CN114473543B - Six-degree-of-freedom precision motion platform based on flexible mechanism - Google Patents
Six-degree-of-freedom precision motion platform based on flexible mechanism Download PDFInfo
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- CN114473543B CN114473543B CN202210400911.8A CN202210400911A CN114473543B CN 114473543 B CN114473543 B CN 114473543B CN 202210400911 A CN202210400911 A CN 202210400911A CN 114473543 B CN114473543 B CN 114473543B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
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Abstract
The invention provides a six-degree-of-freedom precision motion platform based on a flexible mechanism, and relates to the technical field of multi-degree-of-freedom motion platforms. The X-axis, Y-axis, Z-axis and XY-axis rotating modules are connected in sequence, a Z-axis moving mechanism is arranged in the Z-axis moving module, an XY-axis moving mechanism is arranged in the XY-axis moving module, a Z-axis rotating mechanism is arranged in the Z-axis rotating module, an XY-axis rotating mechanism is arranged in the XY-axis rotating module, and the Z-axis moving mechanism, the XY-axis moving mechanism, the Z-axis rotating mechanism and the XY-axis rotating mechanism are all flexible mechanisms which can simultaneously realize the movement along the X, Y, Z three-axis direction and the rotation around the theta x, theta y and theta Z three-axes, so that the structure design is more reasonable, the assembly is simple, no abrasion caused by gaps exists by using the flexible mechanisms, the motion track is continuous, the controllability is good, the output displacement with higher resolution can be provided, the requirement of a control system is simpler, and the motion control of the actuating mechanism is better realized.
Description
Technical Field
The invention relates to the technical field of multi-degree-of-freedom motion platforms, in particular to a six-degree-of-freedom precise motion platform based on a flexible mechanism.
Background
The multi-degree-of-freedom motion platform, such as a six-degree-of-freedom motion platform, can realize motion output of a plurality of different degrees of freedom, and is widely applied to the fields of automatic machining, mechanical manufacturing and the like.
The applicant finds that at least the following technical problems exist in the prior art: 1) the existing multi-degree-of-freedom electric platform mostly adopts the contact type transmission of the traditional multi-degree-of-freedom mechanical arm, and has the disadvantages of complex structure, high mechanism redundancy and difficult processing and assembly; 2) the existing multi-degree-of-freedom electric platform is abraded due to the existence of gaps, needs lubrication and is difficult to realize continuous high-precision motion control; 3) due to the existence of parasitic errors, if a higher-precision control is achieved, an additional decoupling mechanism is required, so that a corresponding motion control system is complex.
Disclosure of Invention
The invention aims to provide a six-degree-of-freedom precision motion platform based on a flexible mechanism, which aims to solve the technical problems in the prior art. The technical effects that can be produced by the preferred technical scheme in the technical schemes provided by the invention are described in detail in the following.
In order to achieve the purpose, the invention provides the following technical scheme:
a six-degree-of-freedom precision motion platform based on a flexible mechanism comprises a Z-axis moving module, an XY-axis moving module, a Z-axis rotating module and an XY-axis rotating module, wherein a Z-axis moving mechanism is arranged in the Z-axis moving module;
the XY axis moving module is connected to the top of the Z axis moving module, and an XY axis moving mechanism is arranged in the XY axis moving module;
the Z-axis rotating module is connected to the top of the XY-axis moving module, and a Z-axis rotating mechanism is arranged in the Z-axis rotating module;
the XY-axis rotating module is connected to the top of the Z-axis rotating module, and an XY-axis rotating mechanism is arranged in the X-axis XY-axis rotating module;
the Z-axis moving mechanism, the XY-axis moving mechanism, the Z-axis rotating mechanism and the XY-axis rotating mechanism are all flexible mechanisms.
Preferably, the Z-axis moving module further comprises a base, a first driving mechanism, a spring and a platform connecting member;
the bottom of the first driving mechanism is connected with the base and the top of the first driving mechanism is connected with the platform connecting piece;
the number of the Z-axis moving mechanisms is two, the two Z-axis moving mechanisms are symmetrically arranged on two sides of the first driving mechanism, the bottom of each Z-axis moving mechanism is connected with the base, and the top of each Z-axis moving mechanism is connected with the platform connecting piece;
the spring is connected between the Z-axis moving mechanism and the platform connecting piece;
the platform connecting piece is connected with the XY axis moving module.
Preferably, the XY-axis moving module further includes a second driving mechanism mounting member and a second driving mechanism, and the second driving mechanism is fixed to the XY-axis moving mechanism by the second driving mechanism mounting member.
Preferably, the XY-axis moving mechanism is connected to the Z-axis moving module and the Z-axis rotating module, respectively, and is a parallel two-degree-of-freedom moving mechanism, and the two-degree-of-freedom moving mechanism is driven by the two second driving mechanisms, respectively.
Preferably, the Z-axis rotation module further includes a connecting member, a third driving mechanism, and a third driving mechanism mounting member, the bottom of the connecting member is connected to the XY-axis movement module, the top of the connecting member is connected to the Z-axis rotation mechanism, and the third driving mechanism is fixed to the Z-axis rotation mechanism through the third driving mechanism mounting member.
Preferably, the XY-axis rotation module further comprises a fourth driving mechanism, an output rod and a fixed platform;
the fixed platform is connected with the Z-axis rotating module;
the number of the XY-axis rotating mechanisms is two, the two XY-axis rotating mechanisms are in orthogonal symmetrical arrangement, and the top end of each XY-axis rotating mechanism is connected with the fixed platform;
each XY-axis rotating mechanism corresponds to one fourth driving mechanism, and the fourth driving mechanism is fixed at the rotating center of the XY-axis rotating mechanism;
and two ends of the output rod are respectively connected with the output end of the XY-axis rotating mechanism.
Preferably, a first point location, a second point location, a third point location and a fourth point location are arranged in the XY-axis rotating mechanism, and the first point location, the second point location, the third point location and the fourth point location together form a parallelogram.
Preferably, decoupling structures are arranged at the first point and the fourth point.
Preferably, the decoupling structure is a flexible hook hinge.
The beneficial effects of the invention are as follows: the six-degree-of-freedom precision motion platform is formed by combining a Z-axis moving module, an XY-axis moving module, a Z-axis rotating module and an XY-axis rotating module, can simultaneously realize the movement along the direction of three axes X, Y, Z and the rotation around three axes theta x, theta y and theta Z, can avoid the assembly error caused by overlong assembly dimension chains, and enables the rotation centers of three rotational degrees of freedom of theta x, theta y and theta Z to coincide;
the configuration design is more reasonable, the assembly is simple, and the cost is reduced;
by using the flexible mechanism, abrasion caused by gaps does not exist, the motion track is continuous, the controllability is good, and higher-resolution output displacement can be provided;
the control system is required to be simpler, and the motion control of the actuating mechanism is better realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a block diagram of the present invention;
FIG. 2 is an exploded view of the present invention;
FIG. 3 is a block diagram of a Z-axis moving module according to the present invention;
FIG. 4 is a structural view of a Z-axis moving mechanism in the present invention;
FIG. 5 is a structural view of an XY-axis moving block in the present invention;
FIG. 6 is a structural view of an XY-axis moving mechanism in the present invention;
FIG. 7 is a block diagram of a Z-axis rotation module of the present invention;
FIG. 8 is a structural view of a Z-axis rotating mechanism in the present invention;
FIG. 9 is a structural view of an XY-axis rotating block in the present invention;
FIG. 10 is a structural view of an XY-axis rotating mechanism in the present invention;
FIG. 11 is a block diagram of a flexible hooke joint of the present invention;
in the figure, 1, a Z-axis moving module; 11. a base; 12. a Z-axis moving mechanism; 13. a first drive mechanism; 14. a spring; 15. a platform connection;
2. an XY axis moving module; 21. an XY-axis moving mechanism; 211. a first mechanism block; 212. a first reed set; 213. a second mechanism block; 214. a second reed set; 215. a third mechanism block; 216. a third reed set; 217. a fourth reed set; 22. a second drive mechanism mount; 23. a second drive mechanism;
3. a Z-axis rotation module; 31. a Z-axis rotating mechanism; 3101. a first rod body; 3102. a second rod body; 3103. a first reed; 3104. a second reed; 3105. a third reed; 3106. a third rod body; 3107. a fourth rod body; 3108. a fifth rod body; 3109. a fourth reed; 3110. a fifth reed; 3111. a sixth rod body; 32. a connecting member; 33. a third drive mechanism; 34. a third drive mechanism mount;
4. an XY axis rotating module; 41. an XY-axis rotating mechanism; 411. a first point location; 412. a second point location; 413. a third point location; 414. a fourth point location; 415. a fifth point location; 416. a first link; 42. a fourth drive mechanism; 43. an output rod; 44. a fixed platform;
5. a virtual center of rotation.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be described in detail below. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the examples given herein without any inventive step, are within the scope of the present invention.
In the description of the present invention, it is to be understood that the terms "central," "lateral," "length," "width," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "side," and the like, as used herein, are used in the orientation or positional relationship indicated in FIG. 1, merely to facilitate the description of the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood as appropriate to those of ordinary skill in the art.
Referring to fig. 1 to 11, the invention provides a six-degree-of-freedom precision motion platform based on a flexible mechanism, which comprises a Z-axis moving module 1, an XY-axis moving module 2, a Z-axis rotating module 3 and an XY-axis rotating module 4;
the Z-axis moving module 1 can control the movement in the Z-axis direction, and a Z-axis moving mechanism 12 is arranged in the Z-axis moving module 1;
the XY-axis moving module 2 is connected to the top of the Z-axis moving module 1, the XY-axis moving module 2 can control the movement in the X-axis and Y-axis directions, and an XY-axis moving mechanism 21 is arranged in the XY-axis moving module 2;
the Z-axis rotating module 3 is connected to the top of the XY-axis moving module 2, the Z-axis rotating module 3 can control the Z-axis rotation, and a Z-axis rotating mechanism 31 is arranged in the Z-axis rotating module 3;
the XY-axis rotating module 4 is connected to the top of the Z-axis rotating module 3, the XY-axis rotating module 4 can control the X-axis rotation and the Y-axis rotation, an XY-axis rotating mechanism 41 is arranged in the XY-axis rotating module 4, and the output end of the XY-axis rotating module 4 is connected with external modules such as flexible clamping jaws;
the Z-axis moving mechanism 12, the XY-axis moving mechanism 21, the Z-axis rotating mechanism 31 and the XY-axis rotating mechanism 41 are all flexible mechanisms, and all the flexible mechanism bodies are integrally machined and formed by wire cut electrical discharge machining and are made of AL 7075;
the Z-axis moving module 1, the XY-axis moving module 2, the Z-axis rotating module 3 and the XY-axis rotating module 4 are combined together by adopting a series-parallel mixed design to form a six-degree-of-freedom precise moving platform, the six-degree-of-freedom precise moving platform can simultaneously realize movement along the direction of the three axes X, Y, Z and rotation around the three axes theta x, theta y and theta Z, can avoid assembly errors caused by too long assembly dimension chains, and enables the rotation centers of the three rotational degrees of freedom of theta x, theta y and theta Z to coincide;
the six-degree-of-freedom precision motion platform has more reasonable configuration design, simple assembly and reduced cost;
the six-degree-of-freedom precision motion platform is free of abrasion caused by gaps by using a flexible mechanism, is continuous in motion track and good in controllability, and can provide output displacement with higher resolution;
the control system of the six-degree-of-freedom precision motion platform is simpler in requirement, and the motion control of an actuating mechanism is better realized.
The Z-axis moving module 1 comprises a base 11, a Z-axis moving mechanism 12, a first driving mechanism 13, a spring 14 and a platform connecting piece 15, wherein the base 11 is used for bearing the whole six-degree-of-freedom precision motion platform and can be positioned and installed with other equipment;
the first driving mechanism 13 is preferably a voice coil motor, and can meet the requirement of a large stroke on the premise of ensuring thrust, the bottom of the voice coil motor is connected with the base 11, and the top of the voice coil motor is connected with the platform connecting piece 15;
the number of the Z-axis moving mechanisms 12 is two, the Z-axis moving mechanisms are all in a parallelogram flexible guide mechanism configuration, the materials are preferably AL7075, the flexible moving units are specifically reed-type, the two groups of Z-axis moving mechanisms 12 are symmetrically arranged on two sides of the first driving mechanism 13 and have good guiding performance, the bottom of each Z-axis moving mechanism 12 is detachably connected with the base 11 and can be pre-fastened and fixed on the base 11 through two screws, the top of each Z-axis moving mechanism 12 is detachably connected with the platform connecting piece 15, each Z-axis moving mechanism 12 is provided with three upright columns, the top of the middle upright column is pre-fastened and fixed on the platform connecting piece 15 through one screw, the other two upright columns are respectively sleeved with a spring 14, the top of each spring 14 is connected with the bottom of the platform connecting piece 15, and the four springs 14 on the two Z-axis moving mechanisms 12 can provide elastic potential energy to counteract the gravity of each module above, the load of the driving motor is reduced, and the stroke is ensured;
the platform connecting piece 15 is detachably connected with the XY-axis moving module 2, and particularly, the XY-axis moving module 2 can be pre-tightened on four corners of the platform connecting piece 15 through four screws;
voice coil motor in first actuating mechanism 13 passes through drive platform connecting piece 15 and moves along the Z axle, conducts Z axle moving mechanism 12 through the middle standing pillar on the Z axle moving mechanism 12 on, the pulling reed warp to on the reaction acts on platform connecting piece 15, control output displacement, compare in the mode of motor direct drive rigidity mechanism, flexible motion unit motion trail is more continuous, and the controllability is good, can provide the output displacement of higher resolution.
The XY-axis moving module 2 includes an XY-axis moving mechanism 21, a second driving mechanism mount 22, and a second driving mechanism 23;
the XY-axis moving mechanism 21 is detachably connected with the Z-axis moving module 1 and the Z-axis rotating module 3 respectively, four corners of the XY-axis moving mechanism 21 can be pre-tightened on the Z-axis moving module 1 through four screws, and the middle of the XY-axis moving mechanism 21 can be pre-tightened on the Z-axis rotating module 3 through two screws;
the XY axis moving mechanism 21 is a main moving structural part and is integrally machined and formed by electrospark wire-electrode cutting, the material is preferably AL7075, the flexible moving unit is specifically of a reed type and is a parallel two-degree-of-freedom moving mechanism, the parallelogram guide mechanism is symmetrically designed to realize input and output decoupling movement of two degrees of freedom, the movement of the two degrees of freedom is respectively driven by two second driving mechanisms 23, the second driving mechanisms 23 are preferably voice coil motors, and the voice coil motors are fixed on the XY axis moving mechanism 21 through second driving mechanism mounting parts 22;
taking the motion in the X-axis direction as an example, when the voice coil motor drives the XY-axis moving mechanism 21 to move in the X-axis positive direction, the first mechanism block 211 on the XY-axis moving mechanism 21 is pulled to move, because the stiffness of the reed structure in the length axis direction is much greater than the stiffness in the vertical axis direction, the first mechanism block 211 can sequentially drive the first reed set 212, the second mechanism block 213, the second reed set 214, and the third mechanism block 215 to move in the X-axis positive direction, while the third reed set 216 and the fourth reed set 217 can rotate under the traction force of the second mechanism block 213, the tension forces of the third reed set 216 and the fourth reed set 217 react on the second mechanism block 213, and the resultant force formed is 0 in the Y-axis direction and is a small acting force in the X-axis negative direction, therefore, the second mechanism block 213 only moves in the X-axis positive direction without generating the parasitic motion in the Y-axis direction, and the motion in the Y-axis direction is selected to be the same as the motion in the X-axis direction, the flexible mechanism can thus perform the decoupling function.
The Z-axis rotation module 3 includes a Z-axis rotation mechanism 31, a link 32, a third drive mechanism 33, and a third drive mechanism mount 34;
the bottom of the connecting piece 32 is detachably connected with the XY-axis moving module 2, and can be pre-tightened on the XY-axis moving module 2 preferably through two screws, and the top of the connecting piece 32 is detachably connected with the Z-axis rotating mechanism 31, and can be pre-tightened on the Z-axis rotating mechanism 31 preferably through two screws;
the Z-axis rotating mechanism 31 is a main moving structural part and is integrally machined and formed by electrospark wire-electrode cutting, the material is preferably AL7075, the flexible moving unit is specifically in a reed type, and the rotating movement along the Z-axis direction is realized by adopting a parallelogram guide mechanism for symmetrical design;
because the Z-axis rotation center of the whole six-degree-of-freedom precision motion platform needs to fall at a position with a specified distance from the lower surface of an external module such as a flexible clamping jaw and the like and needs to avoid a gap, the Z-axis rotation mechanism 31 needs to adopt the design of a remote motion mechanism, the rotation center of the mechanism falls outside the mechanism, and the rotation center only needs to be coincided with a required target point through subsequent design;
the rotary motion of the Z-axis rotating mechanism 31 is driven by a third driving mechanism 33, the third driving mechanism 33 is preferably a swing angle motor, the swing angle motor can be fixed on the Z-axis rotating mechanism 31 through a third driving mechanism mounting part 34, and the motion stroke of the swing angle motor is related to the structural design;
a first rod body 3101 on the Z-axis rotating mechanism 31 is a fixed end, a stator of the swing angle motor is connected to the first rod body 3101, the first rod body 3101 is connected with a second rod body 3102 through a first reed 3103, a rotor of the swing angle motor is connected with the second rod body 3102, the second reed 3104 is respectively connected with the second rod body 3102 and a third rod body 3106, a third reed 3105 is respectively connected with the second rod body 3102 and a fourth rod body 3107, a fifth rod body 3108 is connected with the third rod body 3106 through a fourth reed 3109, and a fifth rod body 3108 is connected with the fourth rod body 3107 through a fifth reed 3110;
when the swing angle motor drives the second rod body 3102 to rotate around the central point of the first reed 3103, the second reed 3104 and the third reed 3105 can be driven to rotate, and the flange of the second rod body 3102, the third rod body 3106, the fifth rod body 3108 and the fourth rod body 3107 form a parallel four-bar mechanism, so that the rotation angles of the fourth reed 3109 and the fifth reed 3110 are respectively the same as those of the second reed 3104 and the third reed 3105, and since the position of the first reed 3103 is designed in advance, the rotation angle of the first reed 3103 is the rotation angle of the virtual rotation center 5;
the sixth rod body 3111 is additionally constrained and is additionally provided with a group of parallel four-bar linkages, so that the motion range of the linkages is limited, the system rigidity is increased, and accurate control is realized.
The XY-axis rotation module 4 includes an XY-axis rotation mechanism 41, a fourth drive mechanism 42, an output rod 43, and a fixed platform 44;
the fixed platform 44 is detachably connected with the Z-axis rotating module 3, and is preferably connected together through two screws in a pre-tightening way;
the XY-axis rotating mechanisms 41 are integrally machined and molded through wire cut electrical discharge machining, the material is preferably AL7075, the number of the XY-axis rotating mechanisms 41 is two, the two XY-axis rotating mechanisms 41 are orthogonally and symmetrically arranged relative to the virtual rotation center 5, the top end of each XY-axis rotating mechanism 41 is detachably connected with the fixed platform 44, and the XY-axis rotating mechanisms can be preferably connected together through two screws in a pre-tightening mode;
the fourth driving mechanism 42 is preferably a rotating motor, one rotating motor corresponds to each XY-axis rotating mechanism 41, the rotating motor is fixed at the rotating center of the XY-axis rotating mechanism 41 through a connecting piece, and the rotating motor can output rotating torque to the XY-axis rotating mechanism 41;
both ends of the output rod 43 are respectively detachably connected with the output end of an XY-axis rotating mechanism 41, and are preferably connected together through screw pre-tightening;
the output rod 43 can be externally connected with external modules such as a mechanical arm, an electric clamping jaw or a motion platform, and the like, so as to realize transmission around the virtual rotation center 5.
The XY-axis rotating mechanism 41 is a parallelogram mechanism, the first point location 411, the second point location 412, the third point location 413 and the fourth point location 414 in the XY-axis rotating mechanism 41 together form a parallelogram, meanwhile, the fourth point location 414, the third point location 413, the fifth point location 415 and the virtual rotation center 5 also form a parallelogram, so that a planar VC mechanism is formed together, the fifth point location 415 on the output member in the planar VC mechanism circularly moves around the virtual rotation center 5, a virtual constraint relationship exists between the fifth point location 415 and the virtual rotation center 5, the rotation variable of the first point location 411 is controlled by a rotating motor, that is, the rotation variable of the fifth point location 415 to the virtual rotation center 5 can be output, the third point location 413, the fifth point location 415 and the first link 416 also form a parallelogram, the first link 416 is an additional constraint, the purpose is to increase the structural rigidity and realize accurate control.
It is worth noting that due to the parasitic motion characteristic of the flexible mechanism, the two orthogonal XY-axis rotating mechanisms 41 affect each other during the rotating motion, and there is a motion coupling, so a corresponding decoupling structure is designed at the connection between the XY-axis rotating mechanism 41 and the fixed platform 44, that is, at the first point 411 and the fourth point 414, where the decoupling structure is preferably a flexible hooke with intersecting axes, and the flexible hooke utilizes the flexible characteristic of the material, and compared with the conventional U pair, the structure can realize the transmission of the normal rotating variable of the XY-axis rotating mechanism 41 on one hand, and can realize the tangential motion decoupling of the mechanism on the other hand.
The six-degree-of-freedom precision motion platform can be used for carrying out six-degree-of-freedom attitude adjustment on precision components and realizes three-degree-of-freedom linear adjustment by driving a flexible mechanism through a voice coil motor; the flexible mechanism is driven by the swing angle motor to realize three-degree-of-freedom rotation adjustment, the rotation centers are overlapped and are on the surface of a reference plane, precision control can be guaranteed through decoupling and additional constraint design, precision positioning is realized, the precision of a motion control system is greatly improved through the ingenious application of the flexible mechanism, and the complexity of the motion control system is simplified.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. The utility model provides a six degree of freedom precision motion platform based on flexible mechanism which characterized in that, includes that Z axle removes module (1), XY axle removes module (2), Z axle rotates module (3) and XY axle and rotates module (4), wherein: a Z-axis moving mechanism (12) is arranged in the Z-axis moving module (1);
the XY-axis moving module (2) is connected to the top of the Z-axis moving module (1), and an XY-axis moving mechanism (21) is arranged in the XY-axis moving module (2);
the Z-axis rotating module (3) is connected to the top of the XY-axis moving module (2), and a Z-axis rotating mechanism (31) is arranged in the Z-axis rotating module (3);
the XY-axis rotating module (4) is connected to the top of the Z-axis rotating module (3), and an XY-axis rotating mechanism (41) is arranged in the X-axis XY-axis rotating module (4);
the Z-axis moving mechanism (12), the XY-axis moving mechanism (21), the Z-axis rotating mechanism (31) and the XY-axis rotating mechanism (41) are all flexible mechanisms;
the Z-axis rotating module (3) further comprises a connecting piece (32), a third driving mechanism (33) and a third driving mechanism mounting piece (34), the bottom of the connecting piece (32) is connected with the XY-axis moving module (2), the top of the connecting piece (32) is connected with the Z-axis rotating mechanism (31), and the third driving mechanism (33) is fixed on the Z-axis rotating mechanism (31) through the third driving mechanism mounting piece (34);
the first rod body (3101) on the Z-axis rotating mechanism (31) is a fixed end, the third driving mechanism (33) is a swing angle motor, a stator of the swing angle motor is connected on the first rod body (3101), the first rod body (3101) is connected with the second rod body (3102) through a first reed (3103), a rotor of the swing angle motor is connected on the second rod body (3102), a second reed (3104) is respectively connected with the second rod body (3102) and the third rod body (3106), a third reed (3105) is respectively connected with the second rod body (3102) and the fourth rod body (3107), a fifth rod body (3108) is connected with the third rod body (3106) through a fourth reed (3109), and the fifth rod body (3108) is connected with the fourth rod body (3107) through a fifth reed (3110).
2. The flexible mechanism based six degree of freedom precision motion platform of claim 1, wherein: the Z-axis moving module (1) further comprises a base (11), a first driving mechanism (13), a spring (14) and a platform connecting piece (15);
the bottom of the first driving mechanism (13) is connected with the base (11) and the top of the first driving mechanism is connected with the platform connecting piece (15);
the number of the Z-axis moving mechanisms (12) is two, the two Z-axis moving mechanisms (12) are symmetrically arranged on two sides of the first driving mechanism (13), the bottom of each Z-axis moving mechanism (12) is connected with the base (11), and the top of each Z-axis moving mechanism is connected with the platform connecting piece (15);
the spring (14) is connected between the Z-axis moving mechanism (12) and the platform connecting piece (15);
the platform connecting piece (15) is connected with the XY axis moving module (2).
3. The flexible mechanism based six degree of freedom precision motion platform of claim 1, wherein: the XY-axis moving module (2) further comprises a second driving mechanism mounting part (22) and a second driving mechanism (23), and the second driving mechanism (23) is fixed on the XY-axis moving mechanism (21) through the second driving mechanism mounting part (22).
4. The six degree-of-freedom precision motion platform based on flexible mechanism of claim 3, characterized in that: the XY-axis moving mechanism (21) is respectively connected with the Z-axis moving module (1) and the Z-axis rotating module (3), the XY-axis moving mechanism (21) is a parallel two-degree-of-freedom moving mechanism, and the two-degree-of-freedom moving mechanism is respectively driven by two second driving mechanisms (23).
5. The flexible mechanism based six degree of freedom precision motion platform of claim 1, wherein: the XY-axis rotating module (4) further comprises a fourth driving mechanism (42), an output rod (43) and a fixed platform (44);
the fixed platform (44) is connected with the Z-axis rotating module (3);
the number of the XY-axis rotating mechanisms (41) is two, the two XY-axis rotating mechanisms (41) are orthogonally and symmetrically arranged, and the top end of each XY-axis rotating mechanism (41) is connected with the fixed platform (44);
each XY-axis rotating mechanism (41) corresponds to one fourth driving mechanism (42), and the fourth driving mechanism (42) is fixed at the rotating center of the XY-axis rotating mechanism (41);
and two ends of the output rod (43) are respectively connected with the output end of the XY-axis rotating mechanism (41).
6. The flexible mechanism based six degree of freedom precision motion platform of claim 5, wherein: the XY-axis rotating mechanism (41) is provided with a first point position (411), a second point position (412), a third point position (413) and a fourth point position (414), and the first point position (411), the second point position (412), the third point position (413) and the fourth point position (414) jointly form a parallelogram.
7. The flexible mechanism based six degree of freedom precision motion platform of claim 6, wherein: decoupling structures are arranged at the first point position (411) and the fourth point position (414).
8. The flexible mechanism based six degree of freedom precision motion platform of claim 7, wherein: the decoupling structure is a flexible Hooke hinge.
Priority Applications (2)
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| CN202210400911.8A CN114473543B (en) | 2022-04-18 | 2022-04-18 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
| PCT/CN2022/088101 WO2023201612A1 (en) | 2022-04-18 | 2022-04-21 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101726997A (en) * | 2009-12-11 | 2010-06-09 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN103104793A (en) * | 2013-01-25 | 2013-05-15 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4891526A (en) * | 1986-12-29 | 1990-01-02 | Hughes Aircraft Company | X-Y-θ-Z positioning stage |
| CN1233511C (en) * | 2002-05-23 | 2005-12-28 | 河北工业大学 | Recombineable modular 3-6 freedom structure decoupling parallel micro moving robot |
| EP1402992A1 (en) * | 2002-09-27 | 2004-03-31 | Sysmelec SA | High precision apparatus for imposing or for measuring a position or a force |
| CN202428438U (en) * | 2012-01-12 | 2012-09-12 | 燕山大学 | Six-freedom-degree parallel connection micro robot |
| CN104505128B (en) * | 2014-12-26 | 2017-04-26 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN105643604B (en) * | 2016-03-25 | 2018-06-12 | 西安电子科技大学 | A kind of submissive system of four-degree-of-freedom fine motion |
| CN206588347U (en) * | 2017-03-30 | 2017-10-27 | 重庆三峡学院 | A kind of Lathe turning tool adjusting means |
| CN107378527B (en) * | 2017-08-18 | 2019-06-11 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN112873203B (en) * | 2021-01-13 | 2021-10-08 | 安徽大学 | Omnibearing part assembly error self-adaptive compensation system |
| CN113464780B (en) * | 2021-05-25 | 2022-12-09 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101726997A (en) * | 2009-12-11 | 2010-06-09 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN103104793A (en) * | 2013-01-25 | 2013-05-15 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
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