CN1669744A - Precision positioning table with six degrees of freedom - Google Patents

Precision positioning table with six degrees of freedom Download PDF

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Publication number
CN1669744A
CN1669744A CN 200510024300 CN200510024300A CN1669744A CN 1669744 A CN1669744 A CN 1669744A CN 200510024300 CN200510024300 CN 200510024300 CN 200510024300 A CN200510024300 A CN 200510024300A CN 1669744 A CN1669744 A CN 1669744A
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China
Prior art keywords
platform
groups
flexible hinge
parallel
screw
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Granted
Application number
CN 200510024300
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Chinese (zh)
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CN100340378C (en
Inventor
王勇
刘志刚
薄锋
朱健强
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Shanghai Institute of Optics and Fine Mechanics of CAS
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Priority to CNB2005100243004A priority Critical patent/CN100340378C/en
Publication of CN1669744A publication Critical patent/CN1669744A/en
Application granted granted Critical
Publication of CN100340378C publication Critical patent/CN100340378C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

This invention discloses a six-degree freedom accurately positioning table, composed by upper and lower platforms attached with each other, wherein, the lower platform adopts two groups of parallel plate-type flexible hinge as conducting mechanism and three groups of driving units to realize translation in two directions and rotating motion in one direction; the upper platform is attached with motion platform of the lower one, adopting three driving units arranged by equilateral triangle and spherical secondary flexible hinge to realize translation in one direction and rotating motion in two direction. The driving unit adopts piezoelectric ceramic actuator, which improves offset output distinguishability and positioning accuracy, with no mechanical friction, and realizes compensation of structure positioning. The invention can actualize position accuracy in nanometer-level.

Description

Precision positioning table with six degrees of freedom
Technical field
The present invention relates to a kind of worktable, particularly a kind of space precision positioning table with six degrees of freedom can be realized nano level bearing accuracy.
Background technology
In the research work of nanometer technology, nanoscale control and location are considered to one of core of nanometer technology, for nanometer technology provides technical foundation in the application of every field.The nanoscale microposition all has a wide range of applications at aspects such as optical engineering, bioengineering, engineering in medicine, Micro Electro Mechanical System, ultraprecise processing and measurements.Domestic existing nanometer positioning mechanism mostly is one or two degree of freedom, when a plurality of degree of freedom of needs, adopts the mode of module combinations to realize that texture ratio is bigger, and has cumulative errors, and bearing accuracy is not high.Adopt the detent mechanism motion control of steward structure very complicated.The locating device of some other multiple degrees of freedom form, there is coupling in the mode of employing connecting rod transmission between motion, have influence on bearing accuracy equally.
Summary of the invention
The technical problem to be solved in the present invention is to overcome above-mentioned the deficiencies in the prior art, and a kind of precision positioning table with six degrees of freedom is provided, and it should have compact conformation, volume is little, frequency response is fast and the compensable characteristics of positioning error.
Technical solution of the present invention is as follows:
A kind of precision positioning table with six degrees of freedom is characterized in that it is made of upper platform and underlying platform:
Comprise fixedly stage body, motion platform, the first parallel plate type flexible hinge, the second parallel plate type flexible hinge, three groups of flexible hinges on the described underlying platform and be connected boss, three groups of first identical piezoelectric actuators and tightening part;
Described upper platform is connected with the motion platform of underlying platform by three groups of second identical piezoelectric actuators, transmission component, holding screw, attachment screw, lock-screws, and it is whole to form a motion;
Described three groups of flexible hinges overlap other two groups of axis of symmetry both sides that are arranged in second pair of parallel-plate flexible hinge symmetrically with one group center line in being connected boss with the symmetrical center line of first pair of parallel-plate flexible hinge; Three group of first piezoelectric actuator tightening part by separately be connected boss and flexible hinge and form three groups of driver elements in the surface level;
Three group of second piezoelectric actuator that vertical direction drives is triangular arranged, and its lower end is embedded in by lock-screw on the motion platform of underlying platform, and the upper end connects transmission component, links into an integrated entity by holding screw and attachment screw and upper platform; Form three groups of driver elements in the vertical plane by attachment screw, holding screw, transmission component, second piezoelectric actuator, lock-screw;
The center section of described transmission component) is the spherical pair flexible hinge.
Described three groups of flexible hinge forms are the revolute pair flexible hinge.
First pair of parallel-plate flexible hinge on the described motion platform and eight elastic plates of second pair of parallel-plate flexible hinge measure-alike, equal stiffness, the double-flexibility parallel conductive of forming both direction is to 4 linkages.
Advantage of the present invention: volume of the present invention is little, compact conformation, be convenient to process and assemble.Adopt high-resolution piezoelectric actuator as driving element, flexible hinge is as the transmission pilot unit, makes the resolution height of output displacement, frequency response is very fast, motion is transmitted does not have friction, do not have mechanical loss.The layout of each gear unit can be eliminated the positioning error that the motion coupling causes simultaneously, therefore can reach very high bearing accuracy.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention
Fig. 2 is a underlying platform structural representation of the present invention
Fig. 3 is the sectional view of transmission component 5 of the present invention
Embodiment
See also Fig. 1, Fig. 2 and Fig. 3 earlier, as seen from the figure, precision positioning table with six degrees of freedom of the present invention is made of upper platform 2 and underlying platform 1:
Comprise fixedly stage body 1-1, motion platform 1-2, the first parallel plate type flexible hinge 1-3, the second parallel plate type flexible hinge 1-4, three groups of flexible hinge 1-5 on the described underlying platform 1 and be connected boss 1-6, three groups of identical first piezoelectric actuator 8 and tightening parts 9;
Described upper platform 2 is connected with the motion platform 1-2 of underlying platform 1 by three groups of second identical piezoelectric actuators 6, transmission component 5, holding screw 4, attachment screw 3, lock-screws 7, and it is whole to form a motion;
Three groups of flexible hinge 1-5 overlap other two groups of axis of symmetry both sides that are arranged in second couple of parallel-plate flexible hinge 1-4 symmetrically with one group center line in being connected boss 1-6 with the symmetrical center line of first couple of parallel-plate flexible hinge 1-3; Three group of first piezoelectric actuator 8 tightening part 9 by separately be connected boss 1-6 and flexible hinge 1-5 and form three groups of driver elements in the surface level;
Three group of second piezoelectric actuator 6 that vertical direction drives is triangular arranged, its lower end is embedded on the motion platform 1-2 of underlying platform 1 by lock-screw 7, the upper end connects transmission component 5, links into an integrated entity with upper platform 2 by holding screw 4 and attachment screw 3; Form three groups of driver elements in the vertical plane by attachment screw 3, holding screw 4, transmission component 5, second piezoelectric actuator 6, lock-screw 7;
The center section 5-3 of described transmission component 5 is the spherical pair flexible hinge.
Described three groups of flexible hinge 1-5 forms are the revolute pair flexible hinge.
First couple of parallel-plate flexible hinge 1-3 on the motion platform (1-2) and eight elastic plates of second couple of parallel-plate flexible hinge 1-4 measure-alike, equal stiffness, the double-flexibility parallel conductive of forming both direction is to 4 linkages.
Described underlying platform 1 is realized the x of mechanism, the translation of y direction and to the rotation of z axle, and upper platform 2 realizes x, the rotation of y axle and along the translation of z axle.Four groups of elastic plate 1-4 form x direction double-flexibility parallel conductive to 4 linkages, can effectively eliminate the displacement coupling phenomenon that exists in single parallel-guiding, under the guide effect of the driving force of x direction and elastic plate 1-4, realize the displacement of x direction.Four groups of elastic plate 1-3 form y direction double-flexibility parallel conductive to 4 linkages, when two group of first piezoelectric actuator 8 equivalent elongation simultaneously of y direction, realize moving of y direction.Two group of first piezoelectric actuator 8 driving force on the y direction not simultaneously, motion platform 1-2 realizes the rotation displacement around Z-axis z.The effect of flexible hinge 1-5 is to make rotatablely moving of motion platform 1-2 not interrupted.Wherein one group of its center line of three groups of flexible hinge 1-5, connection boss 1-6 overlaps with the symmetrical center line of two parallel-plate flexible hinge 1-3, other two groups of axis of symmetry both sides that are symmetrically arranged in two parallel-plate flexible hinge 1-4 adopt this kind arrangement effectively to carry out correction-compensation to positioning error.Upper platform 2 passes through three groups of second identical piezoelectric actuators 6, transmission component 5, and holding screw 4, attachment screw 3, lock-screw 7 is connected with bottom motion platform 1-2, and it is whole to form a motion.Realize the horizontal direction three-dimensional motion of upper platform 2 by the horizontal direction three-dimensional motion of bottom motion platform 1-2.Three group of second piezoelectric actuator 6 that vertical direction drives, its lower end is embedded on the bottom motion platform 1-2 by lock-screw 7, and the upper end connects transmission component 5, links into an integrated entity with upper platform 2 by holding screw 4 and attachment screw 3.By 3,4,5,6,7 three groups of driver elements that form in the vertical plane, these three groups of driver elements are triangular arranged.When three groups of driver element elongations were identical, implementation platform 2 was along the translation of Z-axis z.When three groups of driver element relative elongations, platform 2 can be realized the rotation around x axle and y axle.Transmission component 5 is referring to Fig. 3,5-1 is the connection screw for attachment screw 3 among the figure, 5-2 is the connection screw for holding screw 4,5-4 is the screw that connects for lock-screw 7, center section 5-3 is a sphere width of cloth flexible hinge, itself have 3 degree of freedom, its effect is to make rotatablely moving of platform 2 not interrupted.

Claims (4)

1, a kind of precision positioning table with six degrees of freedom is characterized in that it is made of upper platform (2) and underlying platform (1):
Comprise fixedly stage body (1-1), motion platform (1-2), the first parallel plate type flexible hinge (1-3), the second parallel plate type flexible hinge (1-4), three groups of flexible hinges (1-5) on the described underlying platform (1) and be connected boss (1-6), three groups of identical first piezoelectric actuators (8) and tightening part (9);
Described upper platform (2) is connected with the motion platform (1-2) of underlying platform (1) by three groups of identical second piezoelectric actuators (6), transmission component (5), holding screw (4), attachment screw (3), lock-screws (7), and it is whole to form a motion;
Three groups of flexible hinges (1-5) overlap other two groups of axis of symmetry both sides that are arranged in second pair of parallel-plate flexible hinge (1-4) symmetrically with one group center line in being connected boss (1-6) with the symmetrical center line of first pair of parallel-plate flexible hinge (1-3); The tightening part (9) of three group of first piezoelectric actuator (8) by separately with is connected the interior driver element of three groups of surface levels of boss (1-6) and flexible hinge (1-5) formation;
Three group of second piezoelectric actuator (6) that vertical direction drives is triangular arranged, its lower end is embedded on the motion platform (1-2) of underlying platform (1) by lock-screw (7), the upper end connects transmission component (5), links into an integrated entity with upper platform (2) by holding screw (4) and attachment screw (3); Form three groups of interior driver elements of vertical plane by attachment screw (3), holding screw (4), transmission component (5), second piezoelectric actuator (6), lock-screw (7).
2, precision positioning table with six degrees of freedom according to claim 1, the center section (5-3) that it is characterized in that described transmission component (5) is the spherical pair flexible hinge.
3, precision positioning table with six degrees of freedom according to claim 1 is characterized in that described three groups of flexible hinges (1-5) form is the revolute pair flexible hinge.
4, according to each described precision positioning table with six degrees of freedom of claim 1 to 3, eight elastic plates measure-alike that it is characterized in that first pair of parallel-plate flexible hinge (1-3) on the motion platform (1-2) and second pair of parallel-plate flexible hinge (1-4), equal stiffness, the double-flexibility parallel conductive of forming both direction is to 4 linkages.
CNB2005100243004A 2005-03-10 2005-03-10 Precision positioning table with six degrees of freedom Expired - Fee Related CN100340378C (en)

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009003348A1 (en) * 2007-06-29 2009-01-08 Tsinghua University Micro displacement worktable with six degrees of freedom
CN101241314B (en) * 2008-03-11 2010-06-23 上海微电子装备有限公司 6 freedom degrees precision positioning station capable of compensating Z-direction position
CN102163572A (en) * 2011-03-10 2011-08-24 清华大学 Six-degree-of-freedom locating device
CN101648686B (en) * 2009-09-07 2011-11-02 江苏海鹏特种车辆有限公司 Platform with six degrees of freedom of motion
CN102324253A (en) * 2011-06-03 2012-01-18 中国科学院光电技术研究所 Parallel micro-positioning platform based on driving of piezoelectric ceramic driver and micro-positioning platform system
CN102680741A (en) * 2012-05-21 2012-09-19 中国科学院电工研究所 Metering type scanning electronic microscope imaging control system and scanning imaging method
CN102794662A (en) * 2012-08-10 2012-11-28 安徽工程大学 Six-degree-of-freedom position posture full-decoupling adjustable clamp
CN102969031A (en) * 2012-12-12 2013-03-13 中国科学院光电技术研究所 Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable
CN103252761A (en) * 2013-04-28 2013-08-21 合肥工业大学 Long-stroke two-dimensional nano worktable system with angle compensation function
CN104090359A (en) * 2014-07-10 2014-10-08 中国科学院国家天文台南京天文光学技术研究所 Five-freedom-degree auxiliary lens adjusting mechanism of astronomical telescope working in extreme environment
CN104280857A (en) * 2014-09-03 2015-01-14 上海大学 Combining-optics prism parallel connection micro-motion device for laser gyroscope combining-optics assembly
CN105643230A (en) * 2016-03-14 2016-06-08 北京工业大学 Multiple-degree-of-freedom valve industrial assembly platform
CN104280857B (en) * 2014-09-03 2017-01-04 上海大学 A kind of light-combining prism parallel micromotion device closing light assembling for laser gyro
CN109687757A (en) * 2019-01-30 2019-04-26 宁波大学 Six-degree-of-freedom Large Stroke is without the big-and-middle empty string parallel piezoelectric micromotion platform of coupling
CN109949856A (en) * 2019-03-15 2019-06-28 天津理工大学 A kind of Modularized 6 freedom degree precise jiggle mechanism based on flexible hinge

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325421Y2 (en) * 1986-03-13 1991-06-03
CN100364724C (en) * 2003-06-17 2008-01-30 合肥工业大学 Single-layer structure micromotion workbench with six degrees of freedom and its parallel control mode
US20050004689A1 (en) * 2003-07-02 2005-01-06 Ming-Chang Shih Design and control method of a micro-nanometer precision servo pneumatic X-Y positioning table
CN1588556A (en) * 2004-07-30 2005-03-02 中国科学院上海光学精密机械研究所 Five freedom degree precision positioning platform
CN2782326Y (en) * 2005-03-10 2006-05-24 中国科学院上海光学精密机械研究所 Six freedom precision positioning working table

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009003348A1 (en) * 2007-06-29 2009-01-08 Tsinghua University Micro displacement worktable with six degrees of freedom
US8084897B2 (en) 2007-06-29 2011-12-27 Tsinghua University Micro stage with 6 degrees of freedom
CN101241314B (en) * 2008-03-11 2010-06-23 上海微电子装备有限公司 6 freedom degrees precision positioning station capable of compensating Z-direction position
CN101648686B (en) * 2009-09-07 2011-11-02 江苏海鹏特种车辆有限公司 Platform with six degrees of freedom of motion
CN102163572A (en) * 2011-03-10 2011-08-24 清华大学 Six-degree-of-freedom locating device
CN102163572B (en) * 2011-03-10 2012-10-10 清华大学 Six-degree-of-freedom locating device
CN102324253A (en) * 2011-06-03 2012-01-18 中国科学院光电技术研究所 Parallel micro-positioning platform based on driving of piezoelectric ceramic driver and micro-positioning platform system
CN102680741A (en) * 2012-05-21 2012-09-19 中国科学院电工研究所 Metering type scanning electronic microscope imaging control system and scanning imaging method
CN102794662A (en) * 2012-08-10 2012-11-28 安徽工程大学 Six-degree-of-freedom position posture full-decoupling adjustable clamp
CN102969031B (en) * 2012-12-12 2015-06-17 中国科学院光电技术研究所 Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable
CN102969031A (en) * 2012-12-12 2013-03-13 中国科学院光电技术研究所 Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable
CN103252761A (en) * 2013-04-28 2013-08-21 合肥工业大学 Long-stroke two-dimensional nano worktable system with angle compensation function
CN103252761B (en) * 2013-04-28 2015-11-11 合肥工业大学 There is the Long Distances two-dimensional nano work system of angle compensation function
CN104090359A (en) * 2014-07-10 2014-10-08 中国科学院国家天文台南京天文光学技术研究所 Five-freedom-degree auxiliary lens adjusting mechanism of astronomical telescope working in extreme environment
CN104280857A (en) * 2014-09-03 2015-01-14 上海大学 Combining-optics prism parallel connection micro-motion device for laser gyroscope combining-optics assembly
CN104280857B (en) * 2014-09-03 2017-01-04 上海大学 A kind of light-combining prism parallel micromotion device closing light assembling for laser gyro
CN105643230A (en) * 2016-03-14 2016-06-08 北京工业大学 Multiple-degree-of-freedom valve industrial assembly platform
CN105643230B (en) * 2016-03-14 2018-03-09 北京工业大学 A kind of multiple degrees of freedom valve industry mounting plate
CN109687757A (en) * 2019-01-30 2019-04-26 宁波大学 Six-degree-of-freedom Large Stroke is without the big-and-middle empty string parallel piezoelectric micromotion platform of coupling
CN109687757B (en) * 2019-01-30 2020-04-17 宁波大学 Six-freedom-degree large-stroke non-coupling large-hollow series-parallel piezoelectric micro-motion platform
CN109949856A (en) * 2019-03-15 2019-06-28 天津理工大学 A kind of Modularized 6 freedom degree precise jiggle mechanism based on flexible hinge
CN109949856B (en) * 2019-03-15 2021-01-29 天津理工大学 Modularized six-degree-of-freedom precise micro-motion mechanism based on flexible hinge

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