JP2007046980A - X-y stage - Google Patents

X-y stage Download PDF

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JP2007046980A
JP2007046980A JP2005230749A JP2005230749A JP2007046980A JP 2007046980 A JP2007046980 A JP 2007046980A JP 2005230749 A JP2005230749 A JP 2005230749A JP 2005230749 A JP2005230749 A JP 2005230749A JP 2007046980 A JP2007046980 A JP 2007046980A
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plate
axis
axis direction
guide groove
attached
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Katsuaki Oishi
石 勝 昭 大
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Suruga Seiki Co Ltd
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Suruga Seiki Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-Y stage of a low profile. <P>SOLUTION: This X-Y stage S is equipped with first and second plates 1 and 2 each having a flat surface and provided opposite to each other, a first movement means 3 mounted on the first plate 1 for providing movement in the X axis direction of the first plate 1, a second movement means 5 mounted on the first plate 1 for providing movement in a Y axis direction making a right angle with the X axis direction of the first plate 1, a first movable body 4 mounted on the second plate 2 and moved by the movement means 3, and a second movable body 6 mounted on the second plate 2 and moved by the movement means 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、電子顕微鏡、半導体製造装置、半導体検査装置の試料等を載置し、２次元位置決め装置としてのＸＹステージに係り、特に、ＸＹステージの薄型化を図ることができるＸＹステージに関する。     The present invention relates to an XY stage as a two-dimensional positioning apparatus on which an electron microscope, a semiconductor manufacturing apparatus, a sample of a semiconductor inspection apparatus, and the like are mounted, and more particularly to an XY stage capable of reducing the thickness of the XY stage.

従来、ＸＹステージとしては、たとえば、相対するプレートの一方側のプレートを水平方向に移動するＸステージと、相対するプレートの一方側のプレートを水平方向に移動するＹステージとを有し、ＹステージとＸステージとが水平移動方向に対し互いに直交するようにプレートを重ねると共に、重ねた部位を接続部材、例えば、ネジで接続するようにしていた。     Conventionally, as an XY stage, for example, there is an X stage that moves a plate on one side of the opposite plate in the horizontal direction, and a Y stage that moves a plate on one side of the opposite plate in the horizontal direction. And the X stage are overlapped so that they are orthogonal to each other in the horizontal movement direction, and the overlapped portions are connected by a connecting member, for example, a screw.

しかしながら、ＹステージとＸステージとが水平移動方向に対し互いに直交するようにプレートを重ねているため、プレートを重ねた分、重ねた方向の厚みが増すという問題点が生じた。     However, since the Y stage and the X stage are stacked so that they are orthogonal to each other in the horizontal movement direction, there is a problem that the thickness in the stacked direction increases as the plates are stacked.

本発明は、上記の問題点を除去するようにしたＸＹステージを提供することを目的とする。   It is an object of the present invention to provide an XY stage that eliminates the above-mentioned problems.

本発明のＸＹステージは、平坦な面を有し、相対向して設けられる第１、第２のプレートと、前記第１のプレートに取り付けられ、前記第１のプレートのＸ軸方向に移動させる第１の移動手段と、前記第１のプレートに取り付けられ、前記第１のプレートの前記Ｘ軸方向に直交するＹ軸方向に移動させる第２の移動手段と、前記第１の移動手段により移動し、前記第２のプレートに取り付けられた第１の移動体と、前記第２の移動手段により移動し、前記第２のプレートに取り付けられた第２の移動体とを備えているものである。     The XY stage of the present invention has a flat surface, and is attached to the first and second plates provided opposite to each other, and is attached to the first plate, and is moved in the X-axis direction of the first plate. The first moving means, the second moving means attached to the first plate and moved in the Y-axis direction orthogonal to the X-axis direction of the first plate, and moved by the first moving means The first moving body attached to the second plate and the second moving body moved by the second moving means and attached to the second plate are provided. .

また、請求項２記載のＸＹステージは、請求項１記載のＸＹステージにおいて、第１の移動手段は、第１のモータによって正逆に回転する第１の回転軸を有し、第１の移動体は、前記第１の回転軸に螺合する第１の雌ネジを有する第１の雌ネジ体と、この第１の雌ネジ体に接続されたＸ軸方向に直交するＹ軸方向に移動する第１のＹ軸スライダーと、この第１のＹ軸スライダーをガイドする溝部を備え、第２のプレートに取り付けられた第１のＹ軸案内溝体とを有し、第２の移動手段は、第２のモータによって正逆に回転する第２の回転軸を有し、第２の移動体は、前記第２の回転軸に螺合する第２の雌ネジを有する第２の雌ネジ体と、この第２の雌ネジ体に接続されたＸ軸方向に移動する第１のＸ軸スライダーと、この第１のＸ軸スライダーをガイドする溝部を備え、前記第２のプレートに取り付けられた第１のＸ軸案内溝体とを有するものである。     The XY stage according to claim 2 is the XY stage according to claim 1, wherein the first moving means has a first rotating shaft that is rotated in the forward and reverse directions by the first motor. The body moves in the Y-axis direction orthogonal to the X-axis direction connected to the first female screw body, and a first female screw body having a first female screw threadably engaged with the first rotation shaft A first Y-axis slider that includes a first Y-axis guide groove body that includes a groove portion that guides the first Y-axis slider and is attached to the second plate. And a second female screw body having a second rotating shaft that is rotated forward and backward by a second motor, and the second moving body has a second female screw that is screwed onto the second rotating shaft. A first X-axis slider connected to the second female screw body and moving in the X-axis direction; and the first X-axis slider With a groove for guiding, and has a first X-axis guide groove member attached to the second plate.

また、請求項３記載のＸＹステージは、請求項２記載のＸＹステージにおいて、第１のプレートの面に突出し、前記第１のプレートのＸ軸方向に沿うように取り付けられた第１の凸部材と、この第１の凸部材に摺動する溝部を有し、前記第１の雌ネジ体に接続された第１の凸部材案内溝体と、前記第１のプレートの面に突出し、前記第１のプレートの前記Ｘ軸方向に直交するＹ軸方向に沿うように取り付けられた第２の凸部材と、この第２の凸部材に摺動する溝部を有し、前記第２の雌ネジ体に接続された第２の凸部材案内溝体とを備えているものである。     The XY stage according to claim 3 is the XY stage according to claim 2, wherein the XY stage projects from the surface of the first plate and is attached along the X-axis direction of the first plate. And a first projecting member guide groove body connected to the first female screw body, the first projecting member projecting on the surface of the first plate, A second convex member attached along the Y-axis direction perpendicular to the X-axis direction of the first plate, and a groove portion that slides on the second convex member, and the second female screw body And a second convex member guide groove connected to the.

また、請求項４記載のＸＹステージは、請求項３記載のＸＹステージにおいて、第１のプレートの面に突出し、前記第１のプレートのＸ軸方向に沿うように取り付けられた第３の凸部材と、この第３の凸部材に摺動する溝部を有し、前記第１のプレートのＸ軸方向と直交するＹ軸方向に沿うＹ軸摺動部を有する第３の凸部材案内溝体と、第２のプレートに取り付けられ、前記Ｙ軸摺動部を案内する溝部を有する第２のＹ軸案内溝体と、前記第１のプレートの面に突出し、前記第１のプレートのＸ軸方向と直交するＹ軸方向に沿うように取り付けられた第４の凸部材と、この第４の凸部材に摺動する溝部を有し、前記第１のプレートのＸ軸方向に沿うＸ軸摺動部を有する第４の凸部材案内溝体と、第２のプレートに取り付けられ、前記Ｘ軸摺動部を案内する溝部を有する第２のＸ軸案内溝体とを備えているものである。     The XY stage according to claim 4 is the XY stage according to claim 3, wherein the XY stage protrudes on the surface of the first plate and is attached along the X-axis direction of the first plate. And a third convex member guide groove having a Y-sliding portion along the Y-axis direction perpendicular to the X-axis direction of the first plate, and a groove portion that slides on the third convex member. A second Y-axis guide groove body attached to the second plate and having a groove portion for guiding the Y-axis sliding portion, and projecting on the surface of the first plate, and in the X-axis direction of the first plate X-axis sliding along the X-axis direction of the first plate having a fourth convex member attached so as to be along the Y-axis direction perpendicular to the groove and a groove portion that slides on the fourth convex member A fourth convex member guide groove body having a portion and the X-axis slide attached to the second plate In which and a second X-axis guide groove having a groove for guiding the.

また、請求項５記載のＸＹステージは、請求項４記載のＸＹステージにおいて、第１のＸ軸案内溝体、第２のＸ軸案内溝体、第１のＹ軸案内溝体及び第２のＹ軸案内溝体が、第２のプレートに、平面視四角形状に配置されて取り付けられているものである。     The XY stage according to claim 5 is the XY stage according to claim 4, wherein the first X-axis guide groove, the second X-axis guide groove, the first Y-axis guide groove, and the second The Y-axis guide groove is disposed and attached to the second plate in a square shape in plan view.

請求項１記載のＸＹステージによれば、第１のプレートと第２のプレートとの間に、第１の移動手段、第２の移動手段、第１の移動体及び第２の移動体が配置されているため、薄型化を図ったＸＹステージを得ることができる。     According to the XY stage of the first aspect, the first moving means, the second moving means, the first moving body, and the second moving body are disposed between the first plate and the second plate. Therefore, an XY stage with a reduced thickness can be obtained.

本発明のＸＹステージの一実施例を図面を参照して説明する。
図１乃至図７において、ＸＹステージＳは、平坦な面を有する第１のプレート（ベース）１と、平坦な面を有する第２のプレート（移動台）２とを有し、第１のプレート１と第２のプレート２は相対向して設けられている（図３、図４及び図６）。
なお、第２のプレート２の上面に、例えば、電子顕微鏡、半導体製造装置、半導体検査装置等の試料（図示せず）等が載置されるようになっている。 An embodiment of the XY stage of the present invention will be described with reference to the drawings.
1 to 7, the XY stage S includes a first plate (base) 1 having a flat surface and a second plate (moving table) 2 having a flat surface. 1 and the 2nd plate 2 are provided facing each other (FIG. 3, FIG. 4 and FIG. 6).
For example, a sample (not shown) such as an electron microscope, a semiconductor manufacturing apparatus, or a semiconductor inspection apparatus is placed on the upper surface of the second plate 2.

３は、第１のプレート１のＸ軸方向（図２参照）に移動させる第１の移動手段で、第１の移動手段３は、第１のプレート１に取り付けられている。
４は、第１の移動手段３により移動し、第２のプレート２に取り付けられた第１の移動体である。
第１の移動手段３は、例えば、第１のモータ３１によって正逆に回転する第１の回転軸３２を有している。３３は第１の回転軸３２を回転自在に支持する支持部材である。
第１の移動体４は、例えば、第１の回転軸３２に螺合する第１の雌ネジ４１ａを有する第１の雌ネジ体４１と、この第１の雌ネジ体４１に接続（接続は、例えば、ビス４２ｖで行う。）されたＸ軸方向（図２参照）に直交するＹ軸方向（図２参照）に移動する第１のＹ軸スライダー４２と、この第１のＹ軸スライダー４２をガイドする溝部４３ａ（図６参照）を備え、第２のプレート２に取り付け（取り付けは、例えば、ビス４３ｖで行う。）られた第１のＹ軸案内溝体４３とを有している。 Reference numeral 3 denotes first moving means for moving the first plate 1 in the X-axis direction (see FIG. 2). The first moving means 3 is attached to the first plate 1.
Reference numeral 4 denotes a first moving body that is moved by the first moving means 3 and attached to the second plate 2.
The first moving means 3 has, for example, a first rotating shaft 32 that is rotated forward and backward by a first motor 31. Reference numeral 33 denotes a support member that rotatably supports the first rotation shaft 32.
The first moving body 4 is connected to, for example, a first female screw body 41 having a first female screw 41a screwed to the first rotating shaft 32 (the connection is connected to the first female screw body 41). The first Y-axis slider 42 moves in the Y-axis direction (see FIG. 2) perpendicular to the X-axis direction (see FIG. 2). And a first Y-axis guide groove body 43 attached to the second plate 2 (attachment is performed, for example, with a screw 43v).

５は、第１のプレート１の前記Ｘ軸方向（図２参照）に直交するＹ軸方向（図２参照）に移動させる第２の移動手段で、第２の移動手段５は、第１のプレート１に取り付けられている。なお、第２の移動手段５はＹ軸方向に移動させ、第１の移動手段３はＸ軸方向に移動させる、移動する方向を除けば、同じ機構となっている。
６は、第２の移動手段５により移動し、第２のプレート２に取り付けられた第２の移動体である。
第２の移動手段５は、例えば、図２に示すように、第２のモータ５１によって正逆に回転する第２の回転軸５２を有している。５３は第２の回転軸５２を回転自在に支持する支持部材である。
第２の移動体６は、例えば、第２の回転軸５２に螺合する第２の雌ネジ６１ａを有する第２の雌ネジ体６１と、この第２の雌ネジ体６１に接続（接続は、例えば、ビス６２ｖで行う。）されたＸ軸方向に移動する第１のＸ軸スライダー６２と、この第１のＸ軸スライダー６２をガイドする溝部６３ａ（図３参照）を備え、第２のプレート２に取り付け（取り付けは、例えば、ビス６３ｖで行う。）られた第１のＸ軸案内溝体６３とを有している。 Reference numeral 5 denotes second moving means for moving the first plate 1 in the Y-axis direction (see FIG. 2) perpendicular to the X-axis direction (see FIG. 2). The second moving means 5 includes the first plate 1 Attached to the plate 1. The second moving means 5 is moved in the Y-axis direction, and the first moving means 3 is moved in the X-axis direction, except for the moving direction.
Reference numeral 6 denotes a second moving body which is moved by the second moving means 5 and attached to the second plate 2.
For example, as shown in FIG. 2, the second moving unit 5 includes a second rotating shaft 52 that rotates forward and backward by a second motor 51. Reference numeral 53 denotes a support member that rotatably supports the second rotary shaft 52.
For example, the second moving body 6 is connected to the second female screw body 61 having a second female screw 61a that is screwed to the second rotating shaft 52 (the connection is connected to the second female screw body 61). The first X-axis slider 62 that moves in the X-axis direction and the groove 63a (see FIG. 3) that guides the first X-axis slider 62 are provided, It has the 1st X-axis guide groove body 63 attached to the plate 2 (it attaches with the screw 63v, for example).

７は、第１のプレート１の面に突出し、第１のプレート１のＸ軸方向に沿うように取り付けられた第１の凸部材で、この第１の凸部材７は第１の凸部材案内溝体８を案内するようになっている。第１の凸部材案内溝体８は、第１の凸部材１７に摺動する溝部８ａを有し、第１の雌ネジ体３４に接続されている。
９は、第１のプレート１の面に突出し、第１のプレート１の前記Ｘ軸方向に直交するＹ軸方向に沿うように取り付けられた第２の凸部材で、この第２の凸部材９は第２の凸部材案内溝体１０を案内するようになっている。この第２の凸部材案内溝体１０は、第２の凸部材９に摺動する溝部を有し、第２の雌ネジ体６１ａに接続されている。 Reference numeral 7 denotes a first convex member that protrudes from the surface of the first plate 1 and is attached along the X-axis direction of the first plate 1. The first convex member 7 is a first convex member guide. The groove body 8 is guided. The first convex member guide groove body 8 has a groove portion 8 a that slides on the first convex member 17, and is connected to the first female screw body 34.
Reference numeral 9 denotes a second convex member that protrudes from the surface of the first plate 1 and is attached along the Y-axis direction orthogonal to the X-axis direction of the first plate 1. Guides the second convex member guide groove 10. The second convex member guide groove body 10 has a groove portion that slides on the second convex member 9, and is connected to the second female screw body 61a.

また、図１、図２及び図４に示す１１は、第１のプレート１の面に突出し、第１のプレート１のＸ軸方向に沿うように取り付けられた第３の凸部材で、１２は、第３の凸部材１１に摺動する溝部１２ａを有し、第１のプレート１のＸ軸方向と直交するＹ軸方向に沿うＹ軸摺動部１２ｂを有する第３の凸部材案内溝体で、１３は、第２のプレート２に取り付けられ、Ｙ軸摺動部１２ｂを案内する溝部１３ａを有する第２のＹ軸案内溝体である。     In addition, 11 shown in FIGS. 1, 2 and 4 is a third projecting member that protrudes from the surface of the first plate 1 and is attached along the X-axis direction of the first plate 1. The third convex member guide groove body has a groove portion 12a that slides on the third convex member 11, and has a Y-axis sliding portion 12b that extends along the Y-axis direction orthogonal to the X-axis direction of the first plate 1. Reference numeral 13 denotes a second Y-axis guide groove body that is attached to the second plate 2 and has a groove portion 13a that guides the Y-axis sliding portion 12b.

また、図１、図２及び図４に示す１４は、第１のプレート１の面に突出し、第１のプレート１のＸ軸方向と直交するＹ軸方向に沿うように取り付けられた第４の凸部材で、１５は、第４の凸部材１４に摺動する溝部１５ａを有し、第１のプレート１のＸ軸方向に沿うＸ軸摺動部１５ｂを有する第４の凸部材案内溝体で、１６は、第２のプレート２に取り付けられ、Ｘ軸摺動部１５ｂを案内する溝部１６ａを有する第２のＸ軸案内溝体である。
なお、第２のＸ軸案内溝体１６、第２のＹ軸案内溝体１３、第１のＹ軸案内溝体４３及び第１のＸ軸案内溝体６３は、第２のプレート２に、平面視四角形状に配置されて取り付けられている
。 Moreover, 14 shown in FIG.1, FIG2 and FIG.4 protrudes on the surface of the 1st plate 1, and is attached so that the Y-axis direction orthogonal to the X-axis direction of the 1st plate 1 may be followed. A convex member 15 has a groove 15 a that slides on the fourth convex member 14, and a fourth convex member guide groove body that has an X-axis sliding portion 15 b along the X-axis direction of the first plate 1. Reference numeral 16 denotes a second X-axis guide groove body which is attached to the second plate 2 and has a groove portion 16a for guiding the X-axis sliding portion 15b.
The second X-axis guide groove body 16, the second Y-axis guide groove body 13, the first Y-axis guide groove body 43, and the first X-axis guide groove body 63 are formed on the second plate 2. Arranged and attached in a square shape in plan view.

従って、第１のモータ３１を正（時計回り）回転すると、第１の雌ネジ４１ａを介して第１の雌ネジ体４１と一体となって第１の凸部材案内溝体８、第１のＹ軸スライダー４２、第１のＹ軸案内溝体４３が図２に示すＸ軸方向へ移動すると共に、第３の凸部材案内溝体１２が第３の凸部材１１に沿って、第４の凸部材案内溝体１５が第２のＹ軸案内溝体１６に沿って、第１のＸ軸スライダー６２が第１のＸ軸案内溝体６３に沿って、図２に示すＸ軸方向へ移動することとなる。
又、第２のモータ５１を正（時計回り）回転すると、第２の雌ネジ６１ａを介して第２の雌ネジ体６１と一体となって第２の凸部材案内溝体１０、第１のＸ軸スライダー６２、第１のＸ軸案内溝体６３が図２に示すＹ軸方向へ移動すると共に、第３の凸部材案内溝体１２が第２のＹ軸案内溝体１３に沿って、第４の凸部材１４が第２のＹ軸案内溝体１６に沿って、第１のＹ軸スライダー４２が第１のＹ軸案内溝体４３に沿って、図２に示すＹ軸方向へ移動することとなる。 Accordingly, when the first motor 31 is rotated in the positive (clockwise) direction, the first convex member guide groove body 8 and the first convex body 8 are integrated with the first female screw body 41 via the first female screw 41a. The Y-axis slider 42 and the first Y-axis guide groove body 43 move in the X-axis direction shown in FIG. 2, and the third convex member guide groove body 12 extends along the third convex member 11 to the fourth axis. The convex member guide groove 15 moves along the second Y-axis guide groove 16 and the first X-axis slider 62 moves along the first X-axis guide groove 63 in the X-axis direction shown in FIG. Will be.
Further, when the second motor 51 is rotated positively (clockwise), the second convex member guide groove body 10 is integrated with the second female screw body 61 via the second female screw 61a. The X-axis slider 62 and the first X-axis guide groove 63 move in the Y-axis direction shown in FIG. 2, and the third convex member guide groove 12 along the second Y-axis guide groove 13, The fourth convex member 14 moves along the second Y-axis guide groove body 16, and the first Y-axis slider 42 moves along the first Y-axis guide groove body 43 in the Y-axis direction shown in FIG. Will be.

本実施例のＸＹステージＳによれば、第１のプレート１と第２のプレート２との間に、第１の移動手段３、第２の移動手段５、第１の移動体４及び第２の移動体６が配置されているため、薄型化を図ったＸＹステージＳを得ることができる。     According to the XY stage S of the present embodiment, the first moving means 3, the second moving means 5, the first moving body 4, and the second moving body are provided between the first plate 1 and the second plate 2. Since the movable body 6 is arranged, an XY stage S with a reduced thickness can be obtained.

図１は、本発明の一実施例のＸＹステージの概略的平面図である。FIG. 1 is a schematic plan view of an XY stage according to an embodiment of the present invention. 図２は、図１のＸＹステージから第１のプレートを取り除いた状態の概略的平面図である。FIG. 2 is a schematic plan view of the XY stage of FIG. 1 with the first plate removed. 図３は、図１の１−１線による概略的断面図である。FIG. 3 is a schematic cross-sectional view taken along line 1-1 of FIG. 図４は、図２の２−２線による概略的断面図である。4 is a schematic cross-sectional view taken along line 2-2 of FIG. 図５は、図２の一部を拡大して示す概略的一部拡大平面図である。FIG. 5 is a schematic partially enlarged plan view showing a part of FIG. 2 in an enlarged manner. 図６は、図５の３−３線による概略的断面図である。6 is a schematic cross-sectional view taken along line 3-3 in FIG. 図７は、図２の矢印Ａ方向から見た概略的斜視図である。FIG. 7 is a schematic perspective view seen from the direction of arrow A in FIG.

符号の説明Explanation of symbols

Ｓ ＸＹステージ
１ 第１のプレート
２ 第２のプレート
３ 第１の移動手段
４ 第１の移動体
５ 第２の移動手段
６ 第２の移動体 S XY stage 1 1st plate 2 2nd plate 3 1st moving means 4 1st moving body 5 2nd moving means 6 2nd moving body

Claims (5)

平坦な面を有し、相対向して設けられる第１、第２のプレートと、
前記第１のプレートに取り付けられ、前記第１のプレートのＸ軸方向に移動させる第１の移動手段と、
前記第１のプレートに取り付けられ、前記第１のプレートの前記Ｘ軸方向に直交するＹ軸方向に移動させる第２の移動手段と、
前記第１の移動手段により移動し、前記第２のプレートに取り付けられた第１の移動体と、
前記第２の移動手段により移動し、前記第２のプレートに取り付けられた第２の移動体と、
を備えていることを特徴とするＸＹステージ。 First and second plates having flat surfaces and provided opposite to each other;
First moving means attached to the first plate and moving in the X-axis direction of the first plate;
Second moving means attached to the first plate and moving in the Y-axis direction perpendicular to the X-axis direction of the first plate;
A first moving body moved by the first moving means and attached to the second plate;
A second moving body moved by the second moving means and attached to the second plate;
An XY stage characterized by comprising: 第１の移動手段は、第１のモータによって正逆に回転する第１の回転軸を有し、
第１の移動体は、前記第１の回転軸に螺合する第１の雌ネジ
を有する第１の雌ネジ体と、この第１の雌ネジ体に接続されたＸ軸方向に直交するＹ軸方向に移動する第１のＹ軸スライダーと、この第１のＹ軸スライダーをガイドする溝部を備え、第２のプレートに取り付けられた第１のＹ軸案内溝体とを有し、
第２の移動手段は、第２のモータによって正逆に回転する第２の回転軸を有し、
第２の移動体は、前記第２の回転軸に螺合する第２の雌ネジ
を有する第２の雌ネジ体と、この第２の雌ネジ体に接続されたＸ軸方向に移動する第１のＸ軸スライダーと、この第１のＸ軸スライダーをガイドする溝部を備え、前記第２のプレートに取り付けられた第１のＸ軸案内溝体とを有する
ことを特徴とする請求項１記載のＸＹステージ。 The first moving means has a first rotating shaft that rotates forward and backward by a first motor,
The first moving body includes a first female screw body having a first female screw threadably engaged with the first rotating shaft, and a Y axis orthogonal to the X-axis direction connected to the first female screw body. A first Y-axis slider that moves in the axial direction, and a first Y-axis guide groove that includes a groove portion that guides the first Y-axis slider and is attached to the second plate;
The second moving means has a second rotating shaft that is rotated forward and backward by the second motor,
The second moving body includes a second female screw body having a second female screw threadably engaged with the second rotating shaft, and a second moving body that moves in the X-axis direction connected to the second female screw body. The X-axis slider of 1 and the groove part which guides this 1st X-axis slider, It has the 1st X-axis guide groove body attached to the said 2nd plate, The 1st X-axis slider is characterized by the above-mentioned. XY stage. 第１のプレートの面に突出し、前記第１のプレートのＸ軸方向に沿うように取り付けられた第１の凸部材と、
この第１の凸部材に摺動する溝部を有し、前記第１の雌ネジ体に接続された第１の凸部材案内溝体と、
前記第１のプレートの面に突出し、前記第１のプレートの前記Ｘ軸方向に直交するＹ軸方向に沿うように取り付けられた第２の凸部材と、
この第２の凸部材に摺動する溝部を有し、前記第２の雌ネジ体に接続された第２の凸部材案内溝体と、
を備えていることを特徴とする請求項２記載のＸＹステージ。 A first convex member that protrudes from the surface of the first plate and is attached along the X-axis direction of the first plate;
A first convex member guide groove having a groove that slides on the first convex member and connected to the first female screw;
A second convex member that protrudes from the surface of the first plate and is attached along the Y-axis direction perpendicular to the X-axis direction of the first plate;
A second convex member guide groove having a groove that slides on the second convex member and connected to the second female screw;
The XY stage according to claim 2, further comprising: 第１のプレートの面に突出し、前記第１のプレートのＸ軸方向に沿うように取り付けられた第３の凸部材と、
この第３の凸部材に摺動する溝部を有し、前記第１のプレートのＸ軸方向と直交するＹ軸方向に沿うＹ軸摺動部を有する第３の凸部材案内溝体と、
第２のプレートに取り付けられ、前記Ｙ軸摺動部を案内する溝部を有する第２のＹ軸案内溝体と、
前記第１のプレートの面に突出し、前記第１のプレートのＸ軸方向と直交するＹ軸方向に沿うように取り付けられた第４の凸部材と、
この第４の凸部材に摺動する溝部を有し、前記第１のプレートのＸ軸方向に沿うＸ軸摺動部を有する第４の凸部材案内溝体と、
第２のプレートに取り付けられ、前記Ｘ軸摺動部を案内する溝部を有する第２のＸ軸案内溝体と、
を備えていることを特徴とする請求項３記載のＸＹステージ。 A third projecting member protruding on the surface of the first plate and attached along the X-axis direction of the first plate;
A third convex member guide groove body having a groove portion sliding on the third convex member and having a Y-axis sliding portion along the Y-axis direction orthogonal to the X-axis direction of the first plate;
A second Y-axis guide groove body attached to the second plate and having a groove portion for guiding the Y-axis sliding portion;
A fourth projecting member protruding on the surface of the first plate and attached along the Y-axis direction perpendicular to the X-axis direction of the first plate;
A fourth convex member guide groove body having a groove portion sliding on the fourth convex member and having an X-axis sliding portion along the X-axis direction of the first plate;
A second X-axis guide groove body attached to a second plate and having a groove portion for guiding the X-axis sliding portion;
The XY stage according to claim 3, further comprising: 第１のＸ軸案内溝体、第２のＸ軸案内溝体、第１のＹ軸案内溝体及び第２のＹ軸案内溝体が、第２のプレートに、平面視四角形状に配置されて取り付けられている
ことを特徴とする請求項４記載のＸＹステージ。 The first X-axis guide groove body, the second X-axis guide groove body, the first Y-axis guide groove body, and the second Y-axis guide groove body are arranged on the second plate in a square shape in plan view. The XY stage according to claim 4, wherein the XY stage is attached.
JP2005230749A 2005-08-09 2005-08-09 X-y stage Pending JP2007046980A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104505128A (en) * 2014-12-26 2015-04-08 天津大学 Two-freedom-degree, large-travel and large-load micro-positioning platform

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11245128A (en) * 1998-02-26 1999-09-14 Thk Co Ltd Mechanism for guiding parallel movement of two shafts and turning of one shaft, and table device provided with two parallel shafts and one turning shaft using this mechanism
JP2002292533A (en) * 2001-03-30 2002-10-08 Minolta Co Ltd Stage apparatus and method of using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11245128A (en) * 1998-02-26 1999-09-14 Thk Co Ltd Mechanism for guiding parallel movement of two shafts and turning of one shaft, and table device provided with two parallel shafts and one turning shaft using this mechanism
JP2002292533A (en) * 2001-03-30 2002-10-08 Minolta Co Ltd Stage apparatus and method of using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104505128A (en) * 2014-12-26 2015-04-08 天津大学 Two-freedom-degree, large-travel and large-load micro-positioning platform

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