2021-05-07 | 2021-07-20 | 金陵科技学院 | Three-leg rotary ultrasonic motor |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1835374A (en) * | 2006-03-09 | 2006-09-20 | 南京航空航天大学 | Multi-freedom ring stator supersonic dynamo |
| CN102013832A (en) * | 2010-12-24 | 2011-04-13 | 南京航空航天大学 | Ultrasonic linear motor and electric excitation method thereof |
| CN202103602U (en) * | 2011-06-02 | 2012-01-04 | 浙江师范大学 | Spherical piezoelectric ultrasonic motor having rectangular plate type stator |
| CN102437786A (en) * | 2011-10-18 | 2012-05-02 | 哈尔滨工业大学 | Surface mount type square four-footed rotational ultrasonic motor vibrator |
| CN105141174A (en) * | 2015-09-07 | 2015-12-09 | 南京航空航天大学 | Patch type stationary wave rotary-type piezoelectric actuator |
| CN207968352U (en) * | 2018-02-28 | 2018-10-12 | 南昌航空大学 | Rotary ultrasonic motor based on the driving of four tuning-fork type piezoelectric vibrators |
| CN109861583A (en) * | 2019-04-15 | 2019-06-07 | 太原科技大学 | A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor |
-
2019
- 2019-07-16 CN CN201910642170.2A patent/CN110299867A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1835374A (en) * | 2006-03-09 | 2006-09-20 | 南京航空航天大学 | Multi-freedom ring stator supersonic dynamo |
| CN102013832A (en) * | 2010-12-24 | 2011-04-13 | 南京航空航天大学 | Ultrasonic linear motor and electric excitation method thereof |
| CN202103602U (en) * | 2011-06-02 | 2012-01-04 | 浙江师范大学 | Spherical piezoelectric ultrasonic motor having rectangular plate type stator |
| CN102437786A (en) * | 2011-10-18 | 2012-05-02 | 哈尔滨工业大学 | Surface mount type square four-footed rotational ultrasonic motor vibrator |
| CN105141174A (en) * | 2015-09-07 | 2015-12-09 | 南京航空航天大学 | Patch type stationary wave rotary-type piezoelectric actuator |
| CN207968352U (en) * | 2018-02-28 | 2018-10-12 | 南昌航空大学 | Rotary ultrasonic motor based on the driving of four tuning-fork type piezoelectric vibrators |
| CN109861583A (en) * | 2019-04-15 | 2019-06-07 | 太原科技大学 | A kind of superimposed type longitudinal vibration mode rotary piezo-electric motor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111555656A (en) * | 2020-04-14 | 2020-08-18 | 睿恩光电有限责任公司 | Piezoelectric driving device, camera device, and electronic apparatus |
| CN111555656B (en) * | 2020-04-14 | 2021-04-02 | 睿恩光电有限责任公司 | Piezoelectric driving device, camera device, and electronic apparatus |
| CN113141126A (en) * | 2021-05-07 | 2021-07-20 | 金陵科技学院 | Three-leg rotary ultrasonic motor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1959511B1 (en) | A thread driven polyhedron ultrasonic motor | |
| CN107742993B (en) | Single-phase excitation type surface internal vibration ultrasonic motor and single-phase excitation method thereof | |
| CN100428618C (en) | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet | |
| CN103001532A (en) | Surface-mounted longitudinal and torsion modal compound ultrasonic motor | |
| CN110299867A (en) | A kind of four-footed driving rotary ultrasonic wave motor | |
| CN101860259B (en) | Single-electrical signal-stimulated rotation ultrasonic motor | |
| CN103036472B (en) | Screw-type linear ultrasonic motor | |
| CN109889086B (en) | Three-degree-of-freedom piezoelectric driving micro-nano control mechanical arm and excitation method thereof | |
| CN107834899B (en) | Method for adjusting two-phase modal frequency difference and steering of ultrasonic motor | |
| CN101072001B (en) | Toothless traveling wave rotary ultrasonic motor and working mode and electric exciting manner | |
| CN108712103B (en) | Impact type piezoelectric rotary motor | |
| CN114123857A (en) | Hemispherical shell inertia type multi-degree-of-freedom piezoelectric actuator and working method thereof | |
| CN103560694B (en) | One kind indulges curved compound ultrasonic motor | |
| CN102931874A (en) | Piezoelectric motor driven by longitudinal-torsional piezoelectric ceramic cylinder | |
| CN101364775B (en) | Flat dual-stator thread driving ultrasonic minimized motor having thread pair pretensioning | |
| CN203596765U (en) | Longitudinal oscillation and bending oscillation composite mode supersonic wave motor | |
| CN110601597B (en) | Bimodal compound inchworm ultrasonic motor | |
| CN102118118A (en) | Linear type ultrasonic micromotor | |
| CN105305875A (en) | Rib plate displacement type longitudinal-torsional composite ultrasonic motor | |
| CN214480332U (en) | Differential inertia type piezoelectric rotary driver | |
| CN106533250B (en) | A kind of supersonic motor of multiple stators planar array structure | |
| CN105553328A (en) | Piezoelectric vibrating peristaltic motor | |
| CN101505115B (en) | Liquid medium longitudinal vibration non-contact type ultrasonic motor | |
| CN102751900A (en) | Two-degree-of-freedom ultrasonic motor | |
| CN102299663B (en) | Cylindrical traveling-wave ultrasonic motor vibrator pretightened by spring blocks |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |