CN205943470U - High accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke - Google Patents
High accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke Download PDFInfo
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- CN205943470U CN205943470U CN201620916169.6U CN201620916169U CN205943470U CN 205943470 U CN205943470 U CN 205943470U CN 201620916169 U CN201620916169 U CN 201620916169U CN 205943470 U CN205943470 U CN 205943470U
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Abstract
The utility model discloses a high accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke, including the base member, be formed with in the central authorities of base member and move platform and equipartition four flexible bridge type mechanism of amplifications around moving the platform, adopt I drive of piezoelectric ceramic actuator to an arbitrary flexible bridge type mechanism of amplification of arranging along X, respectively adopt II drives of piezoelectric ceramic actuator along Y to two flexible bridge type mechanism of amplifications arranging, along X to two flexible bridge type mechanism of amplifications arranging respectively adopt two along X to the semi -circular flexible hinge of establishing ties I with move the platform and be connected, respectively adopt per two a set of semi -circular flexible hinges II and move the platform to two flexible bridge type mechanism of amplifications arranging along Y and be connected, II series connection on two the flexible hinges of semi -circle of every inter block just with Y to parallel, the flexible hinge of two sets of semi -circles is II about central symmetry. The utility model discloses can realize moving the motion of platform high accuracy, big stroke in the XY plane to higher work bandwidth and natural frequency have.
Description
Technical field
This utility model is related to a kind of freedom degree parallel connection mini positioning platform, more particularly to a kind of high accuracy, big stroke
Freedom degree parallel connection mini positioning platform.
Background technology
With scientific and technological development, micro ＆ nano technology has obtained broader practice.But, high-precision mini positioning platform is always
Govern the popularization of micro ＆ nano technology.At present, the mini positioning platform of little stroke has been obtained for great breakthrough, but, in high precision,
The mini positioning platform of big stroke also needs to improve further.At present, in high precision, the structure that big stroke mini positioning platform is most frequently with
It is：X rotates series connection to translation, Y-direction translation and Z-direction.But this serial mechanism can lead to the bandwidth of operation of platform and intrinsic
Frequency reduces.
Content of the invention
This utility model provides a kind of high accuracy, big stroke three freely for solving technical problem present in known technology
Degree mini positioning platform in parallel, this platform has higher bandwidth of operation and natural frequency.
This utility model is adopted the technical scheme that by solving technical problem present in known technology：A kind of high-precision
Degree, big stroke freedom degree parallel connection mini positioning platform, including matrix, are formed with moving platform in the central authorities of described matrix and are distributed on
Around described moving platform four flexible bridge-type enlargers, flexible bridge-type enlarger described in two of which along X to arrangement, separately
Outer two described flexibility bridge-type enlargers arrange along Y-direction, each described flexibility bridge-type enlarger is provided with a parallel-plate guiding
Mechanism, the two combination forms a nano-positioning stage；Along X to any one of flexibility bridge-type enlarger of arrangement using pressure
Electroceramics driver I drives, and two described flexibility bridge-type enlargers along Y-direction arrangement respectively adopt a piezoelectric ceramic actuator
II driving；Respectively adopt two along X to two of arrangement described flexibility bridge-type enlargers along X to the semicircle flexible hinge of series connection
I is connected with described moving platform, respectively adopts the semicircle of one group of each two along two described flexibility bridge-type enlargers that Y-direction is arranged
Flexible hinge II is connected with described moving platform, and two in every group described semicircle flexible hinge II is connected and parallel with Y-direction, and two
Group described semicircle flexible hinge II is with regard to centrosymmetry.
Described parallel-plate guiding mechanism is provided with 4 parallel-plates.
It is provided with location hole on the matrix.
This utility model has the advantages and positive effects that：Using four micro- positioning containing flexible bridge-type enlarger
Mechanism is in parallel, is capable of moving platform high accuracy, motion of big stroke in X/Y plane；X in parallel with Y-direction nano-positioning stage,
Increase the bandwidth of platform, and the natural frequency of platform；Flexible bridge-type enlarger has enlarging function, in parallel-plate guiding
Under the constraint of mechanism, moving platform is enable accurately to be moved, to avoid moving platform because of semicircle flexible hinge buckle in compression；
The semicircle flexible hinge of four groups of series connection being connected with moving platform has decoupled nano-positioning stage to moving platform X to translation, Y-direction translation
The motion rotating with the centrage of vertical X/Y plane limits, and improves the kinematic accuracy of moving platform.
Brief description
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of a nano-positioning stage of the present utility model.
In figure：1st, matrix, 2, piezoelectric ceramic actuator I, 3, flexible bridge-type enlarger, 4, parallel-plate guiding mechanism, 5,
Piezoelectric ceramic actuator II, 6, location hole, 7, semicircle flexible hinge II, 8, moving platform, 9, semicircle flexible hinge I.
Specific embodiment
For content of the invention of the present utility model, feature and effect can be further appreciated that, hereby enumerate following examples, and coordinate
Accompanying drawing describes in detail as follows：
Refer to Fig. 1～Fig. 2, a kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform, including matrix 1, in institute
The central authorities stating matrix 1 are formed with moving platform 8 and four flexible bridge-type enlargers 3 being distributed on around described moving platform 8, wherein
Two described flexibility bridge-type enlargers 3 along X to arrangement, arrange along Y-direction, often by two other described flexibility bridge-type enlarger 3
Individual described flexibility bridge-type enlarger 3 be provided with a parallel-plate guiding mechanism 4, the two combination formed a nano-positioning stage, along X to
Any one of flexibility bridge-type enlarger 3 of arrangement adopts piezoelectric ceramic actuator I 2 to drive, along two institutes of Y-direction arrangement
Stating flexible bridge-type enlarger 3 respectively adopts a piezoelectric ceramic actuator II 5 to drive, along X to two described flexible bridge of arrangement
Formula enlarger 3 is respectively connected to the semicircle flexible hinge I 9 of series connection with described moving platform 8 along X using two, along Y-direction arrangement
Two described flexibility bridge-type enlargers 3 respectively adopt the semicircle flexible hinge II 7 of one group of each two and described moving platform 8 to connect
Connect, two in every group described semicircle flexible hinge II 7 is connected and parallel with Y-direction, semicircle flexible hinge II 7 described in two groups
With regard to centrosymmetry.
In the present embodiment, described parallel-plate guiding mechanism 4 is provided with 4 parallel-plates.Described matrix 1 is provided with location hole
6.
Operation principle of the present utility model：
Give piezoelectric ceramic actuator I 2 and the pre- making alive of two piezoelectric ceramic actuators II 5 first, make corresponding thereto
Flexible bridge-type enlarger 3 produces a displacement, and finally makes moving platform 8 be in poised state.
By changing the voltage on piezoelectric ceramic actuator I 2, make piezoelectric ceramic actuator I 2 by coupled along X
Carry moving platform 8 to the flexible bridge-type enlarger 3 of arrangement along X to translation.
By pressurizeing to a piezoelectric ceramic actuator II 5, reduce pressure to another piezoelectric ceramic actuator II 5 simultaneously, make
Two piezoelectric ceramic actuators II 5 are by the coupled flexible bridge-type enlarger 3 driving moving platform 8 along Y-direction arrangement along Y
To translation.
By giving two piezoelectric ceramic actuator II 5 pressurizations or reducing pressure simultaneously, two piezoelectric ceramic actuators II 5 are made to lead to
The centrage crossing the coupled flexible bridge-type enlarger 3 driving moving platform 8 along Y-direction arrangement along its vertical X/Y plane turns
Dynamic.
In sum, moving platform 10 of the present utility model is not only able to realize rotate along the centrage of its vertical X/Y plane,
Also enable X to translation and Y-direction translation.
Although being described to preferred embodiment of the present utility model above in conjunction with accompanying drawing, this utility model is not
It is confined to above-mentioned specific embodiment, above-mentioned specific embodiment is only schematically, is not restricted, ability
The those of ordinary skill in domain under enlightenment of the present utility model, without departing from this utility model objective and claimed
Under ambit, a lot of forms can also be made, these belong within protection domain of the present utility model.
Claims (3)
1. a kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform are it is characterised in that include matrix, in described matrix
Central authorities be formed with moving platform and be distributed on around described moving platform four flexible bridge-type enlargers, soft described in two of which
Property bridge-type enlarger along X to arrangement, two other described flexibility bridge-type enlarger along Y-direction arrange, each described flexible bridge
Formula enlarger is provided with a parallel-plate guiding mechanism, and the two combination forms a nano-positioning stage；Along X to any one arranged
Described flexibility bridge-type enlarger is driven using piezoelectric ceramic actuator I, along two described flexibility bridge-type enlargers of Y-direction arrangement
Structure is respectively driven using a piezoelectric ceramic actuator II；Respectively adopt two along X to two of arrangement described flexibility bridge-type enlargers
The individual two described flexibility bridge-types amplifications being connected with described moving platform to the semicircle flexible hinge I of series connection along X, arranging along Y-direction
Mechanism respectively adopts the semicircle flexible hinge II of one group of each two to be connected with described moving platform, the described semicircle of two in every group
Flexible hinge II is connected and parallel with Y-direction, and described in two groups, semicircle flexible hinge II is with regard to centrosymmetry.
2. high accuracy according to claim 1, big stroke freedom degree parallel connection mini positioning platform are it is characterised in that described
Parallel-plate guiding mechanism is provided with 4 parallel-plates.
3. high accuracy according to claim 1, big stroke freedom degree parallel connection mini positioning platform are it is characterised in that in institute
State matrix and be provided with location hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620916169.6U CN205943470U (en) | 2016-08-19 | 2016-08-19 | High accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620916169.6U CN205943470U (en) | 2016-08-19 | 2016-08-19 | High accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke |
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| Publication Number | Publication Date |
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| CN205943470U true CN205943470U (en) | 2017-02-08 |
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| CN201620916169.6U Withdrawn - After Issue CN205943470U (en) | 2016-08-19 | 2016-08-19 | High accuracy, parallelly connected microposition platform of big three degrees of freedom of stroke |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN107464586A (en) * | 2017-08-17 | 2017-12-12 | 天津大学 | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling |
| CN107833594A (en) * | 2017-09-13 | 2018-03-23 | 南京航空航天大学 | A kind of two-dimentional Three Degree Of Freedom micromotion platform structure for being used for high accuracy positioning and measurement |
| CN108877871A (en) * | 2018-04-12 | 2018-11-23 | 天津大学 | A kind of built-in two-freedom precisely locating platform of driver |
| CN109093598A (en) * | 2018-08-30 | 2018-12-28 | 上海大学 | A kind of freedom degree parallel connection micromotion platform |
| CN109531546A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of normal direction two degrees of freedom micromotion platform |
| CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
-
2016
- 2016-08-19 CN CN201620916169.6U patent/CN205943470U/en not_active Withdrawn - After Issue
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106251909B (en) * | 2016-08-19 | 2019-08-02 | 天津大学 | A kind of high-precision, big stroke freedom degree parallel connection mini positioning platform |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN107464586A (en) * | 2017-08-17 | 2017-12-12 | 天津大学 | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling |
| CN107833594A (en) * | 2017-09-13 | 2018-03-23 | 南京航空航天大学 | A kind of two-dimentional Three Degree Of Freedom micromotion platform structure for being used for high accuracy positioning and measurement |
| WO2019052044A1 (en) * | 2017-09-13 | 2019-03-21 | 南京航空航天大学 | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
| CN107833594B (en) * | 2017-09-13 | 2020-02-21 | 南京航空航天大学 | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
| US10520339B2 (en) | 2017-09-13 | 2019-12-31 | Nanjing Univ. Of Aeronautics And Astronautics | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
| CN108877871A (en) * | 2018-04-12 | 2018-11-23 | 天津大学 | A kind of built-in two-freedom precisely locating platform of driver |
| CN108877871B (en) * | 2018-04-12 | 2020-10-02 | 天津大学 | Two-degree-of-freedom precision positioning platform with built-in driver |
| CN109093598A (en) * | 2018-08-30 | 2018-12-28 | 上海大学 | A kind of freedom degree parallel connection micromotion platform |
| CN109093598B (en) * | 2018-08-30 | 2021-10-12 | 上海大学 | Three-degree-of-freedom parallel micro-motion platform |
| CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
| CN109584947B (en) * | 2018-09-28 | 2020-11-24 | 天津大学 | Three-degree-of-freedom large-stroke high-precision micro-positioning platform based on bridge type amplification mechanism |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN109531546A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of normal direction two degrees of freedom micromotion platform |
| CN109531546B (en) * | 2018-12-25 | 2024-05-31 | 西交利物浦大学 | Micro-motion platform with normal two degrees of freedom |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170208 Effective date of abandoning: 20190802 |