CN104505128B - Two-freedom-degree, large-travel and large-load micro-positioning platform - Google Patents
Two-freedom-degree, large-travel and large-load micro-positioning platform Download PDFInfo
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- CN104505128B CN104505128B CN201410828412.4A CN201410828412A CN104505128B CN 104505128 B CN104505128 B CN 104505128B CN 201410828412 A CN201410828412 A CN 201410828412A CN 104505128 B CN104505128 B CN 104505128B
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Abstract
The invention discloses a two-freedom-degree, large-travel and large-load micro-positioning platform which comprises an upper platform and a lower platform. The lower platform is provided with a base. The upper platform comprises a central movable platform. The movable platform is connected with the base through four flexible standing columns. The four flexible standing columns are distributed at four corners below the movable platform. Each flexible standing column is formed by serially connecting two flexible hook hinges. Each flexible hook hinge is formed by two coplanar circular flexible hinges in a penetration manner. Each of two adjacent movable blocks of four movable blocks is driven by a voice coil motor to move in a translation manner. The two-freedom-degree, large-travel and large-load micro-positioning platform has the advantages that the voice coil motors are used as drivers, and large-travel motion range and submicron-level resolution are provided; the movable platform and the base are connected through the flexible standing columns, and the radial rigidity of the positioning platform is quite large.
Description
Technical field
The invention belongs to precision positioning technology field, particularly a kind of to drive the big of flexure hinge mechanism based on voice coil motor
Stroke big load mini positioning platform, it is adaptable to which MEMS manufacture, biomedical, micro-/precision such as operation, laser scanning of receiving are fixed
Potential field is closed.
Background technology
Current piezoelectric ceramic driven mini positioning platform comparative maturity, be widely used in it is micro-/receive processing and measurement apparatus
In.But existing mini positioning platform working space is micron order, and scanning probe microscopy, scanning beam photoetching etc. need milli
Meter level working space；Existing two degrees of freedom mini positioning platform bearing capacity is very limited, limits the application of mini positioning platform.Pin
To current problem demanding prompt solution, a kind of Precision Position Location System of the big stroke big load of Novel two-freedom-degree is designed with very heavy
The realistic meaning wanted.
The content of the invention
It is micro- that the present invention provides a kind of big stroke big load of two degrees of freedom to solve technical problem present in known technology
Locating platform.
The present invention is adopted the technical scheme that to solve technical problem present in known technology：A kind of two degrees of freedom is big
Stroke big load mini positioning platform, including upper mounting plate and lower platform, the lower platform is provided with pedestal, at four angles of the pedestal
Portion is provided with support block；The upper mounting plate sets up separately in four corners of the moving platform including a moving platform being centrally located and four
Fixed block, by four flexible side chains connections, each described flexible side chain includes for the moving platform and four fixed blocks
One is centrally positioned in the movable block between the two neighboring fixed block and three parallel flexible structures, the movable block with it is described
Moving platform is by a parallel flexible structure connection, and the movable block is each with two fixed blocks for being located at its both sides logical
A parallel flexible structure connection is crossed, the parallel flexible structure is formed by two rectangular flexible hinge parallel connections；Four institutes
State fixed block to be respectively and fixedly connected with four support blocks, the moving platform is connected with the pedestal by four flexible legs, four
The individual flexible legs are distributed in four corners below the moving platform；Each described flexible legs is by two flexible Hooke's hinges
Chain connects to be formed, each described flexible hook hinge by two coplanar circular flexible hinge intersecting shapes into；Four movements
Two adjacent movable blocks in block are respectively driven by a voice coil motor makees translation, and the voice coil motor is fixed on the pedestal
On.
The moving platform adopts " returning " character form structure.
The present invention has the advantages and positive effects that：Using voice coil motor as driver, there is provided big stroke motion
Scope and the other resolution ratio of submicron order；Connect moving platform and pedestal using flexible legs, make the radial rigidity of locating platform non-
Chang great；Additionally, using flexure hinge mechanism as transmission mechanism, having the advantages that without rub, exempt from lubrication, high accuracy；Can be used as
For it is micro-/receive the auxiliary positioning platform of operating system, realize microfeed and precision positioning.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention；
Fig. 2 is the upper mounting plate planar structure schematic diagram of the present invention；
Fig. 3 is the lower platform dimensional structure diagram of the present invention；
Fig. 4 is the flexible hook hinge schematic diagram of the present invention；
Fig. 5 is the flexible stereo structural representation of the present invention.
In figure：1- moving platforms, 2- movable blocks, 3- parallel flexible structures, 4- bolts, 5- upper mounting plates, 6- contiguous blocks, 7- voice coil loudspeaker voice coils
Motor, 8- supports, 9- location holes, 10- lower platforms, 11- fixed blocks, 12- flexible legs, 13- screwed holes, 14- pedestals, 15- is soft
Property hook hinge, 16- support blocks.
Specific embodiment
For the content of the invention, feature and effect of the present invention can be further appreciated that, following examples are hereby enumerated, and coordinate accompanying drawing
Describe in detail as follows：
Refer to Fig. 1～Fig. 5, a kind of big stroke big load mini positioning platform of two degrees of freedom, including upper mounting plate 5 and lower platform
10, the lower platform 10 is provided with pedestal 14, and in four corners of the pedestal 14 support block 16 is provided with；The upper mounting plate 5 includes
One moving platform 1 being centrally located and four fixed blocks 11 set up separately in four corners of the moving platform, the moving platform 1 and four
The individual fixed block 11 is centrally positioned in two neighboring institute by four flexible side chain connections, each described flexible side chain including one
The movable block 2 and three parallel flexible structures 3 between fixed block 11 is stated, the movable block 2 passes through an institute with the moving platform 1
State parallel flexible structure 3 to connect, the movable block 2 is respectively described flat by one with two fixed blocks 11 for being located at its both sides
Row flexible structure 3 connects, and the parallel flexible structure 3 is formed by two rectangular flexible hinge parallel connections.
Four fixed blocks 11 are respectively and fixedly connected with four support blocks 16, and the moving platform 1 is logical with the pedestal 14
Cross four flexible legs 12 to connect, four flexible legs 12 are distributed in four corners below the moving platform 1；Each institute
State flexible legs 12 and connected by two flexible hook hinges 15 and formed, each described flexible hook hinge 15 is by two coplanar circles
Shape flexible hinge intersecting shape into.
The each driving by a voice coil motor 7 of two adjacent movable blocks 2 in four movable blocks 2 makees translation, institute
State voice coil motor 7 to be fixed on the pedestal 14.
In the present embodiment, in order to increase the intrinsic frequency of mini positioning platform, the moving platform adopts " returning " character form structure.
In the present invention, two voice coil motors are separately fixed on two supports 8, and two supports 8 are fixed on pedestal 14,
Voice coil motor 7 and movable block 2 are connected by contiguous block 6.Moving platform 1 is provided with the through hole of connection flexible legs 12, on pedestal 14
It is provided with location hole 9, the screwed hole 13 of mounting bracket 8 of whole locating platform；The upper end of flexible legs 12 is provided with installs moving platform
Screwed hole 13.Support 8 is provided with two for installing the through hole of voice coil motor 7 and the through hole of two fixed supports 8.Contiguous block 6
It is provided with the through hole of connection voice coil motor 7 and movable block 2.Fixed block 11 is provided with the through hole of connection support block 16, for upper flat
Platform 5 and pedestal 14 connect.
The upper mounting plate 5 and the lower platform 10 are fixedly connected to form mini positioning platform body by bolt 4.Flexible Hooke
Hinge 15 has natural two dimension decoupling function, and four flexible legs 12 are parallel on moving platform 1.By computer export control electricity
Signal drives voice coil motor 7 to produce power output according to specified movement locus, by overcoming flexible side chain and flexible hook hinge
15 elastic force, realizes the displacement output of moving platform 1.An input electrical signal of voice coil motor 7 is only given, moving platform 1 is just along one
The motion of dimension direction.By the input electrical signal for controlling two voice coil motors 7, moving platform 1 can realize any form of plane fortune
It is dynamic, such as circus movement.
Although being described to the preferred embodiments of the present invention above in conjunction with accompanying drawing, the invention is not limited in
The specific embodiment stated, above-mentioned specific embodiment is only schematic, be not it is restricted, this area it is common
Technical staff in the case of without departing from present inventive concept and scope of the claimed protection, may be used also under the enlightenment of the present invention
To make many forms, these are belonged within protection scope of the present invention.
Claims (2)
1. the big stroke big load mini positioning platform of a kind of two degrees of freedom, it is characterised in that including upper mounting plate and lower platform, it is described under
Platform is provided with pedestal, and in four corners of the pedestal support block is provided with；The upper mounting plate include one be centrally located it is dynamic flat
Platform and four fixed blocks set up separately in four corners of the upper mounting plate, the moving platform and four fixed blocks are soft by four
Property side chain connection, each described flexible side chain includes that one is centrally positioned in movable block and three between the two neighboring fixed block
Individual parallel flexible structure, the movable block is connected with the moving platform by a parallel flexible structure, the movable block
Be respectively connected by a parallel flexible structure positioned at two fixed blocks of its both sides, the parallel flexible structure by
Two rectangular flexible hinge parallel connections are formed；Four fixed blocks are respectively and fixedly connected with four support blocks, the moving platform with
By the connection of four flexible legs, four flexible legs are distributed in four corners below the moving platform to the pedestal；
Each described flexible legs is connected by two flexible hook hinges and is formed, and each described flexible hook hinge is by two coplanar circles
Shape flexible hinge intersecting shape into；Two adjacent movable blocks in four movable blocks are respectively driven by a voice coil motor to be made
Translation, the voice coil motor is fixed on the pedestal.
2. the big stroke big load mini positioning platform of two degrees of freedom according to claim 1, it is characterised in that the moving platform
Using " returning " character form structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410828412.4A CN104505128B (en) | 2014-12-26 | 2014-12-26 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410828412.4A CN104505128B (en) | 2014-12-26 | 2014-12-26 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104505128A CN104505128A (en) | 2015-04-08 |
| CN104505128B true CN104505128B (en) | 2017-04-26 |
Family
ID=52946869
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410828412.4A Expired - Fee Related CN104505128B (en) | 2014-12-26 | 2014-12-26 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
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| Country | Link |
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| CN (1) | CN104505128B (en) |
Families Citing this family (15)
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| CN105345759B (en) * | 2015-11-23 | 2017-03-29 | 清华大学 | Two-dimensional nano servo platform |
| CN105345760B (en) * | 2015-11-23 | 2017-03-29 | 清华大学 | Big stroke two-dimensional nano servo platform and the measuring method using grating |
| CN105643604B (en) * | 2016-03-25 | 2018-06-12 | 西安电子科技大学 | A kind of submissive system of four-degree-of-freedom fine motion |
| CN105880140B (en) * | 2016-03-31 | 2018-07-27 | 天津大学 | A kind of two dimensional ultrasonic vibration platform based on flexible hinge structure |
| CN106251909B (en) * | 2016-08-19 | 2019-08-02 | 天津大学 | A kind of high-precision, big stroke freedom degree parallel connection mini positioning platform |
| CN106920578B (en) * | 2016-09-22 | 2020-04-14 | 澳门大学 | Two-dimensional constant force mechanism and positioning platform with same |
| CN106195556B (en) * | 2016-09-22 | 2017-12-29 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platforms |
| CN106328213B (en) * | 2016-10-27 | 2019-04-26 | 北京航空航天大学 | The two axis micromotion platforms based on flexible hinge |
| CN106272364A (en) * | 2016-10-31 | 2017-01-04 | 山东大学 | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform |
| CN108776239A (en) * | 2018-03-30 | 2018-11-09 | 天津大学 | A kind of two-freedom probe feed mechanism |
| CN108389603B (en) * | 2018-04-03 | 2023-09-01 | 中国科学院宁波材料技术与工程研究所 | Double-composite flexible parallel four-bar mechanism |
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| CN110211627B (en) * | 2019-05-14 | 2023-12-22 | 江南大学 | High-precision large-stroke large-effective table top space translational precision positioning platform |
| CN112720461B (en) * | 2020-12-09 | 2022-02-18 | 大连理工大学 | Two-degree-of-freedom motion decoupling compliant mechanism capable of realizing high precision, large stroke and high frequency response |
| CN114473543B (en) * | 2022-04-18 | 2022-07-12 | 北京航空航天大学杭州创新研究院 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1693028A (en) * | 2005-05-26 | 2005-11-09 | 天津大学 | Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system |
| JP2007046980A (en) * | 2005-08-09 | 2007-02-22 | Suruga Seiki Kk | X-y stage |
| DE112008001412B4 (en) * | 2007-05-30 | 2015-03-12 | Thk Co., Ltd. | X-Y table actuator |
| JP3144575U (en) * | 2008-06-23 | 2008-09-04 | 精研工業株式会社 | 2 axis plane moving stage |
| CN101858477B (en) * | 2010-04-20 | 2011-09-14 | 郑福胜 | Two-degree-of-freedom high-precision positioning platform |
| CN103021472B (en) * | 2012-12-03 | 2014-09-17 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
| CN103225728B (en) * | 2013-04-24 | 2014-12-24 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN203689921U (en) * | 2014-01-03 | 2014-07-02 | 天津大学 | Large-stroke two-translation and one-rotation precision positioning platform |
| CN103727364B (en) * | 2014-01-03 | 2015-11-18 | 天津大学 | A kind of three freedom precision positioning platform |
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2014
- 2014-12-26 CN CN201410828412.4A patent/CN104505128B/en not_active Expired - Fee Related
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| CN104505128A (en) | 2015-04-08 |
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Granted publication date: 20170426 Termination date: 20201226 |