CN207968348U - A kind of biped type piezoelectricity electromagnetism hybrid linear motor - Google Patents

Abstract

The utility model provides a kind of biped type piezoelectricity electromagnetism hybrid linear motor, belongs to piezoelectric motor field, this biped type piezoelectricity electromagnetism hybrid linear motor, including stator, mover, pedestal and mounting base；Mover is slidably connected with pedestal；The first laminated piezoelectric that driving the first driving foot is moved in glide direction is provided between first driving foot and frame；The second laminated piezoelectric that driving the second driving foot is moved in glide direction is provided between second driving foot and frame；The first electromagnetism group and the second electromagnetism group are fixedly installed on pedestal, the first electromagnetism group driving the first driving foot is closer or far from mover；Second electromagnetism group driving the second driving foot is closer or far from mover；Mounting base, which has, is fixedly mounted on the first leaf spring on pedestal, and perpendicular to the axial direction of the first electromagnetism group, frame connect the first leaf spring with the first leaf spring.This biped type piezoelectricity electromagnetism hybrid linear motor precision is high, at low cost, long lifespan.

Description

A kind of biped type piezoelectricity electromagnetism hybrid linear motor

Technical field

The utility model is related to piezoelectric motor fields, in particular to a kind of biped type piezoelectricity electromagnetism hybrid linear Motor.

Background technology

With the development of micro-/ nano technology, all there is an urgent need to submicron orders, micro-/to receive for the research of numerous field of engineering technology The accurate actuator of meter level.But since traditional electromagnetic machine needs deceleration device, it is being miniaturized, in the developing direction of high power to weight ratio It is difficult to break through.With the development of material science, new function material is that these applications propose new solution, wherein inverse The discovery of piezoelectric effect and the appearance of piezoelectric ceramics (PZT) material with superior function so that Precision Piezoelectric actuator research It gets the attention, and the foreground of being widely applied is shown in accurate start field.

Linear piezoelectric motor includes mainly resonance type ultrasound electric machine and off-resonance type stepper motor.Resonance type ultrasound electric machine is The resonance of elastomer is excited using the inverse piezoelectric effect of piezoelectric ceramics, and the Light deformation of elastomer is converted by the coupling that rubs The macroscopic motion of rotor or mover.Since ultrasound electric machine is run under resonance state, cause its performance affected by environment larger, together When it is higher to the requirement on machining accuracy of stator.Off-resonance type stepper motor is the precise displacement output characteristics using laminated piezoelectric, In conjunction with inertia impact drive principle or looper principle, the step motion that movement parts are continuous, accurate can be realized.With resonant piezoelectric electro Machine is compared, and non-resonant behavior has wider working band, to the strong interference immunity of ambient enviroment；And to the size of motor stator It is less high with requirement on machining accuracy, it is easy to ensure the stationarity of motor operation.But inertia impact type and looper principle off-resonance Linear motor requires more harsh, driving force very little to driving control signal.

Utility model content

The utility model provides a kind of biped type piezoelectricity electromagnetism hybrid linear motor, it is intended to solve double in the prior art The above problem existing for sufficient type piezoelectricity electromagnetism hybrid linear motor.

The utility model is realized in this way：

A kind of biped type piezoelectricity electromagnetism hybrid linear motor, including stator, mover, pedestal and mounting base；

The mover is slidably connected with the pedestal；

The stator include for drive the first driving foot that the mover slides forward or backwards in glide direction and Second driving foot；

The stator further includes frame, and the frame has to be driven for installing the first driving foot and described second The installation space of action spot；

The first driving foot has the first driving side, and driving is provided between first driving side and the frame First laminated piezoelectric of the first driving foot in glide direction movement；The second driving foot has far from described first Second driving side of driving side is provided with driving the second driving foot in institute between second driving side and the frame State the second laminated piezoelectric of glide direction movement；

The first magnetic part is fixedly installed on the pedestal；It is described first driving foot far from the mover one end be provided with Second magnetic part of the first magnetic part cooperation；Third magnetic part is further fixedly arranged on the pedestal；The second driving foot is separate One end of the mover is provided with the 4th magnetic part coordinated with the third magnetic part；

The mounting base, which has, is fixedly mounted the first leaf spring on the base, and first leaf spring is perpendicular to described the The axial direction of first electromagnetism group of one magnetic part and the second magnetic part composition, the frame are connect with first leaf spring.

In a kind of embodiment of the utility model, the frame includes the first frame and the second frame, the installation space The second space in the first space and second frame being also classified into first frame, the first driving foot are placed in described First space, the second driving foot are placed in the second space.

In a kind of embodiment of the utility model, the first driving foot has opposite with first driving side the Three driving sides, by the first elastic preload piece connection between the third driving side and first frame, first elasticity is pre- Tight part has the elastic force for being parallel to the glide direction.

In a kind of embodiment of the utility model, the second driving foot has opposite with second driving side the Four driving sides, by the second elastic preload piece connection between the 4th driving side and second frame, second elasticity is pre- Tight part has the elastic force for being parallel to the glide direction.

In a kind of embodiment of the utility model, the first magnetic part is fixed by the first fixed seat, and described first is solid Reservation is fixedly mounted on the base, and first fixed seat has the first stationary plane for fixing the first magnetic part.

In a kind of embodiment of the utility model, the third magnetic part is fixed by the second fixed seat, and described second is solid Reservation is fixedly mounted on the base, and second fixed seat has the second stationary plane for fixing the third magnetic part.

In a kind of embodiment of the utility model, first stationary plane is vertical with the axis of the first electromagnetism group, The axis of the second electromagnetism group is vertical.

In a kind of embodiment of the utility model, the frame is additionally provided with the second plate close to one end of the mover Spring, the frame are connect with second leaf spring.

In a kind of embodiment of the utility model, is additionally provided between first laminated piezoelectric and first frame One guide part is additionally provided with the second guide part between second laminated piezoelectric and second frame.

In a kind of embodiment of the utility model, first leaf spring has ring stand, the hollow formation reed of ring stand Accommodating space is provided with the first reed portion and the second reed portion in the reed accommodating space, and first reed portion is provided with Multiple reeds, second reed portion are provided with multiple reeds, the reed with the ring stand in the same plane, described first Frame is connect with first reed portion, and second frame is connect with second reed portion.

The utility model has the beneficial effects that：Pass through biped type piezoelectricity electromagnetism hybrid linear provided by the utility model electricity Machine, with two groups of symmetric periodic signals and two groups of square-wave signals encourage respectively parallel mover guide rail arrangement laminated piezoelectric and perpendicular to The electromagnetism group of mover guide rail arrangement.When using the square-wave signal of two groups of identical symmetric periodic signals and two groups of opposite in phase, The motor can realize biped walking mode.When using opposite in phase, voltage different two symmetric periodic signals and opposite in phase Two groups of square-wave signals when, which can realize biped differential mode.The type motor works under non-resonant behavior, has Wider working band is easy to ensure the work smoothness of motor, require driving control signal and machining accuracy etc. relatively low.By It is driven using electromagnetism group in length travel output, larger normal pressure and frictional force can be generated on stator and mover interface. Therefore, the displacement resolution of the utility model nano-precision easy to implement, and have the characteristics that off-resonance, wide frequency domain, high thrust, The advantages of having both low manufacture cost, long lifespan simultaneously and cut off self-lock.

Description of the drawings

It, below will be to required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment The attached drawing used is briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore not The restriction to range is should be considered as, for those of ordinary skill in the art, without creative efforts, It can also be obtained according to these attached drawings other relevant attached drawings.

Fig. 1 is the structural schematic diagram for the biped type piezoelectricity electromagnetism hybrid linear motor that the utility model embodiment provides；

Fig. 2 is the stator and mounting base for the biped type piezoelectricity electromagnetism hybrid linear motor that the utility model embodiment provides Structural schematic diagram；

Fig. 3 is that the structure of the stator for the biped type piezoelectricity electromagnetism hybrid linear motor that the utility model embodiment provides is shown It is intended to；

Fig. 4 is the structural schematic diagram for the first leaf spring that the utility model embodiment provides；

Fig. 5 is the structural schematic diagram at the first visual angle of the mounting base that the utility model embodiment provides；

Fig. 6 is the structural schematic diagram at the second visual angle of the mounting base that the utility model embodiment provides；

Fig. 7 is the biped type piezoelectricity electromagnetism hybrid linear motor of the utility model embodiment offer in biped walking mode Electric excitation signal ideograph when positive glide direction movement down；

Fig. 8 is the biped type piezoelectricity electromagnetism hybrid linear motor of the utility model embodiment offer in biped walking mode Under the movement of anti-glide direction when electric excitation signal ideograph；

Fig. 9 is the biped type piezoelectricity electromagnetism hybrid linear motor of the utility model embodiment offer in biped differential mode Electric excitation signal ideograph when positive glide direction movement down；

Figure 10 is the biped type piezoelectricity electromagnetism hybrid linear motor of the utility model embodiment offer in the differential mould of biped Electric excitation signal ideograph under formula when positive glide direction movement.

Icon：001- biped type piezoelectricity electromagnetism hybrid linear motors；010- stators；030- movers；031- guide parts； 035- gib blocks；050- pedestals；051- bottom plates；053- side plates；070- mounting bases；071- substrates；073- bearings；110- first drives Action spot；The first driving heads of 111-；The first laminated piezoelectrics of 113-；The first guide parts of 115-；The first bolts of 117-；The first elasticity of 119- Preload piece；130- second drives foot；The second driving heads of 131-；The second laminated piezoelectrics of 133-；The second guide parts of 135-；137- second Bolt；The first frames of 210-；The second frames of 230-；250- installation spaces；311- the first electromagnetism groups；331- the second electromagnetism groups；400- One leaf spring；410- ring stands；430- reeds；The second leaf springs of 500-；The first fixed seats of 610-；The second fixed seats of 630-；611- first Mounting portion；The first fixed parts of 613-；The second mounting portions of 631-；The second fixed parts of 633-；3111- the first magnetic parts；The second magnetic of 3113- Part；3311- third magnetic parts；The 4th magnetic parts of 3313-.

Specific implementation mode

To keep the purpose, technical scheme and advantage of the utility model embodiment clearer, below in conjunction with this practicality The technical solution in the utility model embodiment is clearly and completely described in attached drawing in novel embodiment, shows So, described embodiment is a part of embodiment of the utility model, rather than whole embodiments.Based on this practicality Embodiment in novel, those of ordinary skill in the art are obtained every other without creative efforts Embodiment shall fall within the protection scope of the present invention.Therefore, the implementation to the utility model provided in the accompanying drawings below The detailed description of mode is not intended to limit claimed the scope of the utility model, but is merely representative of the utility model Selected embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative labor The every other embodiment obtained under the premise of dynamic, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be understood that the term of indicating position or position relationship is based on attached drawing Shown in orientation or positional relationship, be merely for convenience of describing the present invention and simplifying the description, rather than indicate or imply institute The equipment or element of finger must have a particular orientation, with specific azimuth configuration and operation, therefore should not be understood as to this reality With novel limitation.

In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；Can be Mechanical connection can also be electrical connection；It can be directly connected, can also can be indirectly connected through an intermediary two The interaction relationship of connection or two elements inside element.It for the ordinary skill in the art, can basis Concrete condition understands the concrete meaning of above-mentioned term in the present invention.

In the present invention unless specifically defined or limited otherwise, fisrt feature is on or below second feature It may include that the first and second features are in direct contact, can also not be to be in direct contact but pass through it including the first and second features Between other characterisation contact.Moreover, fisrt feature is on second feature, top and above include fisrt feature the Right over two features and oblique upper, or be merely representative of fisrt feature level height and be higher than second feature.Fisrt feature is in the second spy Under sign, lower section and fisrt feature included below are immediately below second feature and obliquely downward, or are merely representative of fisrt feature level Height is less than second feature.

Embodiment

A kind of biped type piezoelectricity electromagnetism hybrid linear motor 001 is present embodiments provided, referring to Fig. 1, this biped Type piezoelectricity electromagnetism hybrid linear motor 001 includes stator 010, mover 030, pedestal 050 and mounting base 070.

Mounting base 070 includes bottom plate 051 and side plate 053, and side plate 053 is fixed on the side of bottom plate 051, side plate 053 and bottom Plate 051 is fixedly connected.Guide part 031 is provided on side plate 053, guide part 031 is used to be oriented to for mover 030.

Guide part 031 is fixed on side plate 053 towards the one side of bottom plate 051, the setting on one side far from side plate 053 of guide part 031 It is equipped with guide groove, corresponding gib block 035 is provided on mover 030, gib block 035 is inserted into guide groove so that mover 030 can It is moved upwards with the axis in guide groove, i.e., so that mover 030 is slidably connected with pedestal 050, the specific direction of motion tool of mover 030 There is axial positive and negative both direction, it is related with force direction, one of direction is defined as glide direction X, by dynamic 030 force of son may make mover 030 positive movement or counter motion on glide direction X.

In the present embodiment, guide groove is dovetail groove, and the shape of corresponding gib block 035 is corresponding with guide groove.Dovetail The design of slot is so that the direction of motion of mover 030 is limited and can only carry out back and forth movement in glide direction X.

Stator 010 includes the first driving foot 110 for driving mover 030 to be slided forward or backwards on glide direction X With the second driving foot 130.

It please refers to Fig.1 and Fig. 2, the first driving foot 110 and the second driving foot 130, frame is installed to by mounting base 070 On pedestal 050, in order to realize that the independent control of the first driving foot 110 and the second driving foot 130, frame are also classified into the first frame 210 and second frame 230, the first frame 210 is for installing the first driving foot 110, and the second frame 230 is for installing the second driving foot 130. But in some embodiments, two driving foots are installed by a frame, can also realizes two driving foots on glide direction X Independent control, but need to realize by installing laminated piezoelectric in frame perpendicular to the movement of glide direction X, it appears not steady enough It is fixed.

Fig. 2 and Fig. 3 are please referred to, the first frame 210 is identical with 230 structure of the second frame, is the framework of concave shape, in framework It is in the first space second that centre, which has installation space 250, the installation space 250 that the first driving foot 110 is mounted on the first frame 210, The installation space 250 that driving foot 130 is mounted on the second frame 230 is in second space.

First driving foot 110 has the first driving head 111 for driving mover 030 to move close to one end of mover 030, In the first driving foot 110 there is the first driving side, the first driving side to be located at the first driving foot 110 and the first driving head 111 is arranged Side on one side, the first driving side are connect with the first frame 210 by the first laminated piezoelectric 113, and the first laminated piezoelectric 113 is so that the One driving foot 110 can be parallel to glide direction X movements.In order to ensure that the direction of movement is stablized, the first laminated piezoelectric 113 with The first guide part 115 is provided between first frame 210, the first guide part 115 can use the common guide part of the prior art, such as wrap Wrap up in the circumferential direction of the first laminated piezoelectric 113, one direction has larger guide pad flexible.The setting of first guide part 115 can be rectified The output of positive first laminated piezoelectric 113, while being provided with the first bolt 117 on the first frame 210 and abutting the first laminated piezoelectric 113 far One end from the first driving foot 110, may be used also by the first guide part 115 between the first bolt 117 and the first laminated piezoelectric 113 It is in direct contact to avoid the first laminated piezoelectric 113 and the first bolt 117.

First driving foot 110 has the third driving side opposite with the first driving side, and third driving side is provided with first Elastic preload piece 119, in the present embodiment, the first elastic preload piece 119 are preloading spring, the driving foot of preloading spring pair first 110 apply power corresponding with the first laminated piezoelectric 113.First 110 one end far from mover 030 of driving foot are provided with two simultaneously A parallel cantilever flexible beam passes through the common work of first the 113, first elastic preload piece 119 and cantilever flexible beam of laminated piezoelectric With so that the first driving foot 110 has relatively independent movement, and the stability moved every time is protected.

The first driving foot 110 is set up in parallel with the second driving foot 130 in the present embodiment, i.e., the first driving foot 110 is arranged In the second 130 sides far from bottom plate 051 of driving foot.

Second driving foot 130 has the second driving head 131 for driving mover 030 to move close to one end of mover 030, In the initial state, the second driving head 131 is set up in parallel with the first driving head 111.Second driving foot 130 has the second driving Side, the second driving side are located at the side that the one side of the second driving head 131 is arranged in the second driving foot 130, while the second driving side It is 130 sides far from the first laminated piezoelectric 113 of the second driving foot.Second driving side and the second frame 230 pass through the second piezo stack Layer 133 connects, and the second laminated piezoelectric 133 allows the second driving foot 130 to be parallel to glide direction X movements.In order to ensure to transport Dynamic direction is stablized, and the second guide part 135, the second guide part are provided between the second laminated piezoelectric 133 and the second frame 230 135 can use the common guide part of the prior art, such as wrap up the circumferential direction of the second laminated piezoelectric 133, one direction has larger flexibility Guide pad.The setting of second guide part 135 can correct the output of the second laminated piezoelectric 133, while be arranged on the second frame 230 There is the second bolt 137 to abut the one end of the second laminated piezoelectric 133 far from the second driving foot 130, passes through the second bolt 137 and second The second guide part 135 between laminated piezoelectric 133 can also avoid the second laminated piezoelectric 133 from being in direct contact with the second bolt 137.

Second driving foot 130 has the third driving side opposite with the second driving side, and third driving side is provided with second Elastic preload piece, in the present embodiment, the second elastic preload piece are preloading spring, and the driving of preloading spring pair second foot 130 applies Power corresponding with the second laminated piezoelectric 133.In one end setting of the second driving foot 130 far from mover 030, there are two parallel simultaneously Cantilever flexible beam, pass through the collective effect of the second laminated piezoelectric 133, second elastic preload piece and cantilever flexible beam so that the Two driving foots 130 have relatively independent movement, and the stability moved every time is protected.

Above structure has ensured that the first driving foot 110 and the second driving foot 130 can drive mover 030 in glide direction It is slided forward or backwards on X.But it can not also be selectively so that the first driving foot 110 or the second driving foot 130 be individually to mover 030 is exported, so that mover 030 can be moved with continuity.

First one end of frame 210 far from mover 030 is provided with the first electromagnetism group 311, the first electromagnetism group 311 drives first Frame 210 is whole closer or far from mover 030, namely drives the first driving foot 110 closer or far from mover 030 simultaneously.First electricity The second magnetic part 3113 in magnetic group 311 is fixedly mounted on the first side of the frame 210 far from mover 030.If the first electromagnetism group 311 The first frame 210 is driven to move, it is also necessary to be relatively fixed the first magnetic part 3111 far from the first frame 210 in the first electromagnetism group 311.

It please refers to Fig.1 and Fig. 4, the first fixed seat 610 is fixed at the first magnetic part 3111 far from the present embodiment One end of one frame 210.

First fixed seat 610 has the first fixed part 613 and the first mounting portion 611 of Relative vertical, the first fixed part 613 It is vertical with the first mounting portion 611, when the first mounting portion 611 is installed to by bolt on bottom plate 051, the first fixed part 613 i.e. with Bottom plate 051 is vertical, and the first fixed part 613 is arranged the extended spot of first the 210 to the first electromagnetism of frame group 311, the first magnetic part 3111 with First stationary plane of the first fixed part 613 is fixedly connected.

Second fixed seat 630 has the second fixed part 633 and the second mounting portion 631 of Relative vertical, the second fixed part 633 It is vertical with the second mounting portion 631, when the second mounting portion 631 is installed to by bolt on bottom plate 051, the second fixed part 633 i.e. with Bottom plate 051 is vertical, and the second fixed part 633 is arranged the extended spot of second the 230 to the second electromagnetism of frame group 331, third magnetic part 3311 with Second stationary plane of the second fixed part 633 is fixedly connected, and the 4th magnetic part 3313 in the second electromagnetism group 331 is fixedly mounted on second Side of the frame 230 far from mover 030.Wherein in order to ensure the first fixed seat 610 and the second mounting base 070 are pacified on bottom plate 051 Dress is stablized, and bolt is mounted in the both sides of the opposite first electromagnetism group 311 of the first fixed seat 610, the second fixed seat 630 opposite the The both sides of two electromagnetism groups 331 are respectively mounted bolt, cause the conflict of installation site.

In the present embodiment, by designing the first fixed seat 610 bigger than the second fixed seat 630, then fixed first 610 intermediate sets of holes of seat have an accommodating space for housing the second fixed seat 630.Wherein the second mounting portion 631 is first Among mounting portion 611, the second fixed part 633 is among the first fixed part 613.

In order to ensure the first frame 210 and the second frame 230 control its other party being parallel to the movement of electromagnetism group axially direction Upward position, provided with the first leaf spring 400 and the second leaf spring 500 to be relatively fixed frame.First leaf spring 400 has ring stand 410 and multiple reeds 430, ring stand 410 is that reed 430 provides base support, and reed 430 is for being relatively fixed the first frame 210 With the second frame 230.

Please refer to Fig.1, Fig. 5 and Fig. 6 ring stands 410 are installed to by mounting base 070 on bottom plate 051, mounting base 070 have base Plate 071 and bearing 073 perpendicular to substrate 071, two bearings 073 are set to the one side of substrate 071 for installing ring stand 410. And substrate 071 is mounted by means of bolts on bottom plate 051.In actual installation, frame be set to two bearings 073 it Between.

One end of ring stand 410 is fixed on a bearing 073, and the other end is fixed on another bearing 073, that is, is made The intermediate position alignment box body portion of ring stand 410.There is the reed accommodating space for installing reed 430 in the centre of ring stand 410, The first reed portion and the second reed portion are provided in reed accommodating space.

In the present embodiment, there are two reed 430, two reeds 430 are connect the first reed portion tool with the first frame 210.

In the same plane, and the plane is parallel with glide direction X for reed 430 and ring stand 410, with the 4th magnetic part 3313 The direction of motion is vertical.Allow reed 430 that the first frame 210 is prevented to be moved on glide direction X, but is parallel to the second magnetic There is larger flexible degree of freedom on the direction of motion direction of part 3113.

There are two reed 430, two reeds 430 are connect second reed portion tool with the second frame 230.

Reed 430 is vertical with the direction of motion of the direction of motion of the second magnetic part 3113.Reed 430 is allow to prevent second Frame 230 moves on glide direction X, but has larger flexibility certainly in the direction of motion for being parallel to the second magnetic part 3113 By spending.

Mounting base 070 is equally used, the second leaf spring 500 is additionally provided with close to one end of mover 030 in frame.Second plate Spring 500 is fixed on the one end of bearing 073 far from the first leaf spring 400.Second leaf spring 500 is identical as 400 structure of the first leaf spring, also sets It is equipped with multiple reeds 430.Part reed 430 is directly connected to the first frame 210 close to one end of mover 030, another part reed 430 are directly directly connected to the second frame 230 close to one end of mover 030.

Further, according to above-mentioned biped type piezoelectricity electromagnetism hybrid linear motor 001, two kinds of electric excitation sides are provided Method, to realize the following two kinds drive mode, the electric excitation signal of each drive mode is as shown in Fig. 7-Figure 10.Pumping signal a is the The pumping signal of two magnetic parts 3113 and the 4th magnetic part 3313 keeps stablizing.Pumping signal b, d is symmetrical rectangular pulse signal, Duty ratio is equal to 0.5, and wherein b is the application driving voltage of the first magnetic part 3111；D is the application excitation electricity of third magnetic part 3311 Pressure；Pumping signal c, e is triangular signal, and wherein c is the application driving voltage of the first laminated piezoelectric 113；Wherein e is the second pressure The application driving voltage of electric lamination 133.

The specific driving principle of each drive mode is as follows：

One, biped walking mode：

Positive friction-driven process：The first step, the first driving foot 110 drives the stage, while giving laminated piezoelectric and electromagnetism group Applying pumping signal as shown in Figure 7, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b, The electrode that the first electromagnetism group 311 at this time generates is in the same direction, and mutually exclusive, first drives the first driving head 111 of foot 110 and move Normal pressure between son 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in descending grade, the One laminated piezoelectric 113 is slowly shunk, and the contraction of the first laminated piezoelectric 113 makes the first driving 110 transverse-vibration motion blocks of foot to positive sliding Direction X is moved；The pumping signal of 4th magnetic part 3313 is a with the second magnetic part 3113, and the pumping signal of third magnetic part 3311 is d, The electrode of the second electromagnetism group 331 generation at this time is incorgruous, is attracted each other, and second drives 130 transverse-vibration motion blocks of foot at this time and moves Son 030 is detached from；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in descending grade, the second laminated piezoelectric 133 It slowly shrinks, the contraction of the second laminated piezoelectric 133 makes the second driving 130 transverse-vibration motion blocks of foot be moved to anti-glide direction；Only First driving foot 110 does work, therefore mover 030 is moved to positive glide direction X.

Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111 Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first driving 110 transverse-vibrations of foot Motion block and mover 030 are detached from；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope, the first pressure Electric lamination 113 slowly extends, and the elongation of the first laminated piezoelectric 113 makes the first driving 110 transverse-vibration motion blocks of foot to anti-glide direction Movement；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of third magnetic part 3311 is d, the second electromagnetism group 331 at this time The electrode of generation is in the same direction, and mutually exclusive, the normal pressure between the second driving 130 transverse-vibration motion blocks of foot and mover 030 is maximum；The The pumping signal of two laminated piezoelectrics 133 is e, and driving voltage is in uphill slope, the second slowly elongation of laminated piezoelectric 133, the second piezoelectricity The elongation of lamination 133 makes the second driving 130 transverse-vibration motion blocks of foot be moved to positive glide direction X；Only second driving foot 130 is done Work(, therefore mover 030 is moved to positive glide direction X.

To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 can all slided to positive Dynamic direction X movements, a cycle inner stator 010 do work twice.

Reverse friction drives process：The first step, the first driving foot 110 drives the stage, while giving laminated piezoelectric and electromagnetism group Applying pumping signal as shown in Figure 8, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b, The electrode that the first electromagnetism group 311 at this time generates is in the same direction, and mutually exclusive, first drives the first driving head 111 of foot 110 and move Normal pressure between son 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope, the The slowly elongation of one laminated piezoelectric 113, the elongation of the first laminated piezoelectric 113 make the first driving enough 110 the first driving head 111 to anti- Glide direction moves；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of third magnetic part 3311 is d, the second electricity at this time The electrode that magnetic group 331 generates is incorgruous, is attracted each other, and the second driving head 131 and mover 030 of the second driving foot 130 are detached from；The The pumping signal of two laminated piezoelectrics 133 is e, and driving voltage at this time is in uphill slope, and the second laminated piezoelectric 133 slowly extends, the The elongation of two laminated piezoelectrics 133 makes the second driving head 131 of the second driving foot 130 be moved to positive glide direction X；Only first drives Action spot 110 does work, therefore mover 030 is moved to positive glide direction X.

Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111 Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first driving sufficient 110 at this time First driving head 111 and mover 030 are detached from；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage is in descending grade, first Laminated piezoelectric 113 is slowly shunk, and the contraction of the first laminated piezoelectric 113 makes the first driving head 111 of the first driving foot 110 be slided to positive Dynamic direction X movements；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of third magnetic part 3311 is d, the second electricity at this time The electrode that magnetic group 331 generates is in the same direction, and mutually exclusive, the second driving head 131 of the second driving foot 130 and mover 030 are de- at this time From and do not do work；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage is in descending grade, and the second laminated piezoelectric 133 is slowly Shrink, contractions of the second laminated piezoelectric 133 make the second driving enough 130 the second driving head 131 to anti-glide direction movement tendency； Only second driving foot 130 does work, therefore mover 030 is moved to anti-glide direction.

To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 can all slided to anti- Dynamic direction movement, a cycle inner stator 010 do work twice.

Two, biped differential mode：

Positive friction-driven process：The first step, the first driving foot 110 drives the stage, while giving laminated piezoelectric and electromagnetism group Applying pumping signal as shown in Figure 9, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b, The electrode that the first electromagnetism group 311 at this time generates is in the same direction, and mutually exclusive, first drives the first driving head 111 of foot 110 and move Normal pressure between son 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in descending grade, the One laminated piezoelectric 113 is slowly shunk, and the contraction of the first laminated piezoelectric 113 makes the first driving head 111 of the first driving foot 110 to just Glide direction X movements；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of third magnetic part 3311 is d, at this time second The electrode that electromagnetism group 331 generates is incorgruous, is attracted each other, at this time the second driving head 131 and mover 030 of the second driving foot 130 It is detached from；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in uphill slope, and the second laminated piezoelectric 133 is slowly The elongation of elongation, the second laminated piezoelectric 133 makes the second driving head 131 of the second driving foot 130 be moved to positive glide direction X；Only There are the first driving head 111 acting of the first driving foot 110, driving mover 030 to be moved to positive glide direction X.

Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111 Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first of the first driving foot 110 Driving head 111 and mover 030 are detached from；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope, the The slowly elongation of one laminated piezoelectric 113, the elongation of the first laminated piezoelectric 113 make the second driving enough 130 the second driving head 131 to anti- Glide direction moves；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of third magnetic part 3311 is d, the second electricity at this time Magnetic group 331 generate electrode be it is in the same direction, it is mutually exclusive, at this time second drive enough 130 the second driving head 131 and mover 030 it Between normal pressure it is maximum；The pumping signal of second laminated piezoelectric 133 is e, and driving voltage at this time is in descending grade, the second piezo stack Layer 133 is slowly shunk, contractions of the second laminated piezoelectric 133 make the second driving enough 130 the second driving head 131 to anti-glide direction Movement；Only second driving foot 130 does work, and mover 030 is moved to anti-glide direction.

To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 is made to be slided to positive respectively Dynamic direction X is moved and is moved to anti-glide direction, and when voltage peak-to-peak value e is less than voltage peak-to-peak value c, two driving foots are common Driving motor mover 030 realizes a differential displacement to positive glide direction X.Since the differential displacement numerical value is less than single drive The displacement that action spot generates, therefore the displacement resolution of motor can be improved.

Reverse friction drives process：The first step, the first driving foot 110 drives the stage, while giving laminated piezoelectric and electromagnetism group Applying pumping signal as shown in Figure 10, the pumping signal of the second magnetic part 3113 is a, and the pumping signal of the first magnetic part 3111 is b, The electrode that the first electromagnetism group 311 at this time generates is in the same direction, and mutually exclusive, first drives the first driving head 111 of foot 110 and move Normal pressure between son 030 is maximum；The pumping signal of first laminated piezoelectric 113 is c, and driving voltage at this time is in uphill slope, the The slowly elongation of one laminated piezoelectric 113, the elongation of the first laminated piezoelectric 113 make the first driving enough 110 the first driving head 111 to anti- Glide direction moves；The pumping signal of 4th magnetic part 3313 is a, and the pumping signal of third magnetic part 3311 is d, the second electricity at this time The electrode that magnetic group 331 generates is incorgruous, is attracted each other, and the second driving head 131 and mover 030 of the second driving foot 130 are detached from；The The pumping signal of two laminated piezoelectrics 133 is e, and driving voltage at this time is in descending grade, and the second laminated piezoelectric 133 is slowly shunk, the The contraction of two laminated piezoelectrics 133 makes the second driving head 131 of the second driving foot 130 be moved to anti-glide direction；Only first drives Action spot 110 does work, and mover 030 is moved to anti-glide direction.

Second step, the second driving foot 130 drive the stage, and the pumping signal of the second magnetic part 3113 is a, the first magnetic part 3111 Pumping signal is b, and the electrode of the first electromagnetism group 311 generation at this time is incorgruous, is attracted each other, the first of the first driving foot 110 Driving head 111 and mover 030 are detached from；The driving voltage of first laminated piezoelectric 113 is in descending grade, and the first laminated piezoelectric 113 is slowly It shrinks, the contraction of the first laminated piezoelectric 113 makes the first driving head 111 of the first driving foot 110 be moved to positive glide direction X；The The pumping signal of four magnetic parts 3313 is a, and the pumping signal of third magnetic part 3311 is d, the electricity of the second electromagnetism group 331 generation at this time Extremely in the same direction, mutually exclusive, the normal pressure at this time between the second driving head 131 and mover 030 of the second driving foot 130 is maximum；The The driving voltage of two laminated piezoelectrics 133 is in uphill slope, the second slowly elongation of laminated piezoelectric 133, the elongation of the second laminated piezoelectric 133 The second driving head 131 of the second driving foot 130 is set to be moved to positive glide direction X；Only second driving foot 130 does work, mover 030 It is moved to positive glide direction X.

To sum up, first drive 110 driving stages of foot and the second driving 130 driving stages of foot that mover 030 is made to be slided to anti-respectively Dynamic direction moves and is moved to positive glide direction X, and when voltage peak-to-peak value c is more than voltage peak-to-peak value e, two driving foots are common Driving motor mover 030 realizes a differential displacement to anti-glide direction.Since the differential displacement numerical value is less than single drive The displacement that action spot generates, therefore the displacement resolution of motor can be improved.

The biped type piezoelectricity electromagnetism hybrid linear motor 001 provided through the invention, motor can be in 1Hz-1Khz models Interior work is enclosed, motor stator 010 is off-resonance working condition.Under biped walking mode, motor has fair speed and larger Thrust can realize micron order and submicron-level positioning accuracy；Under biped differential mode, motor has low speed and high thrust Feature can realize submicron order and nano grade positioning precision.

The foregoing is merely the preferred embodiment of the present invention, are not intended to restrict the invention, for this field For technical staff, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (10)

1. a kind of biped type piezoelectricity electromagnetism hybrid linear motor, which is characterized in that including stator, mover, pedestal and mounting base；

The mover is slidably connected with the pedestal；

The stator includes the first driving foot and second for driving the mover to be slided forward or backwards in glide direction Driving foot；

The stator further includes frame, and the frame has for installing the first driving foot and the second driving foot Installation space；

The first driving foot has the first driving side, is provided with described in driving between first driving side and the frame First laminated piezoelectric of the first driving foot in glide direction movement；The second driving foot has to be driven far from described first Second driving side of side is provided with driving the second driving foot in the cunning between second driving side and the frame Second laminated piezoelectric of dynamic direction movement；

The first magnetic part is fixedly installed on the pedestal；It is described first driving foot far from the mover one end be provided with it is described Second magnetic part of the first magnetic part cooperation；Third magnetic part is further fixedly arranged on the pedestal；The second driving foot is far from described One end of mover is provided with the 4th magnetic part coordinated with the third magnetic part；

The mounting base has the first leaf spring being fixedly mounted on the base, and first leaf spring is perpendicular to first magnetic The axial direction of first electromagnetism group of part and the second magnetic part composition, the frame are connect with first leaf spring；

The first electromagnetism group is parallel with the axial direction of the second electromagnetism group that the third magnetic part and the 4th magnetic part form.

2. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 1, which is characterized in that the frame packet The first frame and the second frame are included, the installation space is also classified into second in the first space in first frame and second frame Space, the first driving foot are placed in first space, and the second driving foot is placed in the second space.

3. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that first driving Foot has the third driving side opposite with first driving side, passes through first between the third driving side and first frame Elastic preload piece connection, the described first elastic preload piece have the elastic force for being parallel to the glide direction.

4. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that second driving Foot has fourth driving side opposite with second driving side, passes through second between the 4th driving side and second frame Elastic preload piece connection, the described second elastic preload piece have the elastic force for being parallel to the glide direction.

5. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that the first magnetic part It is fixed by the first fixed seat, first fixed seat is fixedly mounted on the base, and first fixed seat, which has, to be used for First stationary plane of the fixed first magnetic part.

6. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that the third magnetic part It is fixed by the second fixed seat, second fixed seat is fixedly mounted on the base, and second fixed seat, which has, to be used for Second stationary plane of the fixed third magnetic part.

7. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 5, which is characterized in that described first fixes Face is vertical with the axis of the first electromagnetism group, and first stationary plane is vertical with the axis of the second electromagnetism group.

8. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 1, which is characterized in that the frame leans on One end of the nearly mover is additionally provided with the second leaf spring, and the frame is connect with second leaf spring.

9. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that first piezoelectricity It is additionally provided with the first guide part between lamination and first frame, is also set up between second laminated piezoelectric and second frame There is the second guide part.

10. biped type piezoelectricity electromagnetism hybrid linear motor according to claim 2, which is characterized in that first plate Spring has a ring stand, hollow the is formationed reed accommodating space of ring stand, be provided in the reed accommodating space the first reed portion with Second reed portion, first reed portion are provided with multiple reeds, and second reed portion is provided with multiple reeds, the reed In the same plane with the ring stand, first frame is connect with first reed portion, second frame and second spring Piece portion connects.