CN113125094A - Six-degree-of-freedom micro-vibration device based on flexible mechanism - Google Patents
Six-degree-of-freedom micro-vibration device based on flexible mechanism Download PDFInfo
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- CN113125094A CN113125094A CN201911413120.3A CN201911413120A CN113125094A CN 113125094 A CN113125094 A CN 113125094A CN 201911413120 A CN201911413120 A CN 201911413120A CN 113125094 A CN113125094 A CN 113125094A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/022—Vibration control arrangements, e.g. for generating random vibrations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/06—Multidirectional test stands
Abstract
The embodiment of the invention discloses a six-degree-of-freedom micro-vibration device based on a flexible mechanism. The invention relates to a six-degree-of-freedom micro-vibration device, which is characterized by comprising the following components: the base, a plurality of bases, move the platform, a plurality of first motion branched chains, a plurality of second motion branched chains and a plurality of micro motion driver, the base, a plurality of bases, move the platform, a plurality of first motion branched chains and a plurality of second motion branched chain structure as an organic whole, a plurality of first motion branched chains are vertical to be set up, a plurality of second motion branched chains are fixed in respectively on a plurality of bases, a plurality of second motion branched chain level sets up, a plurality of first motion branched chains and a plurality of second motion branched chains are connected with moving the platform respectively, a plurality of micro motion drivers are used for driving and move the platform and produce the micro motion. The six-degree-of-freedom micro-vibration device based on the flexible mechanism reduces the coupling of input and output, simultaneously keeps the symmetry of the whole structure and improves the motion flexibility.
Description
Technical Field
The invention relates to the technical field of vibration motion simulation, in particular to a six-degree-of-freedom micro-vibration device based on a flexible mechanism.
Background
The six-freedom vibration and motion simulator is used widely in detecting and calibrating noble apparatus and precise instrument. The invention provides a novel structure of a micro-vibration and micro-motion simulator, which realizes the decoupling of horizontal motion and other motions.
The six-degree-of-freedom micro-motion device generally consists of six flexible branched chains, the branched chains are mostly arranged in a Stewart configuration, the micro-motion device arranged in the Stewart configuration has good symmetry, but the motion input and output have the characteristic of strong coupling, and the motion control is complex.
In order to reduce the coupling degree of the micro-motion platform, a structure with 2-2-2 orthogonal branched chains is adopted, but the structural form reduces the symmetry of the whole structure, and the piezoelectric drive can only generate unidirectional drive, so that the flexibility of motion is reduced.
The Chinese invention patent with the publication number of 102284868A provides a six-degree-of-freedom spatial series-parallel operation platform, which comprises an upper moving platform, a Z-direction self-rotating platform, a Y-direction sliding plate, an X-direction sliding plate, a rack, a branched chain I, a branched chain II and a branched chain III; the branched chain I, the branched chain II and the branched chain III are connected in parallel between the upper moving platform and the Z-direction self-rotating platform; the upper end of a rod I of the branched chain I is connected with the upper movable platform through a ball pair I, and the lower end of the rod I and the Z-direction self-rotation platform form a moving pair I; the upper end of a second rod of the branched chain II is connected with the upper movable platform through a second ball pair, the lower end of the second rod of the branched chain II is connected with a third rod through a second moving pair, and the other end of the third rod is connected with the Z-direction self-rotating platform through a first rotating pair; the upper end of a rod four of the branched chain three is connected with the upper movable platform through a ball pair three, the other end of the rod four is connected with a rod five through a movable pair three, and the rod five is connected with the Z-direction autorotation platform through a ball pair four; the first branched chain and the second branched chain form a plane loop; furthermore, after the Y-direction sliding plate is connected with the Z-direction self-rotation platform by the second revolute pair, the Y-direction sliding plate and the Y-direction guide rail fixed on the X-direction sliding plate form a fourth moving pair, and the X-direction sliding plate and the X-direction guide rail fixed on the machine frame form a fifth moving pair. But the three branches at the back are the load of the three branches at the bottom of the front, and the structure is complex and not compact enough.
Disclosure of Invention
The invention aims to provide a six-degree-of-freedom micro-vibration device based on a flexible mechanism, wherein a plurality of first motion branch chains drive a movable platform to move in the vertical direction, rotate in a pitching manner and swing left and right, a plurality of second motion branch chains drive the movable platform to generate front and back movement, left and right movement on a horizontal plane and rotation on the horizontal plane, and through-plane movement and decoupling of other movements, the coupling of input and output is reduced, the symmetry of the whole structure is kept, and the motion flexibility is improved.
The purpose of the invention is realized by the following technical scheme: a six-degree-of-freedom micro-vibration device based on a flexible mechanism comprises a base, a movable platform, a plurality of bases, a plurality of first movement branch chains, a plurality of second movement branch chains and a plurality of micro-movement drivers; the base is arranged on the base; the quantity of the base is equal to that of the second moving branched chains, and the base and the second moving branched chains are in one-to-one correspondence; the plurality of second moving branch chains are arranged in the same plane, the plurality of second moving branch chains are horizontally arranged and are rotationally symmetrical around the center of the moving platform, one end of each second moving branch chain is fixed on the plurality of bases, and the other end of each second moving branch chain is connected with the side face of the moving platform; the area of a graph formed by intersecting axes of the second moving branched chains is larger than 0; the micro-motion driver matched with the second motion branched chain is used for driving the second motion branched chain to drive the movable platform to translate or rotate on a horizontal plane; the first moving branch chains are vertically arranged on the base, and the first moving branch chains are rotationally symmetrical around the center of the moving platform; the first motion branch chains are respectively connected with the lower surface of the movable platform, and the micro-motion driver matched with the first motion branch chains is used for driving the first motion branch chains to drive the movable platform to move, rotate in a pitching mode or swing in the vertical direction.
Through the technical scheme, the micro-motion driver drives the movable platform to generate six-degree-of-freedom vibration motion in space through the plurality of first motion branched chains and the plurality of second motion branched chains; the first motion branched chains and the second motion branched chains are rotationally symmetrical around the center of the platform, so that the whole structure is symmetrical, the symmetry is improved, and the motion flexibility is improved.
The invention is further provided that the base, the movable platform, the plurality of bases, the plurality of first moving branched chains and the plurality of second moving branched chains are of an integrated structure.
Through the technical scheme, the base, the bases, the movable platform, the first movable branched chains and the second movable branched chains are of an integrated structure, the components of the vibration device are arranged without gaps, and high-precision movement of the movable platform is achieved.
The invention is further configured such that the first and second moving branch chains comprise a first elastic ball hinge, a second elastic ball hinge, an elastic moving hinge, a rigid link, and two uprights;
the elastic movable hinge is positioned between the two upright posts, one end of the first elastic ball hinge is connected with one side of the elastic movable hinge, which is far away from the upright posts, and the other end of the first elastic ball hinge is connected with the rigid connecting rod; the first elastic ball hinge and the second elastic ball hinge are used for transmitting motion.
Through the technical scheme, each motion branched chain comprises the first elastic ball hinge, the second elastic ball hinge, the elastic moving hinge, the rigid connecting rod and the two stand columns are connected with each part of the motion branched chain, and the micro-motion driver is used for driving the motion platform to move through the elastic deformation of the first elastic ball hinge, the second elastic ball hinge and the elastic moving hinge.
The invention is further arranged that the elastic movable hinge comprises a connecting part and two deformation parts, the thickness of the two deformation parts is less than that of the connecting part, and the two deformation parts are positioned at two sides of the connecting part; the connecting portion are connected with the stand column through the two deformation portions respectively, one side, close to the movable platform, of the connecting portion is connected with the first elastic ball hinge, and one side, far away from the movable platform, of the connecting portion is connected with the micro-motion driver.
Through the technical scheme, the device has the characteristics of no friction and no clearance by transmitting the movement through the elastic deformation of the two deformation parts.
The invention is further arranged in that one end of the upright post of the first moving branched chain, which is far away from the moving platform, is connected with the upper surface of the base, one end of a micro-moving driver matched with the first moving branched chain is connected with the upper surface of the base, and the other end of the micro-moving driver is connected with one side, which is far away from the moving platform, of the connecting part of the first moving branched chain.
The invention is further arranged that one end of the upright post of the second motion branched chain, which is far away from the movable platform, is connected with the base, one end of the micro-motion driver matched with the second motion branched chain is connected with the base, and the other end of the micro-motion driver is connected with one side, which is far away from the movable platform, of the connecting part of the second motion branched chain.
The invention is further provided with a clamping hole on the movable platform, and the clamping hole is used for clamping equipment or a precision instrument
Through above-mentioned technical scheme, but through joint hole joint needs measuring equipment or precision instrument, improved the convenience of using.
The invention is further provided that the number of the bases is more than or equal to 3, and the bases and the second moving branched chains are equal in number and correspond to each other one by one; the number of first moving branches is greater than or equal to 3.
Through the technical scheme, the number of the three first moving branch chains and the number of the three second moving branch chains are the minimum number for realizing the vibrating device, and the vibrating device is low in moving coupling, simple in algorithm and compact in structure by using at least three first moving branch chains and at least three second moving branch chains.
Compared with the prior art, the invention has the following beneficial effects:
(1) the vibration device has the advantages of low motion coupling, simple algorithm and compact structure by adopting at least three first motion branched chains and at least three second motion branched chains, adopts the elastic deformation of the flexible joint to transfer motion, has no gap and can realize ultrahigh precision;
(2) the base, the bases, the movable platform, the first movable branched chains and the second movable branched chains are of an integrated structure, all components of the vibration device are guaranteed to be arranged without gaps, high-precision movement of the movable platform is achieved, the same branched chain structure form is adopted, and the structure is simple;
(3) the moving branched chain comprises: the first elastic ball hinge, the second elastic ball hinge and the elastic movable hinge transmit motion through elastic deformation of the three hinges to realize frictionless and gapless motion of the movable platform, the branched chains are rotationally and symmetrically arranged, the structure is compact, all the branched chains directly drive the platform, and indirect load is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic axial structure diagram of a six-degree-of-freedom micro-vibration device in embodiment 1 of the present invention;
FIG. 2 is a schematic axial view of a six-DOF micro-vibration device according to embodiment 1 of the present invention;
FIG. 3 is a schematic top view of a six-DOF micro-vibration device in accordance with embodiment 1 of the present invention;
fig. 4 is a schematic view of a moving branch-moving platform structure of a six-degree-of-freedom micro-vibration device in embodiment 1 of the present invention;
FIG. 5 is a schematic diagram of a kinematic branched chain structure of a six-DOF micro-vibration device in embodiment 1 of the present invention;
reference numerals:
1. a base; 2. a base; 3. a movable platform; 4. a first moving branch; 5. a second moving branch; 6. a micro-motion driver; 7. a first elastic ball hinge; 8. a second elastic ball hinge; 9. an elastically movable hinge; 10. a rigid link; 11. a column; 12. a connecting portion; 13. a deformation section; 14. a clamping hole.
Detailed Description
The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. The present invention will be described in detail with reference to the following specific examples:
in the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like are used in the indicated orientations and positional relationships based on the drawings for convenience in describing and simplifying the description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
Example 1
As shown in fig. 1 and 2, the six-degree-of-freedom micro-vibration device based on the flexible mechanism of the present embodiment includes: the device comprises a base 1, a plurality of bases 2, a movable platform 3, a plurality of first movable branched chains 4, a plurality of second movable branched chains 5 and a plurality of micro-motion drivers 6, wherein the plurality of bases 2 are arranged on the base 1, the plurality of bases 2, the movable platform 3, the plurality of first movable branched chains 4 and the plurality of second movable branched chains 5 are of an integrated structure, the plurality of first movable branched chains 4 are fixed on the base 1, the plurality of first movable branched chains 4 are vertically arranged, the plurality of first movable branched chains 4 are rotationally symmetric around the center of the movable platform 3, the plurality of second movable branched chains 5 are respectively fixed on the plurality of bases 2, the plurality of second movable branched chains 5 are horizontally arranged, the plurality of first movable branched chains 4 are rotationally symmetric around the center of the movable platform 3, the plurality of second movable branched chains 5 are in the same plane, the axes of the plurality of second movable branched chains 5 are not relative to the same point, the plurality of first movable branched chains 4 and the plurality of second movable branched chains 5 are respectively connected with the movable platform 3, the plurality of micro-motion drivers 6 are respectively connected with the plurality of first motion branched chains 4 and the plurality of second motion branched chains 5, the plurality of micro-motion drivers 6 are used for driving the movable platform 3 to move in the vertical direction, rotate in the pitching direction and swing left and right through the plurality of first motion branched chains 4, and the plurality of micro-motion drivers 6 are used for driving the movable platform 3 to move back and forth on the horizontal plane, move left and right and rotate on the horizontal plane through the plurality of second motion branched chains 5.
In this embodiment, the base 2 is a plate-shaped, horizontally disposed, the base 2 is a column, and the backside of the base 2 is provided with a rib plate base 1, a plurality of bases 2, a movable platform 3, a plurality of first moving branches 4, and a plurality of second moving branches 5, which are integrated, and are made of a spring steel material and printed by 3D. The base is provided with a plurality of bases 2, a plurality of first moving branch chains 4 and a plurality of second moving branch chains 5, the bases 2, the first moving branch chains 4 and the second moving branch chains 5 are all three and are rotationally symmetrical around the center of the moving platform 3, the three first moving branch chains 4 are vertically positioned on the base 1, the top ends of the first moving branch chains 4 are connected with the bottom surface of the moving platform 3, and the connecting line of the axes of the three first moving branch chains 4 is a regular triangle; the three second moving branch chains 5 are respectively positioned on the three bases 2, the three second moving branch chains 5 are positioned in the same plane, the front ends of the three second moving branch chains 5 are connected with the side wall of the movable platform 3, and a closed figure formed by surrounding the axis of the three second moving branch chains 5 in the direction is a regular triangle. The micro-motion drivers 6 are piezoelectric drivers, the number of the micro-motion drivers 6 is six, the three micro-motion drivers 6 are respectively arranged between the base 1 and the three first motion branch chains 4, the other three micro-motion drivers 6 are respectively arranged between the base 2 and the three second motion branch chains 5, and before use, the micro-motion drivers 6 are pre-tightened.
Through the above, it is found that the base 1, the plurality of bases 2, the movable platform 3, the plurality of first moving branched chains 4 and the plurality of second moving branched chains 5 of the six-degree-of-freedom micro-vibration device of the present invention are integrated, so that the gapless arrangement of each part can be ensured, and the movable platform 3 can realize high-precision motion; by electrifying the micro-motion driver 6, the micro-motion driver 6 can be subjected to electric deformation to extrude the first motion branched chain 4 and the second motion branched chain 5, so that the movable platform 3 is controlled to generate vibration motion with six degrees of freedom in space, namely, the movable platform 3 can be slightly moved in the vertical direction through the first motion branched chain 4 and slightly rotated in the horizontal direction, and the movable platform 3 can be slightly moved in the horizontal direction and slightly rotated in the vertical direction through the second motion branched chain 5; and the plurality of first moving branch chains 4 and the plurality of second moving branch chains 5 are rotationally symmetrical around the center of the platform 3, so that the whole structure is symmetrically arranged, the symmetry is improved, and the flexibility of movement is improved.
The number of the first mobile branches 4 and the second mobile branches 5 is equal, and the number of the first mobile branches 4 and the second mobile branches 5 is at least three. In particular, the three first moving branches 4 and the three second moving branches 5, which correspond to the X, Y, Z axis of the three-dimensional space, facilitate the control of the plurality of micro-motion actuators 6 in simulating the motion.
As shown in fig. 4 and 5, the first moving branch 4 and the second moving branch 5 include: first elastic ball hinge 7, second elastic ball hinge 8, elastic movable hinge 9, rigid connecting rod 10 and two columns 11, two columns 11 are arranged on base 2 or base 1, elastic movable hinge 9 is arranged on two columns 11, one end of first elastic ball hinge 7 is connected with elastic movable hinge 9, the other end is connected with rigid connecting rod 10, first elastic ball hinge 7 is used for transmitting motion, second elastic ball hinge 8 is arranged on rigid connecting rod 10 and is located at the end far away from first elastic ball hinge 7, and second elastic ball hinge 8 is connected with movable platform 3, second elastic ball hinge is used for transmitting motion, micro-motion driver 6 is respectively arranged between base 2 and elastic movable hinge 9, between base 1 and elastic movable hinge 9.
In this embodiment, the first elastic ball hinge 7 and the second elastic ball hinge 8 are identical in structure, and are in the shape of an opposite cylinder with two slightly larger ends and a slightly smaller middle, and the two slightly larger ends are connected, the first elastic ball hinge 7 is located between the rigid connecting rod 10 and the elastic movable hinge 9, and the second elastic ball hinge 8 is located between the rigid connecting rod 10 and the movable platform 3, so that the elastic ball hinge can receive deformation stress when the movable platform 3 rotates, and the durability of the vibrating device is improved. The other end of the first elastic ball hinge 7 is arranged on the elastic movable hinge 9 and is positioned on one side far away from the rigid connecting rod 10, the elastic movable hinge 9 is perpendicular to the rigid connecting rod 10, the two upright columns 11 are arranged at two ends of the elastic movable hinge 9 and are positioned on one side far away from the rigid connecting rod 10, the other ends of the two upright columns 11 are connected to the base 2 or the base 1, the three micro-motion drivers 6 are arranged between the base 2 and the elastic movable hinge 9, and the other three micro-motion drivers 6 are arranged between the base 1 and the elastic movable hinge 9.
As shown in fig. 5, the elastically moving hinge 9 includes: connecting portion 12 and two deformation portion 13, the thickness of two deformation portions 13 is less than the thickness of connecting portion 12, and two deformation portions 13 are located connecting portion 12 both sides, and bilateral symmetry sets up, and two deformation portions 13 are connected with two stands 11 respectively, and first elasticity ball hinge 7 sets up on connecting portion 12, and micro-motion drive 6 and connecting portion 12 butt, two deformation portions 13 are used for the transmission to move the motion. Specifically, in this embodiment, the connecting portion 12 is a block, the deformation portion 13 is a sheet, one end of the first elastic ball hinge 7 is connected to the connecting portion 12, the two deformation portions 13 are symmetrically disposed on the deformation portion 13, one ends of the deformation portions 13 far away from the connection are respectively connected to the two columns 11, the micro-motion actuator 6 abuts against the connecting portion 12, when the micro-motion actuator 6 is energized, the micro-motion actuator 6 deforms and presses the connecting portion 12, the deformation portion 13 deforms, and then the transmission motion is realized.
As shown in fig. 2, the movable platform 3 is provided with a clamping hole 14, and the clamping hole 14 is used for clamping equipment or a precision instrument. Specifically, in this embodiment, the clamping hole 14 is formed in the upper surface of the movable platform 3, the clamping hole 14 is cylindrical, and when the motion simulation is performed, an object to be measured can be directly placed on the movable platform 3, the object to be measured can also be clamped through the clamping hole 14, other supporting platforms can also be clamped through the clamping hole 14, and the supporting surface where the object to be measured can be placed is indirectly enlarged. Through the scheme, the motion or vibration of X, Y, Z triaxial movement and triaxial rotation can be realized by the movable platform, and the horizontal X, Y movement and Z-axis rotation are decoupled from other motions.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (9)
1. A six-degree-of-freedom micro-vibration device based on a flexible mechanism is characterized by comprising a base, a movable platform, a plurality of bases, a plurality of first movement branched chains, a plurality of second movement branched chains and a plurality of micro-movement drivers;
the base is arranged on the base; the quantity of the base is equal to that of the second moving branched chains, and the base and the second moving branched chains are in one-to-one correspondence; the plurality of second moving branch chains are arranged in the same plane, the plurality of second moving branch chains are horizontally arranged and are rotationally symmetrical around the center of the moving platform, one end of each second moving branch chain is fixed on the plurality of bases, and the other end of each second moving branch chain is connected with the side face of the moving platform; the area of a graph formed by intersecting axes of the second moving branched chains is larger than 0; the micro-motion driver matched with the second motion branched chain is used for driving the second motion branched chain to drive the movable platform to translate or rotate on a horizontal plane;
the first moving branch chains are vertically arranged on the base, and the first moving branch chains are rotationally symmetrical around the center of the moving platform; the first motion branch chains are respectively connected with the lower surface of the movable platform, and the micro-motion driver matched with the first motion branch chains is used for driving the first motion branch chains to drive the movable platform to move, rotate in a pitching mode or swing in the vertical direction.
2. The six-degree-of-freedom micro-vibration device based on the flexible mechanism according to claim 1, wherein the base, the movable platform, the plurality of bases, the plurality of first moving branch chains and the plurality of second moving branch chains are of an integrated structure.
3. The flexible mechanism based six degree of freedom micro-vibration device of claim 1 wherein the first and second kinematic branches comprise first and second elastic ball hinges, an elastic moving hinge, a rigid link and two uprights;
the elastic movable hinge is positioned between the two upright posts, one end of the first elastic ball hinge is connected with one side of the elastic movable hinge, which is far away from the upright posts, and the other end of the first elastic ball hinge is connected with the rigid connecting rod; the first elastic ball hinge and the second elastic ball hinge are used for transmitting motion.
4. The six-degree-of-freedom micro-vibration device based on a flexible mechanism according to claim 3, wherein the elastically moving hinge includes a connecting portion and two deformation portions, the two deformation portions having a thickness smaller than that of the connecting portion, the two deformation portions being located on both sides of the connecting portion; the connecting portion are connected with the stand column through the two deformation portions respectively, one side, close to the movable platform, of the connecting portion is connected with the first elastic ball hinge, and one side, far away from the movable platform, of the connecting portion is connected with the micro-motion driver.
5. The six-degree-of-freedom micro-vibration device based on the flexible mechanism as claimed in claim 4, wherein one end of the column of the first moving branch chain far away from the moving platform is connected with the upper surface of the base, one end of the micro-motion driver matched with the first moving branch chain is connected with the upper surface of the base, and the other end of the micro-motion driver is connected with one side of the connecting part of the first moving branch chain far away from the moving platform.
6. The six-degree-of-freedom micro-vibration device based on the flexible mechanism as claimed in claim 4, wherein one end of the upright of the second moving branch chain far away from the moving platform is connected with the base, one end of the micro-moving driver matched with the second moving branch chain is connected with the base, and the other end of the micro-moving driver is connected with one side of the connecting part of the second moving branch chain far away from the moving platform.
7. The six-degree-of-freedom micro-vibration device based on the flexible mechanism according to claim 1, wherein the movable platform is provided with a clamping hole, and the clamping hole is used for clamping equipment or a precision instrument.
8. The six-degree-of-freedom micro-vibration device based on the flexible mechanism as claimed in claim 1, wherein the number of the bases is greater than or equal to 3, and the bases are equal to and in one-to-one correspondence with the second motion branched chains; the number of first moving branches is greater than or equal to 3.
9. A six-degree-of-freedom micro-vibration device based on a flexible mechanism is characterized by comprising a base, a movable platform, a plurality of bases, a plurality of first movement branched chains, a plurality of second movement branched chains and a plurality of micro-movement drivers; the number of the bases is more than or equal to 3, and the bases are equal to the number of the second moving branched chains and are in one-to-one correspondence with the second moving branched chains; the number of the first moving branches is greater than or equal to 3; the movable platform is provided with a clamping hole, and the clamping hole is used for clamping equipment or a precision instrument;
the base is arranged on the base; the plurality of second moving branch chains are arranged in the same plane, the plurality of second moving branch chains are horizontally arranged and are rotationally symmetrical around the center of the moving platform, one end of each second moving branch chain is fixed on the plurality of bases, and the other end of each second moving branch chain is connected with the side face of the moving platform; the area of a graph formed by intersecting axes of the second moving branched chains is larger than 0; the micro-motion driver matched with the second motion branched chain is used for driving the second motion branched chain to drive the movable platform to translate or rotate on a horizontal plane;
the first moving branch chains are vertically arranged on the base, and the first moving branch chains are rotationally symmetrical around the center of the moving platform; the first motion branch chains are respectively connected with the lower surface of the movable platform, and the micro-motion driver matched with the first motion branch chains is used for driving the first motion branch chains to drive the movable platform to move, rotate in a pitching mode or swing in the vertical direction; the base, the movable platform, the plurality of bases, the plurality of first moving branched chains and the plurality of second moving branched chains are of an integrated structure;
the first moving branched chain and the second moving branched chain comprise a first elastic ball hinge, a second elastic ball hinge, an elastic moving hinge, a rigid connecting rod and two upright columns; the elastic movable hinge is positioned between the two upright posts, one end of the first elastic ball hinge is connected with one side of the elastic movable hinge, which is far away from the upright posts, and the other end of the first elastic ball hinge is connected with the rigid connecting rod; the first elastic ball hinge and the second elastic ball hinge are used for transmitting motion;
the elastically movable hinge includes: the thickness of the two deformation parts is smaller than that of the connecting part, and the two deformation parts are positioned on two sides of the connecting part; the connecting part is connected with the upright post through two deformation parts respectively, one side of the connecting part, which is close to the movable platform, is connected with the first elastic ball hinge, and one side of the connecting part, which is far away from the movable platform, is connected with the micro-motion driver;
one end of the upright post of the first moving branched chain, which is far away from the moving platform, is connected with the upper surface of the base, one end of a micro-moving driver matched with the first moving branched chain is connected with the upper surface of the base, and the other end of the micro-moving driver is connected with one side, which is far away from the moving platform, of the connecting part of the first moving branched chain; the end, far away from the movable platform, of the upright column of the second moving branched chain is connected with the base, one end of a micro-moving driver matched with the second moving branched chain is connected with the base, and the other end of the micro-moving driver is connected with one side, far away from the movable platform, of the connecting part of the second moving branched chain.
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