CN103295651A - Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle - Google Patents

Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle Download PDF

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CN103295651A
CN103295651A CN2013101709218A CN201310170921A CN103295651A CN 103295651 A CN103295651 A CN 103295651A CN 2013101709218 A CN2013101709218 A CN 2013101709218A CN 201310170921 A CN201310170921 A CN 201310170921A CN 103295651 A CN103295651 A CN 103295651A
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screw
driving
inchworm
clamper
roller guide
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CN103295651B (en
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马立
王坤
周莎莎
蒋晨阳
谢炜
刘波
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

The invention relates to a piezoelectrically-driven inchworm-type positioning workbench based on a flexible amplification principle. The piezoelectrically-driven inchworm-type positioning workbench comprises a guide adjustment mechanism and an inchworm-type moving platform. The guide adjustment mechanism guides the positioning workbench via cross roller guide ways, and the inchworm-type moving platform is guaranteed to move normally along the guide ways through a datum retaining plate, an adjustment retaining plate and adjusting screws. Clamping portions of a flexible mechanism in the inchworm-type moving platform are of a symmetrical level amplification mechanism, and an intermediate driving portion is of a composite bridge structure. Extension and shortening of three piezoelectric ceramics on the inchworm-type moving platform are controlled by a time sequence to complete linear travelling movements of the workbench. The inchworm-type positioning workbench has the advantages of large travel, high resolution, high bearing capacity, high moving speed, good directionality and the like.

Description

Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle
Technical field
The present invention relates to a kind of Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle, be mainly used in Aero-Space, precision optical instrument, ultraprecise processing and other fields.
Background technology
Along with development of modern science and technology, precision positioning technology occupies critical role at aspects such as Aero-Space, precision optical instrument, ultraprecise processing.Traditional positioning table volume is big, and resolution is not high, and limitation is more and more obvious.Utilize at present that the piezoelectric response speed is fast, bearing accuracy is high, be not subjected to characteristics such as electromagnetic interference (EMI), the Piezoelectric Driving worktable has become the research focus, comprises four kinds of piezoelectric micromotor displacement work table, piezoelectric ultrasonic worktable, piezoelectric inertia positioning table and piezoelectricity Inchworm type positioning tables.Piezoelectricity Inchworm type positioning table is to copy the class-1 piezoelectric of occurring in nature inchworm motion characteristics development to drive positioning table.With respect to other a few class Piezoelectric Driving worktable, the design of piezoelectricity Inchworm type positioning table is very flexible, overcome that piezoelectric ultrasonic worktable load-bearing capacity is little, serious wear, semaphore request height, shortcoming that efficient is lower, bigger than piezoelectricity micro-displacement work table impulse stroke, overcome that piezoelectric inertia positioning table power output is little, location shortcoming accurately not, can satisfy present high-precision field at a high speed, the requirement of big load-bearing capacity, high position precision.But the movement velocity of piezoelectricity Inchworm type positioning table is lower at present, and for addressing this problem, the present invention has developed a kind of novel Piezoelectric Driving Inchworm type positioning table.
Summary of the invention
The objective of the invention is to the defective at the prior art existence, a kind of Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle is provided, have characteristics such as stroke is big, resolution is high, load-bearing capacity is big, and response speed is fast.
For achieving the above object, design of the present invention is:
The present invention has designed a kind of novel Inchworm type positioning table based on flexible amplification principle studying on the basis of Inchworm type positioning table in the past, comprises guiding governor motion and Inchworm type motion platform two parts.Wherein, the compliant mechanism of Inchworm type motion platform is made up of symmetrical expression lever amplification clamper mechanism and the middle driving mechanism of composite bridge at two ends, has adopted integrated design processing, has improved the worktable resistance to overturning.With the guiding mechanism of intersection roller guide rail as positioning table, the interior side rails of intersection roller guide rail is connected with the Inchworm type motion platform, and follower rail is fixed on the pedestal.The benchmark baffle plate is used for guaranteeing the linearity of two secondary intersection roller guide rail the first half follower rails; Controllable register by the set screw adjustment on it intersect the roller guide rail upper and lower part spacing, the depth of parallelism and intersect the internal clearance of roller guide rail to guarantee the proper motion of Inchworm type motion platform.The finish the work straight line moving action of platform of elongation by three piezoelectric ceramics of sequential control and shortening.
According to the foregoing invention design, the present invention adopts following technical proposals:
A kind of Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle, comprise guiding governor motion and Inchworm type motion platform two parts, described Inchworm type motion platform and inboard connection of guiding governor motion, the sequential control by piezoelectric ceramics in the Inchworm type motion platform makes the Inchworm type motion platform to do Inchworm type straight line moving and location along the governor motion that leads.
The guiding governor motion of above-mentioned Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle comprises pedestal, benchmark baffle plate, controllable register, intersection roller guide rail and set screw.Benchmark baffle plate and controllable register by screw be individually fixed in pedestal on, following both sides, the follower rail of two secondary the first half of intersecting roller guide rails is close to as benchmark with the inboard of benchmark baffle plate and is fixed on the pedestal, the follower rail of the latter half of two secondary intersection roller guide rails links to each other with pedestal by screw, and (note: screw can not screw, should make that to intersect the pose in the outside of the latter half of roller guide rail adjustable), two secondary interior side rails and the Inchworm type motion platforms that intersect roller guide rail are connected, and set screw screws in the threaded hole of controllable register and heads on two secondary roller guide rail the latter half follower rails that intersect from lateral surface; Set screw is regulated spacing, the depth of parallelism of the upper and lower part of every secondary intersection roller guide rail and is intersected the internal clearance of roller guide rail, to guarantee Inchworm type motion platform proper motion, screw the above-mentioned connection that does not screw then and intersect the follower rail of the latter half of roller guide rail and the screw of pedestal.
The Inchworm type motion platform of above-mentioned Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle comprises compliant mechanism, pad and piezoelectric ceramics.Piezoelectric ceramics is fastened on the compliant mechanism by pad and holding screw, and compliant mechanism is connected with the two secondary interior side rails that intersect roller guide rail by screw.Wherein compliant mechanism is designed to the integral structure that amplifies based on flexibility, and this design processing has guaranteed the integrality of compliant mechanism, and compliant mechanism mainly comprises clamper mechanism and the middle driving mechanism at two ends, and is that axis is left-right symmetric with center line B-B.The tight mechanism structure of the pincers on both sides is identical, adopts the symmetrical expression flexible lever structure for amplifying with 7 ° at angle of inclination, carries out displacement and amplify under the effect of piezoelectric ceramics, guarantees that compliant mechanism clamps tight guide rail.Middle driving mechanism adopts that to have the angle of inclination be 83 ° composite bridge formula hinge structure for amplifying, realizes the precise motion of positioning table.The power source of the tight motion with middle driving mechanism of the pincers of compliant mechanism two ends clamper mechanism is all from piezoelectric ceramics.Designed 8 threaded holes on the compliant mechanism so that with the installation of Other Instruments equipment.
The present invention compared with prior art, have following apparent outstanding substantive distinguishing features and significantly technical progress: (1) stroke is big, the positioning resolution height, load-bearing capacity is big; (2) clamper mechanism and middle driving mechanism have all adopted the flexible hinge structure for amplifying, have promoted the movement velocity of worktable greatly; (3) guide rail of Inchworm type positioning table adopts the intersection roller guide rail, and directionality is good.
Description of drawings
Fig. 1 is the Piezoelectric Driving Inchworm type positioning table one-piece construction based on flexible amplification principle of the present invention.
Fig. 2 is the structural representation of guiding governor motion.
Fig. 3 is the Inchworm type motion platform and intersect the scheme of installation of roller guide rail.
Fig. 4 is the structural representation of Inchworm type motion platform.
Fig. 5 is the structural representation of compliant mechanism.
Fig. 6 (a) is the clamper mechanism structure figure of Fig. 5 compliant mechanism, (b) is the clamper mechanism principle figure.
Fig. 7 (a) is the middle driving mechanism structure figure of compliant mechanism among Fig. 5, (b) is middle driving mechanism schematic diagram.
Fig. 8 is based on the motion process figure of the Piezoelectric Driving Inchworm type positioning table of flexible amplification principle.
Embodiment
Preferred embodiment accompanying drawings of the present invention is as follows;
Embodiment one:
Referring to Fig. 1 ~ Fig. 8, this is based on the Piezoelectric Driving Inchworm type positioning table of flexible amplification principle, comprise guiding governor motion 1, Inchworm type motion platform 2, it is characterized in that: described Inchworm type motion platform 2 and guiding governor motion 1 is inboard is connected, the sequential control by piezoelectric ceramics in the Inchworm type motion platform 2 makes Inchworm type motion platform 2 do Inchworm type straight line moving and location along the governor motion 1 that leads.
Embodiment two:
Present embodiment and embodiment one are basic identical, and special feature is as follows:
Described guiding governor motion 1 comprises a pedestal 3, a benchmark baffle plate 4, controllable register 5, two secondary intersection roller guide rails 6 and 4 set screw 7 compositions; Described benchmark baffle plate 4 and controllable register 5 are individually fixed in the upper and lower both sides of pedestal 3 by screw, the follower rail of the first half of two secondary intersection roller guide rails 6 is close to as benchmark with the inboard of benchmark baffle plate 4 and is fixed on the pedestal 3, the follower rail of the latter half of two secondary intersection roller guide rails 6 links to each other with pedestal 3 by screw, screw can not screw, and should make that to intersect the pose of follower rail of the latter half of roller guide rail 6 adjustable; Two secondary interior side rails and the Inchworm type motion platforms 2 that intersect roller guide rail 6 are connected; These described 4 set screw 7 screw in four threaded holes of controllable register 5 and head on the two secondary roller guide rail 6 the latter half follower rails that intersect from lateral surface; Set screw 7 is regulated spacing, the depth of parallelism of the upper and lower part of every secondary intersection roller guide rail 6 and is intersected the internal clearance of roller guide rail 6, can proper motion until Inchworm type motion platform 2, screw the above-mentioned connection that does not screw then and intersect the follower rail of the latter half of roller guide rail 6 and the screw of pedestal 3.
Described Inchworm type motion platform 2 is made up of a compliant mechanism 8, three pads 9 and three piezoelectric ceramics 10: piezoelectric ceramics 10 is fastened on the compliant mechanism 8 by pad 9 and holding screw, and compliant mechanism 8 is connected with the two secondary interior side rails that intersect roller guide rail 6 by screw.
Described compliant mechanism 8 forms integrative-structure by the 65Mn material through the line cutting processing: driving mechanism 8-3 in the middle of the lever amplifying type clamper mechanism (8-1,8-2) of two ends symmetry and the composite bridge, its left end clamper 8-1 of mechanism is identical with the right-hand member clamper 8-2 of mechanism structure, and whole compliant mechanism 8 is that axis is left-right symmetric with the center line B-B of middle driving mechanism 8-3.
The described left end clamper 8-1 of mechanism adopts the symmetrical expression lever structure for amplifying with 7 ° at angle of inclination, by four identical lever arm 8-1-1,8-1-3,8-1-7,8-1-9, two clamper sheet 8-1-2,8-1-8, go up acting force arm 8-1-4 for one, a following acting force arm 8-1-6, a left connecting link 8-1-10 and a right connecting link 8-1-5 form, and the described left end clamper 8-1 of mechanism is that axis is symmetry and left-right symmetric up and down with upper and lower to center line C-C and left and right directions center line D-D substantially; The shape and structure of upper left half part of the described left end clamper 8-1 of mechanism: the angle of described lever arm 8-1-1 and horizontal direction is 7 °, the right-hand member of lever arm 8-1-1 is connected by monolateral straight round flexible hinge 103 with clamper sheet 8-1-2, the left end of lever arm 8-1-1 is connected by bilateral straight round flexible hinge 101 with left connecting link 8-1-10, and lever arm 8-1-1 is connected by bilateral straight round flexible hinge 102 with last acting force arm 8-1-4; The shape and structure of the shape and structure of the described right-hand member clamper 8-2 of mechanism and the left end clamper 8-1 of mechanism is that axis is left-right symmetric with described center line B-B.
Driving mechanism 8-3 adopts that to have the angle of inclination be 83 ° composite bridge structure in the middle of described, by eight linking arm 8-3-1,8-3-2,8-3-4,8-3-5,8-3-7,8-3-8,8-3-10,8-3-11, a upper arm 8-3-3, a underarm 8-3-9, left connecting link 8-3-12 and a right connecting link 8-3-6 form, described in the middle of driving mechanism 8-3 with left and right sides center line E-E and up and down center line F-F be symmetry and left-right symmetric about axis is; The shape and structure of upper left half part of driving mechanism 8-3 in the middle of described: described linking arm 8-3-1 parallel with linking arm 8-3-2 and with the angle of horizontal direction be 83 °, the upper end of linking arm 8-3-1,8-3-2 is connected by bilateral straight round flexible hinge 201 with upper arm 8-3-3, linking arm 8-3-1, the lower end of 8-3-2 is connected by bilateral straight round flexible hinge 202 with left connecting link 8-3-12; The shape and structure of the shape and structure of upper right half part of driving mechanism 8-3 and described upper left half part is that axis is left-right symmetric with upper and lower to center line F-F in the middle of described; The shape and structure of the bottom right of middle driving mechanism 8-3 half part and lower-left half part then with left and right directions center line E-E be axis respectively with described in the middle of upper right half part of driving mechanism 8-3 and upper left half part symmetrical about being.
Embodiment three:
With reference to Fig. 1, a kind of Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle is made up of guiding governor motion 1 and Inchworm type motion platform 2.Inchworm type motion platform 2 is connected by screw with guiding governor motion 1 inboard.
With reference to Fig. 2, above-mentioned guiding governor motion 1: formed by a pedestal 3, a benchmark baffle plate 4, controllable register 5, two secondary intersection roller guide rails 6 and 4 set screw 7.Benchmark baffle plate 4 and controllable register 5 be individually fixed in pedestal 3 on, following both sides, the follower rail of the first half of two secondary intersection roller guide rails 6 is close to as benchmark with the inboard of benchmark baffle plate 4 and is fixed on the pedestal 3, the follower rail of the latter half of two secondary intersection roller guide rails 6 links to each other with pedestal 3 by screw, screw can not screw herein, should make that to intersect the pose of follower rail of the latter half of roller guide rail 6 adjustable, two secondary interior side rails and the Inchworm type motion platforms 2 that intersect roller guide rail 6 are connected, on the every secondary intersection roller guide rail 6 of set screw 7 adjustings, the spacing of lower part, the internal clearance of the depth of parallelism and intersection roller guide rail 6, can proper motion until Inchworm type motion platform 2, screw the above-mentioned connection that does not screw then and intersect the follower rail of the latter half of roller guide rail 6 and the screw of pedestal 3.
With reference to Fig. 3, described Inchworm type motion platform 2 by screw with intersect the interior side rails of roller guide rail 6 and be connected.
With reference to Fig. 4, above-mentioned Inchworm type motion platform 2: formed by a compliant mechanism 8, three pads 9 and three piezoelectric ceramics 10.Piezoelectric ceramics 10 is fastened on the compliant mechanism 8 by pad 9 and holding screw, and compliant mechanism 8 is connected (Fig. 3) by screw with the two secondary interior side rails that intersect roller guide rail 6.
With reference to Fig. 5, above-mentioned compliant mechanism 8 is designed to the integrated structure based on the flexibility amplification, formed through the line cutting processing by the 65Mn material, its structure comprises the lever amplifying type clamper 8-1 of mechanism, 8-2 and the middle driving mechanism 8-3 of composite bridge of two ends symmetry, its left end clamper 8-1 of mechanism is identical with the right-hand member clamper 8-2 of mechanism structure, and whole compliant mechanism 8 is that axis is left-right symmetric with the center line B-B of middle driving mechanism 8-3.
With reference to Fig. 6 (a), the above-mentioned left end clamper 8-1 of mechanism adopts the symmetrical expression lever structure for amplifying with 7 ° at angle of inclination, the 8-1 of clamper mechanism substantially about about center line C-C, D-D, up and down the symmetry, mainly comprise four identical lever arm 8-1-1,8-1-3,8-1-7 and 8-1-9, clamper sheet 8-1-2,8-1-8, go up acting force arm 8-1-4, a following acting force arm 8-1-6, a left connecting link 8-1-10 and a right connecting link 8-1-5 for one.Shape and structure with upper left half part of the above-mentioned left end clamper 8-1 of mechanism is example, the angle of lever arm 8-1-1 and horizontal direction is 7 °, the right-hand member of lever arm 8-1-1 is connected by monolateral straight round flexible hinge 103 with clamper sheet 8-1-2, the left end of lever arm 8-1-1 is connected by bilateral straight round flexible hinge 101 with left connecting link 8-1-10, and lever arm 8-1-1 is connected by bilateral straight round flexible hinge 102 with last acting force arm 8-1-4.The left end clamper 8-1 of mechanism principle is with reference to Fig. 6 (b).
With reference to Fig. 7 (a), above-mentioned middle driving mechanism 8-3 adopts that to have the angle of inclination be 83 ° composite bridge structure.Mainly comprise eight linking arm 8-3-1,8-3-2,8-3-4,8-3-5,8-3-7,8-3-8,8-3-10,8-3-11, a upper arm 8-3-3, a underarm 8-3-9, a left connecting link 8-3-12 and a right connecting link 8-3-6.Middle driving mechanism 8-3 about about center line E-E, the F-F, left-right symmetric.The upper left partly shape and structure of part with driving mechanism 8-3 in the middle of above-mentioned is example, linking arm 8-3-1 parallel with linking arm 8-3-2 and with the angle of horizontal direction be 83 °, the upper end of linking arm 8-3-1,8-3-2 is connected by bilateral straight round flexible hinge 201 with upper arm 8-3-3, linking arm 8-3-1, the lower end of 8-3-2 is connected by bilateral straight round flexible hinge 202 with left connecting link 8-3-12.Middle driving mechanism 8-3 principle is with reference to Fig. 7 (b).
With reference to Fig. 8,1), the tight roller guide rail 6 that intersects of piezoelectric ceramics 10 energising pincers among the 8-1 of clamper mechanism the motion process of above-mentioned Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle comprises following 6 steps:, the piezoelectric ceramics 10 among middle driving mechanism 8-3 and the 8-2 of clamper mechanism keeps virgin states; 2), the piezoelectric ceramics among the 8-1 of clamper mechanism 10 keeps "on" positions, piezoelectric ceramics 10 energisings of middle driving mechanism 8-3 promote clamping institution 8-2 and move right a step, the piezoelectric ceramics 10 among the 8-2 of clamper mechanism remains unchanged; 3), the tight roller that intersects of the 10 energising pincers of the piezoelectric ceramics among the 8-2 of clamper mechanism leads 6, the piezoelectric ceramics 10 of the 8-1 of clamper mechanism and middle driving mechanism 8-3 remains unchanged; 4), 10 outages of the piezoelectric ceramics among the 8-1 of clamper mechanism shrink, the piezoelectric ceramics 10 among middle driving mechanism 8-3 and the 8-2 of clamper mechanism remains unchanged; 5), the piezoelectric ceramics 10 among the 8-1 of clamper mechanism, the 8-2 remains unchanged, middle driving mechanism 8-3 piezoelectric ceramics 10 outages are contracted to virgin state and drive clamping institution 8-1 and move right; 6), 10 energisings of the piezoelectric ceramics among the 8-2 of clamper mechanism remain unchanged, the tight roller guide rail 6 that intersects of piezoelectric ceramics 10 energising pincers among the 8-1 of clamper mechanism, middle driving mechanism 8-3 is in off position, and finish a working cycle this moment, and the Inchworm type positioning table moves right and moves a step.Repeating step 1-6 can realize the unidirectional big stroke motion of Inchworm type positioning table.The energising sequencing that changes piezoelectric ceramics 10 among the clamper 8-1 of mechanism, 8-2 and the middle driving mechanism 8-3 can be realized the positioning table counter motion.
The Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle that the present invention sets up, stroke is big, the resolution height, load-bearing capacity is big, and movement velocity is fast, and directionality is good.

Claims (6)

1. Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle, comprise guiding governor motion (1), Inchworm type motion platform (2), it is characterized in that: described Inchworm type motion platform (2) is connected with guiding governor motion (1) is inboard, and the sequential control by the interior piezoelectric ceramics of Inchworm type motion platform (2) makes Inchworm type motion platform (2) do Inchworm type straight line moving and location along the governor motion (1) that leads.
2. the Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle according to claim 1 is characterized in that: described guiding governor motion (1) comprises a pedestal (3), a benchmark baffle plate (4), a controllable register (5), two secondary roller guide rails (6) and 4 set screw (7) compositions of intersecting; Described benchmark baffle plate (4) and controllable register (5) are individually fixed in the upper and lower both sides of pedestal (3) by screw, the follower rail of the first half of two secondary intersection roller guide rails (6) is close to as benchmark with the inboard of benchmark baffle plate (4) and is fixed on the pedestal (3), the follower rail of the latter half of two secondary intersection roller guide rails (6) links to each other with pedestal (3) by screw, screw can not screw, and should make that to intersect the pose of follower rail of the latter half of roller guide rail (6) adjustable; Two secondary interior side rails and the Inchworm type motion platforms (2) that intersect roller guide rail (6) are connected; These described 4 set screw (7) screw in four threaded holes of controllable register (5) and head on two secondary roller guide rail (6) the latter half follower rails that intersect from lateral surface; Set screw (7) is regulated spacing, the depth of parallelism of the upper and lower part of every secondary intersection roller guide rail (6) and is intersected the internal clearance of roller guide rail (6), can proper motion until Inchworm type motion platform (2), screw the above-mentioned connection that does not screw then and intersect the follower rail of the latter half of roller guide rail (6) and the screw of pedestal (3).
3. the Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle according to claim 1, it is characterized in that: described Inchworm type motion platform (2) is made up of with three piezoelectric ceramics (10) a compliant mechanism (8), three pads (9): piezoelectric ceramics (10) is fastened on the compliant mechanism (8) by pad (9) and holding screw, and compliant mechanism (8) is connected with the two secondary interior side rails that intersect roller guide rail (6) by screw.
4. the Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle according to claim 3, it is characterized in that: described compliant mechanism (8) forms integrative-structure by the 65Mn material through the line cutting processing: driving mechanism (8-3) in the middle of the lever amplifying type clamper mechanism (8-1,8-2) of two ends symmetry and the composite bridge, its left end clamper mechanism (8-1) is identical with right-hand member clamper mechanism (8-2) structure, and whole compliant mechanism (8) is that axis is left-right symmetric with the center line B-B of middle driving mechanism (8-3).
5. the Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle according to claim 4, it is characterized in that: described left end clamper mechanism (8-1) adopts the symmetrical expression lever structure for amplifying with 7 ° at angle of inclination, by four identical lever arm (8-1-1,8-1-3,8-1-7,8-1-9), two clamper sheet (8-1-2,8-1-8), go up acting force arm (8-1-4) for one, a following acting force arm (8-1-6), a left connecting link (8-1-10) and a right connecting link (8-1-5) are formed, and described left end clamper mechanism (8-1) is that axis is symmetry and left-right symmetric up and down with upper and lower to center line C-C and left and right directions center line D-D substantially; The shape and structure of upper left half part of described left end clamper mechanism (8-1): described lever arm (8-1-1) is 7 ° with the angle of horizontal direction, the right-hand member of lever arm (8-1-1) is connected by monolateral straight round flexible hinge (103) with clamper sheet (8-1-2), the left end of lever arm (8-1-1) is connected by bilateral straight round flexible hinge (101) with left connecting link (8-1-10), and lever arm (8-1-1) is connected by bilateral straight round flexible hinge (102) with last acting force arm (8-1-4); The shape and structure of the shape and structure of described right-hand member clamper mechanism (8-2) and left end clamper mechanism (8-1) is that axis is left-right symmetric with described center line B-B.
6. the Piezoelectric Driving Inchworm type positioning table based on flexible amplification principle according to claim 4, it is characterized in that: driving mechanism (8-3) adopts that to have the angle of inclination be 83 ° composite bridge structure in the middle of described, by eight linking arm (8-3-1,8-3-2,8-3-4,8-3-5,8-3-7,8-3-8,8-3-10,8-3-11), a upper arm (8-3-3), a underarm (8-3-9), a left connecting link (8-3-12) and a right connecting link (8-3-6) are formed, described in the middle of driving mechanism (8-3) with left and right sides center line E-E and up and down center line F-F be symmetry and left-right symmetric about axis is; The shape and structure of upper left half part of driving mechanism (8-3) in the middle of described: described linking arm (8-3-1) parallel with linking arm (8-3-2) and with the angle of horizontal direction be 83 °, the upper end of linking arm (8-3-1,8-3-2) is connected by bilateral straight round flexible hinge (201) with upper arm (8-3-3), linking arm (8-3-1, lower end 8-3-2) is connected by bilateral straight round flexible hinge (202) with left connecting link (8-3-12); The shape and structure of the shape and structure of upper right half part of driving mechanism (8-3) and described upper left half part is that axis is left-right symmetric with upper and lower to center line F-F in the middle of described; The shape and structure of the bottom right of middle driving mechanism (8-3) half part and lower-left half part then with left and right directions center line E-E be axis respectively with described in the middle of upper right half part of driving mechanism (8-3) and upper left half part symmetrical about being.
CN201310170921.8A 2013-05-10 2013-05-10 Based on the Piezoelectric Driving Inchworm type positioning table of flexible amplification principle Expired - Fee Related CN103295651B (en)

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CN106452165A (en) * 2016-11-10 2017-02-22 江西理工大学 Inchworm-type precise linear micro-actuator based on complaint mechanism
CN107705821A (en) * 2017-09-14 2018-02-16 山东大学 A kind of two degrees of freedom Inchworm type micro-nano locating platform
CN108482511A (en) * 2018-03-27 2018-09-04 江西理工大学 A kind of Inchworm type fine motion walking robot
CN108577926A (en) * 2018-05-17 2018-09-28 杭州电子科技大学 A kind of biological tissue's saw cutting device and its sawing method
CN109104118A (en) * 2018-09-19 2018-12-28 宁波大学 The structure-integrated full displacement compound amplifying type piezoelectricity looper linear platform of driving in situ
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