CN105643604B - A kind of submissive system of four-degree-of-freedom fine motion - Google Patents
A kind of submissive system of four-degree-of-freedom fine motion Download PDFInfo
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- CN105643604B CN105643604B CN201610178495.6A CN201610178495A CN105643604B CN 105643604 B CN105643604 B CN 105643604B CN 201610178495 A CN201610178495 A CN 201610178495A CN 105643604 B CN105643604 B CN 105643604B
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- Prior art keywords
- submissive
- degree
- platform
- freedom
- module
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
- B25J9/0033—Programme-controlled manipulators having parallel kinematics with kinematics chains having a prismatic joint at the base
Abstract
The invention discloses a kind of submissive system of four-degree-of-freedom fine motion, moving platform has tetra- degree of freedom of DxDyRxRy, can be applicable to the specific fields such as MEMS, Ultra-precision Turning and manufacture, aerospace.Its concrete structure includes the submissive module with Rx and Ry double rotation freedom degrees and can realize the submissive platforms of Awtar of two translational degree of freedom of Dx and Dy；Two turns of submissive modules of degree of freedom are made of submissive sliding hinge, submissive Hooke's hinge and driving element etc., are mounted on the halfpace of Awtar mechanisms；Awtar platforms provide the translation of two degree of freedom of DxDy by submissive sliding hinge in parallel.The present invention realize translation with rotation it is full decoupled, can be operated alone respectively；A kind of flexible gliding has been used to cut with scissors in four, the periphery supporting leg of the submissive module of double rotation freedom degrees, can realize larger Axial changes, wherein adjacent two are used as master leg, rotation is realized equipped with driving element.
Description
Technical field
The invention belongs to the technical fields such as MEMS, Ultra-precision Turning and manufacture, aerospace more particularly to one kind
The submissive system of four-degree-of-freedom fine motion.
Background technology
With the development of science and technology, in numerous areas such as MEMS, Ultra-precision Turning and manufacture, medical instrument, optics
Engineering, aerospace and bioengineering, micro-nano the relevant technologies have been obtained for very extensive application, wherein lower-mobility essence
Close micro- positioning and adjusting apparatus are an important research directions.It is different to have developed more and more satisfactions by researcher at present
The system with micro/nano level positioning and adjustment of demand, some are applied to MEMS, large-scale integrated
Circuit and biology with micro- medical domain in and the effect of playing an important role.But there are no two rotations, two translation four-degree-of-freedoms
The ripe configuration and design method of precision positioning device.
Friction and factor of play present in the kinematic pair of conventional rigid mechanism so that the operation of micro-nano order of magnitude precision can not
It effectively realizes, and not only so that mechanism complexity is not easy to safeguard, while so that volume is more huge after the assembling of all multiple components
It is not easy to greatly develop toward miniaturization.Compliant mechanism is had as a kind of structure that micro-displacement is generated using material deformation
Can be integrally formed, exempt to assemble, hinge without friction and wear, no shock and vibration and noise, it is few safeguard, high-precision the advantages that, these
Advantage can improve precision and working efficiency in practical engineering application, with reference to the high-precisions such as piezoelectric ceramics actuation techniques and newly
The application of material may be such that the precision of four-degree-of-freedom precision positioning and adjusting apparatus reaches nanometer scale.
At present, at home and abroad the form of disclosed 4DOF fine motion parallel institution mainly have it is following several：Zhangjiang wave, Zhu
Great waves, a kind of development robots of the four-degree-of-freedom micromotion platform with nanometer positioning precision of Wang Yuechao, 2003,25 (3):213
~216. describe a kind of novel four-degree-of-freedom nanometer micromotion platform system, it realizes X, Y, Z using piezoelectric element driving
Three translations and θ (around trunnion axis) rotate totally four degree of freedom.Duan Jianguo, Guo Zonghe, the novel four-freedom parallels of Wang Ke outstanding person
Structure structure and motion analysis Shandong Technology Univ journal (natural science edition), 2008,22 (1):23~27. propose one kind four
Freedom degree parallel connection mechanism, can realize X, tri- direction translationals of Y, Z and the rotation of γ (around trunnion axis) direction totally four degree of freedom
Movement.Zhao Ran four-degree-of-freedom 4-RRUR parallel micro-moving robots are designed studies University On The Mountain Of Swallows Master's thesis with basic property,
2010. propose and can realize X, tri- direction translationals of Y, Z and the four-freedom parallel mechanism configuration turned about the Z axis.Zhenyu
H,Zhixu Z,Zhihua X.Dimensional Synthesis of a 4-DOF Hybrid Driving
Platform.Applied Mechanics and Materials,2014,441:543~547. have carried out pneumatic unit driving
Four-freedom parallel mechanism dimension synthesis, Caixia F, Hongzhao L, Gexia Y, et al.A Novel 2T2R
4-DOF Parallel Manipulator.2011 Fourth International Symposium on Knowledge
Acquisition and Modeling,8-9 Oct.2011[C].Los Alamitos,CA,USA:IEEE Computer
Society, 2011.5~8. propose a kind of parallel institution configuration that can realize two rotations two translation, but every driving divides
The hinge of branch is excessive, it is impossible to realize that precise jiggle operates.Qinchuan L,Zhen H.Type synthesis of 4-DOF
parallel manipulators[A].IEEE International Conference on Robotics and
Automation.IEEE ICRA 2003Conference Proceedings,14-19 Sept.2003[C]
.Piscataway,NJ,USA:IEEE, the configuration of 2003.755~760. pairs of four-freedom parallel mechanisms are integrated, but not
Include configuration proposed by the invention.
The 4DOF mechanism that document proposes above has the following disadvantages：1) can not achieve X, Y two translation and simultaneously realization around
X, Y two is rotated；2) hinge of every driving branch is excessive, it is difficult to the ultrahigh precision inching operation of implementation mechanism.
Invention content
The purpose of the present invention is to provide a kind of submissive systems of four-degree-of-freedom fine motion, it is intended to solve due to biographies such as numerically-controlled machine tools
Friction and the presence in gap in the kinematic pair for rigid mechanism equipment of uniting so that the operation of micro-nano order of magnitude precision can not be effectively real
It is existing, and not only so that mechanism complexity is not easy to safeguard, while so that volume is more huge and inconvenient after the assembling of all multiple components
In the miniaturized application the problem of.
The invention is realized in this way a kind of submissive system of four-degree-of-freedom fine motion, the submissive system of four-degree-of-freedom fine motion
Submissive module including the submissive platforms of Awtar and with Rx and Ry two-freedoms, connection mode exist for the submissive platforms of Awtar
Under, the submissive modules of Rx and Ry two-freedoms is upper, to be connected in series with；
The submissive module of the Rx and Ry two-freedoms is cut with scissors by submissive sliding, submissive Hooke's hinge and driving element form.
Further, the submissive module of the Rx and Ry two-freedoms is five branches by being fixedly connected with pedestal and is supported
Rigid body moving platform form, upper end and the rigid body moving platform of each branch are fixedly connected with；Pedestal is mutually solid with the submissive platforms of Awtar
Even, make translational motion in X and Y-direction by the submissive entire micro- rotatable platforms of platform driving of Awtar；The epimere of each branch is all submissive tiger
Gram hinge and center of submissive Hooke's hinge is in initial position in same level；Four supporting leg hypomeres of surrounding are submissive
Sliding hinge.
Further, the submissive module with Rx and Ry two-freedoms is mounted in the halfpace of the submissive platforms of Awtar
On, i.e., the moving platform among the pedestal of the submissive module with Rx and Ry two-freedoms and the submissive platforms of Awtar is fixedly connected with,
Voice coil motor is packed into the susceptor space of the submissive platforms of Awtar as driver, the bottom of the submissive module of Rx and Ry two-freedoms
Seat is provided with slot, for the sensor device for being used to detect the practical translation displacements amount of intermediate moving platform installed on the submissive platforms of Awtar.
Further, the driving element is piezoelectric ceramics or voice coil motor.
The beneficial effects of the present invention are：
The submissive system of four-degree-of-freedom fine motion provided by the invention, machine is mounted in by the compliant mechanism with micro- rotational freedom
On the halfpace of structure, independent driving can be carried out respectively and realize four-degree-of-freedom fine motion, can realize micro-nano positioning and
The effect of adjustment.
The present invention devises submissive rotating module by the use of submissive hook hinge and submissive sliding hinge as compliance unit
Compliant structure configuration, and obtain the submissive platform of entire four-degree-of-freedom with submissive platform combination；4 can be achieved in practical engineering application
The micro-nano positioning and adjustment of a degree of freedom；This platform designed using flexible unit avoids many parts of conventional rigid mechanism
Complexity is assembled, convenient for maintenance, small volume and convenient for miniaturized application.
Description of the drawings
Fig. 1 is the submissive system structure diagram of four-degree-of-freedom fine motion provided in an embodiment of the present invention；
In figure：1st, the submissive platforms of Awtar；2nd, submissive sliding hinge；3rd, submissive Hooke's hinge.
Fig. 2 is the installation diagram of flexible micro four-degree-of-freedom platform provided in an embodiment of the present invention.
Fig. 3 is the graphics of flexibility platform provided in an embodiment of the present invention.
Fig. 4 is the installation diagram with two turns of degree of freedom flexibility platforms provided in an embodiment of the present invention.
Fig. 5 is flexible gliding hinge graphics provided in an embodiment of the present invention.
Fig. 6 is flexible Hooke's hinge graphics provided in an embodiment of the present invention.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.
The application principle of the present invention is further described below in conjunction with the accompanying drawings.
As shown in Figure 1, the submissive system of four-degree-of-freedom fine motion of the embodiment of the present invention includes the submissive platforms 1 of Awtar and has
The submissive module of Rx and Ry two-freedoms；Two turns of submissive modules of degree of freedom cut with scissors 2, submissive Hooke's hinge 3 and driving member by submissive sliding
The compositions such as part.Fig. 2 is the installation diagram of flexible micro four-degree-of-freedom platform provided in an embodiment of the present invention；Fig. 3 is implementation of the present invention
The graphics for the flexibility platform that example provides；Fig. 4 is the assembling with two turns of degree of freedom flexibility platforms provided in an embodiment of the present invention
Figure；Fig. 5 is flexible gliding hinge graphics provided in an embodiment of the present invention；Fig. 6 is flexible Hooke's hinge provided in an embodiment of the present invention
Graphics.
The submissive module with two turns of degree of freedom is five branches by being fixedly connected with pedestal and its is supported
What rigid body moving platform was formed, upper end and the rigid body moving platform of each branch are fixedly connected with；Pedestal platform 1 submissive with Awtar is fixedly connected with,
Entire micro- rotatable platform is driven to make translational motion in X and Y-direction by the submissive platforms 1 of Awtar.The epimere of each branch is all submissive Hooke
The center of hinge 3 and submissive Hooke's hinge 3 is in initial position in same level；Four supporting leg hypomeres of surrounding are submissive
Sliding hinge 2, can generate stretching motion on the direction perpendicular to pedestal, wherein X to an edge supporting leg and Y-direction on one
A edge supporting leg is master leg, and other two edge supporting leg is passive supporting leg.
Submissive module with Rx and Ry two-freedoms is mounted on the halfpace of the submissive platforms 1 of Awtar, i.e., with Rx
It is fixedly connected with the moving platform among the submissive platform 1 of pedestal and Awtar of the submissive module of Ry two-freedoms, such DxDy translations are certainly
With the micro- rotational freedoms of RxRy it is to realize full decoupled by degree, independent driving can be carried out respectively.Rotary freedom it is soft
Along a kind of submissive sliding hinge has been used in the supporting leg of four, module periphery, it is capable of providing the axial deformation of larger stroke.Actively
Piezoelectric ceramics or voice coil motor are packed into the central space of the submissive sliding hinge of supporting leg as driving device, it is submissive in Awtar
Voice coil motor is packed into the susceptor space of platform 1 as driver, and the pedestal for rotating submissive module is provided with slot, is Awtar
That is installed on submissive platform 1 is used to detect the sensor device slot milling of the practical translation displacements amount of intermediate moving platform.
In attached drawing 1, the submissive module with Rx and Ry two-freedoms is mounted on the halfpace of Awtar mechanisms.Awtar
Platform realizes the translation of two degree of freedom of DxDy, and upper mounting plate realizes the rotation of two degree of freedom of RxRy, and this arrangement can be achieved flat
It is dynamic full decoupled with rotation, it can be operated alone respectively.A kind of flexible gliding has been used to cut with scissors in four, the periphery supporting leg of upper mounting plate,
It can realize larger Axial changes, and adjacent two are used as master leg, and rotation is realized equipped with driving element.
For those skilled in the art, it can be made various corresponding according to above technical solution and design
Change and deform, and all these change and deformation should be construed as being included within the protection domain of the claims in the present invention.
Claims (3)
1. a kind of submissive system of four-degree-of-freedom fine motion, which is characterized in that the submissive system of four-degree-of-freedom fine motion includes submissive flat
Platform and with Rx and Ry two-freedoms submissive module, connection mode for submissive platform under, Rx and Ry two-freedoms it is soft
Along module upper, the two is is connected in series with；
The submissive module of the Rx and Ry two-freedoms is cut with scissors by submissive sliding, submissive Hooke's hinge and driving element form；
The submissive module with Rx and Ry two-freedoms is by five branches being fixedly connected with pedestal and the rigid body supported
What moving platform was formed, upper end and the rigid body moving platform of each branch are fixedly connected with；Pedestal is fixedly connected with submissive platform, by submissive platform
The entire micro- rotatable platform of driving makees translational motion in X and Y-direction；The epimere of each branch is all submissive Hooke's hinge and submissive Hooke's hinge
Center be in same level in initial position；Four branch's hypomeres of surrounding are submissive sliding hinges.
2. the submissive system of four-degree-of-freedom fine motion as described in claim 1, which is characterized in that described that there is Rx and Ry two-freedoms
Submissive module be mounted on the halfpace of submissive platform, the pedestal of the submissive module of Rx and Ry two-freedoms and submissive platform
Intermediate moving platform is fixedly connected with, and voice coil motor is packed into the susceptor space of submissive platform as driver, Rx and Ry two are freely
The pedestal of the submissive module of degree is provided with slot, and the biography for detecting the practical translation displacements amount of intermediate moving platform is equipped on submissive platform
Sensor arrangement.
3. the submissive system of four-degree-of-freedom fine motion as described in claim 1, which is characterized in that the driving element is piezoelectric ceramics
Or voice coil motor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610178495.6A CN105643604B (en) | 2016-03-25 | 2016-03-25 | A kind of submissive system of four-degree-of-freedom fine motion |
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| CN201610178495.6A CN105643604B (en) | 2016-03-25 | 2016-03-25 | A kind of submissive system of four-degree-of-freedom fine motion |
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| CN105643604A CN105643604A (en) | 2016-06-08 |
| CN105643604B true CN105643604B (en) | 2018-06-12 |
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| CN107052736B (en) * | 2016-12-31 | 2019-10-11 | 中国工程物理研究院激光聚变研究中心 | Self-adapting flexible based on mechanism fills calibration system |
| CN107378527B (en) * | 2017-08-18 | 2019-06-11 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN107481767B (en) * | 2017-09-11 | 2023-01-24 | 河南理工大学 | Driving assembly and flexible precision positioning platform |
| CN108000459B (en) * | 2018-01-15 | 2023-08-18 | 大连交通大学 | Six-degree-of-freedom hybrid curved beam space compliant mechanism |
| CN109879243B (en) * | 2019-01-30 | 2020-12-08 | 宁波大学 | Two-translation one-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform |
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| CN112099173B (en) * | 2020-09-23 | 2022-06-14 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN113464780B (en) * | 2021-05-25 | 2022-12-09 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
| CN114473543B (en) * | 2022-04-18 | 2022-07-12 | 北京航空航天大学杭州创新研究院 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
| CN114922904B (en) * | 2022-05-20 | 2024-03-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
| CN117260646B (en) * | 2023-11-20 | 2024-01-30 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
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| CN1255250C (en) * | 2001-09-29 | 2006-05-10 | 四川大学 | New type series-parallel connection jogging robot |
| CN1544210A (en) * | 2003-11-28 | 2004-11-10 | 清华大学 | Rotating parallel robot mechanism with two degrees of freedom |
| CN100345665C (en) * | 2003-12-25 | 2007-10-31 | 电子科技大学 | Precisely micro-operated robot structure |
| CN1306248C (en) * | 2005-08-26 | 2007-03-21 | 哈尔滨工业大学 | Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system |
| CN100484728C (en) * | 2006-12-28 | 2009-05-06 | 山东理工大学 | Three-translation orthogonal decoupling parallel micromotion platform |
| CN101413902B (en) * | 2008-11-20 | 2011-06-01 | 江苏大学 | Full flexible three-translational series-parallel connection fine motion device for in-situ observation of scanning electron microscope |
| CN102592684A (en) * | 2011-12-12 | 2012-07-18 | 江西理工大学 | Spatial three-dimensionally translatory and two-dimensionally rotary full-compliant parallel mechanism |
| CN103568005B (en) * | 2013-11-18 | 2015-07-15 | 山东理工大学 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
| CN104505128B (en) * | 2014-12-26 | 2017-04-26 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN105345760B (en) * | 2015-11-23 | 2017-03-29 | 清华大学 | Big stroke two-dimensional nano servo platform and the measuring method using grating |
| CN205614644U (en) * | 2016-03-25 | 2016-10-05 | 西安电子科技大学 | Four degree of freedom fine motion precision positioning systems |
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