CN103586863B - Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure - Google Patents
Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure Download PDFInfo
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- CN103586863B CN103586863B CN201310576085.3A CN201310576085A CN103586863B CN 103586863 B CN103586863 B CN 103586863B CN 201310576085 A CN201310576085 A CN 201310576085A CN 103586863 B CN103586863 B CN 103586863B
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Abstract
The invention provides a planar three-degree-of-freedom parallel micro-positioning platform of a symmetric structure. The planar three-degree-of-freedom parallel micro-positioning platform comprises a movable worktable, a fixed platform body and three full-flexible supporting chains connected between the movable worktable and the fixed platform body. The planar three-degree-of-freedom parallel micro-positioning platform is characterized in that the three full-flexible supporting chains are symmetric with the geometrical axis of the movable worktable as the center, each full-flexible supporting chain comprises an elastic moving pair and an elastic folded beam shaped like a Chinese character 'gong', the side face, shaped like the Chinese character 'gong', of each elastic folded beam and the top face of the movable worktable are in the same plane, one end of each elastic folded beam shaped like the Chinese character 'gong' is connected with the movable worktable, the other end of each elastic folded beam shaped like the Chinese character 'gong' is connected with one side face of the corresponding elastic moving pair, the opposite side faces of each elastic moving pair are fixedly connected with the fixed platform body through a piezoelectric ceramic actuator, and the geometrical axes of the three piezoelectric ceramic actuators are in the same plane and do not intersect at one point. The planar three-degree-of-freedom parallel micro-positioning platform of the symmetric structure is made of a piece of a material, and the shortest kinematic chain is adopted, so that the platform has the advantages of being free of assembly errors, compact in structure, high in kinematic accuracy, large in bearing capacity and the like.
Description
Technical field
The invention belongs to manufacturing technology field, specifically relate to a kind of symmetrical configuration type planar three freedom parallel micromotion platform.
Background technology
Along with the development of micro-/ nano technology, micromotion mechanism is as the important component part of micro OS, have broad application prospects in fields such as micro-wound surgical operation, precision optical machinery engineering, fiber alignment, bioengineering, and parallel microrobotics mechanism has nothing friction, gapless, error without accumulating, responding the advantages such as fast, bearing capacity is large compared to serial mechanism, be thus widely used.
The companies such as Britain Queensgate and German PI have produced the product of the nanoscale microoperation mechanism based on Piezoelectric Ceramic all, are mainly used in the occasions such as micro Process, micro assemby, fiber laser arrays.P.Kallio etc. have developed the three-freedom microoperation parallel robot of Piezoelectric Ceramic; Hara and Henimi have studied planar three freedom and six-freedom parallel jiggle robot; Lee is studied the freedom degree parallel connection micromotion mechanisms realizing a movement and two rotations.Domestic BJ University of Aeronautics & Astronautics have developed the micro-manipulating robot based on freedom degree parallel connection Delta mechanism; The colleges and universities such as Jiaotong University Of East China, Beijing Jiaotong University are all studied plane 3-RRR flexible coding system; Beijing University of Technology have developed the 3-RRS flexible parallel mechanism containing distribution flexibility hinge; Application number be 201210216718.5 patent document disclose a kind of spatially decoupled three-dimensional motion parallel micro-motion mechanism.
Although there are many scholar's research freedom degree parallel connection micromotion mechanisms both at home and abroad, but these achievements in research and patented technology are limited to the requirement meeting certain movement precision and space mostly, and often not using the important indicator of the rotational angle of motion workbench end as measurement micromotion platform space.At present, due to most of parallel microrobotics mechanism be by by the flexibility of rigidity parallel institution to meet microoperation requirement, so usually make the structure of parallel microrobotics mechanism comparatively complicated, be difficult to processing.Obviously, ensureing under the prerequisite realizing micromotion platform end movement characteristic and be convenient to processing, change the geometry of planar three freedom parallel micromotion platform body, make the motion workbench end higher kinematic accuracy of acquisition and larger space have important researching value.
Summary of the invention
The object of this invention is to provide a kind of symmetrical configuration type planar three freedom parallel micromotion platform that can overcome above-mentioned defect, there is high kinematic accuracy and high bearing capacity.Its technical scheme is:
A kind of symmetrical configuration type planar three freedom parallel micromotion platform, comprise motion workbench, fixed platform and three the Grazing condition side chains be connected between motion workbench and fixed platform, it is characterized in that: three Grazing condition side chains are symmetrical about the geometrical axis of motion workbench, every bar Grazing condition side chain includes a resilient movement pair and " bow " font elastic foldable beam, wherein " bow " font elastic foldable beam in the side of " bow " font and on motion workbench end face coplanar, one end of " bow " font elastic foldable beam is connected with motion workbench, the other end is connected with a side of resilient movement pair, the opposite flank of resilient movement pair is fixed in fixed platform by piezoelectric ceramic actuator, the geometrical axis of three piezoelectric ceramic actuators is coplanar and do not meet at a bit.
The present invention compared with prior art, its advantage is: adopt Grazing condition side chain as driving-chain, affixed and between motion workbench and fixed platform respectively, the shortest this Kinematic Chain Design ensure that the kinematic accuracy of micromotion platform to greatest extent, and the length that simultaneously can adjust " bow " font elastic foldable beam changes rigidity and the precision of motion workbench.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
In figure: 1, piezoelectric ceramic actuator 2, resilient movement pair 3, " bow " font elastic foldable beam 4, motion workbench 5, fixed platform.
Detailed description of the invention
Article three, Grazing condition side chain is symmetrical about the geometrical axis of motion workbench, every bar Grazing condition side chain includes a resilient movement pair and " bow " font elastic foldable beam, wherein " bow " font elastic foldable beam in the side of " bow " font and on motion workbench end face coplanar, one end of " bow " font elastic foldable beam is connected with motion workbench, the other end is connected with a side of resilient movement pair, the opposite flank of resilient movement pair is fixed in fixed platform by piezoelectric ceramic actuator, the geometrical axis of three piezoelectric ceramic actuators is coplanar and do not meet at a bit.
Claims (1)
1. a symmetrical configuration type planar three freedom parallel micromotion platform, comprise motion workbench (4), fixed platform (5) and three the Grazing condition side chains be connected between motion workbench (4) and fixed platform (5), it is characterized in that: three Grazing condition side chains are symmetrical about the geometrical axis of motion workbench (4), every bar Grazing condition side chain includes a resilient movement pair (2) and " bow " font elastic foldable beam (3), wherein " bow " font elastic foldable beam (3) in the side of " bow " font and motion workbench (4) to go up end face coplanar, one end of " bow " font elastic foldable beam (3) is connected with motion workbench (4), the other end is connected with a side of resilient movement pair (2), the opposite flank of resilient movement pair (2) is fixed in fixed platform (5) by piezoelectric ceramic actuator (1), the geometrical axis of three piezoelectric ceramic actuators (1) is coplanar and do not meet at a bit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310576085.3A CN103586863B (en) | 2013-11-18 | 2013-11-18 | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310576085.3A CN103586863B (en) | 2013-11-18 | 2013-11-18 | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103586863A CN103586863A (en) | 2014-02-19 |
| CN103586863B true CN103586863B (en) | 2015-07-15 |
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| CN201310576085.3A Expired - Fee Related CN103586863B (en) | 2013-11-18 | 2013-11-18 | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842343B (en) * | 2015-05-25 | 2020-08-07 | 山东理工大学 | Direct-drive type one-rotation three-translation micro-operation robot |
| CN105945904B (en) * | 2016-05-09 | 2018-08-24 | 北京空间飞行器总体设计部 | A kind of 3-dimensional freedom platform based on compliant mechanism |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102009358A (en) * | 2010-11-05 | 2011-04-13 | 山东理工大学 | Annular elastic pair-containing three-degrees-of-freedom micro operating table |
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102873683A (en) * | 2012-09-28 | 2013-01-16 | 北京工业大学 | Experimental apparatus with three flexible hinges and planar parallel mechanism |
| CN103030103A (en) * | 2012-12-10 | 2013-04-10 | 山东理工大学 | 3-PRR micro-displacement platform based on symmetrical variable cross-section compliant mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100471749B1 (en) * | 2002-11-06 | 2005-03-17 | 재단법인서울대학교산학협력재단 | Micro-Motion Machine and Micro-Element Fabricating Machine Using 3 Degree of Freedom Parallel Mechanism |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102009358A (en) * | 2010-11-05 | 2011-04-13 | 山东理工大学 | Annular elastic pair-containing three-degrees-of-freedom micro operating table |
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102873683A (en) * | 2012-09-28 | 2013-01-16 | 北京工业大学 | Experimental apparatus with three flexible hinges and planar parallel mechanism |
| CN103030103A (en) * | 2012-12-10 | 2013-04-10 | 山东理工大学 | 3-PRR micro-displacement platform based on symmetrical variable cross-section compliant mechanism |
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| CN103586863A (en) | 2014-02-19 |
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Granted publication date: 20150715 Termination date: 20151118 |