CN206036546U - Three degree of freedom precision positioning platforms on XY theta plane - Google Patents
Three degree of freedom precision positioning platforms on XY theta plane Download PDFInfo
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- CN206036546U CN206036546U CN201621070533.8U CN201621070533U CN206036546U CN 206036546 U CN206036546 U CN 206036546U CN 201621070533 U CN201621070533 U CN 201621070533U CN 206036546 U CN206036546 U CN 206036546U
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- displacement amplifying
- amplifying mechanism
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- rhombus displacement
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Abstract
The utility model discloses a three degree of freedom precision positioning platforms on XY theta plane, including piezoceramics, compound rhombus displacement amplification mechanism, bridge type displacement amplification mechanism, motion platform and fixed frame, piezoceramics installs in compound rhombus displacement amplification mechanism, and four equal parallel arrangement of compound rhombus displacement amplification mechanism just are located fixed frame's four corners respectively, and motion platform is located fixed frame's center department, and motion platform's both sides face is connected with the compound rhombus displacement amplification mechanism who is located the motion platform both sides respectively through two bridge type displacement amplification mechanism. The utility model discloses a four compound rhombus displacement amplification mechanism and two bridge type displacement amplification mechanism's combination makes this platform possess two translations and a rotational degrees of freedom to amplify and different drives is made up and is realized the motion of the three plane degree of freedom through the two -stage displacement, makes its simple structure and compactness, and it is big to export the displacement.
Description
Technical field
This utility model is related to precision actuation and control field, more particularly to a kind of XY θ plane three-freedom degree precisions positioning
Platform and implementation method.
Background technology
In recent years, with the appearance of the development of precision machinery technology, especially nanometer technique, science and technology is formal to be entered
" submicron-nanometer " epoch.The electronics such as scanning electron microscope, optical instrument, Precision Machining, optics, machinery and space industry, compel
It is essential and wants high accuracy, high-resolution, the locating platform of two-forty；And the current demand to multiple degrees of freedom precisely locating platform is more
It is urgent to compel.For example, the ultrahigh resolution of astronomical telescope and high accuracy are rotated and need multivariant locating platform；Precision optics
The processing and assembling of instrument needs multivariant precisely locating platform；Medical surgery rely increasingly upoies multiple degrees of freedom essence
Close operational tip actuator, etc..
At present, known precisely locating platform mainly has three types, and the first kind is mechanical transmission-type locating platform, for example
Screw mechanism, leverage, voussoir cam mechanism etc. and combinations thereof mechanism.Maximum excellent of mechanical transmission-type locating platform
Point is that stroke is big and output rigidity is big, but there is the shortcomings of mechanical clearance and fretting wear, autokinesis of mechanism and fixed
Position precision is difficult to increase substantially；Equations of The Second Kind is to realize precision positioning by linear electric motors or ultrasonic motor etc., and positioning precision is obtained
Raising to a certain extent and there is good frequency response, but system is relative complex, in particular for how free
Degree locating platform, needs the multiple bulky electric actuators of design；3rd class is using piezoelectric ceramics, magnetostriction etc.
Intellectual material is realizing precision actuation and positioning.
As piezoelectric ceramics has the advantages that high-resolution, high rigidity and exerts oneself big, it is widely used in precision actuation and control
System, but the output displacement of piezoelectric ceramics is minimum, and even stacked piezoelectric ceramics, its output displacement is typically also less than itself
The 0.2% of size.Therefore, the precisely locating platform of known most of Piezoelectric Ceramics is using piezoelectric ceramics and flexibility
Hinge realizes high-precision displacement and power output constituting compliant mechanism.Its degree of freedom of currently known precisely locating platform is more
For two-freedom, can also realize exporting more than the displacement of two degree of freedom by complicated mechanism's design.But it is output displacement, defeated
Go out it is always constrained each other between rigidity and platform natural frequency, larger displacement output to be realized must with lose natural frequency be
Cost.It is accurate fixed to realize using Piezoelectric Ceramic flexibility displacement amplifying mechanism in the patent of Patent No. CN104505127
Position；Using Piezoelectric Ceramic ellipse enlarger realizing precision positioning in the patent of Patent No. CN104467525.So
And, these structures are typically complex, and linkage editor is more, cause assembly precision etc. to produce impact to positioning；Additionally, these are accurate
The natural frequency of locating platform is not general high, is difficult to realize the precise motion of thousand hertz.
Utility model content
The purpose of this utility model is that to solve the above problems and provides a kind of XY θ plane three-freedom degree precisions and determine
Bit platform and implementation method.
This utility model is achieved through the following technical solutions above-mentioned purpose：
A kind of XY θ plane three-freedom precision positioning platforms, including piezoelectric ceramics, compound rhombus displacement amplifying mechanism, bridge
Type displacement amplifying mechanism, motion platform and fixed frame, the piezoelectric ceramics are arranged on the compound rhombus displacement amplifying mechanism
Interior, four compound rhombus displacement amplifying mechanisms be arranged in parallel and respectively positioned at the corner of the fixed frame, the fortune
Moving platform is located at the center of the fixed frame, and the two sides of the motion platform pass through two bridge type displacement equations machines
Structure is connected with the described compound rhombus displacement amplifying mechanism positioned at the motion platform both sides respectively.
Specifically, the compound rhombus displacement amplifying mechanism includes four hypotenuse flexible beams, rigid upper surface, rigid lower end
Face, output end face and fixed end face, the output end face and the fixed end surface symmetric are arranged, the rigid upper surface and described
Rigid lower surface is symmetrical arranged, and the output end face is firm with described with the rigid upper surface with the line of the fixed end face
Property lower surface between line it is vertical, four hypotenuse flexible beams successively by the rigid upper surface, the rigid lower surface,
The output end face and the fixed end face connect and constitute diamond structure, the inner side of the fixed end face and the fixed frame
Face is fixedly connected.
Preferably, four compound rhombus displacement amplifying mechanisms are divided into two groups, including the first compound rhombus displacement equations
Mechanism's group and the second compound rhombus displacement amplifying mechanism group, the described first compound rhombus displacement amplifying mechanism group or described second is again
Close two compound rhombus displacement amplifying mechanisms in rhombus displacement amplifying mechanism group and be located at same straight line respectively, described the
It is flat that one compound rhombus displacement amplifying mechanism group and the second compound rhombus displacement amplifying mechanism group are symmetricly set on the motion
First side and the second side of platform.
Specifically, the hypotenuse flexible beam includes multiple flexible arms be arrangeding in parallel, and multiple flexible arms are stacked,
And gap is provided between adjacent flexible arm.
Specifically, two bridge type displacement amplifying mechanisms are separately positioned on first side and second of the motion platform
Side, the bridge type displacement amplifying mechanism include two flexible beams, and the rigid input of two flexible beams is respectively with described
Two outfans that one compound rhombus displacement amplifying mechanism group/the second is combined rhombus displacement amplifying mechanism group are rigidly connected, two
The rigid outfan of the flexible beam is fixedly connected with the first side/second side of the motion platform respectively.
Specifically, the distance between two outfans of the described first compound rhombus displacement amplifying mechanism are more than the motion
The length of the first side of platform, two flexible beams are obliquely installed.
Further, the locating platform also includes guiding mechanism, and four guiding mechanisms are combined Pedicellus et Pericarpium Trapae with described first
Line between shape displacement amplifying mechanism group and the second compound rhombus displacement amplifying mechanism group is vertically arranged, the Guiding machine
The first end of structure is fixedly connected with the fixed frame, the second end of four guiding mechanisms compound Pedicellus et Pericarpium Trapae described with four respectively
The outfan of shape displacement amplifying mechanism displacement amplifying mechanism is rigidly connected.
Preferably, the hypotenuse flexible beam of the compound rhombus displacement amplifying mechanism and the rigid upper surface and described
The junction of rigid lower surface, the flexible beam of the bridge type displacement amplifying mechanism and the junction of the motion platform are adopted
Connected with flexible hinge.
Specifically, the corner of the fixed frame is provided with fixing screwed hole, is provided with test specimen peace on the motion platform
Dress hole.
The beneficial effects of the utility model are：
A kind of XY θ plane three-freedom precision positioning platforms of this utility model pass through four compound rhombus displacement amplifying mechanisms
With the combination of two bridge type displacement amplifying mechanisms, make the platform possess two translations and a rotational freedom, and pass through two-stage
Displacement equations and different driving combination are realizing three planar degrees of freedom motions so as to simple structure and compact, and export
Displacement is big, and the guiding mechanism of construction featuress and design additionally, due to the bridge shape displacement amplifying mechanism, whole precision positioning are put down
The natural frequency of platform is high and output rigidity is big, it is possible to achieve the high precision displacement output of big stroke and high bandwidth.
Description of the drawings
Fig. 1 is a kind of dimensional structure diagram of XY θ plane three-freedom precision positioning platforms described in the utility model；
Fig. 2 is a kind of top view of XY θ plane three-freedom precision positioning platforms described in the utility model；
Fig. 3 is that a kind of XY θ plane three-freedom precision positioning platforms described in the utility model produce X-direction linear running
Principle schematic；
Fig. 4 is that a kind of XY θ plane three-freedom precision positioning platforms described in the utility model produce Y-direction linear running
Principle schematic；
Fig. 5 is that a kind of XY θ plane three-freedom precision positioning platforms described in the utility model produce the principle for rotating operation
Schematic diagram.
In figure：1- piezoelectric ceramics, the compound rhombus displacement amplifying mechanisms of 2-, 3- bridge shape displacement amplifying mechanisms, 4- motion platforms,
5- fixed frames, 6- fixing screwed holes, 7- hypotenuse flexible beams, 8- gaps, 9- rigidity inputs, 10- flexible beams, 11- are rigidly defeated
Go out end, 12- test specimen installing holes, 13- guiding mechanisms.
Specific embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
As depicted in figs. 1 and 2, a kind of XY θ plane three-freedom precision positioning platforms of this utility model, including piezoelectric ceramics
1st, rhombus displacement amplifying mechanism 2, bridge type displacement amplifying mechanism 3, motion platform 4 and fixed frame 5 is combined, piezoelectric ceramics 1 is installed
In compound rhombus displacement amplifying mechanism 2, four compound rhombus displacement amplifying mechanisms 2 be arranged in parallel and are located at fixed frame respectively
The corner of frame 5, motion platform 4 are located at the center of fixed frame 5, and the two sides of motion platform 4 are put by two bridge type displacements
Great institutions 3 are connected with the compound rhombus displacement amplifying mechanism 2 positioned at 4 both sides of motion platform respectively.
Compound rhombus displacement amplifying mechanism 2 includes four hypotenuse flexible beams 7, rigid upper surface, rigid lower surface, outfan
Face and fixed end face, output end face and fixed end surface symmetric are arranged, and rigid upper surface and rigid lower surface are symmetrical arranged, and export
The line and the line between rigid upper surface and rigid lower surface of end face and fixed end face is vertical, four hypotenuse flexible beams 7 according to
It is secondary that rigid upper surface, rigid lower surface, output end face and fixed end face are connected and constituted diamond structure, fixed end face and fixation
The medial surface of framework 5 is fixedly connected, and hypotenuse flexible beam 7 includes multiple flexible arms be arrangeding in parallel, and multiple flexible arms are stacked,
And between adjacent flexible arm, it is provided with gap 8.
Be combined rhombus displacement amplifying mechanism 2 be based on the improved elastic mechanism of known rhombus displacement amplifying mechanism, its
Feature is folded using identical multiple flexible arm compositions on four hypotenuse thickness directions of known rhombus displacement amplifying mechanism
There is certain interval 8 in Rotating fields, stack interlayer；Piezoelectric ceramics 1 is installed on compound rhombus displacement amplifying mechanism 2 by pretightning force
Inside, produces lateral displacement and power using inverse piezoelectric effect, drives compound rhombus displacement amplifying mechanism 2 to produce flexural deformation further
Longitudinal output displacement and power output that generation is exaggerated.
2 points of four compound rhombus displacement amplifying mechanisms are two groups, including the first compound rhombus displacement amplifying mechanism group and the
Two compound rhombus displacement amplifying mechanism groups, the first compound rhombus displacement amplifying mechanism group or the second compound rhombus displacement amplifying mechanism
Two compound rhombus displacement amplifying mechanisms 2 in group are located at same straight line, the first compound rhombus displacement amplifying mechanism group respectively
First side and the second side of motion platform 4 is symmetricly set on the second compound rhombus displacement amplifying mechanism group.
Two bridge type displacement amplifying mechanisms 3 are separately positioned on first side and the second side of motion platform 4, bridge type displacement equations
Mechanism 3 includes two flexible beams 10, and the rigid input 9 of two flexible beams 10 is combined rhombus displacement amplifying mechanism with first respectively
Two outfans of the compound rhombus displacement amplifying mechanism group of group/the second are rigidly connected, the rigid outfan 11 of two flexible beams 10
It is fixedly connected with the first side/second side of motion platform 4 respectively, two of the first compound rhombus displacement amplifying mechanism 2 are defeated
Go out length of the distance between the end more than the first side of motion platform 4, two flexible beams 10 are obliquely installed.
The outfan of compound rhombus displacement amplifying mechanism 2 is connected with the rigid input 9 of bridge shape displacement amplifying mechanism, is combined
The power output drive axle shape displacement amplifying mechanism of rhombus displacement amplifying mechanism 2, makes bridge shape displacement amplifying mechanism produce flexural deformation,
And then produce two grades of output displacements and power output.Piezoelectric ceramics 1 constitutes first order micrometric displacement with compound rhombus displacement amplifying mechanism
Amplify output, be combined the output displacement of rhombus displacement amplifying mechanism 2 and the input as bridge shape displacement amplifying mechanism.
Two of bridge shape displacement amplifying mechanism 9 the first compound rhombus displacement amplifying mechanism groups of symmetrical connection of rigid inputs or
Two outfans of the second compound rhombus displacement amplifying mechanism group, constitute a set of two grades of elastic mechanisms.Two identicals, two grades of bullets
The rigid outfan 11 of the bridge shape displacement amplifying mechanism in property mechanism be connected to motion platform 4 formed the utility model proposes essence
Close locating platform, has four groups of compound rhombus displacement amplifying mechanisms 2 and two groups of bridge shape displacement amplifying mechanisms, it is possible to achieve two are put down
The displacement output of face translational degree of freedom and a Plane Rotation degree of freedom.
Locating platform also includes guiding mechanism 13, and four guiding mechanisms 13 are combined rhombus displacement amplifying mechanism group with first
And second the line between compound rhombus displacement amplifying mechanism group be vertically arranged, first end and the fixed frame 5 of guiding mechanism 13
Be fixedly connected, the second end of four guiding mechanisms 13 respectively with four compound 2 displacement amplifying mechanisms of rhombus displacement amplifying mechanism
Outfan is rigidly connected, the effect of guiding mechanism 13 be improve the utility model proposes precisely locating platform low order vibration mould
State,
The junction of the hypotenuse flexible beam 7 of compound rhombus displacement amplifying mechanism 2 and rigid upper surface and rigid lower surface, bridge
The flexible beam 10 of type displacement amplifying mechanism 3 is connected using flexible hinge with the junction of motion platform 4, and the four of fixed frame 5
Angle is provided with fixing screwed hole 6, is provided with test specimen installing hole 12 on motion platform 4.
These flexible hinges are known circular flexible hinge, oval compliant mechanism, straight circular flexible hinge etc., and whole
Individual locating platform is machined by spark cutting technique or wire cutting technology integration, without the need for secondary assembling.
A kind of operation principle of XY θ plane three-freedom precision positioning platforms of this utility model is as follows：
To be combined the output displacement direction of rhombus displacement amplifying mechanism 2 as X-direction, with the defeated of bridge type displacement amplifying mechanism 3
Outgoing direction is Y-direction, perpendicular to the direction of locating platform be Z-direction, this platform be capable of achieving three kinds of degree of freedom motion.
For ease of description, four piezoelectric ceramics 1 in this device are named as into No. 1 pressure successively with the counter clockwise direction for illustrating
Electroceramics, No. 2 piezoelectric ceramics, No. 3 piezoelectric ceramics and No. 4 piezoelectric ceramics.
The linear motion of X-direction is as shown in figure 3, by applying piezoelectric signal, drive No. 1 piezoelectric ceramics and No. 2 piezoelectricity potteries
Porcelain presses identical direction of motion stretching motion；By applying piezoelectric signal, No. 3 piezoelectric ceramics and No. 4 piezoelectric ceramics are driven to press phase
Same direction of motion stretching motion, and it is in opposite direction with the stretching motion of No. 1, No. 3 piezoelectric ceramics, you can realize motion platform 4
Translational motion in X direction.
The linear motion of Y-direction is as shown in figure 4, by applying piezoelectric signal, drive No. 1 piezoelectric ceramics and No. 4 piezoelectricity potteries
Porcelain presses identical direction of motion stretching motion；By applying piezoelectric signal, No. 2 piezoelectric ceramics and No. 3 piezoelectric ceramics are driven to press phase
Same direction of motion stretching motion, and it is in opposite direction with the stretching motion of No. 1, No. 2 piezoelectric ceramics, you can realize motion platform 4
Along the translational motion of Y-direction.
Motion is turned about the X axis as shown in figure 5, by applying piezoelectric signal, driving No. 1 piezoelectric ceramics and No. 3 piezoelectric ceramics
By identical direction of motion stretching motion；By applying piezoelectric signal, No. 2 piezoelectric ceramics and No. 4 piezoelectric ceramics are driven by identical
Direction of motion stretching motion, it is and in opposite direction with the stretching motion of No. 1, No. 2 piezoelectric ceramics, now will be in motion platform 4 four
Edge produces torque, you can realize the rotary motion in the direction about the z axis of motion platform 4.
The technical solution of the utility model is not limited to the restriction of above-mentioned specific embodiment, every according to skill of the present utility model
The technology deformation that art scheme is made, each falls within protection domain of the present utility model.
Claims (9)
1. a kind of XY θ plane three-freedom precision positioning platforms, it is characterised in that：Put including piezoelectric ceramics, compound rhombus displacement
Great institutions, bridge type displacement amplifying mechanism, motion platform and fixed frame, the piezoelectric ceramics are arranged on the compound rhombus displacement
In enlarger, four compound rhombus displacement amplifying mechanisms be arranged in parallel and respectively positioned at the four of the fixed frame
Angle, the motion platform are located at the center of the fixed frame, and the two sides of the motion platform pass through two bridge types
Displacement amplifying mechanism is connected with the described compound rhombus displacement amplifying mechanism positioned at the motion platform both sides respectively.
2. a kind of XY θ plane three-freedom precision positioning platforms according to claim 1, it is characterised in that：It is described compound
Rhombus displacement amplifying mechanism includes four hypotenuse flexible beams, rigid upper surface, rigid lower surface, output end face and fixed end face,
The output end face and the fixed end surface symmetric are arranged, and the rigid upper surface and the rigid lower surface are symmetrical arranged, and
The output end face and the line of the fixed end face and the line between the rigid upper surface and the rigid lower surface hang down
Directly, four hypotenuse flexible beams are successively by the rigid upper surface, the rigid lower surface, the output end face and described solid
Fixed end face connects and constitutes diamond structure, and the fixed end face is fixedly connected with the medial surface of the fixed frame.
3. a kind of XY θ plane three-freedom precision positioning platforms according to claim 2, it is characterised in that：Described in four
Compound rhombus displacement amplifying mechanism is divided into two groups, including the first compound rhombus displacement amplifying mechanism group and the second compound rhombus displacement
In enlarger group, the described first compound rhombus displacement amplifying mechanism group or the second compound rhombus displacement amplifying mechanism group
Two compound rhombus displacement amplifying mechanisms are located at same straight line, the described first compound rhombus displacement amplifying mechanism group respectively
First side and the second side of the motion platform is symmetricly set on the described second compound rhombus displacement amplifying mechanism group.
4. a kind of XY θ plane three-freedom precision positioning platforms according to claim 2, it is characterised in that：The hypotenuse
Flexible beam includes multiple flexible arms be arrangeding in parallel, and multiple flexible arms are stacked, and arranges between adjacent flexible arm
There is gap.
5. a kind of XY θ plane three-freedom precision positioning platforms according to claim 3, it is characterised in that：Described in two
Bridge type displacement amplifying mechanism is separately positioned on first side and the second side of the motion platform, the bridge type displacement amplifying mechanism bag
Include two flexible beams, the rigid input of two flexible beams respectively with the described first compound rhombus displacement amplifying mechanism group/
Two outfans of the second compound rhombus displacement amplifying mechanism group are rigidly connected, the rigid outfan difference of two flexible beams
It is fixedly connected with the first side/second side of the motion platform.
6. a kind of XY θ plane three-freedom precision positioning platforms according to claim 5, it is characterised in that：Described first
Length of the distance between two outfans of compound rhombus displacement amplifying mechanism more than the first side of the motion platform, two
The individual flexible beam is obliquely installed.
7. a kind of XY θ plane three-freedom precision positioning platforms according to claim 5, it is characterised in that：Also include leading
To mechanism, four guiding mechanisms are combined rhombus position with the described first compound rhombus displacement amplifying mechanism group and described second
The line moved between enlarger group is vertically arranged, and the first end of the guiding mechanism is fixedly connected with the fixed frame, and four
The outfan of the second end of the individual guiding mechanism compound rhombus displacement amplifying mechanism displacement amplifying mechanism described with four respectively
It is rigidly connected.
8. a kind of XY θ plane three-freedom precision positioning platforms according to claim 5, it is characterised in that：It is described compound
It is the hypotenuse flexible beam of rhombus displacement amplifying mechanism and the junction of the rigid upper surface and the rigid lower surface, described
The flexible beam of bridge type displacement amplifying mechanism is connected using flexible hinge with the junction of the motion platform.
9. a kind of XY θ plane three-freedom precision positioning platforms according to claim 1, it is characterised in that：The fixation
The corner of framework is provided with fixing screwed hole, is provided with test specimen installing hole on the motion platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621070533.8U CN206036546U (en) | 2016-09-22 | 2016-09-22 | Three degree of freedom precision positioning platforms on XY theta plane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621070533.8U CN206036546U (en) | 2016-09-22 | 2016-09-22 | Three degree of freedom precision positioning platforms on XY theta plane |
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| Publication Number | Publication Date |
|---|---|
| CN206036546U true CN206036546U (en) | 2017-03-22 |
Family
ID=58296305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621070533.8U Withdrawn - After Issue CN206036546U (en) | 2016-09-22 | 2016-09-22 | Three degree of freedom precision positioning platforms on XY theta plane |
Country Status (1)
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| CN (1) | CN206036546U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106195556A (en) * | 2016-09-22 | 2016-12-07 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platform |
| CN113719704A (en) * | 2021-08-10 | 2021-11-30 | 华中科技大学 | Large-stroke two-dimensional nano positioning platform |
-
2016
- 2016-09-22 CN CN201621070533.8U patent/CN206036546U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106195556A (en) * | 2016-09-22 | 2016-12-07 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platform |
| CN106195556B (en) * | 2016-09-22 | 2017-12-29 | 中国工程物理研究院总体工程研究所 | A kind of XY θ plane three-freedom precision positioning platforms |
| CN113719704A (en) * | 2021-08-10 | 2021-11-30 | 华中科技大学 | Large-stroke two-dimensional nano positioning platform |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170322 Effective date of abandoning: 20171229 |
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| AV01 | Patent right actively abandoned |