CN105643592A - Symmetrical decoupling and single degree of freedom flexible operation mechanism - Google Patents
Symmetrical decoupling and single degree of freedom flexible operation mechanism Download PDFInfo
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Abstract
The invention discloses a symmetrical decoupling and single degree of freedom flexible operation mechanism. The symmetrical decoupling and single degree of freedom flexible operation mechanism is characterized in that the flexible operation mechanism comprises the following components connected and assembled according to design requirements: a piezoelectric ceramics driver, a spherical connector, a driving end flexible hinge, a rigid connecting block, four groups of flexible hinge combinations, two flexible chains, a rigid moving platform, a rigid support frame and a base. The mechanism adopting the flexible connecting structure, the single degree of freedom flexible hinges and the piezoelectric ceramics driver driving technology has one actuation terminal, can be applied to micro/nano operation mechanical systems, and has the advantages of being high in precision, low in inertia, compact in structure, free of error accumulation, free of mechanical friction, free of clearance, convenient to process, convenient to manufacture, convenient to industrially implement and the like.
Description
Technical field
The present invention relates to the micro-/ nano operating system of mechanical field, be specially a kind of symmetrical decoupling single-freedom and flexible operating mechanism. This mechanism can realize the flexible micro operation of translational degree of freedom in a face.
Background technology
Micro mechanical technology is the important branch of nanometer technique. Application scanning probe microscopy technique carries out the operation of molecule or atom magnitude, remodeling processed, makes that micromachine parts or even micromechanics be overall, animal and plant cells transgenic injection in bioengineering field, utilize in medical field the special mini-medical apparatuses such as small shears, microcam, microsensor to carry out the realization of Micro trauma invasive these situations of medical operating, is all built upon on the elaboration basis of micro OS or device. In microoperation field, require that mechanism carries out the motor capacity of work space in a big way and the positioning precision of precision, the flexible chain transmission that in existing compliant mechanism, many employings are made up of by different series-parallel systems the single-freedom and flexible hinge moved around fixed bias circuit, single side chain degree of often resulting in compliant mechanism performs on end movement direction inaccurate, have impact on the precision of mechanism and range of movement.
The company such as PI, Britain Queensgate of Germany has produced the formed product of the micro/nano level flexible operation mechanism based on Piezoelectric Ceramic all, is mainly used in the occasions such as light system detection, micro Process, micro assemby. MuneebUllahKhan etc., a kind of large-stroke electromagnetic for microoperation field drives XY locating platform (MuneebUllahKhan, NabilBencheikh, ChristinePrelle, Fr �� d �� ricLamarque, TobiasBeutel, StephanusB �� ttgenbach, AlongstrokeelectromagneticXYposi-tioningstageformicroapp lication, ProceedingsofIEEE/ASMETransactionsonmechatronics, October, 2012, 17 (5): 866-874) a kind of Lorentz force XY locating platform directly driven by four linear electro-magnetic motor has been reported in, YongWang etc., a kind of Long travel nanopositioning stage (YongWang driven by piezoelectric ceramic actuator, FujunSun, JunhuiZhu, MingPang, ChanghaiRu, Long-strokenanopositioningstagedrivenbypiezoelectricmoto r, JournalofSensors, 2014:1-8) in report a kind of two axle nanopositioning stages based on Piezoelectric Ceramic.YangmingLi etc., a kind of electrically driven (operated) parallel-connection decoupling of the Novel pressure for micro-nano location and layer flexible structure XY platform (YangmingLi, QingsongXu, AnovelpiezoactuatedXYstagewithparallel, decoupled, andstackedflexurestructureformi-cro-/nanopositioning.) the XY locating platform of a kind of two sheets of flexible structure is described in, flexible side chain in its every Rotating fields adopts parallel way, has mobile decoupling ability. In this field, the researchers of China are also made that certain achievement, if Zhang Yanbin etc. is at " design and analysis without coupling 3DOF parallel institution " (agricultural mechanical journal, 2008,39 volume 8 phases, 208-210) in the one introduced move a rotation 3DOF space parallel mechanism without coupling two; Liu Qingling describes the flexible micro displacement magnifying mechanism of a kind of symmetrical configuration in the research of micro displacement magnifying mechanism method for analyzing performance " flexible symmetrical " (engineering design journal, 2013,20 volume 4 phases, 344-347); Li Shihua etc. " rigidity of novel 3-RPC flexibility precision surface plate and dynamic analysis " (China Mechanical Engineering, 2013,24 volume 17 phases, 2317-2322) in describe and driven by 3 road piezoelectric ceramic actuators, there is the space 3DOF flexible operation platform of mobile decoupling ability. Above-mentioned flexible operation mechanism is supported by multiple or layer flexible side chain, but adopts the mode directly driven by piezoelectric ceramic actuator or linear motor more, and centre does not have amplifying element, causes the very big restriction of end effector space scope.
Summary of the invention
For motion coupling in the deficiencies in the prior art, particularly existing compliant mechanism and the deficiency that cannot realize bigger work space requirement, the technical problem that the present invention intends to solve is to provide a kind of symmetrical decoupling single-freedom and flexible operating mechanism. This mechanism adopts flexibility connection phase structure, single-freedom and flexible hinge and piezoelectric ceramic actuator actuation techniques, there is one and perform end, can be applicable to micro-/receive operation mechanical system, there is high accuracy, low inertia, compact conformation, error free accumulation, mechanical friction, gapless, and be easy to the advantage such as processing and manufacturing and industrializing implementation.
This invention address that the technical scheme of described technical problem is: a kind of symmetrical decoupling single-freedom and flexible operating mechanism of design, it is characterised in that this mechanism includes: piezoelectric ceramic actuator, globe joint, drive end flexible hinge, block that is rigidly connected, four groups of flexible hinge combinations, two flexible chains, a rigidity moving platform, a rigid support frame and a base;
Hollow out inside described rigid support frame, in inverted " convex " font, except described base, each part mentioned above structure is respectively positioned in described inversion " convex " font cavity, four corner locations of described rigid support frame arrange four tapped through holes, described globe joint is arranged on the top of piezoelectric ceramic actuator, the tail end of piezoelectric ceramic actuator is rigidly secured to described rigid support frame by screw thread and is inverted on the medial wall in the middle of " convex " font lower limb, and make described globe joint withstand on the centre position of described drive end flexible hinge lower surface, constitute Hertz contact;
The described block that is rigidly connected is square structure, the block lower edge symmetry midline position that is rigidly connected is connected with the upper end of described drive end flexible hinge, the described block top edge that is rigidly connected is symmetrical connects said two flexible chain respectively, described in be rigidly connected block left side edge and right side edge connects a described flexible hinge combination respectively;
Described drive end flexible hinge is made up of a vertical beam, symmetrical on described vertical beam have two semicircle grooves, described drive end flexible hinge upper end is rigidly connected the lower edge of block described in being connected to, the globe joint on lower end and described piezoelectric ceramic actuator top offsets, and forms Hertz contact;
The combination of described flexible hinge is constituted by two horizontal girds having semicircle groove, two horizontal girds are distributed from top to bottom, all having two groups of semicircle grooves on each horizontal gird, often group semicircle groove is two, on inside and outside two sidewalls being distributed in two ends, horizontal gird left and right symmetrical above and below;
The combination of described flexible hinge comprises four groups, it is respectively designated as upper left flexible hinge combination according to distributing position, upper right flexible hinge combines, lower-left flexible hinge combination and the combination of bottom right flexible hinge, the flexible hinge combination of described upper left is positioned at described rigidity moving platform left side edge and described rigid support frame is inverted between the inwall of " convex " font upper left side, the combination of described upper right flexible hinge is positioned at described rigidity moving platform right side edge and described rigid support frame is inverted between the inwall of " convex " font upper right side, the flexible hinge combination of described lower-left is rigidly connected between block left side edge and described rigid support frame inversion " convex " font lower left side inwall described in being positioned at, the flexible hinge combination of described bottom right is positioned at described contiguous block right side edge and described rigid support frame is inverted between the inwall of " convex " font lower right side,
Said two flexible chain structure is completely the same, symmetrical be distributed in described in be rigidly connected between block and described rigidity moving platform, described right flexible chain is by upper right beam, right beam, bottom right beam and a right crossbeam composition of level, described upper right beam and described bottom right beam are all vertically placed, described upper right beam includes vertical beam from top to bottom, vertical short beam and lower vertical beam three part, described upper vertical beam is symmetrical has two semicircle grooves, described lower vertical beam is symmetrical has two semicircle grooves, described two groups of semicircle groove consistent size, the upper end of the upper vertical beam in described upper right beam is connected on the right side of the lower edge of described rigidity moving platform, the lower end of the lower vertical beam in described upper right beam is connected to the right-hand member upper side of the right crossbeam of described level, described bottom right beam and described upper right girder construction and size are completely the same, the upper end of the upper vertical beam in the beam of described bottom right is connected to the left end downside of the right crossbeam of described level, the lower end of the lower vertical beam in the beam of described bottom right is connected with the described block top edge right-hand member that is rigidly connected, described right beam is also vertically placed, symmetrical on described right beam have two semicircle grooves, described right beam upper end is connected to described level right crossbeam midline position downside, lower end is connected to described rigid support frame and is inverted upper inwall on the right side of " convex " font,
Described left flexible chain is consistent with right flexible chain structure, symmetrical be distributed in described in be rigidly connected block upper edge center line both sides, described left flexible chain is made up of upper left beam, left beam, lower-left beam and a left crossbeam of level, and described upper left beam and described lower-left beam are all vertically placed, described upper left beam includes vertical beam from top to bottom, vertical short beam and lower vertical beam three part, described upper vertical beam is symmetrical has two semicircle grooves, described lower vertical beam is symmetrical has two semicircle grooves, described two groups of semicircle groove consistent size, the upper end of the upper vertical beam in the beam of described upper left is connected on the left of the lower edge of described rigidity moving platform, the lower end of the lower vertical beam in the beam of described upper left is connected to the left end upper side of the left crossbeam of described level, described lower-left beam and described upper left girder construction and size are completely the same, the upper end of the upper vertical beam in the beam of described lower-left is connected to the right-hand member downside of the left crossbeam of described level, the lower end of the lower vertical beam in the beam of described lower-left is connected with the top edge left end of the described block that is rigidly connected, described left beam is also vertically placed, symmetrical on described left beam have two semicircle grooves, described left beam upper end is connected to described level left crossbeam midline position downside, lower end is connected to described rigid support frame and is inverted upper inwall on the left of " convex " font,
Described rigidity moving platform is rectangle structure, described rigidity moving platform lower edge left end is connected with the upper end of left flexible chain, described rigidity moving platform lower edge right-hand member is connected with the upper end of right flexible chain, described rigidity moving platform left surface is connected with the combination of described upper left flexible hinge, and described rigidity moving platform right flank is connected with the combination of described upper right flexible hinge;
Described base is rectangular configuration, four corner locations raise up four rectangular blocks, it is respectively provided with a tapped through hole in described four rectangular block centers, described four rectangular blocks and four tapped through hole sizes are all completely the same, and on four tapped through hole sizes and described rigid support frame, four tapped through hole sizes are completely the same on described base, described rigid support frame and inner flexible structure thereof are arranged on above described rectangular base, four tapped through holes on described rigid support frame and four tapped through holes on described base align respectively one by one, it is rigidly connected by four bolts.
Compared with prior art, flexible micro operating mechanism of the present invention has the advantage that
1. single-freedom and flexible inching operation mechanism is planar structure, and available line cutting integration process technology overall processing forms, and avoids assembling, gapless, nothing friction, does not need lubrication, is advantageously implemented micro/nano level hi-Fix.
2. single-freedom and flexible inching operation mechanism adopts symmetrical structure, have high rigidity, in high precision, low inertia, compact conformation, the advantage such as error free accumulation, and be capable of the decoupling ability of movement output.
3. single-freedom and flexible inching operation mechanism adopts single-freedom and flexible hinge as drive mechanism, has mechanical friction, gapless, it is possible to effectively eliminate the shortcomings such as parallel institution unintentional nonlinearity.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of symmetry decoupling a kind of embodiment of single-freedom and flexible operating mechanism of the present invention;
Fig. 2 is agent structure and the flexible hinge combination schematic diagram of symmetry decoupling a kind of embodiment of single-freedom and flexible operating mechanism of the present invention;
Fig. 3 is agent structure and the flexible chain structural representation of symmetry decoupling a kind of embodiment of single-freedom and flexible operating mechanism of the present invention;
Fig. 4 is the understructure schematic diagram of symmetry decoupling a kind of embodiment of single-freedom and flexible operating mechanism of the present invention;
Fig. 5 is agent structure and flexible hinge combination (Fig. 2) cross section integral structure schematic diagram of symmetry decoupling a kind of embodiment of single-freedom and flexible operating mechanism of the present invention.
Fig. 6 is agent structure and flexible chain (Fig. 3) the cross section integral structure schematic diagram of symmetry decoupling a kind of embodiment of single-freedom and flexible operating mechanism of the present invention.
Detailed description of the invention
Below in conjunction with preferred embodiment and accompanying drawing thereof, the present invention is described in further detail below: but it is not limiting as the application scope of the claims.
The symmetrical decoupling single-freedom and flexible operating mechanism of present invention design (is called for short flexible operation mechanism, referring to Fig. 1-6) it is a kind of realize the flexible micro operating mechanism of translational degree of freedom in a face, specifically include that a piezoelectric ceramic actuator 2, drive end flexible hinge of 1, globe joint 3, is rigidly connected 4, four groups of flexible hinges combination 5, two flexible chains, 7, rigid support frames 8 of 6, rigidity moving platform of block and a base 9;
Described rigid support frame 8 is internal to be hollowed out in being inverted " convex " font or hollow " T " font (referring to Fig. 1-3/5-6), except described base 9, each part mentioned above structure (numeral labelling 1-7) be respectively positioned on described rigid support frame 8 be inverted in the cavity of " convex " font or hollow " T " font hollow in, 8 four corner locations of described rigid support frame arrange four tapped through holes and (are designated as 81, 82, 83, 84), described globe joint 2 is arranged on the top of described piezoelectric ceramic actuator 1, the tail end of described piezoelectric ceramic actuator 1 is rigidly secured to described rigid support frame 8 by screw thread and is inverted on the medial wall in the middle of " convex " font lower limb, and make described globe joint 2 withstand on the centre position of described drive end flexible hinge 3 lower surface, constitute Hertz contact,
The described block 4 that is rigidly connected is for square structure, the described block 4 lower edge symmetry midline position that is rigidly connected is connected with the upper end of described drive end flexible hinge 3, top edge is symmetrical connects said two flexible chain 61,62 respectively, described in be rigidly connected block 4 right side edge and left side edge connects a described flexible hinge combination 51,52 respectively;
Described drive end flexible hinge 3 is made up of a vertical beam, symmetrical on described vertical beam have two semicircle grooves, the globe joint 2 on described drive end flexible hinge 3 lower end and described piezoelectric ceramic actuator 1 top offsets, form Hertz contact, upper end be connected to described in be rigidly connected the lower edge point midway of block 4;
Described flexible hinge combination 51, 52, 53, 54 (referring to Fig. 2) are constituted by two horizontal girds having semicircle groove, two horizontal girds are distributed from top to bottom, each horizontal gird all has two groups of semicircle grooves, often group semicircle groove is two, on inside and outside two sidewalls being distributed in two ends, horizontal gird left and right symmetrical above and below, specifically, described flexible hinge combination 51 is rigidly connected the right side edge of block 4 and described rigid support frame 8 is inverted between the inwall of " convex " font cavity lower right side described in being positioned at, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 51 entablatures and be labeled as 513 from left to right, 514, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 51 sills and be labeled as 512 from left to right, 511, described flexible hinge combination 52 is rigidly connected the left side edge of block 4 and described rigid support frame 8 is inverted between " convex " font cavity lower left side inwall described in being positioned at, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 52 entablatures and be labeled as 523 from left to right, 524, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 52 sills and be labeled as 522 from left to right, 521, described flexible hinge combines 53 left side edge being positioned at described rigidity moving platform 7 and described rigid support frame 8 is inverted between the inwall of " convex " font cavity upper left side, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 53 entablatures and be labeled as 533 from left to right, 534, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 53 sills and be labeled as 532 from left to right, 531, described flexible hinge combines 54 right side edge being positioned at described rigidity moving platform 7 and described rigid support frame 8 is inverted between the inwall of " convex " font cavity upper right side, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 54 entablatures and be labeled as 543 from left to right, 544, it is distributed in described flexible hinge to combine two pairs of semicircle grooves of 54 sills and be labeled as 542 from left to right, 541,
Whole mechanism comprises flexible hinge combination altogether described in four groups, it is respectively designated as upper left flexible hinge combination 53 according to distributing position, upper right flexible hinge combination 54, lower-left flexible hinge combination 52, bottom right flexible hinge combination 51, described upper left flexible hinge combination 53 is positioned at described rigidity moving platform 7 left side edge and described rigid support frame 8 is inverted between the inwall of " convex " font upper left side, described upper right flexible hinge combination 54 is positioned at described rigidity moving platform 7 right side edge and described rigid support frame 8 is inverted between the inwall of " convex " font upper right side, described lower-left flexible hinge combination 52 is rigidly connected block 4 left side edge and described rigid support frame 8 is inverted between " convex " font lower left side inwall described in being positioned at, described bottom right flexible hinge combination 51 is positioned at described contiguous block 4 right side edge and described rigid support frame 8 is inverted between the inwall of " convex " font lower right side,
Said two flexible chain 61, 62 structures completely the same (referring to Fig. 3), symmetrical be distributed in described in be rigidly connected between block 4 and described rigidity moving platform 7, described right flexible chain 62 is by upper right beam, right beam 624, bottom right beam and a right crossbeam 625 of level form, described upper right beam and described bottom right beam are all vertically placed, described upper right beam includes vertical beam 621 from top to bottom, vertical short beam 622 and lower vertical beam 623 3 part, described upper vertical beam 621 is symmetrical has two semicircle grooves, described lower vertical beam 623 is symmetrical has two semicircle grooves, described two groups of semicircle groove consistent size, the upper end of the upper vertical beam 621 in described upper right beam is connected on the right side of the lower edge of described rigidity moving platform 7, the lower end of the lower vertical beam 623 in described upper right beam is connected to the right-hand member upper side of the right crossbeam 625 of described level, described bottom right beam and described upper right girder construction and size are completely the same, the upper end of the upper vertical beam 626 in the beam of described bottom right is connected to the left end downside of the right crossbeam 625 of described level, the lower end of the lower vertical beam 628 in the beam of described bottom right is connected with the described block 4 top edge right-hand member that is rigidly connected, described right beam 624 is also vertically placed, symmetrical on described right beam 624 have two semicircle grooves, described right beam 624 upper end is connected to described level right crossbeam 625 midline position downside, lower end is connected to described rigid support frame 8 and is inverted upper inwall on the right side of " convex " font,
Described left flexible chain 61 and described right flexible chain 62 is symmetrical be distributed in described in be rigidly connected block 4 upper edge center line both sides, described left flexible chain 61 is consistent with described right flexible chain 62 structure, described left flexible chain 61 is by upper left beam, left beam 614, lower-left beam and a left crossbeam 615 of level form, described upper left beam and described lower-left beam are all vertically placed, described upper left beam includes vertical beam 611 from top to bottom, vertical short beam 612 and lower vertical beam 613 3 part, described upper vertical beam 611 is symmetrical has two semicircle grooves, described lower vertical beam 613 is symmetrical has two semicircle grooves, described two groups of semicircle groove consistent size, the upper end of the upper vertical beam 611 in the beam of described upper left is connected on the left of the lower edge of described rigidity moving platform 7, the lower end of the lower vertical beam 613 in the beam of described upper left is connected to the left end upper side of the left crossbeam 615 of described level, described lower-left beam and described upper left girder construction and size are completely the same, the upper end of the upper vertical beam 616 in the beam of described lower-left is connected to the right-hand member downside of the left crossbeam 615 of described level, the lower end of the lower vertical beam 618 in the beam of described lower-left is connected with the top edge left end of the described block 4 that is rigidly connected, described left beam 614 is also vertically placed, symmetrical on described left beam 614 have two semicircle grooves, described left beam 614 upper end is connected to described level left crossbeam 615 midline position downside, lower end is connected to described rigid support frame 8 and is inverted upper inwall on the left of " convex " font,
Described rigidity moving platform 7 is rectangle structure (referring to Fig. 2, Fig. 3), described rigidity moving platform 7 lower edge left end is connected with the upper end of left flexible chain 61, described rigidity moving platform 7 lower edge right-hand member is connected with the upper end of right flexible chain 62, described rigidity moving platform 7 left surface combines 53 with described upper left flexible hinge and is connected, and described rigidity moving platform 7 right flank combines 54 with described upper right flexible hinge and is connected;
Described base 9 is rectangular configuration (referring to Fig. 4), its four corner locations raise up four rectangular blocks 91, 92, 93 and 94, at described four rectangular blocks 91, 92, 93, the center of 94 is respectively provided with a tapped through hole 911, 921, 931, 941, described four rectangular blocks 91, 92, 93, 94 and four tapped through holes 911, 921, 931 and 941 sizes are completely the same respectively, and four tapped through hole sizes 911 on described base 9, 921, 931, 941 and described rigid support frame 8 on four tapped through holes 81, 82, 83, 84 sizes are also completely the same, described rigid support frame 8 and inner flexible structure (1-7) thereof are arranged on above described rectangular base 9, four tapped through holes 81 on described rigid support frame 8, 82, 83, 84 and described base 9 on four tapped through holes 911, 921, 931, 941 align respectively one by one, it is rigidly connected by four bolts.
Flexible operation mechanism of the present invention is characterized by further, other structures except piezoelectric ceramic actuator 1 and globe joint 2, it is integrated including described drive end flexible hinge 3, be rigidly connected 6, four the flexible hinge combinations 5 of 4, two flexible chains of block, rigidity moving platform 7 and rigid support frame 8, whole block material utilizes line cutting (WEDM) integral processing method to be processed into (referring to Fig. 5, Fig. 6).
Parts itself described in flexible operation mechanism of the present invention are known technology, all commercially available.
Operation principle and the process of flexible operation mechanism of the present invention are as follows: drive piezoelectric ceramic actuator 1 so that it is elongation, promote drive end flexible hinge 3 and the block 4 that is rigidly connected, it is connected to the flexible hinge combination 51 of block 4 left and right sides that is rigidly connected, single-freedom and flexible hinge (semicircle groove) 511 in 52, 512, 513, 514 and 521, 522, 523, 524 produce the deformation of the corresponding elasticities of flexure, and the block 4 that makes to be rigidly connected produces vertical direction and moves, and under the promotion of the block 4 that is rigidly connected, is attached to two flexible chains 61 in portion, 62 also move up therewith, are distributed in flexible chain 61, single-freedom and flexible hinge 611 on 62, 613, 614, 616, 618 and 621, 623, 624, 626, 628 bend elastic deformation, simultaneously because left and right horizontal crossbeam 614, the leverage of 624, amplifies twice by displacement, thus by rigidity moving platform 7 drag down so that it is produce the single-degree-of-freedom translation of vertical direction, move down in process at rigidity moving platform 7, be connected to the flexible hinge combination 53 of both sides around, single-freedom and flexible hinge 531 in 54, 532, 533, 534 and 541, 542, 543, 544 also produce elasticity of flexure deformation, combine 53 at flexible hinge, under the effect of 54, if two flexible chains 61, 62 pull strengths there are differences, and the spinning movement of rigidity moving platform 7 being thus likely to cause can be obtained by effectively avoiding, thus ensureing the linear translation action of rigidity moving platform 7.
Flexible operation mechanism of the present invention adds flexible lever amplifying element, it is possible to the effective actual output improving rigidity moving platform, increases Work Space Range; Additionally flexible operation mechanism of the present invention adopts bilateral symmetry form, it is possible to other motions derived in mechanism kinematic process are effectively decoupled, can as the auxiliary body of micro-nano operating system, it is achieved fast trace feeding and precision positioning.
The present invention does not address part and is applicable to prior art.
It should be added that, it is shown or custom that the installation position word of parts such as " upper and lower ", " forward and backward ", " left and right " described in description scheme of the present invention is based on embodiment accompanying drawing, only there is relative property, or merely to narration is convenient, do not represent uniqueness and the indispensability of this installation site.
Claims (2)
1. a symmetrical decoupling single-freedom and flexible operating mechanism, it is characterised in that this flexible operation mechanism includes: piezoelectric ceramic actuator, globe joint, drive end flexible hinge, block that is rigidly connected, four groups of flexible hinge combinations, two flexible chains, a rigidity moving platform, a rigid support frame and a base;
Hollow out inside described rigid support frame, in inverted " convex " font, except described base, each part mentioned above structure is respectively positioned in described inversion " convex " font cavity, four corner locations of described rigid support frame arrange four tapped through holes, described globe joint is arranged on the top of piezoelectric ceramic actuator, the tail end of piezoelectric ceramic actuator is rigidly secured to described rigid support frame by screw thread and is inverted on the medial wall in the middle of " convex " font lower limb, and make described globe joint withstand on the centre position of described drive end flexible hinge lower surface, constitute Hertz contact;
The described block that is rigidly connected is square structure, the block lower edge symmetry midline position that is rigidly connected is connected with the upper end of described drive end flexible hinge, the described block top edge that is rigidly connected is symmetrical connects said two flexible chain respectively, described in be rigidly connected block left side edge and right side edge connects a described flexible hinge combination respectively;
Described drive end flexible hinge is made up of a vertical beam, symmetrical on described vertical beam have two semicircle grooves, described drive end flexible hinge upper end is rigidly connected the lower edge of block described in being connected to, the globe joint on lower end and described piezoelectric ceramic actuator top offsets, and forms Hertz contact;
The combination of described flexible hinge is constituted by two horizontal girds having semicircle groove, two horizontal girds are distributed from top to bottom, all having two groups of semicircle grooves on each horizontal gird, often group semicircle groove is two, on inside and outside two sidewalls being distributed in two ends, horizontal gird left and right symmetrical above and below;
The combination of described flexible hinge comprises four groups, it is respectively designated as upper left flexible hinge combination according to distributing position, upper right flexible hinge combines, lower-left flexible hinge combination and the combination of bottom right flexible hinge, the flexible hinge combination of described upper left is positioned at described rigidity moving platform left side edge and described rigid support frame is inverted between the inwall of " convex " font upper left side, the combination of described upper right flexible hinge is positioned at described rigidity moving platform right side edge and described rigid support frame is inverted between the inwall of " convex " font upper right side, the flexible hinge combination of described lower-left is rigidly connected between block left side edge and described rigid support frame inversion " convex " font lower left side inwall described in being positioned at, the flexible hinge combination of described bottom right is positioned at described contiguous block right side edge and described rigid support frame is inverted between the inwall of " convex " font lower right side,
Said two flexible chain structure is completely the same, symmetrical be distributed in described in be rigidly connected between block and described rigidity moving platform, described right flexible chain is by upper right beam, right beam, bottom right beam and a right crossbeam composition of level, described upper right beam and described bottom right beam are all vertically placed, described upper right beam includes vertical beam from top to bottom, vertical short beam and lower vertical beam three part, described upper vertical beam is symmetrical has two semicircle grooves, described lower vertical beam is symmetrical has two semicircle grooves, described two groups of semicircle groove consistent size, the upper end of the upper vertical beam in described upper right beam is connected on the right side of the lower edge of described rigidity moving platform, the lower end of the lower vertical beam in described upper right beam is connected to the right-hand member upper side of the right crossbeam of described level, described bottom right beam and described upper right girder construction and size are completely the same, the upper end of the upper vertical beam in the beam of described bottom right is connected to the left end downside of the right crossbeam of described level, the lower end of the lower vertical beam in the beam of described bottom right is connected with the described block top edge right-hand member that is rigidly connected, described right beam is also vertically placed, symmetrical on described right beam have two semicircle grooves, described right beam upper end is connected to described level right crossbeam midline position downside, lower end is connected to described rigid support frame and is inverted upper inwall on the right side of " convex " font,
Described left flexible chain is consistent with right flexible chain structure, symmetrical be distributed in described in be rigidly connected block upper edge center line both sides, described left flexible chain is by upper left beam, left beam, lower-left beam and a left crossbeam composition of level, described upper left beam and described lower-left beam are all vertically placed, described upper left beam includes vertical beam from top to bottom, vertical short beam and lower vertical beam three part, described upper vertical beam is symmetrical has two semicircle grooves, described lower vertical beam is symmetrical has two semicircle grooves, described two groups of semicircle groove consistent size, the upper end of the upper vertical beam in the beam of described upper left is connected on the left of the lower edge of described rigidity moving platform, the lower end of the lower vertical beam in the beam of described upper left is connected to the left end upper side of the left crossbeam of described level, described lower-left beam and described upper left girder construction and size are completely the same, the upper end of the upper vertical beam in the beam of described lower-left is connected to the right-hand member downside of the left crossbeam of described level, the lower end of the lower vertical beam in the beam of described lower-left is connected with the top edge left end of the described block that is rigidly connected, described left beam is also vertically placed, symmetrical on described left beam have two semicircle grooves, described left beam upper end is connected to described level left crossbeam midline position downside, lower end is connected to described rigid support frame and is inverted upper inwall on the left of " convex " font,
Described rigidity moving platform is rectangle structure, described rigidity moving platform lower edge left end is connected with the upper end of left flexible chain, described rigidity moving platform lower edge right-hand member is connected with the upper end of right flexible chain, described rigidity moving platform left surface is connected with the combination of described upper left flexible hinge, and described rigidity moving platform right flank is connected with the combination of described upper right flexible hinge;
Described base is rectangular configuration, four corner locations raise up four rectangular blocks, it is respectively provided with a tapped through hole in described four rectangular block centers, described four rectangular blocks and four tapped through hole sizes are all completely the same, and on four tapped through hole sizes and described rigid support frame, four tapped through hole sizes are completely the same on described base, described rigid support frame and inner flexible structure thereof are arranged on above described rectangular base, four tapped through holes on described rigid support frame and four tapped through holes on described base align respectively one by one, it is rigidly connected by four bolts.
2. symmetrical decoupling single-freedom and flexible operating mechanism according to claim 1, it is characterised in that described drive end flexible hinge, the block that is rigidly connected, two flexible chains, four flexible hinge combinations, rigidity moving platform and rigid support frame are the integral structure being utilized line cutting integral processing method to be processed into by whole block material.
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| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
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| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN116155136A (en) * | 2022-12-06 | 2023-05-23 | 东北林业大学 | Two-degree-of-freedom decoupling large-stroke flexible structure micro-motion platform |
| CN116155136B (en) * | 2022-12-06 | 2024-03-19 | 东北林业大学 | Two-degree-of-freedom decoupling large-stroke flexible structure micro-motion platform |
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