CN1562578A - Macro/micro dual driven flexible parallel robot in six degree of freedom capable of positioning in nano magnitude and distance of run - Google Patents
Macro/micro dual driven flexible parallel robot in six degree of freedom capable of positioning in nano magnitude and distance of run Download PDFInfo
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Abstract
A 6-freedom flexible parallel robot with macro/micro drive, nm-class location and long stroke is composed of upper platform, base, 6 macrodrivers on the base, 6 branches connected between upper platform and macrodriver, and microdrivers arranged on said rods of branches.
Description
Technical field: the present invention relates to a kind of parallel robot, robot is adjusted in the parallel position that is specifically related to a kind of macro/micro driving precision positioning.
Background technology: at present, the parallel position regulator of common rigidity adopts conventional kinematic pair such as revolute pair, moving sets mechanism usually, inevitably locate to introduce the gap at driving, passive joint etc., the equal error of creeping, this is very unmanageable source of error.For addressing the above problem, adopt flexible hinge to replace various conventional kinematic pairs in the existing design usually.Existing general flexible ball hinge mostly is " little stroke " flexible hinge as shown in Figure 1 that adopts line cutting or other processing methods to process, and its characteristics are the displacement of the lines micron order of being everlasting, and angular displacement is below 1 °.Therefore, though precision is significantly improved, the problem of thereupon bringing is: because the distortion of flexible hinge is limited, cause the range of movement of adjusting device minimum, usually in the cu level, be not suitable for and both require high accuracy, require the application scenario of large moving range again.In addition, adopt single grand moving type of drive (various motors, hydraulic pressure, pneumatic, piezo-electric motor etc.) though position regulator can reach the above range of movement of Centimeter Level, can only reach the precision of micron or sub-micron.And adopt single fine motion type of drive (piezoelectric ceramics) though position regulator can reach nano level positioning accuracy, generally can only reach micron-sized range of movement.And adopt the grand robot of series connection all can cause the structural body of system very big with the double drive structure of the Micro-Robot combination of connecting or the double drive structure of grand, little two parallel robot simple superposition, do not satisfy the requirement of compact conformation.
Summary of the invention: purpose of the present invention just provides a kind of compact conformation, and existing big range of movement has the position of high positioning accuracy to adjust robot again.The technical scheme that realizes the object of the invention is: a kind of six degree of freedom macro/micro drives nanoscale and locatees big stroke flexible parallel connection robot, it comprises upper mounting plate 1, six groups of identical side chains 3, six groups of identical grand moving drive units 4, hinge 5 and pedestal 6, it also comprises micro drive 7, side chain 3 is evenly arranged between upper mounting plate 1 and the pedestal 6, the upper end of side chain 3 is hinged on the upper mounting plate 1 by hinge 5, the lower end of side chain 3 is connected with grand moving drive unit 4 by hinge 5, the shank portion of side chain 3 is set to micro drive 7, and grand moving drive unit 4 is arranged on the pedestal 6.The present invention is when work, thereby grand moving drive unit 4 by drive in the lower end of side chain 3 side chain 3 rotate finish upper mounting plate 1 position and attitude the macroscopic view adjustment, micro drive 7 elongates or shortens side chain 3 trace, thereby finishes the fine setting of upper mounting plate 1 position and attitude.Since the present invention can grand driving again can inching, so existing big range of movement has high positioning accuracy again.Because micro drive 7 itself is set to the body of rod of side chain 3, do not need to increase structure, so overall structure is very compact.Reasonable in design, the reliable operation of the present invention has bigger promotional value.
Description of drawings: Fig. 1 is the structural representation of existing " little stroke " flexible hinge, Fig. 2 is the structural representation of big flexure hinge in the embodiment of the present invention three, Fig. 3 is a perspective view of the present invention, the structural representation of Fig. 4 side chain 3 of the present invention, Fig. 5 is the perspective view of embodiment four, Fig. 6 is the structural representation of embodiment four, and Fig. 7 is the enlarged diagram at I place among Fig. 6, and Fig. 8 is the structural representation of embodiment six.
The specific embodiment one: specify present embodiment below in conjunction with Fig. 3 and Fig. 4.It is made up of upper mounting plate 1, six groups of identical side chains 3, six groups of identical grand moving drive unit 4, hinge 5, pedestal 6 and micro drives 7, side chain 3 is evenly arranged between upper mounting plate 1 and the pedestal 6, the upper end of side chain 3 is hinged on the upper mounting plate 1 by hinge 5, the lower end of side chain 3 is connected with grand moving drive unit 4 by hinge 5, the shank portion of side chain 3 is set to micro drive 7, and grand moving drive unit 4 is arranged on the pedestal 6.Micro drive 7 is piezoelectric ceramic actuators of rod, and the two ends of micro drive 7 are connected with hinge 5.
The specific embodiment two: the difference of present embodiment and embodiment one is that hinge 5 is selected flexible hinge for use.Use flexible hinge can eliminate existing gap in the common hinge, improve positioning accuracy and kinematic accuracy.
The specific embodiment three: specify present embodiment below in conjunction with Fig. 2 and Fig. 4.The difference of present embodiment and embodiment one, two is, hinge 5 is selected big flexure hinge for use, and it is made up of hinged bar 5-1 and the securing member 5-2 that is positioned at hinged bar 5-1 both ends, and hinged bar 5-1 is the body of rod of beryllium-bronze material.Adopt big flexure hinge (diameter 0.9mm, length 12mm, material are beryllium-bronze) as shown in Figure 2, its displacement of the lines can reach the millimeter level, angular displacement can reach more than 3 °, can obtain three lines and adjust displacement and three corners adjustment displacements.When the rigid rod that links to each other with flexible hinge was long, the distal point displacement of the lines of rigid rod more can reach the range of movement of relatively large (Centimeter Level).
The specific embodiment four: specify present embodiment below in conjunction with Fig. 3, Fig. 5, Fig. 6 and Fig. 7.The difference of present embodiment and embodiment one is: grand moving drive unit 4 is made up of piezo-electric motor 4-1, guide rail 4-2, slide unit 4-3, slide block 4-5, rolling element 4-6 and friction band 4-4, guide rail 4-2 horizontal direction is arranged on the upper surface of pedestal 6, guide rail 4-2, slide block 4-5 and rolling element 4-6 form the straight line moving sets, slide unit 4-3 is connected on the slide block 4-5, the lower end of slide unit 4-3 and hinge 5 is connected, horizontal direction is bonded with friction band 4-4 on the side of slide unit 4-3, and the friction of piezo-electric motor 4-1 refers to that 4-1-1 is pressed on the surface of friction band 4-4.Grand moving drive end adopts piezo-electric motor to drive, because the operating characteristic of piezo-electric motor (driving is depended on tribology principle and driven the slide unit rectilinear motion), in promptly working because pretightning force arranged, make to remain tight the contact between guide rail slide block and rolling element, rolling element and the guide rail, so also fundamentally eliminated the gap of drive end.Fixedly connected mode is also adopted at fine motion driver (piezoelectric ceramics) two ends, thereby makes the guiding mechanism total system reach no gap.Owing to be used precision in the system and the high driving element of resolution ratio---piezo-electric motor and piezoelectric ceramics are as grand driver and microdrive; And wherein grand moving displacement detecting element is a precise grating, and the system that finally makes can obtain nano level resolution ratio and kinematic accuracy in the range of movement of Centimeter Level.This platform working range is respectively ± 5mm along x, y, three mobile strokes of z, around three rotations be respectively ± 1.5 °, x, y, three translation repetitive positioning accuracies of z are 20nm, resolution ratio is 5nm; Around three rotation repetitive positioning accuracies is 0.2 μ rad, and resolution ratio is 0.1 μ rad.
The specific embodiment five: specify present embodiment below in conjunction with Fig. 6.The difference of present embodiment and embodiment four is: it also comprises precise grating, and the read head 8-1 and the slide unit 4-3 of precise grating are connected, and the rule 8-2 of precise grating is fixed on the pedestal 6.So be provided with, accurately the control position is adjusted.
The specific embodiment six: specify present embodiment below in conjunction with Fig. 8.The difference of present embodiment and embodiment one is: grand moving drive unit 4 is by motor 4-8, shaft coupling 4-9, rotatable parts 4-10, guide rail 4-11, slide block 4-12, slide unit 4-13 and support body 4-14 form, support body 4-14 is connected on the upper surface of pedestal 6, guide rail 4-11 and motor 4-8 are connected on the support body 4-14, rotatable parts 4-10 and slide block 4-12 form the feed screw nut transmission mechanism, slide unit 4-13 and slide block 4-12 are connected, guide rail 4-11 provides the guiding of vertical direction for slide block 4-12, the lower end of slide unit 4-13 and hinge 5 is connected, and guide rail 4-11 is perpendicular to the upper surface of pedestal 6.So be provided with, grand moving drive unit 4 is finished the driving of vertical direction to side chain 3.
Claims (6)
1, a kind of six degree of freedom macro/micro drives nanoscale and locatees big stroke flexible parallel connection robot, it comprises upper mounting plate (1), six groups of identical side chains (3), six groups of identical grand moving drive units (4), hinge (5) and pedestal (6), it is characterized in that it also comprises micro drive (7), side chain (3) is evenly arranged between upper mounting plate (1) and the pedestal (6), the upper end of side chain (3) is hinged on the upper mounting plate (1) by hinge (5), the lower end of side chain (3) is connected with grand moving drive unit (4) by hinge (5), the shank portion of side chain (3) is set to micro drive (7), and grand moving drive unit (4) is arranged on the pedestal (6).
2, six degree of freedom macro/micro according to claim 1 drives nanoscale and locatees big stroke flexible parallel connection robot, it is characterized in that hinge (5) selects flexible hinge for use.
3, six degree of freedom macro/micro according to claim 1 and 2 drives nanoscale and locatees big stroke flexible parallel connection robot, it is characterized in that hinge (5) selects big flexure hinge for use, it is made up of hinged bar (5-1) and the securing member (5-2) that is positioned at hinged bar (5-1) both ends, and hinged bar (5-1) is the body of rod of beryllium-bronze material.
4, six degree of freedom macro/micro according to claim 1 drives nanoscale and locatees big stroke flexible parallel connection robot, it is characterized in that grand moving drive unit (4) is by piezo-electric motor (4-1), guide rail (4-2), slide unit (4-3), slide block (4-5), rolling element (4-6) and friction band (4-4) are formed, guide rail (4-2) horizontal direction is arranged on the upper surface of pedestal (6), guide rail (4-2), slide block (4-5) and rolling element (4-6) are formed the straight line moving sets, slide unit (4-3) is connected on the slide block (4-5), slide unit (4-3) is connected with the lower end of hinge (5), horizontal direction is bonded with friction band (4-4) on the side of slide unit (4-3), and the friction of piezo-electric motor (4-1) refers to that (4-1-1) is pressed on the surface of friction band (4-4).
5, six degree of freedom macro/micro according to claim 4 drives nanoscale and locatees big stroke flexible parallel connection robot, it is characterized in that it also comprises precise grating, the read head of precise grating (8-1) is connected with slide unit (4-3), and the rule of precise grating (8-2) is fixed on the pedestal (6).
6, six degree of freedom macro/micro according to claim 1 drives nanoscale and locatees big stroke flexible parallel connection robot, it is characterized in that grand moving drive unit (4) is by motor (4-8), shaft coupling (4-9), rotatable parts (4-10), guide rail (4-11), slide block (4-12), slide unit (4-13) and support body (4-14) are formed, support body (4-14) is connected on the upper surface of pedestal (6), guide rail (4-11) and motor (4-8) are connected on the support body (4-14), rotatable parts (4-10) are formed the feed screw nut transmission mechanism with slide block (4-12), slide unit (4-13) is connected with slide block (4-12), guide rail (4-11) provides the guiding of vertical direction for slide block (4-12), slide unit (4-13) is connected with the lower end of hinge (5), and guide rail (4-11) is perpendicular to the upper surface of pedestal (6).
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| CN100339194C (en) * | 2005-11-14 | 2007-09-26 | 哈尔滨工业大学 | Microminiature mobile robot system oriented to precise operation of micro electromechanical system |
| CN100446939C (en) * | 2006-10-13 | 2008-12-31 | 北京理工大学 | Macrography/microcosmic association 12 freedom degree micro assembly system |
| CN102645170A (en) * | 2012-04-12 | 2012-08-22 | 重庆大学 | Sliding block type parallel mechanism for measuring space six-degree-of-freedom movement |
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| CN114608775A (en) * | 2022-03-15 | 2022-06-10 | 中国科学院长春光学精密机械与物理研究所 | Supporting leg type multi-dimensional micro-vibration simulator based on parallel connection of coarse and fine driving components |
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