CN102009358B - Annular elastic pair-containing three-degrees-of-freedom micro operating table - Google Patents

Annular elastic pair-containing three-degrees-of-freedom micro operating table Download PDF

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Publication number
CN102009358B
CN102009358B CN2010105328353A CN201010532835A CN102009358B CN 102009358 B CN102009358 B CN 102009358B CN 2010105328353 A CN2010105328353 A CN 2010105328353A CN 201010532835 A CN201010532835 A CN 201010532835A CN 102009358 B CN102009358 B CN 102009358B
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China
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pair
micro
platform
annular elastic
operating table
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CN2010105328353A
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CN102009358A (en
Inventor
张彦斐
宫金良
魏修亭
肖霄
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Shandong University of Technology
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Shandong University of Technology
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Abstract

The invention provides an annular elastic pair-containing three-degrees-of-freedom micro operating table, which comprises a fixed platform, a movable platform, micro-displacement driving devices and three branched chains connected between the fixed platform and the movable platform, and is characterized in that: three micro-displacement driving devices are arranged on the fixed platform; each branched chain comprises an elastic sliding pair and an annular elastic pair, wherein the side wall of the annular elastic pair is fixedly connected with the movable platform and one side of the elastic sliding pair respectively; two connecting parts are positioned on the same plane passing through a centre line of the annular elastic pair; and the middle part of the other side of the elastic sliding pair is fixedly connected with a driving end of each micro-displacement driving device. By introducing the annular elastic pair to construct a parallel micro operating table, due to the characteristic of short branched chains, the accumulative error is small, the operating table has higher bearing capacity and higher rigidity, and the movable platform can output two-dimensional translation and one-dimensional rotation around a normal vertical to a translational plane.

Description

Contain the secondary three-freedom microoperation platform of cyclic spring
Technical field
The invention belongs to the manufacturing technology field, specifically relate to a kind of secondary three-freedom microoperation platform of cyclic spring that contains.
Background technology
Human research's scientific domain has been deep into the microscopic fields that we can not directly experience at present; Like fields such as medical science, biology, optics, material and engineerings; Its target is more and more littler; Accomplishing this type work must be by means of special instrument and means, and therefore, the research of micromotion platform becomes the key technology of microscopic fields.Adopt the parallel micromotion platform of flexible hinge to have not have friction, no gap, response soon, characteristics such as compact conformation, so be widely used in the trickle field operation such as processing, assembling of chromosome cutting, chip manufacturing, micro electronmechanical product.
Developed a complete parallelly connected jiggle robot of being with flexible hinge of 6DOF like Hudgens of department of mechanical engineering of U.S. Texas university and Tesar etc., Japanese Tamio TANIKAWA etc. has developed the six-freedom micro displacement parallel robot.Domestic BJ University of Aeronautics & Astronautics has developed the six degree of freedom connection in series-parallel micro-manipulating robot of two-stage decoupling zero and the micro-manipulating robot of freedom degree parallel connection Delta mechanism, and Harbin Institute of Technology has successively developed 6-PSS and 6-SPS six-freedom parallel Stewart jiggle robot etc.At application number is 02117851.8; 200510125990.2; 200610151113.7; 00100197.3; 00100198.1 patent document in " reconfigurable modularization 3~6DOF structure decoupling parallel jiggle robot " disclosed; " a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot "; " a kind of three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism "; " four-freedom four-shaft structure decoupling parallel jiggle robot "; " vernier robot with decoupled parallel three freedoms and three-axle structure ".Because multiple degrees of freedom microoperation platform or jiggle robot structure are comparatively complicated, and are difficult to overcome the motion coupled problem between each free degree, therefore need the occasion of lower-mobility at some, the above-mentioned multiple degrees of freedom detent mechanism of suitable employing.The present invention introduces the secondary structure of cyclic spring parallel micro-manipulator platform; Structurally have the short characteristics of side chain; Therefore cumulative errors are little; And have higher bearing capacity and bigger rigidity, motion platform can be exported two-dimensional translation and wind the one dimension rotation perpendicular to the translation plane normal, is suitable for the micromotion High Accuracy Control in the plane.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structure, cumulative errors are little, contain the secondary three-freedom microoperation platform of cyclic spring.Its technical scheme is:
A kind of secondary three-freedom microoperation platform of cyclic spring that contains; Comprise fixed platform, motion platform, micro-displacement driving device and be connected in fixed platform and motion platform between three side chains; It is characterized in that: micro-displacement driving device is three that are installed on the fixed platform; Include the secondary and cyclic spring pair of a resilient movement in every side chain; Wherein the secondary sidewall of cyclic spring is fixedly connected with the secondary side of resilient movement with motion platform respectively, and two junctions were positioned on the same plane of cyclic spring sub-center line, and the middle part of the opposite side of resilient movement pair is fixedly connected with the drive end of micro-displacement driving device.
The described secondary three-freedom microoperation platform of cyclic spring that contains, three side chains be distributed on motion platform around.
The present invention compared with prior art, its advantage is: the secondary tectonic movement side chain of cyclic spring is adopted in (1), simplifies and shortened the motion link, has significantly reduced cumulative errors, has advantages such as high accuracy, dynamic characteristic are good; Article (2) three, contain rigidity and bearing capacity that the secondary movement branched chain of cyclic spring can effectively improve micromotion platform, satisfy the requirement of Precision Machining and location under the high-bearing capacity.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention.
Among the figure: 1, motion platform 2, cyclic spring pair 3, resilient movement pair 4, micro-displacement driving device 5, fixed platform
The specific embodiment
Micro-displacement driving device 4 is for being installed in three on the fixed platform 5; Be connected in three side chains between fixed platform 5 and the motion platform 1 be distributed on motion platform 1 around; Include the secondary 3 and cyclic springs secondary 2 of a resilient movement in every side chain; Wherein the sidewall of cyclic spring secondary 2 is fixedly connected with the side of motion platform 1 with resilient movement secondary 3 respectively; And two junctions were positioned on the same plane of secondary 2 center lines of cyclic spring, and the middle part of the opposite side of resilient movement secondary 3 is fixedly connected with the drive end of micro-displacement driving device 4.

Claims (1)

1. one kind contains the secondary three-freedom microoperation platform of cyclic spring; Comprise fixed platform (5), motion platform (1), micro-displacement driving device (4) and be connected in fixed platform (5) and motion platform (1) between three side chains; It is characterized in that: three side chains be distributed on motion platform (1) around; Micro-displacement driving device (4) is for being installed in three on the fixed platform (5); Include a resilient movement pair (3) and a cyclic spring pair (2) in every side chain; Wherein the sidewall of cyclic spring secondary (2) is fixedly connected with the side of motion platform (1) with resilient movement secondary (3) respectively, and two junctions were positioned on the same plane of cyclic spring pair (2) center line, and the middle part of the opposite side of resilient movement pair (3) is fixedly connected with the drive end of micro-displacement driving device (4).
CN2010105328353A 2010-11-05 2010-11-05 Annular elastic pair-containing three-degrees-of-freedom micro operating table Expired - Fee Related CN102009358B (en)

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CN102519355B (en) * 2011-11-25 2014-07-09 中国科学院光电技术研究所 One-dimensional micro-translation mechanism
CN103021472B (en) * 2012-12-03 2014-09-17 天津大学 Plane parallel type three-freedom-degree precise positioning work table
CN103586863B (en) * 2013-11-18 2015-07-15 山东理工大学 Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure
CN103722563A (en) * 2013-12-24 2014-04-16 北京工业大学 Planar two-degree-of-freedom flexible parallel mechanical arm
CN104493825B (en) * 2014-10-29 2016-06-15 北京理工大学 Micro-nano manipulation robot works in coordination with operation device and the operational approach for microinjection thereof
CN105196279B (en) * 2015-11-11 2020-07-03 山东理工大学 Three-translation decoupling parallel robot with ultra-short branched chain
CN105196280B (en) * 2015-11-11 2020-04-14 山东理工大学 Redundant driving type three-translation micro-operation robot
CN105945904B (en) * 2016-05-09 2018-08-24 北京空间飞行器总体设计部 A kind of 3-dimensional freedom platform based on compliant mechanism
CN112720420B (en) * 2021-01-12 2022-03-25 山东理工大学 Double-guide-rail type planar robot with parallelogram
CN112720421B (en) * 2021-01-12 2022-03-25 山东理工大学 Double-guide-rail type planar robot with telescopic rod

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CN1092097C (en) * 2000-01-17 2002-10-09 河北工业大学 Vernier robot with decoupled parallel three freedoms and three-axle structure
CN1233512C (en) * 2003-06-06 2005-12-28 河北工业大学 Parallel decoupling mechanism with 3 degree of freedom
JP2005040919A (en) * 2003-07-24 2005-02-17 Sony Corp Motion base
CN101157216A (en) * 2007-09-22 2008-04-09 燕山大学 Three-freedom microoperation robot

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