CN106195556B - A kind of XY θ plane three-freedom precision positioning platforms - Google Patents
A kind of XY θ plane three-freedom precision positioning platforms Download PDFInfo
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- CN106195556B CN106195556B CN201610839891.9A CN201610839891A CN106195556B CN 106195556 B CN106195556 B CN 106195556B CN 201610839891 A CN201610839891 A CN 201610839891A CN 106195556 B CN106195556 B CN 106195556B
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- 230000007246 mechanism Effects 0.000 claims abstract description 131
- 238000006073 displacement reaction Methods 0.000 claims abstract description 130
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- 239000010432 diamond Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims 1
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- 238000005516 engineering process Methods 0.000 description 5
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/048—Allowing translations adapted to forward-backward translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of XY θ plane three-freedom precision positioning platforms, including piezoelectric ceramics, compound rhombus displacement amplifying mechanism, bridge type displacement amplifying mechanism, motion platform and fixed frame, piezoelectric ceramics is arranged in compound rhombus displacement amplifying mechanism, four compound rhombus displacement amplifying mechanisms be arranged in parallel and respectively positioned at the corners of fixed frame, motion platform is located at the center of fixed frame, and the two sides of motion platform are connected with the compound rhombus displacement amplifying mechanism positioned at motion platform both sides respectively by two bridge type displacement amplifying mechanisms.The combination that the present invention passes through four compound rhombus displacement amplifying mechanisms and two bridge type displacement amplifying mechanisms, the platform is set to possess two translations and a rotational freedom, and realize that three planar degrees of freedom are moved by two-stage displacement equations and different drivings combination, make its simple in construction and compact, and output displacement is big.
Description
Technical field
The present invention relates to precision actuation and control field, more particularly to a kind of XY θ plane three-freedom precision positioning platforms
And implementation method.
Background technology
In recent years, with the appearance of the development of precision machinery technology, especially nanometer technique, science and technology is formal to be entered
" sub-micron-nanometer " epoch.The electronics such as ESEM, optical instrument, Precision Machining, optics, machinery and space industry, compel
Be essential will in high precision, the locating platform of high-resolution, high-speed；And at present to the demand of multiple degrees of freedom precisely locating platform more
It is urgent to compel.For example, the ultrahigh resolution of astronomical telescope and high accuracy, which rotate, needs multivariant locating platform；Precision optics
The processing and assembling of instrument need multivariant precisely locating platform；Medical surgery rely increasingly upoies multiple degrees of freedom essence
Close operational tip executing agency, etc..
At present, known precisely locating platform mainly has three types, and the first kind is mechanical transmission-type locating platform, such as
Screw mechanism, leverage, voussoir cam mechanism etc. and combinations thereof mechanism.Maximum excellent of mechanical transmission-type locating platform
Point is stroke greatly and output rigidity is big, but the shortcomings of mechanical clearance and fretting wear be present, the autokinesis of mechanism and fixed
Position precision is difficult to increase substantially；Second class is to realize precision positioning by linear electric motors or ultrasonic motor etc., and positioning precision obtains
Raising to a certain extent and there is good frequency response, but system is relative complex, in particular for how free
Locating platform is spent, it is necessary to design multiple bulky electric actuators；3rd class is using piezoelectric ceramics, magnetostriction etc.
Intellectual material come realize precision actuation with positioning.
Because piezoelectric ceramics has the advantages that high-resolution, high rigidity and output are big, it is widely used in precision actuation and control
System, but the output displacement of piezoelectric ceramics is minimum, even stacked piezoelectric ceramics, its output displacement is typically also no more than itself
The 0.2% of size.Therefore, the precisely locating platform of known most of Piezoelectric Ceramics is to use piezoelectric ceramics and flexibility
Hinge forms compliant mechanism, realizes high-precision displacement and power output.Its free degree of currently known precisely locating platform is more
For two-freedom, it can also realize that the displacement more than two frees degree exports by the mechanism design of complexity.It is but output displacement, defeated
Go out it is always constrained each other between rigidity and platform intrinsic frequency, to realize larger displacement output must using lose intrinsic frequency as
Cost.It is accurate fixed to be realized in Patent No. CN104505127 patent using Piezoelectric Ceramic flexibility displacement amplifying mechanism
Position；In Patent No. CN104467525 patent precision positioning is realized using Piezoelectric Ceramic ellipse enlarger.So
And these structures are typically complex, linkage editor is more, causes assembly precision etc. to have an impact positioning；In addition, these are accurate
The intrinsic frequency of locating platform is not general high, is difficult to realize the precise motion of thousand hertz.
The content of the invention
The purpose of the present invention is that to solve the above problems and provides a kind of XY θ plane three-freedom degree precisions positioning and put down
Platform and implementation method.
The present invention is achieved through the following technical solutions above-mentioned purpose：
A kind of XY θ plane three-freedom precision positioning platforms, including piezoelectric ceramics, compound rhombus displacement amplifying mechanism, bridge
Type displacement amplifying mechanism, motion platform and fixed frame, the piezoelectric ceramics are arranged on the compound rhombus displacement amplifying mechanism
Interior, four compound rhombus displacement amplifying mechanisms be arranged in parallel and respectively positioned at the corner of the fixed frame, the fortune
Moving platform is located at the center of the fixed frame, and the two sides of the motion platform pass through two bridge type displacement equations machines
Structure is connected with the compound rhombus displacement amplifying mechanism positioned at the motion platform both sides respectively.
Specifically, the compound rhombus displacement amplifying mechanism includes four hypotenuse flexible beams, rigid upper surface, rigid lower end
Face, output end face and fixed end face, the output end face and the fixed end surface symmetric are set, the rigid upper surface and described
Rigid lower surface is symmetrical arranged, and the line of the output end face and the fixed end face and the rigid upper surface with it is described just
Line between property lower surface is vertical, four hypotenuse flexible beams successively by the rigid upper surface, the rigid lower surface,
The output end face connects with the fixed end face and forms diamond structure, the fixed end face and the inner side of the fixed frame
Face is fixedly connected.
Preferably, four compound rhombus displacement amplifying mechanisms are divided into two groups, including the first compound rhombus displacement equations
Mechanism group and the second compound rhombus displacement amplifying mechanism group, the first compound rhombus displacement amplifying mechanism group or described second multiple
The two compound rhombus displacement amplifying mechanisms closed in rhombus displacement amplifying mechanism group are located at same straight line respectively, and described the
It is flat that one compound rhombus displacement amplifying mechanism group and the second compound rhombus displacement amplifying mechanism group are symmetricly set on the motion
The first side and the second side of platform.
Specifically, the hypotenuse flexible beam includes multiple flexible arms be arrangeding in parallel, and multiple flexible arms are stacked,
And it is provided with gap between adjacent flexible arm.
Specifically, two bridge type displacement amplifying mechanisms are separately positioned on the first side and second of the motion platform
Side, the bridge type displacement amplifying mechanism include two flexible beams, and the rigid inputs of two flexible beams is respectively with described
Two output ends of the one compound compound rhombus displacement amplifying mechanism group of rhombus displacement amplifying mechanism group/the second are rigidly connected, two
The rigid output end of the flexible beam is fixedly connected with first side/second side of the motion platform respectively.
Specifically, the distance between two output ends of the described first compound rhombus displacement amplifying mechanism are more than the motion
The length of the first side of platform, two flexible beams are obliquely installed.
Further, the locating platform also includes guiding mechanism, four guiding mechanisms with the described first compound water chestnut
Line between shape displacement amplifying mechanism group and the second compound rhombus displacement amplifying mechanism group is vertically arranged, the Guiding machine
The first end of structure is fixedly connected with the fixed frame, the second end of four guiding mechanisms respectively with four compound water chestnuts
The output end of shape displacement amplifying mechanism displacement amplifying mechanism is rigidly connected.
Preferably, the hypotenuse flexible beam of the compound rhombus displacement amplifying mechanism and the rigid upper surface and described
The junction of rigid lower surface, the flexible beam of the bridge type displacement amplifying mechanism and the junction of the motion platform are adopted
Connected with flexible hinge.
Specifically, the corner of the fixed frame is provided with fixing screwed hole, and test specimen peace is provided with the motion platform
Fill hole.
The beneficial effects of the present invention are：
A kind of XY θ plane three-freedom precision positioning platforms of the present invention pass through four compound rhombus displacement amplifying mechanisms and two
The combination of individual bridge type displacement amplifying mechanism, the platform is possessed two translations and a rotational freedom, and pass through two-stage displacement
Amplification and different drivings are combined to realize three planar degrees of freedom motions, make its simple in construction and compact, and output displacement
Greatly, the design feature additionally, due to the bridge shape displacement amplifying mechanism and the guiding mechanism of design, whole precisely locating platform
Intrinsic frequency is high and output rigidity is big, it is possible to achieve the high precision displacement output of big stroke and high bandwidth.
Brief description of the drawings
Fig. 1 is a kind of dimensional structure diagram of XY θ plane three-freedom precision positioning platforms of the present invention；
Fig. 2 is a kind of top view of XY θ plane three-freedom precision positioning platforms of the present invention；
Fig. 3 is the principle that a kind of XY θ plane three-freedom precision positioning platforms of the present invention produce X-direction linear running
Schematic diagram；
Fig. 4 is the principle that a kind of XY θ plane three-freedom precision positioning platforms of the present invention produce Y-direction linear running
Schematic diagram；
Fig. 5 is that a kind of XY θ plane three-freedom precision positioning platforms of the present invention produce the principle signal for rotating operation
Figure.
In figure：1- piezoelectric ceramics, the compound rhombus displacement amplifying mechanisms of 2-, 3- bridge shape displacement amplifying mechanisms, 4- motion platforms,
5- fixed frames, 6- fixing screwed holes, 7- hypotenuse flexible beams, 8- gaps, 9- rigidity inputs, 10- flexible beams, 11- are rigidly defeated
Go out end, 12- test specimen mounting holes, 13- guiding mechanisms.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings：
As depicted in figs. 1 and 2, a kind of XY θ plane three-freedom precision positioning platforms of the present invention, including it is piezoelectric ceramics 1, multiple
Rhombus displacement amplifying mechanism 2, bridge type displacement amplifying mechanism 3, motion platform 4 and fixed frame 5 are closed, piezoelectric ceramics 1 is arranged on multiple
Close in rhombus displacement amplifying mechanism 2, four compound rhombus displacement amplifying mechanisms 2 be arranged in parallel and are located at fixed frame 5 respectively
Corner, motion platform 4 is located at the center of fixed frame 5, and the two sides of motion platform 4 pass through two bridge type displacement equations machines
Structure 3 is connected with the compound rhombus displacement amplifying mechanism 2 positioned at the both sides of motion platform 4 respectively.
Compound rhombus displacement amplifying mechanism 2 includes four hypotenuse flexible beams 7, rigid upper surface, rigid lower surface, output end
Face and fixed end face, output end face and fixed end surface symmetric are set, and rigid upper surface and rigid lower surface are symmetrical arranged, and are exported
The line of end face and fixed end face is vertical with the line between rigid upper surface and rigid lower surface, four hypotenuse flexible beams 7 according to
It is secondary that rigid upper surface, rigid lower surface, output end face are connected with fixed end face and form diamond structure, fixed end face and fixation
The medial surface of framework 5 is fixedly connected, and hypotenuse flexible beam 7 includes multiple flexible arms be arrangeding in parallel, and multiple flexible arms are stacked,
And gap 8 is provided between adjacent flexible arm.
I.e. compound rhombus displacement amplifying mechanism 2 be based on the known improved elastic mechanism of rhombus displacement amplifying mechanism, its
Feature is folded using identical multiple flexible arm compositions on four hypotenuse thickness directions of known rhombus displacement amplifying mechanism
Certain interval 8 be present in Rotating fields, stack interlayer；Piezoelectric ceramics 1 is installed on compound rhombus displacement amplifying mechanism 2 by pretightning force
Inside, lateral displacement and power are produced using inverse piezoelectric effect, drive compound rhombus displacement amplifying mechanism 2 produce flexural deformation and then
Produce the longitudinal output displacement being exaggerated and power output.
Four compound rhombus displacement amplifying mechanisms 2 are divided to for two groups, including the first compound rhombus displacement amplifying mechanism group and
Two compound rhombus displacement amplifying mechanism groups, the first compound rhombus displacement amplifying mechanism group or the second compound rhombus displacement amplifying mechanism
Two compound rhombus displacement amplifying mechanisms 2 in group are located at same straight line, the first compound rhombus displacement amplifying mechanism group respectively
The first side and the second side of motion platform 4 are symmetricly set on the second compound rhombus displacement amplifying mechanism group.
Two bridge type displacement amplifying mechanisms 3 are separately positioned on the first side and the second side of motion platform 4, bridge type displacement equations
Mechanism 3 includes two flexible beams 10, the rigid inputs 9 of two flexible beams 10 respectively with the first compound rhombus displacement amplifying mechanism
Two output ends of the compound rhombus displacement amplifying mechanism group of group/the second are rigidly connected, the rigid output end 11 of two flexible beams 10
It is fixedly connected respectively with first side/second side of motion platform 4, two of the first compound rhombus displacement amplifying mechanism 2 are defeated
Go out the length that the distance between end is more than the first side of motion platform 4, two flexible beams 10 are obliquely installed.
The output end of compound rhombus displacement amplifying mechanism 2 is connected with the rigid input 9 of bridge shape displacement amplifying mechanism, compound
The power output drive axle shape displacement amplifying mechanism of rhombus displacement amplifying mechanism 2, bridge shape displacement amplifying mechanism is set to produce flexural deformation,
And then produce two level output displacement and power output.Piezoelectric ceramics 1 and compound rhombus displacement amplifying mechanism composition first order micro-displacement
Amplification output, the output displacement input as bridge shape displacement amplifying mechanism again of compound rhombus displacement amplifying mechanism 2.
Two rigid inputs 9 of bridge shape displacement amplifying mechanism symmetrically the first compound rhombus displacement amplifying mechanism group of connection or
Two output ends of the second compound rhombus displacement amplifying mechanism group, form a set of two level elastic mechanism.Two identical two level bullets
Property mechanism in bridge shape displacement amplifying mechanism rigid output end 11 be connected to motion platform 4 formed it is proposed by the present invention accurate fixed
Bit platform, share four groups of compound rhombus displacement amplifying mechanisms 2 and two groups of bridge shape displacement amplifying mechanisms, it is possible to achieve two planes are put down
The displacement output of the dynamic free degree and a Plane Rotation free degree.
Locating platform also includes guiding mechanism 13, four guiding mechanisms 13 with the first compound rhombus displacement amplifying mechanism group
And the second line between compound rhombus displacement amplifying mechanism group is vertically arranged, first end and the fixed frame 5 of guiding mechanism 13
Be fixedly connected, the second end of four guiding mechanisms 13 respectively with four compound displacement amplifying mechanisms of rhombus displacement amplifying mechanism 2
Output end is rigidly connected, and the effect of guiding mechanism 13 is to improve the low order mode of oscillation of precisely locating platform proposed by the present invention,
The hypotenuse flexible beam 7 of compound rhombus displacement amplifying mechanism 2 and junction, the bridge of rigid upper surface and rigid lower surface
The flexible beam 10 of type displacement amplifying mechanism 3 is connected with the junction of motion platform 4 using flexible hinge, and the four of fixed frame 5
Angle is provided with fixing screwed hole 6, and test specimen mounting hole 12 is provided with motion platform 4.
These flexible hinges are known circular flexible hinge, oval compliant mechanism, straight circular flexible hinge etc., and whole
Individual locating platform is machined by spark cutting technique or wire cutting technology integration, without secondary assembling.
A kind of operation principle of XY θ plane three-freedom precision positioning platforms of the present invention is as follows：
Using the output displacement direction of compound rhombus displacement amplifying mechanism 2 as X-direction, with the defeated of bridge type displacement amplifying mechanism 3
Outgoing direction is Y-direction, is Z-direction perpendicular to the direction of locating platform, and this platform can realize the motion of three kinds of frees degree.
For ease of description, four piezoelectric ceramics 1 in the present apparatus are named as No. 1 pressure successively with the counter clockwise direction of diagram
Electroceramics, No. 2 piezoelectric ceramics, No. 3 piezoelectric ceramics and No. 4 piezoelectric ceramics.
The linear motion of X-direction drives No. 1 piezoelectric ceramics and No. 2 piezoelectricity potteries as shown in figure 3, by applying piezoelectric signal
Porcelain presses identical direction of motion stretching motion；By applying piezoelectric signal, No. 3 piezoelectric ceramics and No. 4 piezoelectric ceramics are driven to press phase
Same direction of motion stretching motion, and it is in opposite direction with the stretching motion of No. 1, No. 3 piezoelectric ceramics, you can realize motion platform 4
Translational motion in X direction.
The linear motion of Y-direction drives No. 1 piezoelectric ceramics and No. 4 piezoelectricity potteries as shown in figure 4, by applying piezoelectric signal
Porcelain presses identical direction of motion stretching motion；By applying piezoelectric signal, No. 2 piezoelectric ceramics and No. 3 piezoelectric ceramics are driven to press phase
Same direction of motion stretching motion, and it is in opposite direction with the stretching motion of No. 1, No. 2 piezoelectric ceramics, you can realize motion platform 4
Along the translational motion of Y-direction.
Motion is turned about the X axis as shown in figure 5, by applying piezoelectric signal, drives No. 1 piezoelectric ceramics and No. 3 piezoelectric ceramics
By identical direction of motion stretching motion；By applying piezoelectric signal, No. 2 piezoelectric ceramics and No. 4 piezoelectric ceramics are driven by identical
Direction of motion stretching motion, it is and in opposite direction with the stretching motion of No. 1, No. 2 piezoelectric ceramics, now will be in motion platform 4 four
Edge produces torque, you can realizes the rotary motion in the direction about the z axis of motion platform 4.
Technical scheme is not limited to the limitation of above-mentioned specific embodiment, and every technique according to the invention scheme is done
The technology deformation gone out, each falls within protection scope of the present invention.
Claims (9)
- A kind of 1. XY θ plane three-freedom precision positioning platforms, it is characterised in that：Put including piezoelectric ceramics, compound rhombus displacement Great institutions, bridge type displacement amplifying mechanism, motion platform and fixed frame, the piezoelectric ceramics are arranged on the compound rhombus displacement In enlarger, four compound rhombus displacement amplifying mechanisms be arranged in parallel and respectively positioned at the four of the fixed frame Angle, the motion platform are located at the center of the fixed frame, and the two sides of the motion platform pass through two bridge types Displacement amplifying mechanism is connected with the compound rhombus displacement amplifying mechanism positioned at the motion platform both sides respectively.
- A kind of 2. XY θ plane three-freedom precision positioning platforms according to claim 1, it is characterised in that：It is described compound Rhombus displacement amplifying mechanism includes four hypotenuse flexible beams, rigid upper surface, rigid lower surface, output end face and fixed end face, The output end face and the fixed end surface symmetric are set, and the rigid upper surface and the rigid lower surface are symmetrical arranged, and Line between the line and the rigid upper surface and the rigid lower surface of the output end face and the fixed end face hangs down Directly, four hypotenuse flexible beams are successively by the rigid upper surface, the rigid lower surface, the output end face and described solid Fixed end face is connected and forms diamond structure, and the fixed end face is fixedly connected with the medial surface of the fixed frame.
- A kind of 3. XY θ plane three-freedom precision positioning platforms according to claim 2, it is characterised in that：Described in four Compound rhombus displacement amplifying mechanism is divided into two groups, including the first compound rhombus displacement amplifying mechanism group and the second compound rhombus displacement In enlarger group, the first compound rhombus displacement amplifying mechanism group or the second compound rhombus displacement amplifying mechanism group Two compound rhombus displacement amplifying mechanisms are located at same straight line, the first compound rhombus displacement amplifying mechanism group respectively The first side and the second side of the motion platform are symmetricly set on the described second compound rhombus displacement amplifying mechanism group.
- A kind of 4. XY θ plane three-freedom precision positioning platforms according to claim 2, it is characterised in that：The hypotenuse Flexible beam includes multiple flexible arms be arrangeding in parallel, and multiple flexible arms are stacked, and are set between adjacent flexible arm There is gap.
- A kind of 5. XY θ plane three-freedom precision positioning platforms according to claim 3, it is characterised in that：Described in two Bridge type displacement amplifying mechanism is separately positioned on the first side and the second side of the motion platform, the bridge type displacement amplifying mechanism bag Include two flexible beams, the rigid inputs of two flexible beams respectively with the described first compound rhombus displacement amplifying mechanism group/ Two output ends of the second compound rhombus displacement amplifying mechanism group are rigidly connected, the rigid output end difference of two flexible beams It is fixedly connected with first side/second side of the motion platform.
- A kind of 6. XY θ plane three-freedom precision positioning platforms according to claim 5, it is characterised in that：Described first The distance between two output ends of compound rhombus displacement amplifying mechanism be more than the motion platform first side length, two The individual flexible beam is obliquely installed.
- A kind of 7. XY θ plane three-freedom precision positioning platforms according to claim 5, it is characterised in that：Also include leading To mechanism, four guiding mechanisms with the described first compound rhombus displacement amplifying mechanism group and the second compound rhombus position The line moved between enlarger group is vertically arranged, and the first end of the guiding mechanism is fixedly connected with the fixed frame, and four Second end of the individual guiding mechanism output end with four compound rhombus displacement amplifying mechanism displacement amplifying mechanisms respectively It is rigidly connected.
- A kind of 8. XY θ plane three-freedom precision positioning platforms according to claim 5, it is characterised in that：It is described compound It is the hypotenuse flexible beam of rhombus displacement amplifying mechanism and the junction of the rigid upper surface and the rigid lower surface, described The flexible beam of bridge type displacement amplifying mechanism is connected with the junction of the motion platform using flexible hinge.
- A kind of 9. XY θ plane three-freedom precision positioning platforms according to claim 1, it is characterised in that：The fixation The corner of framework is provided with fixing screwed hole, and test specimen mounting hole is provided with the motion platform.
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| CN201610839891.9A CN106195556B (en) | 2016-09-22 | 2016-09-22 | A kind of XY θ plane three-freedom precision positioning platforms |
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| CN201610839891.9A CN106195556B (en) | 2016-09-22 | 2016-09-22 | A kind of XY θ plane three-freedom precision positioning platforms |
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| CN106526785B (en) | 2016-12-27 | 2017-09-12 | 西安交通大学 | Yawing axis intersects at the low clearance twin shaft arrangement for deflecting and method of mirror surface |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
| CN107464586B (en) * | 2017-08-17 | 2020-02-18 | 天津大学 | Three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force |
| CN109493913B (en) * | 2018-12-26 | 2021-05-11 | 杭州电子科技大学 | Two-degree-of-freedom micro-nano positioning platform |
| CN109909996B (en) * | 2019-04-15 | 2024-02-23 | 华侨大学 | Flexible hinge multistage displacement amplifying structure of laminated composite material |
| CN112720374B (en) * | 2021-01-04 | 2024-06-04 | 山东建筑大学 | Three-degree-of-freedom precise micro-displacement positioning platform |
| CN114913913B (en) * | 2022-03-28 | 2023-06-13 | 山东大学 | Two-dimensional high-precision piezoelectric positioning platform and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4613782A (en) * | 1984-03-23 | 1986-09-23 | Hitachi, Ltd. | Actuator |
| CN102637462A (en) * | 2012-05-17 | 2012-08-15 | 合肥工业大学 | 12-rod two-dimensional no-coupling micrometric displacement workbench |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN206036546U (en) * | 2016-09-22 | 2017-03-22 | 中国工程物理研究院总体工程研究所 | Three degree of freedom precision positioning platforms on XY theta plane |
-
2016
- 2016-09-22 CN CN201610839891.9A patent/CN106195556B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4613782A (en) * | 1984-03-23 | 1986-09-23 | Hitachi, Ltd. | Actuator |
| CN102637462A (en) * | 2012-05-17 | 2012-08-15 | 合肥工业大学 | 12-rod two-dimensional no-coupling micrometric displacement workbench |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN206036546U (en) * | 2016-09-22 | 2017-03-22 | 中国工程物理研究院总体工程研究所 | Three degree of freedom precision positioning platforms on XY theta plane |
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