CN1562578A - Macro/micro dual driven flexible parallel robot in six degree of freedom capable of positioning in nano magnitude and distance of run - Google Patents

Abstract

The invention discloses a parallel position adjustment robot with macro/micro dual drive and precise positioning—a six-degree-of-freedom macro/micro dual drive nanoscale positioning large-stroke flexible parallel robot. It includes an upper platform (1), six sets of identical branch chains (3), six sets of identical macro-motion driving devices (4), hinges (5) and bases (6), and it also includes micro-motion driving devices (7 ), the branch chain (3) is evenly arranged between the upper platform (1) and the base (6), the upper end of the branch chain (3) is hinged on the upper platform (1) through the hinge (5), and the branch chain (3) The lower end of the branch chain (3) is connected to the macro-motion driving device (4) through a hinge (5), the rod body part of the branch chain (3) is set as a micro-motion driving device (7), and the macro-motion driving device (4) is set on the base (6) superior. Because the present invention can not only macro-drive but also micro-adjust, it not only has a large range of motion, but also has high positioning accuracy. Because the micro-motion driving device (7) itself is set as the rod body of the branch chain (3), the overall structure is very compact. The invention has reasonable design, reliable operation and great popularization value.

Description

Six-degree-of-freedom macro/micro dual-drive flexible parallel robot with nanoscale positioning and large stroke

Technical field: The present invention relates to a parallel robot, in particular to a parallel position adjustment robot with macro/micro dual drive and precise positioning.

Background technology: At present, ordinary rigid parallel position adjustment devices usually use conventional kinematic pair mechanisms such as rotating joints and moving joints, which inevitably introduce errors such as gaps and crawling in driving and passive joints, which are very difficult to control errors source. In order to solve the above problems, flexible hinges are usually used in existing designs to replace various conventional kinematic pairs. Most of the current flexible ball hinges are "small-stroke" flexible hinges processed by wire cutting or other processing methods, as shown in Figure 1. The characteristic is that the linear displacement is often at the micron level, and the angular displacement is below 1°. Therefore, although the accuracy has been significantly improved, the following problem is: due to the limited deformation of the flexible hinge, the range of motion of the adjustment device is extremely small, usually on the order of cubic microns, which is not suitable for applications that require both high precision and high precision. Applications with a large range of motion. In addition, although the position adjustment device using a single macro-motion drive method (various motors, hydraulic, pneumatic, piezoelectric motors, etc.) can achieve a range of motion above the centimeter level, it can only achieve micron or sub-micron accuracy. However, although the position adjustment device using a single micro-motion drive method (piezoelectric ceramics) can achieve nanometer-level positioning accuracy, it generally can only achieve a micron-level motion range. However, the combination of a series macro robot and a series micro robot with a dual drive structure or a dual drive structure with a simple superimposition of two parallel robots, macro and micro, will lead to a large system structure, which does not meet the requirements of a compact structure.

SUMMARY OF THE INVENTION: The object of the present invention is to provide a position adjustment robot with a compact structure, a large range of motion and high positioning accuracy. The technical solution for realizing the purpose of the present invention is: a six-degree-of-freedom macro/micro dual-drive nanoscale positioning large-stroke flexible parallel robot, which includes an upper platform 1, six groups of identical branch chains 3, and six groups of identical macro-motion drive devices 4. The hinge 5 and the base 6, which also includes a micro-motion drive device 7, the branch chain 3 is evenly arranged between the upper platform 1 and the base 6, the upper end of the branch chain 3 is hinged on the upper platform 1 through the hinge 5, and the support The lower end of the chain 3 is connected with the macro-motion driving device 4 through the hinge 5 , the rod part of the branch chain 3 is set as the micro-motion driving device 7 , and the macro-motion driving device 4 is set on the base 6 . When the present invention is working, the macro-motion driving device 4 drives the branch chain 3 to rotate at the lower end of the branch chain 3 to complete the macroscopic adjustment of the position and attitude of the upper platform 1, and the micro-motion driving device 7 makes the branch chain 3 micro-elongate or shorten , so as to complete the fine-tuning of the position and attitude of the upper platform 1. Because the present invention can not only macro-drive but also micro-adjust, it not only has a large range of motion but also has high positioning accuracy. Because the micro-motion drive device 7 itself is set as the rod body of the branch chain 3, no additional structure is needed, so the overall structure is very compact. The invention has reasonable design, reliable operation and great popularization value.

Description of the drawings: Fig. 1 is a schematic structural diagram of an existing "small stroke" flexible hinge, Fig. 2 is a schematic structural diagram of a large stroke flexible hinge in Embodiment 3 of the present invention, Fig. 3 is a schematic three-dimensional structural diagram of the present invention, Fig. 4 Schematic diagram of the structure of the branch chain 3 of the invention, Figure 5 is a schematic diagram of the three-dimensional structure of Embodiment 4, Figure 6 is a schematic diagram of the structure of Embodiment 4, Figure 7 is an enlarged schematic diagram of I in Figure 6, and Figure 8 is a schematic diagram of the structure of Embodiment 6 .

Specific Embodiment 1: The present embodiment will be specifically described below with reference to FIG. 3 and FIG. 4 . It consists of an upper platform 1, six sets of identical branch chains 3, six sets of identical macro-motion driving devices 4, hinges 5, base 6 and micro-motion driving devices 7, and the branch chains 3 are evenly arranged on the upper platform 1 and the base 6, the upper end of the branch chain 3 is hinged on the upper platform 1 through the hinge 5, the lower end of the branch chain 3 is connected with the macro-motion drive device 4 through the hinge 5, and the rod body part of the branch chain 3 is set as the micro-motion drive device 7, The macro motion driving device 4 is arranged on the base 6 . The micro-actuation device 7 is a rod-shaped piezoelectric ceramic driver, and the two ends of the micro-actuation device 7 are connected with the hinge 5 .

Embodiment 2: The difference between this embodiment and Embodiment 1 is that the hinge 5 is a flexible hinge. The use of flexible hinges can eliminate gaps that exist in ordinary hinges, and improve positioning accuracy and movement accuracy.

Specific Embodiment Three: The present embodiment will be specifically described below with reference to FIG. 2 and FIG. 4 . The difference between this embodiment and Embodiments 1 and 2 is that the hinge 5 is a large-stroke flexible hinge, which consists of a hinge rod 5-1 and fasteners 5-2 located at both ends of the hinge rod 5-1. The hinge strut 5-1 is a rod body made of beryllium bronze. Using the large-stroke flexible hinge (0.9mm in diameter, 12mm in length, and made of beryllium bronze) as shown in Figure 2, the linear displacement can reach millimeter level and the angular displacement can reach more than 3°, and three linear adjustment displacements and three A corner adjustment displacement. When the rigid rod connected with the flexible hinge is relatively long, the point-line displacement of the end point of the rigid rod can achieve a relatively large (centimeter-level) range of motion.

Specific Embodiment 4: The present embodiment will be specifically described below in conjunction with FIG. 3 , FIG. 5 , FIG. 6 and FIG. 7 . The difference between this embodiment and Embodiment 1 is that the macro-motion driving device 4 is composed of a piezoelectric motor 4-1, a guide rail 4-2, a slide table 4-3, a slider 4-5, a rolling body 4-6 and a friction belt 4-4, the guide rail 4-2 is set on the upper surface of the base 6 in the horizontal direction, the guide rail 4-2, the slider 4-5 and the rolling element 4-6 form a linear movement pair, and the slide table 4-3 is fixed on the On the slide block 4-5, the slide table 4-3 is fixedly connected to the lower end of the hinge 5, the side surface of the slide table 4-3 is bonded with a friction belt 4-4 in the horizontal direction, and the friction finger 4-4 of the piezoelectric motor 4-1 1-1 is compressed on the surface of friction belt 4-4. The driving end of the macro motion is driven by a piezoelectric motor. Due to the working characteristics of the piezoelectric motor (the drive refers to the linear motion of the sliding table driven by the principle of friction), that is, due to the pre-tightening force during work, the guide rail slider and the rolling body, and the rolling body and the rolling body The rails are in close contact at all times, which virtually eliminates backlash at the drive end. The two ends of the micro-driver (piezoelectric ceramics) are also fixedly connected, so that the overall system of the adjustment mechanism achieves no gap. Due to the use of high-precision and high-resolution drive components in the system—piezoelectric motors and piezoelectric ceramics as macro drives and micro drives; and the macro-motion displacement detection components are precision gratings, the system can finally move within centimeters Nanoscale resolution and motion accuracy are obtained within the range. The working range of this platform moves along the three axes of x, y, and z. The strokes are ±5mm respectively, and the rotation around the three axes is ±1.5° respectively. The repeated positioning accuracy of rotation around the three axes is 0.2μrad, and the resolution is 0.1μrad.

Embodiment 5: This embodiment will be specifically described below in conjunction with FIG. 6 . The difference between this embodiment and the fourth embodiment is that it also includes a precision grating, the reading head 8-1 of the precision grating is fixedly connected with the slide table 4-3, and the scale 8-2 of the precision grating is fixedly connected on the base 6 . With such arrangement, the position adjustment can be precisely controlled.

Specific Embodiment Six: The present embodiment will be specifically described below with reference to FIG. 8 . The difference between this embodiment and the first embodiment is that the macro-motion driving device 4 is composed of a motor 4-8, a shaft coupling 4-9, a rotating part 4-10, a guide rail 4-11, a slider 4-12, and a slide table 4. -13 and the frame body 4-14, the frame body 4-14 is fixedly connected on the upper surface of the base 6, the guide rail 4-11 and the motor 4-8 are fixedly connected on the frame body 4-14, and the rotating parts 4-10 It forms a screw nut transmission mechanism with the slider 4-12, the slider 4-13 is fixedly connected with the slider 4-12, the guide rail 4-11 provides vertical guidance for the slider 4-12, and the slider 4-13 is connected with the hinge The lower end of 5 is fixedly connected, and guide rail 4-11 is perpendicular to the upper surface of base 6. With such arrangement, the macro motion drive device 4 completes the drive of the branch chain 3 in the vertical direction.

Claims (6)

1. A six-degree-of-freedom macro/micro dual-drive nanoscale positioning large-stroke flexible parallel robot, which includes an upper platform (1), six sets of identical branch chains (3), and six sets of identical macro-motion drive devices (4) , hinge (5) and base (6), it is characterized in that it also comprises micro-motion driving device (7), branch chain (3) is evenly arranged between upper platform (1) and base (6), branch chain The upper end of (3) is hinged on the upper platform (1) through the hinge (5), the lower end of the branch chain (3) is connected with the macro-motion drive device (4) through the hinge (5), and the rod body part of the branch chain (3) The micro-motion driving device (7) is arranged, and the macro-motion driving device (4) is arranged on the base (6). 2. The six-degree-of-freedom macro/micro dual-drive flexible parallel robot with nanoscale positioning and large stroke according to claim 1, characterized in that the hinge (5) is a flexible hinge. 3. The six-degree-of-freedom macro/micro dual-drive nanoscale positioning large-stroke flexible parallel robot according to claim 1 or 2 is characterized in that the hinge (5) is a large-stroke flexible hinge, which consists of a hinge rod (5-1 ) and fasteners (5-2) positioned at both ends of the hinged strut (5-1), the hinged strut (5-1) is a bar body made of beryllium bronze. 4. The six-degree-of-freedom macro/micro dual-drive flexible parallel robot with nanoscale positioning and large stroke according to claim 1, characterized in that the macro-motion drive device (4) consists of a piezoelectric motor (4-1), a guide rail (4- 2), sliding table (4-3), slider (4-5), rolling element (4-6) and friction belt (4-4), the guide rail (4-2) is set horizontally on the base (6 ) on the upper surface, the guide rail (4-2), the slider (4-5) and the rolling element (4-6) form a linear movement pair, and the slider (4-3) is fixedly connected to the slider (4-5) On, the slide table (4-3) is fixedly connected with the lower end of the hinge (5), and the side surface of the slide table (4-3) is bonded with a friction belt (4-4) in the horizontal direction, and the piezoelectric motor (4-1) The friction finger (4-1-1) is pressed on the surface of the friction belt (4-4). 5. The six-degree-of-freedom macro/micro dual-drive flexible parallel robot with nanoscale positioning and large stroke according to claim 4 is characterized in that it also includes a precision grating, a reading head (8-1) and a slide table (4) of the precision grating -3) Fixed connection, the scale (8-2) of the precision grating is fixed on the base (6). 6. The six-degree-of-freedom macro/micro dual-drive flexible parallel robot with nanoscale positioning and large stroke according to claim 1, characterized in that the macro-motion driving device (4) consists of a motor (4-8), a coupling (4- 9), rotating parts (4-10), guide rails (4-11), sliders (4-12), slide table (4-13) and frame body (4-14), frame body (4-14) Be fixedly connected on the upper surface of base (6), guide rail (4-11) and motor (4-8) are fixedly connected on the frame body (4-14), rotating part (4-10) and slide block (4 -12) Form the screw nut transmission mechanism, the slide table (4-13) is fixedly connected with the slide block (4-12), the guide rail (4-11) provides the vertical direction guide for the slide block (4-12), and the slide table (4-13) is fixedly connected with the lower end of hinge (5), and guide rail (4-11) is perpendicular to the upper surface of base (6).

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