CN105071686A - Symmetrical double-feet driving offresonance piezoelectric linear motor - Google Patents
Symmetrical double-feet driving offresonance piezoelectric linear motor Download PDFInfo
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- CN105071686A CN105071686A CN201510421361.8A CN201510421361A CN105071686A CN 105071686 A CN105071686 A CN 105071686A CN 201510421361 A CN201510421361 A CN 201510421361A CN 105071686 A CN105071686 A CN 105071686A
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Abstract
The invention discloses a symmetrical double-feet driving offresonance piezoelectric linear motor, comprising a stator, a casing of the stator, a mover guide rail, guiding adjusting mechanisms, a precompression apparatus and a base. The stator is fixedly connected in the casing to form an integrity; the front end of the casing is provided with the mover guide rail, the rear end is in connection with the precompression apparatus, and left and right ends are respectively in connection with the guiding adjusting mechanisms; the precompression apparatus is internally provided with a precompression spring; under the restoring force effect generated by the deformation of the precompression spring, the front end of the casing keeps contact with the mover guide rail; the mover guide rail, the precompression apparatus, and the guiding adjusting mechanisms are all arranged on the base; the stator is composed of a stator supporting board, and two symmetrical driving feet, lamination electroceramics, cushion blocks, long hinges, and pre-tightening screws. The symmetrical motor has a structure simple, is convenient to install, and effectively guarantees the bidirectional actuation performance consistency of a piezoelectric motor; certain electric signals are respectively applied to four sets of lamination electroceramics to realize the bidirectional rectilinear motion of the piezoelectric motor.
Description
Technical field
The present invention relates to a kind of off-resonance piezoelectric linear motor, belong to Precision Piezoelectric actuation technology field.
Background technology
There is when the inverse piezoelectric effect of piezoelectric ceramic is used in actuator the feature such as high accuracy, fast-response, obtain the favor of numerous researchers this year.Produce enough distortion to make piezoelectric to export, often need to apply higher voltage on piezoelectric patches, the resonance of structure simultaneously is also utilized to the Light deformation of amplification piezoelectric material, which increase the complexity of drive circuit, the simultaneously resonance of structure exists very strong non-linear with the frequency change of input electrical signal, this is that the control of actuator brings many technical barriers.
Stacked piezoelectric pottery is the novel piezoelectric integrated component be derived from bulky capacitor technology, can obtain larger strain and larger thrust under lower driving voltage.The off-resonance piezoelectric motor adopting stacked piezoelectric pottery to form has the advantages that response is fast, precision is high, stroke is large, has broad application prospects in semiconductor machining, fiber alignment field.
Current non-resonant piezoelectric motor subject matter is the hesitation impact of stacked piezoelectric pottery, causes the two-way performance of piezoelectric linear motor to have certain difference; Two driving foots of biped stator are more difficult to be contacted with mover guide rail simultaneously and keeps similar contact condition, result in motor performance stable not; Stator drives foot and mover to adopt point cantact form, makes the thrust of motor receive certain restriction.
Summary of the invention
For the deficiency of above-mentioned background technology, the object of the invention is to propose a kind of symmetrical expression off-resonance piezoelectric linear motor, it has, and structure is simple, parts are small, stable, registration, the advantage such as Motion Resolution rate is high, cost is lower.
The present invention is for solving the problems of the technologies described above by the following technical solutions:
A kind of symmetrical expression biped drives off-resonance piezoelectric linear motor, comprises stator and shell, mover guide rail, lead governor motion, precompression device and base; Described stator is fixedly connected in its shell, and shape is in aggregates, and the front end of shell is provided with mover guide rail, and rear end connects precompression device, and two ends, left and right are connected with guiding governor motion respectively; Be provided with pre-compressed spring in described precompression device, under the restoring force effect that shell produces in pre-compressed spring deformation, front end and mover guide rail keep in touch; Described stator and shell, mover guide rail, precompression device and guiding governor motion are all installed on base.
Described stator comprises stator support plate, driving is enough to and stacked piezoelectric pottery, and described driving foot has two at least, and is symmetrical arranged; Wherein, each two ends of foot that drive are fixedly connected on the stacked piezoelectric pottery of arrangement in 90 °, and by stacked piezoelectric ceramic joining on stator support plate; Described stator also comprises hinge, and described hinge one end is connected to and drives on foot, and the other end is fixing on the supporting plate by pre-loading screw.
Also be provided with cushion block at described stacked piezoelectric pottery and stator support board mount, this cushion block is hemisphere.
Described stator casing is that hollow structure is convenient to stator to be installed on wherein, is threaded connection and fixes as one between stator and shell; Described shell is distributed with two symmetrical " π " type slots, the end points portion of every bar " π " type slot is provided with aperture, and described slot and aperture form flexible hinge in order to bear structure along the slight deformation with mover direction of motion vertical direction.
Described guiding governor motion has two at least, and is symmetricly set on two ends, shell left and right; Wherein the guiding governor motion of side comprises presetting beam, two regulating blocks and supporting bracket, supporting bracket, regulating block and presetting beam ecto-entad is fixed on shell successively by fastening screw.
Described precompression device comprises bar in precompression, precompression spring, precompression supporting bracket, the outer bar of precompression and housing screw; End in contact after bar and stator casing in described precompression, precompression spring is arranged on interior bar; The outer bar of described precompression compresses precompression spring through the circular hole in precompression supporting bracket, and outer for precompression bar is fixed on a certain position in order to provide stable precompression by described housing screw.
The present invention adopts above technical scheme compared with prior art, has following technique effect:
This symmetrical expression biped drives the piezoelectric element in off-resonance piezoelectric linear motor to adopt piezoelectric stack, output displacement and power output are all comparatively large, and positioning precision is higher, and arrangement works is under off-resonance pattern, be not subject to environmental factor interference, comparatively adopt the resonance electrical motor of piezoelectric ceramic more stable;
Stator overall structure adopts axially symmetric structure, ensure that the consistency of performance during motor double action; Two the driving foots can guaranteeing stator of two symmetrical guiding governor motions and mover guide rail keep good contact condition;
This piezoelectric linear motor motor can work under two kinds of three-phase electricity signal inputs, and mode of operation easily realizes; And each modular construction is simple, difficulty of processing is little, easy to connect.
Accompanying drawing explanation
Fig. 1 is that symmetrical expression biped of the present invention drives off-resonance piezoelectric linear motor overall structure figure;
Fig. 2 is piezoelectric motor stator and shell thereof and precompression device and guiding mechanism STRUCTURE DECOMPOSITION figure;
Fig. 3 is piezoelectric motor stator structure figure;
Fig. 4 is piezoelectric motor driving voltage signal graph in the operational mode;
Fig. 5 is the movement mechanism figure of piezoelectric motor in one-period;
Wherein: 1-stator and shell thereof; 2-mover guide rail; 3-leads governor motion 1; 4-leads governor motion 2; 5-precompression device; 6-base; A-stator; The presetting beam of b1, b2-; C1, c2-regulating block; D1, d2-supporting bracket; E1, e2-fasten screw; F-supports shell; Bar in g-precompression; H-precompression spring; I-precompression supporting bracket; The outer bar of j-precompression; K-housing screw;
A1, a2-drive foot; A3, a4-stacked piezoelectric pottery; A5, a6-stacked piezoelectric pottery; A7, a8, a9, a10-cushion block; A11, a12-band andgudgeon chain; A13, a14-pre-loading screw; A15-stator support plate.
Embodiment
The invention provides a kind of symmetrical expression biped and drive off-resonance piezoelectric linear motor, for making object of the present invention, clearly, clearly, and the present invention is described in more detail with reference to accompanying drawing examples for technical scheme and effect.Should be appreciated that concrete enforcement described herein is only in order to explain the present invention, is not intended to limit the present invention.
Be described in detail below in conjunction with the technical scheme of accompanying drawing to invention:
As shown in Figure 1 and Figure 2, piezoelectric linear motor of the present invention, by stator and shell 1 thereof, mover guide rail 2, two guiding governor motions 3,4, precompression device 5 and base 6 form.Stator a and shell f thereof fixes as one, and under the restoring force effect that the pre-compressed spring H-shaped sell of one's property in the precompression device 5 arranged in its back-end is raw, its front end and mover guide rail 2 keep in touch, and make this piezoelectric motor be provided with the function that cuts off self-lock; Stator a and shell f two ends thereof are connected respectively at two guiding governor motions 3,4; Mover guide rail 2, precompression device 5 and guiding governor motion 3,4 are all installed on base 6.
Be illustrated in figure 3 stator structure figure, stator structure comprises stator support plate a15 and is in two of axial symmetry distribution and drives sufficient a1, a2, four groups of stacked piezoelectrics pottery a3, a4, a5, a6, four cushion block a7, a8, a9, a10, two band andgudgeon chain a11, a12, two pre-loading screw a13, a14; Stator a adopts axially symmetric structure, and two groups of stacked piezoelectrics pottery a3, a4 of the same side and two cushion block a7, a9 arrangements in 90 ° are also arranged at by band andgudgeon chain a11 and pre-loading screw a13 pretension and drive between sufficient a1 and stator support plate a15; Two groups of stacked piezoelectrics pottery a3, a4 of the same side to make rotation axis mutually vertical, one group is parallel with mover guide rail movement direction, and one group is vertical with mover guide rail movement direction; Cushion block a7, a8, a9, a10 are semi-cylindrical form, play the function preventing stacked piezoelectric pottery from being cut.
Being illustrated in figure 2 piezoelectric motor stator and shell thereof and precompression device and guiding mechanism STRUCTURE DECOMPOSITION figure, stator casing f is that hollow structure is convenient to stator a to be installed on wherein, is threaded connection and fixes as one between stator a and shell f; Shell f is distributed with two symmetrical " π " type slots, the edge part of every bar " π " type slot is provided with aperture, and described slot and aperture form flexible hinge in order to bear structure along the slight deformation with mover guide rail 2 direction of motion vertical direction.
Two guiding governor motions 3,4 adopt symmetric form, and wherein the guiding governor motion 3 of side comprises presetting beam b1, two regulating block c1, c2, supporting bracket d1 and fastens screw e1; Described two regulating blocks c1, c2 are fixed in stator casing f side respectively, presetting beam b1 is arranged between two regulating blocks c1, c2, described supporting bracket d1 is fixed on base 6, employing fastens screw e1 and presetting beam b1 and regulating block c1, c2 is fastened on supporting bracket d1 to reach the position regulating stator and shell 1 thereof through supporting bracket d1, make stator a top drive sufficient a1 and mover guide rail 2 to keep stable to contact, opposite side form is identical.During assembling, first the guiding governor motion 3,4 of both sides is contained in advance the both sides of stator casing f, does not first fasten screw e1 and e2; Then regulate the stator casing f including stator a, make stator two drive sufficient a1, a2 to contact with mover guide rail 2 simultaneously, now, fasten screw e1, e2 and this contact condition is positioned.
Precompression device 5 comprises bar g in precompression, precompression spring h, precompression supporting bracket i, the outer bar j and housing screw k of precompression; End in contact after bar g and stator casing f in described precompression, precompression spring h is arranged on interior bar g, the outer bar j of precompression compresses precompression spring h through the circular hole on precompression supporting bracket i, and outer for precompression bar j is fixed on a certain position in order to provide stable precompression by housing screw k.
Be illustrated in figure 4 piezoelectric motor and be applied to voltage signal on four groups of stacked piezoelectrics pottery a3, a4, a5, a6 in the operational mode, be illustrated in figure 5 the working mechanism figure of piezoelectric motor in one-period.Composition graphs 4 and Fig. 5, wherein i, iii to represent after t=0 and t=T/2 in a flash respectively, and ii, iiii represent the in a flash front of t=T/2 and t=T respectively.
In the i moment, the voltage on the left piezoelectric stack a4 driving foot of stator increases to UC fast, and it extends in y direction, and mover guide rail 2 is backed down on the sufficient a1 top of now left driving;
In the ii moment, piezoelectric stack a3, a5 boost to UD respectively, and extending in x direction and x negative direction respectively must displacement δ, and from i state to ii state, left driving foot a1 promotes mover guide rail 2 and to have moved in x direction δ displacement;
In the iii moment, the voltage in piezoelectric stack a4 drops to 0 fast, returns to former long status, and meanwhile, the voltage on the piezoelectric stack a6 in the sufficient a2 of right driving increases to UC fast, and it extends in y direction, and now the sufficient a2 of right driving backs down guide rail 2;
In the iiii moment, piezoelectric stack a4, a6 is depressurized to 0 respectively, to have moved certain displacement δ respectively in x negative direction and x direction, and from the iii moment to the iiii moment, right driving foot a2 promotes mover guide rail 2 and to have moved in x direction δ displacement.
Draw thus, in one-period, stator a promotes guide rail 2 and moves right 2 δ displacements.So move in circles, motor just can realize the rectilinear motion of Long Distances.Exchange the driving voltage signal on stacked piezoelectric pottery a4 and a6, the counter motion of piezoelectric motor can be realized.
Be understandable that, for those of ordinary skills, can be equal to according to technical scheme of the present invention and inventive concept thereof and replace or change, and all these change or replace the protection range that all should belong to the claim appended by the present invention.
Claims (6)
1. symmetrical expression biped drives an off-resonance piezoelectric linear motor, it is characterized in that: comprise stator and shell, mover guide rail, lead governor motion, precompression device and base; Described stator is fixedly connected in its shell, and shape is in aggregates, and the front end of shell is provided with mover guide rail, and rear end connects precompression device, and two ends, left and right are connected with guiding governor motion respectively; Be provided with pre-compressed spring in described precompression device, under the restoring force effect that shell produces in pre-compressed spring deformation, front end and mover guide rail keep in touch; Described stator and shell, mover guide rail, precompression device and guiding governor motion are all installed on base.
2. symmetrical expression biped as claimed in claim 1 drives off-resonance piezoelectric linear motor, it is characterized in that: described stator comprises stator support plate, driving is enough to and stacked piezoelectric pottery, and described driving foot has two at least, and is symmetrical arranged; Wherein, each two ends of foot that drive are fixedly connected on the stacked piezoelectric pottery of arrangement in 90 °, and by stacked piezoelectric ceramic joining on stator support plate; Described stator also comprises hinge, and described hinge one end is connected to and drives on foot, and the other end is fixing on the supporting plate by pre-loading screw.
3. symmetrical expression biped as claimed in claim 2 drives off-resonance piezoelectric linear motor, it is characterized in that: be also provided with cushion block at described stacked piezoelectric pottery and stator support board mount, this cushion block is hemisphere.
4. piezoelectric linear motor as claimed in claim 1, is characterized in that: described stator casing is that hollow structure is convenient to stator to be installed on wherein, is threaded connection and fixes as one between stator and shell; Described shell is distributed with two symmetrical " π " type slots, the end points portion of every bar " π " type slot is provided with aperture, and described slot and aperture form flexible hinge in order to bear structure along the slight deformation with mover direction of motion vertical direction.
5. symmetrical expression biped as claimed in claim 1 drives off-resonance piezoelectric linear motor, it is characterized in that: described guiding governor motion has two at least, and is symmetricly set on two ends, shell left and right; Wherein the guiding governor motion of side comprises presetting beam, two regulating blocks and supporting bracket, supporting bracket, regulating block and presetting beam ecto-entad is fixed on shell successively by fastening screw.
6. symmetrical expression biped as claimed in claim 1 drives off-resonance piezoelectric linear motor, it is characterized in that: described precompression device comprises bar in precompression, precompression spring, precompression supporting bracket, the outer bar of precompression and housing screw; End in contact after bar and stator casing in described precompression, precompression spring is arranged on interior bar; The outer bar of described precompression compresses precompression spring through the circular hole in precompression supporting bracket, and outer for precompression bar is fixed on a certain position in order to provide stable precompression by described housing screw.
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| CN201510421361.8A CN105071686B (en) | 2015-07-17 | 2015-07-17 | A kind of symmetrical expression biped drives off-resonance piezoelectric linear motor |
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| CN201510421361.8A CN105071686B (en) | 2015-07-17 | 2015-07-17 | A kind of symmetrical expression biped drives off-resonance piezoelectric linear motor |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105743387A (en) * | 2016-03-30 | 2016-07-06 | 南京航空航天大学 | Lever amplification based alternative stepping piezoelectric linear motor |
| CN106059382A (en) * | 2016-06-06 | 2016-10-26 | 长春工业大学 | Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor |
| CN106787935A (en) * | 2016-12-16 | 2017-05-31 | 南京航空航天大学 | A kind of inertia non-resonant biped piezoelectric straight line actuator and method of work |
| CN108092547A (en) * | 2018-02-26 | 2018-05-29 | 盐城工学院 | A kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof |
| CN108155830A (en) * | 2018-02-26 | 2018-06-12 | 盐城工学院 | A kind of double-driving foot type linear piezoelectric motor and electric excitation method thereof |
| CN108957321A (en) * | 2018-08-23 | 2018-12-07 | 广州市昊志机电股份有限公司 | A kind of linear motor test platform |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN109713936A (en) * | 2019-03-20 | 2019-05-03 | 杨晓峰 | Elliptical vibration piezoelectric actuator and its driving method |
| CN110581671A (en) * | 2019-09-27 | 2019-12-17 | 长春工业大学 | Double-foot clamping type high-bearing precision piezoelectric linear driver |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002136159A (en) * | 2000-10-24 | 2002-05-10 | Taiheiyo Cement Corp | Feeder and feed mechanism |
| KR101190052B1 (en) * | 2012-06-19 | 2012-10-12 | 한국기계연구원 | A piezo-driven high stiffness stage with buffer module |
| CN102857138A (en) * | 2012-07-30 | 2013-01-02 | 南京航空航天大学 | Piezoelectric motor |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN103427704A (en) * | 2013-07-31 | 2013-12-04 | 南京航空航天大学 | Double-foot driving piezoelectric linear motor and electric excitation mode |
| CN205051600U (en) * | 2015-07-17 | 2016-02-24 | 南京航空航天大学 | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor |
-
2015
- 2015-07-17 CN CN201510421361.8A patent/CN105071686B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002136159A (en) * | 2000-10-24 | 2002-05-10 | Taiheiyo Cement Corp | Feeder and feed mechanism |
| KR101190052B1 (en) * | 2012-06-19 | 2012-10-12 | 한국기계연구원 | A piezo-driven high stiffness stage with buffer module |
| CN102857138A (en) * | 2012-07-30 | 2013-01-02 | 南京航空航天大学 | Piezoelectric motor |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN103427704A (en) * | 2013-07-31 | 2013-12-04 | 南京航空航天大学 | Double-foot driving piezoelectric linear motor and electric excitation mode |
| CN205051600U (en) * | 2015-07-17 | 2016-02-24 | 南京航空航天大学 | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105743387A (en) * | 2016-03-30 | 2016-07-06 | 南京航空航天大学 | Lever amplification based alternative stepping piezoelectric linear motor |
| CN106059382A (en) * | 2016-06-06 | 2016-10-26 | 长春工业大学 | Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor |
| CN106059382B (en) * | 2016-06-06 | 2017-09-01 | 长春工业大学 | Rhombus hinge oblique slot type quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method |
| CN106787935A (en) * | 2016-12-16 | 2017-05-31 | 南京航空航天大学 | A kind of inertia non-resonant biped piezoelectric straight line actuator and method of work |
| CN106787935B (en) * | 2016-12-16 | 2019-04-09 | 南京航空航天大学 | A kind of inertia non-resonant biped piezoelectric straight line actuator |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN108092547A (en) * | 2018-02-26 | 2018-05-29 | 盐城工学院 | A kind of biped type piezoelectricity electromagnetism hybrid linear motor and electric excitation method thereof |
| CN108155830A (en) * | 2018-02-26 | 2018-06-12 | 盐城工学院 | A kind of double-driving foot type linear piezoelectric motor and electric excitation method thereof |
| CN108957321A (en) * | 2018-08-23 | 2018-12-07 | 广州市昊志机电股份有限公司 | A kind of linear motor test platform |
| CN108957321B (en) * | 2018-08-23 | 2022-01-18 | 广州市昊志机电股份有限公司 | Linear electric motor test platform |
| CN109713936A (en) * | 2019-03-20 | 2019-05-03 | 杨晓峰 | Elliptical vibration piezoelectric actuator and its driving method |
| CN110581671A (en) * | 2019-09-27 | 2019-12-17 | 长春工业大学 | Double-foot clamping type high-bearing precision piezoelectric linear driver |
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