CN102794664A - Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform - Google Patents
Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform Download PDFInfo
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- CN102794664A CN102794664A CN201210246958XA CN201210246958A CN102794664A CN 102794664 A CN102794664 A CN 102794664A CN 201210246958X A CN201210246958X A CN 201210246958XA CN 201210246958 A CN201210246958 A CN 201210246958A CN 102794664 A CN102794664 A CN 102794664A
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- 238000003754 machining Methods 0.000 title claims abstract description 19
- 239000000919 ceramic Substances 0.000 claims abstract description 54
- 238000006073 displacement reaction Methods 0.000 claims abstract description 18
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 16
- 239000010432 diamond Substances 0.000 claims abstract description 16
- 230000000694 effects Effects 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 abstract description 9
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- 238000005516 engineering process Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
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- 238000005859 coupling reaction Methods 0.000 description 5
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- 238000005520 cutting process Methods 0.000 description 2
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Abstract
The invention discloses a bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform which comprises a bridge-type flexible hinge, a piezoelectric ceramic draw bar, a piezoelectric ceramic and an X-axis diamond blade, wherein the bridge-type flexible hinge capable of realizing a micro-displacement motion is fixed on an operating platform of a lathe, the two ends of the piezoelectric ceramic and the two ends of the piezoelectric ceramic draw bar are respectively arranged on two opposite edges of the Y direction of the bridge-type flexible hinge, one end (provided with a hook head) of the piezoelectric ceramic draw bar is clamped between the end part of the piezoelectric ceramic and the bridge-type flexible hinge and fixed on the bridge-type flexible hinge through a connecting component, the X-axis diamond blade is fixed at the movable end of the X direction of the bridge-type flexible hinge, a movable end A of the X direction of the bridge-type flexible hinge is fixed at one end of the X direction of the bridge-type flexible hinge, the other fixed end of the X direction of the bridge-type flexible hinge is fixed at the other end of the X direction of the bridge-type flexible hinge, and the fixed end of the bridge-type flexible hinge is fixed on the operating platform of the lathe. The driving platform disclosed by the invention can meet the machining requirements for high frequency response, high acceleration and high precision.
Description
Technical field
The present invention is the high frequency ultraprecise lathe for machining knife rest drives platform in a kind of piezoelectric ceramics enlarger that is used for quick knife rest servo-drive system (FTS); Particularly a kind of high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge belongs to the innovative technology of high frequency ultraprecise lathe for machining knife rest drives platform.
Background technology
As one of precision optical machinery and precision instrument key technology, process develops rapidly along with subject development such as photoelectricity communication, microelectronics, aerospace military project and bioengineering in high frequency is high when quickening micrometric displacement technology.With the lathe saddle drives platform of the flexible hinge of Piezoelectric Ceramic have the little no friction loss of volume, no gap, unlubricated, be easy to processing and manufacturing, motion steadily and the resolution ratio advantages of higher, need not maintenance up to overload or tired reason produce lost efficacy till.This technology is widely used in the micrometric displacement workbench process.
1978, people such as E.SCIRE at first adopted based on the guiding mechanism of flexible hinge and piezoelectric ceramic actuator and have designed the microoperation workbench that is used for space industry.This platform has compact conformation, need not lubricate, no gap, displacement resolution advantages of higher.Design size is 100mm * 100mm * 20mm, has the displacement resolution of 1nm and the displacement stroke of 50 μ m.1991, people such as K.NISHIMURA utilized lever principle on the basis of single parallelogram lindage, had designed a kind of micro-displacement mechanism that is used for PSTM, in the displacement resolution that has obtained 0.1nm, had the travel incognito journey of 7.8 μ m.2002, professor Sun Lining of Harbin Institute of Technology designed a kind of two-dimentional micro-displacement platform that is used for the optics adjustment.Owing to all adopt piezoelectric ceramic actuator directly to drive at X, Y two-dimensional directional, thereby there is coupling between bigger dimension in this platform.
Ancestor's brilliance professor of BJ University of Aeronautics & Astronautics is connected in parallel two Roberts compliant mechanisms; Designed a kind of linear pattern microoperation platform; This platform can be in the deviation on assurance on the millimetre-sized stroke moves both vertically direction less than 1 μ m, this linear pattern guiding mechanism and schematic diagram thereof.
Plane 3DOF parallel micro-manipulator platform be Canadian Saskatchewan university in development in 2002, this 3-RRR micro-displacement platform adopts 3 piezoelectric ceramic actuators of evenly arranging as driver, adopts the lever enlarger as movement branched chain.This platform can be realized 77.28 μ m and the translational motion of 71.02 μ m and rotatablely moving of 2.16mrad.When the piezoelectric ceramics driver that adopts precision to be higher than 0.01 μ m drove, the positioning accuracy of the end effector of microoperation platform was respectively 13.2nm, 3.4nm and 0.6 μ rad.
2004, a kind of six nanoscale parallel micro-manipulator of HexFlex plane formula platform that is used for fiber alignment was born in Massachusetts Institute Technology.This platform adopts the magneto-electric driver to drive, and in the working space of 100nm * 100nm * 100nm, the positioning accuracy of its end effector is below 5nm; When working space during greater than above-mentioned scope, the position error of end effector is not more than 0.2% of maximum functional stroke.
Summary of the invention
The objective of the invention is to consider the problems referred to above and a kind of high frequency sound, little stroke when solving processing ultraprecise micro-nano structure be provided, sometimes with the high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge of the problem of coupled motions.The present invention designs ingenious, and is convenient and practical.
Technical scheme of the present invention is: the high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge of the present invention; Include bridge-type flexible hinge, piezoelectric ceramics pull bar, piezoelectric ceramics, X axle diamond blade; Wherein utilization is provided with breach and can realizing under the effect of external force that the bridge-type flexible hinge that micrometric displacement moves be fixed on the workbench of lathe; The two ends of the two ends of piezoelectric ceramics and piezoelectric ceramics pull bar all are installed in the relative both sides of the Y direction of bridge-type flexible hinge; And an end that is provided with gib head of piezoelectric ceramics pull bar is stuck between the end and bridge-type flexible hinge of piezoelectric ceramics; And be fixed on the bridge-type flexible hinge through connector; X axle diamond blade is fixed on the movable end of the directions X of bridge-type flexible hinge; The movable end A of the directions X of bridge-type flexible hinge is fixed on an end of the directions X of bridge-type flexible hinge, and another stiff end of the directions X of bridge-type flexible hinge is fixed on the other end of the directions X of bridge-type flexible hinge, and the stiff end of bridge-type flexible hinge is fixed on the workbench of lathe.
Above-mentioned X axle diamond blade is fixed on the handle of a knife through the cutter fixed head, and handle of a knife is fixed on the bridge-type flexible hinge through connector.
The stiff end of above-mentioned bridge-type flexible hinge is fixed on the workbench of lathe through connector.
Above-mentioned piezoelectric ceramics is installed on the Y axle of bridge-type flexible hinge, and diamond blade is installed on the X axle.
An end that is provided with gib head and the gap between the bridge-type flexible hinge of above-mentioned piezoelectric ceramics pull bar are 0.5～3mm.
The set breach of above-mentioned bridge-type flexible hinge is the right angle breach.
The present invention owing to adopt utilizes that piezoelectric ceramics drives, flexible hinge is as the structure of the basic module of whole high frequency ultraprecise lathe for machining knife rest drives platform; The principle that the present invention utilizes bridge-type to be symmetrically distributed; Volume is little, do not have machinery friction, no gap, movement sensitive property height, do not have hysteresis, life heat less, need not lubricate; And utilize the resilience of flexible hinge, help to accelerate the opening speed of piezoelectric ceramics.Novel structure of the present invention can be realized high frequency sound, high acceleration, high-precision processing request.The present invention is a kind of novel structure, simple, realizes the convenient and practical high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge of high accuracy, high-amplification-factor, no coupling.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural representation of hinge of the present invention;
Fig. 3 is a blast installation diagram of the present invention;
Fig. 4 is the sketch map of Piezoelectric Ceramic flexible hinge of the present invention.
The specific embodiment
Embodiment:
Structural representation of the present invention is like Fig. 1,2,3, shown in 4; High frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge of the present invention; Include bridge-type flexible hinge 1, piezoelectric ceramics pull bar 5, piezoelectric ceramics 6, X axle diamond blade 7; Wherein utilization is provided with breach (C) and can realizing under the effect of external force that the bridge-type flexible hinge (1) that micrometric displacement moves be fixed on the workbench of lathe; The two ends of the two ends of piezoelectric ceramics 6 and piezoelectric ceramics pull bar 5 all are installed in the relative both sides of the Y direction of bridge-type flexible hinge 1; And an end that is provided with gib head 61 of piezoelectric ceramics pull bar (5) is stuck between the end and bridge-type flexible hinge 1 of piezoelectric ceramics 6; And be fixed on the bridge-type flexible hinge 1 through connector 2, X axle diamond blade 7 is fixed on the movable end A of the directions X of bridge-type flexible hinge 1, and the movable end A of the directions X of bridge-type flexible hinge 1 is fixed on an end of the directions X of bridge-type flexible hinge 1; Another stiff end B of the directions X of bridge-type flexible hinge 1 is fixed on the other end of the directions X of bridge-type flexible hinge 1, and the stiff end B of bridge-type flexible hinge 1 is fixed on the workbench of lathe.
In the present embodiment, for ease of installing, above-mentioned X axle diamond blade 7 is fixed on the handle of a knife 9 through cutter fixed head 8, and handle of a knife 9 is fixed on the bridge-type flexible hinge 1 through connector 4.The stiff end B of above-mentioned bridge-type flexible hinge 1 is fixed on the workbench of lathe through connector 3.
In the present embodiment, above-mentioned piezoelectric ceramics 6 is installed on the Y axle of bridge-type flexible hinge 1, and diamond blade 7 is installed on the X axle.
An end that is provided with gib head 51 and the clearance D between the bridge-type flexible hinge 2 of above-mentioned piezoelectric ceramics pull bar 5 are 0.5～3mm.In the present embodiment, an end that is provided with gib head 51 and the clearance D between the bridge-type flexible hinge 1 of above-mentioned piezoelectric ceramics pull bar 5 are 2mm.
In the present embodiment, above-mentioned bridge-type flexible hinge 1 set breach C is the right angle breach.
Operation principle of the present invention is following: platform of the present invention mainly is installed on the fine turning lathe; Micromotion platform of the present invention is to utilize piezoelectric ceramics 6 and driving governor, changes parameters such as voltage and current, and piezoelectric ceramics 6 of the present invention is under the operating frequency of 1KHZ; Utilize piezoelectric ceramics pull bar 5 pulling bridge-type flexible hinges 1; Bridge-type flexible hinge 1 is moved to central axis direction in Y direction simultaneously, cause its on X-direction simultaneously away from central shaft, the present invention can realize distortion through the flexibility of bridge-type flexible hinge; Reach when piezoelectric ceramics 6 when the Y axle moves, the knife rest of directions X can drive diamond blade 7 and realize motion.That realizes the bridge-type flexible hinge has the good symmetry and a characteristic of no coupling, and range is the high frequency sound of 80 μ m, the operation platform of high acceleration.The present invention is a kind of enlarger that the piezoelectric ceramics movement travel is lacked when high frequency sound; X axle diamond blade 7 by the piezoelectric ceramics of Y direction high frequency motion 6 through the bridge-type flexible hinge with the horizontal direction different angles; Realize that its multiplication factor reaches 2 times driving effect; The multiplication factor that piezoelectric ceramics drove is that 2 times displacement is delivered on the immovable support through the right angle flexible hinge; This cutting force when load of the physical dimension of right angle flexible hinge, flexibility and cutter has directly determined the driving force of piezoelectric ceramics, dimensional accuracy when also directly having determined Tool in Cutting and surface roughness.When piezoelectric ceramics extends, utilize the gib head 51 drive bridge-type flexible hinges of piezoelectric ceramics pull bar 5 to move to both sides, through changing the different angles of bridge-type flexible hinge, can realize the moving displacement of piezoelectric ceramics and the ratio of shift position, both sides.When non-installation knife rest limit fixedly the time, the high-speed mobile that the knife rest limit is equivalent to amplify 2 times of displacements is installed, realize that the lathe precision adds the high acceleration in man-hour, high-precision processing request.
The present invention makes drive source with the piezoelectric ceramics of high precision; Make crucial transmission mechanism and displacement amplifying mechanism with bridge-type flexible hinge and the moderate flexibility of right angle flexible hinge; Utilize the symmetry of bridge-type flexible hinge, when the Piezoelectric Ceramic displacement, make the piezoelectric ceramics pull bar drive flexible hinge and oppositely move; Cause the cutter on the knife rest can realize non-coupling high-speed cruising, realize high frequency sound, high acceleration, high-precision processing request.The present invention is a kind of novel structure, simple, realizes the convenient and practical high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge of high accuracy, high-amplification-factor, no coupling.
Claims (6)
1. high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge; It is characterized in that including bridge-type flexible hinge (1), piezoelectric ceramics pull bar (5), piezoelectric ceramics (6), X axle diamond blade (7); Wherein utilization is provided with breach (C) and can realizing under the effect of external force that the bridge-type flexible hinge (1) that micrometric displacement moves be fixed on the workbench of lathe; The two ends of the two ends of piezoelectric ceramics (6) and piezoelectric ceramics pull bar (5) all are installed in the relative both sides of the Y direction of bridge-type flexible hinge (1); And an end that is provided with gib head (61) of piezoelectric ceramics pull bar (5) is stuck between the end and bridge-type flexible hinge (1) of piezoelectric ceramics (6); And be fixed on the bridge-type flexible hinge (1) through connector (2); X axle diamond blade (7) is fixed on the movable end (A) of the directions X of bridge-type flexible hinge (1); The movable end (A) of the directions X of bridge-type flexible hinge (1) is fixed on an end of the directions X of bridge-type flexible hinge (1); Another stiff end (B) of the directions X of bridge-type flexible hinge (1) is fixed on the other end of the directions X of bridge-type flexible hinge (1), and the stiff end (B) of bridge-type flexible hinge (1) is fixed on the workbench of lathe.
2. the high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge according to claim 1; It is characterized in that above-mentioned X axle diamond blade (7) is fixed on the handle of a knife (9) through cutter fixed head (8), handle of a knife (9) is fixed on the bridge-type flexible hinge (1) through connector (4).
3. the high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge according to claim 1 is characterized in that the stiff end (B) of above-mentioned bridge-type flexible hinge (1) is fixed on the workbench of lathe through connector (3).
4. the high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge according to claim 1 is characterized in that above-mentioned piezoelectric ceramics (6) is installed on the Y axle of bridge-type flexible hinge (1), and diamond blade (7) is installed on the X axle.
5. according to each described high frequency ultraprecise lathe for machining knife rest drives platform of claim 1 to 4, it is characterized in that an end that is provided with gib head (51) of above-mentioned piezoelectric ceramics pull bar (5) and the gap (D) between the bridge-type flexible hinge (2) are 0.5～3mm based on the bridge-type flexible hinge.
6. the high frequency ultraprecise lathe for machining knife rest drives platform based on the bridge-type flexible hinge according to claim 5 is characterized in that the set breach (C) of above-mentioned bridge-type flexible hinge (1) is the right angle breach.
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| CN201210246958.XA CN102794664B (en) | 2012-07-17 | 2012-07-17 | Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform |
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| CN201210246958.XA CN102794664B (en) | 2012-07-17 | 2012-07-17 | Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN103531252A (en) * | 2013-10-22 | 2014-01-22 | 大连交通大学 | Micrometric displacement working table |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN110153768A (en) * | 2019-05-24 | 2019-08-23 | 山东大学 | A kind of sharp knife structure adjusting rigidity at remote knife end |
| CN110508996A (en) * | 2019-09-24 | 2019-11-29 | 吉林大学 | Timing control surface micro-structure array processing unit (plant) and method |
| CN112388370A (en) * | 2020-11-13 | 2021-02-23 | 山东大学日照智能制造研究院 | Piezoelectric ceramic driven large-stroke constant-force fast knife servo device |
| CN112448611A (en) * | 2020-11-13 | 2021-03-05 | 山东大学日照智能制造研究院 | Two-degree-of-freedom fast knife server driven by piezoelectric ceramics and driving method |
| CN114337363A (en) * | 2021-01-11 | 2022-04-12 | 西安交通大学 | Bridge type differential flexible displacement reducing mechanism |
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| US6294859B1 (en) * | 1997-09-10 | 2001-09-25 | Eads Deutschland Gmbh | Electrostrictive or piezoelectric actuator device with a stroke amplifying transmission mechanism |
| CN102380788A (en) * | 2011-11-08 | 2012-03-21 | 浙江师范大学 | Double-parallel-flexible-hinge-based tool rest driving platform of super-precision machining lathe |
| CN102394270A (en) * | 2011-09-14 | 2012-03-28 | 中国科学院国家天文台南京天文光学技术研究所 | Two-stage micro-displacement amplification mechanism |
| CN102528522A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Fast tool servo device with adjustable rigidity |
| CN202639966U (en) * | 2012-07-17 | 2013-01-02 | 广东工业大学 | High-frequency ultraprecise processing lathe tool rest driving platform based on bridge-type flexible hinge |
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2012
- 2012-07-17 CN CN201210246958.XA patent/CN102794664B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6294859B1 (en) * | 1997-09-10 | 2001-09-25 | Eads Deutschland Gmbh | Electrostrictive or piezoelectric actuator device with a stroke amplifying transmission mechanism |
| CN102394270A (en) * | 2011-09-14 | 2012-03-28 | 中国科学院国家天文台南京天文光学技术研究所 | Two-stage micro-displacement amplification mechanism |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN103318839B (en) * | 2013-03-01 | 2015-12-16 | 广东工业大学 | The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method |
| CN103531252A (en) * | 2013-10-22 | 2014-01-22 | 大连交通大学 | Micrometric displacement working table |
| CN103531252B (en) * | 2013-10-22 | 2015-06-03 | 大连交通大学 | Micrometric displacement working table |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN104110561B (en) * | 2014-06-25 | 2016-06-29 | 华南理工大学 | A kind of large-range plane three-freedom degree precision locating platform based on compliant mechanism |
| CN110153768A (en) * | 2019-05-24 | 2019-08-23 | 山东大学 | A kind of sharp knife structure adjusting rigidity at remote knife end |
| CN110508996A (en) * | 2019-09-24 | 2019-11-29 | 吉林大学 | Timing control surface micro-structure array processing unit (plant) and method |
| CN112388370A (en) * | 2020-11-13 | 2021-02-23 | 山东大学日照智能制造研究院 | Piezoelectric ceramic driven large-stroke constant-force fast knife servo device |
| CN112448611A (en) * | 2020-11-13 | 2021-03-05 | 山东大学日照智能制造研究院 | Two-degree-of-freedom fast knife server driven by piezoelectric ceramics and driving method |
| CN114337363A (en) * | 2021-01-11 | 2022-04-12 | 西安交通大学 | Bridge type differential flexible displacement reducing mechanism |
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